A method, system and device for autonomously adjusting the rotation speed according to the change of vacuum degree

Abstract

The present application provides an autonomous regulation method, system and device in which the rotation speed varies with the vacuum degree. The method is executed by a controller in an autonomous regulation system. The autonomous regulation system also includes a molecular pump and a vacuum gauge. The method includes: first obtaining a target vacuum degree, and when the rotation speed of the molecular pump reaches a rated rotation speed, obtaining the actual vacuum degree in a test chamber in real time by the vacuum gauge; based on a comparison result of the target vacuum degree and the actual vacuum degree, performing at least one of acceleration control and deceleration control on the molecular pump to realize a constant pressure working mode of the molecular pump; solving the technical problem in the prior art that the molecular pump is subjected to a larger impact and the power increases, thereby causing the molecular pump to generate excessive heat, which seriously affects the safety and reliability of the molecular pump, so that the vacuum degree in the test chamber is quickly adjusted to the target vacuum degree, the impact on the molecular pump is reduced, and the safety and reliability of the molecular pump are improved.

Description

Technical Field

[0001] The present application relates to the field of vacuum technology, and in particular to a method, system and device for autonomously adjusting rotation speed as vacuum degree changes. Background Art

[0002] With the development of science and technology, vacuum technology is increasingly used in scientific research and industry. Molecular pumps use high-speed rotating rotors to transfer momentum to gas molecules, so that they can obtain directional speed, and then be compressed and driven to the exhaust port to be pumped away by the front stage. Molecular pumps are one of the main equipment for obtaining high vacuum and ultra-high vacuum conditions in modern times, and can provide users with convenient high vacuum conditions.

[0003] In actual use, in order to meet process requirements and facilitate users to carry out production and processing under constant vacuum pressure, it is usually necessary to maintain the molecular pump in a loaded state, that is, to continuously fill it with a certain amount of process gas, and then manually switch the molecular pump from high speed to low speed, so as to prevent the molecular pump from reaching the maximum speed, thereby achieving the purpose of long-term operation at a certain constant pressure value.

[0004] In the above scheme, the gas load impact on the molecular pump during the loaded operation or working process becomes larger, the power will increase, and then the molecular pump will generate excessive heat, which seriously affects the safety and reliability of the molecular pump. Summary of the invention

[0005] The present application provides a method, system and device for autonomously adjusting the rotation speed as the vacuum degree changes, which improves the safety and reliability of the molecular pump. The technical solution is as follows.

[0006] On the one hand, a method for autonomously regulating a rotation speed as a function of a vacuum degree is provided, the method being executed by a controller in a system for autonomously regulating a rotation speed as a function of a vacuum degree; the system for autonomously regulating a rotation speed as a function of a vacuum degree further comprising a molecular pump and a vacuum gauge; the controller and the molecular pump are connected together via a connecting plate and a connecting strip, the molecular pump is connected to a test chamber, the vacuum gauge is connected to the test chamber and is connected to the controller to form a signal feedback loop, the method comprising:

[0007] Obtain target vacuum degree;

[0008] When the speed of the molecular pump reaches the rated speed, the actual vacuum degree in the test chamber is obtained; the actual vacuum degree is collected in real time by the vacuum gauge;

[0009] Based on the comparison result between the target vacuum degree and the actual vacuum degree, at least one of acceleration control and deceleration control is performed on the molecular pump to realize a constant pressure working mode of the molecular pump.

[0010] In another aspect, there is provided an autonomous regulation system in which the rotation speed varies with the vacuum degree, the system comprising: a controller, a molecular pump and a vacuum gauge;

[0011] The controller and the molecular pump are connected together through a connecting plate and a connecting strip, the molecular pump is connected to a test chamber, the vacuum gauge is connected to the test chamber and is connected to the controller to form a signal feedback loop;

[0012] The molecular pump is used to perform a pumping operation on the test chamber;

[0013] The vacuum gauge is used to obtain the actual vacuum degree in the test chamber in real time and feed back the actual vacuum degree to the controller;

[0014] The controller is used to obtain a target vacuum degree, and after the rotation speed of the molecular pump reaches a rated rotation speed, based on a comparison result between the target vacuum degree and an actual vacuum degree fed back by the vacuum gauge, perform at least one of acceleration control and deceleration control on the molecular pump to achieve a constant pressure working mode of the molecular pump.

