Method for detecting dynamic indexes of an electron beam processing device accelerating power supply

Abstract

A kind of electron beam processing equipment acceleration power dynamic index detection method, steps include setting dynamic index, and constructing dynamic index calculation model;Wherein, dynamic index includes acceleration voltage fluctuation rate and acceleration voltage recovery time;Through detection system simulation generation working condition dynamic model;Through dynamic index calculation model, the dynamic index under each working condition is calculated, and the calculation results are summarized and output;The present application realizes the index detection of the anti-interference performance of acceleration power under the transition process of multiple working conditions.

Description

Technical Field

[0001] This invention relates to the field of electron beam processing equipment technology, and more specifically to a method for detecting the dynamic indicators of the accelerating power supply in electron beam processing equipment. Background Technology

[0002] In electron beam processing equipment such as electron beam welding machines, electron beam manufacturing equipment, and electron beam drilling machines, the accelerating power supply is the energy source, and the accelerating voltage directly affects the formation of the electron beam spot and the energy density distribution. Therefore, the performance of the accelerating power supply is crucial to the performance of the electron beam processing equipment. Currently, the performance indicators of the accelerating power supply are mainly measured by steady-state indicators such as the stability and repeatability of the accelerating voltage. Due to the use of a closed-loop control system, the steady-state performance indicators of the accelerating power supply are relatively easy to meet. However, as production processes place increasingly higher demands on electron beam processing equipment, the steady-state performance indicators of the accelerating power supply cannot fully reflect the quality of processing details. It is necessary to introduce dynamic indicators for the accelerating power supply.

[0003] Therefore, how to provide a method for detecting the dynamic indicators of the accelerating power supply of electron beam processing equipment is a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0004] In view of this, the present invention provides a method for detecting the dynamic index of an accelerating power supply for electron beam processing equipment, proposes dynamic indexes reflecting the anti-interference performance of the accelerating power supply, defines three typical operating condition transition processes based on the operating characteristics of the accelerating power supply: grid voltage mutation, electron beam current mutation, and accelerating power supply interruption recovery, and refines and standardizes the types of interference sources; finally, it provides a method for detecting and calculating the dynamic indexes of the typical operating condition transition processes, and obtains a basis for quantitatively comparing the dynamic performance of the accelerating power supply.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A method for detecting the dynamic performance of an accelerating power supply in an electron beam processing device includes the following steps:

[0007] Set dynamic indicators and construct a dynamic indicator calculation model; wherein, the dynamic indicators include accelerated voltage fluctuation rate and accelerated voltage recovery time;

[0008] A dynamic model of the working conditions is generated through simulation, and the dynamic indicators under each working condition are calculated using the dynamic indicator calculation model. The calculation results are then summarized and output to obtain the final detection results.

[0009] Furthermore, the acceleration voltage fluctuation rate calculation model is as follows:

[0010] or

[0011] Wherein, ΔU a % represents the accelerated voltage fluctuation rate during the transition from operating condition i to operating condition j, U aj U is the acceleration voltage value under operating condition j; aijmax and U aijmin They are the accelerating voltage U a Maximum and minimum values.

[0012] Furthermore, the acceleration voltage recovery time calculation model is as follows:

[0013] t v =t j -t i

[0014] Among them, t v The acceleration voltage recovery time, t, represents the transition process from operating condition i to operating condition j. i To accelerate the voltage beyond the steady-state band of the steady-state accelerating voltage under operating condition i, t j The moment when the acceleration voltage enters the steady-state band of the operating condition j and no longer exceeds the steady-state band.

[0015] Furthermore, the dynamic operating condition model includes grid voltage fluctuations, electron beam current fluctuations, and acceleration power supply interruption recovery. Among these, grid voltage fluctuations and electron beam current changes are the two major sources of interference for the acceleration power supply. The interference effects of grid voltage fluctuations and electron beam current fluctuations are close to the interference effects of a step function, which are more severe than the interference in actual operation, ensuring that the actual operating performance of the acceleration power supply is better than the test performance. In addition, occasional discharge is a special fault in the operation of the acceleration power supply. The control system of the acceleration power supply is equipped with discharge detection and acceleration power supply interruption recovery kinetic energy.

