An etching device for chip production

Abstract

The present invention provides an etching device for chip production, comprising an etching box, wherein a top cover is arranged on the top surface of the etching box, a hinge is fixedly installed on one side of the etching box, and the etching box and the top cover are connected by the hinge; a picking component, wherein the picking component is arranged on the top surface of the top cover and is used for picking up the chip, and a staff can pour the etching liquid into the interior of the liquid storage box, at which time the etching liquid will enter the interior of the fixed box through the circulation port, and the staff can put the chip into the interior of the fixed box, and after the etching is completed, the chip can be adsorbed by the arranged driving motor, electric push rod, screw rod, card slot, threaded hole, driving plate, clamping ring, steel pipe, fixed box, electromagnetic valve and liquid storage box under the coordinated use, and when the driving plate and the clamping ring are reset, the arranged top cover can be flipped over to take out the chip adsorbed by the steel pipe, and the staff does not need to contact the etching liquid, which is safer.

Description

Technical Field

[0001] The present invention relates to the field of chips, and in particular to an etching device for chip production. Background Art

[0002] Semiconductor chips are semiconductor devices that can achieve certain functions by etching and wiring on semiconductor sheets. The invention of semiconductor chips was an innovation in the 20th century, which pioneered the information age. As one of the most important processes frequently used in the manufacturing process of semiconductor chips, etching is particularly important during the production of semiconductor chips.

[0003] When etching existing semiconductor chips, the semiconductor chips are placed in a box for etching manually. However, since the etching liquid is generally composed of a variety of acidic liquids and has a certain degree of corrosiveness, it is often difficult for humans to remove the etched semiconductor chip core. Summary of the invention

[0004] The present invention aims to provide an etching device for chip production that overcomes the above-mentioned problems or at least partially solves the above-mentioned problems, so as to solve the problem that in the existing semiconductor chips, the semiconductor chips are manually placed in a box for etching, but because the etching liquid is generally composed of a variety of acidic liquids and contains certain corrosiveness, it is often difficult for humans to take out the etched semiconductor chip core.

[0005] To achieve the above object, the technical solution of the present invention is specifically implemented as follows:

[0006] The present invention provides an etching device for chip production, comprising an etching box, wherein a top cover is arranged on the top surface of the etching box, a hinge is fixedly installed on one side of the etching box, and the etching box and the top cover are connected by the hinge; a picking component, wherein the picking component is arranged on the top surface of the top cover and is used to pick up the chip, and the picking component comprises: an air pump, wherein the air pump is fixedly installed on the top surface of the top cover, a PLC controller is fixedly installed on one side of the etching box, the air pump is electrically connected to the PLC controller, a connecting pipe is fixedly sleeved on the air inlet of the air pump, a clamping hole is opened on the top surface of the top cover, the connecting pipe is movably sleeved on the clamping hole and extends to the interior of the etching box, and one end of the connecting pipe is fixedly installed A steel pipe is provided, a liquid storage box is fixedly installed on the inner bottom surface of the etching box, and slots are respectively provided on both sides of the interior of the etching box, a driving motor is fixedly installed on the inner bottom surface of the slot, and the driving motor is electrically connected to the PLC controller, a screw is fixedly installed on one end of the driving shaft of the driving motor, a driving plate is movably sleeved inside the slot, a threaded hole is provided on the top surface of the driving plate, and the threaded hole is threadedly connected to the screw, an electric push rod is fixedly installed on one side of the driving plate, the electric push rod is electrically connected to the PLC controller, a clamping ring is fixedly installed on one end of the telescopic shaft of the electric push rod, a fixing box is fixedly installed on the inner bottom surface of the liquid storage box, and a number of flow ports are respectively provided on four sides of the fixing box.

