An ion implantation machine control terminal for chip manufacturing

Abstract

The present invention relates to the technical field of control terminals, and in particular to an ion implanter control terminal for chip manufacturing, comprising: a control terminal, the front side of which is provided with a plurality of ports distributed at equal intervals; a fixing mechanism, the fixing mechanism comprising a cavity one opened at the bottom of the control terminal, the number of the cavity one being four, a plurality of fixed rods distributed at equal intervals being fixedly connected above the inner cavity of the cavity one, a locking block being rotatably connected to the surface of the fixing rod, and a spring being fixedly connected above one side of the locking block. In actual use, the present invention first changes the traditional bolt installation method, and sets a fixing mechanism at the bottom of the control terminal, which is not only quick and efficient in disassembly and assembly, but also does not need to worry about rust and corrosion at the connection, resulting in the occurrence of loose connection. Finally, there is no need to open a mounting hole at the top of the control terminal, which further improves the aesthetics of the control terminal.

Description

Technical Field

[0001] The invention relates to the technical field of control terminals, in particular to an ion implanter control terminal used for chip manufacturing. Background Art

[0002] A control terminal refers to a terminal controller that can control one, a set of equipment or several sets of equipment. A control terminal generally consists of four parts: control circuit, wireless interface circuit, wired access circuit and switching circuit.

[0003] When the control terminal is in use, firstly, due to its precise design, when the user uses bolts and other fixing workpieces to install it, not only will the vibration of the parts during the installation process have a slight impact on the components inside the control terminal, but the operation time is also long, and the connection gaps of the bolts are prone to corrosion, which can easily cause connection failure; secondly, there are a large number of ports on the surface of the control terminal, and it cannot be guaranteed that multiple ports are used at the same time. If the port is not in use, its open design will inevitably allow dust to enter its interior. After a certain period of time, it is bound to cause poor contact of the port, further reducing the transmission effect and service life of the control terminal. In order to solve the above problems, an ion implantation machine control terminal for chip manufacturing is urgently needed to be developed. Summary of the invention

[0004] The purpose of the present invention is to provide an ion implanter control terminal for chip manufacturing, which has the advantages of easy disassembly and assembly and good protection effect, and solves the problems raised by the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solution: an ion implanter control terminal for chip manufacturing, comprising: a control terminal, wherein a plurality of ports distributed at equal intervals are opened on the front side of the control terminal.

[0006] The fixing mechanism comprises a cavity one opened at the bottom of the control terminal, the number of the cavities one is four, a plurality of equally spaced fixing rods are fixedly connected to the top of the inner cavity of the cavity one, a locking block is rotatably connected to the surface of the fixing rod, a spring is fixedly connected to the top of one side of the locking block, one end of the spring away from the locking block is fixedly connected to the cavity one, an inclined surface is provided at the bottom of one side of the locking block, a base is provided at the bottom of the control terminal, a placement groove is provided at the four corners of the top of the base, a motor is fixedly connected to the bottom of the inner cavity of the placement groove, the output shaft of the motor is fixedly connected to the connecting block, a movable groove used in conjunction with the locking block is provided at the top of the connecting block, a locking groove is provided at the bottom of the inner cavity of the movable groove, a plurality of equally spaced sliding grooves are jointly provided at the top of the movable groove and the inner cavity of the locking groove, and the sliding groove is used in conjunction with the locking block.

[0007] A protective mechanism, the protective mechanism includes a connecting plate fixedly connected to the control terminal, a connecting groove 1 for use with the port is provided on the front side of the connecting plate, a protective block is movably connected to the inner cavity of the connecting groove 1, a connecting rod is fixedly connected to the left side of the front surface of the control terminal, a fixed plate is rotatably connected to the surface of the connecting rod, a connecting groove 2 for use with the connecting plate is provided on the rear side of the fixed plate, a through groove is provided on the front side of the fixed plate, a fixed block is fixedly connected to the right side of the back surface of the fixed plate, and a fixing groove for use with the fixed block is provided on the right side of the front surface of the control terminal.

[0008] Furthermore, as a preferred embodiment of the present invention, a gasket is fixedly connected to the bottom of the base.

