A method for evaluating uniformity of large-scale plasma film deposition based on grayscale conversion

Abstract

The present invention discloses a method for evaluating the uniformity of large-scale plasma film deposition based on grayscale conversion, which includes grayscale processing of captured images, obtaining a grayscale two-dimensional data matrix through software, and dividing the grayscale into 0-255 grayscale intervals in sequence to generate multiple grayscale intervals; based on the grayscale two-dimensional data matrix and the grayscale intervals, calculations are performed including proportion, continuity parameters, and regularity parameters to obtain an evaluation of the film deposition effect; the proportion is the proportion of the area of ​​the specified grayscale interval in the total grayscale interval area of ​​the sample, and continuity is to segment the sample image into multiple horizontal and vertical axes. If the proportion of the set grayscale interval in each horizontal or vertical axis reaches 80% or more, the column or line is considered continuous; regularity is to judge whether the edge position variance of the image formed by the grayscale domain exceeds the standard to evaluate the uniformity of the edge position response. The present invention can achieve rapid and quantitative evaluation of the film deposition effect.

Description

Technical Field

[0001] The present invention relates to the field of plasma processing technology, and in particular to a method for evaluating uniformity of large-scale plasma film deposition based on grayscale conversion. Background Art

[0002] Plasma is the fourth state of matter after solid, liquid, and gas. Its system is rich in high-energy active particles such as high-energy electrons, ions, excited atoms, and free radicals. As the fourth state of matter, scientific exploration has become necessary, and plasma technology has emerged. Plasma technology has a wide range of applications and can be used in new energy production, environmental protection, material processing, and aerospace. Precursors are added to the plasma atmosphere, and through a series of reactions such as plasma activation, bond scissioning, grafting, cross-linking, and deposition, functionalized thin films are deposited on the material surface, achieving surface modification of the substrate material.

[0003] Common methods for testing the surface properties of plasma-deposited thin films include SEM (scanning electron microscopy) and AFM (atomic force microscopy). These techniques can indirectly evaluate the deposition effect of thin films, such as the modification range and deposition thickness, at a microscopic level. This allows for the control and optimization of plasma experimental parameters to achieve satisfactory plasma thin film deposition results. However, these microscopic testing techniques only operate at the nanometer or micrometer scale, which is insufficient for rapidly evaluating surface modification effects on large-scale insulating materials.

[0004] Current research has shown that the effectiveness of plasma surface modification is closely related to the thickness of the deposited film, which in turn is closely related to the color depth of the film under natural light. Therefore, this patent proposes a multi-parameter evaluation method for plasma film deposition based on image grayscale conversion. This method parameterizes the film and provides relevant characteristic parameters, enabling rapid and quantitative evaluation of the plasma film modification effect and uniformity.

[0005] Prior art publication number CN101930938A discloses a method for monitoring film thickness uniformity. The detection method, however, involves simply analyzing the thickness difference of the film through multi-point testing, which has certain limitations. Although the authors state that this detection method can be applied to plasma thin film deposition technology, it still suffers from the following shortcomings: 1. In high-voltage plasma atmospheric deposition, the reaction is full of uncertainty, and the thickness of the deposited film is very small, making it difficult to measure macroscopically. 2. It is difficult to fully cover the material surface with a thin film in a short deposition time, making it difficult to accurately use the proposed method to observe uniformity. Summary of the Invention

[0006] 1. Technical problems to be solved:

[0007] In response to the above technical problems, the present invention provides a method for evaluating the uniformity of large-scale plasma film deposition based on grayscale conversion. Based on grayscale conversion, a two-dimensional data matrix of plasma-assisted deposited thin films is constructed, and characteristic parameters characterizing the film ratio, continuity and regularity are further provided, thereby realizing rapid evaluation of the deposition effect and uniformity of large-scale plasma thin films, and providing the possibility for real-time evaluation and online regulation of plasma modification effects.

