A dual-frame feeding device and die bonding equipment

Abstract

The present invention discloses a double-frame loading device and a crystal bonding device. The double-frame loading device includes a frame conveying device and a loading device; the loading device is used to transfer two frame units to the frame conveying device in a posture where the PAD parts are close to each other. It can not only use the loading device to simultaneously and at once send the two frame units to the next device in the crystal bonding device to improve the UPH, but also use the loading device to correct the relative positions of the two frame units so that the two frame units are transferred to the frame conveying device in a posture where the PAD parts are close to each other, so that the distance between the two PAD parts is reduced, which is convenient for subsequent equipment to heat the two frame units. Heat is not easy to dissipate, and controllability is strong, thereby improving the stability of wafer bonding. Under the premise of not needing to additionally adjust the position of the frame unit, that is, without affecting the production efficiency, the production stability is improved. In summary, the present application has the advantages of high production efficiency and high production stability.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal bonding, and in particular to a double-frame feeding device and crystal bonding equipment. Background Art

[0002] Die bonding is a process of gluing or welding the wafer to the PAD area (pad area) on the frame to form a thermal path or an electrical path to provide conditions for subsequent wire bonding. In the above-mentioned die bonding process, a loading device is usually required to separate and load the multi-layered frames, and a subsequent frame pushing structure is required to push the frame into the die bonding station, so that the die bonding equipment can glue or weld the wafer to the PAD area of ​​the frame. At present, the die bonding equipment mainly adopts a rotary suction loading method (rotating suction by a nozzle rod assembly equipped with a suction cup) to achieve loading, and a horizontal push method is used to push it into the track of the subsequent die bonding station.

[0003] For conventional crystal bonding equipment, it mainly adopts the form of single frame loading, that is, the loading structure takes out the frames one by one from the silo, and pushes the single frame into the crystal bonding station through the frame pushing structure. Obviously, the production efficiency of the above form is low; in order to improve the circulation efficiency, a more common improvement method is to feed two frames into the crystal bonding equipment each time.

[0004] Generally, if Figure 1 As shown, the PAD part 011 of the frame unit 010 is not located in the middle of the frame unit 010, but is located at one end of the frame unit 010. When the existing feeding structure sends two frame units 010 into the die bonding equipment, it does not specifically change the placement of the frame units 010 to adjust the spacing distance L between the two PAD parts 011. Therefore, when the two frame units 010 are sent into the die bonding equipment, the two PAD parts 011 are simultaneously located at the left end of their respective frame units 010 (or, simultaneously located at the right end of their own frame units 010). Since there must be a certain spacing space between the two frame units 010, the spacing distance L between the two PAD parts 011 must be greater than the length of one frame unit 010.

[0005] In the subsequent process, the two frame units 010 will be simultaneously sent to the temperature control device for heating, specifically, the two PAD parts 011 will be heated. Generally, the heating area in the temperature control device is continuous. Since the spacing distance L between the two PAD parts 011 must be greater than the length of a frame unit 010, the width of the heating area in the temperature control device must also be greater than the length of a frame unit 010. Obviously, such a heating area is wide, the heat is easy to dissipate, and the controllability is poor, which ultimately leads to poor temperature stability during wafer bonding, affecting the production stability of the die bonding equipment.

[0006] That is, the die bonding equipment in the prior art has the defect that the improvement of production efficiency is incompatible with the improvement of production stability. Summary of the invention

[0007] The object of the present invention is to provide a double-frame feeding device and a crystal bonding device to solve the problem of incompatibility between improved production efficiency and improved production stability in the crystal bonding device in the prior art.

[0008] To achieve this object, the present invention adopts the following technical solutions:

[0009] A double-frame feeding device, comprising a frame conveying device and a feeding device;

[0010] The loading device is used to transfer two frame units to the frame conveying device with the PAD parts close to each other.

