A detection device and a detection method thereof

Abstract

The present invention discloses a detection device and a detection method thereof, wherein the detection device comprises at least one detection unit, the detection unit comprises an ion-sensitive membrane, a first electrode, a first capacitor, a second capacitor and a first transistor, and also comprises a signal input terminal, a power supply terminal and a current output terminal; the capacitance of the first capacitor is greater than the capacitance of the second capacitor; the ion-sensitive membrane covers the first electrode, the first electrode is electrically connected to the first plate of the first capacitor, the second plate of the first capacitor, the first plate of the second capacitor and the gate of the first transistor are electrically connected, and the second plate of the second capacitor is connected to the signal input terminal; the first pole of the first transistor is connected to the power supply terminal, and the second pole is connected to the current output terminal. The technical method provided by the present invention can solve the problem in the prior art that the detection device is affected by the preparation process and environmental factors, such as the change of the threshold voltage of the transistor, and other factors that affect the detection structure, and improve the detection accuracy of the detection device on the basis of avoiding the threshold voltage of the transistor being affected by the environment.

Description

Technical Field

[0001] The embodiments of the present invention relate to the field of semiconductor microelectronics technology, and in particular to a detection device and a detection method thereof. Background Art

[0002] Ion sensitive field effect transistor (ISFET) is a microelectronic ion selective sensitive element with dual characteristics of electrochemistry and transistor. ISFET has the advantages of small sensitive area, fast response, high sensitivity, low output impedance, small sample consumption, easy batch manufacturing and low cost. It has been applied in clinical, food, environment, military and even robotics, especially in the field of biochemical sensors, and will play an increasingly important role.

[0003] The existing ISFET uses surface treatment technology to enable its sensitive membrane to adsorb specific ions or molecules. These charged ions or molecules will change the channel conductivity of the ISFET. By monitoring the change in the channel conductivity of the ISFET through an external circuit, the concentration of ions or molecules in the test solution can be indirectly known. For example, the substrate structure of a dual-gate ion-sensitive field-effect transistor used for pH detection, when the ISFET surface has an ion-sensitive layer, when the device is immersed in the solution to be tested, the surface charge of the ion-sensitive layer changes according to the different / changing concentrations of hydrogen ions (H+), thereby affecting the threshold voltage of the ISFET. Its pH value can be determined by testing its threshold voltage or output signal changes, and by setting different ion-sensitive membranes on the surface, the corresponding other ion concentrations of the surface liquid can also be obtained through similar principles. In the prior art, the use of ISFET can realize the detection of pH, metal ions, blood sugar, genes, proteins, etc.

[0004] However, ISFET currently has problems such as poor stability and being easily affected by the environment. For example, due to environmental factors (light, temperature, etc.) and fluctuations in its own characteristics, the relative threshold voltage is prone to change, and the output signal itself will fluctuate greatly, making it difficult to calibrate, resulting in large detection errors. Summary of the invention

[0005] The present invention provides a detection device and a detection method thereof, which improve the detection accuracy of the detection device on the basis of avoiding the threshold voltage of the transistor being affected by the environment.

[0006] In a first aspect, an embodiment of the present invention provides a detection device, comprising at least one detection unit, wherein the detection unit comprises an ion sensitive membrane, a first electrode, a first capacitor, a second capacitor and a first transistor, and further comprises a signal input terminal, a power supply terminal and a current output terminal; the capacitance of the first capacitor is greater than the capacitance of the second capacitor;

[0007] The ion sensitive membrane covers the first electrode, the first electrode is electrically connected to the first plate of the first capacitor, the second plate of the first capacitor, the first plate of the second capacitor and the gate of the first transistor are electrically connected, and the second plate of the second capacitor is connected to the signal input end; the first electrode of the first transistor is connected to the power supply end, and the second electrode is connected to the current output end.

[0008] In a second aspect, an embodiment of the present invention further provides a detection method of a detection device, which is applied to the detection device as described in any one of the first aspects, and the detection method includes:

[0009] Supplying power to the first transistor through the power supply end, detecting a standard solution with a known ion concentration using the first electrode and the ion sensitive membrane to generate an initial ion sensitive signal, and inputting an initial voltage at the signal input end to turn on the first transistor and generate an initial on-current;

[0010] Supplying power to the first transistor through the power supply end, detecting the solution to be tested using the first electrode and the ion sensitive membrane, generating a detection ion sensitive signal, and adjusting the detection voltage inputted by the signal input end so that the first transistor is turned on, and the on-current is the initial on-current;

[0011] Determining a change in input voltage according to the initial voltage and the detection voltage;

[0012] Determining an ion sensitive signal change amount between an initial ion sensitive signal and a detected ion sensitive signal according to an amount of change in the input voltage and a capacitance ratio of the first capacitor to the second capacitor;

[0013] The ion concentration of the solution to be tested is calculated according to the change in the ion sensitive signal, the ion concentration of the standard solution, and the known relationship between the ion sensitive signal and the ion concentration of the solution.

[0014] The embodiment of the present invention provides a detection device, which includes at least one detection unit, and the detection unit includes an ion-sensitive membrane, a first electrode, a first capacitor, a second capacitor and a first transistor, and also includes a signal input terminal, a power supply terminal and a current output terminal. Specifically, the ion-sensitive membrane covers the first electrode, the first electrode is electrically connected to the first plate of the first capacitor, the second plate of the first capacitor, the first plate of the second capacitor and the gate of the first transistor are electrically connected, and the second plate of the second capacitor is connected to the signal input terminal; the first pole of the first transistor is connected to the power supply terminal, and the second pole is connected to the current output terminal. That is, by ensuring that the current output terminal outputs a stable current value, the signal connected to the signal input terminal is adjusted, and the liquid to be detected can be detected based on the adjustment amplitude. At the same time, the capacitance of the first capacitor is greater than the capacitance of the second capacitor, and the signal connected to the signal input terminal is amplified, which facilitates the detection device to detect the concentration of the liquid to be detected. On the basis of avoiding the threshold voltage of the transistor in the detection device being affected by the environment, it is also ensured that the detection device is not affected by the preparation process, thereby improving the detection accuracy of the detection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the exemplary embodiments of the present invention, the following briefly introduces the drawings required to describe the embodiments. Obviously, the drawings introduced are only drawings of a part of the embodiments to be described in the present invention, rather than all the drawings. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0016] Figure 1 It is a schematic diagram of the circuit structure of a device for detecting pH value used in the related art;

[0017] Figure 2 yes Figure 1 Ids-Vgs characteristic curve corresponding to the detection device in;

[0018] Figure 3 is a schematic structural diagram of a detection device provided by an embodiment of the present invention;

[0019] Figure 4 yes Figure 3 A schematic diagram of a cross-sectional structure of a detection device provided along a cross-sectional line AA';

[0020] Figure 5 yes Figure 3 Another schematic diagram of the cross-sectional structure of the detection device provided along the cross-sectional line AA';

[0021] Figure 6 is a circuit diagram of a detection unit provided by an embodiment of the present invention;

[0022] Figure 7is a circuit diagram of another detection unit provided by an embodiment of the present invention;

[0023] Figure 8 yes Figure 7 Ids-Vgs characteristic curve corresponding to the detection device in;

[0024] Fig. 9 is a circuit diagram of another detection unit provided by an embodiment of the present invention;

[0025] Fig.10 is a schematic structural diagram of another detection device provided by an embodiment of the present invention;

[0026] Fig.11 is a schematic structural diagram of another detection device provided by an embodiment of the present invention;

[0027] Fig.12 yes Figure 3 A schematic diagram of another cross-sectional structure of the detection device provided along the cross-sectional line AA';

[0028] Fig.13 It is a flow chart of a detection method provided by an embodiment of the present invention;

[0029] Fig.14 is a flow chart of another detection method provided by an embodiment of the present invention;

[0030] Fig.15 is a flow chart of another detection method provided by an embodiment of the present invention;