[0016] Furthermore, the detection step for the power grid voltage surge includes:

[0017] Adjust the supply voltage of the accelerating voltage system under test so that the supply voltage decreases or increases within one power grid cycle.

[0018] During the transition between the output voltage drop and rise, the output voltage of the acceleration power supply system under test is collected in real time, and the acceleration voltage fluctuation rate and acceleration voltage recovery time are calculated based on the collected data.

[0019] Furthermore, the detection step for the electron beam current abrupt change includes:

[0020] Control the electron beam current of the electron beam device under test by causing sudden increases and decreases in the electron beam current, respectively;

[0021] Acquire electron beam signals and accelerating voltage signals during the electron beam surge and drop periods;

[0022] The rise time of the electron beam is calculated based on the electron beam signal during the surge.

[0023] The electron beam descent time is calculated based on the electron beam signal during the sudden drop.

[0024] The larger of the two values ​​is selected as the electron beam rise and fall time and compared with the preset time.

[0025] When the electron beam rise and fall time is not greater than the specified time, the dynamic indicators during the sudden increase and sudden decrease periods are calculated based on the accelerating voltage signal, and the larger value between the two is selected as the detection result.

[0026] Furthermore, the detection step for accelerating power interruption recovery includes:

[0027] The test signal is triggered to interrupt and restore the acceleration power supply system under test, during which the acceleration voltage signal is acquired.

[0028] Dynamic parameters are calculated based on the collected acceleration voltage signals.

[0029] The beneficial effects of this invention are:

[0030] As can be seen from the above technical solution, compared with the prior art, the present invention discloses a method for detecting the dynamic index of the accelerating power supply of an electron beam processing equipment. First, it defines the accelerating voltage fluctuation rate ΔU as the dynamic index of the accelerating power supply during the transition process between two different operating conditions. a % and accelerated voltage recovery time t v Accelerating voltage fluctuation rate ΔU a % and accelerated voltage recovery time t v The smaller the value, the better the anti-interference performance of the accelerator power supply. Then, based on the operating characteristics of the accelerator power supply, three typical operating condition transient processes are defined: grid voltage change, electron beam current change, and accelerator power supply interruption recovery. The types of interference sources are extracted and standardized. Finally, the detection and calculation methods of dynamic indicators of typical operating condition transient processes are given to obtain a basis for quantitatively comparing the dynamic performance of the accelerator power supply. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0032] Figure 1 The attached figure is a schematic diagram of the dynamic data detection method for accelerating power supplies provided by the present invention;

[0033] Figure 2 The attached figure is a schematic diagram of the voltage signal waveform accelerating a sudden drop in grid voltage provided by the present invention;

[0034] Figure 3 The attached figure is a schematic diagram of the voltage signal waveform of the power grid voltage surge provided by the present invention;

[0035] Figure 4 The attached figure is a schematic diagram of the current signal waveform of the electron beam current drop acceleration power supply provided by the present invention;

[0036] Figure 5 The attached figure is a schematic diagram of the current signal waveform of the electron beam surge acceleration power supply provided by the present invention;

[0037] Figure 6 The attached figure is a schematic diagram of the electron beam current drop acceleration voltage signal waveform provided by the present invention;

[0038] Figure 7 The attached figure is a schematic diagram of the electron beam current surge acceleration voltage signal waveform provided by the present invention;

[0039] Figure 8 The attached figure is a schematic diagram of the accelerated voltage signal waveform for power interruption recovery provided by the present invention. Detailed Implementation

[0040] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0041] like Figure 1 A method for detecting the dynamic performance of an accelerating power supply in an electron beam processing device includes the following steps:

[0042] S1: Set dynamic indicators and construct a dynamic indicator calculation model; among which, dynamic indicators include accelerated voltage fluctuation rate and accelerated voltage recovery time;

[0043] The specific steps include:

[0044] 1. Definition of dynamic index: The process by which the accelerator power supply transitions from one operating condition i to another operating condition j is called the dynamic process. Operating condition i refers to the accelerator power supply operating at the accelerating voltage U. ai and electron beam I ai The stable state is obtained, and other operating conditions can be deduced in the same way;

[0045] 1.1 Accelerated voltage fluctuation rate ΔU a %: Accelerating voltage U during dynamic processa Extreme value (maximum value U) ajmax or minimum value U ajmin ) and operating condition j acceleration voltage U aj The percentage is defined as the accelerated voltage fluctuation rate ΔU. a %,Right now or

[0046] Among them, U aj U is the accelerating voltage under operating condition j; amax and U amin The acceleration voltage U during the transient process are respectively a Maximum and minimum values; ΔU a % represents the accelerated voltage fluctuation rate.

