Semiconductor process chambers and semiconductor process equipment

Abstract

The present application discloses a semiconductor process chamber and semiconductor process equipment, which belong to the field of semiconductor technology. The semiconductor process chamber includes a chamber body, a blocking piece, a ejector pin, a driving mechanism and a transmission mechanism. The chamber body is provided with an opening for a conveying device to pass through, and a process base is provided in the chamber body, and the process base is provided with a plurality of through holes penetrating along the thickness direction of the process base; the blocking piece can be movably arranged in the chamber body to open or block the opening; the ejector pin can be movably passed through the through hole; the transmission mechanism is connected to the driving mechanism, and the transmission mechanism is respectively connected to the blocking piece and the ejector pin, and the driving mechanism drives the blocking piece and the ejector pin to move synchronously in opposite directions in the vertical direction through the transmission mechanism. The semiconductor process equipment includes a conveying device and the above-mentioned semiconductor process chamber. Such a setting avoids the time delay problem existing in software logic control, avoids time loss, and is conducive to shortening process time and improving production capacity.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor technology, and specifically relates to a semiconductor process chamber and semiconductor process equipment. Background Art

[0002] With the development of science and technology, integrated circuits have become the core of the information industry. In the process of producing integrated circuits, how to improve wafer processing capabilities has become a focus.

[0003] In the field of semiconductor technology, wafers are typically processed using semiconductor process equipment. The semiconductor process equipment includes a chamber with an opening in the chamber wall. A conveying device transports wafers between the outside and inside of the chamber through the opening. An inner door is provided within the chamber to seal the opening during the process to constrain the electromagnetic field and flow field. A base and an ejector are provided within the chamber. The ejector is movable vertically relative to the chamber. When the ejector rises, it indicates that the ejector is conveying an etched wafer or is about to receive a wafer to be etched from the conveyor. At this time, the inner door opens. When the ejector descends, it indicates that the ejector has conveyed the etched wafer or is conveying a wafer to be etched to the base. At this time, the inner door closes.

[0004] In related technologies, the inner door and ejector pins each have independent drive control systems. Therefore, the actions of the inner door, ejector pins, and conveyor device are logically controlled by software and interlocked with software to achieve the wafer transfer process. However, this solution is complex in structure, requires many executing components, and is logically controlled through software programming. Components must perform corresponding conditional judgments before they can operate, and then act based on the judgment results. As a result, the entire process is time-consuming, resulting in extended process times and affecting the production capacity of semiconductor process equipment. Summary of the Invention

[0005] The purpose of the embodiments of the present application is to provide a semiconductor process chamber and semiconductor process equipment, which can solve the problem in the related art that the semiconductor process equipment takes a long time during the processing, resulting in extended process time and affecting production capacity.

[0006] In a first aspect, an embodiment of the present application provides a semiconductor process chamber, comprising:

[0007] A chamber body, wherein the chamber body is provided with an opening for allowing the conveying device to pass through, and a process base is provided in the chamber body, and the process base is provided with a plurality of through holes penetrating along the thickness direction of the process base;

[0008] a blocking member movably disposed in the chamber body to open or block the opening;

[0009] an ejector pin, the ejector pin being movably disposed in the through hole;

[0010] The driving mechanism and the transmission mechanism are in transmission connection with the driving mechanism, and the transmission mechanism is respectively connected to the blocking member and the ejector pin, and the driving mechanism drives the blocking member and the ejector pin to move synchronously in opposite directions in the vertical direction through the transmission mechanism.

[0011] In a second aspect, an embodiment of the present application further provides a semiconductor process equipment, comprising a conveying device and the semiconductor process chamber in the above embodiment.

[0012] In the embodiment of the present application, the drive mechanism, through a transmission mechanism, can simultaneously drive the plugging member and the ejector pin to move in opposite vertical directions. This mechanical structure controls the ejector pin and the plugging member, allowing one to move simultaneously with the other. This synchronizes the movements of the ejector pin and the plugging member, avoiding the time delays inherent in software logic control and preventing time loss, thereby shortening process time and increasing production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is a cross-sectional view of a semiconductor process chamber disclosed in an embodiment of the present application;

[0014] Figure 2 It is a structural schematic diagram of the transmission mechanism and the driving mechanism disclosed in the embodiment of the present application;

[0015] Figure 3 It is a partial structural diagram of the third rotating shaft and the rotating rod disclosed in the embodiment of the present application.