[0009] Furthermore, as a preferred embodiment of the present invention, one side of the locking block is provided with a curved surface.

[0010] Furthermore, as a preferred embodiment of the present invention, a cavity 2 is opened inside the base, two symmetrically arranged motors are fixedly connected to the bottom of the inner cavity of the cavity 2, a cooling fan is fixedly connected to the output shaft of the motor, and a plurality of cooling holes 1 distributed at equal intervals are opened on the top of the base.

[0011] Furthermore, as a preferred embodiment of the present invention, a plurality of heat dissipation holes 2 distributed at equal intervals are provided on both sides of the base, and the heat dissipation holes 2 are arranged at an angle.

[0012] Furthermore, as a preferred embodiment of the present invention, a limiting groove is provided at the bottom of the inner cavity of the placement groove, the bottom of the inner cavity of the limiting groove is slidably connected to a limiting block, and the top of the limiting block is fixedly connected to the connecting block.

[0013] Furthermore, as a preferred embodiment of the present invention, a rubber ring is provided on the surface of the protection block.

[0014] Furthermore, as a preferred embodiment of the present invention, a buckle groove is provided on the front side of the protective block, and the buckle groove is square in shape.

[0015] Furthermore, as a preferred embodiment of the present invention, the diameter of the locking groove is larger than the diameter of the movable groove.

[0016] Furthermore, as a preferred embodiment of the present invention, the locking block is in a "J" shape.

[0017] Beneficial effects: The technical solution of the present application has the following technical effects: the present invention achieves the effect of quick disassembly and assembly of the control terminal and improves the installation efficiency through the coordinated use of the port, cavity 1, fixing rod, locking block, spring, inclined plane, base, placement slot, motor, connecting block, movable slot, locking slot and slide slot; the port is protected to prevent dust from entering and affecting the transmission effect of the control terminal through the coordination of the connecting slot 1, protective block, connecting rod, fixing plate, connecting slot 2, through slot, fixing block and fixing slot; the use of the ion implanter control terminal for chip manufacturing has the advantages of easy disassembly and assembly and good protection effect; in actual use, the first First, the traditional bolt installation method is changed, and a fixing mechanism is set at the bottom of the control terminal. Not only is the disassembly and assembly relatively fast and efficient, but there is also no need to worry about rust and corrosion at the joints, which may cause loose connections. Finally, there is no need to open a mounting hole on the top of the control terminal, which further improves the aesthetics of the control terminal. Secondly, a protective mechanism is added to the port to protect the port according to changes in usage requirements. This can not only block dust when it is idle, reduce the occurrence of poor contact, leakage or short circuit, but also avoid damage to the port due to impact from foreign objects. The port is protected to a great extent, further extending the service life of the control terminal.

[0018] It should be appreciated that all combinations of the foregoing concepts, as well as additional concepts described in greater detail below, may be considered to be part of the inventive subject matter of the present disclosure, provided such concepts are not mutually inconsistent. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0021] Figure 2 It is a three-dimensional schematic diagram of the control terminal and the base of the present invention in the disassembled state;

[0022] Figure 3 A three-dimensional schematic diagram of the local structure of the present invention in a disassembled state Figure 1 ;

[0023] Figure 4 A three-dimensional schematic diagram of the partial structure of the present invention in a disassembled state Figure 2 ;

[0024] Figure 5 It is a three-dimensional schematic diagram of the base of the present invention;

[0025] Figure 6 It is a schematic diagram of the three-dimensional structure of the control terminal of the present invention when viewed from above.

[0026] In the figure, the meaning of each figure mark is as follows: 1. control terminal; 2. port; 3. cavity one; 4. fixing rod; 5. locking block; 6. spring; 7. inclined plane; 8. base; 9. placement slot; 10. motor; 11. connecting block; 12. movable slot; 13. locking slot; 14. slide slot; 15. connecting plate; 16. connecting slot one; 17. protective block; 18. connecting rod; 19. fixing plate; 20. connecting slot two; 21. through slot; 22. fixing block; 23. fixing slot; 24. gasket; 25. arc surface; 26. cavity two; 27. motor; 28. cooling fan; 29. ​​cooling hole one; 30. cooling hole two; 31. limiting slot; 32. limiting block; 33. rubber ring; 34. buckle slot. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. In order to better understand the technical content of the present invention, specific embodiments are cited and explained in conjunction with the drawings as follows. Various aspects of the present invention are described in this disclosure with reference to the drawings, in which many illustrative embodiments are shown. It should be understood that the various concepts and embodiments introduced above, as well as those described in more detail below, can be implemented in any of many ways. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0028] As attached Figure 1 To Attachment Figure 6 As shown: This embodiment provides an ion implanter control terminal for chip manufacturing, including: a control terminal 1, and a front side of the control terminal 1 is provided with a plurality of ports 2 distributed at equal intervals.