[0008] 2. Technical solution:

[0009] A method for evaluating uniformity of large-scale plasma film deposition based on grayscale conversion, characterized by comprising the following steps:

[0010] Step 1: Take a picture of the material surface after plasma treatment, import the picture into a computer, and perform grayscale processing based on the Matlab algorithm to obtain a grayscale two-dimensional data matrix of the thin film deposition results on the material surface; each element in the grayscale two-dimensional data matrix is ​​the grayscale value of its corresponding area;

[0011] Step 2: Divide the grayscale range of 0-255 into multiple grayscale intervals;

[0012] Step 3: Based on the grayscale two-dimensional data matrix after the grayscale conversion of the thin film in step 1 and the multiple grayscale intervals generated in step 2, set multiple quantitative parameters for evaluating the thin film deposition effect and uniformity; the quantitative parameters include proportion, continuity parameter and regularity parameter; the proportion is the proportion of the area of ​​the preset grayscale interval to the total area of ​​the sample to be evaluated; the continuity is to determine whether the proportion of the preset grayscale interval in each horizontal axis or each vertical axis of the sample to be evaluated reaches 80% or more, thereby determining whether this column or this row is continuous; the regularity parameter is to determine whether the edge position variance of the image formed by the preset grayscale interval exceeds a preset standard, thereby evaluating the uniformity of the edge position response of the generated thin film;

[0013] Step 4: Calculate the quantitative parameters of the sample to be evaluated, and evaluate the film deposition effect and uniformity based on the calculated quantitative parameter values.

[0014] Furthermore, step one also includes segmenting the image along the X-axis and the Y-axis into multiple rectangular areas, and then obtaining the grayscale value of each rectangular area through the Matlab algorithm to generate a grayscale two-dimensional data matrix.

[0015] Furthermore, there are 9 grayscale intervals in step 2; the 9 grayscale intervals are represented by A, B, C, D, E, F, G, H, and I respectively; the grayscale ranges corresponding to the grayscale intervals A, B, C, D, E, F, G, H, and I are 180-255, 160-180, 140-160, 120-140, 100-120, 80-100, 60-80, 40-60, and 0-40 respectively.

[0016] Furthermore, the specific calculation method of the percentage is as follows: according to the grayscale two-dimensional data matrix after the grayscale conversion of the film, the 9-level grayscale area in the matrix is ​​identified using the Matlab program, and the area occupied by the area in each grayscale interval is obtained. The area size is defined as n i (i=1,2,3,…,9), define the total area of ​​the film as N; calculate the area ratio n occupied by each grayscale interval i / N, which is defined as the proportion P of the grayscale interval i , calculate the proportion P i As shown in formula (1):

[0017]

[0018] Subscript i = 1, 2, 3, ..., 9 corresponds to the grayscale intervals of A, B, C, D, E, F, G, H, and I respectively.

[0019] Furthermore, the specific calculation method of the continuity parameter is:

[0020] The sample to be evaluated is divided into multiple horizontal and vertical axes evenly on the picture, where the total number of horizontal axes is defined as R and the total number of vertical axes is defined as C; a target grayscale interval is selected, and the grayscale position corresponding to the target grayscale interval is defined as "1", and the position not belonging to the target area is defined as "0", thereby converting the grayscale two-dimensional data matrix into a 0-1 matrix; the distribution of the target grayscale interval on the horizontal and vertical axes is recorded; if "1" appears continuously on the horizontal or vertical axis for more than 80%, the standard is met; the total number of horizontal axes that meet the standard r and the total number of vertical axes that meet the standard c are counted, and the continuous parameters Q in the horizontal and vertical directions are calculated according to the following formulas (2) and (3): r and Q c :

[0021]

[0022]

[0023] According to the continuous parameters of the target grayscale interval, it is possible to evaluate whether the effect of the reaction meets the standard.

[0024] Furthermore, the specific calculation method of the regularity parameter is:

[0025] The sample to be evaluated is divided into regions evenly using multiple horizontal and vertical axes on the image. The upper left corner of the sample is used as the origin of the coordinate axis, and the coordinates of each point on the horizontal and vertical axes are encoded; the modified area in the image that meets the standard grayscale range is selected for thin film deposition;

[0026] Taking the vertical axis as an example, record the vertical coordinate value of the first or last point recorded on each axis in the thin film deposition area of ​​the modified area that meets the standard grayscale interval, and bring the vertical coordinate value of the first or last point recorded on each vertical axis into the position variance formula of formula (4) to calculate the variance of the data set formed by the vertical coordinates of the first or last point of all vertical axes; define the variance of the calculated data set as the upper and lower boundary regularity parameters s top or bottom , used to evaluate the shape regularity of the upper and lower boundaries of the film deposition in the modified area;

[0027]

[0028] In formula (4), n represents the number of vertical axes; y i The vertical coordinate representing the boundary; Represents all y i The average value of

[0029] Similarly, the regularity parameter s of the left and right boundaries of the film top or bottom It can be calculated by formula (5):

[0030]

[0031] In formula (5), m represents the number of horizontal axes, x i represents the horizontal coordinate of the boundary, Represents all x i The average value of .

