An acid purification method and device
By designing a heat recovery device, first cooling, then purifying, and then heating to treat the acid solution, the filter material loss problem caused by the acid purification and recycling equipment due to the high-temperature acid solution is solved, and the heat energy recovery and cost reduction are achieved.
Patent Information
- Application Number
- CN202211048490.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-08-30
- Publication Date
- 2025-06-10
- Estimated Expiration
- 2042-08-30
AI Technical Summary
The existing acid purification and recycling equipment has a shortened filter life due to the high temperature of the inlet acid liquid, which requires frequent replacement, which increases the operating cost of the equipment.
A heat recovery device is designed, and the first heat exchanger, the second heat exchanger and the third heat exchanger are respectively subjected to the cooling and heating treatment, so that the acid liquid is cooled before entering the purification equipment, and then heated up and reused to the distillation tank after purification, thereby avoiding equipment loss and realizing the recycling of heat energy.
Through the use of the heat recovery device, the filter material loss caused by the acid purification and recycling equipment due to high-temperature acid liquid is avoided, the equipment operation cost is reduced, and the thermal energy is fully utilized, which improves the energy utilization rate.
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Figure CN115493443B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of sulfuric acid recovery equipment, and particularly to an acid purification method and equipment. Background Art
[0002] When the existing acid purification and recovery equipment is in use, the acid liquid directly enters the equipment for purification after coming out of the chemical polishing bath. However, due to the too high temperature of the incoming liquid, the normal service life of the filter material therein is seriously affected, resulting in frequent replacement of the filter material, which greatly increases the operation cost of the acid purification and recovery equipment. Summary of the Invention
[0003] The purpose of the present invention is to solve at least one of the technical problems existing in the prior art. For this reason, the present invention provides a heat recovery device, which can make the acid liquid first pass through cooling and then enter the acid purification and recovery equipment. After the acid liquid is purified, it is then heated and reused to the chemical polishing bath, thereby avoiding the loss of the acid purification and recovery equipment. At the same time, there is a heat recovery step in this process, which can make full use of energy and reduce costs.
[0004] The present invention also provides an acid purification equipment including the above heat recovery device.
[0005] The present invention also provides an acid purification method.
[0006] The heat recovery device according to the first aspect embodiment of the present invention includes:
[0007] A first heat exchanger, including a first heat medium inlet, a first heat medium outlet, a first cold medium inlet and a first cold medium outlet;
[0008] A second heat exchanger, including a second heat medium inlet, a second heat medium outlet, a second cold medium inlet and a second cold medium outlet, wherein the second cold medium inlet is used to connect a refrigerant and is discharged via the second cold medium outlet, so that the second heat exchanger is used for cooling;
[0009] A third heat exchanger, including a third heat medium inlet, a third heat medium outlet, a third cold medium inlet and a third cold medium outlet, wherein the third heat medium inlet is used to connect a heat source and is discharged via the third heat medium outlet, so that the third heat exchanger is used for heating;
[0010] Wherein the first heat medium inlet is used to dock with the high-temperature acid liquid of the chemical polishing bath and is discharged via the first heat medium outlet to the second heat medium inlet. The acid liquid is cooled by the second heat exchanger, and the acid liquid is output to the acid liquid purification and recovery equipment via the second heat medium outlet. The first cold medium inlet is used to dock with the purified acid liquid and is discharged via the first cold medium outlet to the third cold medium inlet. The acid liquid is heated by the third heat exchanger, and the acid liquid is output back to the chemical polishing bath via the third cold medium outlet, so that the first heat exchanger is used for heat recovery.
[0011] The heat recovery device according to the embodiment of the first aspect of the present invention has at least the following beneficial effects: The acid liquid first passes through the first heat exchanger and the second heat exchanger for cooling and then enters the acid purification and recovery equipment. After the acid liquid is purified, it passes through the first heat exchanger and the third heat exchanger for heating and then is recycled to the chemical polishing bath, thus avoiding the loss of the acid purification and recovery equipment. At the same time, the first heat exchanger is used for heat recovery in this process, so as to make full use of energy and reduce costs.
