An automatic detection system for finished single crystal silicon rods

Abstract

The present invention relates to the field of silicon rod inspection technology, and provides an automatic inspection system for finished single crystal silicon rods, comprising: an industrial computer, a conveying mechanism, a four-axis manipulator, a V-shaped support platform, a sliding mounting frame, a sensor system, a first vision system, and a second vision system; the sliding mounting frame is mounted on the V-shaped support platform via a first moving mechanism; the sliding mounting frame has a diamond-shaped through hole, and the inner angle of the diamond-shaped through hole is 90°; the sensor system and the first vision system are mounted on the sliding mounting frame; the first vision system comprises: a first line array camera and a second line array camera; the first line array camera and the second line array camera are respectively arranged above the upper edge of the diamond-shaped through hole; the sensor system is mounted on the sliding mounting frame, and the sensor system comprises a plurality of contact sensors, and the plurality of contact sensors are arranged around the diamond-shaped through hole. The present invention can realize the automatic acquisition and detection of appearance images and dimensional data of square silicon rods, thereby improving the efficiency of silicon rod inspection.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon rod detection, and in particular to an automatic detection system for finished single crystal silicon rods. Background Art

[0002] At the photovoltaic silicon wafer processing end, there is a process for inspecting the appearance and dimensions of the polished rectangular (square) silicon rods. This process is to accurately measure the appearance and dimensions of the finished silicon rods and detect surface defects. Qualified products will enter the packaging process to be packaged and shipped out. Figure 1a As shown in Figure 1-d, dimensional inspection primarily includes the distances across edges (LD1, LD2), diagonal distances (LC1, LC2), arc lengths (CA1-CA4), arc length projections (LR1-LR4, LR5-LR8), and the angles between edges (perpendicularity of each edge). Inspection accuracy is typically within ±0.02mm, and the inspection dimensions include 158mm, 166mm, 182mm, and 210mm square bars. Inspection defects include chipping and cracks. High accuracy and a wide range of inspection items, coupled with the need to accommodate multiple dimensional specifications, make inspection challenging.

[0003] Currently, silicon ingot inspection in the photovoltaic industry is primarily performed manually. During the inspection process, specialized calipers and arc angle measuring equipment are used to repeatedly flip the silicon ingot to complete all dimensional measurements. This measurement method is susceptible to human error, resulting in low accuracy. Direct visual inspection of silicon ingot surface defects such as chipped edges is also prone to omissions and misidentification, resulting in low inspection efficiency and time-consuming inspections. Furthermore, manual flipping of the silicon ingot can easily lead to personal injury accidents. Furthermore, measurement data must be manually entered into the system, which is prone to errors and can cause production losses. Summary of the Invention

[0004] The present invention mainly solves the technical problems that silicon rod inspection is currently mainly carried out through manual inspection, which is easily affected by human factors, resulting in low detection accuracy and possible omissions and identification errors when directly identifying silicon rod surface defects with the naked eye. An automatic inspection system for finished single crystal silicon rods is proposed to realize the automatic collection and inspection of appearance images and dimensional data of square silicon rods, thereby improving the efficiency of silicon rod inspection.

[0005] The present invention provides an automatic detection system for finished single crystal silicon rods, comprising: an industrial control computer;

[0006] The automatic detection system for finished single crystal silicon rods also includes: a conveying mechanism, a four-axis manipulator, a V-shaped support platform, a sliding mounting stand, a sensor system, a first vision system, and a second vision system;

[0007] The four-axis manipulator is arranged on the conveying mechanism; the four-axis manipulator comprises a first gripper and a second gripper; a first laser sensor is arranged on the first gripper, and a second laser sensor is arranged on the second gripper; the first laser sensor and the second laser sensor are positioned correspondingly;

[0008] The V-shaped support platform is arranged on one side of the conveying mechanism; the V-shaped support platform corresponds to the position of the four-axis manipulator;

[0009] The sliding mounting frame is mounted on the V-shaped support platform via a first moving mechanism; the sliding mounting frame has a diamond-shaped through hole, and the inner angle of the diamond-shaped through hole is 90°; the sensor system and the first visual system are mounted on the sliding mounting frame;

[0010] The first visual system includes: a first line array camera and a second line array camera; the first line array camera and the second line array camera are respectively arranged above the upper side of the diamond through hole;