[0031] Fig.16 It is a flow chart of another detection method provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0032] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0033] In related technologies, such as Figure 1 As shown, Figure 1 This is a schematic diagram of the circuit structure of a device for detecting pH value used in the relevant technology. Figure 1The working principle of the circuit of the dual-gate ion-sensitive field effect transistor for pH detection is as follows: Point P' in the figure is the potential point to be detected, and its potential is jointly affected by the reference electrode (usually grounded) and the ion concentration of the solution to be tested. At the same time, the potential of point P' acts as the top gate of the ISFET device 00' to modulate its threshold voltage Vth'. During the detection process, it is equivalent to scanning the Vgs voltage of the device 00'. By detecting the output current of the device 00', its characteristic curve can be obtained, such as Figure 2 As shown, Figure 2 yes Figure 1 The Ids-Vgs characteristic curve corresponding to the detection device in the embodiment, curve L1 corresponds to a solution with a pH value of 5, curve L2 corresponds to a solution with a pH value of 6, and curve L3 corresponds to a solution with a pH value of 7. When the ion concentration (such as Figure 2 When the curves in the figure represent different pH values) change, the potential at point P' changes by ΔVp', and the threshold voltage Vth' (e.g. Figure 2 Vth1', Vth2', Vth3') in the above diagram drift ΔVth', ΔVth' = ΔVp' × Cis / Cbg, Cis is the top gate insulation layer capacitance of the ISFET device 00', Cbg is the bottom gate insulation layer capacitance of the ISFET device 00', so that the corresponding characteristic curve changes. The same current I0( Figure 2 The corresponding voltage value changes ΔVth' (shown by the dashed line in the middle). Therefore, the change in the potential at point P' can ultimately be used to obtain the change in ion concentration. However, since the ISFET's own characteristics are affected by many factors such as the environment and process, the output signal itself has large fluctuations and needs to be calibrated before each test, which is not conducive to batch use. Even if it is calibrated before testing, the test results are not reliable enough.

[0034] To solve the above technical problems, an embodiment of the present invention provides a detection device, which includes at least one detection unit, the detection unit includes an ion-sensitive membrane, a first electrode, a first capacitor, a second capacitor and a first transistor, and also includes a signal input terminal, a power supply terminal and a current output terminal; the capacitance of the first capacitor is greater than the capacitance of the second capacitor; the ion-sensitive membrane is covered on the first electrode, the first electrode is electrically connected to the first plate of the first capacitor, the second plate of the first capacitor, the first plate of the second capacitor and the gate of the first transistor are electrically connected, and the second plate of the second capacitor is connected to the signal input terminal; the first electrode of the first transistor is connected to the power supply terminal, and the second electrode is connected to the current output terminal. That is, by ensuring that the current output terminal outputs a stable current value, the signal connected to the signal input terminal is adjusted, and the liquid to be detected can be detected based on the adjusted amplitude. At the same time, the capacitance of the first capacitor is greater than the capacitance of the second capacitor, that is, the signal connected to the signal input terminal can be amplified, which is convenient for the detection device to detect the concentration of the liquid to be detected. On the basis of avoiding the threshold voltage of the transistor in the detection device affected by the environment, it is also ensured that the detection device is not affected by the preparation process, thereby improving the detection accuracy of the detection device.

[0035] The above is the core idea of ​​the present invention. The technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] Figure 3 is a schematic structural diagram of a detection device provided by an embodiment of the present invention, Figure 4 yes Figure 3 A schematic diagram of a cross-sectional structure of a detection device provided along the cross-sectional line AA', Figure 5 yes Figure 3 Another schematic diagram of the cross-sectional structure of the detection device provided along the cross-sectional line AA', Figure 6 is a circuit diagram of a detection unit provided by an embodiment of the present invention, with reference to Figures 3 to 6As shown, the detection device 10 provided in the embodiment of the present invention includes at least one detection unit 100, and the detection unit 100 includes an ion sensitive membrane 110, a first electrode 120, a first capacitor C1, a second capacitor C2 and a first transistor 130, and also includes a signal input terminal Vx, a power supply terminal Vd and a current output terminal Id; the capacitance of the first capacitor C1 is greater than the capacitance of the second capacitor C2; the ion sensitive membrane 110 is covered on the first electrode 120, the first electrode 120 is electrically connected to the first electrode plate 141 of the first capacitor C1, the second electrode plate 142 of the first capacitor C1, the first electrode plate 143 of the second capacitor C2 and the gate 131 of the first transistor 130 are electrically connected, and the second electrode plate 144 of the second capacitor C2 is connected to the signal input terminal Vx; the first electrode 132 of the first transistor 130 is connected to the power supply terminal Vd, and the second electrode 133 is connected to the current output terminal Id.

[0037] The detection device 10 can be used to detect the concentration of the liquid to be detected (not specifically shown in the figure) dripped into the detection device 10. Specifically, the detection device 10 includes at least one detection unit 100, and the embodiment of the present invention does not specifically limit the number of the detection units 100. The detection unit 100 is based on the acquisition of the hydrogen ion concentration in the liquid to be detected and the feedback of the corresponding electrical signal, that is, the determination of the hydrogen ion concentration in the liquid to be detected, that is, the pH value determination, is realized through the detection unit 100, and then the determination of the concentration of the liquid to be detected is realized, thereby realizing the detection function of the detection device 10.

[0038] Specifically, the detection unit 100 includes an ion-sensitive membrane 110, and the liquid to be detected by the detection device 10 is dropped onto the ion-sensitive membrane 110, and the ion-sensitive membrane 110 can generate a corresponding signal based on the concentration of hydrogen ions in the liquid to be detected. Figure 4 and Figure 5 As shown, the ion sensitive membrane 110 is covered on the first electrode 120, that is, the test signal generated by the test liquid placed on the ion sensitive membrane 110 is transmitted to the first electrode 120 through the ion signal terminal Vp, and is transmitted to the detection unit 100 through the first electrode 120, so that the detection device 10 can obtain the hydrogen ion concentration in the test liquid.

[0039] For further reference, Figures 4 to 6As shown, the detection unit 100 also includes a first capacitor C1 and a second capacitor C2, and the first plate 141 in the first capacitor C1 is electrically connected to the first electrode 120, that is, the first capacitor C1 obtains the signal to be measured generated on the ion sensitive membrane 110 through the first electrode 120. At the same time, the second plate 144 of the second capacitor C2 is connected to the signal input terminal Vx, and the signal input terminal Vx inputs an adjustable signal, that is, the second capacitor C2 obtains an adjustable signal that can be adjusted. Specifically, the detection unit 100 also includes a first transistor 130, and the gate 131 of the first transistor 130 is electrically connected to the second plate 142 of the first capacitor C1 and the first plate 143 of the second capacitor C2, that is, the signal to be measured obtained by the first capacitor C1 and the adjustable signal obtained by the second capacitor C2 are both transmitted to the first transistor 130, and then the channel of the gate 131 in the first transistor 130 is turned on, allowing the first pole 132 and the second pole 133 in the first transistor 130 to transmit current.

[0040] Further, the first electrode 132 in the first transistor 130 is connected to the power supply terminal Vd, the second electrode 133 is connected to the current output terminal Id, and the gate 131 of the first transistor 130 is turned on by receiving the test signal obtained by the first capacitor C1 and the adjustable signal obtained by the second capacitor C2, that is, the first electrode 132 and the second electrode 133 are turned on, so that the current output by the power supply terminal Vd is transmitted to the current output terminal Id. Specifically, the first electrode 132 and the second electrode 133 in the first transistor 130 can be a source and a drain, and the embodiment of the present invention does not limit the specific reference.