[0007] By adopting the above technical scheme, through the set liquid storage box, the staff can pour the etching liquid into the interior of the liquid storage box, and the etching liquid will enter the interior of the fixed box through the circulation port, and the staff can put the chip into the interior of the fixed box. After the etching is completed, by starting the set drive motor and electric push rod, the drive shaft of the drive motor rotates to drive the screw to rotate, and under the limitation of the slot, the screw drives the drive plate to move downward through the threaded hole. At this time, the telescopic shaft of the electric push rod extends to drive the clamping ring to clamp the steel pipe. At this time, the steel pipe will move downward with the drive plate into the interior of the fixed box. When the steel pipe contacts the chip, the vacuum pump will extract the air inside the steel pipe and the connecting pipe, so as to achieve adsorption of the chip. After the drive plate and the clamping ring are reset, the set top cover can be flipped over to take out the chip adsorbed by the steel pipe. There is no need for the staff to contact the etching liquid, which is safer.

[0008] As a further solution of the present invention, the taking assembly also includes: a top pipe, which is fixedly installed on the inner top surface of the slot, and a bearing is fixedly sleeved inside the top pipe, and the inner ring of the bearing is fixedly sleeved with the screw rod.

[0009] By adopting the above technical solution and setting the bearing, the bearing can make the screw rod more stable when rotating.

[0010] As a further solution of the present invention, limiting blocks are fixedly installed on both sides of the driving plate, and limiting grooves are respectively opened on both sides inside the card slot, and the limiting grooves are movably connected with the limiting blocks.

[0011] By adopting the above technical solution, the provided limit block can limit the drive board from escaping from the interior of the card slot.

[0012] As a further solution of the present invention, the bottom surface of the etching box and the bottom surface of the liquid storage box are respectively provided with bottom holes, and a solenoid valve is fixedly sleeved inside the bottom hole, and the solenoid valve is electrically connected to the PLC controller.

[0013] By adopting the above technical solution, the etching liquid inside the liquid storage box can be discharged through the provided solenoid valve.

[0014] As a further solution of the present invention, a fixing hole is opened on one side of the etching box, and a glass is fixedly sleeved inside the fixing hole.

[0015] By adopting the above technical solution, the staff can observe the chip etching situation in time through the provided glass.

[0016] As a further solution of the present invention, a plurality of iron columns are fixedly mounted on the bottom surface of the top cover, a plurality of fixing grooves are opened on the top surface of the etching box, the iron columns are movably connected to the fixing grooves, and magnets are fixedly connected inside the fixing grooves.

[0017] By adopting the above technical solution, the iron column and the magnet are magnetically attracted together, so that the stability of the top cover when it is closed can be increased.

[0018] As a further solution of the present invention, a purifier is fixedly installed on one side of the immersion box, an air inlet of the purifier is fixedly sleeved with an air inlet pipe, and a side hole is opened on one side of the immersion box, and the side hole is fixedly sleeved with the air inlet pipe.

[0019] By adopting the above technical solution, the gas of the etching liquid can be easily purified.

[0020] As a further solution of the present invention, the etching box is fixedly installed with a plurality of supporting legs.

[0021] By adopting the above technical solution, the etching box can be made more stable during use.

[0022] The present invention provides an etching device for chip production, which has the following beneficial effects:

[0023] Through the provided liquid storage box, the staff can pour the etching liquid into the interior of the liquid storage box, and the etching liquid will enter the interior of the fixed box through the circulation port. The staff can put the chip into the interior of the fixed box. After the etching is completed, the chip can be adsorbed by the cooperation of the provided drive motor, electric push rod, screw rod, card slot, threaded hole, drive plate, clamping ring, steel pipe, fixed box, solenoid valve and liquid storage box. When the drive plate and the clamping ring are reset, the provided top cover can be flipped over to take out the chip adsorbed by the steel pipe. The staff does not need to touch the etching liquid, which is safer.