[0047] 1.2 Accelerated voltage recovery time t v The dynamic process starts from the accelerating voltage U a Beyond operating conditions, steady-state accelerating voltage U ai ±σ a The time from the start of the steady-state band to the entry into the steady-state accelerating voltage U under operating condition j aj ±σ a The time required to return to the steady-state band is defined as the acceleration voltage recovery time t. ν , ±σ a % represents the accelerating voltage U a Stability index value. The accelerated voltage recovery time calculation model is as follows:

[0048] t v =t j -t i

[0049] Among them, t v To accelerate voltage recovery time, t i To accelerate voltage U a Beyond operating conditions, steady-state accelerating voltage U ai ±σ a % steady-state time, t j To accelerate voltage U a Entering the steady-state acceleration voltage U under operating condition j aj ±σ a The moment when the value is within the steady-state band and does not exceed the steady-state band.

[0050] S2: Simulate and generate a dynamic model of the working conditions, calculate the dynamic indicators under each working condition through the dynamic index calculation model, and summarize and output the calculation results to obtain the final test results.

[0051] In one embodiment, the operating condition dynamic model includes grid voltage fluctuations, electron beam current fluctuations, and accelerated power outage recovery.

[0052] The detection steps for each dynamic model are as follows:

[0053] 2.1 Definition of Power Grid Voltage Sudden Change

[0054] When the electron beam processing equipment is operating in steady state under condition c, the power supply voltage undergoes a sudden voltage change λ% within n (n is a natural number) power grid cycles, after which the electron beam processing equipment transitions to operating condition d.

[0055] 2.1.1 Simulating sudden voltage changes in the power grid

[0056] Adjust the supply voltage of the power supply system to be accelerated so that the supply voltage drops or rises to a specified value within one or more power grid cycles.

[0057] When the electron beam processing equipment is operating in steady state under condition 1, the supply voltage of the accelerating power supply system under test is adjusted so that the supply voltage decreases by λ% within one power grid cycle, and the accelerating voltage signal u is collected. a (u a Proportional to accelerating voltage Ua, U a The actual value of the representative indicator is calculated using u. a (The measured values ​​used in the calculation) are transient process data until steady-state operation under condition 2;

[0058] When the electron beam processing equipment is operating in steady state under condition 3, the supply voltage of the accelerating power supply system under test is adjusted so that the supply voltage increases by λ% within one power grid cycle, and the accelerating voltage signal u is collected. a Transient process data until steady-state operation at condition 4.

[0059] 2.1.2 Calculation of dynamic indicators for power grid voltage change processes

[0060] During the transition between operating conditions where the supply voltage drops or rises, the acceleration voltage signal u of the acceleration power supply system under test... a Real-time data acquisition is performed, and the accelerated voltage fluctuation rate and accelerated voltage recovery time are calculated based on the acquired data.

[0061] According to the accelerating voltage signal u a Data collected during the transition from operating condition 1 to operating condition 2 was used to plot the acceleration voltage signal u during the grid voltage drop λ%. a Dynamic waveform diagram, such as Figure 2 ,from Figure 2 Find the acceleration voltage signal u under operating condition 2. a steady-state value u a2 and the acceleration voltage signal u during the transition process a Minimum value u a2min This accelerates voltage fluctuation rate. Accelerating voltage signal u aThe steady-state value is replaced by the average value, i.e. Other methods for calculating steady-state values ​​and u a2 same;

[0062] from Figure 2 The above calculation finds the accelerating voltage signal u. a Steady-state value u under operating condition 1 a1 Accelerating voltage signal u a Beyond the steady-state value u of operating condition 1 a1 ±σ a %Steady-state band time t1, accelerating voltage signal u a Entering steady-state value u under operating condition 2 a2 ±σ a The acceleration voltage recovery time t is the time t2 when the voltage remains within the steady-state band and does not exceed the steady-state band. ν12 = t2-t1.