[0016] Description of reference numerals:

[0017] 100-chamber body, 110-opening, 120-process base,

[0018] 200-blocking parts,

[0019] 300-thimble,

[0020] 400-driving mechanism, 410-driving member, 420-connecting rod, 430-rocker,

[0021] 500- transmission mechanism,

[0022] 510-fixed bracket, 511-first chute, 512-second chute,

[0023] 520-rotating rod, 521-first strip groove, 522-second strip groove, 523-third strip groove, b-scale line,

[0024] 530-first rotating shaft, 540-second rotating shaft, 550-third rotating shaft, a-anti-loosening marking line,

[0025] 560-first elastic member, 570-second elastic member,

[0026] 580-first driving member, 590-second driving member,

[0027] 600-wafer. DETAILED DESCRIPTION

[0028] The following will be combined with the accompanying drawings in the embodiments of the present application to clearly describe the technical solutions in the embodiments of the present application. Obviously, the embodiments described are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field are within the scope of protection of this application.

[0029] The terms "first," "second," and the like in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of this application can be implemented in an order other than that illustrated or described herein, and that the objects distinguished by "first," "second," and the like are generally of the same type, and do not limit the number of objects; for example, the first object can be one or more. In addition, the term "and / or" in the specification and claims refers to at least one of the connected objects, and the character " / " generally indicates that the objects connected are in an "or" relationship.

[0030] The semiconductor process chamber and semiconductor process equipment provided in the embodiments of the present application are described in detail below with reference to specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0031] Please refer to Figure 1-Figure 3 The semiconductor process chamber disclosed in the embodiment of the present application includes a chamber body 100, a blocking member 200, a ejector pin 300, a drive mechanism 400, and a transmission mechanism 500. The chamber body 100 provides a place for the processing of the wafer 600. The chamber body 100 is provided with an opening 110 for the conveying device to pass through. The blocking member 200 is used to open or block the opening 110. In addition, a process base 120 is provided in the chamber body 100. The wafer 600 can be placed on the process base 120 to perform the processing. The ejector pin 300 is used to support the wafer 600 and transport the wafer 600 between the process base 120 and the conveying device. The drive mechanism 400 cooperates with the transmission mechanism 500 to drive the blocking member 200 and the ejector pin 300 to move simultaneously.

[0032] The blocking member 200 is movably disposed within the chamber body 100 to open or close the opening 110. Alternatively, the blocking member 200 may be slidably disposed within the chamber body 100. In this case, a guide groove may be provided on the inner wall of the chamber body 100, and the blocking member 200 may be disposed within the guide groove, and the blocking member 200 may slide vertically relative to the guide groove.

[0033] A process susceptor 120 is disposed within the chamber body 100. The process susceptor 120 has a plurality of through-holes extending through the thickness of the process susceptor 120. Ejector pins 300 are movably disposed within the through-holes. The thickness of the process susceptor 120 is vertical, and the ejector pins 300 are vertically movable relative to the process susceptor 120. Optionally, a wafer 600 can be placed on the upper ends of the ejector pins 300, supported by the ejector pins 300, thereby moving the wafer 600 vertically, allowing the wafer 600 to approach the process susceptor 120 and be placed thereon, or to move away from the process susceptor 120 and be separated therefrom. Therefore, the vertical movement of the ejector pins 300 relative to the process susceptor 120 enables the wafer 600 to be transported between the conveying device and the process susceptor 120.

[0034] In an optional embodiment, the blocking member 200 is movable in a vertical direction relative to the chamber body 100, and the ejector pin 300 is movable in a vertical direction relative to the process base 120. Optionally, when the ejector pin 300 rises in a vertical direction, the distance between the upper end of the ejector pin 300 and the process base 120 increases, indicating that the ejector pin 300 is conveying a processed wafer 600 or is about to receive a wafer 600 to be processed conveyed by a conveying device; when the ejector pin 300 descends in a vertical direction, the distance between the upper end of the ejector pin 300 and the process base 120 decreases, indicating that the ejector pin 300 has conveyed a processed wafer 600 or is conveying a wafer 600 to be processed to the process base 120. Optionally, when the blocking member 200 rises in the vertical direction, the opening 110 is opened, and when the blocking member 200 descends in the vertical direction, the opening 110 is blocked; or, when the blocking member 200 descends in the vertical direction, the opening 110 is opened, and when the blocking member 200 rises in the vertical direction, the opening 110 is blocked.