[0041] Specifically, in order to ensure accurate detection of the solution to be tested, the detection device 10 avoids the first transistor 130 being affected by the hydrogen ion concentration in the solution to be tested measured by the ion sensitive layer 110, thereby causing errors in the detection results of the detection unit 10, or the first transistor 130 being affected by the preparation process, resulting in inaccurate detection results. The detection device 10 does not directly contact the first transistor 130 with the ion sensitive layer 110, and by adjusting the adjustable signal input by the signal input terminal Vx, ensures that the first transistor 130 is always in the same stable state, that is, ensures that the current output terminal Id electrically connected to the second pole 133 always outputs a fixed current. At the same time, the ion sensitive membrane 110 generates a corresponding signal based on the concentration of hydrogen ions in the liquid to be tested to reflect the concentration of hydrogen ions, that is, the signal is a fixed signal. Therefore, based on the adjustment range of the adjustable signal input to the signal input terminal Vx, the signal to be tested generated by the ion sensitive membrane 110 can be fed back, that is, the concentration of hydrogen ions in the liquid to be tested can be fed back, so as to realize the detection of the hydrogen ion concentration of the liquid to be tested by the detection device 10. For the prior art, the concentration of hydrogen ions in the solution to be tested is indirectly obtained through the change of the threshold voltage of the transistor, and because the characteristics of the transistor itself are affected by many factors such as the environment and process, the output signal itself will have large fluctuations, and it needs to be calibrated before each detection, which is not conducive to batch use, and even if it is calibrated before detection, the detection result is not reliable enough. However, the detection device 10 provided in the embodiment of the present invention can ensure the stability of the first transistor 130, and does not obtain the concentration of hydrogen ions in the solution to be tested based on the threshold voltage. While ensuring the stable operation of the first transistor 130, the concentration of hydrogen ions in the solution to be tested can be directly determined by obtaining the adjustable signal, that is, the input signal of the signal input terminal Vx, avoiding the influence of indirect factors, thereby improving the accuracy of detection by the detection device 10.

[0042] Specifically, based on the first capacitor C1, the second capacitor C2, the adjustable signal input at the signal input terminal Vx and the signal to be tested Vp generated on the ion sensitive membrane 110, in order to ensure that the current output terminal Id always outputs a fixed current, the formula is satisfied: △Vx=△Vp*C1 / C2, wherein △Vp is the signal to be tested, that is, the change value of the hydrogen ion concentration of the test liquid to be tested, △Vx is the change amount of the adjustable signal, and C1 and C2 represent the capacitance of the first capacitor C1 and the second capacitor C2. Further, the change value and change amount of the above signal are based on the difference between the signal generated by the detection device 10 before the detection of the test liquid and the signal generated by the detection of the test liquid, and the signal generated by the standard solution is used as the calibration value, and the hydrogen ion concentration of the standard solution is known. That is, by obtaining the change amount of the adjustable signal, the hydrogen ion concentration of the test liquid can be obtained, and the detection device 10 eliminates the error factors that may affect the detection accuracy of the first transistor 130, thereby ensuring the accuracy of the detection result.

[0043] Furthermore, the capacitance of the first capacitor C1 is greater than the capacitance of the second capacitor C2. Based on the above calculation formula, it can be ensured that the change value of the signal to be measured is amplified, and the amplification factor is the ratio of the capacitance of the first capacitor C1 to the capacitance of the second capacitor C2. That is, the detection result is amplified by adjusting the capacitance of the capacitor, which can further improve the accuracy and precision of the detection result of the detection device 10.

[0044] In summary, an embodiment of the present invention provides a detection device, in which an ion-sensitive membrane is covered on a first electrode, the first electrode is electrically connected to the first plate of the first capacitor, the second plate of the first capacitor, the first plate of the second capacitor and the gate of the first transistor are electrically connected, and the second plate of the second capacitor is connected to the signal input terminal; the first electrode of the first transistor is connected to the power supply terminal, and the second electrode is connected to the current output terminal. That is, by ensuring that the current output terminal outputs a stable current value, the signal connected to the signal input terminal is adjusted, and the liquid to be detected can be detected based on the adjustment amplitude. At the same time, the capacitance of the first capacitor is greater than the capacitance of the second capacitor, and the signal connected to the signal input terminal is amplified, which is convenient for the detection device to detect the concentration of the liquid to be detected. On the basis of avoiding the threshold voltage of the transistor in the detection device that is affected by the environment, it is also ensured that the detection device is not affected by the preparation process, thereby improving the detection accuracy of the detection device.

[0045] Figure 7 is a circuit diagram of another detection unit provided in an embodiment of the present invention, Figure 8 yes Figure 7 The Ids-Vgs characteristic curve corresponding to the detection device in the reference Figure 7 and Figure 8 As shown, the detection unit 100 also includes a second transistor 150, a fixed potential signal terminal Vref and a reset control signal terminal Vrst; the gate 151 of the second transistor 150 is connected to the reset control signal terminal Vrst, the first electrode 152 of the second transistor 150 is connected to the fixed potential signal terminal Vref, and the second electrode 153 of the second transistor 150 is connected to the gate 131 of the first transistor 130.

[0046] Specifically, the detection unit 100 also includes a second transistor 150, and the second transistor 150 includes a gate 151, a first electrode 152, and a second electrode 153, which are a source and a drain. In addition, the second electrode 153 of the second transistor 150 is connected to the gate 131 of the first transistor 130, that is, the second transistor 150 provides a gate voltage for the gate 131 of the first transistor 130. Specifically, the gate 151 of the second transistor 150 is connected to the reset control signal terminal Vrst, and the first electrode 152 of the second transistor 150 is connected to the fixed potential signal terminal Vref, that is, the reset control signal terminal Vrst outputs a reset signal to the second transistor 150, and the gate 151 of the second transistor 150 is turned on by receiving the reset signal, that is, the first electrode 152 and the second electrode 153 are turned on and transmit the fixed signal sent by the fixed potential signal terminal Vref, and the fixed signal transmitted in the second transistor 150 is transmitted to the first transistor 130 through the second electrode 153.

[0047] Furthermore, the detection unit 10 includes a calibration phase and a detection phase. In the detection phase, the hydrogen ion concentration of the liquid to be tested is detected, and in the calibration phase, the current output by the current output terminal Id in the first transistor 130 is calibrated to be the current output when the gate voltage is in the subthreshold interval. Specifically, by adding the second transistor 150, a fixed potential can be provided to the gate of the first transistor 130, so as to control the gate-source voltage of the first transistor 130 to be in the subthreshold interval of the transistor, that is, it can ensure that the first transistor 130 operates in the subthreshold interval. At this time, the current output by the current output terminal Id is the calibration current. Therefore, in the test phase, by adjusting the signal input by the signal input terminal Vx, the current output by the current output terminal Id is the calibration current, which can ensure that the first transistor 130 operates in the subthreshold interval. Exemplarily, refer to Figure 8 As shown, the horizontal axis is the voltage difference between the gate 131 and the source in the first transistor 130, that is, the voltage difference between the gate 131 and the first electrode 132, that is, the source, and the vertical axis is the current output by the current output terminal Id. Figure 8As shown, when the voltage is in the subthreshold interval, that is, the area between Vgs1 and Vgs2 in the figure, the current output by the current output terminal Id has a large range of change, that is, the current is significantly affected by the voltage in this area. The fixed signal transmitted by the fixed potential signal terminal Vref is transmitted to the first transistor 130 through the second transistor 150, and the voltage value in the first transistor 130 is adjusted to a certain potential in the subthreshold interval (the embodiment of the present invention does not limit the specific potential), which can ensure that the current output by the first transistor 130 is significantly affected by the voltage, so that the calibration current determined in the calibration stage can be output by controlling the current output terminal Id in the test stage to ensure the accuracy of the signal input by the signal input terminal Vx, that is, it can be accurately converted into the change amount of the signal to be measured, and the change value of the hydrogen ion concentration of the liquid to be measured can be determined, thereby improving the detection sensitivity of the detection device 10 and improving the detection accuracy of the detection device 10.

[0048] Fig. 9 is a circuit diagram of another detection unit provided in an embodiment of the present invention, referring to Fig. 9 As shown, the detection unit 100 also includes a third transistor 160 and a scan signal terminal Vgn; the gate 161 of the third transistor 160 is connected to the scan signal terminal Vgn, and the first electrode 162 of the third transistor 160 and the second electrode 163 of the third transistor 160 are respectively connected to the second electrode 133 of the first transistor 130 and the current output terminal Id.

