Spring-loaded probe elements, assemblies, and test fixtures

Abstract

The present invention discloses an integrally formed elastic probe element, assembly and testing device. The testing device includes a substrate, a guide member and a plurality of elastic probe elements. The guide member includes a plurality of through-holes. The plurality of elastic probe elements are independent of each other and are provided with a plurality of through-holes. Each elastic probe element includes a main body, a first contact section and a second contact section. The main body has a plurality of fine needle long strip structures, a gap is provided between two adjacent fine needle long strip structures, and the plurality of fine needle long strip structures are connected by a first connecting portion provided at the first end of the elastic probe element and a second connecting portion provided at the second end of the elastic probe element. The first contact section is provided at the first end of the elastic probe element. The second contact section is provided at the second end of the elastic probe element. The main body, the first contact section and the second contact section are integrally formed.

Description

Technical Field

[0001] The present invention relates to the technical field of high-frequency circuit testing, and in particular to a spring-type probe element, assembly and testing device. Background Art

[0002] Existing three-piece spring-loaded probes consist of a needle, a tube, and a spring. Because the spring must be located inside the tube, its size cannot be reduced. Furthermore, the spring's internal placement limits the effective cross-sectional area of ​​the probe for current flow, easily obstructing the current flow path. Consequently, parasitic inductance and resistance increase, making them inaccurate and unreliable for high-frequency circuit testing.

[0003] Therefore, how to overcome the above-mentioned defects by improving the structural design has become one of the important issues to be solved in this business. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a spring-type probe element, assembly and testing device to address the deficiencies of the prior art, which can improve the accuracy and reliability of high-frequency circuit testing.

[0005] In order to solve the above-mentioned technical problems, one of the technical solutions adopted by the present invention is to provide a spring-type probe element, which includes a main body, a first contact segment, and a second contact segment. The main body has a plurality of fine needle-like strip structures, with a gap between two adjacent fine needle-like strip structures, and the plurality of fine needle-like strip structures are connected by a first connecting portion provided at the first end of the spring-type probe element and a second connecting portion provided at the second end of the spring-type probe element. The first contact segment is provided at the first end of the spring-type probe element. The second contact segment is provided at the second end of the spring-type probe element. The main body, the first contact segment, and the second contact segment are integrally formed.

[0006] In order to solve the above-mentioned technical problems, another technical solution adopted by the present invention is to arrange multiple aforementioned elastic probe elements roughly in parallel and stack them in the same direction to form an elastic probe assembly, wherein the elastic probe assembly extends along the first end to form a first contact end, and the elastic probe assembly extends along the second end to form a second contact end.

[0007] To solve the aforementioned technical problems, another technical solution employed by the present invention is to provide a testing device comprising a substrate, a guide member, and a plurality of the aforementioned spring-type probe elements. The guide member includes a plurality of through-holes. The plurality of spring-type probe elements are independent of each other and each has a plurality of through-holes.

[0008] To address the aforementioned technical issues, the present invention employs a further technical solution to provide a testing device comprising a substrate, a guide member, and a plurality of spring-type probe assemblies. The plurality of spring-type probe assemblies are independent of one another and extend through the plurality of through-holes. Each spring-type probe assembly comprises a plurality of spring-type probe elements. Each spring-type probe element further comprises at least one stopper.

[0009] One of the beneficial effects of the present invention is that the elastic probe element, assembly and test device provided by the present invention can have multiple fine needle long strip structures through the body of the probe element, and there is a gap between two adjacent fine needle long strip structures. The multiple fine needle long strip structures are connected by a first connecting part arranged at the first end of the elastic probe element and a second connecting part arranged at the second end of the elastic probe element. The probe element is integrally formed, and the guide part includes multiple through-holes. The probe elements are independent of each other and are penetrated by the multiple through-holes. The technical solution of multiple through-holes in the shape of long strips is more convenient to manufacture than the existing spring-type probe, can effectively reduce the volume of the probe body and enhance the elasticity of the probe element itself, and strengthen the stability after abutting with the object to be tested, further reduce the parasitic inductance value or resistance, and can improve the accuracy and reliability of high-frequency circuit testing. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0011] Figure 1 FIG. 4 is a cross-sectional view of a spring-type probe element according to a first embodiment of the present invention.

[0012] Figure 2 This is a cross-sectional view of the elastic probe element according to the first embodiment of the present invention, showing buckling after being subjected to external force.