[0035] The transmission mechanism 500 is in transmission connection with the drive mechanism 400, and the transmission mechanism 500 is connected to the blocking member 200 and the ejector pin 300, respectively. The drive mechanism 400, through the transmission mechanism 500, drives the blocking member 200 and the ejector pin 300 to move synchronously in opposite vertical directions. Specifically, when the ejector pin 300 moves in a first direction relative to the chamber body 100, the blocking member 200 moves in a second direction relative to the chamber body 100. The first and second directions are opposite and parallel to the vertical direction. Optionally, the driving mechanism 400 can be directly connected to the chamber body 100, or the driving mechanism 400 can be separately arranged from the chamber body 100; the transmission mechanism 500 may include a gear, a first rack and a second rack, wherein the gear is arranged between the first rack and the second rack, the first rack and the second rack are respectively engaged with the gear, the first rack is connected to the sealing member 200, and the second rack is connected to the ejector 300, the driving mechanism 400 can be a motor, the output shaft of the motor is connected to the gear, and the motor can drive the gear to rotate when working, and when the gear rotates, it drives the first rack and the second rack to move in the vertical direction, and then the first rack and the second rack respectively drive the sealing member 200 and the ejector 300 to move synchronously.

[0036] In the embodiment of the present application, the drive mechanism 400, via the transmission mechanism 500, can simultaneously drive the blocking member 200 and the ejector pin 300 to move synchronously in opposite vertical directions. This mechanical structure controls the ejector pin 300 and the blocking member 200, allowing the ejector pin 300 and the blocking member 200 to move simultaneously with the other. This synchronizes the movements of the ejector pin 300 and the blocking member 200, avoiding the time delays inherent in software logic control and preventing time loss, thereby shortening process time and increasing production capacity.

[0037] In an optional embodiment, as Figure 2 As shown, the transmission mechanism 500 includes a fixed bracket 510, a rotating rod 520, a first driving member 580 and a second driving member 590. The fixed bracket 510 is connected to the chamber body 100 and serves as a mounting base for the rotating rod 520. Optionally, to prevent the transmission mechanism 500 from occupying too much internal space of the chamber body 100, the transmission mechanism 500 can be arranged outside the chamber body 100, and the fixed bracket 510 can be connected to the outer wall surface of the chamber body 100. The rotating rod 520 is provided with a rotating fulcrum, which is located between the first end and the second end of the rotating rod 520. The rotating rod 520 is rotatably connected to the fixed bracket 510 around the rotating fulcrum. Optionally, a cylindrical protrusion can be provided at the rotating fulcrum of the rotating rod 520, and the fixed bracket 510 can be provided with a cylindrical groove. The cylindrical protrusion can extend into the cylindrical groove, and the cylindrical protrusion can rotate relative to the fixed bracket 510.

[0038] The first driving member 580 is connected to the ejector pin 300, and the second driving member 590 is connected to the blocking member 200. The first end of the rotating rod 520 is rotatably connected to the first driving member 580, and the second end of the rotating rod 520 is rotatably connected to the second driving member 590. The first driving member 580 and the second driving member 590 are both slidably connected to the rotating rod 520 along the extension direction of the rotating rod 520, thereby allowing the rotating rod 520 to rotate while the first driving member 580 and the second driving member 590 move in the vertical direction. Optionally, the first end of the rotating rod 520 may be provided with a matching first guide rail and a first slider. The guiding direction of the first guide rail is the same as the extension direction of the rotating rod 520. The first slider can slide relative to the first guide rail. The first slider and the first driving member 580 can be rotatably connected by a hinge or other means, thereby allowing the first driving member 580 to move in the vertical direction while the rotating rod 520 can rotate about the rotation fulcrum. Similarly, a second guide rail and a second slider that match each other can be provided at the second end of the rotating rod 520. The guiding direction of the second guide rail is the same as the extension direction of the rotating rod 520. The second slider can slide relative to the second guide rail, and the second slider and the second driving member 590 can be rotatably connected by a hinge or other means, so that the second driving member 590 can move in the vertical direction and the rotating rod 520 can rotate at the same time.

[0039] Alternatively, the driving mechanism 400 may be connected to the rotating rod 520 to drive the rotating rod 520 to rotate relative to the fixed bracket 510 around the rotating fulcrum. In this case, the driving mechanism 400 may be a telescopic cylinder, one end of which is hinged to the fixed bracket 510, and the other end of which is directly hinged to the rotating rod 520. The connection between the telescopic cylinder and the rotating rod 520 deviates from the rotating fulcrum, and the rotating rod 520 is driven to rotate by the telescopic movement of the telescopic cylinder. Alternatively, the driving mechanism 400 may be connected to the first driving member 580 and the second driving member 590. , so as to drive one of the first driving member 580 and the second driving member 590 to move in the vertical direction, that is, to drive one of the blocking member 200 and the ejector pin 300 to move in the vertical direction. At the same time, when one of the first driving member 580 and the second driving member 590 moves, it drives the rotating rod 520 to rotate around the rotating fulcrum, and then the rotating rod 520 drives the other of the first driving member 580 and the second driving member 590 to move in the vertical direction, that is, to drive the other of the blocking member 200 and the ejector pin 300 to move in the vertical direction.