[0049] Specifically, the detection unit 100 also includes a third transistor 160, which includes a gate 161, a first electrode 162 and a second electrode 163, and the first electrode 162 of the third transistor 160 and the second electrode 163 of the third transistor 160 are respectively connected to the second electrode 133 of the first transistor 130 and the current output terminal Id, that is, the premise for ensuring that the first transistor 130 is turned on and outputs current is that the third transistor 160 is turned on, and the turning on of the third transistor 160 ensures that the second electrode 133 and the current output terminal Id in the first transistor 130 are turned on, so that the first transistor 130 outputs current at the current output terminal Id.

[0050] Furthermore, the gate 161 of the third transistor 160 is connected to the scan signal terminal Vgn, that is, the scan signal is transmitted to the gate 161 in the third transistor 160 through the scan signal terminal Vgn, that is, the gate 161 is turned on, and then the third transistor 160 is turned on, ensuring that the first transistor 130 normally outputs current at the current output terminal Id.

[0051] Exemplarily, when the detection device 10 has multiple detection units 100, by setting a third transistor 160 and controlling the on and off of the third transistor 160, time-sharing control of the multiple detection units 100 is achieved, thereby improving the detection efficiency of the detection device 10, and the detection device 10 is better suitable for the detection of the liquid to be detected.

[0052] Fig.10 is a schematic diagram of the structure of another detection device provided by an embodiment of the present invention, referring to Fig.10 As shown, the detection device 10 includes a plurality of detection units 100 arranged in an array; the current output terminals Id of all the detection units 100 are connected to each other, the signal input terminals Vx of all the detection units 100 are connected to each other, the power supply terminals Vd in the plurality of detection units 100 in the same column are connected to each other, and the scanning signal terminals Vgn in the plurality of detection units 100 in the same row are connected to each other.

[0053] Specifically, refer to Fig.10 As shown, the detection device 10 includes a plurality of detection units 100 arranged in rows and columns. The embodiment of the present invention does not specifically limit the specific arrangement of the detection units 100. In the detection device 10 having a plurality of detection units 100, the signal input terminals Vx of all the detection units 100 are connected to each other ( Fig.10 (not specifically shown in the figure), so that the detection device 10 can acquire and analyze the adjustable signal inputted from the signal input terminal Vx to accurately determine the hydrogen ion concentration of the solution to be detected.

[0054] Specifically, refer to Fig.10 As shown, the power supply terminals Vd in the multiple detection units 100 in the same column are connected to each other, and the scanning signal terminals Vgn in the multiple detection units 100 in the same row are connected to each other, which facilitates the step-by-step control of the multiple detection units 100 by the detection device 10, thereby improving the detection accuracy of the detection device 10. Furthermore, in this embodiment, the current output terminals Id of the detection units in the same column are connected to the same current output wiring, and the current output wirings of the detection units 100 in each column are connected to the same total current output wiring, so that the output of the current of all the detection units 10 can be realized by only one port, thereby reducing the current output ports, simplifying the complexity of the receiving device, and improving the integration of the receiving device.

[0055] Exemplary, reference Fig.10As shown, if the first row scanning signal terminal Vgn(1) in the scanning signal terminal Vgn is turned on, the scanning signal is provided to the detection unit 100 in this row. Among the multiple detection units 100 connected to the first row scanning signal terminal Vgn(1), if the current output terminal Id of the detection unit 100 whose first column power supply terminal Vd(1) in the power supply terminal Vd is turned on outputs current, and the current output terminal Id of the detection unit 100 whose second column power supply terminal Vd(2) in the power supply terminal Vd is not turned on does not output current. At the same time, if the second row scanning signal terminal Vgn(2) in the scanning signal terminal Vgn is not turned on, the scanning signal is not provided to the detection unit 100 in this row, and the current output terminal Id of the detection unit 100 does not output current. In other words, when the scanning signal terminal Vgn and the power supply terminal Vd of the detection unit 100 are both turned on, the current output terminal Id of the detection unit 100 outputs current, and the adjustable signal input to the signal input terminal Vx is adjusted according to the output current value to ensure that the current value is the expected calibration value, and the concentration of hydrogen ions in the liquid to be tested is determined according to the adjusted adjustable signal. Based on the above-mentioned detection unit 100 and terminal setting method, the detection units 100 at different positions in the detection device 10 can detect the liquid to be tested one by one in time and area, improve the detection accuracy of the detection device 10, and avoid the waste of detection units 100 working due to unnecessary detection.

[0056] Fig.11 is a schematic diagram of the structure of another detection device provided by an embodiment of the present invention, referring to Fig.11 As shown, the detection device 10 includes a plurality of detection units 100 arranged in an array; the power supply terminals Vd of all the detection units 100 are connected to each other, the signal input terminals Vx of all the detection units 100 are connected to each other, the current output terminals Id in the plurality of detection units 100 in the same column are connected to each other, and the scanning signal terminals Vgn in the plurality of detection units 100 in the same row are connected to each other.

[0057] Specifically, refer to Fig.11 As shown, the detection device 10 includes a plurality of detection units 100 arranged in rows and columns. The embodiment of the present invention does not specifically limit the specific arrangement of the detection units 100. In the detection device 10 having a plurality of detection units 100, the signal input terminals Vx of all the detection units 100 are connected to each other ( Fig.11 (not specifically shown in the figure), so that the detection device 10 can acquire and analyze the adjustable signal inputted from the signal input terminal Vx to accurately determine the hydrogen ion concentration of the solution to be detected.

[0058] Specifically, refer to Fig.11As shown, the current output terminals Id in the multiple detection units 100 in the same column are connected to each other, and the scanning signal terminals Vgn in the multiple detection units 100 in the same row are connected to each other, which facilitates the detection device 10 to control the detection units 100 in multiple rows step by step, thereby improving the detection accuracy and detection efficiency of the detection device 10. Furthermore, in this embodiment, the power supply terminals Vd of the detection units in the same column are connected to the same power supply line, and the power supply terminals Vd of the detection units 100 in each column are connected to the same total power supply output line, so that the power supply of all the detection units 10 can be realized by only one port, thereby reducing the output ports of the power supply, simplifying the complexity of the receiving device, and improving the integration of the receiving device.

[0059] Exemplary, reference Fig.11 As shown, the power supply terminals Vd of all the detection units 100 are connected to each other, that is, the power supply terminal Vd continuously provides electric energy to the detection units 100. If the first row scanning signal terminal Vgn(1) in the scanning signal terminal Vgn is turned on, a scanning signal is provided to the detection units 100 in this row, that is, the current output terminal Id of the detection units 100 in this row outputs current. At the same time, the second row scanning signal terminal Vgn(2) in the scanning signal terminal Vgn is not turned on, and no scanning signal is provided to the detection units 100 in this row, then the current output terminal Id of the detection unit 100 does not output current. In other words, when the power supply terminal Vd of the detection unit 100 is turned on, if the scanning signal terminal Vgn provides a scanning signal, then the current output terminal Id of the detection unit 100 outputs current, and the adjustable signal input to the signal input terminal Vx is adjusted according to the output current value to ensure that the current value is the expected calibration value, and the concentration of hydrogen ions in the liquid to be tested is determined according to the adjusted adjustable signal. Based on the above-mentioned setting method of the detection unit 100 and the terminal, the detection units 100 in different position rows in the detection device 10 can detect the liquid to be tested row by row in a time-sharing and zoned manner, thereby improving the detection accuracy of the detection device 10 and avoiding the waste of the detection unit 100 working in places that do not need to be detected.

[0060] For further reference, Figure 4 and Figure 5 As shown, the area of ​​the first capacitor C1 is greater than the area of ​​the second capacitor C2.

[0061] Specifically, refer to Figure 4 and Figure 5As shown, along the direction parallel to the detection unit 100, the corresponding size of the first plate 141 and the second plate 142 in the first capacitor C1 is L1, and the corresponding size of the first plate 143 and the second plate 144 in the second capacitor C2 is L2, and L1 is greater than L2. Based on the adjustment of the relative size of the capacitor substrate, the adjustment of the capacitance size is achieved, that is, the capacitance of the first capacitor C1 is greater than the capacitance of the second capacitor C2, thereby achieving the amplification of the change value of the signal to be measured. Improve the accuracy of the detection result of the detection device 10.