[0015] On the other hand, there is provided an autonomous regulating device for speed changing with vacuum degree, the device comprising:

[0016] A target vacuum degree acquisition module is used to acquire a target vacuum degree;

[0017] The actual vacuum degree acquisition module is used to obtain the actual vacuum degree in the test chamber when the speed of the molecular pump reaches the rated speed; the actual vacuum degree is acquired in real time by the vacuum gauge;

[0018] The vacuum degree regulating module is used to perform at least one of acceleration control and deceleration control on the molecular pump based on the comparison result of the target vacuum degree and the actual vacuum degree, so as to realize the constant pressure working mode of the molecular pump.

[0019] In a possible implementation, the vacuum degree adjustment module includes:

[0020] a deceleration control unit, configured to, when the actual vacuum degree is higher than the target vacuum degree, perform deceleration control on the molecular pump to reduce the actual vacuum degree to the target vacuum degree;

[0021] The acceleration control unit is used to perform acceleration control on the molecular pump when the actual vacuum degree is lower than the target vacuum degree, so as to increase the actual vacuum degree to the target vacuum degree.

[0022] In a possible implementation, the vacuum degree adjustment module further includes:

[0023] A target adjustable range acquisition unit, used to acquire a target adjustable range of the target vacuum degree;

[0024] The speed regulating unit is used to perform at least one of acceleration control and deceleration control on the molecular pump when the actual vacuum degree is not within the target adjustable range.

[0025] In a possible implementation manner, the target adjustable range is [target vacuum degree - 10%, target vacuum degree + 10%].

[0026] In a possible implementation manner, the speed adjustment unit is further used to:

[0027] Based on the target adjustable range, obtaining a maximum adjustable threshold value and a minimum adjustable threshold value of the target vacuum degree;

[0028] When the actual vacuum degree is higher than the maximum adjustable threshold, reducing the rotation speed of the molecular pump by 10% to reduce the actual vacuum degree to within the target adjustable range;

[0029] When the actual vacuum degree is lower than the minimum adjustable threshold, the rotation speed of the molecular pump is accelerated by 10% to increase the actual vacuum degree to within the target adjustable range.

[0030] In a possible implementation manner, the speed adjustment unit is further used to:

[0031] When the actual vacuum degree is within the target adjustable range, the target rotation speed of the molecular pump is kept unchanged.

[0032] In a possible implementation manner, the actual vacuum degree acquisition module is further used to:

[0033] When the autonomous regulating system whose rotation speed varies with the vacuum degree is set to a constant pressure working mode, and when the rotation speed of the molecular pump reaches the rated rotation speed, the actual vacuum degree in the test chamber is obtained;

[0034] The device is also used for:

[0035] When the autonomous regulating system whose speed varies with the vacuum degree is set to a constant speed working mode, and when the speed of the molecular pump reaches the rated speed, the molecular pump maintains the rated speed and operates stably to realize the constant speed working mode of the molecular pump.

[0036] On the other hand, a data processing device is provided, which includes a processing unit and a storage unit, wherein the storage unit stores at least one instruction, and the at least one instruction is loaded and executed by the processing unit to implement the above-mentioned method of autonomously adjusting the rotation speed as the vacuum degree changes.

[0037] On the other hand, a computer-readable storage medium is provided, wherein at least one instruction is stored in the storage medium, and the at least one instruction is loaded and executed by a processing unit to implement the above-mentioned method for autonomously adjusting the rotation speed as the vacuum degree changes.

[0038] The technical solution provided by this application may have the following beneficial effects:

[0039] The method is executed by a controller in an autonomous regulating system in which the rotation speed changes with the vacuum degree. The autonomous regulating system also includes a molecular pump and a vacuum gauge. The method includes: first obtaining the target vacuum degree, and when the rotation speed of the molecular pump reaches the rated rotation speed, the vacuum gauge obtains the actual vacuum degree in the test chamber in real time; based on the comparison result of the target vacuum degree and the actual vacuum degree, the molecular pump is subjected to at least one of acceleration control and deceleration control to realize the constant pressure working mode of the molecular pump. In the above scheme, the vacuum pump can self-regulate the rotation speed according to the vacuum degree data fed back by the vacuum gauge, so that the vacuum degree in the test chamber is quickly adjusted to the target vacuum degree, without the need for other equipment assistance, and without the need to build a separate platform, etc., which is convenient and fast, and reduces the impact on the molecular pump, avoids excessive heat generation of the molecular pump, and improves the safety and reliability of the molecular pump, which is of great significance for actual production and processing technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0041] Figure 1 It is a schematic structural diagram of an autonomous regulating system in which the rotation speed varies with the vacuum degree according to an exemplary embodiment.