[0063] According to the accelerating voltage signal u a Data collected during the transition from operating condition 3 to operating condition 4 was used to plot the acceleration voltage signal u during the grid voltage surge λ%. a Dynamic waveform diagram, such as Figure 3 ,from Figure 3 The above calculation finds the steady-state value u for operating condition 4. a4 and the acceleration voltage signal u during the transition process a Maximum value u a4max This accelerates voltage fluctuation rate.

[0064] from Figure 3 The above calculation finds the voltage signal u a Steady-state value u under operating condition 3 a3 Accelerating voltage signal u a Beyond the steady-state value u under operating condition 3 a3 ±σ a %Steady-state band time τ3, accelerating voltage signal u a Entering the steady-state value u under operating condition 4 a4 ±σ a The acceleration voltage recovery time t is the time τ4 when the voltage remains within the steady-state band and does not exceed the steady-state band. ν34 =τ4-τ3.

[0065] ΔU a12 % and ΔU a34 The larger percentage value is used to represent the voltage fluctuation rate ΔU, which is accelerated by sudden voltage changes in the power grid. a %, t ν12 With t ν34 The larger value is used to accelerate the voltage recovery time t during grid voltage surges. ν .

[0066] 2.2 Definition of Electron Beam Current Abrupt Change

[0067] Operating condition e electron beam I be At the specified time t s Complete the operation of the electron beam I under working conditions bf The transition;

[0068] 2.2.1 Simulating sudden changes in electron beam current

[0069] Controlling the electron beam device under test to change the electron beam current, so that the electron beam current is within a specified time t s The internal value may decrease or increase to the specified value.

[0070] When the electron beam processing equipment is operating in steady state under condition 5, the electron beam current of the electron beam device under test is controlled by I. b5 Sudden drop to I b6 Acquire and record electron beam signal u b and accelerating voltage signal u a Transient process data until steady-state operation under condition 6;

[0071] When the electron beam processing equipment is operating in steady state under condition 7, the electron beam current of the electron beam device under test is controlled by I. b7 Rising to I b8 Acquire and record electron beam signal u b and accelerating voltage signal u a Transient process data until steady-state operation under condition 8;

[0072] The acceleration voltage setting and grid voltage remain unchanged for operating conditions 5, 6, 7, and 8 above, and the electron beam current setting for operating condition 5 is equal to the electron beam current setting for operating condition 8, and the electron beam current setting for operating condition 6 is equal to the electron beam current setting for operating condition 7.

[0073] 2.2.2 Calculation of dynamic indicators for the electron beam current abrupt change process

[0074] The electron beam rise time and fall time are calculated based on the data from two electron beam signal acquisitions, and the larger of the two values ​​is selected as the electron beam rise and fall time and compared with a preset specified time; when the electron beam rise and fall time is not greater than the specified time t... s At that time, the dynamic indexes during the electron beam current surge and drop were calculated based on the data collected from the two acceleration voltage signals, and the larger value between the two was selected as the detection result.

[0075] According to the electron beam signal u b Data collected during the transition from operating condition 5 to operating condition 6 was used to plot the electron beam signal I. b From working condition 5 I b5 Suddenly dropped to operating condition 6 I b6 Time-of-flight electron beam signal ub Dynamic waveform diagram, such as Figure 4 ,from Figure 4 The above calculation finds the electron beam signal u b Steady-state value u under operating condition 5 b5 Electron beam signal u b Steady-state value u under operating condition 6 b6 Electron beam signal u b Exceeding the steady-state value u of operating condition 5 b5 ±σ b %Steady-state band time t b5 Electron beam signal u b Entering the steady-state value u under operating condition 6 b6 ±σ b The time t is within the steady-state band and does not exceed the steady-state band. b6 , ±σ b % is the electron beam current I b The stability index value indicates the electron beam fall time t. b56 =t b6 -t b5 .