[0013] Figure 3 FIG. 1 is a partial perspective schematic diagram of a first contact segment of a spring-type probe assembly according to a first embodiment of the present invention.

[0014] Figure 4 FIG. 1 is a partial cross-sectional view of a first contact section of a spring-type probe assembly according to a first embodiment of the present invention.

[0015] Figure 5 FIG. 1 is a partial perspective schematic diagram of the second contact segment of the spring-type probe assembly according to the first embodiment of the present invention.

[0016] Figure 6FIG. 1 is a partial cross-sectional view of the second contact segment of the spring-type probe assembly according to the first embodiment of the present invention.

[0017] Figure 7 Schematic diagram of an exploded view of a spring-type probe assembly according to the first embodiment of the present invention.

[0018] Figure 8 FIG. 1 is a perspective schematic diagram of a spring-type probe assembly according to a first embodiment of the present invention.

[0019] Figure 9 FIG. 1 is a perspective schematic diagram of a testing device according to a second embodiment of the present invention.

[0020] Figure 10 FIG2 is a cross-sectional view of a testing device including a blocking member according to a second embodiment of the present invention.

[0021] Figure 11 FIG. 4 is a perspective schematic diagram of a testing device according to a third embodiment of the present invention.

[0022] Figure 12 FIG. 1 is a cross-sectional view of a testing device including a blocking member according to a third embodiment of the present invention.

[0023] In the figure: 1-probe element, 10-body, 101-thin needle long strip structure, 102-gap, 103-first connecting part, 104-second connecting part, 11-first contact section, 111-first contact end, 12-second contact section, 121-second contact end, 13-stopper, 2-guide member, 21-through hole, 22-first side, 23-second side, 1'-probe assembly, D-test device, T1-first end, T2-second end. DETAILED DESCRIPTION

[0024] The following is an explanation of the implementation methods of the "elastic probe element, assembly and test device" disclosed in the present invention through specific embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depicted according to actual dimensions. It is stated in advance. The following embodiments will further explain the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of protection of the present invention. In addition, the term "or" used in this article may include any one or more combinations of the associated listed items depending on the actual situation.

[0025] First embodiment

[0026] See Figure 1 and Figure 2As shown, the first embodiment of the present invention provides a probe element 1, which is a long strip structure and includes: a body 10, a first contact section 11 and a second contact section 12 ( Figure 1 and Figure 2 The probe element 1 is shown to pass through the guide 2. For the complete form of the test device of the present invention, please refer to Figures 10 to 12 ).

[0027] The probe element 1 is an integrally formed structure. For example, it can be manufactured by micro-electromechanical process, electroforming, or laser cutting, but the present invention is not limited thereto.

[0028] Furthermore, from the perspective of the center line CL of the probe element 1, the probe element 1 includes a first end T1 and a second end T2 relative to each other, and the main body 10 includes a plurality of fine needle strip structures 101 disposed between the first end T1 and the second end T2. The plurality of fine needle strip structures 101 are used for current conduction and signal transmission, and can be made of highly conductive materials. In the present embodiment, the main body 10 includes at least two parallel and separated fine needle strip structures 101, and these fine needle strip structures 101 have at least one gap 102 between each other, that is, there is at least one gap 102 between two adjacent fine needle strip structures 101, but the present invention is not limited to this. In addition, the main body 10 includes a first connecting portion 103 in the direction of the first end T1 and a second connecting portion 104 in the direction of the second end T2. The two ends of these fine needle strip structures 101 are respectively connected to the first connecting portion 103 and the second connecting portion 104.

[0029] On the other hand, a cross section of the main body 1 is in the shape of a long strip, and the cross section of the main body 1 has a long side LD and a short side SD (e.g. Figure 3 and Figure 5 Preferably, the length ratio of the long side LD to the short side SD of the elongated cross-section of the body 1 is 3:2. When the long side LD is 150 micrometers (μm), the short side SD is 100 micrometers (μm). The length ratio of the long side LD to the short side can be adjusted according to the required elastic force. For example, the length ratio for easier deformation can be 7:1, 7:2, 3:1, 5:2, or 2:1, but the present invention is not limited to this.