[0042] Figure 2 The present invention is a method flow chart showing a method for autonomously adjusting the rotation speed according to changes in vacuum degree according to an exemplary embodiment.

[0043] Figure 3 The present invention is a method flow chart showing a method for autonomously adjusting the rotation speed according to changes in vacuum degree according to an exemplary embodiment.

[0044] Figure 4 The present invention is a method flow chart showing a method for autonomously adjusting the rotation speed according to changes in vacuum degree according to an exemplary embodiment.

[0045] Figure 5It is a structural block diagram of an autonomous regulating device in which the rotation speed varies with the vacuum degree according to an exemplary embodiment.

[0046] Figure 6 A structural block diagram of a data processing device shown in an exemplary embodiment of the present application is shown. DETAILED DESCRIPTION

[0047] The technical solution of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0048] It should be understood that in the description of the embodiments of the present application, the term "corresponding" may indicate a direct or indirect correspondence between the two, or an association between the two, or a relationship of indication and being indicated, configuration and being configured, etc.

[0049] Figure 1 The structure diagram of an autonomous regulating system in which the rotation speed varies with the vacuum degree is shown according to an exemplary embodiment. The autonomous regulating system includes a controller, a molecular pump and a vacuum gauge.

[0050] The controller and the molecular pump are connected together through a connecting plate and a connecting strip, the molecular pump is connected to a test chamber, the vacuum gauge is connected to the test chamber and is connected to the controller to form a signal feedback loop;

[0051] The molecular pump is used to perform a pumping operation on the test chamber;

[0052] The vacuum gauge is used to obtain the actual vacuum degree in the test chamber in real time and feed the actual vacuum degree back to the controller;

[0053] The controller is used to obtain a target vacuum degree, and after the rotation speed of the molecular pump reaches a rated rotation speed, based on a comparison result between the target vacuum degree and an actual vacuum degree fed back by the vacuum gauge, performs at least one of acceleration control and deceleration control on the molecular pump to realize a constant pressure working mode of the molecular pump.

[0054] Optionally, the main body of the molecular pump is also provided with an exhaust port and an air inlet, wherein the exhaust port is connected to the front-stage pump to assist in performing a vacuum operation on the test chamber and the main body of the molecular pump to achieve a pre-pumping effect, thereby satisfying the starting working conditions of the molecular pump; the air inlet is connected to the test chamber, and the vacuum operation on the test chamber is assisted by the air inlet.

[0055] Optionally, the controller is provided with a power supply connection serial port for connecting an external power supply, and the controller is driven by the external power supply to put the molecular pump into a working state.

[0056] Optionally, the processor in the controller may be a central processing unit (CPU), which may be a single-chip microcomputer chip to implement acceleration control and deceleration control of the molecular pump without the need for assistance from other equipment or a separate platform, and has a simple structure and convenient and fast connection.

[0057] Optionally, in actual applications, the user may first connect the molecular pump, vacuum gauge, controller and the equipment that needs to be evacuated (i.e., the above-mentioned test chamber), and then check the vacuum tightness of the autonomous adjustment system whose rotation speed changes with the vacuum degree. When there is no problem with the vacuum tightness of the autonomous adjustment system, the controller is driven by an external power supply to determine the constant pressure working mode of the molecular pump and set the target vacuum degree. The vacuum gauge measures the actual vacuum degree in the test chamber in real time. After the rotation speed of the molecular pump reaches the rated speed, the controller performs acceleration control and / or deceleration control on the molecular pump based on the comparison result between the target vacuum degree and the actual vacuum degree fed back by the vacuum gauge.

[0058] After a certain period of time, the actual vacuum degree in the test chamber will reach the target vacuum degree. At this time, even if the user inflates the test chamber, the molecular pump will automatically adjust the speed according to the pressure change to keep the vacuum degree in the test chamber constant. Therefore, the vacuum degree in the test chamber can be quickly adjusted to the target vacuum degree, which is simple to operate and reduces the impact on the molecular pump.

[0059] Optionally, when the user does not need the molecular pump to be in constant pressure working mode, the user can actively turn off the constant pressure working mode. At this time, the molecular pump will default to constant speed working mode and maintain rated speed operation; or directly switch the constant pressure working mode to constant speed working mode.

