Gas distribution plate assembly and gas distribution device

Abstract

The present invention provides a gas distribution disc assembly and a gas distribution device, which relate to the field of gas distribution devices. The gas distribution disc assembly includes a gas distribution disc upper cover, a gas distribution disc body, a gas distribution disc base and a crimping structure; the gas distribution disc upper cover, the gas distribution disc body and the gas distribution disc base are connected in sequence, and the end face of the gas distribution disc upper cover is sealed and fitted with the end face of the gas distribution disc body, and the other end face of the gas distribution disc body is sealed and fitted with the end face of the gas distribution disc base; the crimping structure is connected to the gas distribution disc upper cover and crimped onto the gas distribution disc upper cover; the gas distribution disc base is used to be coaxially arranged with the working turntable and fixedly installed on the working turntable. The gas distribution disc assembly provided by the present invention can increase the service life of the gas distribution disc, strengthen the stability of the sealing structure, reduce the difficulty of operation during maintenance, shorten the maintenance time, and help reduce maintenance costs.

Description

Technical Field

[0001] The present invention relates to the field of gas distribution devices, in particular to a gas distribution disk assembly and a gas distribution device. Background Art

[0002] The vacuum distribution disc structure mainly includes the inner shaft of the distribution disc, a sealing ring, a distribution disc seat, and an air nozzle. The inner shaft of the distribution disc and the distribution disc seat are assembled through the tolerance matching of the inner and outer shafts, and a sealing ring is used in the middle to ensure air tightness. The vacuum is connected from the upper end of the inner shaft of the distribution disc, and the lower end of the shaft is output to the distribution disc seat. The distribution disc seat is then connected through the air nozzle air pipe to transmit the vacuum to the turntable suction nozzle. After long-term research, the inventors of the present application found that there are two defects in the existing technical solution: First, the structure has low stability in airtightness. When the equipment starts to run, the lubricating grease of the sealing ring is at a low temperature, and the lubrication performance is reduced, which increases the friction coefficient of the sealing ring and affects the service life of the sealing ring. Second, this structure requires regular maintenance and replacement of the sealing ring. When this work is to be carried out, the upper part of the entire turret mechanism needs to be disassembled, which is a large workload and cumbersome operation, and the maintenance time cost and labor cost are high. Summary of the Invention

[0003] The purpose of the present invention includes, for example, providing a gas distribution plate assembly and a gas distribution device, which can increase the service life of the gas distribution plate, enhance the stability of the sealing structure, reduce the difficulty of operation during maintenance, shorten the maintenance time, and help reduce maintenance costs.

[0004] The embodiments of the present invention can be implemented as follows:

[0005] In a first aspect, an embodiment of the present invention provides a gas distribution disc assembly, a gas distribution disc assembly for use in a gas distribution device, the gas distribution device comprising a working turntable and a rotating drive member, the rotating drive member being transmission-connected to the working turntable and configured to drive the working turntable to rotate around the central axis of the working turntable, the gas distribution disc assembly comprising a gas distribution disc upper cover, a gas distribution disc body, a gas distribution disc base, and a crimping structure;

[0006] The gas distribution plate upper cover, the gas distribution plate body and the gas distribution plate base are connected in sequence, and the end face of the gas distribution plate upper cover is sealed and fitted with the end face of the gas distribution plate body, and the other end face of the gas distribution plate body is sealed and fitted with the end face of the gas distribution plate base;

[0007] The crimping structure is connected to the upper cover of the gas distribution disk and crimped onto the upper cover of the gas distribution disk;

[0008] The gas distribution disc base is used to be coaxially arranged with the working turntable and fixedly installed on the working turntable.

[0009] Further, in an optional embodiment, the crimping structure includes a crimping part, a connecting part and a crimping elastic part, the crimping part is connected to the upper cover of the gas distribution disk, the connecting part passes through the crimping part and extends into the upper cover of the gas distribution disk to be connected to the upper cover of the gas distribution disk, and the crimping elastic part abuts against the connecting part and is used to apply force to the upper cover of the gas distribution disk together with the crimping part.