[0029] The fixing mechanism includes a cavity 3 opened at the bottom of the control terminal 1, the number of cavities 3 is four, and a plurality of equally spaced fixing rods 4 are fixedly connected to the upper part of the inner cavity of the cavity 3, and a locking block 5 is rotatably connected to the surface of the fixing rod 4, and the shape of the locking block 5 is "J"-shaped, and a spring 6 is fixedly connected to the upper part of one side of the locking block 5, and one end of the spring 6 away from the locking block 5 is fixedly connected to the cavity 3, and an inclined surface 7 is provided at the bottom of one side of the locking block 5, and a base 8 is provided at the bottom of the control terminal 1, and the bottom of the base 8 is fixed A gasket 24 is connected, and placement grooves 9 are provided at the four corners of the top of the base 8. The bottom of the inner cavity of the placement groove 9 is fixedly connected to a motor 10, and the output shaft of the motor 10 is fixedly connected to a connecting block 11. The top of the connecting block 11 is provided with a movable groove 12 used in conjunction with the locking block 5, and the bottom of the inner cavity of the movable groove 12 is provided with a locking groove 13. The diameter of the locking groove 13 is larger than the diameter of the movable groove 12. The tops of the inner cavities of the movable groove 12 and the locking groove 13 are jointly provided with a plurality of equally spaced slide grooves 14, and the slide grooves 14 are used in conjunction with the locking block 5.

[0030] The protective mechanism includes a connecting plate 15 fixedly connected to the control terminal 1, a connecting groove 16 for use with the port 2 is provided on the front side of the connecting plate 15, a protective block 17 is movably connected to the inner cavity of the connecting groove 16, a connecting rod 18 is fixedly connected to the left side of the front surface of the control terminal 1, a fixing plate 19 is rotatably connected to the surface of the connecting rod 18, a connecting groove 20 for use with the connecting plate 15 is provided on the rear side of the fixing plate 19, a through groove 21 is provided on the front side of the fixing plate 19, a fixing block 22 is fixedly connected to the right side of the back surface of the fixing plate 19, and a fixing groove 23 for use with the fixing block 22 is provided on the right side of the front surface of the control terminal 1.

[0031] Specifically, a curved surface 25 is provided on one side of the locking block 5 .

[0032] In this embodiment, the arc surface 25 is provided to prevent the locking block 5 from being too sharp and from sliding into the inner cavity of the movable groove 12 and causing scratches on the surface of the movable groove 12 when the locking block 5 is interlocked with the locking groove 13 through the movable groove 12.

[0033] Specifically, a cavity 26 is provided inside the base 8, and two symmetrically arranged motors 27 are fixedly connected to the bottom of the inner cavity of the cavity 26. A cooling fan 28 is fixedly connected to the output shaft of the motor 27, and a plurality of cooling holes 29 are provided at equal intervals on the top of the base 8.

[0034] In this embodiment: through the coordinated use of cavity 26, motor 27, cooling fan 28 and cooling hole 1 29, the control terminal 1 is cooled and cooled, avoiding that after the control terminal 1 is fixed to the base 8, its bottom is too tightly connected to the surface of the base 8, which makes it difficult to dissipate heat, reduces the operating speed of the components, and causes system instability.

[0035] Specifically, a plurality of heat dissipation holes 30 are provided on both sides of the base 8 and are distributed at equal intervals. The heat dissipation holes 30 are arranged obliquely.

[0036] In this embodiment, the second heat dissipation hole 30 is provided to cooperate with the first heat dissipation hole 29 to exchange hot and cold air and improve the heat dissipation efficiency.