[0060] In summary, the present application first obtains the target vacuum degree through the controller, and when the speed of the molecular pump reaches the rated speed, the vacuum gauge obtains the actual vacuum degree in the test chamber in real time; based on the comparison result of the target vacuum degree and the actual vacuum degree, the molecular pump is subjected to at least one of acceleration control and deceleration control to realize the constant pressure working mode of the molecular pump. In the above scheme, the vacuum pump can self-regulate the speed according to the vacuum degree data fed back by the vacuum gauge, so that the vacuum degree in the test chamber can be quickly adjusted to the target vacuum degree, without the assistance of other equipment, and without the need to build a separate platform, etc. It is convenient and fast, and reduces the impact on the molecular pump, avoids excessive heat generation of the molecular pump, and improves the safety and reliability of the molecular pump, which is of great significance for the actual production and processing technology.

[0061] Figure 2 is a method flow chart showing a method for autonomously adjusting the rotation speed as the vacuum degree changes according to an exemplary embodiment. Figure 1 The controller in the autonomous regulating system of the speed changing with the vacuum degree is executed, and the autonomous regulating system of the speed changing with the vacuum degree also includes a molecular pump and a vacuum gauge; the controller is connected to the molecular pump through a connecting plate and a connecting strip, the molecular pump is connected to the test chamber, the vacuum gauge is connected to the test chamber and connected to the controller to form a signal feedback loop. Figure 2 As shown, the method for autonomously adjusting the rotation speed as the vacuum degree changes may include the following steps:

[0062] S201, obtaining a target vacuum degree.

[0063] In a possible implementation, when a molecular pump in an autonomous regulating system whose rotation speed varies with vacuum degree is switched to a constant pressure operating mode, a controller in the autonomous regulating system first obtains a target vacuum degree; wherein the target vacuum degree can be pre-set according to an actual application scenario.

[0064] S202. When the rotation speed of the molecular pump reaches the rated rotation speed, the actual vacuum degree in the test chamber is obtained; the actual vacuum degree is collected in real time by a vacuum gauge.

[0065] In one possible implementation, after setting the target vacuum degree of the test chamber, the molecular pump is driven to operate. When the speed of the molecular pump reaches the rated speed, the actual vacuum degree in the test chamber is collected in real time by a vacuum gauge, and the actual vacuum degree is fed back to the controller through a control loop, and the controller receives the actual vacuum degree.

[0066] S203: Based on the comparison result between the target vacuum degree and the actual vacuum degree, perform at least one of acceleration control and deceleration control on the molecular pump to realize a constant pressure working mode of the molecular pump.

[0067] In a possible implementation, after the controller obtains the actual vacuum degree, it compares the actual vacuum degree with the target vacuum degree, and continuously performs acceleration control and / or deceleration control on the molecular pump based on the comparison result, thereby realizing the constant pressure working mode of the molecular pump.

[0068] In summary, the method is executed by a controller in an autonomous regulating system in which the rotation speed changes with the vacuum degree, and the autonomous regulating system also includes a molecular pump and a vacuum gauge. The method includes: first obtaining the target vacuum degree, and when the rotation speed of the molecular pump reaches the rated rotation speed, the vacuum gauge obtains the actual vacuum degree in the test chamber in real time; based on the comparison result of the target vacuum degree and the actual vacuum degree, the molecular pump is subjected to at least one of acceleration control and deceleration control to realize the constant pressure working mode of the molecular pump. In the above scheme, the vacuum pump can self-regulate the rotation speed according to the vacuum degree data fed back by the vacuum gauge, so that the vacuum degree in the test chamber can be quickly adjusted to the target vacuum degree, without the assistance of other equipment, and without the need to build a separate platform, etc. It is convenient and fast, and reduces the impact on the molecular pump, avoids excessive heat generation of the molecular pump, and improves the safety and reliability of the molecular pump, which is of great significance for the actual production and processing technology.

[0069] Figure 3 is a method flow chart showing a method for autonomously adjusting the rotation speed as the vacuum degree changes according to an exemplary embodiment. Figure 1 The controller in the autonomous regulating system of the speed changing with the vacuum degree is executed, and the autonomous regulating system of the speed changing with the vacuum degree also includes a molecular pump and a vacuum gauge; the controller is connected to the molecular pump through a connecting plate and a connecting strip, the molecular pump is connected to the test chamber, the vacuum gauge is connected to the test chamber and connected to the controller to form a signal feedback loop. Figure 3 As shown, the method for autonomously adjusting the rotation speed as the vacuum degree changes may include the following steps:

[0070] S301, obtaining a target vacuum degree.