[0024] Through the glass, the staff can observe the etching condition of the chip inside the etching box. Through the purifier, the gas emitted by the etching liquid will be drawn into the purifier through the air inlet pipe for purification, and will be discharged only after purification. When the top cover is closed, the iron column will enter the fixed groove and contact the magnet. At this time, the iron column will be adsorbed by the magnet, making the top cover more stable when closed. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0026] Figure 1 A schematic diagram of a three-dimensional structure provided by an embodiment of the present invention;

[0027] Figure 2 A schematic diagram of the structure of an etching box provided in an embodiment of the present invention;

[0028] Figure 3 A schematic diagram of the structure of an air extraction pump provided in an embodiment of the present invention;

[0029] Figure 4 for Figure 2 Schematic diagram of the local structure of A;

[0030] Figure 5 for Figure 2 Schematic diagram of the local structure of B;

[0031] Figure 6 A bottom view schematic diagram of a pipe jacking structure provided by an embodiment of the present invention;

[0032] Figure 7 A bottom view schematic diagram of an etching box structure provided in an embodiment of the present invention;

[0033] Figure 8 for Figure 2Schematic diagram of the local structure of C.

[0034] In the figure: 1. Etching box; 2. Top cover; 3. Vacuum pump; 4. Connecting pipe; 5. Steel pipe; 6. Card slot; 7. Driving motor; 8. Screw rod; 9. Driving plate; 10. Threaded hole; 11. Electric push rod; 12. Clamping ring; 13. Top pipe; 14. Bearing; 15. Limiting groove; 16. Limiting block; 17. Liquid storage box; 18. Fixing box; 19. Flow port; 20. Bottom hole; 21. Solenoid valve; 22. Fixing hole; 23. Glass; 24. Iron column; 25. Fixing groove; 26. Magnet; 27. Purifier; 28. Inlet pipe; 29. ​​Side hole; 30. Support leg; 31. Card hole. DETAILED DESCRIPTION

[0035] The exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0036] Embodiment 1

[0037] refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6, an etching device for chip production, comprising: an etching box 1, a top cover 2 is arranged on the top surface of the etching box 1, a hinge is fixedly installed on one side of the etching box 1, the etching box 1 and the top cover 2 are connected by the hinge, a picking component is arranged on the top surface of the top cover 2 for picking up the chip, the picking component comprises: an air pump 3, the air pump 3 is fixedly installed on the top surface of the top cover 2, a PLC controller is fixedly installed on one side of the etching box 1, the air pump 3 is electrically connected to the PLC controller, a connecting pipe 4 is fixedly sleeved on the air inlet of the air pump 3, a clamping hole 31 is opened on the top surface of the top cover 2, the connecting pipe 4 is movably sleeved with the clamping hole 31 and extends to the inside of the etching box 1, the connecting pipe A steel pipe 5 is fixedly installed at one end of 4, a liquid storage box 17 is fixedly installed on the inner bottom surface of the etching box 1, and slots 6 are respectively provided on both sides of the interior of the etching box 1. A driving motor 7 is fixedly installed on the inner bottom surface of the slot 6, and the driving motor 7 is electrically connected to the PLC controller. A screw rod 8 is fixedly installed on one end of the driving shaft of the driving motor 7, and a driving plate 9 is movably sleeved inside the slot 6. A threaded hole 10 is provided on the top surface of the driving plate 9, and the threaded hole 10 is threadedly connected to the screw rod 8. An electric push rod 11 is fixedly installed on one side of the driving plate 9, and the electric push rod 11 is electrically connected to the PLC controller. A clamping ring 12 is fixedly installed on one end of the telescopic shaft of the electric push rod 11, and the liquid storage box 17 is fixedly installed on the inner bottom surface of the etching box 1. A fixed box 18 is fixedly installed on the inner bottom surface of the box 17, and a plurality of flow ports 19 are respectively opened on the four sides of the fixed box 18. Through the set liquid storage box 17, the staff can pour the etching liquid into the interior of the liquid storage box 17. At this time, the etching liquid will enter the interior of the fixed box 18 through the flow ports 19. The staff can put the chip into the interior of the fixed box 18. After the etching is completed, by starting the set drive motor 7 and the electric push rod 11, the drive shaft of the drive motor 7 rotates to drive the screw rod 8 to rotate. Under the restriction of the card slot 6, the screw rod 8 drives the drive plate 9 to move downward through the threaded hole 10. At this time, the telescopic shaft of the electric push rod 11 is extended. The clamping ring 12 is driven to clamp the steel pipe 5. At this time, the steel pipe 5 will move downward with the driving plate 9 into the interior of the fixed box 18. When the steel pipe 5 contacts the chip, the vacuum pump 3 will extract the air inside the steel pipe 5 and the connecting pipe 4, so as to adsorb the chip. When the driving plate 9 and the clamping ring 12 are reset, the top cover 2 can be flipped over to take out the chip adsorbed by the steel pipe 5. There is no need for the staff to contact the etching liquid, which is safer. The taking component also includes a top pipe 13, which is fixedly installed on the inner top surface of the slot 6. The interior of the top pipe 13 is fixedly sleeved with a bearing 14, and the inner ring of the bearing 14 is fixedly sleeved with the screw rod 8.