[0012] The heat recovery device according to the embodiment of the first aspect of the present invention further includes a first temperature detection component, a first flow regulating valve, a second temperature detection component, and a second flow regulating valve;
[0013] The first temperature detection component is used to detect the temperature of the acid liquid output from the second heat medium outlet, and the first flow regulating valve is used to regulate the refrigerant flow rate at the second cold medium inlet;
[0014] The second temperature detection component is used to detect the temperature of the acid liquid output from the third cold medium outlet, and the second flow regulating valve is used to regulate the heat source flow rate at the third heat medium inlet.
[0015] The heat recovery device according to the embodiment of the first aspect of the present invention further includes a first controller and a second controller, and the first flow regulating valve and the second flow regulating valve are set as electric flow regulating valves;
[0016] The first controller receives the signal from the first temperature detection component and controls the first flow regulating valve to achieve closed-loop control;
[0017] The second controller receives the signal from the second temperature detection component and controls the second flow regulating valve to achieve closed-loop control.
[0018] The heat recovery device according to the embodiment of the first aspect of the present invention, the heat source connected to the third heat medium inlet is steam, and condensed water is discharged through the third heat medium outlet;
[0019] and / or the refrigerant connected to the second cold medium inlet is cooling water, and is discharged through the second cold medium outlet.
[0020] The acid purification equipment according to the embodiment of the second aspect of the present invention includes: the heat recovery device according to the embodiment of the first aspect of the present invention.
[0021] The acid purification method according to the embodiment of the third aspect of the present invention includes the following steps:
[0022] The chemical polishing bath inputs the unpurified acid liquid with a first preset temperature into the first heat exchanger;
[0023] Cool the unpurified acid solution with the first preset temperature to the second preset temperature through the first heat exchanger;
[0024] Cool the unpurified acid solution with the second preset temperature to the third preset temperature through the second heat exchanger, and output it to the acid solution purification and recovery equipment;
[0025] The acid solution purification and recovery equipment purifies the acid solution with the third preset temperature, and inputs the purified acid solution into the first heat exchanger;
[0026] Heat up the purified acid solution to the fourth preset temperature through the first heat exchanger;
[0027] Heat up the purified acid solution with the fourth preset temperature to the fifth preset temperature through the third heat exchanger, and output it back to the chemical polishing bath.
[0028] According to the acid purification method described in the third aspect embodiment of the present invention, the fifth preset temperature is the same as the first preset temperature.
[0029] According to the acid purification method described in the third aspect embodiment of the present invention, the first preset temperature is 90 °C, the second preset temperature is 40 °C, the third preset temperature is 30 °C, and the fourth preset temperature is 80 °C.
[0030] According to the acid purification method described in the third aspect embodiment of the present invention, configure the first temperature detection component, the first flow regulating valve, the second temperature detection component and the second flow regulating valve;
[0031] The first temperature detection component is used to detect the value of the fifth preset temperature, and the first flow regulating valve is used to adjust the heating power of the third heat exchanger;
[0032] The second temperature detection component is used to detect the value of the third preset temperature, and the second flow regulating valve is used to adjust the cooling power of the second heat exchanger.
[0033] According to the acid purification method described in the third aspect embodiment of the present invention, configure the first controller and the second controller, and the first flow regulating valve and the second flow regulating valve are set as electric flow regulating valves;
[0034] The first controller receives the signal of the first temperature detection component and controls the first flow regulating valve to achieve closed-loop control;
[0035] The second controller receives the signal of the second temperature detection component and controls the second flow regulating valve to achieve closed-loop control.
[0036] It is not difficult to understand that the acid purification equipment in the embodiments of the second aspect of the present invention and the acid purification method in the embodiments of the third aspect of the present invention both have the technical effects of the heat recovery device in the embodiments of the first aspect as described above, and thus will not be elaborated herein.
[0037] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0038] The present invention will be further described below in conjunction with the drawings and embodiments;
[0039] Figure 1 It is a system flowchart of an embodiment of the present invention.