[0010] Furthermore, in an optional embodiment, a first crimping mounting hole is provided on the crimping part, a second crimping mounting hole corresponding to the first crimping mounting hole is provided on the upper cover of the gas distribution plate, and the connecting part passes through the first crimping mounting hole and extends into the second crimping mounting hole.

[0011] Further, in an optional embodiment, the second crimping mounting hole includes a first mounting hole and a second mounting hole, the first mounting hole is close to the first crimping mounting hole, and the aperture of the first mounting hole is consistent with that of the first crimping mounting hole, and the aperture of the second mounting hole is smaller than the aperture of the first mounting hole and smaller than the end face size of the connector.

[0012] Furthermore, in an optional embodiment, an end of the connecting member away from the crimping member is provided with an abutting portion abutting against the crimping elastic member, and the crimping elastic member is sleeved on the abutting portion.

[0013] Further, in an optional embodiment, the number of the connecting members includes multiple, and the multiple connecting members are arranged at intervals from each other.

[0014] Furthermore, in an optional embodiment, the crimping component is provided with a central through hole and an assembly groove connected to the central through hole, the central through hole is opened at the center position of the crimping component, and the assembly groove is opened on the side wall of the crimping component.

[0015] Further, in an optional embodiment, the crimping part includes a first crimping portion and a second crimping portion, the first crimping portion and the second crimping portion are fixedly connected and surround the central through hole, and the first crimping mounting hole is opened on the first crimping portion and / or the second crimping portion.

[0016] Furthermore, in an optional embodiment, the crimping piece is provided with a notch, the assembly groove is communicated with the notch, and the upper cover of the gas distribution disk is exposed in the notch.

[0017] In a second aspect, an embodiment of the present invention provides a gas distribution device, comprising any one of the aforementioned gas distribution plate components.

[0018] The gas distribution plate assembly and gas distribution device provided by the present invention have the following beneficial effects: the gas distribution plate upper cover, the gas distribution plate body and the gas distribution plate base of the gas distribution plate assembly are sealed with each other by fitting together. The sealing by fitting together can avoid the use of sealing rings, thereby avoiding the life defects caused by the wear of the sealing rings. At the same time, there is no need to replace and maintain the sealing rings regularly. In the existing gas distribution plate structure, sealing is performed by sealing rings, but the stability of the airtightness of this structure is relatively low. When the equipment starts to run, the lubricating grease of the sealing ring is at a low temperature, and the lubrication performance is reduced, which increases the friction coefficient of the sealing ring, makes it more prone to wear, and affects the service life of the sealing ring. At the same time, since the sealing ring is a consumable part, it will wear out after a period of use, so it needs to be regularly maintained and replaced. When regularly maintaining and replacing the sealing ring, the upper part needs to be disassembled as a whole, which is labor-intensive and cumbersome, and the maintenance time cost and labor cost are high. The gas distribution disk assembly provided by the present invention: the gas distribution disk cover, the gas distribution disk body and the gas distribution disk base are sealed with each other by fitting together, without using a sealing ring, which can avoid the life problem caused by the sealing ring; on the other hand, in the embodiment of the present invention, the gas distribution disk cover is connected to the gas distribution disk cover by a crimping structure, and the gas distribution disk cover is crimped, so that when performing maintenance and cleaning, the two end faces of the friction fit can be easily cleaned, which is simple and convenient to operate, and is conducive to saving maintenance time and reducing related work costs. At the same time, the crimping structure is connected to the gas distribution disk cover and crimped onto the gas distribution disk cover. The crimping structure can crimp the gas distribution disk cover and act on the gas distribution disk body and the gas distribution disk base; the gas distribution disk cover, the gas distribution disk body and the gas distribution disk base are fit and sealed in turn, and the crimping of the crimping structure can further ensure that the gas distribution disk cover and the gas distribution disk body, and the gas distribution disk body and the gas distribution disk base are fit and sealed tightly, thereby ensuring a good sealing effect. The embodiments of the present invention can increase the service life of the gas distribution disk, enhance the stability of the sealing structure, reduce the difficulty of maintenance operations, shorten the maintenance time, and help reduce maintenance costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 This is a schematic structural diagram of a gas distribution plate assembly according to a specific embodiment of the present invention;

