Adjustment Method of Slicing Machine

By measuring the current value of the lifting mechanism of the slicer and adjusting the rotation speed, the problems of low cutting efficiency and reduced silicon wafer yield caused by excessive diamond linear deformation are solved, and the degree of diamond linear deformation and the improvement of cutting efficiency are achieved.

CN115416169BActive Publication Date: 2025-06-03ZHEJIANG JINGSHENG MECHANICAL & ELECTRICAL CO LTD
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Patent Information

Application Number
CN202210896875.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-07-28
Publication Date
2025-06-03
Estimated Expiration
2042-07-28

AI Technical Summary

Technical Problem

During the cutting process of existing slicers, the deformation degree of the diamond wire is too large, causing overall fluctuations in the wire network, unstable tension of the diamond wire, and even causing wire breakage or reducing the yield of the silicon wafer.

Method used

By measuring the current value corresponding to the inlet amount of the lifting mechanism relative to the diamond wire, a first functional relationship is established, and the rotation speed of the lifting motor is adjusted to control the current value within the preset range. At the same time, a second functional relationship of the diamond wire feeding amount corresponds to the speed of the lifting motor is established, and the speed value at different feeding positions is adjusted to keep the current value within the preset range.

Benefits of technology

It effectively reduces the deformation degree of the diamond wire, ensures the cutting efficiency of the slicer, avoids the broken wire of the diamond wire and improves the yield of the silicon wafer.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present application relates to a method for adjusting a slicing machine. The method for adjusting the slicing machine includes the following steps: establishing a first functional relationship between the feed amount of the diamond wire and the current value of the lifting motor or the current value of the spindle motor. Adjusting the rotational speed value of the lifting motor so that the current value of the lifting motor is within a first preset range value, or so that the current value of the spindle motor is within a second preset range value. Establishing a second functional relationship between the feed amount of the diamond wire and the rotational speed value of the lifting motor, and adjusting the magnitude of the rotational speed value of the corresponding lifting motor at different feed positions so that the current value of the lifting motor is within a first preset range value, or so that the current value of the spindle motor is within a second preset range value. The method for adjusting the slicing machine provided by the present application can reduce the deformation degree of the diamond wire and ensure the cutting efficiency of the slicing machine.
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Description

Technical Field

[0001] The present application relates to the technical field of silicon wafer processing, and particularly to a method for adjusting a slicing machine. Background Art

[0002] Generally, a slicing machine drives a silicon rod to move towards a diamond wire through a lifting mechanism so that the diamond wire cuts the silicon rod into silicon wafers. Moreover, a wire mesh composed of multiple rows of diamond wires will deform into an arc shape under the pressure of the silicon rod. Further, if the deformation degree of the diamond wire is too large, it will cause the overall fluctuation of the wire mesh, and then lead to unstable tension of the diamond wire, and even cause problems such as diamond wire breakage or a decrease in the yield rate of silicon wafers. Summary of the Invention

[0003] Based on this, it is necessary to provide a method for adjusting a slicing machine, which can reduce the deformation degree of the diamond wire and ensure the cutting efficiency of the slicing machine.

[0004] The method for adjusting a slicing machine provided by the present application includes the following steps: measuring the current value of a lifting motor corresponding to the feed amount of the lifting mechanism relative to the diamond wire or the current value of a spindle motor, and establishing a first functional relationship between the feed amount of the diamond wire and the current value of the lifting motor or the spindle motor. According to the first functional relationship, adjusting the rotational speed value of the lifting motor so that the current value of the lifting motor or the current value of the spindle motor satisfies the following conditions: when the current value of the lifting motor is greater than a first preset range value, or the current value of the spindle motor is greater than a second preset range value, reducing the rotational speed value of the lifting motor so that the current value of the lifting motor is within the first preset range value, or so that the current value of the spindle motor is within the second preset range value; when the current value of the lifting motor is less than the first preset range value, or the current value of the spindle motor is less than the second preset range value, increasing the rotational speed value of the lifting motor so that the current value of the lifting motor is within the first preset range value, or so that the current value of the spindle motor is within the second preset range value. Establishing a second functional relationship between the feed amount of the diamond wire and the rotational speed value of the lifting motor, and according to the second functional relationship, adjusting the rotational speed value of the lifting motor corresponding to different feed positions so that the current value of the lifting motor is within the first preset range value, or so that the current value of the spindle motor is within the second preset range value.