[0011] Optionally, the feeding device comprises a first feeding device and a second feeding device respectively arranged on both sides of the frame conveying device, and the frame conveying device is provided with a first material receiving station and a second material receiving station arranged in parallel transversely; frame storage bin devices are respectively arranged on both sides of the frame conveying device;

[0012] The first loading device is used to move the frame unit in the frame storage bin device on the same side to the second receiving station, so that the PAD portion of the frame unit on the second receiving station is arranged close to the first receiving station;

[0013] The second loading device is used to move the frame unit in the frame storage bin device on the same side to the first material receiving station, so that the PAD part of the frame unit on the first material receiving station is arranged close to the second material receiving station.

[0014] Optionally, the first loading device includes a first rotating device, and a rotating shaft of the first rotating device is fixedly connected to a first frame transport device;

[0015] The second loading device comprises a second rotating device, and a rotating shaft of the second rotating device is fixedly connected to a second frame transport device;

[0016] The frame conveying device is provided with a first accommodating groove at a position corresponding to the first frame handling device, and the frame conveying device is provided with a second accommodating groove at a position corresponding to the second frame handling device.

[0017] Optionally, the first receiving groove is arranged at the bottom side of the second material receiving station, and the second material receiving station is arranged at a side of the first material receiving station away from the first feeding device;

[0018] The second accommodating groove is arranged at the bottom side of the first material receiving station, and the first material receiving station is arranged at a side of the second material receiving station away from the second feeding device.

[0019] Optionally, it also includes a base, and the frame conveying device is installed on the base; the frame storage bin device is inclined relative to the frame conveying device, and the frame storage bin device is inclined toward the base at one end away from the frame conveying device.

[0020] Optionally, the frame storage bin device includes a support plate, on which a first feeding motor, a first synchronous belt assembly and a second synchronous belt assembly are mounted, the first feeding motor drives the second synchronous belt assembly to rotate through the first synchronous belt assembly, and the second synchronous belt assembly is arranged obliquely relative to the frame conveying device;

[0021] A frame push plate is installed on the moving end of the second synchronous belt assembly, and frame width limiting plates are installed on both sides of the frame push plate on the support plate.

[0022] Optionally, the first frame transport device and the second frame transport device both include a rotating arm, which is fixedly connected to the rotating shaft, and the end of the rotating arm is connected to a nozzle rod, and the nozzle rod is connected to a pipe joint and a vacuum suction cup, and the pipe joint is connected to the vacuum suction cup through the nozzle rod.

[0023] Optionally, the frame conveying device includes a conveying track and a pushing device, and the first accommodating groove and the second accommodating groove are formed on the conveying track; the pushing end of the pushing device can move in the first accommodating groove and the second accommodating groove and protrude from the conveying track to push the frame unit away.

[0024] Optionally, the first frame handling device and the second frame handling device both include a rotating arm;

[0025] The conveying track includes a first frame support bar, a second frame support bar and a third frame support bar connected in sequence;

[0026] One side of the first frame support bar is connected to a first right support bar, and the other side of the first frame support bar is connected to a first left support bar; one side of the third frame support bar is connected to a second right support bar, and the other side of the third frame support bar is connected to a second left support bar;

[0027] A first gap for the rotating arm of the first frame handling device to enter is respectively reserved between the first right support bar and the second right support bar, and between the first frame support bar and the second frame support bar;

[0028] A second gap for the rotating arm of the second frame transport device to enter is reserved between the first left support bar and the second left support bar, and between the second frame support bar and the third frame support bar.

[0029] A crystal bonding device comprises a crystal bonding device and the double-frame loading device as described above, wherein the double-frame loading device is used to feed a frame unit into the crystal bonding device.