[0030] For further information, see Figure 1 and Figure 2As shown, in this embodiment, the probe element 1 is subjected to an external force F in the axial direction of the probe element body 10, and buckling occurs when the force exceeds the critical load of the probe element 1 structure. To overcome buckling, the probe element body 10 can be made of a material with a good stress coefficient. In summary, the probe element body 10 of the present invention can be made of a material with high conductivity and a good stress coefficient, such as, but not limited to, tungsten (W), rhenium tungsten (ReW), beryllium copper (BeCu), palladium gold (HP7), palladium silver (HC4), tungsten carbide (WC), or alloys of the above materials.

[0031] The first contact segment 11 extends along the first end T1, and the second contact segment 12 extends along the second end T2. A first contact end 111 of the first contact segment 11 is used to abut against an object to be measured (not shown in the figure). In this embodiment, the shape of the first contact end 111 can be at least one pointed front end (such as Figure 1 、 Figure 3 and Figure 4 As shown; Figure 3 and Figure 4 A stopper 13 is also shown. For details about the stopper 13, please refer to the second and third embodiments.) or at least one blunt end. For example, the pointed front end or blunt end can be 1, 2, 3, 4 or more. In addition, the blunt end can be arc-shaped, square or rounded square, but the present invention is not limited to this.

[0032] A second contact end 121 of the second contact segment 12 is used to abut against a substrate S. For example, the substrate S may be a printed circuit board, but the present invention is not limited thereto. The shape of the second contact end 121 may be at least one pointed front end (such as Figure 1 as shown) or at least one blunt end (as Figure 5 and Figure 6 As shown; Figure 5 and Figure 6 A stopper 13 is also shown. For details about the stopper 13, please refer to the second and third embodiments. For example, the number of the pointed front end or the blunt end can be 1, 2, 3, 4, or more. In addition, the blunt end can be arc-shaped, square, or rounded square, but the present invention is not limited thereto.

[0033] In one embodiment, if Figure 7 and Figure 8 As shown, Figure 8 Schematic diagram of a plurality of probe elements 1 stacked and assembled into a probe assembly 1' of the present invention. In this embodiment, the plurality of probe elements 1 are arranged substantially in parallel and can be stacked in the same direction to form a probe assembly 1'. In detail, Figure 7 and Figure 8The stacking and combination of three probe elements 1 to form a probe assembly 1' is used as an example, but the present invention is not limited to this, that is, the number of probe elements 1 used for the stacking combination can be 2, 3, 4 or more, thereby enhancing the elasticity of the probe assembly body 10' of the probe assembly 1'. In one embodiment, in order to strengthen the probe assembly body 10', a plurality of stacked and combined probe elements 1 are tightly attached to each other. In this embodiment, the probe assembly 1' has a plurality of fine needle long strip structures 101', and these fine needle long strip structures 101' have at least one gap 102' between each other, that is, there is at least one gap 102' between two adjacent fine needle long strip structures 101', but the present invention is not limited to this. In addition, the body 10' includes a first connecting portion 103' toward the first end T1 and a second connecting portion 104' toward the second end T2, and the two ends of these fine needle long strip structures 101' are respectively connected to the first connecting portion 103' and the second connecting portion 104'. Furthermore, the first contact ends 111 and second contact ends 121 of the three probe elements 1 all have two tapered tips. Thus, the first contact segment 11' of the probe assembly extends in the direction of the first end T1 and has two tapered first contact ends 111', while the second contact segment 12' of the probe assembly extends in the direction of the second end T2 and has two tapered second contact ends 121'. In other embodiments, first contact ends 111 and second contact ends 121 with different shapes may be stacked and combined to form first contact ends 111' and second contact ends 121' with different shapes (for example, but not limited to, crown-shaped or arc-shaped) depending on the actual application. This allows the first contact ends 111' and second contact ends 121' of the probe assembly 1' to respectively establish good and stable contact with the object to be measured and the substrate S.

[0034] However, the above example is only one feasible embodiment and is not intended to limit the present invention.

[0035] Second embodiment

[0036] See Figure 9 As shown, the second embodiment of the present invention provides a testing device D using a spring-type probe, which includes: a plurality of probe elements 1 , a guide member 2 , and a substrate S.

[0037] The plurality of probe elements 1 are all long strip structures and are independently disposed in the testing device D. The structure and function of each probe element 1 are as described in the first embodiment and will not be repeated here.