[0071] S302. When the autonomous regulating system whose rotation speed varies with the vacuum degree is set to a constant pressure working mode and the rotation speed of the molecular pump reaches a rated rotation speed, the actual vacuum degree in the test chamber is obtained; the actual vacuum degree is collected in real time by a vacuum gauge.

[0072] In a possible implementation, the user can switch the working mode of the autonomous adjustment system in which the speed changes with the vacuum degree according to actual needs, and realize the selection of constant pressure working mode and constant speed working mode. In the constant pressure working mode, when the speed of the molecular pump reaches the rated speed, the actual vacuum degree in the test chamber is collected in real time by the vacuum gauge, and the actual vacuum degree is adjusted according to the target vacuum degree to maintain a constant vacuum pressure in the test chamber, which is convenient for users to carry out production and processing technology under constant vacuum pressure.

[0073] S303: When the actual vacuum degree is higher than the target vacuum degree, perform deceleration control on the molecular pump to reduce the actual vacuum degree to the target vacuum degree.

[0074] Furthermore, after the controller obtains the target vacuum degree in the test chamber and the actual vacuum degree fed back by the vacuum gauge, based on the comparison result of the target vacuum degree and the actual vacuum degree, at least one of acceleration control and deceleration control is performed on the molecular pump to realize the constant pressure working mode of the molecular pump.

[0075] S304: When the actual vacuum degree is lower than the target vacuum degree, perform acceleration control on the molecular pump to increase the actual vacuum degree to the target vacuum degree.

[0076] Furthermore, the controller analyzes the comparison result of the target vacuum degree and the actual vacuum degree. When the actual vacuum degree is higher than the target vacuum degree, the rotation speed of the molecular pump is reduced to reduce the actual vacuum degree in the test chamber to the target vacuum degree; and when the actual vacuum degree is lower than the target vacuum degree, the rotation speed of the molecular pump is increased to increase the actual vacuum degree in the test chamber to the target vacuum degree.

[0077] In a possible implementation, obtaining a target adjustable range of the target vacuum degree;

[0078] When the actual vacuum degree is not within the target adjustable range, at least one of acceleration control and deceleration control is performed on the molecular pump.

[0079] In a possible implementation manner, the target adjustable range is [target vacuum degree - 10%, target vacuum degree + 10%].

[0080] In a possible implementation, based on the target adjustable range, a maximum adjustable threshold value (the maximum adjustable threshold value is the target vacuum degree + 10%) and a minimum adjustable threshold value (the minimum adjustable threshold value is the target vacuum degree + 10%) of the target vacuum degree are obtained;

[0081] When the actual vacuum degree is higher than the maximum adjustable threshold value (the maximum adjustable threshold value is the target vacuum degree + 10%), the rotation speed of the molecular pump is reduced by 10% to reduce the actual vacuum degree to within the target adjustable range;

[0082] When the actual vacuum is lower than the minimum adjustable threshold (the minimum adjustable threshold is the target vacuum+10%), the rotation speed of the molecular pump is accelerated by 10% to increase the actual vacuum to within the target adjustable range.

[0083] In a possible implementation, when the actual vacuum degree is within the target adjustable range, the target rotation speed of the molecular pump is kept unchanged.

[0084] For further information, please refer to Figure 4A method flow chart of a method for autonomously adjusting the speed as the vacuum degree changes is shown. Figure 4 As shown, in actual application, after the user turns on the machine, the program of the self-regulating system is initialized, and the working mode of the molecular pump is selected. When the working mode of the selected molecular pump is the constant pressure working mode, the target vacuum degree P0 is set first. After the molecular pump starts and reaches the rated speed, by comparing the actual vacuum degree P1 in the current test chamber with the target vacuum degree P0, the controller automatically adjusts the molecular pump to accelerate or decelerate, so that the actual vacuum degree P1 is constantly close to the target vacuum degree P0, and finally reaches the state of 0.9*P0≤P1≤1.1*P0, so as to realize the constant pressure working mode of the molecular pump; specifically, if the vacuum gauge reading (actual vacuum degree P1) is greater than P0×110%, the speed of the molecular pump is accelerated by 10%, until the vacuum gauge reading is less than P0×110%, the molecular pump maintains the current speed unchanged and runs stably until the molecular pump stops; if the vacuum gauge reading (actual vacuum degree P1) is less than P0×90%, the speed of the molecular pump is decelerated by 10%, until the vacuum gauge reading is greater than or equal to P0×110%, the molecular pump maintains the current speed unchanged and runs stably until the molecular pump stops.