[0062] Continue to refer Figure 4 and Figure 5 As shown, the insulating dielectric layers 145 and 146 in the first capacitor C1 and the second capacitor C2 are in the same layer and are made of the same material.

[0063] Among them, the insulating dielectric layer 145 in the first capacitor C1 and the insulating dielectric layer 146 in the second capacitor C2 are arranged in the same layer, that is, the distance between the first electrode 141 and the second electrode 142 in the first capacitor C1 is ensured to be the same as the distance between the first electrode 143 and the second electrode 144 in the second capacitor C2, thereby avoiding the situation where the capacitance is adjusted due to the distance problem. Furthermore, the insulating dielectric layers 145 and 146 are prepared in the same layer, which can reduce the thickness of the detection unit 100 and realize the thin design of the detection device 10. At the same time, the insulating dielectric layers 145 and 146 can be prepared with the same material, that is, the process cost when preparing the detection unit 100 is reduced.

[0064] Continue to refer Figure 4 and Figure 5 As shown, the first electrode 132 and the second electrode 133 of the first transistor 130, the first electrode plate 141 of the first capacitor C1, and the second electrode plate 144 of the second capacitor C2 are in the same layer and made of the same material. That is, by preparing the film layers in the first transistor 130 and the first capacitor C1 in the same layer, the thickness of the detection unit 100 can be reduced, and a thin design of the detection device 10 can be achieved. Furthermore, when preparing the same layer of film layers, the same material is used for preparation, that is, the process cost of preparing the detection unit 100 is reduced.

[0065] Continue to refer Figure 4 and Figure 5 As shown, the detection unit 100 also includes a substrate 170; the first transistor 130, the first capacitor C1 and the second capacitor C2 are located on the substrate 170, and the vertical projections of the first transistor 130, the first capacitor C1 and the second capacitor C2 on the substrate 170 do not overlap with each other; the first electrode 120 is located on a side of the first transistor 130, the first capacitor C1 and the second capacitor C2 away from the substrate 170, and the ion sensitive membrane 110 is located on a side of the first electrode 120 away from the first transistor 130, the first capacitor C1 and the second capacitor C2.

[0066] The detection unit 100 further includes a substrate 170, and the vertical projections of the first transistor 130, the first capacitor C1, and the second capacitor C2 disposed on the substrate 170 do not overlap each other, and the first capacitor C1, the second capacitor C2, and the first transistor 130 are disposed on the same layer by ensuring that they do not overlap each other. On this basis, the first electrode 120 and the ion sensitive membrane 110 included in the detection unit 100 are both located on the side of the first transistor 130, the first capacitor C1, and the second capacitor C2 away from the substrate 170, ensuring that the detection unit 100 detects the liquid to be detected.

[0067] Continue to refer Figure 4 and Figure 5 As shown, the gate 131 of the first transistor 130 is multiplexed as the second plate 142 of the first capacitor C1 and the first plate 143 of the second capacitor C2; the vertical projections of the second plate 142 of the first capacitor C1 and the first plate 143 of the second capacitor C2 on the substrate 170 do not overlap each other.

[0068] Specifically, refer to Figure 4 As shown, the gate 131 in the first transistor 130 is reused as the second plate 142 of the first capacitor C1 and the first plate 143 of the second capacitor C2, which reduces the process cost of manufacturing the detection unit 100. At the same time, the vertical projections of the second plate 142 of the first capacitor C1 and the first plate 143 of the second capacitor C2 on the substrate 170 do not overlap each other, ensuring that the first capacitor C1 and the second capacitor C2 are arranged on the same layer, which is conducive to realizing the thin design of the detection unit 100.

[0069] For further reference, Figure 5 As shown, the gate 131 in the first transistor 130 is designed in the same layer as the second plate 142 of the first capacitor C1 and the first plate 143 of the second capacitor C2, which can also reduce the process cost when manufacturing the detection unit 100.

[0070] Continue to refer Figure 4 and Figure 5 As shown, the detection unit 100 further includes an organic insulating layer 180 , and the organic insulating layer 180 is located between the first electrode 120 and the first transistor 130 .

[0071] Specifically, refer to Figure 5As shown, the detection unit 100 further includes an organic insulating layer 180 between the first electrode 120 and the first transistor 130. The organic insulating layer 180 can increase the distance between the first electrode 120 and the first transistor 130, that is, increase the distance between the ion sensitive layer 110 and the first transistor 130, ensure that the threshold voltage of the first transistor 130 is not affected by the concentration of hydrogen ions in the liquid to be tested, ensure the working stability of the first transistor 130, that is, improve the stability of the detection unit 100, and the organic insulating layer 180 is combined with its preparation process, and a thicker film layer can be easily prepared. Furthermore, by adding the organic insulating layer 180, the overall flatness of the detection unit 100 can also be improved. For example, refer to Figure 4 As shown, an inorganic insulating layer 181 may be further disposed between the first electrode 120 and the organic insulating layer 180 to ensure the overall flatness of the detection unit 100 and improve the stability of the detection unit 100 .

[0072] Continue to refer Figure 4 and Figure 5 As shown, the first transistor 130 is a top-gate transistor or a bottom-gate transistor.

[0073] Among them, reference Figure 4 As shown, the first transistor 130 is a bottom-gate transistor, or Figure 5 As shown, the first transistor 130 is a top-gate transistor. That is, the detection unit 300 provided by the embodiment of the present invention can be implemented with different types of first transistors 130, so that the detection unit 300 can detect the hydrogen ion concentration of the liquid to be detected.

[0074] Fig.12 yes Figure 3 Another schematic diagram of a cross-sectional structure of the detection device provided along the section line AA' is shown in FIG. Figure 4 , Figure 5 and Fig.12 As shown, the active layer 135 of the first transistor 130 is any one of an etch-stop structure oxide semiconductor, a back channel etch structure oxide semiconductor, amorphous silicon or a low temperature polysilicon structure.

[0075] The first transistor 130 in the detection unit 100 further includes an active layer 135, and the type of the active layer 135 is diverse. Fig.12 As shown, the first transistor 130 includes active layers 135 and 136, that is, the active layer 135 of the first transistor 130 is an etch-stop structure oxide semiconductor; Figure 4 As shown, the active layer 135 of the first transistor 130 is a back channel etched structure oxide semiconductor; Figure 5As shown, the active layer 135 of the first transistor 130 is a back channel etched structured oxide semiconductor. That is, different types of active layers 135 in the first transistor 130 can implement the detection unit 300 provided by the embodiment of the present invention, and the detection unit 300 can detect the hydrogen ion concentration of the liquid to be detected.

[0076] Based on the same inventive concept, an embodiment of the present invention further provides a detection method of a detection device, Fig.13 is a flow chart of a detection method provided by an embodiment of the present invention, such as Fig.13 As shown, the detection method includes:

[0077] S110, supplying power to the first transistor through the power supply end, using the first electrode and the ion sensitive membrane to detect a standard solution of known ion concentration to generate an initial ion sensitive signal, and inputting an initial voltage at the signal input end to turn on the first transistor and generate an initial on-current.

[0078] Among them, the detection device can be used to detect the concentration of the liquid to be detected dripped into the detection device, and the detection device includes at least one detection unit. The detection unit is based on the acquisition of the hydrogen ion concentration in the liquid to be detected and the feedback of the corresponding electrical signal, that is, the judgment of the hydrogen ion concentration in the liquid to be detected is realized through the detection unit, that is, the pH value judgment, and then the judgment of the concentration of the liquid to be detected is realized, realizing the detection function of the detection device. Furthermore, the detection unit includes an ion-sensitive membrane, a first electrode, a first capacitor, a second capacitor and a first transistor, and also includes a signal input terminal, a power supply terminal and a current output terminal.