[0037] Specifically, a limiting groove 31 is provided at the bottom of the inner cavity of the placement groove 9 , the bottom of the inner cavity of the limiting groove 31 is slidably connected to a limiting block 32 , and the top of the limiting block 32 is fixedly connected to the connecting block 11 .

[0038] In this embodiment, by using the limiting groove 31 and the limiting block 32 in coordination, the connecting block 11 is limited by the length of the limiting groove 31 and drives the movement range of the slide groove 14 on its surface to stop at its limited position, thereby ensuring that the locking block 5 can be disengaged from the inside of the slide groove 14.

[0039] Specifically, a rubber ring 33 is sleeved on the surface of the protection block 17 .

[0040] In this embodiment, the rubber ring 33 is provided to further seal the connection between the protection block 17 and the connection groove 16 , thereby further reducing the possibility of dust entering the port 2 .

[0041] Specifically, a buckle groove 34 is formed on the front side of the protection block 17, and the buckle groove 34 is square in shape.

[0042] In this embodiment, the buckle groove 34 is provided to facilitate the user to take the protective block 17, thereby improving the convenience of use.

[0043] The working principle and use process of the present invention are as follows: the user first aligns the control terminal 1 with the base 8 so that the locking block 5 contacts the movable groove 12, and then presses the control terminal 1 downward. The locking block 5 slides into the inner cavity of the movable groove 12 under the push of the control terminal 1. Since the diameter of the movable groove 12 is small, during the downward sliding of the locking block 5, the inclined surface 7 on one side thereof first contacts the movable groove 12, and under the pressure of the inner wall of the movable groove 12, multiple locking blocks 5 shrink inward at the same time and pull the spring 6 to move in the same direction, so that the spring 6 is in a stretched state at this time. With the continuous transmission of the control terminal 1, the locking block 5 continues to move downward, that is, moves to the inner cavity of the locking groove 13. Since the diameter of the locking groove 13 is larger than the diameter of the control terminal 1, the locking block 5 can The locking block 5 is pulled outwards again through the locking groove 13 and under the recovery of the elastic potential energy of the spring 6, and then when the locking block 5 is expanded outwards, it bounces to the inner cavity of the locking groove 13 and engages with the locking groove 13, and the installation of the control terminal 1 is completed. On the contrary, the motor 10 is turned on, and the output shaft of the motor 10 drives the connecting block 11 to rotate, and the connecting block 11 drives the slide groove 14 at the top and the limit block 32 at the bottom to rotate in the inner cavity of the limit groove 31 at the same time. Due to the length limitation of the limit groove 31, after the limit block 32 moves to the other side of the limit groove 31, the motor 10 stops transmission, that is, the slide groove 14 is moved to the position of the locking block 5, and then the locking block 5 is unlocked, and the user pulls it upwards again to complete its disassembly;

[0044] Secondly, when the control terminal 1 is used, the network cable is first passed through the through groove 21 and the second connection groove 20 on the surface of the fixing plate 19, and then through the connection groove 1 16 on the surface of the connection plate 15 to connect with the port 2. If there is an idle port 2, the user first pushes the protection block 17 into the inner cavity of the connection groove 1 16 by buckling the buckle groove 34, and strengthens the sealing of the protection block 17 and the connection groove 1 16 under the action of the rubber ring 33, thereby sealing and protecting the port 2 to prevent dust from entering the port 2, and then connects the fixing plate 19 to the connection plate 15, so that the fixing plate 19 is inserted into the fixing groove 23 through the fixing block 22 to connect with the control terminal 1, so that the fixing plate 19 fits with the connection plate 15 under the action of the connection groove 20, and further fixes the protection block 17 to enhance its stability;

[0045] Finally, when the control terminal 1 is running, the motor 27 is turned on, and the output shaft of the motor 27 drives the cooling fan 28 to rotate. The cooling fan 28 transfers the cold air to the surface of the control terminal 1 through the cooling hole 1 29, and the control terminal 1 then transfers part of the hot air to the cavity 2 26. However, with the cooperation of the cooling hole 2 30, the exchange of cold and hot air is further accelerated, thereby achieving heat dissipation of the control terminal 1.