[0085] If the actual vacuum degree P1 in the test chamber has reached the vicinity of the target vacuum degree P0, the molecular pump will continue to automatically adjust the speed to maintain P1≤P0*±10% by performing operations such as inflating the test chamber to change the vacuum degree.

[0086] S305. When the self-regulating system whose speed varies with the vacuum degree is set to a constant speed working mode, and when the speed of the molecular pump reaches the rated speed, the molecular pump maintains the rated speed and operates stably to realize the constant speed working mode of the molecular pump.

[0087] In a possible implementation, if the user does not want to use the constant pressure working function of the molecular pump, the user can actively turn off the constant pressure working mode or directly switch to the constant speed working mode. At this time, the molecular pump will default to the constant speed working mode and maintain the rated speed.

[0088] In summary, the method is executed by a controller in an autonomous regulating system in which the rotation speed changes with the vacuum degree, and the autonomous regulating system also includes a molecular pump and a vacuum gauge. The method includes: first obtaining the target vacuum degree, and when the rotation speed of the molecular pump reaches the rated rotation speed, the vacuum gauge obtains the actual vacuum degree in the test chamber in real time; based on the comparison result of the target vacuum degree and the actual vacuum degree, the molecular pump is subjected to at least one of acceleration control and deceleration control to realize the constant pressure working mode of the molecular pump. In the above scheme, the vacuum pump can self-regulate the rotation speed according to the vacuum degree data fed back by the vacuum gauge, so that the vacuum degree in the test chamber can be quickly adjusted to the target vacuum degree, without the assistance of other equipment, and without the need to build a separate platform, etc. It is convenient and fast, and reduces the impact on the molecular pump, avoids excessive heat generation of the molecular pump, and improves the safety and reliability of the molecular pump, which is of great significance for the actual production and processing technology.

[0089] Figure 5 1 is a block diagram of a structure of an autonomous regulating device for changing the speed with the vacuum degree according to an exemplary embodiment. The autonomous regulating device comprises:

[0090] A target vacuum degree acquisition module 501 is used to acquire a target vacuum degree;

[0091] The actual vacuum degree acquisition module 502 is used to acquire the actual vacuum degree in the test chamber when the speed of the molecular pump reaches the rated speed; the actual vacuum degree is acquired in real time by the vacuum gauge;

[0092] The vacuum degree regulating module 503 is used to perform at least one of acceleration control and deceleration control on the molecular pump based on the comparison result of the target vacuum degree and the actual vacuum degree, so as to realize the constant pressure working mode of the molecular pump.

[0093] In a possible implementation, the vacuum degree adjustment module 503 includes:

[0094] a deceleration control unit, for performing deceleration control on the molecular pump when the actual vacuum degree is higher than the target vacuum degree, so as to reduce the actual vacuum degree to the target vacuum degree;

[0095] The acceleration control unit is used for performing acceleration control on the molecular pump when the actual vacuum degree is lower than the target vacuum degree, so as to increase the actual vacuum degree to the target vacuum degree.

[0096] In a possible implementation, the vacuum degree adjustment module 503 further includes:

[0097] A target adjustable range acquisition unit, used to acquire the target adjustable range of the target vacuum degree;

[0098] The speed regulating unit is used to perform at least one of acceleration control and deceleration control on the molecular pump when the actual vacuum degree is not within the target adjustable range.

[0099] In a possible implementation manner, the target adjustable range is [target vacuum degree - 10%, target vacuum degree + 10%].

[0100] In a possible implementation manner, the speed adjustment unit is further used for:

[0101] Based on the target adjustable range, obtaining a maximum adjustable threshold value and a minimum adjustable threshold value of the target vacuum degree;

[0102] When the actual vacuum degree is higher than the maximum adjustable threshold, the rotation speed of the molecular pump is reduced by 10% to reduce the actual vacuum degree to within the target adjustable range;

[0103] When the actual vacuum degree is lower than the minimum adjustable threshold, the rotation speed of the molecular pump is accelerated by 10% to increase the actual vacuum degree to within the target adjustable range.

[0104] In a possible implementation manner, the speed adjustment unit is further used for:

[0105] When the actual vacuum degree is within the target adjustable range, the target rotation speed of the molecular pump is kept unchanged.

[0106] In a possible implementation, the actual vacuum degree acquisition module 502 is further used for:

[0107] When the self-regulating system whose rotation speed varies with the vacuum degree is set to a constant pressure working mode, and when the rotation speed of the molecular pump reaches the rated rotation speed, the actual vacuum degree in the test chamber is obtained;

[0108] The device is also used to:

[0109] When the self-regulating system whose speed varies with the vacuum degree is set to a constant speed working mode, and when the speed of the molecular pump reaches the rated speed, the molecular pump maintains the rated speed and operates stably to realize the constant speed working mode of the molecular pump.