[0030] Compared with the prior art, the present invention has the following beneficial effects:

[0031] The dual-frame loading device and crystal bonding equipment provided by the present invention, when working, can not only simultaneously feed the two frame units into the next device in the crystal bonding equipment through the loading device, but also correct the relative positions of the two frame units through the loading device, so that the two frame units are transferred to the frame conveying device with the PAD parts close to each other, so that the distance between the two PAD parts is reduced, and the width of the heating area is narrow, which is convenient for subsequent equipment to heat the two frame units. Heat is not easy to dissipate and controllability is strong, thereby improving the stability of wafer bonding. Under the premise of not needing to additionally adjust the position of the frame units, that is, without affecting the production efficiency, the production stability is improved. In summary, the dual-frame loading device and crystal bonding equipment have the advantages of high production efficiency and high production stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0033] The structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with this technology. They are not used to limit the conditions under which the present invention can be implemented, and therefore have no substantive technical significance. Any structural modification, change in proportion or adjustment of size, without affecting the effects and purposes that can be achieved by the present invention, should still fall within the scope of the technical contents disclosed by the present invention.

[0034] Figure 1 A schematic diagram of the working principle of a die bonding device in the background technology;

[0035] Figure 2 A schematic diagram of the overall structure of a double-frame feeding device provided in an embodiment of the present invention;

[0036] Figure 3A schematic diagram of the top view of the double-frame feeding device provided in an embodiment of the present invention;

[0037] Figure 4 It is a front view structural schematic diagram of a frame storage bin device according to an embodiment of the present invention;

[0038] Figure 5 It is a schematic diagram of the top view of the structure of the frame storage bin device according to an embodiment of the present invention;

[0039] Figure 6 It is a front view structural schematic diagram of a first feeding device according to an embodiment of the present invention;

[0040] Figure 7 It is a schematic diagram of the top view of the structure of the first feeding device according to an embodiment of the present invention;

[0041] Figure 8 It is a schematic diagram of the top view of the conveying track according to an embodiment of the present invention;

[0042] Fig. 9 It is a front view structural schematic diagram of a push-off device according to an embodiment of the present invention;

[0043] Fig.10 It is a schematic diagram of the top view of the push-off device according to an embodiment of the present invention;

[0044] Fig.11 for Figure 3 A schematic diagram of the local enlarged structure at point A;

[0045] Fig.12 for Figure 3 Schematic diagram of the local enlarged structure at point B.

[0046] Illustration: 010, frame unit; 011, PAD unit;

[0047] 100, frame conveying device; 110, first material receiving station; 120, second material receiving station; 200, frame storage bin device; 201, support plate; 202, first feeding motor; 203, first synchronous belt assembly; 204, second synchronous belt assembly; 205, frame push plate; 206, frame width limiting plate; 207, storage guide rail; 208, first photoelectric unit; 210, zero point detection unit; 211, second photoelectric switch;

[0048] 300, first feeding device; 301, rotating shaft; 302, rotating arm; 303, nozzle rod; 304, pipe joint; 305, vacuum suction cup; 306, bearing; 307, feeding frame; 308, second feeding motor; 309, feeding synchronous belt; 310, feeding synchronous wheel; 400, second feeding device;

[0049] 500, conveying track; 501, first receiving groove; 502, second receiving groove; 511, first frame support bar; 512, second frame support bar; 513, third frame support bar; 514, first right support bar; 515, first left support bar; 516, second right support bar; 517, second left support bar; 518, first gap; 519, second gap; 520, optical fiber detection;

[0050] 600, push-off device; 601, lifting cylinder; 602, push-off needle adjustment member; 603, frame push-off needle; 604, push-off guide rail; 605, push-off motor; 606, T-shaped seat; 607, push-off synchronous belt; 700, base. DETAILED DESCRIPTION

[0051] In order to make the purpose, features and advantages of the present invention more obvious and easy to understand, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described below are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0052] In the description of the present invention, it should be understood that the terms "upper", "lower", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a centrally arranged component at the same time.

[0053] The technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.