[0040] Reference Numerals:
[0041] First heat exchanger 100, first heat medium inlet 110, first heat medium outlet 120, first cold medium inlet 130, first cold medium outlet 140;
[0042] Second heat exchanger 200, second heat medium inlet 210, second heat medium outlet 220, second cold medium inlet 230, second cold medium outlet 240;
[0043] Third heat exchanger 300, third heat medium inlet 310, third heat medium outlet 320, third cold medium inlet 330, third cold medium outlet 340;
[0044] First temperature detection component 410, first flow regulating valve 420, first controller 430;
[0045] Second temperature detection component 510, second flow regulating valve 520, second controller 530;
[0046] Chemical polishing tank 600, acid solution purification and recovery equipment 700;
[0047] First preset temperature 810, second preset temperature 820, third preset temperature 830, fourth preset temperature 840, fifth preset temperature 850. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0048] Embodiments of the present application will be described in detail below. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for explaining the present application and should not be construed as limiting the present application.
[0049] In the description of the present application, it should be understood that when it comes to orientation descriptions, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc., it is based on the orientation or positional relationship shown in the drawings. This is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present application.
[0050] In the description of the present application, the meaning of "a number of" is one or more, the meaning of "a plurality of" is at least two. Understandings such as greater than, less than, exceeding, etc. do not include the recited number, and understandings such as above, below, within, etc. include the recited number. If there is a description of first and second, it is only for the purpose of distinguishing technical features and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.
[0051] In the description of the present application, unless otherwise clearly defined, terms such as "set", "installed", "connected", etc. should be understood in a broad sense. Those skilled in the art can reasonably determine the specific meaning of the above terms in the present application after combining the specific content of the technical solution.
[0052] Refer to Figure 1 , the heat recovery device according to the embodiment of the first aspect of the present application is applied to the purification and recovery treatment of acid solution. The heat recovery device includes a first heat exchanger 100, a second heat exchanger 200, and a third heat exchanger 300.
[0053] The first heat exchanger 100 includes a first heat medium inlet 110, a first heat medium outlet 120, a first cold medium inlet 130, and a first cold medium outlet 140; the second heat exchanger 200 includes a second heat medium inlet 210, a second heat medium outlet 220, a second cold medium inlet 230, and a second cold medium outlet 240, wherein the second cold medium inlet 230 is used to connect the refrigerant and is discharged through the second cold medium outlet 240, so that the second heat exchanger 200 is used for cooling; the third heat exchanger 300 includes a third heat medium inlet 310, a third heat medium outlet 320, a third cold medium inlet 330, and a third cold medium outlet 340, wherein the third heat medium inlet 310 is used to connect the heat source and is discharged through the third heat medium outlet 320, so that the third heat exchanger 300 is used for heating.
[0054] The first hot medium inlet 110 is used to connect to the high-temperature acid solution in the chemical polishing bath 600, and is discharged to the second hot medium inlet 210 via the first hot medium outlet 120. The acid solution is cooled by the second heat exchanger 200, and the acid solution is output to the acid solution purification and recovery device 700 through the second hot medium outlet 220. The first cold medium inlet 130 is used to connect to the purified acid solution, and is discharged to the third cold medium inlet 330 via the first cold medium outlet 140. The acid solution is heated by the third heat exchanger 300, and the acid solution is output back to the chemical polishing bath 600 through the third cold medium outlet 340, so that the first heat exchanger 100 is used for heat recovery.
[0055] It can be understood that the first heat exchanger 100, the second heat exchanger 200, and the third heat exchanger 300 are all plate heat exchangers, each having a first heat exchange channel and a second heat exchange channel. The fluid flowing in through the hot medium inlet will be cooled and output from the hot medium outlet, and the fluid flowing in through the cold medium inlet will be heated and output from the cold medium outlet. Heat exchange is achieved through the plate heat exchanger so that the acid solution can first be cooled and then heated, and by specifically designing the settings of the first heat exchanger 100, the second heat exchanger 200, and the third heat exchanger 300, heat recovery is realized, the energy utilization rate is improved, and the acid solution can be better processed.