[0079] Specifically, the first transistor is powered by the power supply terminal and is used to output an initial conduction current when the first transistor is turned on. At the same time, the first electrode and the ion-sensitive membrane detect a standard solution of known ion concentration to generate an initial ion-sensitive signal, that is, an ion-sensitive signal for reference to the particle concentration in the subsequent liquid to be measured is generated, and an initial voltage is input to the signal input terminal. The first transistor is turned on by inputting the initial ion-sensitive signal and the initial voltage transmitted to the gate of the first transistor, and at the same time, the power supply terminal supplies power to the first transistor and outputs an output initial conduction current to achieve the initial conduction current.

[0080] S120, supplying power to the first transistor through the power supply end, detecting the solution to be tested using the first electrode and the ion sensitive membrane, generating a detection ion sensitive signal, and adjusting the detection voltage input to the signal input end so that the first transistor is turned on, and the on-current is the initial on-current.

[0081] Furthermore, the solution to be tested is placed in a detection device to detect the concentration of hydrogen ions in the solution to be tested. Specifically, the ion-sensitive membrane contacts the liquid to be tested, and the generated detection ion-sensitive signal, i.e., the signal to be tested, is transmitted to the detection unit through the first electrode, so that the detection unit obtains the concentration of hydrogen ions in the liquid to be tested. Furthermore, the detection voltage input through the signal input terminal is an adjustable signal, and the detection voltage and the ion-sensitive signal are transmitted to the gate of the first transistor to ensure that the first transistor is turned on. And by adjusting the detection voltage input at the signal input terminal, it is ensured that the first transistor continuously outputs a stable initial conduction current.

[0082] S130: Determine the change amount of the input voltage according to the initial voltage and the detection voltage.

[0083] Among them, the initial voltage is the voltage value initially input to the signal input terminal to ensure that the first transistor is turned on, and the detection voltage, that is, the adjustable signal, is the signal for adjusting the signal input terminal. The detection voltage is used to ensure that the first transistor continuously outputs a stable initial conduction current, and the voltage change input to the signal input terminal is determined based on the difference between the initial voltage and the detection voltage.

[0084] S140, determining the amount of change in the ion sensitive signal between the initial ion sensitive signal and the detected ion sensitive signal according to the amount of change in the input voltage and the capacitance ratio of the first capacitor to the second capacitor.

[0085] Among them, based on the voltage change input at the signal input end and the capacitance ratio of the first capacitor and the second capacitor, the change in the ion-sensitive signal can be determined, that is, the difference in the hydrogen ion concentration between the test liquid and the standard solution of known ion concentration. That is, based on the formula: △Vx = △Vp*C1 / C2, where △Vp is the test signal, that is, the change in the hydrogen ion concentration of the test liquid to be detected, that is, the change in the ion-sensitive signal, △Vx is the change in the adjustable signal, that is, the voltage change input at the signal input end, and C1 and C2 represent the capacitance of the first capacitor C1 and the second capacitor C2. Based on the above formula, the change in the ion-sensitive signal can be accurately determined.

[0086] S150, calculating the ion concentration of the solution to be tested according to the change in the ion sensitive signal, the ion concentration of the standard solution, and the known relationship between the ion sensitive signal and the ion concentration of the solution.

[0087] The ion concentration of the standard solution is the ion concentration obtained by the detection device before the liquid to be tested is tested. The ion sensitive signal in the actual liquid to be tested can be determined based on the above ion sensitive signal change. In combination with the known relationship between the ion sensitive signal and the solution ion concentration, the concentration of hydrogen ions in the liquid to be tested can be obtained by calculation, that is, the ion concentration of the liquid to be tested at the detection device.

[0088] In summary, the detection method of a detection device provided by the embodiment of the present invention can detect the liquid to be detected based on the adjustment amplitude by ensuring that the current output terminal outputs a stable current value and adjusting the signal connected to the signal input terminal. On the basis of avoiding the threshold voltage of the transistor in the detection device being affected by the environment, it also ensures that the detection device is not affected by the preparation process, thereby improving the detection accuracy of the detection device.

[0089] Based on the same inventive concept, the embodiment of the present invention further provides another detection method of a detection device. Fig.14 is a flow chart of another detection method provided by an embodiment of the present invention, such as Fig.14 As shown, the detection method includes:

[0090] S210, supplying power to the first transistor through the power supply end, using the first electrode and the ion sensitive membrane to detect a standard solution of known ion concentration to generate an initial ion sensitive signal, and inputting an initial voltage at the signal input end to turn on the first transistor and generate an initial on-current.

[0091] S220, providing a reset signal to the fixed potential signal terminal, and providing a control start signal to the reset control signal terminal, so that the second transistor and the first transistor are turned on, and the on-current of the first transistor is the initial on-current.

[0092] Specifically, the detection unit also includes a second transistor, a fixed potential signal terminal and a reset control signal terminal; and the gate of the second transistor is connected to the reset control signal terminal, the first electrode is connected to the fixed potential signal terminal, and the second electrode is connected to the gate of the first transistor. In addition, the second electrode of the second transistor is connected to the gate of the first transistor, that is, the second transistor provides a gate voltage for the gate of the first transistor. Specifically, the gate of the second transistor is connected to the reset control signal terminal, and the first electrode of the second transistor is connected to the fixed potential signal terminal, that is, the reset control signal terminal outputs a reset signal to the second transistor, and the gate of the second transistor is turned on by receiving the reset signal, that is, the first electrode and the second electrode are turned on and transmit the fixed signal emitted by the fixed potential signal terminal, and the fixed signal transmitted in the second transistor is transmitted to the first transistor through the second electrode.

[0093] Furthermore, the detection unit includes a calibration phase and a detection phase. In the detection phase, the hydrogen ion concentration of the liquid to be tested is detected, and in the calibration phase, the current output from the current output terminal of the first transistor is calibrated, and it is calibrated as the current output when the gate voltage is in the subthreshold interval. Specifically, by adding a second transistor, a fixed potential can be provided to the gate of the first transistor, so as to control the gate-source voltage of the first transistor to be in the subthreshold interval of the transistor, that is, it can ensure that the first transistor operates in the subthreshold interval, and the current output from the current output terminal is the calibration current. Therefore, in the test phase, by adjusting the signal input at the signal input terminal, the current output from the current output terminal is the calibration current, which can ensure that the first transistor operates in the subthreshold interval. When the voltage is in the subthreshold interval, the current output from the current output terminal has a large range of variation, that is, the current is more obviously affected by the voltage in this area. The fixed signal transmitted by the fixed potential signal end is transmitted to the first transistor through the second transistor, and the voltage value in the first transistor is adjusted to a certain potential within the subthreshold range (the embodiment of the present invention does not limit the specific potential), so that the current output by the first transistor can be significantly affected by the voltage, so that the accuracy of the signal input by the signal input end can be guaranteed by controlling the calibration current determined in the calibration stage during the test stage by outputting the calibration current at the current output end, that is, it can be accurately converted into the change amount of the signal to be measured, and the change value of the hydrogen ion concentration of the liquid to be measured can be determined, thereby improving the detection sensitivity of the detection device and improving the detection accuracy of the detection device.

[0094] S230, supplying power to the first transistor through the power supply end, detecting the test solution using the first electrode and the ion sensitive membrane, generating a detection ion sensitive signal, and adjusting the detection voltage input to the signal input end so that the first transistor is turned on, and the on-current is the initial on-current.

[0095] S240: Determine a change in input voltage according to the initial voltage and the detection voltage.

[0096] S250, determining an ion sensitive signal change amount between an initial ion sensitive signal and a detected ion sensitive signal according to an input voltage change amount and a capacitance ratio between the first capacitor and the second capacitor.

[0097] S260, calculating the ion concentration of the solution to be tested according to the change in the ion sensitive signal, the ion concentration of the standard solution, and the known relationship between the ion sensitive signal and the ion concentration of the solution.