[0011] The sensor system is mounted on a sliding mounting stand, and the sensor system includes a plurality of contact sensors, and the plurality of contact sensors are arranged around the diamond-shaped through hole;

[0012] The second visual system is mounted on the conveying mechanism via a second moving mechanism, and the second moving mechanism is located behind the four-axis manipulator;

[0013] The second visual system includes: a third line array camera and a fourth line array camera; the third line array camera is installed on the right side of the conveying mechanism, and the fourth line array camera is installed directly above the conveying mechanism;

[0014] The first laser sensor, the second laser sensor, the first line array camera, the second line array camera, the third line array camera, the fourth line array camera and the plurality of contact sensors are respectively connected to the industrial computer by signal.

[0015] Preferably, the sensor system further comprises: four laser sensors;

[0016] Four laser sensors are arranged correspondingly on the outside of the four corners of the diamond-shaped through hole;

[0017] The four laser sensors are connected to the industrial computer signals respectively.

[0018] Preferably, there are 12 touch sensors, wherein 4 touch sensors are arranged outside the four corners of the diamond through hole, and 8 touch sensors are arranged in pairs outside the sides of the diamond through hole.

[0019] Preferably, the contact sensor and laser sensor are respectively installed through mobile modules.

[0020] Preferably, the conveying mechanism comprises a first roller line, a second roller line, a third roller line and a fourth roller line arranged in sequence;

[0021] The V-shaped support platform is arranged on one side of the second roller track;

[0022] The four-axis manipulator is arranged on the second roller line;

[0023] The second moving mechanism is arranged on the third roller conveyor line.

[0024] Preferably, a first lifting device and a first centering and correcting device are provided on the second roller line;

[0025] A second lifting device and a second centering and correcting device are provided on the third roller line.

[0026] Preferably, the first jacking device and the second jacking device respectively include: a jacking device cylinder, a jacking device slide, a lifting plate, a wedge block and a guide wheel;

[0027] The jacking device cylinder is horizontally installed on the conveying mechanism, and the telescopic rod of the jacking device cylinder is connected to the jacking device slide;

[0028] A wedge block is provided on the slide plate of the jacking device, and a guide wheel is provided on the wedge block;

[0029] The guide wheel is installed on a lifting plate, and a plurality of lifting blocks are arranged on the lifting plate.

[0030] Preferably, the first centering and correcting device and the second centering and correcting device respectively comprise: a clamping cylinder and a plurality of clamping claws arranged on both sides of the conveying mechanism;

[0031] The telescopic rod of the clamping cylinder is connected to the rotating rod, and the rotating rod is hinged on the conveying mechanism, and the conveying mechanism is provided with an arc guide groove, and the guide block of the rotating rod extends into the arc guide groove;

[0032] The two ends of the rotating rod are respectively hinged to the slide of the correction device, and a plurality of clamping claws are installed on the slide of the correction device.

[0033] Preferably, the first moving mechanism and the second moving mechanism respectively include: a moving mechanism motor, a moving mechanism lead screw and a moving mechanism nut;

[0034] The output end of the moving mechanism motor is connected to the moving mechanism lead screw in a transmission manner;

[0035] The moving mechanism screw is matched with a moving mechanism nut;

[0036] The first visual system or the second visual system is installed on the nut of the moving mechanism.

[0037] The present invention provides an automatic detection system for finished single crystal silicon rods, which can automatically collect and detect the appearance images and dimensional data of square silicon rods. Compared with the existing technology, the present invention has the following advantages:

[0038] 1. The sensor system is equipped with multiple laser sensors and contact sensors, with high detection accuracy and efficiency. It can detect the dimensions of various specifications of square silicon rods. The repeated measurement accuracy is stable within ±0.01mm. The detection of a square rod can be completed in 60 seconds, realizing the automatic collection of silicon rod dimensional data, providing support for the industrial computer and staff to calculate the silicon rod dimensional parameters. The visual system is equipped with multiple linear array cameras, which can automatically capture images of all surfaces of the silicon rod, providing support for the industrial computer and staff to analyze silicon rod surface defects. This invention can realize the automatic collection and detection of appearance images and dimensional data of square silicon rods, improve the efficiency of silicon rod detection, enhance detection accuracy, reduce detection errors, provide effective data, and replace manual detection work.