[0056] Refer to Figure 1 , the heat recovery device according to the first aspect embodiment of the present application enables the acid solution to first pass through cooling and then enter the acid purification and recovery device through the first heat exchanger 100 and the second heat exchanger 200. After the acid solution is purified, it is then heated and recycled to the chemical polishing bath 600 through the first heat exchanger 100 and the third heat exchanger 300, thus avoiding the loss of the acid purification and recovery device. At the same time, heat recovery is carried out using the first heat exchanger 100 during this process, so that energy can be fully utilized and costs can be reduced.
[0057] It should be noted that in the first heat exchanger 100, the high-temperature acid solution input from the chemical polishing bath 600 is cooled by the low-temperature acid solution input from the acid solution purification and recovery device 700, and at the same time, the low-temperature acid solution input from the acid solution purification and recovery device 700 is heated by the high-temperature acid solution input from the chemical polishing bath 600, so as to achieve heat recovery. The second heat exchanger 200 is used for cooling and ensures that the temperature of the acid solution input to the acid solution purification and recovery device 700 is controllable. The third heat exchanger 300 is used for heating and ensures that the temperature of the acid solution input to the chemical polishing bath 600 is controllable, thus constituting a heat recovery device for processing the acid solution.
[0058] In some embodiments of the present application, the heat recovery device further includes a first temperature detection component 410, a first flow regulating valve 420, a second temperature detection component 510, and a second flow regulating valve 520. The first temperature detection component 410 is used to detect the temperature of the acid solution output from the second heat medium outlet 220. The first flow regulating valve 420 is used to regulate the refrigerant flow rate at the second cold medium inlet 230. The second temperature detection component 510 is used to detect the temperature of the acid solution output from the third cold medium outlet 340. The second flow regulating valve 520 is used to regulate the heat source flow rate at the third heat medium inlet 310. It can be understood that since the second heat exchanger 200 is used to ensure that the temperature of the acid solution input to the acid solution purification and recovery device 700 is controllable, and the third heat exchanger 300 is used to ensure that the temperature of the acid solution input to the chemical polishing tank 600 is controllable, the first temperature detection component 410 and the second temperature detection component 510 are respectively set as temperature sensors to determine the acid solution temperature, and then the heat exchange effect is respectively controlled by adjusting the valve opening degrees of the first flow regulating valve 420 and the second flow regulating valve 520, so as to achieve a better acid solution treatment effect.
[0059] Preferably, the heat recovery device further includes a first controller 430 and a second controller 530. The first flow regulating valve 420 and the second flow regulating valve 520 are set as electric flow regulating valves. The first controller 430 receives the signal from the first temperature detection component 410 and controls the first flow regulating valve 420 to achieve closed-loop control. The second controller 530 receives the signal from the second temperature detection component 510 and controls the second flow regulating valve 520 to achieve closed-loop control. It can be understood that the first controller 430 and the second controller 530 are respectively set to improve the automation degree of controlling the first flow regulating valve 420 and the second flow regulating valve 520. By presetting the corresponding control logic, the temperature can be controlled within a stable range to ensure the stability of the outlet temperature.
[0060] In some embodiments of the present application, the heat source connected to the third heat medium inlet 310 is steam, and the condensed water is discharged through the third heat medium outlet 320. Preferably, the third heat medium inlet 310 is connected to steam with a DN50. In some embodiments of the present application, the refrigerant connected to the second cold medium inlet 230 is cooling water, and it is discharged through the second cold medium outlet 240. Preferably, the second cold medium inlet 230 is connected to a cooling water source or ice water with a DN50, so as to improve the heat efficiency of acid solution heating and cooling.
[0061] Refer to Figure 1, the acid purification equipment according to the second aspect of the present application includes the heat recovery device according to the first aspect of the present application, and further includes a chemical polishing tank 600 and an acid solution purification and recovery device 700. The chemical polishing tank 600 inputs the unpurified acid solution into the heat recovery device, and then the heat recovery device inputs the cooled acid solution into the acid solution purification and recovery device 700. The acid solution purification and recovery device 700 purifies the acid solution and outputs it back to the heat recovery device. The heat recovery device heats up the purified acid solution and finally outputs it back to the chemical polishing tank 600.