[0005] In one embodiment, the adjustment method of the slicing machine further includes the following steps: according to the first functional relationship, adjust the rotational speed value of the main shaft motor. When the current value of the lifting motor is greater than the first preset range value, or when the current value of the main shaft motor is greater than the second preset range value, increase the rotational speed value of the main shaft motor so that the current value of the lifting motor is within the first preset range value, or so that the current value of the main shaft motor is within the second preset range value. When the current value of the lifting motor is less than the first preset range value, or when the current value of the main shaft motor is less than the second preset range value, decrease the rotational speed value of the main shaft motor so that the current value of the lifting motor is within the first preset range value, or so that the current value of the main shaft motor is within the second preset range value.

[0006] In one embodiment, the lifting motor is electrically connected to a first frequency converter, and the rotational speed value of the lifting motor is controlled by adjusting the frequency value of the first frequency converter.

[0007] In one embodiment, the main shaft motor is electrically connected to a second frequency converter, and the rotational speed value of the main shaft motor is controlled by adjusting the frequency value of the second frequency converter.

[0008] In one embodiment, the current value of the lifting motor is measured by a first multimeter;

[0009] In one embodiment, the current value of the main shaft motor is measured by a second multimeter.

[0010] In one embodiment, the slicing machine is further provided with an alarm. The alarm is electrically connected to the first multimeter for measuring the current value of the lifting motor and the lifting motor respectively. When the current value of the lifting motor is greater than the first preset range value, the first multimeter can transmit a signal to the alarm, and the alarm can issue an alarm and control the lifting motor to stop working.

[0011] In one embodiment, the feed amount of the diamond wire is measured by a displacement sensor.

[0012] In one embodiment, multiple feed amount position measurement points of the diamond wire are set to measure the feed position of the diamond wire through the feed position measurement points, and the distances between adjacent feed position measurement points are equal.

[0013] In one of the embodiments, the following steps are further included: Before cutting, divide the cutting process of the slicing machine into multiple segments according to the cutting time or the feed amount of the lifting mechanism relative to the wire saw, record the cutting duration T1 of the slicing machine before the current value of the lifting motor is greater than the first preset range value during each cutting segment, and the cutting duration T2 of the slicing machine before the current value of the main shaft motor is greater than the second preset range value, and take the smaller value of T1 and T2. When starting to cut, use the control system to determine which cutting segment the cutting machine is in, and the control system real-time detects the current value of the lifting motor, the rotational speed value of the lifting motor, the current value of the main shaft motor, and the rotational speed value of the main shaft motor. When the control system detects that the current change of the lifting motor, the rotational speed change of the lifting motor, the current change of the main shaft motor, and the rotational speed change of the main shaft motor are consistent with the change data before the current value of the lifting motor in the historical data is greater than the first preset range value or the change data before the current value of the main shaft in the historical data is greater than the second preset range value, before the slicing machine reaches the cutting duration T1 or T2, control the lifting speed of the lifting motor to decrease by 5%-10%, or control the rotational speed of the main shaft motor to increase by 5%-10%. If the current value of the lifting motor continues to be greater than the first preset range value, or the current value of the main shaft motor continues to be greater than the second preset range value, record the adjustment process of the control system after the above-mentioned start of cutting in the error adjustment database. When the control system detects that the current change of the lifting motor, the rotational speed change of the lifting motor, the current change of the main shaft motor, and the rotational speed change of the main shaft motor are consistent with the change data before the current value of the lifting motor in the historical data is greater than the first preset range value or the change data before the current value of the main shaft in the historical data is greater than the second preset range value, the control system calls the corresponding error adjustment database and, based on the data in the error adjustment database, controls the lifting speed of the lifting motor to decrease by 10%-15%, or controls the rotational speed of the main shaft motor to increase by 10%-15%. If the current value of the lifting motor always remains less than or equal to the first preset range value, or the current value of the main shaft motor always remains less than or equal to the second preset range value, record the data of this adjustment in the correct adjustment database.