[0039] 2. A conveying mechanism and a four-axis robot are set up with automatic loading and unloading functions, replacing manual labor to achieve fully automatic data collection and open up the last automation link in the silicon rod production process.

[0040] 3. The realization of automated data collection and detection as well as automatic loading and unloading greatly reduces personal safety accidents caused by previous square bar detection and improves the safety of the detection process.

[0041] 4. The system industrial computer of the present invention can be connected to the silicon rod data management system, and can automatically transmit all the detection data of the silicon rod to the silicon rod data management system or data server at the production site, thereby facilitating the production management of the enterprise.

[0042] 5. The data collected by the industrial computer can be analyzed manually, or the industrial computer can be configured with the industry's existing software system for automatic data processing, which can quickly and accurately complete the silicon rod appearance and size detection work, ensure the accuracy of the test results, and significantly reduce the detection error. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1a -d is a schematic diagram of various dimensions of the silicon rod tested by the present invention;

[0044] Figure 2 This is a schematic structural diagram of the automatic detection system for finished single crystal silicon rods provided by the present invention;

[0045] Figure 3 This is a front view of the automatic detection system for finished single crystal silicon rods provided by the present invention;

[0046] Figure 4 This is a top view of the automatic detection system for single crystal finished silicon rods provided by the present invention;

[0047] Figure 5 This is a side view of the automatic detection system for finished single crystal silicon rods provided by the present invention;

[0048] Figure 6 It is a structural schematic diagram of the jacking device and the centering and correcting device provided by the present invention;

[0049] Figure 7 This is a front view of the jacking device and the centering and correcting device provided by the present invention;

[0050] Figure 8 It is a structural schematic diagram of the four-axis manipulator provided by the present invention;

[0051] Figure 9 Schematic diagram of the arrangement of the sensor system and the first visual system provided by the present invention;

[0052] Figure 10 is a schematic diagram of the arrangement of the second visual system provided by the present invention;

[0053] Figure 11 Schematic diagram of light source arrangement of the visual system provided by the present invention;

[0054] Figure 12 Schematic diagram of silicon rod length calculation provided by the present invention;

[0055] Figure 13 Schematic diagram of diagonal distance calculation provided by the present invention;

[0056] Figure 14 It is a schematic diagram of the calculation of the distance between opposite sides and the angle between each side provided by the present invention;

[0057] Figure 15 It is a schematic diagram of the arc length and arc length projection calculation provided by the present invention.

[0058] Figure 1: 1-first roller conveyor; 2-silicon rod; 3-second roller conveyor; 4-first lifting device; 5-first centering and correcting device; 6-four-axis manipulator; 7-V-shaped support platform; 8-first moving mechanism; 9-sensor system; 10-first visual system; 11-third roller conveyor; 12-second lifting device; 13-second centering and correcting device; 14-second moving mechanism; 15-second visual system; 16-fourth roller conveyor; 17-P LC control system; 18-industrial computer; 19-first clamping jaw; 20-first laser sensor; 21-second laser sensor; 22-second clamping jaw; 23-moving module; 24-third line array camera; 25-fourth line array camera; 26-sliding mounting stand; 27-clamping cylinder; 28-clamping jaw; 29-rotating rod; 30-lifting block; 31-lifting device cylinder; 32-lifting device slide; 33-lifting plate; 34-wedge block. DETAILED DESCRIPTION

[0059] To make the technical problems solved, the technical solutions adopted, and the technical effects achieved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, rather than all of the contents.

[0060] like Figure 2-5 As shown, the automatic detection system for finished single crystal silicon rods provided by an embodiment of the present invention includes: an industrial computer 18, a conveying mechanism, a four-axis robot 6, a V-shaped support platform 7, a sliding mounting stand 26, a sensor system 9, a first vision system 10, and a second vision system 15.

[0061] The conveying mechanism includes a first roller conveyor 1, a second roller conveyor 3, a third roller conveyor 11, and a fourth roller conveyor 16, arranged in sequence. The first roller conveyor 1 is used to input silicon rods 2 to be inspected, and the fourth roller conveyor 16 is used to output inspected silicon rods 2. In this embodiment, proximity switches can be installed at designated locations on the roller conveyor where silicon rods 2 are required to stop. The proximity switches detect when the roller conveyor 2 stops, facilitating inspection of the silicon rods 2.