[0054] Please refer to Figures 2 to 12 , Figure 2 The overall structural diagram of the double-frame feeding device provided in the embodiment of the present invention is as follows: Figure 3 A schematic diagram of the top view of the double-frame feeding device provided in an embodiment of the present invention, Figure 4 This is a front view structural diagram of a frame storage bin device according to an embodiment of the present invention. Figure 5 Schematic diagram of the top view of the frame storage bin device according to an embodiment of the present invention. Figure 6 is a front view structural schematic diagram of a first feeding device according to an embodiment of the present invention, Figure 7 is a schematic diagram of a top view of the structure of a first feeding device according to an embodiment of the present invention, Figure 8Schematic diagram of the top view of the conveying track of an embodiment of the present invention. Fig. 9 is a front view structural schematic diagram of a push-off device according to an embodiment of the present invention, Fig.10 It is a schematic diagram of the top view of the push-off device according to an embodiment of the present invention; Fig.11 for Figure 3 A local enlarged structural diagram at point A. Fig.12 for Figure 3 Schematic diagram of the local enlarged structure at point B.

[0055] Embodiment 1

[0056] The double-frame loading device provided in the embodiment of the present invention is applied to the crystal bonding equipment, and is mainly used for loading the frame unit 010. By improving the structure of the double-frame loading device, the double-frame loading device has a reasonable structure and a compact structure, and can transport two frame units 010 at one time, which greatly improves the transportation efficiency and the UPH of the equipment. It has a precise structure, stable operation and relatively high efficiency.

[0057] The dual-frame loading device of this embodiment includes a frame conveying device 100 and a loading device; the loading device is used to transfer the two frame units 010 to the frame conveying device 100 with the PAD parts 011 close to each other. Specifically, when working, the dual-frame loading device can not only simultaneously send the two frame units 010 to the next device (for example, bonding device) in the crystal bonding device through the loading device, but also correct the relative positions of the two frame units 010 through the loading device, so that the two frame units 010 are transferred to the frame conveying device 100 with the PAD parts 011 close to each other, so that the distance between the two PAD parts 011 is reduced, and the width of the heating area is narrow, so that when the subsequent equipment heats the two frame units 010, the heat is not easy to dissipate, and the controllability is strong, thereby improving the stability of wafer bonding, and under the premise of not needing to adjust the position of the frame unit 010 additionally, that is, without affecting the production efficiency, the production stability is improved. In summary, the dual-frame loading device has the advantages of high production efficiency and high production stability.

[0058] Specifically, Figures 2 to 3As shown, the double-frame loading device of the present embodiment includes a base 700 and a frame conveying device 100 installed on the base 700, and a first material receiving station 110 and a second material receiving station 120 which are arranged in parallel transversely are arranged on the frame conveying device 100; frame storage bin devices 200 are respectively arranged on both sides of the frame conveying device 100; wherein, the frame conveying device 100 is used to deliver the frame units 010 on the first material receiving station 110 and the second material receiving station 120 to the next device (for example, a bonding device) in the crystal bonding equipment, and a plurality of frame units 010 are stored in the frame storage bin device 200. It should also be noted that, relative to the frame storage bin device 200, it is arranged on the left or right side of the frame conveying device 100, and the position of the frame unit 010 relative to the frame storage bin device 200 remains unchanged, which is convenient for the staff to uniformly place the frame units 010 in the frame storage bin device 200, thereby reducing the difficulty of operation and improving the loading efficiency.

[0059] The loading equipment includes a first loading device 300 and a second loading device 400 which are arranged on both sides of the frame conveying device 100. The first loading device 300 is used to move the frame unit 010 in the frame storage bin device 200 on the same side to the second material receiving station 120, so that the PAD part 011 of the frame unit 010 on the second material receiving station 120 is arranged close to the first material receiving station 110; the second loading device 400 is used to move the frame unit 010 in the frame storage bin device 200 on the same side to the first material receiving station 110, so that the PAD part 011 of the frame unit 010 on the first material receiving station 110 is arranged close to the second material receiving station 120.