[0014] In one embodiment, based on the current fluctuation diagram of the lifting motor or the current fluctuation diagram of the spindle motor during each cutting process, a current adjustment coefficient t is set to satisfy α ≤ t ≤ β. Further, the current value of the lifting motor is set to the average current value of the lifting motor during each cutting process multiplied by the current adjustment coefficient t, and the current value of the spindle motor is set to the average current value of the spindle motor during each cutting process multiplied by the current adjustment coefficient t. When, within a preset time, the current value of the lifting motor is always lower than the set value after multiplying the average current value of the lifting motor during the cutting process by the current adjustment coefficient t, the rotational speed of the lifting motor is gradually increased so that the current value of the lifting motor is greater than or equal to the set value after multiplying the average current value of the lifting motor during the cutting process by the current adjustment coefficient t. Alternatively, when, within a preset time, the current value of the spindle motor is always lower than the set value after multiplying the average current value of the spindle motor during the cutting process by the current adjustment coefficient t, the rotational speed of the spindle motor is gradually increased so that the current value of the spindle motor is greater than or equal to the set value after multiplying the average current value of the spindle motor during the cutting process by the current adjustment coefficient t.

[0015] In one embodiment, the feed amount of the lifting mechanism relative to the diamond wire and the deformation amount of the corresponding diamond wire are measured, and a fifth functional relationship between the feed amount of the diamond wire and the deformation amount of the diamond wire is established. According to the fifth functional relationship and the second functional relationship, a first functional relationship between the feed amount of the diamond wire and the current value of the lifting motor is obtained.

[0016] Compared with the prior art, in the adjustment method of the slicing machine provided in the present application, when the deformation amount of the diamond wire 900 increases, the resistance received by the lifting mechanism 800 increases, and further the output power corresponding to the lifting motor 400 increases. Moreover, the current value of the lifting motor 400 is positively correlated with the output power of the lifting motor 400. Therefore, the current value of the lifting motor 400 is also larger, that is, the deformation amount of the diamond wire 900 is positively correlated with the current value of the lifting motor 400. Similarly, when the deformation amount of the diamond wire 900 increases, the friction between the diamond wire 900 and the lifting mechanism 800 increases, and further the output power corresponding to the main shaft motor also increases. Moreover, the current value of the main shaft motor is positively correlated with the output power of the main shaft motor. Therefore, the current value of the main shaft motor is also larger, that is, the deformation amount of the diamond wire 900 is positively correlated with the current value of the main shaft motor. Therefore, as can be seen from the above, the deformation amount of the diamond wire 900 can be indirectly obtained by measuring the current value of the lifting motor 400 or the current value of the main shaft motor. And, compared with directly measuring the deformation amount of the diamond wire 900, it is more difficult to measure the current value of the lifting motor 400 or the current value of the main shaft motor, thus greatly reducing the adjustment difficulty of the slicing machine. Further, when the deformation amount of the diamond wire 900 is greater than the first preset range value, the rotation speed value of the lifting motor 400 is reduced, the lifting speed of the lifting mechanism 800 can be reduced, and further the acting force of the lifting mechanism 800 on the diamond wire 900 can be reduced. In this way, the deformation amount of the diamond wire 900 can be reduced. When the deformation amount of the diamond wire 900 is within the first preset range value, it can be ensured that the diamond wire 900 will not cause the overall fluctuation of the wire mesh due to excessive deformation, and further the breakage of the diamond wire 900 can be avoided and the yield of the silicon wafer can be improved. Further, when the deformation amount of the diamond wire 900 is less than the first preset range value, the rotation speed value of the lifting motor 400 is increased, the lifting speed of the lifting mechanism 800 can be increased, and in this way, the cutting efficiency of the silicon wafer can be improved. Further, by establishing the second functional relationship between the feed amount of the diamond wire 900 and the rotation speed value of the lifting motor 400, the adjustment difficulty of the slicing machine is greatly reduced. In summary, the adjustment method of the slicing machine provided in the present application can not only effectively reduce the deformation degree of the diamond wire 900, but also ensure the cutting efficiency of the slicing machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application or in the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 It is a cross-sectional view of the slicing machine according to an embodiment provided by the present application.

[0019] Reference numerals: 100, displacement sensor; 110, moving part; 120, fixed part; 200, frame; 300, motor base; 400, lifting motor; 500, coupling; 600, lead screw; 700, silicon rod; 710, crystal holder; 800, lifting mechanism; 900, diamond wire. Detailed implementation manners

[0020] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0021] In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present application, "a plurality of" means at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0022] In the present application, unless otherwise clearly specified and limited, the terms "mounted", "connected", "connected to", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0023] In the present application, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "under" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0024] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific implementations and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0026] Generally, the slicing machine drives the silicon rod to move towards the diamond wire through the lifting mechanism so that the diamond wire cuts the silicon rod into silicon wafers. And, the wire mesh composed of multiple rows of diamond wires will deform into an arc shape after being subjected to the pressure of the silicon rod. Further, if the deformation degree of the diamond wire is too large, it will cause the overall fluctuation of the wire mesh, which will in turn lead to unstable tension of the diamond wire, and even cause problems such as diamond wire breakage or a decrease in the yield of silicon wafers.