[0040] In this embodiment, the transmission mechanism 500 uses the lever principle to achieve the opposite movement of the blocking member 200 and the ejector pin 300 , which is more conducive to the driving mechanism 400 driving one of the blocking member 200 and the ejector pin 300 to move through the transmission mechanism 500 .

[0041] In an optional embodiment, in order to prevent the blocking member 200 and the ejector pin 300 from offsetting during movement, the fixed bracket 510 is provided with a first slide groove 511 and a second slide groove 512, both of which extend in the vertical direction, a portion of the first driving member 580 extends into the first slide groove 511, and the first driving member 580 slides and cooperates with the first slide groove 511 in the vertical direction, a portion of the second driving member 590 extends into the second slide groove 512, and the second driving member 590 slides and cooperates with the second slide groove 512 in the vertical direction; or, the transmission mechanism 500 further includes a first sliding member and a second sliding member, the first sliding member is connected to the first driving member 580, the second sliding member is connected to the second driving member 590, and the first sliding member extends into the first slide groove 511, the second sliding member extends into the second slide groove 512, the first sliding member slides and cooperates with the first slide groove 511 in the vertical direction, and the second sliding member slides and cooperates with the second slide groove 512 in the vertical direction. With this arrangement, under the guidance of the first slide groove 511, the ejector pin 300 moves accurately in the vertical direction, preventing the moving direction of the ejector pin 300 from being deviated; similarly, under the guidance of the second slide groove 512, the blocking member 200 moves accurately in the vertical direction, preventing the moving direction of the blocking member 200 from being deviated.

[0042] In an optional embodiment, the drive mechanism 400 includes a drive member 410, a connecting rod 420, and a rocker arm 430. The drive member 410 is connected to the first end of the connecting rod 420, and the drive member 410 drives the connecting rod 420 to rotate about the first end of the connecting rod 420. Alternatively, the drive member 410 may be a rotary cylinder, the output shaft of which is connected to the first end of the connecting rod 420. By using a connecting rod 420 and a rocker arm 430 of appropriate lengths, the maximum rotation angle of the rotary cylinder can be 180°. Of course, the drive member 410 may also be a component such as a motor that can drive the connecting rod 420 to rotate. Furthermore, the fixed bracket 510 can serve as a mounting base for the drive mechanism 400, with the drive member 410 mounted on the fixed bracket 510. The second end of the connecting rod 420 is rotatably connected to the first end of the rocking arm 430, and the second end of the rocking arm 430 is rotatably connected to the first drive member 580 or the second drive member 590. When the connecting rod 420 rotates, the rocking arm 430 drives the first drive member 580 or the second drive member 590 to move in a vertical direction. Alternatively, the second end of the connecting rod 420 and the first end of the rocking arm 430 can be rotatably connected via a fourth rotating shaft, and the second end of the rocking arm 430 and the first drive member 580 can be rotatably connected via the first rotating shaft 530. Alternatively, the second end of the rocking arm 430 and the second drive member 590 can be rotatably connected via the second rotating shaft 540.

[0043] In this embodiment, the drive member 410, the connecting rod 420, and the rocker 430 form a slider-crank mechanism, which converts the rotational driving force of the drive member 410 into power that drives the linear motion of the first drive member 580 or the second drive member 590, thereby driving the transmission mechanism 500 and, in turn, driving the blocking member 200 and the ejector pin 300. Furthermore, compared to a scheme in which the drive mechanism 400 directly drives the rotation rod 520 to rotate, the drive mechanism 400 directly drives the first drive member 580 or the second drive member 590 (i.e., the end position of the rotation rod 520) to move. This increases the moment arm, i.e., increases the distance between the second end of the rocker 430 and the rotation fulcrum, thereby reducing the driving force exerted by the drive mechanism 400 on the first drive member 580 or the second drive member 590.