[0038] The guide member 2 is provided with a plurality of through-holes 21, and the shapes of the plurality of through-holes 21 are determined according to the appearance of the probe element 1 to be passed through. In the present embodiment, a cross-section of the main body 10 of the probe element 1 having an elongated structure is in the shape of an elongated strip, so the shape of the plurality of through-holes 21 is in the shape of an elongated strip for the probe element 1 to pass through, and the elongated through-holes 21 can provide stability to the probe element 1. The probe element 1 of the present invention is integrally formed. In some embodiments, the probe element 1 can also be a trapezoidal columnar structure or a polygonal columnar structure, but the present invention is not limited thereto. In the present embodiment, the first contact section 11 of the probe element 1 is passed through the through-hole 21, so that at least a portion of the first contact section 11 of the probe element 1 is exposed on the first side 22 of the guide member 2, and the main body 10 and the second contact section 12 of the probe element 1 are located on the second side 23 of the guide member 2. In contrast, the existing spring-type probe has a cylindrical appearance, so the guide member 2 needs to have a plurality of corresponding circular through-holes. However, after the different probe elements in the existing spring-type probe contact the object to be tested, the axial direction of the body of each probe element will be displaced in different directions. The circular through-holes of the guide member 2 cannot stabilize the displacement of the different probe elements 1 in different directions, thereby affecting the reliability and accuracy of the test.

[0039] Furthermore, the plurality of perforations 21 can be arranged on the guide member 2 in a predetermined pattern. The predetermined pattern can be a rectangular array or a circular array, but the present invention is not limited thereto. In this embodiment, one side of each perforation 21 is parallel to a side of the guide member 2. The plurality of perforations 21 can be arranged on the guide member 2 in at least one row. The plurality of perforations 21 in each row are arranged at equal intervals, and the perforations 21 in each row are also arranged in parallel at equal intervals, forming a rectangular array arrangement. In other embodiments, the other side of each perforation 21 adjacent to one side is parallel to a side of the guide member 2. The plurality of perforations 21 can be arranged on the guide member 2 in at least one row. The plurality of perforations 21 in each row are arranged at equal intervals, and the perforations 21 in each row are also arranged in parallel at equal intervals, forming another rectangular array arrangement.

[0040] Furthermore, in this embodiment, the probe element 1 also includes a stopper 13. The stopper 13 is formed by a portion of the first contact segment 11 protruding outward, that is, the stopper 13 is formed on the outer surface of the first contact segment 11. Furthermore, the stopper 13 is disposed on a side of the first contact segment 11 away from the first contact end 111 to determine the distance L by which the first contact end 111 of the first contact segment 11 is exposed from the guide member 2. In one embodiment, the first contact segment 11 is partially accommodated within the through-hole 21; in another embodiment, the first connecting portion 103 is accommodated within the through-hole 21. This arrangement provides the first connecting portion 103 with optimal stress during probing to withstand the force F during the detection process, effectively preventing breakage of the first connecting portion 103. Depending on the usage environment, the stopper 13 can be disposed on the first side 22 or the second side 23 of the guide member 2. The present invention is not limited to the shape of the stopper 13, as long as the stopper 13 can abut against the guide member 2 around the through-hole 21 to secure the probe element 1 in the predetermined position. More specifically, the specific structure of the stopper 13 can be adjusted based on user needs or actual applications. For example, but not limited to, the cross-sectional shape of the stopper 13 can be a hollow square, hollow circle, hollow triangle, or arc. Furthermore, the body 10, first contact segment 11, second contact segment 12, and stopper 13 are integrally formed. Similarly, the present invention is not limited to the molding method. For example, the body 10, first contact segment 11, second contact segment 12, and stopper 13 can be formed using micro-electromechanical processing, electroforming, or laser cutting.