[0110] In summary, the present application first obtains the target vacuum degree, and when the speed of the molecular pump reaches the rated speed, the vacuum gauge obtains the actual vacuum degree in the test chamber in real time; based on the comparison result of the target vacuum degree and the actual vacuum degree, the molecular pump is subjected to at least one of acceleration control and deceleration control to realize the constant pressure working mode of the molecular pump. In the above scheme, the vacuum pump can self-regulate the speed according to the vacuum degree data fed back by the vacuum gauge, so that the vacuum degree in the test chamber can be quickly adjusted to the target vacuum degree, without the assistance of other equipment, and without the need to build a separate platform, etc. It is convenient and fast, and reduces the impact on the molecular pump, avoids excessive heat generation of the molecular pump, and improves the safety and reliability of the molecular pump, which is of great significance for the actual production and processing technology.

[0111] See also Figure 6 , which is a schematic diagram of a data processing device provided according to an exemplary embodiment of the present application, the data processing device includes a memory and a processor, the memory is used to store a computer program, and when the computer program is executed by the processor, the above-mentioned method of autonomously adjusting the rotation speed as the vacuum degree changes is implemented.

[0112] The processor may be a central processing unit (CPU). The processor may also be other general-purpose processors, digital signal processors (DSP), application-specific integrated circuits (ASIC), field-programmable gate arrays (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, or a combination of the above chips.

[0113] As a non-transitory computer-readable storage medium, the memory can be used to store non-transitory software programs, non-transitory computer executable programs and modules, such as program instructions / modules corresponding to the method in the embodiment of the present invention. The processor executes various functional applications and data processing of the processor by running the non-transitory software programs, instructions and modules stored in the memory, that is, implementing the method in the above method embodiment.

[0114] The memory may include a program storage area and a data storage area, wherein the program storage area may store an operating system, an application required for at least one function; the data storage area may store data created by the processor, etc. In addition, the memory may include a high-speed random access memory, and may also include a non-transitory memory, such as at least one disk storage device, a flash memory device, or other non-transitory solid-state storage device. In some embodiments, the memory may optionally include a memory remotely disposed relative to the processor, and these remote memories may be connected to the processor via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0115] In an exemplary embodiment, a computer-readable storage medium is also provided, which is used to store at least one computer program, and the at least one computer program is loaded and executed by a processor to implement all or part of the steps in the above method. For example, the computer-readable storage medium can be a read-only memory (ROM), a random access memory (RAM), a compact disc read-only memory (CD-ROM), a magnetic tape, a floppy disk, an optical data storage device, etc.

[0116] Those skilled in the art will readily appreciate other embodiments of the present application after considering the specification and practicing the invention disclosed herein. The present application is intended to cover any modification, use or adaptation of the present application, which follows the general principles of the present application and includes common knowledge or customary techniques in the art that are not disclosed in the present application. The specification and examples are intended to be exemplary only, and the true scope and spirit of the present application are indicated by the following claims.

[0117] It should be understood that the present application is not limited to the precise structures that have been described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present application is limited only by the appended claims.

[0118] Those skilled in the art will readily appreciate other embodiments of the present application after considering the specification and practicing the invention disclosed herein. The present application is intended to cover any modification, use or adaptation of the present application, which follows the general principles of the present application and includes common knowledge or customary techniques in the art that are not disclosed in the present application. The specification and examples are intended to be exemplary only, and the true scope and spirit of the present application are indicated by the following claims.

[0119] It should be understood that the present application is not limited to the precise structures that have been described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present application is limited only by the appended claims.