[0060] Specifically, during operation, the first loading device 300 moves the frame unit 010 in the frame storage bin device 200 on the same side to the second material receiving station 120, and the second loading device 400 moves the frame unit 010 in the frame storage bin device 200 on the same side to the first material receiving station 110, and can simultaneously absorb the frame units 010 on both sides and move them to the frame conveying device 100, which has the advantage of high production efficiency. At the same time, since the frame storage bin devices 200 are respectively arranged on both sides of the frame conveying device 100, it is equivalent to that the frame units 010 on both sides are symmetrically arranged with the frame conveying device 100 as the center; therefore, after the frame units 010 are transported by the loading device and moved to the frame conveying device 100, the two frame units 010 are still symmetrically arranged, so that the distance between the two PAD parts 011 is reduced;

[0061] For example, Fig.11 As shown, the PAD portion 011 of the left frame unit 010 is arranged from left to right toward the frame conveying device 100, as shown in FIG. Fig.12As shown, the PAD portion 011 of the right frame unit 010 is arranged from right to left toward the frame conveying device 100, that is, the frame units 010 on the left and right sides are arranged symmetrically with respect to the midline of the frame conveying device 100; after the action of the feeding device, as shown Figure 3 As shown in the enlarged view in , the frame unit 010 originally located on the left side is located at the second material receiving station 120, and its PAD part 011 is facing the first material receiving station 110. The frame unit 010 originally located on the right side is located at the first material receiving station 110, and its PAD part 011 is facing the second material receiving station 120. At this time, the two frame units 010 are still symmetrically arranged with respect to the center line of the frame conveying device 100, that is, their respective PAD parts 011 are arranged close to each other, so that the distance L between the two PAD parts 011 is much smaller than the width of the frame unit 010; thus, the above-mentioned arrangement makes the width of the heating area narrow, so that when the subsequent equipment heats the two frame units 010, the heat is not easy to dissipate, and the controllability is strong, thereby improving the stability of wafer bonding. Under the premise of not needing to additionally adjust the position of the frame unit 010, there is no need to additionally set a rotating structure to adjust the rotation angle of one of the frame units 010, that is, under the premise of not affecting the production efficiency, the production stability is improved. In summary, the double-frame loading device and the crystal bonding equipment have the advantages of high production efficiency and high production stability.

[0062] In a specific embodiment, Figure 2 , Figure 3 , Figure 6 and Figure 7 As shown, the first loading device 300 includes a first rotating device, and the rotating shaft 301 of the first rotating device is fixedly connected to the first frame handling device; the second loading device 400 includes a second rotating device, and the rotating shaft 301 of the second rotating device is fixedly connected to the second frame handling device; Figure 8 As shown, the frame conveying device 100 is provided with a first receiving groove 501 at a position corresponding to the first frame handling device, and the frame conveying device 100 is provided with a second receiving groove 502 at a position corresponding to the second frame handling device. In this embodiment, the frame unit 010 is turned over from the frame storage bin device 200 to the material receiving station corresponding to the frame conveying device 100 by rotating with the rotating shaft 301 as the center. By using the setting of the rotating device and the receiving groove, the frame handling device can be compactly arranged between the frame storage bin device 200 and the frame conveying device 100, making the structure of the double-frame loading device more compact.

[0063] In other optional embodiments, the first loading device 300 and the second loading device 400 may use a linear motor module disposed on the top of the frame conveying device 100, and the moving end of the linear motor module is provided with a clamp to clamp the frame unit 010 from the frame storage bin device 200 to the frame conveying device 100 from above.