[0021] Figure 2 for Figure 1 Schematic diagram of the cross-sectional structure of the central gas distribution plate assembly along the central axis;

[0022] Figure 3 for Figure 1 Schematic diagram of the central gas distribution panel assembly from another perspective;

[0023] Figure 4 for Figure 1 Schematic diagram of the enlarged structure at A in the middle;

[0024] Figure 5 A schematic diagram of a crimping member and an upper cover of a gas distribution plate according to a specific embodiment of the present invention;

[0025] Figure 6 for Figure 1 Top view of the center gas distribution panel assembly.

[0026] Icons: 100, gas distribution disk assembly; 110, gas distribution disk upper cover; 111, second crimping mounting hole; 1111, first mounting hole; 1112, second mounting hole; 120, gas distribution disk body; 130, gas distribution disk base; 140, crimping structure; 141, crimping part; 1411, first crimping mounting hole; 1412, center through hole; 1413, assembly groove; 1414, first crimping portion; 1415, second crimping portion; 1416, notch; 142, connecting part; 1421, abutting portion; 143, crimping elastic part; 200, working turntable. DETAILED DESCRIPTION

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0028] In the present invention, terms such as "upper," "lower," "left," "right," "front," "back," "top," "bottom," "inner," "outer," "center," "vertical," "horizontal," "transverse," and "longitudinal" indicate positions or locations based on the positions or locations shown in the accompanying drawings. These terms are primarily intended to better describe the present invention and its embodiments and are not intended to limit the devices, elements, or components indicated to having a specific orientation, or to being constructed or operated in a specific orientation.

[0029] Furthermore, some of the above terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in the present invention based on the specific circumstances.

[0030] Furthermore, the terms "installed," "disposed," "provided with," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integral structures; mechanical connections or electrical connections; direct connections or indirect connections through an intermediary; or internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in the present invention based on specific circumstances.

[0031] Furthermore, the terms "first," "second," etc., are primarily used to distinguish between different devices, elements, or components (which may or may not be of the same type and configuration), and are not intended to indicate or imply the relative importance or quantity of the devices, elements, or components indicated. Unless otherwise specified, "plurality" means two or more.

[0032] The technical solution of the present invention will be further described below in conjunction with embodiments and drawings.

[0033] See also Figures 1 to 6 This embodiment provides a gas distribution disk assembly 100, which can improve the service life of the gas distribution disk, enhance the stability of the sealing structure, reduce the difficulty of maintenance operations, shorten the maintenance time, and help reduce maintenance costs.

[0034] It should be noted that in an embodiment of the present invention, the gas distribution plate assembly 100 can be used in a gas distribution device. The gas distribution device includes a working turntable 200, a rotary drive member, and the gas distribution plate assembly 100. The rotary drive member is in driving connection with the working turntable 200 and is used to drive the working turntable 200 to rotate about the central axis of the working turntable 200. The gas distribution plate assembly 100 is fixedly mounted on the working turntable 200 and rotates coaxially with the working turntable 200.

[0035] In an embodiment of the present invention, the gas distribution disk assembly 100 includes a gas distribution disk upper cover 110, a gas distribution disk body 120, a gas distribution disk base 130 and a crimping structure 140; the gas distribution disk upper cover 110, the gas distribution disk body 120 and the gas distribution disk base 130 are connected in sequence, and the end face of the gas distribution disk upper cover 110 is sealed and fitted with the end face of the gas distribution disk body 120, and the other end face of the gas distribution disk body 120 is sealed and fitted with the end face of the gas distribution disk base 130; the crimping structure 140 is connected to the gas distribution disk upper cover 110 and crimped on the gas distribution disk upper cover 110; the gas distribution disk base 130 is used to be coaxially arranged with the working turntable 200 and fixedly installed on the working turntable 200.