[0032] Furthermore, the film deposition effect and uniformity are evaluated based on the calculated quantitative parameter values, specifically:

[0033] S1: Occupancy rate: The grayscale range of 180-255 indicates that the film is the thickest and the modification effect is the best; the grayscale range of 0-40 produces the thinnest film and the effect is the worst. Therefore, according to the order of the grayscale ranges A, B, C, D, E, F, G, H, and I, the higher the area occupancy rate of the grayscale range in the front, the better the modification effect of the film.

[0034] S2: continuity parameter; comparing the size of the calculated continuity parameter of the target grayscale interval with the preset continuity parameter, if it is greater than the preset continuity parameter, it means that the generated film meets the continuity requirements;

[0035] S3: Regularity parameter: upper and lower boundary regularity parameter s top or bottom and the left and right boundary regularity parameters s left or right The smaller it is, the better the regularity of the upper and lower boundaries and the left and right boundaries of the film deposition in the modified area.

[0036] 3.Beneficial effects:

[0037] (1) The present invention proposes a method for evaluating the uniformity of large-scale plasma film deposition based on grayscale conversion. Grayscale conversion is performed on the material image after plasma treatment to construct a two-dimensional data matrix of plasma-assisted deposition film. The two-dimensional matrix is ​​divided and processed, and characteristic parameters characterizing the film ratio, continuity and regularity are further given. This method realizes the rapid evaluation of the deposition effect and uniformity of large-scale plasma film, and provides the possibility for real-time evaluation and online regulation of plasma modification effect.

[0038] (2) The present invention utilizes the phenomenon that the thicker the film, the darker the color and the larger the grayscale value; the grayscale two-dimensional matrix is ​​range-divided to achieve quantification of the processing effect, and the specific parameters of the thin film deposition are calculated based on the quantification results, thereby achieving the evaluation of the effect of thin film deposition from multiple angles.

[0039] (3) The present invention evaluates the effect of thin film deposition primarily based on the percentage, continuity parameter, and regularity parameter. A larger percentage of the target grayscale region indicates a larger thin film deposition area. A larger target grayscale region continuity parameter indicates a continuous thin film deposition area with no independent intervals. A larger target grayscale region regularity parameter indicates a more regular thin film shape and smaller film boundary fluctuations. This method essentially covers commonly used evaluation scenarios and is widely applicable. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 This is a picture of the material surface after plasma treatment in a specific embodiment;

[0041] Figure 2 Schematic diagram of calculation of the percentage of each grayscale interval of a sample in a specific embodiment;

[0042] Figure 3 Schematic diagram of the continuity representation of each grayscale interval of a sample in a specific embodiment;

[0043] Figure 4 Schematic diagram representing the regularity of thin film deposition in the modified area of ​​a sample in a specific embodiment. DETAILED DESCRIPTION

[0044] The present invention will be described in detail below with reference to the accompanying drawings.

[0045] A method for evaluating uniformity of large-scale plasma film deposition based on grayscale conversion, characterized by comprising the following steps:

[0046] Step 1: Take a picture of the material surface after plasma treatment, import the picture into a computer, and perform grayscale processing based on the Matlab algorithm to obtain a grayscale two-dimensional data matrix of the thin film deposition results on the material surface; each element in the grayscale two-dimensional data matrix is ​​the grayscale value of its corresponding area;

[0047] Step 2: Divide the grayscale range of 0-255 into multiple grayscale intervals;

[0048] Step 3: Based on the grayscale two-dimensional data matrix after the grayscale conversion of the thin film in step 1 and the multiple grayscale intervals generated in step 2, set multiple quantitative parameters for evaluating the thin film deposition effect and uniformity; the quantitative parameters include proportion, continuity parameter and regularity parameter; the proportion is the proportion of the area of ​​the preset grayscale interval to the total area of ​​the sample to be evaluated; the continuity is to determine whether the proportion of the preset grayscale interval in each horizontal axis or each vertical axis of the sample to be evaluated reaches 80% or more, thereby determining whether this column or this row is continuous; the regularity parameter is to determine whether the edge position variance of the image formed by the preset grayscale interval exceeds a preset standard, thereby evaluating the uniformity of the edge position response of the generated thin film;

[0049] Step 4: Calculate the quantitative parameters of the sample to be evaluated, and evaluate the film deposition effect and uniformity based on the calculated quantitative parameter values.