[0098] In summary, in the detection method of the detection device provided by the embodiment of the present invention, a second transistor, a fixed potential signal terminal and a reset control signal terminal are added, and a reset signal is provided to the fixed potential signal terminal, and a control start signal is provided to the reset control signal terminal, so that the second transistor and the first transistor are turned on, and the on-current of the first transistor is the initial on-current. Based on this, it can be ensured that the current output by the first transistor is significantly affected by the voltage, so that the calibration current determined in the calibration phase can be output by controlling the current output terminal in the test phase to ensure the accuracy of the signal input by the signal input terminal, that is, it can be accurately converted into the change amount of the signal to be measured, and the change value of the hydrogen ion concentration of the liquid to be measured can be determined, thereby improving the detection sensitivity of the detection device and improving the detection accuracy of the detection device.

[0099] Based on the same inventive concept, the embodiment of the present invention further provides another detection method of a detection device. Fig.15 is a flow chart of another detection method provided by an embodiment of the present invention, such as Fig.15 As shown, the detection method includes:

[0100] S310, supplying power to the first transistor through the power supply end, using the first electrode and the ion sensitive membrane to detect a standard solution of known ion concentration to generate an initial ion sensitive signal, and inputting an initial voltage at the signal input end to turn on the first transistor and generate an initial on-current.

[0101] S320 , supplying power to the power supply end of each column detection unit in turn, and providing gate scanning signals to the scanning signal end of each row detection unit in turn, so that each detection unit is turned on in turn according to the row order and the column order.

[0102] Specifically, the detection unit also includes a third transistor and a scanning signal terminal; the gate of the third transistor is connected to the scanning signal terminal, the first electrode of the third transistor and the second electrode of the third transistor are respectively connected to the second electrode of the first transistor and the current output terminal; and the detection device includes a plurality of detection units arranged in an array; the current output terminals of all the detection units are connected to each other, the signal input terminals of all the detection units are connected to each other, the power supply terminals in the plurality of detection units in the same column are connected to each other, and the scanning signal terminals in the plurality of detection units in the same row are connected to each other.

[0103] Specifically, in this embodiment, the current output ends of the detection units in the same column are connected to the same current output wiring, and then the current output wirings of the detection units in each column are connected to the same total current output wiring. The current output of all the detection units can be achieved by only one port, thereby reducing the current output ports, simplifying the complexity of the receiving device, and improving the integration of the receiving device.

[0104] S330, using the first electrode and ion sensitive membrane in each turned-on detection unit to detect the solution to be tested, generating a detection ion sensitive signal, and adjusting the detection voltage input to the signal input terminal so that the first transistor in the currently turned-on detection unit is turned on, and the on-current is the initial on-current.

[0105] Specifically, based on the detection of ion-sensitive signals and detection voltages transmitted to the gate of the first transistor, the first transistor is turned on, that is, the scanning signal terminal and the power supply terminal of the detection unit are both turned on, the detection unit is turned on, that is, its current output terminal outputs current, and the adjustable signal input to the signal input terminal is adjusted according to the output current value to ensure that the current value is the expected calibration value, and the concentration of hydrogen ions in the liquid to be tested is determined according to the adjusted adjustable signal. Based on the above-mentioned detection unit and terminal settings, the detection units at different positions in the detection device can detect the liquid to be tested one by one in time and area, thereby improving the detection accuracy of the detection device and avoiding the waste of detection units working at locations that do not need to be detected.

[0106] S340: Determine a change in input voltage according to the initial voltage and the detection voltage.

[0107] S350, determining the amount of change in the ion sensitive signal between the initial ion sensitive signal and the detected ion sensitive signal according to the amount of change in the input voltage and the capacitance ratio of the first capacitor to the second capacitor.

[0108] S360, calculating the ion concentration of the solution to be tested according to the change in the ion sensitive signal, the ion concentration of the standard solution, and the known relationship between the ion sensitive signal and the ion concentration of the solution.

[0109] In summary, in a detection method of a detection device provided by an embodiment of the present invention, a third transistor is added, and a scanning signal terminal is added in the detection unit based on the third transistor. When the scanning signal terminal and the power supply terminal of the detection unit are both turned on, the detection unit is turned on, that is, its current output terminal outputs current, and the adjustable signal input to the signal input terminal is adjusted according to the output current value to ensure that the current value is the expected calibration value, and according to the adjusted adjustable signal, the concentration of hydrogen ions in the liquid to be tested is determined, thereby improving the detection accuracy of the detection device and avoiding the waste of the detection unit working due to unnecessary detection.

[0110] Based on the same inventive concept, the embodiment of the present invention further provides another detection method of a detection device. Fig.16 is a flow chart of another detection method provided by an embodiment of the present invention, such as Fig.16 As shown, the detection method includes:

[0111] S410, supplying power to the first transistor through the power supply end, using the first electrode and the ion sensitive membrane to detect a standard solution of known ion concentration to generate an initial ion sensitive signal, and inputting an initial voltage at the signal input end to turn on the first transistor and generate an initial on-current.

[0112] S420 , supply power to the power supply terminals of all the detection units simultaneously.

[0113] Specifically, the detection unit also includes a third transistor and a scanning signal terminal; the gate of the third transistor is connected to the scanning signal terminal, the first electrode of the third transistor and the second electrode of the third transistor are respectively connected to the second electrode of the first transistor and the current output terminal; the detection device includes a plurality of detection units arranged in an array; the power supply terminals of all the detection units are connected to each other, the signal input terminals of all the detection units are connected to each other, the current output terminals of multiple detection units in the same column are connected to each other, and the scanning signal terminals of multiple detection units in the same row are connected to each other. Among them, the power supply terminals of all the detection units are connected to each other, that is, the power supply terminals can provide electrical energy to the detection units at the same time. In this embodiment, the power supply terminals of the detection units in the same column are connected to the same power supply line, and then the power supply terminals of the detection units in each column are connected to the same total power supply output line, so that the power supply of all the detection units can be realized by only one port, thereby reducing the output port of the power supply, simplifying the complexity of the receiving device, and improving the integration of the receiving device.

[0114] S430 , sequentially providing gate scanning signals to the scanning signal terminals of the detection units in each row, so that the detection units in each row are sequentially turned on.

[0115] S440, using the first electrode and ion sensitive membrane in each row of detection units that are turned on to detect the solution to be tested, generating a detection ion sensitive signal, and adjusting the detection voltage input to the signal input terminal so that the first transistor in each detection unit of the current row is turned on, and the on-current is the initial on-current.

[0116] Specifically, based on the detection that both the ion-sensitive signal and the detection voltage are transmitted to the gate of the first transistor, when the first transistor is turned on, the detection unit is connected to the power supply end. If the scanning signal end provides a scanning signal, i.e., a gate scanning signal, then the current output end of the detection unit outputs current, and the adjustable signal input to the signal input end is adjusted according to the output current value to ensure that the current value is the expected calibration value, and the concentration of hydrogen ions in the liquid to be tested is determined according to the adjusted adjustable signal.

[0117] And based on the setting method of the above-mentioned detection units and terminals, the detection units in different position rows in the detection device can detect the liquid to be tested row by row in a time-sharing and zoned manner, thereby improving the detection accuracy of the detection device and avoiding the waste of detection units working in places that do not need to be detected.

[0118] S450: Determine the change amount of the input voltage according to the initial voltage and the detection voltage.

[0119] S460: Determine the amount of change in the ion sensitive signal between the initial ion sensitive signal and the detected ion sensitive signal according to the amount of change in the input voltage and the capacitance ratio of the first capacitor to the second capacitor.

[0120] S470, calculating the ion concentration of the solution to be tested according to the change in the ion sensitive signal, the ion concentration of the standard solution, and the known relationship between the ion sensitive signal and the ion concentration of the solution.

[0121] In summary, an embodiment of the present invention provides a detection method for a detection device, which realizes that the detection units in different position rows in the detection device detect the liquid to be tested row by row in a time-sharing and zone-sharing manner by setting a third transistor and based on the setting method of the above-mentioned detection units and terminals, thereby improving the detection accuracy of the detection device and avoiding the waste of detection units working in places that do not need to be detected.