[0036] It should be noted that in the embodiment of the present invention, the gas distribution plate cover 110, the gas distribution plate body 120, and the gas distribution plate base 130 are sealed to each other by fitting together, that is, the end face of the gas distribution plate cover 110 is sealed to the end face of the gas distribution plate body 120, and the other end face of the gas distribution plate body 120 is sealed to the end face of the gas distribution plate base 130. The sealing by fitting together can eliminate the use of sealing rings, thereby avoiding the life defects caused by sealing ring wear. At the same time, there is no need to regularly replace and maintain the sealing rings. In contrast, in existing gas distribution plate structures, sealing is achieved by sealing rings, but this structure has low airtightness stability. When the equipment starts operating, the sealing ring lubricant is at a low temperature, the lubrication performance is reduced, and the friction coefficient of the sealing ring is increased, which is more susceptible to wear and shortens the service life of the sealing ring. At the same time, since the sealing ring is a consumable part, it will wear out after a period of use, so it needs to be regularly maintained and replaced. During regular maintenance and replacement of the sealing ring, the upper part needs to be disassembled as a whole, which is labor-intensive and cumbersome, and the maintenance time and labor costs are high. In the embodiment of the present invention, on the one hand, the gas plate cover 110, the gas plate body 120, and the gas plate base 130 are sealed to each other by fitting, without using a sealing ring, which can avoid the life problems caused by the sealing ring. On the other hand, in the embodiment of the present invention, the gas plate cover 110 is connected to the gas plate cover 110 through the crimping structure 140, and the gas plate cover 110 is crimped and sealed. During maintenance and cleaning, the two friction-fitting end faces can be cleaned conveniently, which is simple and convenient to operate, helping to save maintenance time and reduce related work costs.

[0037] At the same time, it should be noted that in an embodiment of the present invention, the crimping structure 140 is connected to the gas distribution disk upper cover 110 and crimped onto the gas distribution disk upper cover 110. The crimping structure 140 can crimp the gas distribution disk upper cover 110 and act on the gas distribution disk main body and the gas distribution disk base 130; the gas distribution disk upper cover 110, the gas distribution disk main body and the gas distribution disk base 130 are fitted and sealed in turn, and the crimping of the crimping structure 140 can further ensure that the gas distribution disk upper cover 110 and the gas distribution disk main body, and the gas distribution disk main body and the gas distribution disk base 130 are tightly fitted and sealed, thereby ensuring a good sealing effect.

[0038] See also Figure 2 In an embodiment of the present invention, the above-mentioned crimping structure 140 may include a crimping part 141, a connecting part 142 and a crimping elastic part 143. The crimping part 141 is connected to the gas distribution disk upper cover 110. The connecting part 142 passes through the crimping part 141 and extends into the gas distribution disk upper cover 110 and is connected to the gas distribution disk upper cover 110. The crimping elastic part 143 abuts against the connecting part 142 and is used to apply force to the gas distribution disk upper cover 110 together with the crimping part 141.

[0039] That is, in the embodiment of the present invention, the crimping member 141 is in direct contact with the gas distribution disc upper cover 110 and is crimped onto the gas distribution disc upper cover 110 via the connecting member 142 and the crimping elastic member 143. The connecting member 142 passes through the crimping member 141 and extends into the gas distribution disc upper cover 110, and the crimping elastic member 143 abuts against the connecting member 142. The connecting member 142 can act on the gas distribution disc upper cover 110, so that the crimping member 141 and the gas distribution disc upper cover 110 are elastically constrained, thereby achieving a better airtightness effect and allowing the gas distribution disc upper cover 110 to be lifted up when cleaning and maintenance are required, so that the gas distribution disc upper cover 110 and the end faces of the gas distribution disc body can be cleaned, which is easy to operate.

[0040] At the same time, it should be pointed out that one end of the crimping elastic member 143 abuts against the connecting member 142, and the other end can abut against other external components. The crimping elastic member 143 is in a compressed state, applying elastic force to the connecting member 142, so that the connecting member 142 and the crimping member 141 apply elastic constraints to the distribution disk cover 110.