[0062] In some embodiments, the chemical polishing tank 600 is connected to the heat recovery device, and the acid solution purification and recovery device 700 is connected to the heat recovery device through plastic pipes or rubber pipes lined with UPE or PTEF.
[0063] Referring to Figure 1 , the acid purification method according to the third aspect of the present application can be the acid purification method using the acid purification equipment according to the second aspect of the present application. The acid purification method includes the following steps:
[0064] The chemical polishing tank 600 inputs the unpurified acid solution with the first preset temperature 810 into the first heat exchanger 100;
[0065] The first heat exchanger 100 cools down the unpurified acid solution with the first preset temperature 810 to the second preset temperature 820;
[0066] The second heat exchanger 200 cools down the unpurified acid solution with the second preset temperature 820 to the third preset temperature 830 and outputs it to the acid solution purification and recovery device 700;
[0067] The acid solution purification and recovery device 700 purifies the acid solution with the third preset temperature 830 and inputs the purified acid solution into the first heat exchanger 100;
[0068] The first heat exchanger 100 heats up the purified acid solution to the fourth preset temperature 840;
[0069] The third heat exchanger 300 heats up the purified acid solution with the fourth preset temperature 840 to the fifth preset temperature 850 and outputs it back to the chemical polishing tank 600.
[0070] Heat exchange is carried out through the first heat exchanger 100, the second heat exchanger 200 and the third heat exchanger 300, so that the temperature of the acid solution when entering each step is controllable, thereby ensuring the treatment effect.
[0071] In some embodiments of the present application, the fifth preset temperature 850 is the same as the first preset temperature 810. At the same time, after the acid solution purification and recovery device 700 purifies the acid solution with the third preset temperature 830, the acid solution input to the first heat exchanger 100 still has the third preset temperature 830, ensuring precise temperature control throughout the process and improving the accuracy of acid solution treatment. Preferably, the first preset temperature 810 is 90 °C, the second preset temperature 820 is 40 °C, the third preset temperature 830 is 30 °C, and the fourth preset temperature 840 is 80 °C. The specific numerical value of the temperature is defined as: it can fluctuate up and down by 1 - 2 °C based on this specific numerical value.
[0072] In some embodiments of the present application, a first temperature detection component 410, a first flow regulating valve 420, a second temperature detection component 510, and a second flow regulating valve 520 are configured. The first temperature detection component 410 is used to detect the numerical value of the fifth preset temperature 850, the first flow regulating valve 420 is used to adjust the heating power of the third heat exchanger 300, the second temperature detection component 510 is used to detect the numerical value of the third preset temperature 830, and the second flow regulating valve 520 is used to adjust the cooling power of the second heat exchanger 200. Preferably, a first controller 430 and a second controller 530 are configured. The first flow regulating valve 420 and the second flow regulating valve 520 are set as electric flow regulating valves. The first controller 430 receives the signal from the first temperature detection component 410 and controls the first flow regulating valve 420 to achieve closed-loop control. The second controller 530 receives the signal from the second temperature detection component 510 and controls the second flow regulating valve 520 to achieve closed-loop control. Specifically, the first controller 430 and the second controller 530 can be PID controllers. The first controller 430 can automatically control the valve opening of the electric flow regulating valve according to the outlet temperature T1 of the material in the heating section to ensure the stability of the outlet temperature. The second controller 530 can automatically control the valve opening of the electric flow regulating valve according to the outlet temperature T2 of the material in the heating section to ensure the stability of the outlet temperature.
[0073] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.
[0074] The above has described the embodiments of the present application in detail with reference to the drawings. However, the present application is not limited to the above embodiments. Within the scope of knowledge possessed by those of ordinary skill in the art in the technical field, various changes can be made without departing from the purpose of the present application.