[0044] In an optional embodiment, the transmission mechanism 500 further includes a first rotating shaft 530 and a second rotating shaft 540, the first driving member 580 is rotatably connected to the first end of the rotating rod 520 via the first rotating shaft 530, and the second driving member 590 is rotatably connected to the second end of the rotating rod 520 via the second rotating shaft 540; the first end and the second end of the rotating rod 520 are respectively provided with a first strip groove 521 and a second strip groove 522, and the extension direction of the first strip groove 521 and the extension direction of the second strip groove 522 are respectively provided with a first strip groove 521 and a second strip groove 522. They both extend in the same direction as the rotating rod 520, and the first rotating shaft 530 is inserted into the first strip groove 521, and the second rotating shaft 540 is inserted into the second strip groove 522. The first rotating shaft 530 can slide relative to the first strip groove 521, thereby providing conditions for the rotation of the rotating rod 520 and preventing the rotating rod 520 from getting stuck and unable to rotate. The second rotating shaft 540 can slide relative to the second strip groove 522, also providing conditions for the rotation of the rotating rod 520 and preventing the rotating rod 520 from getting stuck and unable to rotate.

[0045] In this way, the first rotating shaft 530 and the second rotating shaft 540 can not only rotate relative to the rotating rod 520, but also slide along the corresponding strip groove in the extension direction of the rotating rod 520. Therefore, through the structure of the rotating shaft and the strip groove cooperating with each other, the first driving member 580 and the second driving member 590 can be moved in the vertical direction while the rotating rod 520 rotates around the rotating fulcrum. Moreover, the connection structure between the first driving member 580 and the rotating rod 520 and the connection structure between the second driving member 590 and the rotating rod 520 are simplified.

[0046] In an alternative embodiment, when the rocking arm 430 drives the first driving member 580 to move, the connection between the rocking arm 430 and the first driving member 580 is a first connection, and a certain distance exists between the first connection and the first rotating shaft 530. Alternatively, when the rocking arm 430 drives the second driving member 590 to move, the connection between the rocking arm 430 and the second driving member 590 is a second connection, and a certain distance exists between the second connection and the second rotating shaft 540. In this manner, due to the different positions at which the rocking arm 430 and the rotating rod 520 are connected to the first driving member 580 or the second driving member 590, the process of the rocking arm 430 driving the rotating rod 520 is more complicated, and it is not conducive to ensuring the stability of the connection between the rocking arm 430, the rotating rod 520, and the first driving member 580 or the second driving member 590.

[0047] Therefore, in another embodiment, Figure 2 As shown, the first end of the first rotating shaft 530 is connected to the rocking arm 430, and the second end of the first rotating shaft 530 is connected to the first driving member 580, that is, the rocking arm 430 and the rotating rod 520 are connected to the first driving member 580 at the same position. Alternatively, the first end of the second rotating shaft 540 is connected to the rocking arm 430, and the second end of the second rotating shaft 540 is connected to the second driving member 590, that is, the rocking arm 430 and the rotating rod 520 are connected to the second driving member 590 at the same position. In this configuration, the rocking arm 430 and the rotating rod 520 are connected to the first driving member 580 or the second driving member 590 at the same position, which reduces the transmission distance between the rocking arm 430 and the rotating rod 520, simplifies the transmission process, and helps to improve the connection stability among the rocking arm 430, the rotating rod 520, and the first driving member 580 or the second driving member 590.

[0048] In an alternative embodiment, the second end of the rocker arm 430 is rotatably connected to the first driving member 580 via a first rotating shaft 530, and the first driving member 580 is provided with a horizontal slide groove, the first rotating shaft 530 extends into the horizontal slide groove, and the first rotating shaft 530 can slide relative to the horizontal slide groove. Alternatively, the second end of the rocker arm 430 is rotatably connected to the second driving member 590 via a second rotating shaft 540, and the second driving member 590 is provided with a horizontal slide groove, the second rotating shaft 540 extends into the horizontal slide groove, and the second rotating shaft 540 can slide relative to the horizontal slide groove. Here, the horizontal slide groove extends in the horizontal direction. When the driving member 410 drives the rocking arm 430 to rotate via the connecting rod 420, the second end of the rocking arm 430 applies a force to the first driving member 580 or the second driving member 590. This force includes a horizontal component and a vertical component. The vertical component drives the first driving member 580 or the second driving member 590 to move vertically, while the horizontal component causes the first driving member 580 or the second driving member 590 to move horizontally. However, the first driving member 580 and the second driving member 590 can only move vertically and cannot move horizontally. Therefore, by providing a horizontal slide groove, the second end of the rocking arm 430 can slide directly relative to the first driving member 580 or the second driving member 590. This process releases the horizontal component of the force applied by the rocking arm 430, preventing the rocking arm 430 from getting stuck and ensuring smoother vertical movement of the first driving member 580 or the second driving member 590.