[0076] According to the electron beam signal u b Data collected during the transition from operating condition 7 to operating condition 8 was used to plot the electron beam current from condition 7's I... b7 Suddenly rises to operating condition 8 I b8 Time-of-flight electron beam signal u b Dynamic waveform diagram, such as Figure 5 ,from Figure 5 The above calculation finds the electron beam signal u b Steady-state value u under operating condition 7 b7 Electron beam signal u b Steady-state value u under operating condition 8 b8 Electron beam signal u b Exceeding the steady-state value u of operating condition 7 b7 ±σ b %Steady-state band time τ b7 Electron beam signal u b Entering the steady-state value u under operating condition 6 b8 ±σ b The time τ is within the steady-state band and does not exceed the steady-state band. b8 Then the electron beam rise time t b78 =τ b8 -τ b7 .

[0077] t b56 t b78 The larger value is taken as the electron beam rise and fall time t b When t b Exceeding the specified time t sIf the above occurs, the data in 3.3.2 is invalid, and the electron beam rise and fall time needs to be modified by the electron beam control device. The electron beam abrupt change dynamic data detection must be performed again until the electron beam rise and fall time is no greater than the specified time t. s Then proceed to the next step;

[0078] The electron beam rise and fall time is not greater than the specified time t. s Under the condition, based on the accelerating voltage signal u a Data collected during the transition from operating condition 5 to operating condition 6 was used to plot the electron beam current from condition 5's I... b5 Suddenly dropped to operating condition 6 I b6 Acceleration voltage signal u a Dynamic waveform diagram, such as Figure 6 ,from Figure 6 The above calculation finds the acceleration signal u a Steady-state value u under operating condition 6 a6 and acceleration voltage signal u a Maximum value u a6max This accelerates voltage fluctuation rate.

[0079] from Figure 6 The above calculation finds the accelerating voltage signal u. a Steady-state value u under operating condition 5 a5 Accelerating voltage signal u a Exceeding the steady-state value u of operating condition 5 a5 ±σ a %Steady-state band time t5, accelerating voltage signal u a Entering the steady-state value u under operating condition 6 a6 ±σ a The acceleration voltage recovery time t is the time t6 when the voltage remains within the steady-state band and does not exceed the steady-state band. ν56 = t6-t5.

[0080] The electron beam rise and fall time is not greater than the specified time t. s Under the condition, based on the accelerating voltage signal u a Data collected during the transition from operating condition 7 to operating condition 8 was used to plot the electron beam current from condition 7's I... b7 Suddenly rises to operating condition 8 I b8 Acceleration voltage signal u a Dynamic waveform diagram, such as Figure 7 ,from Figure 7 The above calculation finds the accelerating voltage signal u. a Steady-state value u under operating condition 8 a8 and acceleration voltage signal u a Minimum value u a8min This accelerates voltage fluctuation rate.

[0081] from Figure 7 The above calculation finds the accelerating voltage signal u. a Steady-state value u under operating condition 7 a7 Accelerating voltage signal u a Exceeding the steady-state value u of operating condition 7 a7 ±σ a %Steady-state band time τ7, acceleration signal u a Entering the steady-state value u under operating condition 8 a8 ±σ a The acceleration voltage recovery time t is the time τ8 when the voltage does not exceed the steady-state band. ν78 =τ8-τ7.

[0082] ΔU a56 % and ΔU a78 The larger percentage value is used as the acceleration voltage fluctuation rate ΔU for electron beam current abrupt changes. a %, t ν56 With t ν78 The larger value is used as the acceleration voltage recovery time t for sudden changes in electron beam current. ν .

[0083] 2.3 Definition of Accelerated Power Supply Interruption Recovery: When the electron beam processing equipment is running in steady state under condition g, the accelerated power supply discharge fault protection suddenly cuts off the accelerated power supply. After a period of time, the accelerated power supply is automatically restored, and the equipment enters operation under condition h.

[0084] 2.3.1 Simulated acceleration power interruption recovery

[0085] When the electron beam processing equipment is operating in steady state under condition 9, the control triggers the interruption recovery test signal of the accelerating power supply system under test, causing the accelerating power supply to start the interruption recovery action, and the accelerating voltage signal u is collected and recorded. a Transient process data until steady-state operation at condition 10.