[0027] Please refer to Figure 1 , in order to reduce the deformation degree of the diamond wire 900 and ensure the cutting efficiency of the slicing machine, this application provides an adjustment method for the slicing machine, and the adjustment method for the slicing machine includes the following steps:

[0028] Measure the current value of the lifting motor 400 corresponding to the feed amount of the lifting mechanism 800 relative to the diamond wire 900 or the current value of the main shaft motor, and establish a first functional relationship between the feed amount of the diamond wire 900 and the current value of the lifting motor 400 or the current value of the main shaft motor;

[0029] According to the first functional relationship, adjust the rotational speed value of the lifting motor 400 so that the current value of the lifting motor 400 or the current value of the spindle motor meets the following conditions. When the current value of the lifting motor 400 is greater than the first preset range value, or the current value of the spindle motor is greater than the second preset range value, reduce the rotational speed value of the lifting motor 400 so that the current value of the lifting motor 400 is within the first preset range value, or so that the current value of the spindle motor is within the second preset range value. When the current value of the lifting motor 400 is less than the first preset range value, or the current value of the spindle motor is less than the second preset range value, increase the rotational speed value of the lifting motor 400 so that the current value of the lifting motor 400 is within the first preset range value, or so that the current value of the spindle motor is within the second preset range value;

[0030] Establish a second functional relationship between the feed amount of the diamond wire 900 and the rotational speed value of the lifting motor 400. According to the second functional relationship, adjust the rotational speed value of the lifting motor 400 corresponding to different feed positions so that the current value of the lifting motor 400 is within the first preset range value, or so that the current value of the spindle motor is within the second preset range value.

[0031] It should be noted that the first preset range value and the second preset range value are preset range values.

[0032] It can be understood that when the deformation amount of the diamond wire 900 increases, the resistance received by the lifting mechanism 800 increases, and then the output power corresponding to the lifting motor 400 increases. Moreover, the current value of the lifting motor 400 is positively correlated with the output power of the lifting motor 400. Therefore, the current value of the lifting motor 400 is also larger, that is, the deformation amount of the diamond wire 900 is positively correlated with the current value of the lifting motor 400. Similarly, when the deformation amount of the diamond wire 900 increases, the friction between the diamond wire 900 and the lifting mechanism 800 increases, and then the output power corresponding to the spindle motor also increases. Moreover, the current value of the spindle motor is positively correlated with the output power of the spindle motor. Therefore, the current value of the spindle motor is also larger, that is, the deformation amount of the diamond wire 900 is positively correlated with the current value of the spindle motor.

[0033] Therefore, as can be seen from the above, the deformation amount of the diamond wire 900 can be indirectly obtained by measuring the current value of the lifting motor 400 or the current value of the spindle motor. And, compared with directly measuring the deformation amount of the diamond wire 900, the difficulty of measuring the current value of the lifting motor 400 or the current value of the spindle motor is smaller, thus greatly reducing the adjustment difficulty of the slicing machine.

[0034] Further, when the deformation amount of the diamond wire 900 is greater than the first preset range value, the rotational speed value of the lifting motor 400 is reduced, which can reduce the lifting speed of the lifting mechanism 800, and further reduce the acting force of the lifting mechanism 800 on the diamond wire 900. In this way, the deformation amount of the diamond wire 900 can be reduced. When the deformation amount of the diamond wire 900 is within the first preset range value, it can be ensured that the diamond wire 900 will not cause the overall fluctuation of the wire mesh due to excessive deformation, and further, the breakage of the diamond wire 900 can be avoided and the yield of the silicon wafer can be improved. Further, when the deformation amount of the diamond wire 900 is less than the first preset range value, the rotational speed value of the lifting motor 400 is increased, which can increase the lifting speed of the lifting mechanism 800. In this way, the cutting efficiency of the silicon wafer can be improved.