[0049] In an optional embodiment, the transmission mechanism 500 further includes a third rotating shaft 550, through which the rotating rod 520 is rotatably connected to the fixed bracket 510. The rotating shaft 550 can be provided as a single rotating shaft. In this way, the connection position of the rotating rod 520 and the fixed bracket 510 cannot be adjusted, that is, the distance from the first end of the rotating rod 520 to the third rotating shaft 550 and the distance from the second end of the rotating rod 520 to the third rotating shaft 550 are fixed, so that the sliding stroke of the first driving member 580 or the second driving member 590 is constant. Therefore, in another embodiment, at least two rotating shafts are provided in the extension direction of the rotating rod 520, and the third rotating shaft 550 can be connected to different rotating shafts. Alternatively, the rotating shaft can be an opening in the central region of the rotating rod 520, and the third rotating shaft 550 can be inserted into different openings.

[0050] With such an arrangement, by changing the rotating fulcrum to which the third rotating shaft 550 is connected, the distance from the first end of the rotating rod 520 to the third rotating shaft 550 and the distance from the second end of the rotating rod 520 to the third rotating shaft 550 are changed. Since the driving mechanism 400 drives one of the first driving member 580 and the second driving member 590 to move in the vertical direction, the sliding stroke of one of the first driving member 580 and the second driving member 590 in the vertical direction is constant. By adjusting the connection position of the rotating rod 520 and the fixed bracket 510, the sliding stroke of the other of the first driving member 580 and the second driving member 590 in the vertical direction can be changed to adapt to different process requirements.

[0051] In this embodiment, the rocker arm 430 is rotatably connected to the first driving member 580, so the sliding stroke of the first driving member 580 and the ejector pin 300 in the vertical direction is constant. By adjusting the connection position of the rotating rod 520 and the fixed bracket 510 as needed, the sliding stroke of the second driving member 590 and the sealing member 200 in the vertical direction can be changed.

[0052] In an optional embodiment, the rotating rod 520 is provided with a third strip groove 523, which is located between the first end and the second end of the rotating rod 520. The extension direction of the third strip groove 523 is the same as the extension direction of the rotating rod 520. Each position of the third strip groove 523 along its own extension direction can serve as a rotation fulcrum. The third rotating shaft 550 is provided through the third strip groove 523, and the third rotating shaft 550 can slide relative to the third strip groove 523 to connect with different rotation fulcrums. It should be noted that during the rotation of the rotating rod 520 relative to the fixed bracket 510, the position of the third rotating shaft 550 relative to the third strip groove 523 is fixed, that is, the third rotating shaft 550 will not slide within the third strip groove 523. With this arrangement, compared with the solution of setting at least two openings on the rotating rod 520 as rotating fulcrums, the third strip groove 523 includes more rotating fulcrum positions, which is beneficial to expanding the adjustment range of the connection position of the rotating rod 520 and the fixed bracket 510, and further expanding the adjustable range of the sliding stroke of the second driving member 590 in the vertical direction; moreover, the third strip groove 523 is easy to process.

[0053] In an optional embodiment, if Figure 3As shown, the outer circumference of the third rotating shaft 550 is provided with a prevention mark a, and the portion of the rotating rod 520 provided with the third strip groove 523 is provided with multiple scale marks b spaced apart along its extension direction. The prevention mark a can correspond to one of the multiple scale marks b. Optionally, the third rotating shaft 550 includes a cylindrical body and an outer ring body. The cylindrical body is connected to the fixed bracket 510. The outer ring body is sleeved around the outer circumference of the cylindrical body and is rotatable relative to the cylindrical body. The prevention mark a is provided on the outer ring body. During the rotation of the rotating rod 520, the outer ring body rotates relative to the cylindrical body, while the outer ring body remains fixed relative to the rotating rod 520. In this way, using the anti-loosening mark a and the scale line b, the position of the third rotating shaft 550 in the third strip groove 523 can be known. After the rotating rod 520 is rotated, it is possible to further check whether the position of the third rotating shaft 550 in the third strip groove 523 has changed, and then determine whether the third rotating shaft 550 is loose. If the third rotating shaft 550 is loose, the user can further fix the third rotating shaft 550.

[0054] It should be noted that the first rotating shaft 530 , the second rotating shaft 540 , the third rotating shaft 550 and the fourth rotating shaft in the embodiment of the present application can all be locking shafts.

[0055] In the solution of this application, if Figure 2 As shown, the transmission mechanism 500 further includes a first elastic member 560 and / or a second elastic member 570. One end of the first elastic member 560 is connected to the rotating rod 520, and the other end of the first elastic member 560 is connected to the first driving member 580. One end of the second elastic member 570 is connected to the rotating rod 520, and the other end of the second elastic member 570 is connected to the second driving member 590. Optionally, both the first elastic member 560 and the second elastic member 570 are not limited to springs. One end of the first elastic member 560 and the rotating rod 520, and the other end of the first elastic member 560 and the first driving member 580 can be connected by fasteners such as screws. One end of the second elastic member 570 and the rotating rod 520, and the other end of the second elastic member 570 and the second driving member 590 can also be connected by fasteners such as screws.