[0050] Furthermore, step one also includes segmenting the image along the X-axis and the Y-axis into multiple rectangular areas, and then obtaining the grayscale value of each rectangular area through the Matlab algorithm to generate a grayscale two-dimensional data matrix.

[0051] Furthermore, there are 9 grayscale intervals in step 2; the 9 grayscale intervals are represented by A, B, C, D, E, F, G, H, and I respectively; the grayscale ranges corresponding to the grayscale intervals A, B, C, D, E, F, G, H, and I are 180-255, 160-180, 140-160, 120-140, 100-120, 80-100, 60-80, 40-60, and 0-40 respectively.

[0052] Furthermore, the specific calculation method of the percentage is as follows: according to the grayscale two-dimensional data matrix after the grayscale conversion of the film, the 9-level grayscale area in the matrix is ​​identified using the Matlab program, and the area occupied by the area in each grayscale interval is obtained. The area size is defined as n i (i=1,2,3,…,9), define the total area of ​​the film as N; calculate the area ratio n occupied by each grayscale interval i / N, which is defined as the proportion P of the grayscale interval i , calculate the proportion P i As shown in formula (1):

[0053]

[0054] Subscript i = 1, 2, 3, ..., 9 corresponds to the grayscale intervals of A, B, C, D, E, F, G, H, and I respectively.

[0055] Furthermore, the specific calculation method of the continuity parameter is:

[0056] The sample to be evaluated is divided into multiple horizontal and vertical axes evenly on the picture, where the total number of horizontal axes is defined as R and the total number of vertical axes is defined as C; a target grayscale interval is selected, and the grayscale position corresponding to the target grayscale interval is defined as "1", and the position not belonging to the target area is defined as "0", thereby converting the grayscale two-dimensional data matrix into a 0-1 matrix; the distribution of the target grayscale interval on the horizontal and vertical axes is recorded; if "1" appears continuously on the horizontal or vertical axis for more than 80%, the standard is met; the total number of horizontal axes that meet the standard r and the total number of vertical axes that meet the standard c are counted, and the continuous parameters Q in the horizontal and vertical directions are calculated according to the following formulas (2) and (3): r and Q c :

[0057]

[0058]

[0059] According to the continuous parameters of the target grayscale interval, it is possible to evaluate whether the effect of the reaction meets the standard.

[0060] Furthermore, the specific calculation method of the regularity parameter is:

[0061] The sample to be evaluated is divided into regions evenly using multiple horizontal and vertical axes on the image. The upper left corner of the sample is used as the origin of the coordinate axis, and the coordinates of each point on the horizontal and vertical axes are encoded; the modified area in the image that meets the standard grayscale range is selected for thin film deposition;

[0062] Taking the vertical axis as an example, record the vertical coordinate value of the first or last point recorded on each axis in the thin film deposition area of ​​the modified area that meets the standard grayscale interval, and bring the vertical coordinate value of the first or last point recorded on each vertical axis into the position variance formula of formula (4) to calculate the variance of the data set formed by the vertical coordinates of the first or last point of all vertical axes; define the variance of the calculated data set as the upper and lower boundary regularity parameters s topor bottom , used to evaluate the shape regularity of the upper and lower boundaries of the film deposition in the modified area;

[0063]

[0064] In formula (4), n represents the number of vertical axes; y i The vertical coordinate representing the boundary; Represents all y i The average value of the left and right boundary regularity parameters s top or bottom It can be calculated by formula (5):

[0065]

[0066] In formula (5), m represents the number of horizontal axes, x i represents the horizontal coordinate of the boundary, Represents all x i The average value of .

[0067] Furthermore, the film deposition effect and uniformity are evaluated based on the calculated quantitative parameter values, specifically:

[0068] S1: Occupancy rate: The grayscale range of 180-255 indicates that the film is the thickest and the modification effect is the best; the grayscale range of 0-40 produces the thinnest film and the effect is the worst. Therefore, according to the order of the grayscale ranges A, B, C, D, E, F, G, H, and I, the higher the area occupancy rate of the grayscale range in the front, the better the modification effect of the film.