[0041] In this embodiment, if Figure 10As shown, a plurality of probe elements 1 can also be stacked and combined to form a probe assembly 1' to provide a perforation 21. In this case, the size of the perforation 21 is determined by the size of a cross-sectional area of ​​the probe assembly body 10'. In this embodiment, a plurality of probe elements 1 are arranged roughly in parallel and can be stacked in the same direction to form a probe assembly 1'. The number of probe elements 1 used for the stacked combination can be 2, 3, 4 or more, whereby the elasticity of the probe assembly body 10' of the probe assembly 1' is enhanced. In one embodiment, in order to strengthen the probe assembly body 10', a plurality of stacked combination probe elements 1 are tightly attached to each other. For example, as described in the first embodiment, the probe assembly 'has a plurality of fine needle long strip structures 101', and these fine needle long strip structures 101' have at least one gap 102' between each other, that is, there is at least one gap 102' between two adjacent fine needle long strip structures 101', but the present invention is not limited to this. In addition, the main body 10' includes a first connecting portion 103' in the direction of the first end T1 and a second connecting portion 104' in the direction of the second end T2. The two ends of these thin needle-like strip structures 101' are connected by the first connecting portion 103' and the second connecting portion 104', respectively. In addition, the first contact end 111' and the second contact end 121' of the three probe elements 1 all have two pointed front ends. Therefore, the first contact section 11' of the probe assembly extends along the direction of the first end T1 to form a first contact end 111' with two pointed front ends, and the second contact section 12' of the probe assembly extends along the direction of the second end T2 to form a second contact end 121' with two pointed front ends. In this way, the first contact end 111' and the second contact end 121' of the probe assembly 1' can respectively produce good and stable contact with the object to be measured and the substrate S. The present invention is not limited to the above examples.

[0042] As described above, the probe assembly 1' may further include a stopper 13'. A portion of the first contact segment 11' protrudes to form the stopper 13', that is, the stopper 13' is formed on the outer surface of the first contact segment 11'. In addition, the stopper 13' is disposed on a side of the first contact segment 11' away from the first contact end 111' to determine the distance L by which the first contact end 111' of the first contact segment 11' is exposed from the guide member 2. In one embodiment, the first contact segment 11' is partially accommodated in the through-hole 21; in one embodiment, the first connecting portion 103' is accommodated in the through-hole 21; the arrangement of this embodiment can provide the first connecting portion 103' with better stress during the probe detection process to withstand the F force during the detection process, thereby effectively preventing the first connecting portion 103' from breaking. The present invention is not limited to the shape of the stopper 13', as long as the stopper 13' can press against the guide member 2 around the through-hole 21 so that the probe assembly 1' can be fixed in a predetermined position. More specifically, the specific structure of the stopper 13' can be adjusted based on user needs or actual applications. For example, but not limited to, the cross-sectional shape of the stopper 13' can be a hollow square, hollow circle, hollow triangle, or arc. Furthermore, the body 10', first contact segment 11', second contact segment 12', and stopper 13' are integrally formed from a conductive material. Similarly, the present invention is not limited to the molding method. For example, the body 10', first contact segment 11', second contact segment 12', and stopper 13' can be formed using micro-electromechanical processing, electroforming, or laser cutting.

[0043] In this embodiment, the substrate S may be a printed circuit board, but the present invention is not limited thereto.

[0044] However, the above example is only one feasible embodiment and is not intended to limit the present invention.

[0045] Third embodiment

[0046] See Figure 11 As shown, the third embodiment of the present invention provides a test device D using a spring-loaded probe, which includes: a plurality of probe assemblies 1', at least one upper guide 2 (i.e., the guide 2 of the second embodiment), at least one lower guide 3, and a substrate S. In addition, the difference between the test device D using a spring-loaded probe in this embodiment and the test device D using a spring-loaded probe in the second embodiment is that the test device D using a spring-loaded probe in this embodiment includes two guides.

[0047] The plurality of probe elements 1 are all long strip structures and are independently disposed in the testing device D. The structure and function of each probe element 1 are as described in the first embodiment and will not be repeated here.

[0048] At least one upper guide member 2 (i.e., the guide member 2 of the second embodiment) and at least one lower guide member 3 are respectively provided with a plurality of first through-holes 21 (i.e., the through-holes 21 of the second embodiment) and a plurality of second through-holes 31. The plurality of first through-holes 21 correspond to the plurality of second through-holes 31, respectively. The shapes of the plurality of first through-holes 21 and the plurality of second through-holes 31 are determined according to the outer shape of the probe assembly 1' through which they are to be passed. In this embodiment, the first contact section 11 of the probe assembly 1' is passed through the first through-hole 21, so that at least a portion of the first contact section 11 of the probe assembly 1' is exposed on the first side 22 of the upper guide member 2. The second contact section 12 of the probe assembly 1' is passed through the second through-hole 31, so that at least a portion of the second contact section 12 of the probe assembly 1' is exposed on the first side 32 of the lower guide member 3. The main body 10 of the probe assembly 1' is located between the second side 23 of the upper guide member 2 and the second side 33 of the lower guide member 3.