[0056] The first elastic member 560 is used to buffer the movement process of the first driving member 580 and the first end of the rotating rod 520, reduce the acceleration of the first driving member 580 and the first end of the rotating rod 520, and avoid the first end of the first driving member 580 and the rotating rod 520 from changing too quickly; the second elastic member 570 is used to buffer the movement process of the second driving member 590 and the second end of the rotating rod 520, so as to reduce the acceleration of the second driving member 590 and the second end of the rotating rod 520, and avoid the second driving member 590 and the second end of the rotating rod 520 from changing too quickly, which is beneficial to improving the stability of the transmission mechanism 500 during movement.

[0057] In this embodiment, the transmission mechanism 500 may include both a first elastic member 560 and a second elastic member 570. When the rocking arm 430 and the rotating rod 520 are connected to the first driving member 580 at the same location, one end of the first elastic member 560 may be connected to the rocking arm 430, while the other end of the first elastic member 560 is connected to the first driving member 580, thereby indirectly connecting the first elastic member 560 to the rotating rod 520. This arrangement allows the first elastic member 560 to not only buffer the movement of the first driving member 580 and the first end of the rotating rod 520, but also buffer the movement of the rocking arm 430, thereby reducing the acceleration of the rocking arm 430 and preventing excessive changes in its speed, thereby further improving the stability of the transmission mechanism 500 during movement.

[0058] In an optional embodiment, both the first elastic member 560 and the second elastic member 570 may be damping springs. Because damping springs have the characteristic of being able to bear force in all directions, they can buffer the movement of corresponding components in all directions, preventing the components from changing too quickly in all directions, thereby improving transmission stability.

[0059] Based on the semiconductor process chamber disclosed in the present application, an embodiment of the present application further discloses a semiconductor process equipment. The disclosed semiconductor process equipment includes a conveying device and the semiconductor process chamber in the above embodiment.

[0060] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of this application, ordinary technicians in this field can also make many forms without departing from the purpose of this application and the scope of protection of the claims, all of which are within the protection of this application.

Claims

1. A semiconductor process chamber, characterized in that: include: A chamber body (100), the chamber body (100) being provided with an opening (110) for allowing a conveying device to pass through, and a process base (120) being provided in the chamber body (100), the process base (120) being provided with a plurality of through holes penetrating along a thickness direction of the process base (120); a blocking member (200), the blocking member (200) being movably disposed in the chamber body (100) to open or block the opening (110); an ejector pin (300), the ejector pin (300) being movably disposed in the through hole; a driving mechanism (400) and a transmission mechanism (500), wherein the transmission mechanism (500) is in transmission connection with the driving mechanism (400), and the transmission mechanism (500) is respectively connected to the blocking member (200) and the ejector pin (300), and the driving mechanism (400) drives the blocking member (200) and the ejector pin (300) to move synchronously in opposite directions in a vertical direction via the transmission mechanism (500); The transmission mechanism (500) includes a fixed bracket (510), a rotating rod (520) and a second driving member (590), wherein the fixed bracket (510) is connected to the chamber body (100), the rotating rod (520) is provided with a rotating fulcrum, and the rotating fulcrum is located between the first end and the second end of the rotating rod (520), the rotating rod (520) and the fixed bracket (510) are rotatably connected around the rotating fulcrum, the second driving member (590) is connected to the blocking member (200), the second end of the rotating rod (520) is rotatably connected to the second driving member (590), and the second driving member (590) is slidably connected to the rotating rod (520) along the extension direction of the rotating rod (520).

2. The semiconductor process chamber according to claim 1, wherein: The transmission mechanism (500) further includes a first driving member (580), the first driving member (580) being connected to the ejector pin (300), the first end of the rotating rod (520) being rotationally connected to the first driving member (580), and the first driving member (580) being slidingly connected to the rotating rod (520) along an extension direction of the rotating rod (520).

3. The semiconductor process chamber according to claim 2, wherein: The fixed bracket (510) is provided with a first sliding groove (511) and a second sliding groove (512), wherein the first sliding groove (511) and the second sliding groove (512) both extend in a vertical direction. The first driving member (580) and the first sliding groove (511) are slidably engaged in the vertical direction, and the second driving member (590) and the second sliding groove (512) are slidably engaged in the vertical direction; or, the transmission mechanism (500) further includes a first sliding member and a second sliding member, the first sliding member is connected to the first driving member (580), the second sliding member is connected to the second driving member (590), the first sliding member and the first sliding groove (511) are slidably engaged in the vertical direction, and the second sliding member and the second sliding groove (512) are slidably engaged in the vertical direction.