[0035] Further, by establishing the second functional relationship between the feed amount of the diamond wire 900 and the rotational speed value of the lifting motor 400, the adjustment difficulty of the slicing machine is greatly reduced.

[0036] In summary, the adjustment method of the slicing machine provided by the present application can not only effectively reduce the deformation degree of the diamond wire 900, but also ensure the cutting efficiency of the slicing machine.

[0037] However, it is not limited to this. In an embodiment, the feed amount of the lifting mechanism 800 relative to the diamond wire 900 and the corresponding deformation amount of the diamond wire 900 can also be measured, and the fifth functional relationship between the feed amount of the diamond wire 900 and the deformation amount of the diamond wire 900 is established. According to the fifth functional relationship and the second functional relationship, the first functional relationship between the feed amount of the diamond wire 900 and the current value of the lifting motor 400 is obtained.

[0038] In an embodiment, the lifting motor 400 is electrically connected to a first frequency converter (not shown in the figure), and the rotational speed value of the lifting motor 400 is controlled by adjusting the frequency value of the first frequency converter.

[0039] Similarly, in an embodiment, the main shaft motor is electrically connected to a second frequency converter (not shown in the figure), and the rotational speed value of the main shaft motor is controlled by adjusting the frequency value of the second frequency converter.

[0040] In an embodiment, the current value of the lifting motor 400 is measured by a first multimeter (not shown in the figure). In this way, the measurement difficulty of the current value of the lifting motor 400 is greatly reduced, and the adjustment efficiency of the adjustment method of the slicing machine is improved.

[0041] Further, in one embodiment, the slicing machine is further provided with an alarm (not shown in the figure). The alarm is electrically connected to a first multimeter for measuring the current value of the lifting motor 400 and the lifting motor 400 respectively. When the current value of the lifting motor 400 is greater than the first preset range value, the first multimeter can transmit a signal to the alarm, and the alarm can issue an alarm and control the lifting motor 400 to stop working. In this way, the situation that the wire saw 900 breaks due to excessive deformation of the wire saw 900 can be effectively avoided.

[0042] However, it is not limited to this. In another embodiment, the current value of the main shaft motor is measured by a second multimeter (not shown in the figure). In this way, the measurement difficulty of the current value of the main shaft motor is greatly reduced, and the adjustment efficiency of the adjustment method of the slicing machine is improved.

[0043] Further, the alarm is electrically connected to a second multimeter for measuring the current value of the main shaft motor and the main shaft motor respectively. When the current value of the main shaft motor is greater than the second preset range value, the second multimeter can transmit a signal to the alarm, and the alarm can issue an alarm and control the main shaft motor to stop working. In this way, the situation that the wire saw 900 breaks due to excessive deformation of the wire saw 900 can also be effectively avoided.

[0044] In one embodiment, as Figure 1 shown, the feed amount of the wire saw 900 is measured by the displacement sensor 100. Specifically, the displacement sensor 100 includes a moving part 110 and a fixed part 120. The moving part 110 is connected to the lifting mechanism 800, and the moving part 110 can move synchronously with the lifting mechanism 800. The fixed part 120 is connected to the frame 200 for installing the lifting mechanism 800 and the lifting motor 400. The fixed part 120 can receive the signal transmitted by the moving part 110 to measure the displacement of the lifting mechanism 800, and then obtain the feed amount of the wire saw 900.

[0045] However, it is not limited to this. In other embodiments, the feed amount of the wire saw 900 can also be obtained by directly measuring the depth of the wire saw 900 entering the silicon rod 700. In this way, the measurement accuracy of the feed amount of the wire saw 900 is higher.

[0046] Specifically, the displacement sensor 100 includes one or more of a photoelectric displacement sensor, a potentiometer displacement sensor, an inductive displacement sensor, a synchro, a capacitive displacement sensor, an eddy current displacement sensor, and a Hall displacement sensor. However, it is not limited to this, and will not be listed one by one here.

[0047] In order to improve the adjustment accuracy of the adjustment method of the slicing machine, in one embodiment, multiple feed amount position measurement points of the wire saw 900 are set to measure the feed position of the wire saw 900 through the feed position measurement points, and the distances between adjacent feed position measurement points are equal.