[0064] Furthermore, if Figure 8 As shown, the first accommodating groove 501 is arranged on the bottom side of the second material receiving station 120, and the second material receiving station 120 is arranged on the side of the first material receiving station 110 away from the first loading device 300; the second accommodating groove 502 is arranged on the bottom side of the first material receiving station 110, and the first material receiving station 110 is arranged on the side of the second material receiving station 120 away from the second loading device 400. It should be understood that, for the frame unit 010 on the left, after being clamped by the first loading device 300, it passes through the top of the first material receiving station 110 with the rotation axis 301 as the center, and finally falls into the second material receiving station 120; similarly, for the frame unit 010 on the right, after being clamped by the second loading device 400, it passes through the top of the second material receiving station 120 with the rotation axis 301 as the center, and finally falls into the first material receiving station 110; that is to say, the two frame units 010 are equivalent to the staggered setting in space, which makes the structure more compact; at the same time, for the frame unit 010 on the left, its corresponding rotating arm 302 is relatively When the rotatable arm 302 is extended, the length of the rotatable arm 302 is at least greater than the length from the rotatable shaft 301 to the first material receiving station 110. When the first frame handling device clamps the frame unit 010 from the frame storage bin device 200, the distance between the first frame handling device and the end (right end) of the frame storage bin device 200 increases, that is, the vacuum suction cup 305 can maintain an appropriate distance from the right end of the synchronous belt of the second synchronous belt assembly 204, that is, the loading position of the frame unit 010 on the synchronous belt does not need to be too close to the right end of the synchronous belt, thereby avoiding the situation where the frame unit 010 slips off the synchronous belt due to inertia.

[0065] Furthermore, if Figure 6 As shown, the frame storage bin device 200 is tilted relative to the frame conveying device 100, and the end of the frame storage bin device 200 away from the frame conveying device 100 is tilted toward the base 700. Through the above arrangement, the floor space of the double-frame loading device is further reduced.

[0066] Furthermore, if Figure 4 and Figure 5As shown, the frame storage bin device 200 includes a support plate 201, on which a first loading motor 202, a first synchronous belt assembly 203 and a second synchronous belt assembly 204 are installed. The first loading motor 202 drives the second synchronous belt assembly 204 to rotate through the first synchronous belt assembly 203, and the second synchronous belt assembly 204 is inclined relative to the frame conveying device 100; a frame push plate 205 is installed on the moving end of the second synchronous belt assembly 204, and frame width limiting plates 206 are installed on both sides of the frame push plate 205 of the support plate 201. Among them, the above-mentioned synchronous belt assemblies all include two synchronous wheels and synchronous belts mounted on the synchronous wheels. A material storage guide rail 207 is arranged on the support plate 201, and the frame push plate 205 is slidably connected to the material storage guide rail 207. A first photoelectric unit 208 is also arranged at the right end of the material storage guide rail 207 to detect whether there is still a frame unit 010 in the frame material storage bin device 200; a zero point detection unit 210 and a second photoelectric switch 211 are arranged at one end of the frame push plate 205 away from the first photoelectric unit 208, and the zero point detection unit 210 is used to trigger the second photoelectric switch 211 to correct the position of the frame push plate 205.

[0067] Furthermore, if Figure 6 and Figure 7 As shown, the first frame handling device and the second frame handling device both include a rotating arm 302, the rotating arm 302 is fixedly connected to the rotating shaft 301, and the end of the rotating arm 302 is connected to a suction nozzle rod 303, the suction nozzle rod 303 is connected to a pipe joint 304 and a vacuum suction cup 305, and the pipe joint 304 is connected to the vacuum suction cup 305 through the suction nozzle rod 303. Among them, the rotating shaft 301 is rotatably connected to the feeding frame 307 through a bearing 306; the first rotating device and the second rotating device both include a rotating shaft 301, and a second feeding motor 308 is installed on the feeding frame 307, and the second feeding motor 308 drives the rotating shaft 301 to rotate through a feeding synchronous wheel 310 and a feeding synchronous belt 309.