[0049] Furthermore, in this embodiment, the probe element 1 further includes at least one stopper 13. The stopper 13 is formed by a portion of the first contact segment 11 and / or the second contact segment 12 protruding outward, that is, the stopper 13 is formed on the outer surface of the first contact segment 11 and / or the second contact segment 12. Furthermore, the stopper 13 is disposed on the side of the first contact segment 11 and / or the second contact segment 12 distal from the first contact end 111 to determine the distance L by which the first contact end 111 of the first contact segment 11 is exposed from the guide member 2. In one embodiment, the first contact segment 11 is partially received in the through-hole 21; in another embodiment, the first connecting portion 103 is received in the through-hole 21. This arrangement provides the first connecting portion 103 with optimal stress during probing to withstand the force F during the detection process, effectively preventing the first connecting portion 103 from breaking. Depending on the usage environment, the stopper 13 can be disposed on the first side 22 or the second side 23 of the upper guide member 2, or on the first side 32 or the second side 33 of the lower guide member 3. For example, when the stopper 13 is positioned on the first side 22 of the upper guide 2, the stopper 13 is also positioned on the first side 32 of the lower guide 3. When the stopper 13 is positioned on the second side of the upper guide 2, the stopper 13 is also positioned on the second side of the lower guide 3, but the present invention is not limited thereto. The present invention is not limited to the shape of the stopper 13, as long as the stopper 13 can abut against the upper guide 2 (i.e., the guide 2 of the second embodiment) or the lower guide 3 around the first through-hole 21 and / or the second through-hole 31 to secure the probe element 1 in a predetermined position. More specifically, the specific structure of the stopper 13 can be adjusted based on user needs or actual application. For example, but not limited to, the cross-sectional shape of the stopper 13 can be a hollow square, hollow circle, hollow triangle, or arc. Furthermore, the body 10, the first contact segment 11, the second contact segment 12, and the stopper 13 are integrally formed from a conductive body. Likewise, the present invention is not limited to the molding method. For example, the body 10 , the first contact segment 11 , the second contact segment 12 and the stopper 13 may be formed by micro-electromechanical processing, electroforming or laser cutting.

[0050] In one embodiment, if Figure 12As shown, a plurality of probe elements 1 can be stacked and assembled into a probe assembly 1', each of which is provided with a first through-hole 21 and a second through-hole 31. In this case, the size of the first through-hole 21 and the second through-hole 31 is determined by the size of a cross-sectional area of ​​the probe assembly body 10'. In this embodiment, the plurality of probe elements 1 are arranged approximately in parallel and can be stacked in the same direction to form a probe assembly 1'. The number of probe elements 1 used for the stacked assembly can be 2, 3, 4, or more, thereby enhancing the elasticity of the probe assembly body 10' of the probe assembly 1'. For example, as described in the first embodiment, the first contact end 111 and the second contact end 121 of the three probe elements 1 each have two tapered front ends. The first contact segment 11' of the probe assembly extends in the direction of the first end T1 to form a first contact end 111' having two tapered front ends, while the second contact segment 12' of the probe assembly extends in the direction of the second end T2 to form a second contact end 121' having two tapered front ends. Thus, the first contact end 111 ′ and the second contact end 121 ′ of the probe assembly 1 ′ can respectively establish good and stable contact with the object to be tested and the substrate S. The present invention is not limited to the above examples.

[0051] As described above, the probe assembly 1' may further include at least one stopper 13'. The stopper 13' is formed by a portion of the first contact segment 11' and / or the second contact segment 12' protruding outward, specifically, formed on the outer surface of the first contact segment 11' and / or the second contact segment 12'. Furthermore, the stopper 13' is disposed on the side of the first contact segment 11' and / or the second contact segment 12' away from the first contact end 111' and adjacent to the first through-hole 21 and / or the second through-hole 31. The present invention is not limited to the shape of the stopper 13', as long as the stopper 13' can abut against the upper guide 2 (i.e., the guide 2 of the second embodiment) or the lower guide 3 surrounding the through-hole 21, thereby securing the probe assembly 1' in a predetermined position. Specifically, the specific configuration of the stopper 13' can be adjusted based on user needs or actual application. For example, but not limited to, the cross-sectional shape of the stopper 13' may be a hollow square, a hollow circle, a hollow triangle, or an arc. Furthermore, in one embodiment, the body 10', the first contact segment 11', the second contact segment 12', and the stopper 13' are integrally formed from a conductive material. Similarly, the present invention is not limited to the molding method. For example, the body 10', the first contact segment 11', the second contact segment 12', and the stopper 13' can be formed using micro-electromechanical processing, electroforming, or laser cutting.