[0122] Note that the above are only preferred embodiments of the present invention and the technical principles used. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, combinations and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments, and may include more other equivalent embodiments without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A detection device, characterized in that: The device comprises at least one detection unit, wherein the detection unit comprises an ion-sensitive membrane, a first electrode, a first capacitor, a second capacitor and a first transistor, and further comprises a signal input terminal, a power supply terminal and a current output terminal; the capacitance of the first capacitor is greater than the capacitance of the second capacitor; The ion sensitive membrane is covered on the first electrode, the first electrode is electrically connected to the first plate of the first capacitor, the second plate of the first capacitor, the first plate of the second capacitor and the gate of the first transistor are electrically connected, and the second plate of the second capacitor is connected to the signal input terminal; the first electrode of the first transistor is connected to the power supply terminal, and the second electrode is connected to the current output terminal; The insulating dielectric layer in the first capacitor and the second capacitor is in the same layer and is made of the same material; The first electrode and the second electrode of the first transistor, the first electrode plate of the first capacitor, and the second electrode plate of the second capacitor are in the same layer and are made of the same material; The detection unit also includes a substrate; The first transistor, the first capacitor and the second capacitor are located on the substrate, and vertical projections of the first transistor, the first capacitor and the second capacitor on the substrate do not overlap each other; The first electrode is located on a side of the first transistor, the first capacitor and the second capacitor away from the substrate, and the ion sensitive membrane is located on a side of the first electrode away from the first transistor, the first capacitor and the second capacitor; Wherein, the detection unit further includes a second transistor, a fixed potential signal terminal and a reset control signal terminal; The gate of the second transistor is connected to the reset control signal terminal, the first electrode of the second transistor is connected to the fixed potential signal terminal, and the second electrode of the second transistor is connected to the gate of the first transistor; The signal input terminal inputs an adjustable signal, the gate of the first transistor is in the same stable state according to the adjustable signal and the signal input by the second terminal; and the gate-source voltage of the first transistor is controlled to be in a subthreshold range.

2. The detection device according to claim 1, characterized in that: The detection unit also includes a third transistor and a scanning signal terminal; The gate of the third transistor is connected to the scan signal terminal, and the first electrode of the third transistor and the second electrode of the second transistor are connected to the second electrode of the first transistor and the current output terminal respectively.

3. The detection device according to claim 2, characterized in that: The detection device comprises a plurality of detection units arranged in an array; The current output terminals of all the detection units are connected to each other, the signal input terminals of all the detection units are connected to each other, the power supply terminals in multiple detection units in the same column are connected to each other, and the scanning signal terminals in multiple detection units in the same row are connected to each other.

4. The detection device according to claim 2, characterized in that: The detection device comprises a plurality of detection units arranged in an array; The power supply terminals of all the detection units are connected to each other, the signal input terminals of all the detection units are connected to each other, the current output terminals in multiple detection units in the same column are connected to each other, and the scanning signal terminals in multiple detection units in the same row are connected to each other.

5. The detection device according to claim 1, characterized in that: An area of ​​the first capacitor is greater than an area of ​​the second capacitor.

6. The detection device according to claim 1, characterized in that: The gate of the first transistor is multiplexed as the second plate of the first capacitor and the first plate of the second capacitor; Vertical projections of the second plate of the first capacitor and the first plate of the second capacitor on the substrate do not overlap each other.

7. The detection device according to claim 1, characterized in that: The detection unit further includes an organic insulating layer, and the organic insulating layer is located between the first electrode and the first transistor.

8. The detection device according to claim 1, characterized in that: The first transistor is a top-gate transistor or a bottom-gate transistor.

9. The detection device according to claim 1, characterized in that: The active layer of the first transistor is any one of an etch-stop structure oxide semiconductor, a back channel etch structure oxide semiconductor, amorphous silicon or a low-temperature polysilicon structure.

10. A detection method for a detection device, characterized in that: Applied to the detection device according to any one of claims 1 to 9, the detection method comprises: Supplying power to the first transistor through the power supply end, detecting a standard solution with a known ion concentration using the first electrode and the ion sensitive membrane to generate an initial ion sensitive signal, and inputting an initial voltage at the signal input end to turn on the first transistor and generate an initial on-current; Supplying power to the first transistor through the power supply end, detecting the solution to be tested using the first electrode and the ion sensitive membrane, generating a detection ion sensitive signal, and adjusting the detection voltage inputted by the signal input end so that the first transistor is turned on, and the on-current is the initial on-current; Determining a change in input voltage according to the initial voltage and the detection voltage; Determining an ion sensitive signal change amount between an initial ion sensitive signal and a detected ion sensitive signal according to an amount of change in the input voltage and a capacitance ratio of the first capacitor to the second capacitor; The ion concentration of the solution to be tested is calculated according to the change in the ion sensitive signal, the ion concentration of the standard solution, and the known relationship between the ion sensitive signal and the ion concentration of the solution.

11. The detection method according to claim 10, characterized in that: The detection unit also includes a second transistor, a fixed potential signal terminal and a reset control signal terminal; The gate of the second transistor is connected to the reset control signal terminal, the first electrode is connected to the fixed potential signal terminal, and the second electrode is connected to the gate of the first transistor; The method further comprises: supplying power to the first transistor through the power supply end, detecting the solution to be tested by using the first electrode and the ion sensitive membrane, generating a detection ion sensitive signal, and adjusting the detection voltage input by the signal input end so that the first transistor is turned on and the on-current is before the initial on-current. A reset signal is provided to the fixed potential signal terminal, and a control start signal is provided to the reset control signal terminal, so that the second transistor and the first transistor are turned on, and the on-current of the first transistor is an initial on-current.

12. The detection method according to claim 10, characterized in that: The detection unit further includes a third transistor and a scan signal terminal; the gate of the third transistor is connected to the scan signal terminal, and the first electrode of the third transistor and the second electrode of the third transistor are respectively connected to the second electrode of the first transistor and the current output terminal; The detection device comprises a plurality of detection units arranged in an array; the current output terminals of all the detection units are connected to each other, the signal input terminals of all the detection units are connected to each other, the power supply terminals of the plurality of detection units in the same column are connected to each other, and the scanning signal terminals of the plurality of detection units in the same row are connected to each other; The first transistor is supplied with power through the power supply end, the solution to be tested is detected by using the first electrode and the ion sensitive membrane, a detection ion sensitive signal is generated, and the detection voltage inputted by the signal input end is adjusted so that the first transistor is turned on, and the on-current is the initial on-current, including: Sequentially supplying power to the power supply terminals in the detection units in each column, and sequentially providing gate scanning signals to the scanning signal terminals of the detection units in each row, so that the detection units are sequentially turned on in row order and column order; The first electrode and the ion sensitive membrane in each turned-on detection unit are used to detect the solution to be tested, a detection ion sensitive signal is generated, and the detection voltage input to the signal input terminal is adjusted so that the first transistor in the currently turned-on detection unit is turned on, and the on-current is the initial on-current.

13. The detection method according to claim 10, characterized in that: The detection unit further includes a third transistor and a scan signal terminal; the gate of the third transistor is connected to the scan signal terminal, and the first electrode of the third transistor and the second electrode of the third transistor are respectively connected to the second electrode of the first transistor and the current output terminal; The detection device comprises a plurality of detection units arranged in an array; the power supply terminals of all the detection units are connected to each other, the signal input terminals of all the detection units are connected to each other, the current output terminals of the plurality of detection units in the same column are connected to each other, and the scanning signal terminals of the plurality of detection units in the same row are connected to each other; The first transistor is supplied with power through the power supply end, the solution to be tested is detected by using the first electrode and the ion sensitive membrane, a detection ion sensitive signal is generated, and the detection voltage inputted by the signal input end is adjusted so that the first transistor is turned on, and the on-current is the initial on-current, including: Simultaneously supplying power to the power supply terminals of all the detection units; Providing gate scanning signals to the scanning signal terminals of the detection units in each row in sequence, so that the detection units in each row are turned on in sequence; The first electrode and the ion sensitive membrane in each row of the detection units that are turned on are used to detect the solution to be tested, generate a detection ion sensitive signal, and adjust the detection voltage input to the signal input terminal so that the first transistor in each of the detection units in the current row is turned on, and the on-current is the initial on-current.

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