[0041] Optionally, in this embodiment, the number of connecting members 142 includes multiple, and the multiple connecting members 142 are arranged spaced apart from each other. As shown in the figure, there are two connecting members 142, and the two connecting members 142 are arranged opposite each other. The number of crimping elastic members 143 is the same as the number of connecting members 142. In the embodiment shown in the figure, the number of connecting members 142 and the number of crimping elastic members 143 are both two. Of course, this is not limited to this. In other embodiments of the present invention, the number of connecting members 142 and crimping elastic members 143 can also be other numbers; this embodiment of the present invention does not impose specific requirements or limitations on this.

[0042] Optionally, in this embodiment, the connecting member 142 is a straight rod structure, and its cross-section is circular; of course, it is not limited to this. In other embodiments of the present invention, the connecting member 142 may also be other structural forms, and its cross-section may also be other shapes. The embodiments of the present invention do not make specific requirements and limitations on this.

[0043] See also Figure 4 Optionally, in this embodiment, the end of the connecting member 142 away from the crimping member 141 is provided with an abutting portion 1421 that abuts against the crimping elastic member 143, and the crimping elastic member 143 is sleeved on the abutting portion 1421. As shown in the figure, the abutting portion 1421 is generally a step portion provided at the end of the connecting member 142, and the crimping elastic member 143 is a compression spring that sleeves and abuts on the abutting portion 1421. Of course, the abutting portion 1421 can also have other structural forms, such as an annular protrusion provided at the end of the connecting member 142, which plays the role of abutting against the crimping elastic member 143.

[0044] See also Figure 5Furthermore, in this embodiment, a first crimping mounting hole 1411 is defined on the crimping member 141, and a second crimping mounting hole 111 corresponding to the first crimping mounting hole 1411 is defined on the gas distribution plate upper cover 110. The connecting member 142 passes through the first crimping mounting hole 1411 and extends into the second crimping mounting hole 111. In other words, the first crimping mounting hole 1411 and the second crimping mounting hole 111 correspond to each other and are used to assemble the connecting member 142. Under the action of the crimping elastic member 143, the connecting member 142 applies an elastic force to the crimping member 141 and the gas distribution plate upper cover 110, so that the crimping member 141 and the gas distribution plate upper cover 110 are restrained by the elastic force, facilitating cleaning and maintenance.

[0045] Optionally, the aperture of the first crimping mounting hole 1411 is slightly larger than the size of the connecting piece 142 ; the first crimping mounting hole 1411 is a through hole opened on the crimping piece 141 , and the extension direction of the first crimping mounting hole 1411 is parallel to the axial direction of the crimping piece 141 .

[0046] Optionally, in this embodiment, the second crimping mounting hole 111 may include a first mounting hole 1111 and a second mounting hole 1112, the first mounting hole 1111 is close to the first crimping mounting hole 1411, and the aperture of the first mounting hole 1111 is consistent with the first crimping mounting hole 1411, and the aperture of the second mounting hole 1112 is smaller than the aperture of the first mounting hole 1111 and smaller than the end face size of the connecting member 142.

[0047] That is to say, the connecting piece 142 abuts against the interface end surface of the first mounting hole 1111 and the second mounting hole 1112; in this embodiment, the crimping piece 141 and the gas distribution disk upper cover 110 are connected by the connecting piece 142, and a first crimping mounting hole 1411 is opened on the crimping piece 141, and a second crimping mounting hole 111 is opened on the gas distribution disk upper cover 110, and the second crimping mounting hole 111 is designed to be a first mounting hole 1111 and a second mounting hole 1112 with different apertures. The structure is simple and easy to assemble and disassemble, which can reduce maintenance time and save labor costs during cleaning and maintenance.

[0048] In this embodiment, the crimping member 141 is provided with a central through hole 1412 and an assembly groove 1413 communicating with the central through hole 1412 . The central through hole 1412 is provided at the center of the crimping member 141 , and the assembly groove 1413 is provided on the side wall of the crimping member 141 .