[0069] S2: Continuity parameter; the calculated continuity parameter of the target grayscale interval is compared with the preset continuity parameter. If it is greater than the preset continuity parameter, it means that the generated film meets the continuity requirements;

[0070] S3: Regularity parameter: upper and lower boundary regularity parameter s top or bottom and the left and right boundary regularity parameters s left orright The smaller it is, the better the regularity of the upper and lower boundaries and the left and right boundaries of the film deposition in the modified area. Specific embodiment:

[0072] As attached Figure 1The following table shows an image collected after plasma thin film deposition. After grayscale processing, the grayscale two-dimensional data matrix is ​​obtained:

[0073] 156 157 157 157 156 155 155 156 156 156 158 158 158 158 157 161 161 160 158 156 160 162 161 160 157 160 162 162 162 160 163 163 163 163 162 162 162 163 162 162 160 161 161 162 162

[0074] The grayscale range is divided as shown in the following table;

[0075] serial number A B C D E F G H I Grayscale range 180-255 160-180 140-160 120-140 100-120 80-100 60-80 40-60 0-40

[0076] The generated grayscale two-dimensional data matrix and the 9-level grayscale interval are used to calculate the three quantitative parameters of the film deposition effect and uniformity:

[0077] (1) Occupancy rate: Substitute into formula (1) to calculate the corresponding occupation rate of each grayscale interval; Figure 2 , which is a schematic diagram of the calculated proportion of each grayscale interval of the thin film deposition;

[0078] (2) Continuity parameter: According to formulas (2) and (3), the continuity parameter Q in the horizontal and vertical directions of the film deposition is calculated respectively. r and Q c The calculation results are shown in the attached Figure 3 shown.

[0079] (3) Regularity parameters: as shown in the attached Figure 4 As shown, the upper and lower boundary regularity parameters and the left and right boundary regularity parameters of the thin film deposition are calculated according to formulas (4) and (5), respectively.

[0080] According to the calculated quantitative parameters, the larger the proportion, the larger the film deposition area; the larger the continuity parameter, the continuous film deposition area and the absence of independent intervals; the larger the regularity parameter, the more regular the film shape and the smaller the film boundary fluctuation.

[0081] Although the present invention has been disclosed above in terms of preferred embodiments, they are not intended to limit the present invention. Anyone skilled in the art can make various changes or modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection defined by the claims of this application.

Claims

1. A method for evaluating uniformity of large-scale plasma film deposition based on grayscale conversion, characterized by: The following steps are involved: Step 1: Take a picture of the material surface after plasma treatment, import the picture into a computer, and perform grayscale processing based on the Matlab algorithm to obtain a grayscale two-dimensional data matrix of the thin film deposition results on the material surface; each element in the grayscale two-dimensional data matrix is ​​the grayscale value of its corresponding area; Step 2: Divide the grayscale range of 0-255 into multiple grayscale intervals; Step 3: Based on the grayscale two-dimensional data matrix after the grayscale conversion of the thin film in step 1 and the multiple grayscale intervals generated in step 2, set multiple quantitative parameters for evaluating the thin film deposition effect and uniformity; the quantitative parameters include proportion, continuity parameter and regularity parameter; the proportion is the proportion of the area of ​​the preset grayscale interval to the total area of ​​the sample to be evaluated; the continuity is to determine whether the proportion of the preset grayscale interval in each horizontal axis or each vertical axis of the sample to be evaluated reaches 80% or more, thereby determining whether this column or this row is continuous; the regularity parameter is to determine whether the edge position variance of the image formed by the preset grayscale interval exceeds a preset standard, thereby evaluating the uniformity of the edge position response of the generated thin film; Step 4: Calculate the quantitative parameters of the sample to be evaluated, and evaluate the film deposition effect and uniformity based on the calculated quantitative parameter values.

2. The method for evaluating uniformity of large-scale plasma film deposition based on grayscale conversion according to claim 1, characterized in that: Step 1 also includes segmenting the image along the X-axis and Y-axis into multiple rectangular areas, and then obtaining the grayscale value of each rectangular area through the Matlab algorithm to generate a grayscale two-dimensional data matrix.

3. The method for evaluating uniformity of large-scale plasma film deposition based on grayscale conversion according to claim 2, characterized in that: There are 9 grayscale intervals in step 2; the 9 grayscale intervals are represented by A, B, C, D, E, F, G, H, and I respectively; the grayscale ranges corresponding to the grayscale intervals A, B, C, D, E, F, G, H, and I are 180-255, 160-180, 140-160, 120-140, 100-120, 80-100, 60-80, 40-60, and 0-40 respectively.