[0068] Furthermore, if Figure 2 , Figure 3 , Figures 8 to 10 As shown, the frame conveying device 100 includes a conveying track 500 and a pushing device 600, and a first accommodating groove 501 and a second accommodating groove 502 are formed on the conveying track 500; the pushing end of the pushing device 600 can move in the first accommodating groove 501 and the second accommodating groove 502, and protrude from the conveying track 500 to push the frame unit 010 away, more specifically, to push the frame unit 010 into the next device in the solid crystal equipment.

[0069] The conveying track 500 includes a first frame support bar 511, a second frame support bar 512 and a third frame support bar 513 connected in sequence; a first right support bar 514 is connected to one side of the first frame support bar 511, and a first left support bar 515 is connected to the other side of the first frame support bar 511; a second right support bar 516 is connected to one side of the third frame support bar 513, and a second left support bar 517 is connected to the other side of the third frame support bar 513; a first gap 518 is reserved between the first right support bar 514 and the second right support bar 516, and between the first frame support bar 511 and the second frame support bar 512, respectively, for the rotating arm 302 of the first frame handling device to enter; a second gap 519 is reserved between the first left support bar 515 and the second left support bar 517, and between the second frame support bar 512 and the third frame support bar 513, respectively, for the rotating arm 302 of the second frame handling device to enter. At the same time, a fiber optic detection 520 is also provided on one side of the third frame support bar 513, and the fiber optic detection 520 is used to determine whether the frame unit 010 has completely entered the next device.

[0070] Furthermore, if Figures 9 and 10 As shown, the push-off device 600 includes a synchronous belt conveying device, a lifting cylinder 601 is installed on the moving end of the synchronous belt conveying device, a push pin adjustment member 602 is installed on the lifting end of the lifting cylinder 601, and the push pin adjustment member 602 is connected to the frame push pin 603, and the frame push pin 603 can move relative to the push pin adjustment member 602. It should be supplemented that the push-off device 600 also includes a push-off guide rail 604, the lifting cylinder 601 can be slidably connected to the push-off guide rail 604 through a T-shaped seat 606, and the push-off motor 605 can slide through the push-off synchronous belt 607 and the synchronous wheel electric T-shaped seat 606 to drive the frame push pin 603, and then push the frame unit 010 through the frame push pin 603; at the same time, the push-off device 600 also includes a zero point detection unit 210 and a second photoelectric switch 211 to correct the position of the frame push pin 603 to improve the accuracy.

[0071] To sum up, the double-frame feeding device provided in this embodiment has a reasonable and compact structure, can realize the feeding process of double and single-row frames, and has the advantages of high precision, stability, and high efficiency.

[0072] Embodiment 2

[0073] The crystal bonding equipment of this embodiment includes a crystal bonding device and the double-frame loading device in the first embodiment. The double-frame loading device is used to feed the frame unit 010 into the crystal bonding device, and the crystal bonding device plays the role of bonding the wafer to the frame unit 010. The specific structure and technical effects of the double-frame loading device are described in the first embodiment. The crystal bonding equipment of this embodiment refers to this structure and also has its technical effects.

[0074] In summary, the die bonding equipment provided in this embodiment has a reasonable and compact structure, can realize the loading process of double and single row frames, and has the advantages of high precision, stability, and high efficiency.