[0048] Further, in one embodiment, the adjustment method of the slicing machine further includes the following steps: According to the first functional relationship, adjust the rotational speed value of the main shaft motor. When the current value of the lifting motor 400 is greater than the first preset range value, or when the current value of the main shaft motor is greater than the second preset range value, increase the rotational speed value of the main shaft motor so that the current value of the lifting motor 400 is within the first preset range value, or so that the current value of the main shaft motor is within the second preset range value. When the current value of the lifting motor 400 is less than the first preset range value, or when the current value of the main shaft motor is less than the second preset range value, decrease the rotational speed value of the main shaft motor so that the current value of the lifting motor 400 is within the first preset range value, or so that the current value of the main shaft motor is within the second preset range value.

[0049] When the deformation amount of the diamond wire 900 is greater than the first preset range value, increase the rotational speed value of the main shaft motor, which can increase the cutting speed of the diamond wire 900, thereby increasing the cutting depth of the diamond wire 900 on the silicon rod 700, and further reducing the deformation amount of the diamond wire 900. Further, when the deformation amount of the diamond wire 900 is less than the first preset range value, the rotational speed value of the main shaft motor can be decreased.

[0050] Further, in one embodiment, the adjustment method of the slicing machine further includes the following steps:

[0051] Before cutting, divide the cutting process of the slicing machine into multiple segments according to the cutting time or the feed amount of the lifting mechanism 800 relative to the diamond wire 900, record the cutting duration T1 of the slicing machine before the current value of the lifting motor 400 is greater than the first preset range value, and the cutting duration T2 of the slicing machine before the current value of the main shaft motor is greater than the second preset range value during each cutting process, and take the smaller value of T1 and T2;

[0052] When starting to cut, use the control system to judge which cutting process the cutting machine is in, and the control system real-time detects the current value of the lifting motor 400, the rotational speed value of the lifting motor 400, the current value of the main shaft motor, and the rotational speed value of the main shaft motor. When the control system detects that the current change of the lifting motor 400, the rotational speed change of the lifting motor 400, the current change of the main shaft motor, and the rotational speed change of the main shaft motor are consistent with the change data before the current value of the lifting motor 400 is greater than the first preset range value in the historical data or the change data before the current value of the main shaft is greater than the second preset range value in the historical data, before the slicing machine reaches the cutting duration T1 or T2, control the lifting speed of the lifting motor 400 to decrease by 5%-10%, or control the rotational speed of the main shaft motor to increase by 5%-10%;

[0053] If the current value of the lifting motor 400 continues to be greater than the first preset range value, or the current value of the spindle motor continues to be greater than the second preset range value, the adjustment process of the control system after the above-mentioned start of cutting is recorded in the error adjustment database. When the control system detects that the current change of the lifting motor 400, the speed change of the lifting motor 400, the current change of the spindle motor, and the speed change of the spindle motor are consistent with the change data before the current value of the lifting motor 400 in the historical data is greater than the first preset range value or the change data before the current value of the spindle in the historical data is greater than the second preset range value, the control system calls the corresponding error adjustment database and, based on the data in the error adjustment database, controls the lifting speed of the lifting motor 400 to decrease by 10%-15%, or controls the speed of the spindle motor to increase by 10%-15%;

[0054] If the current value of the lifting motor 400 always remains less than or equal to the first preset range value, or the current value of the spindle motor always remains less than or equal to the second preset range value, the data of this adjustment is recorded in the correct adjustment database.

[0055] In this way, the control system of the slicing machine can continuously correct the adjustment range of the slicing machine so that the rotational speed value of the lifting motor 400 or the rotational speed value of the spindle motor reaches the optimal range.

[0056] Further, in an embodiment, the adjustment method of the slicing machine may further include the following steps: based on the current fluctuation diagram of the lifting motor 400 or the current fluctuation diagram of the spindle motor in each cutting process, set the current adjustment coefficient t to satisfy α ≤ t ≤ β, and further set the current value of the lifting motor 400 to be the average current value of the lifting motor 400 in each cutting process multiplied by the current adjustment coefficient t, and set the current value of the spindle motor to be the average current value of the spindle motor in each cutting process multiplied by the current adjustment coefficient t;

[0057] When, within the preset time, the current value of the lifting motor 400 is always lower than the set value after the average current value of the lifting motor 400 in the cutting process is multiplied by the current adjustment coefficient t, gradually increase the speed of the lifting motor 400 so that the current value of the lifting motor 400 is greater than or equal to the set value after the average current value of the lifting motor 400 in the cutting process is multiplied by the current adjustment coefficient t,

[0058] Or, when, within the preset time, the current value of the spindle motor is always lower than the set value after the average current value of the spindle motor in the cutting process is multiplied by the current adjustment coefficient t, gradually increase the speed of the spindle motor so that the current value of the spindle motor is greater than or equal to the set value after the average current value of the spindle motor in the cutting process is multiplied by the current adjustment coefficient t.