4. The semiconductor process chamber according to claim 2, wherein: The driving mechanism (400) comprises a driving member (410), a connecting rod (420) and a rocker (430), wherein: The driving member (410) is connected to the first end of the connecting rod (420), and the driving member (410) drives the connecting rod (420) to rotate around the first end of the connecting rod (420). The second end of the connecting rod (420) is rotationally connected to the first end of the rocking rod (430), and the second end of the rocking rod (430) is rotationally connected to the first driving member (580) or the second driving member (590). When the connecting rod (420) rotates, the first driving member (580) or the second driving member (590) is driven to move in the vertical direction through the rocking rod (430).

5. The semiconductor process chamber according to claim 4, wherein: The transmission mechanism (500) further includes a first rotating shaft (530) and a second rotating shaft (540), wherein the first driving member (580) is rotationally connected to the first end of the rotating rod (520) via the first rotating shaft (530), and the second driving member (590) is rotationally connected to the second end of the rotating rod (520) via the second rotating shaft (540). The first end and the second end of the rotating rod (520) are respectively provided with a first strip groove (521) and a second strip groove (522); the extension direction of the first strip groove (521) and the extension direction of the second strip groove (522) are both the same as the extension direction of the rotating rod (520); the first rotating shaft (530) is passed through the first strip groove (521), and the second rotating shaft (540) is passed through the second strip groove (522); the first rotating shaft (530) can slide relative to the first strip groove (521), and the second rotating shaft (540) can slide relative to the second strip groove (522).

6. The semiconductor process chamber according to claim 5, wherein: The first end of the first rotating shaft (530) is connected to the rocking arm (430), and the second end of the first rotating shaft (530) is connected to the first driving member (580); or the first end of the second rotating shaft (540) is connected to the rocking arm (430), and the second end of the second rotating shaft (540) is connected to the second driving member (590).

7. The semiconductor process chamber according to claim 5, wherein: The second end of the rocker (430) is rotatably connected to the first driving member (580) via the first rotating shaft (530), and the first driving member (580) is provided with a horizontal sliding groove, the first rotating shaft (530) extends into the horizontal sliding groove, and the first rotating shaft (530) can slide relative to the horizontal sliding groove; Alternatively, the second end of the rocker (430) is rotationally connected to the second driving member (590) via the second rotating shaft (540), the second driving member (590) is provided with a horizontal slide groove, the second rotating shaft (540) extends into the horizontal slide groove, and the second rotating shaft (540) can slide relative to the horizontal slide groove.

8. The semiconductor process chamber according to claim 2, wherein: The transmission mechanism (500) further includes a third rotating shaft (550), wherein the rotating fulcrum of the rotating rod (520) is rotatably connected to the fixed bracket (510) via the third rotating shaft (550), and at least two rotating fulcrums are provided in the extending direction of the rotating rod (520), and the third rotating shaft (550) can be connected to different rotating fulcrums.

9. The semiconductor process chamber according to claim 8, wherein: The rotating rod (520) is provided with a third strip groove (523), the third strip groove (523) is located between the first end and the second end of the rotating rod (520), and the extension direction of the third strip groove (523) is the same as the extension direction of the rotating rod (520), the third rotating shaft (550) is passed through the third strip groove (523), and the third rotating shaft (550) can slide relative to the third strip groove (523) to connect with different rotating fulcrums.

10. The semiconductor process chamber according to claim 9, wherein: The outer periphery of the third rotating shaft (550) is provided with an anti-loosening marking line (a), and the portion of the rotating rod (520) provided with the third strip groove (523) is provided with a plurality of scale lines (b) at intervals along its own extension direction, and the anti-loosening marking line (a) can correspond to one of the plurality of scale lines (b).

11. The semiconductor process chamber according to claim 2, wherein: The transmission mechanism (500) further comprises a first elastic member (560) and / or a second elastic member (570), wherein one end of the first elastic member (560) is connected to the rotating rod (520), and the other end of the first elastic member (560) is connected to the first driving member (580), and one end of the second elastic member (570) is connected to the rotating rod (520), and the other end of the second elastic member (570) is connected to the second driving member (590).

12. A semiconductor process equipment, characterized in that: The invention comprises a conveying device and a semiconductor process chamber according to any one of claims 1 to 11.

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