[0052] In this embodiment, the substrate S may be a printed circuit board, but the present invention is not limited thereto.

[0053] However, the above example is only one feasible embodiment and is not intended to limit the present invention.

[0054] The elastic probe element 1, elastic probe assembly 1' and test device D provided by the present invention can be manufactured more conveniently than the existing spring-type probe through the technical solutions of "the main body 10 of the probe element 1 has multiple fine needle long strip structures 101, a gap 102 is provided between two adjacent fine needle long strip structures 101, and the multiple fine needle long strip structures 101 are connected by a first connecting portion 103 arranged at the first end T1 of the probe element 1 and a second connecting portion 104 at the second end T2, and the probe element 1 is formed as an integral body" and "the guide part 2 includes multiple through-holes 21, the probe elements 1 are independent of each other and penetrate the multiple through-holes 21, and the multiple through-holes 21 are long strips". It can effectively reduce the volume of the probe body and enhance the elasticity of the probe element itself, and strengthen the stability after abutting with the object to be tested, further reduce the parasitic inductance value or resistance, and improve the accuracy and reliability of high-frequency circuit testing.

[0055] The contents disclosed above are only preferred feasible embodiments of the present invention and do not limit the scope of protection of the claims of the present invention. Therefore, all equivalent technical changes made using the contents of the description and drawings of the present invention are included in the scope of protection of the claims of the present invention.

Claims

1. A spring-type probe element, characterized in that: The elastic probe element comprises: A body, wherein the body has a plurality of thin needle-like strip structures, a gap is formed between two adjacent thin needle-like strip structures, and the plurality of thin needle-like strip structures are connected by a first connecting portion provided at a first end of the elastic probe element and a second connecting portion provided at a second end of the elastic probe element; a first contact section, disposed at the first end of the elastic probe element; a second contact section, disposed at the second end of the elastic probe element; Wherein, the main body, the first contact segment and the second contact segment are integrally formed; Wherein, a plurality of the elastic probe elements are stacked in the same direction to form an elastic probe assembly, the elastic probe assembly extends along the first end to form a first contact end of the elastic probe assembly, and the elastic probe assembly extends along the second end to form a second contact end of the elastic probe assembly; The plurality of elastic probe elements combined into the elastic probe assembly are tightly attached to each other.

2. The spring-type probe element according to claim 1, characterized in that: The body comprises a highly conductive material.

3. The spring-type probe element according to claim 1, characterized in that: The first end includes at least one first tapered front end, and the second end includes at least one second tapered front end.

4. The spring-type probe element according to claim 1, characterized in that: The thin needle-like strip structures of the body are parallel to each other.

5. A testing device, characterized in that: The testing device comprises: a substrate; at least one guide member, the guide member comprising a plurality of through holes; and A plurality of elastic probe elements according to any one of claims 1 to 4, wherein the plurality of elastic probe elements correspond one-to-one to the plurality of through-holes, and the elastic probe elements are inserted into the corresponding through-holes.

6. The testing device according to claim 5, characterized in that: The perforations are in the shape of long strips.

7. The testing device according to claim 5, characterized in that: A plurality of the through holes are arranged on the guide member in a predetermined pattern.

8. The testing device according to claim 5, characterized in that: The testing device further comprises: At least one stopper is disposed on a side of the first contact segment away from the first contact end and adjacent to the through hole.

9. The testing device according to claim 5, characterized in that: The first contact segment is partially accommodated in the through hole.

10. The testing device according to claim 5, characterized in that: The first connecting portion is accommodated in the through hole.

11. A testing device, characterized in that: The testing device comprises: a substrate; at least one guide member, the guide member comprising a plurality of through holes; and A plurality of the elastic probe assemblies according to claim 1, wherein the plurality of the elastic probe assemblies correspond to the plurality of the through-holes, and the elastic probe assemblies are inserted into the corresponding through-holes.

12. The testing device according to claim 11, characterized in that: The perforations are in the shape of long strips.

13. The testing device according to claim 11, characterized in that: The testing device further comprises: At least one stopper is disposed on a side of the first contact segment or the second contact segment away from the first contact end and adjacent to the through hole.

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