[0059] In this way, inefficient cutting by the slicing machine can be avoided, thereby improving the cutting efficiency of the slicing machine.

[0060] Specifically, the specific structure of the slicing machine will be described below. In one embodiment, as Figure 1 shown, the slicing machine includes a frame 200. A motor base 300 is installed on the frame 200. A lifting motor 400 is installed on the motor base 300 through a coupling 500. The lifting motor 400 is connected to a lifting mechanism 800 through a lead screw 600. A silicon rod 700 is bonded to one end of the lifting mechanism 800 away from the lifting motor 400 through a crystal holder 710. A diamond wire 900 is arranged at one end of the silicon rod 700 facing away from the crystal holder 710, and two relatively arranged main shaft motors can drive a plurality of juxtaposed diamond wires 900 to rotate around the main shaft.

[0061] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0062] The above-described embodiments only represent several implementation manners of the present application. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A method for adjusting a slicing machine, characterized in that, it includes the following steps: Measure the feed amount of the lifting mechanism (800) relative to the diamond wire (900) and the current value of the corresponding lifting motor (400) or the current value of the main shaft motor, and establish a first functional relationship between the feed amount of the diamond wire (900) and the current value of the lifting motor (400) or the current value of the main shaft motor; According to the first functional relationship, adjust the rotational speed value of the lifting motor (400) so that the current value of the lifting motor (400) or the current value of the main shaft motor meets the following conditions. When the current value of the lifting motor (400) is greater than the first preset range value, or the current value of the main shaft motor is greater than the second preset range value, reduce the rotational speed value of the lifting motor (400) so that the current value of the lifting motor (400) is within the first preset range value, or so that the current value of the main shaft motor is within the second preset range value. When the current value of the lifting motor (400) is less than the first preset range value, or the current value of the main shaft motor is less than the second preset range value, increase the rotational speed value of the lifting motor (400) so that the current value of the lifting motor (400) is within the first preset range value, or so that the current value of the main shaft motor is within the second preset range value; Establish a second functional relationship between the feed amount of the diamond wire (900) and the rotational speed value of the lifting motor (400). According to the second functional relationship, adjust the rotational speed value of the corresponding lifting motor (400) at different feed positions so that the current value of the lifting motor (400) is within the first preset range value, or so that the current value of the main shaft motor is within the second preset range value.

2. The method for adjusting a slicing machine according to claim 1, characterized in that, The method for adjusting the slicing machine further includes the following steps: According to the first functional relationship, adjust the rotational speed value of the main shaft motor. When the current value of the lifting motor (400) is greater than the first preset range value, or the current value of the main shaft motor is greater than the second preset range value, increase the rotational speed value of the main shaft motor so that the current value of the lifting motor (400) is within the first preset range value, or so that the current value of the main shaft motor is within the second preset range value; When the current value of the lifting motor (400) is less than the first preset range value, or the current value of the main shaft motor is less than the second preset range value, reduce the rotational speed value of the main shaft motor so that the current value of the lifting motor (400) is within the first preset range value, or so that the current value of the main shaft motor is within the second preset range value.

3. The method for adjusting a slicing machine according to claim 1, characterized in that, The lifting motor (400) is electrically connected to a first frequency converter, and the rotational speed value of the lifting motor (400) is controlled by adjusting the frequency value of the first frequency converter; and / or, The main shaft motor is electrically connected to a second frequency converter, and the rotational speed value of the main shaft motor is controlled by adjusting the frequency value of the second frequency converter.

4. The method for adjusting a slicing machine according to claim 1, characterized in that, Measure the current value of the lifting motor (400) with a first multimeter; And / or, measure the current value of the spindle motor by a second multimeter.

5. The adjustment method of the slicing machine according to claim 4, wherein, the slicing machine is further provided with an alarm, and the alarm is electrically connected to a first multimeter for measuring the current value of the lifting motor (400) and the lifting motor (400) respectively. When the current value of the lifting motor (400) is greater than the first preset range value, the first multimeter can transmit a signal to the alarm, and the alarm can give an alarm and control the lifting motor (400) to stop working.