Claims

1. A method for autonomously adjusting the rotation speed as the vacuum degree changes, characterized in that: The method is performed by a controller in an autonomous regulating system in which the rotation speed varies with the vacuum degree; the autonomous regulating system in which the rotation speed varies with the vacuum degree also includes a molecular pump and a vacuum gauge; the controller and the molecular pump are connected together through a connecting plate and a connecting strip, the molecular pump is connected to a test chamber, the vacuum gauge is connected to the test chamber and is connected to the controller to form a signal feedback loop, and the method includes: Obtain target vacuum degree; When the speed of the molecular pump reaches the rated speed, the actual vacuum degree in the test chamber is obtained; the actual vacuum degree is collected in real time by the vacuum gauge; Based on the comparison result of the target vacuum degree and the actual vacuum degree, performing at least one of acceleration control and deceleration control on the molecular pump to realize a constant pressure working mode of the molecular pump; The performing at least one of acceleration control and deceleration control on the molecular pump based on the comparison result of the target vacuum degree and the actual vacuum degree comprises: When the actual vacuum degree is higher than the target vacuum degree, performing deceleration control on the molecular pump to reduce the actual vacuum degree to the target vacuum degree; When the actual vacuum degree is lower than the target vacuum degree, performing acceleration control on the molecular pump to increase the actual vacuum degree to the target vacuum degree; The performing at least one of acceleration control and deceleration control on the molecular pump based on the comparison result of the target vacuum degree and the actual vacuum degree comprises: Obtaining a target adjustable range of the target vacuum degree; When the actual vacuum degree is not within the target adjustable range, performing at least one of acceleration control and deceleration control on the molecular pump; When the actual vacuum degree is not within the target adjustable range, performing at least one of acceleration control and deceleration control on the molecular pump includes: Based on the target adjustable range, obtaining a maximum adjustable threshold value and a minimum adjustable threshold value of the target vacuum degree; When the actual vacuum degree is higher than the maximum adjustable threshold, reducing the rotation speed of the molecular pump by 10% to reduce the actual vacuum degree to within the target adjustable range; When the actual vacuum degree is lower than the minimum adjustable threshold, the rotation speed of the molecular pump is accelerated by 10% to increase the actual vacuum degree to within the target adjustable range.

2. The method according to claim 1, characterized in that The target adjustable range is [target vacuum degree -10%, target vacuum degree +10%].

3. The method according to claim 1, characterized in that: When the actual vacuum degree is within the target adjustable range, the target rotation speed of the molecular pump is kept unchanged.

4. The method according to any one of claims 1 to 3, characterized in that: When the speed of the molecular pump reaches the rated speed, the actual vacuum degree in the test chamber is obtained, including: When the autonomous regulating system whose rotation speed varies with the vacuum degree is set to a constant pressure working mode, and when the rotation speed of the molecular pump reaches the rated rotation speed, the actual vacuum degree in the test chamber is obtained; The method further comprises: When the autonomous regulating system whose speed varies with the vacuum degree is set to a constant speed working mode, and when the speed of the molecular pump reaches the rated speed, the molecular pump maintains the rated speed and operates stably to realize the constant speed working mode of the molecular pump.

5. An autonomous regulating system in which the rotation speed varies with the vacuum degree, characterized in that: The system is used to implement the autonomous adjustment method of the rotation speed with the change of vacuum degree as described in any one of claims 1 to 4, and the system includes: a controller, a molecular pump and a vacuum gauge; The controller and the molecular pump are connected together through a connecting plate and a connecting strip, the molecular pump is connected to a test chamber, the vacuum gauge is connected to the test chamber and is connected to the controller to form a signal feedback loop; The molecular pump is used to perform a pumping operation on the test chamber; The vacuum gauge is used to obtain the actual vacuum degree in the test chamber in real time and feed back the actual vacuum degree to the controller; The controller is used to obtain a target vacuum degree, and after the rotation speed of the molecular pump reaches a rated rotation speed, based on a comparison result between the target vacuum degree and an actual vacuum degree fed back by the vacuum gauge, perform at least one of acceleration control and deceleration control on the molecular pump to achieve a constant pressure working mode of the molecular pump.

6. An autonomous regulating device for speed changes with vacuum degree, characterized in that: The device is applied to the method for autonomously adjusting the rotation speed as the vacuum degree changes according to any one of claims 1 to 4, and the device comprises: A target vacuum degree acquisition module is used to acquire a target vacuum degree; The actual vacuum degree acquisition module is used to obtain the actual vacuum degree in the test chamber when the speed of the molecular pump reaches the rated speed; the actual vacuum degree is acquired in real time by the vacuum gauge; The vacuum degree regulating module is used to perform at least one of acceleration control and deceleration control on the molecular pump based on the comparison result of the target vacuum degree and the actual vacuum degree, so as to realize the constant pressure working mode of the molecular pump.

7. A data processing device, characterized in that: The data processing device includes a processing unit and a storage unit, wherein the storage unit stores at least one instruction, and the at least one instruction is loaded and executed by the processing unit to implement an autonomous adjustment method for rotation speed as the vacuum degree changes as described in any one of claims 1 to 4.

Images