[0075] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features thereof may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A double-frame feeding device, characterized in that: It comprises a frame conveying device (100) and a loading device; The loading device is used to transfer the two frame units (010) to the frame conveying device (100) in a posture where the PAD parts (011) are close to each other; The loading device comprises a first loading device (300) and a second loading device (400) respectively arranged on both sides of the frame conveying device (100); the frame conveying device (100) is provided with a first material receiving station (110) and a second material receiving station (120) arranged in parallel transversely; frame material storage bin devices (200) are respectively arranged on both sides of the frame conveying device (100); The first loading device (300) is used to move the frame unit (010) in the frame storage bin device (200) on the same side to the second material receiving station (120), so that the PAD portion (011) of the frame unit (010) on the second material receiving station (120) is arranged close to the first material receiving station (110); The second loading device (400) is used to move the frame unit (010) in the frame storage bin device (200) on the same side to the first material receiving station (110), so that the PAD portion (011) of the frame unit (010) on the first material receiving station (110) is arranged close to the second material receiving station (120); The first loading device (300) comprises a first rotating device, and a rotating shaft (301) of the first rotating device is fixedly connected to a first frame transport device; The second loading device (400) comprises a second rotating device, and the rotating shaft (301) of the second rotating device is fixedly connected to a second frame transport device; The frame conveying device (100) is provided with a first accommodating groove (501) at a position corresponding to the first frame handling device, and the frame conveying device (100) is provided with a second accommodating groove (502) at a position corresponding to the second frame handling device; The first containing groove (501) is arranged at the bottom side of the second material receiving station (120), and the second material receiving station (120) is arranged at a side of the first material receiving station (110) away from the first loading device (300); The second containing groove (502) is arranged at the bottom side of the first material receiving station (110), and the first material receiving station (110) is arranged at a side of the second material receiving station (120) away from the second loading device (400); The first frame transport device and the second frame transport device both comprise a rotating arm (302), the rotating arm (302) being fixedly connected to the rotating shaft (301), and a nozzle rod (303) being connected to the end of the rotating arm (302), a pipe joint (304) and a vacuum suction cup (305) being connected to the nozzle rod (303), and the pipe joint (304) is connected to the vacuum suction cup (305) via the nozzle rod (303).

2. The double-frame feeding device according to claim 1, characterized in that: It also includes a base (700), on which the frame conveying device (100) is mounted; the frame storage bin device (200) is arranged obliquely relative to the frame conveying device (100), and an end of the frame storage bin device (200) away from the frame conveying device (100) is arranged obliquely in a direction close to the base (700).

3. The double-frame feeding device according to claim 2, characterized in that: The frame material storage bin device (200) comprises a support plate (201), on which a first feeding motor (202), a first synchronous belt assembly (203) and a second synchronous belt assembly (204) are mounted, the first feeding motor (202) drives the second synchronous belt assembly (204) to rotate via the first synchronous belt assembly (203), and the second synchronous belt assembly (204) is arranged to be inclined relative to the frame conveying device (100); A frame push plate (205) is installed on the moving end of the second synchronous belt assembly (204), and frame width limiting plates (206) are installed on both sides of the frame push plate (205) of the support plate (201).

4. The double-frame feeding device according to claim 1, characterized in that: The frame conveying device (100) comprises a conveying track (500) and a pushing device (600), wherein the first receiving groove (501) and the second receiving groove (502) are formed on the conveying track (500); a pushing end of the pushing device (600) can move in the first receiving groove (501) and the second receiving groove (502) and protrude from the conveying track (500) to push the frame unit (010) away.

5. The double-frame feeding device according to claim 4, characterized in that: The first frame handling device and the second frame handling device both comprise a rotating arm (302); The conveying track (500) comprises a first frame support bar (511), a second frame support bar (512) and a third frame support bar (513) which are connected in sequence; One side of the first frame support bar (511) is connected to a first right support bar (514), and the other side of the first frame support bar (511) is connected to a first left support bar (515); one side of the third frame support bar (513) is connected to a second right support bar (516), and the other side of the third frame support bar (513) is connected to a second left support bar (517); A first gap (518) for the rotating arm (302) of the first frame transport device to enter is respectively reserved between the first right support bar (514) and the second right support bar (516), and between the first frame support bar (511) and the second frame support bar (512); A second gap (519) is reserved between the first left support bar (515) and the second left support bar (517), and between the second frame support bar (512) and the third frame support bar (513) for the rotating arm (302) of the second frame transport device to enter.

6. A die bonding device, characterized in that: It comprises a crystal bonding device and a double-frame loading device as claimed in any one of claims 1 to 5, wherein the double-frame loading device is used to feed a frame unit (010) into the crystal bonding device.

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