6. The adjustment method of the slicing machine according to claim 1, wherein, measure the feed amount of the diamond wire (900) by a displacement sensor (100).

7. The adjustment method of the slicing machine according to claim 1, wherein, set multiple feed amount position measurement points of the diamond wire (900) to measure the feed position of the diamond wire (900) through the feed position measurement points, and the distances between adjacent feed position measurement points are equal.

8. The adjustment method of the slicing machine according to claim 1, wherein, further includes the following steps: Before cutting, divide the cutting process of the slicing machine into multiple segments according to the cutting time or the feed amount of the lifting mechanism (800) relative to the diamond wire (900). Record the cutting duration T1 of the slicing machine before the current value of the lifting motor (400) is greater than the first preset range value and the cutting duration T2 of the slicing machine before the current value of the spindle motor is greater than the second preset range value during each cutting process, and take the smaller value of T1 and T2; When starting to cut, use the control system to judge which cutting process the cutting machine is in. And the control system real-time detects the current value of the lifting motor (400), the rotation speed value of the lifting motor (400), the current value of the spindle motor, and the rotation speed value of the spindle motor. When the control system detects that the current change of the lifting motor (400), the rotation speed change of the lifting motor (400), the current change of the spindle motor, and the rotation speed change of the spindle motor are consistent with the change data before the current value of the lifting motor (400) is greater than the first preset range value in the historical data or the change data before the current value of the spindle is greater than the second preset range value in the historical data, before the slicing machine reaches the cutting duration T1 or T2, control the lifting speed of the lifting motor (400) to decrease by 5%-10%, or control the rotation speed of the spindle motor to increase by 5%-10%; If the current value of the lifting motor (400) continues to be greater than the first preset range value, or the current value of the spindle motor continues to be greater than the second preset range value, the adjustment process of the control system after the above-mentioned start of cutting is recorded in the error adjustment database. When the control system detects that the current change of the lifting motor (400), the speed change of the lifting motor (400), the current change of the spindle motor, and the speed change of the spindle motor are consistent with the change data before the current value of the lifting motor (400) in the historical data is greater than the first preset range value or the change data before the current value of the spindle in the historical data is greater than the second preset range value, the control system calls the corresponding error adjustment database, and based on the data in the error adjustment database, controls the lifting speed of the lifting motor (400) to be reduced by 10%-15%, or controls the speed of the spindle motor to be increased by 10%-15%; If the current value of the lifting motor (400) always remains less than or equal to the first preset range value, or the current value of the spindle motor always remains less than or equal to the second preset range value, the data of this adjustment is recorded in the correct adjustment database.

9. The adjustment method of the slicing machine according to claim 8, characterized in that, Based on the current fluctuation diagram of the lifting motor (400) or the current fluctuation diagram of the spindle motor in each cutting process, it is set that the current adjustment coefficient t satisfies α≤t≤β. Further, the current value of the lifting motor (400) is set as the average current value of the lifting motor (400) in each cutting process multiplied by the current adjustment coefficient t, and the current value of the spindle motor is set as the average current value of the spindle motor in each cutting process multiplied by the current adjustment coefficient t; When within the preset time, the current value of the lifting motor (400) is always lower than the set value after the average current value of the lifting motor (400) in the cutting process is multiplied by the current adjustment coefficient t, the speed of the lifting motor (400) is gradually increased so that the current value of the lifting motor (400) is greater than or equal to the set value after the average current value of the lifting motor (400) in the cutting process is multiplied by the current adjustment coefficient t, Or, when within the preset time, the current value of the spindle motor is always lower than the set value after the average current value of the spindle motor in the cutting process is multiplied by the current adjustment coefficient t, the speed of the spindle motor is gradually increased so that the current value of the spindle motor is greater than or equal to the set value after the average current value of the spindle motor in the cutting process is multiplied by the current adjustment coefficient t.

10. The adjustment method of the slicing machine according to claim 1, characterized in that, Measure the feed amount of the lifting mechanism (800) relative to the diamond wire (900) and the deformation amount of the corresponding diamond wire (900), and establish a fifth functional relationship between the feed amount of the diamond wire (900) and the deformation amount of the diamond wire (900); According to the fifth functional relationship and the second functional relationship, obtain the first functional relationship between the feed amount of the diamond wire (900) and the current value of the lifting motor (400).

Citation Information

Patent Citations

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