[0046] It should be noted that, in this document, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0047] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. A person with ordinary knowledge in the technical field to which the present invention belongs may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the definition of the claims.

Claims

1. An ion implanter control terminal for chip manufacturing, comprising: A control terminal (1), characterized in that: a front side of the control terminal (1) is provided with a plurality of ports (2) distributed at equal intervals; The fixing mechanism comprises a cavity (3) opened at the bottom of the control terminal (1), the number of the cavity (3) is four, a plurality of equally spaced fixing rods (4) are fixedly connected to the top of the inner cavity of the cavity (3), a locking block (5) is rotatably connected to the surface of the fixing rod (4), a spring (6) is fixedly connected to the top of one side of the locking block (5), one end of the spring (6) away from the locking block (5) is fixedly connected to the cavity (3), an inclined surface (7) is opened at the bottom of one side of the locking block (5), and a base (7) is provided at the bottom of the control terminal (1) 8), the four corners of the top of the base (8) are provided with placement grooves (9), the bottom of the inner cavity of the placement groove (9) is fixedly connected to a motor (10), the output shaft of the motor (10) is fixedly connected to a connecting block (11), the top of the connecting block (11) is provided with a movable groove (12) for use with a locking block (5), the bottom of the inner cavity of the movable groove (12) is provided with a locking groove (13), the tops of the inner cavities of the movable groove (12) and the locking groove (13) are jointly provided with a plurality of equally spaced sliding grooves (14), and the sliding grooves (14) are used in conjunction with the locking block (5); A protective mechanism, the protective mechanism comprises a connecting plate (15) fixedly connected to a control terminal (1), a connecting groove (16) for use with a port (2) being provided on the front side of the connecting plate (15), a protective block (17) being movably connected to the inner cavity of the connecting groove (16), a connecting rod (18) being fixedly connected to the left side of the front surface of the control terminal (1), a fixing plate (19) being rotatably connected to the surface of the connecting rod (18), a connecting groove (20) for use with the connecting plate (15) being provided on the rear side of the fixing plate (19), a through groove (21) being provided on the front side of the fixing plate (19), a fixing block (22) being fixedly connected to the right side of the back surface of the fixing plate (19), and a fixing groove (23) for use with the fixing block (22) being provided on the right side of the front surface of the control terminal (1).

2. The ion implanter control terminal for chip manufacturing according to claim 1, characterized in that: A gasket (24) is fixedly connected to the bottom of the base (8).

3. The ion implanter control terminal for chip manufacturing according to claim 1, characterized in that: A curved surface (25) is provided on one side of the locking block (5).

4. The ion implanter control terminal for chip manufacturing according to claim 1, characterized in that: The base (8) is provided with a second cavity (26) inside, and the bottom of the inner cavity of the second cavity (26) is fixedly connected to two symmetrically arranged motors (27), and the output shaft of the motor (27) is fixedly connected to a cooling fan (28), and the top of the base (8) is provided with a plurality of cooling holes (29) distributed at equal intervals.

5. The ion implanter control terminal for chip manufacturing according to claim 4, characterized in that: A plurality of heat dissipation holes (30) distributed at equal intervals are provided on both sides of the base (8), and the heat dissipation holes (30) are arranged in an inclined manner.

6. The ion implanter control terminal for chip manufacturing according to claim 1, characterized in that: A limiting groove (31) is provided at the bottom of the inner cavity of the placement groove (9), the bottom of the inner cavity of the limiting groove (31) is slidably connected to a limiting block (32), and the top of the limiting block (32) is fixedly connected to the connecting block (11).

7. The ion implanter control terminal for chip manufacturing according to claim 1, characterized in that: The surface of the protection block (17) is sleeved with a rubber ring (33).

8. The ion implanter control terminal for chip manufacturing according to claim 1, characterized in that: A buckle groove (34) is provided on the front side of the protection block (17), and the buckle groove (34) is square in shape.

9. The ion implanter control terminal for chip manufacturing according to claim 1, characterized in that: The diameter of the locking groove (13) is greater than the diameter of the movable groove (12).

10. The ion implanter control terminal for chip manufacturing according to claim 1, characterized in that: The locking block (5) is in a "J" shape.

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