[0049] It should be noted that central through-hole 1412 is used to mount the inner shaft of the gas distribution plate, while mounting groove 1413 further secures the crimping member 141 to the inner shaft of the gas distribution plate. Mounting groove 1413 is provided on the side wall of crimping member 141 and extends through the inner wall of that side. As shown in the figure, there are two mounting grooves 1413 to provide better positioning and more uniform force.

[0050] See also Figure 6 Furthermore, the crimping piece 141 may include a first crimping portion 1414 and a second crimping portion 1415, the first crimping portion 1414 and the second crimping portion 1415 are fixedly connected and surround a central through hole 1412, and the first crimping mounting hole 1411 is opened on the first crimping portion 1414 and / or the second crimping portion 1415.

[0051] It should be noted that in this embodiment, the crimping member 141 can include two parts, namely a first crimping portion 1414 and a second crimping portion 1415. The first crimping portion 1414 and the second crimping portion 1415 have substantially the same shape and structure, and both are block-shaped structures. The first crimping mounting hole 1411 can be provided on the first crimping portion 1414 or the second crimping portion 1415; alternatively, the first crimping portion 1414 and the second crimping portion 1415 can both have cutouts. When the first crimping portion 1414 and the second crimping portion 1415 are connected, the two cutouts form the first crimping mounting hole 1411, facilitating assembly of the connector 142.

[0052] Optionally, the first crimping portion 1414 and the second crimping portion 1415 may be fixedly connected by fixing members such as bolts; the embodiment of the present invention does not impose specific requirements and limitations on this.

[0053] Optionally, in this embodiment, the crimping member 141 is provided with a notch 1416, the assembly groove 1413 is communicated with the notch 1416, and the gas distribution plate cover 110 is exposed at the notch 1416. The notch 1416 can facilitate the assembly of the crimping member 141 on the gas distribution plate cover 110.

[0054] An embodiment of the present invention further provides a gas distribution device comprising a working turntable 200, a rotary drive member (not shown), and any of the aforementioned gas distribution plate assemblies 100. The gas distribution plate assembly 100 is fixedly mounted on the working turntable, and the rotary drive member is in driving connection with the working turntable 200 to drive the working turntable 200 and the gas distribution plate assembly 100 to rotate.

[0055] It should be noted that a plurality of suction nozzles are installed around the work turntable 200. These suction nozzles are connected to the air source through the above-mentioned air distribution plate assembly 100, thereby ensuring the suction of the workpiece by the suction nozzles. The work turntable can also be designed to reduce weight, such as opening weight-reducing holes.

[0056] Optionally, in this embodiment, the rotary driving member may be a motor.

[0057] Please refer to Figures 1 to 6The gas distribution plate assembly 100 and gas distribution device provided in this embodiment are sealed to each other by a jointed fit. This jointed seal eliminates the need for a sealing ring, thereby preventing lifespan defects caused by seal ring wear and eliminating the need for regular replacement and maintenance of the sealing ring. Furthermore, the compression structure 140 is connected to the gas distribution plate upper cover 110 and press-fits the gas distribution plate upper cover 110. During maintenance and cleaning, the two friction-fitted end surfaces can be easily cleaned, making the operation simple and convenient, saving maintenance time and reducing related work costs. At the same time, the crimping structure 140 is connected to the gas distribution plate cover 110 and crimped onto the gas distribution plate cover 110. The crimping structure 140 can crimp the gas distribution plate cover 110 and act on the gas distribution plate body and gas distribution plate base 130. The gas distribution plate cover 110, the gas distribution plate body, and the gas distribution plate base 130 are sequentially fitted and sealed. The crimping of the crimping structure 140 can further ensure that the gas distribution plate cover 110 and the gas distribution plate body, and the gas distribution plate body and the gas distribution plate base 130 are tightly fitted and sealed, ensuring a good sealing effect. The embodiments of the present invention can extend the service life of the gas distribution plate, enhance the stability of the sealing structure, reduce the difficulty of maintenance operations, shorten maintenance time, and help reduce maintenance costs.