[0038] Embodiment 2

[0039] Based on the above embodiment 1, reference Figure 5 and Figure 7Limit blocks 16 are fixedly installed on both sides of the driving plate 9, and limit grooves 15 are respectively provided on both sides of the interior of the card slot 6. The limit grooves 15 are movably connected with the limit blocks 16. Bottom holes 20 are respectively provided on the bottom surface of the etching box 1 and the bottom surface of the liquid storage box 17. A solenoid valve 21 is fixedly connected inside the bottom hole 20. The solenoid valve 21 is electrically connected to the PLC controller. By opening the set solenoid valve 21, the etching liquid inside the liquid storage box 17 and the fixed box 18 is discharged.

[0040] Embodiment 3

[0041] Based on the above embodiment 1 or 2, refer to Figure 1 , Figure 2 and Figure 8 A fixing hole 22 is provided on one side of the etching box 1, and a glass 23 is fixedly sleeved inside the fixing hole 22. A plurality of iron pillars 24 are fixedly installed on the bottom surface of the top cover 2. A plurality of fixing grooves 25 are provided on the top surface of the etching box 1. The iron pillars 24 are movably sleeved with the fixing grooves 25, and a magnet 26 is fixedly sleeved inside the fixing grooves 25. When the top cover 2 is closed, the iron pillars 24 will enter the inside of the fixing grooves 25 and contact the magnets 26. At this time, the iron pillars 24 will be attracted to the magnets 26, so that the top cover 2 is more stable when closed.

[0042] Embodiment 4

[0043] Based on the above embodiments 1, 2 or 3, refer to Figure 1 A purifier 27 is fixedly installed on one side of the etching box 1, and an air inlet 28 is fixedly sleeved on the air inlet of the purifier 27. A side hole 29 is opened on one side of the etching box 1, and the side hole 29 is fixedly sleeved with the air inlet pipe 28. The etching box 1 is fixedly installed with a plurality of supporting legs 30.

[0044] Working principle: Please refer to Figure 1-Figure 8As shown, through the provided liquid storage box 17, the staff can pour the etching liquid into the interior of the liquid storage box 17, and the etching liquid will enter the interior of the fixed box 18 through the circulation port 19. The staff can put the chip into the interior of the fixed box 18. After the etching is completed, by starting the provided drive motor 7 and the electric push rod 11, the drive shaft of the drive motor 7 rotates to drive the screw rod 8 to rotate. Under the restriction of the card slot 6, the screw rod 8 drives the drive plate 9 to move downward through the threaded hole 10. At this time, the telescopic shaft of the electric push rod 11 extends to drive the clamping ring 1 2 clamps the steel pipe 5, and the steel pipe 5 will move downward with the driving plate 9 into the interior of the fixed box 18. At this time, the electromagnetic valve 21 is opened to discharge the etching liquid in the liquid storage box 17 and the fixed box 18. When the steel pipe 5 contacts the chip, the vacuum pump 3 extracts the air inside the steel pipe 5 and the connecting pipe 4, so as to adsorb the chip. After the driving plate 9 and the clamping ring 12 are reset, the top cover 2 can be flipped over to take out the chip adsorbed by the steel pipe 5. There is no need for the staff to contact the etching liquid, which is safer.