4. The method for evaluating uniformity of large-scale plasma film deposition based on grayscale conversion according to claim 3, characterized in that: The specific calculation method of the percentage is as follows: according to the grayscale two-dimensional data matrix after the grayscale conversion of the film, the 9-level grayscale area in the matrix is ​​identified using the Matlab program, and the area occupied by the area in each grayscale interval is obtained. The area size is defined as n i (i=1,2,3,…,9), define the total area of ​​the film as N; calculate the area ratio n occupied by each grayscale interval i / N, which is defined as the proportion P of the grayscale interval i , calculate the proportion P i As shown in formula (1): Subscript i = 1, 2, 3, ..., 9 corresponds to the grayscale intervals of A, B, C, D, E, F, G, H, and I respectively.

5. The method for evaluating uniformity of large-scale plasma film deposition based on grayscale conversion according to claim 1, characterized in that: The specific calculation method of the continuity parameter is: The sample to be evaluated is divided into multiple horizontal and vertical axes evenly on the picture, where the total number of horizontal axes is defined as R and the total number of vertical axes is defined as C; a target grayscale interval is selected, and the grayscale position corresponding to the target grayscale interval is defined as "1", and the position not belonging to the target area is defined as "0", thereby converting the grayscale two-dimensional data matrix into a 0-1 matrix; the distribution of the target grayscale interval on the horizontal and vertical axes is recorded; if "1" appears continuously on the horizontal or vertical axis for more than 80%, the standard is met; the total number of horizontal axes that meet the standard r and the total number of vertical axes that meet the standard c are counted, and the continuous parameters Q in the horizontal and vertical directions are calculated according to the following formulas (2) and (3): r and Q c : According to the continuous parameters of the target grayscale interval, it is possible to evaluate whether the effect of the reaction meets the standard.

6. The method for evaluating uniformity of large-scale plasma film deposition based on grayscale conversion according to claim 1, characterized in that: The specific calculation method of the regularity parameter is: Divide the sample to be evaluated by evenly using multiple horizontal and vertical axes to divide the area on the picture. The upper left corner of the sample is used as the origin of the coordinate axis, and the coordinates of each point on the horizontal and vertical axes are encoded; Select the modified area thin film deposition area that meets the standard grayscale range on the image; Taking the vertical axis as an example, record the vertical coordinate value of the first or last point recorded on each axis in the thin film deposition area of ​​the modified area that meets the standard grayscale interval, and bring the vertical coordinate value of the first or last point recorded on each vertical axis into the position variance formula of formula (4) to calculate the variance of the data set formed by the vertical coordinates of the first or last point of all vertical axes; define the variance of the calculated data set as the upper and lower boundary regularity parameters s top or bottom , used to evaluate the shape regularity of the upper and lower boundaries of the film deposition in the modified area; In formula (4), n represents the number of vertical axes; y i The vertical coordinate representing the boundary; Represents all y i The average value of Similarly, the regularity parameter s of the left and right boundaries of the film top or bottom It can be calculated by formula (5): In formula (5), m represents the number of horizontal axes, x i represents the horizontal coordinate of the boundary, Represents all x i The average value of .

7. The method for evaluating uniformity of large-scale plasma film deposition based on grayscale conversion according to claim 6, characterized in that: The film deposition effect and uniformity are evaluated based on the calculated quantitative parameter values, specifically: S1: Occupancy rate: The grayscale range of 180-255 indicates that the film is the thickest and the modification effect is the best; the grayscale range of 0-40 produces the thinnest film and the effect is the worst. Therefore, according to the order of the grayscale ranges A, B, C, D, E, F, G, H, and I, the higher the area occupancy rate of the grayscale range in the front, the better the modification effect of the film. S2: continuity parameter; comparing the size of the calculated continuity parameter of the target grayscale interval with the preset continuity parameter, if it is greater than the preset continuity parameter, it means that the generated film meets the continuity requirements; S3: Regularity parameter: upper and lower boundary regularity parameter s top or bottom and the left and right boundary regularity parameters s left or right The smaller it is, the better the regularity of the upper and lower boundaries and the left and right boundaries of the film deposition in the modified area.

Images