[0058] The above is a detailed introduction to a gas distribution disk assembly and a gas distribution device disclosed in an embodiment of the present invention. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand a gas distribution disk assembly and a gas distribution device of the present invention and its core idea: At the same time, for general technical personnel in this field, according to the idea of ​​the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A gas distribution plate assembly for a gas distribution device, the gas distribution device comprising a working turntable (200) and a rotary drive member, the rotary drive member being in transmission connection with the working turntable (200) and used to drive the working turntable (200) to rotate around the central axis of the working turntable (200), characterized in that: The gas distribution plate assembly (100) comprises a gas distribution plate upper cover (110), a gas distribution plate body (120), a gas distribution plate base (130) and a crimping structure (140); The gas distribution disc upper cover (110), the gas distribution disc body (120) and the gas distribution disc base (130) are connected in sequence, and the end face of the gas distribution disc upper cover (110) is sealed and fitted with the end face of the gas distribution disc body (120), and the other end face of the gas distribution disc body (120) is sealed and fitted with the end face of the gas distribution disc base (130); The crimping structure (140) is connected to the gas distribution disk upper cover (110) and crimped onto the gas distribution disk upper cover (110); The gas distribution disc base (130) is used to be coaxially arranged with the working turntable (200) and fixedly mounted on the working turntable (200); The crimping structure (140) comprises a crimping member (141), a connecting member (142) and a crimping elastic member (143); the crimping member (141) is connected to the gas distribution disc upper cover (110); the connecting member (142) passes through the crimping member (141) and extends into the gas distribution disc upper cover (110) to be connected to the gas distribution disc upper cover (110); the crimping elastic member (143) abuts against the connecting member (142) and is used to apply a force to the gas distribution disc upper cover (110) together with the crimping member (141).

2. The gas distribution panel assembly according to claim 1, characterized in that The crimping piece (141) is provided with a first crimping mounting hole (1411), the gas distribution plate upper cover (110) is provided with a second crimping mounting hole (111) corresponding to the first crimping mounting hole (1411), and the connecting piece (142) passes through the first crimping mounting hole (1411) and extends into the second crimping mounting hole (111).

3. The gas distribution panel assembly according to claim 2, characterized in that: The second crimping mounting hole (111) comprises a first mounting hole (1111) and a second mounting hole (1112), wherein the first mounting hole (1111) is close to the first crimping mounting hole (1411), and the aperture of the first mounting hole (1111) is consistent with that of the first crimping mounting hole (1411), and the aperture of the second mounting hole (1112) is smaller than the aperture of the first mounting hole (1111) and smaller than the end face size of the connecting member (142).

4. The gas distribution panel assembly according to claim 1, characterized in that An end of the connecting member (142) away from the crimping member (141) is provided with an abutting portion (1421) that abuts against the crimping elastic member (143), and the crimping elastic member (143) is sleeved on the abutting portion (1421).

5. The gas distribution panel assembly according to claim 1, characterized in that The number of the connecting members (142) includes a plurality, and the plurality of connecting members (142) are arranged at intervals from each other.

6. The gas distribution panel assembly according to claim 2, characterized in that: The crimping part (141) is provided with a central through hole (1412) and an assembly groove (1413) connected to the central through hole (1412); the central through hole (1412) is opened at the center position of the crimping part (141); and the assembly groove (1413) is opened on the side wall of the crimping part (141).

7. The gas distribution panel assembly according to claim 6, characterized in that: The crimping piece (141) includes a first crimping portion (1414) and a second crimping portion (1415), wherein the first crimping portion (1414) and the second crimping portion (1415) are fixedly connected and surround the central through hole (1412), and the first crimping mounting hole (1411) is opened on the first crimping portion (1414) and / or the second crimping portion (1415).

8. The gas distribution panel assembly according to claim 6, characterized in that: The crimping piece (141) is provided with a notch (1416), the assembly groove (1413) is communicated with the notch (1416), and the gas distribution plate upper cover (110) is exposed in the notch (1416).

9. A gas distribution device, characterized in that: The invention comprises a gas distribution panel assembly (100) according to any one of claims 1 to 8.

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