Claims
1. An acid purification method, characterized in that, it includes a heat recovery device, and the heat recovery device includes: a first heat exchanger, including a first heat medium inlet, a first heat medium outlet, a first cold medium inlet and a first cold medium outlet; a second heat exchanger, including a second heat medium inlet, a second heat medium outlet, a second cold medium inlet and a second cold medium outlet, wherein the second cold medium inlet is used to connect a refrigerant and is discharged through the second cold medium outlet, so that the second heat exchanger is used for cooling; a third heat exchanger, including a third heat medium inlet, a third heat medium outlet, a third cold medium inlet and a third cold medium outlet, wherein the third heat medium inlet is used to connect a heat source and is discharged through the third heat medium outlet, so that the third heat exchanger is used for heating; wherein the first heat medium inlet is used to dock with the high-temperature acid liquid in the chemical polishing bath and is discharged through the first heat medium outlet to the second heat medium inlet. The acid liquid is cooled by the second heat exchanger, and the acid liquid is output to the acid liquid purification and recovery device through the second heat medium outlet. The first cold medium inlet is used to dock with the purified acid liquid and is discharged through the first cold medium outlet to the third cold medium inlet. The acid liquid is heated by the third heat exchanger, and the acid liquid is output back to the chemical polishing bath through the third cold medium outlet, so that the first heat exchanger is used for heat recovery; the acid purification method includes the following steps: The chemical polishing bath inputs the unpurified acid liquid with a first preset temperature into the first heat exchanger; Cool the unpurified acid liquid with a first preset temperature to a second preset temperature through the first heat exchanger; Cool the unpurified acid liquid with a second preset temperature to a third preset temperature through the second heat exchanger and output it to the acid liquid purification and recovery device; The acid liquid purification and recovery device purifies the acid liquid with a third preset temperature and inputs the purified acid liquid into the first heat exchanger; Heat the purified acid liquid to a fourth preset temperature through the first heat exchanger; Heat the purified acid liquid with a fourth preset temperature to a fifth preset temperature through the third heat exchanger and output it back to the chemical polishing bath.
2. The acid purification method according to claim 1, characterized in that: the heat recovery device further includes a first temperature detection component, a first flow regulating valve, a second temperature detection component and a second flow regulating valve; The first temperature detection component is used to detect the temperature of the acid liquid output from the second heat medium outlet, and the first flow regulating valve is used to regulate the refrigerant flow rate at the second cold medium inlet; The second temperature detection component is used to detect the temperature of the acid liquid output from the third cold medium outlet, and the second flow regulating valve is used to regulate the heat source flow rate at the third heat medium inlet.
3. The acid purification method according to claim 2, characterized in that: the heat recovery device further includes a first controller and a second controller, and the first flow regulating valve and the second flow regulating valve are set as electric flow regulating valves; The first controller receives the signal of the first temperature detection component and controls the first flow regulating valve to achieve closed-loop control; The second controller receives the signal from the second temperature detection component and controls the second flow regulating valve to achieve closed-loop control.
4. The acid purification method according to any one of claims 1 to 3, characterized in that: The heat source connected to the third heat medium inlet is steam, and condensed water is discharged through the third heat medium outlet; and / or the refrigerant connected to the second cold medium inlet is cooling water, which is discharged through the second cold medium outlet.
5. The acid purification method according to claim 1, characterized in that: The fifth preset temperature is the same as the first preset temperature.
6. The acid purification method according to claim 5, characterized in that: The first preset temperature is 90 °C, the second preset temperature is 40 °C, the third preset temperature is 30 °C, and the fourth preset temperature is 80 °C.
7. The acid purification method according to claim 1, characterized in that: A first temperature detection component, a first flow regulating valve, a second temperature detection component and a second flow regulating valve are configured; The first temperature detection component is used to detect the value of the fifth preset temperature, and the first flow regulating valve is used to adjust the heating power of the third heat exchanger; The second temperature detection component is used to detect the value of the third preset temperature, and the second flow regulating valve is used to adjust the cooling power of the second heat exchanger.
8. The acid purification method according to claim 7, characterized in that: A first controller and a second controller are configured. The first flow regulating valve and the second flow regulating valve are set as electric flow regulating valves; The first controller receives the signal from the first temperature detection component and controls the first flow regulating valve to achieve closed-loop control; The second controller receives the signal from the second temperature detection component and controls the second flow regulating valve to achieve closed-loop control.
9. An acid purification device, characterized in that it uses the acid purification method according to any one of claims 1 to 8.
Citation Information
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