[0045] Through the glass 23, the staff can observe the etching condition of the chip inside the etching box 1 through the glass 23. Through the purifier 27, the gas emitted by the etching liquid will be drawn into the purifier 27 through the air inlet pipe 28 for purification, and will be discharged only after purification. When the top cover 2 is closed, the iron column 24 will enter the interior of the fixed groove 25 and contact the magnet 26. At this time, the iron column 24 will be adsorbed by the magnet 26, so that the top cover 2 is more stable when closed.

[0046] The above are only embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included within the scope of the claims of the present application.

Claims

1. An etching device for chip production, characterized in that: include: An etching box (1), wherein a top cover (2) is arranged on the top surface of the etching box (1), a hinge is fixedly mounted on one side of the etching box (1), and the etching box (1) and the top cover (2) are connected via the hinge; A taking component, the taking component is arranged on the top surface of the top cover (2) and is used to take the chip, the taking component comprising: an air pump (3), the air pump (3) is fixedly mounted on the top surface of the top cover (2), a PLC controller is fixedly mounted on one side of the etching box (1), the air pump (3) is electrically connected to the PLC controller, a connecting pipe (4) is fixedly sleeved on the air inlet of the air pump (3), a clamping hole (31) is provided on the top surface of the top cover (2), the connecting pipe (4) is movably sleeved with the clamping hole (31) and extends to the interior of the etching box (1), a steel pipe (5) is fixedly mounted on one end of the connecting pipe (4), a liquid storage box (17) is fixedly mounted on the inner bottom surface of the etching box (1), and clamping grooves (6) are respectively provided on both sides of the interior of the etching box (1), A driving motor (7) is fixedly mounted on the inner bottom surface of the slot (6), the driving motor (7) is electrically connected to the PLC controller, a screw rod (8) is fixedly mounted on one end of the driving shaft of the driving motor (7), a driving plate (9) is movably sleeved inside the slot (6), a threaded hole (10) is provided on the top surface of the driving plate (9), the threaded hole (10) is threadedly connected to the screw rod (8), an electric push rod (11) is fixedly mounted on one side of the driving plate (9), the electric push rod (11) is electrically connected to the PLC controller, a clamping ring (12) is fixedly mounted on one end of the telescopic shaft of the electric push rod (11), a fixing box (18) is fixedly mounted on the inner bottom surface of the liquid storage box (17), and a plurality of flow openings (19) are respectively provided on four sides of the fixing box (18); The taking assembly further comprises: a top tube (13), the top tube (13) being fixedly mounted on the inner top surface of the clamping slot (6), a bearing (14) being fixedly sleeved inside the top tube (13), and an inner ring of the bearing (14) being fixedly sleeved on the screw rod (8); Limiting blocks (16) are fixedly mounted on both sides of the driving plate (9), and limiting grooves (15) are respectively provided on both sides of the interior of the card slot (6), and the limiting grooves (15) are movably sleeved with the limiting blocks (16); The bottom surface of the etching box (1) and the bottom surface of the liquid storage box (17) are respectively provided with bottom holes (20), and a solenoid valve (21) is fixedly sleeved inside the bottom hole (20), and the solenoid valve (21) is electrically connected to the PLC controller.

2. The chip production etching device according to claim 1, characterized in that: A fixing hole (22) is provided on one side of the etching box (1), and a glass (23) is fixedly sleeved inside the fixing hole (22).

3. The chip production etching device according to claim 1, characterized in that: A plurality of iron columns (24) are fixedly mounted on the bottom surface of the top cover (2), a plurality of fixing grooves (25) are formed on the top surface of the etching box (1), the iron columns (24) are movably sleeved with the fixing grooves (25), and magnets (26) are fixedly sleeved inside the fixing grooves (25).

4. The etching device for chip production according to claim 1, characterized in that: A purifier (27) is fixedly mounted on one side of the etch box (1), an air inlet of the purifier (27) is fixedly sleeved with an air inlet pipe (28), and a side hole (29) is opened on one side of the etch box (1), the side hole (29) is fixedly sleeved with the air inlet pipe (28).

5. The chip production etching device according to claim 1, characterized in that: The etching box (1) is fixedly mounted with a plurality of supporting legs (30).

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