[0086] 2.3.2 Calculation of dynamic indicators for accelerating power interruption recovery process

[0087] According to the accelerating voltage signal u a Data collected during the transition from operating condition 9 to operating condition 10 was used to plot the acceleration voltage signal u during the power supply interruption recovery. a Dynamic waveform diagram, such as Figure 8 ,from Figure 8 The above calculation finds the acceleration signal u a Steady-state value u under operating condition 10 a10 and acceleration voltage signal u a Maximum value u a10max This accelerates voltage fluctuation rate.

[0088] from Figure 8 The above calculation finds the accelerating voltage signal u.a Steady-state value u under operating condition 9 a9 Accelerating voltage signal u a The steady-state value u of the operating condition 9 is increasingly exceeding the limit. a9 ±σ a %Steady-state band time t9, accelerating voltage signal u a Entering steady-state value u under operating condition 10 a10 ±σ a The time τ is within the steady-state band and does not exceed the steady-state band. 10 Then the accelerated voltage recovery time t ν =τ 10 -t9.

[0089] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to the method section.

[0090] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A method for detecting the dynamic performance of an accelerating power supply in an electron beam processing device, characterized in that, Includes the following steps: Set dynamic indicators and construct a dynamic indicator calculation model; wherein, the dynamic indicators include accelerated voltage fluctuation rate and accelerated voltage recovery time; The acceleration voltage fluctuation rate calculation model is as follows: or ; in, This represents the accelerated voltage fluctuation rate during the transition from operating condition i to operating condition j. Let be the acceleration voltage value under operating condition j; and Acceleration voltage Maximum and minimum values; The calculation model for the acceleration voltage recovery time is as follows: ； Among them, t v The acceleration voltage recovery time, t, represents the transition process from operating condition i to operating condition j. i To accelerate voltage Beyond the steady-state acceleration voltage of operating condition i, the steady-state band time t j To accelerate voltage The moment when the steady-state accelerating voltage of operating condition j enters the steady-state band and no longer exceeds the steady-state band; A dynamic model of the working conditions is generated through simulation, and the dynamic indicators under each working condition are calculated using the dynamic indicator calculation model. The calculation results are then summarized and output to obtain the final detection results.

2. The method for detecting dynamic indicators of an accelerating power supply in an electron beam processing device according to claim 1, characterized in that, The operating condition dynamic model includes grid voltage fluctuations, electron beam current fluctuations, and accelerated power outage recovery.

3. The method for detecting dynamic indicators of an accelerating power supply in an electron beam processing device according to claim 2, characterized in that, The detection steps for sudden voltage changes in the power grid include: Adjust the supply voltage of the acceleration power supply system under test so that the supply voltage decreases or increases to a specified value within one power grid cycle; During the transition process of the power supply voltage decreasing or increasing, the acceleration voltage signal of the acceleration power supply system under test is acquired in real time, and the acceleration voltage fluctuation rate and acceleration voltage recovery time are calculated based on the acquired data.

4. The method for detecting dynamic indicators of an accelerating power supply in an electron beam processing device according to claim 2, characterized in that, The detection steps for the electron beam current abrupt change include: Control the electron beam current of the electron beam device under test by causing sudden increases and decreases in the electron beam current, respectively; Acquire electron beam signals and accelerating voltage signals during the electron beam surge and drop periods; The rise time of the electron beam is calculated based on the electron beam signal during the surge. The electron beam descent time is calculated based on the electron beam signal during the sudden drop. The larger of the two values ​​is selected as the electron beam rise and fall time and compared with the preset time. When the electron beam rise and fall time is not greater than the specified time, the dynamic indicators during the sudden increase and sudden decrease periods are calculated based on the accelerating voltage signal, and the larger value between the two is selected as the detection result.

5. The method for detecting dynamic indicators of an accelerating power supply in an electron beam processing device according to claim 2, characterized in that, The detection steps for accelerating power interruption recovery include: The test signal is triggered to interrupt and restore the acceleration power supply system under test, during which the acceleration voltage signal is acquired. Dynamic parameters are calculated based on the collected acceleration voltage signals.

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