[0062] The second roller conveyor line 3 is provided with a first lifting device 4 and a first centering and correcting device 5 ; the third roller conveyor line 11 is provided with a second lifting device 12 and a second centering and correcting device 13 .

[0063] The first lifting device 4 and the second lifting device 12 have the same structure. There are many ways to realize the lifting of the lifting device. The first lifting device 4 and the second lifting device 12 can realize the lifting by cylinders. The present invention does not limit the specific structure, but provides a feasible way. Specifically, Figure 6-7 As shown, the first jacking device 4 and the second jacking device 12 respectively include: a jacking device cylinder 31, a jacking device slide 32, a lifting plate 33, a wedge block 34 and a guide wheel; the jacking device cylinder 31 is horizontally installed on the conveying mechanism, and the telescopic rod of the jacking device cylinder 31 is connected to the jacking device slide 32. The jacking device slide 32 is provided with a wedge block 34, and the wedge block 34 is matched with a guide wheel. The guide wheel is installed on the lifting plate 33, and the lifting plate 33 is provided with multiple jacking blocks 30. The telescopic rod of the jacking device cylinder 31 is extended, and the wedge block 34 is driven to move left and right through the jacking device slide 32. The wedge block 34 has a sloped surface, and the guide wheel moves on the sloped surface to realize the raising and lowering of the lifting plate 33.

[0064] The first centering and correcting device 5 and the second centering and correcting device 13 have the same structure. There are many ways to realize centering. The first centering and correcting device 5 and the second centering and correcting device 13 can realize centering and clamping by means of a motor and a screw or a cylinder. The present invention does not limit the specific structure, but provides a feasible method. Specifically, Figure 6-7 As shown, the first centering and correcting device 5 and the second centering and correcting device 13 respectively include: a clamping cylinder 27 and a plurality of clamping claws 28 arranged on both sides of the conveying mechanism. The telescopic rod of the clamping cylinder 27 is connected to the rotating rod 29, and the rotating rod 29 is hinged on the conveying mechanism, and a circular arc guide groove is left on the conveying mechanism, and the guide block of the rotating rod 29 extends into the circular arc guide groove; the two ends of the rotating rod 29 are respectively hinged to the correcting device slide, and a plurality of clamping claws 28 are installed on the correcting device slide. In addition, a guide rail is provided on the conveying mechanism, and a slider is provided on the bottom surface of the correcting device slide, and the guide rail is used for sliding guidance. The telescopic rod of the clamping cylinder 27 is extended, driving the rotating rod 29 to rotate along the circular arc guide groove, and at the same time driving the correcting device slide and the clamping claws 28 to move closer or farther away from each other, thereby achieving centering and clamping.

[0065] The four-axis manipulator 6 is arranged on the conveying mechanism. Specifically, the four-axis manipulator 6 is arranged on the second roller line 3; Figure 8 As shown, the four-axis manipulator 6 has a first gripper 19 and a second gripper 22; a first laser sensor 20 (L1) is provided on the first gripper 19, and a second laser sensor 21 (L2) is provided on the second gripper 22; the first laser sensor 21 and the second laser sensor 22 are positioned correspondingly; the first laser sensor 21 and the second laser sensor 22 are used to detect the length of the silicon rod 2.

[0066] The V-shaped support platform 7 is arranged on one side of the conveying mechanism. Specifically, the V-shaped support platform 7 is arranged on one side of the second roller line 3. The V-shaped support platform 7 corresponds to the position of the four-axis manipulator 6.

[0067] The sliding mounting frame 26 is mounted on the V-shaped support platform 7 through the first moving mechanism 8; the sliding mounting frame 26 is mounted on the first moving mechanism 8; the sliding mounting frame 26 has a diamond-shaped through hole, and the inner angle of the diamond-shaped through hole is 90°; the sensor system 9 and the first visual system 10 are mounted on the sliding mounting frame 26. Specifically, the sliding mounting frame 26 is enabled to move repeatedly along the axial direction of the V-shaped support platform 7 through the first moving mechanism 8. Specifically, the first moving mechanism 8 includes: a moving mechanism motor, a moving mechanism screw and a moving mechanism nut; the output end of the moving mechanism motor is transmission-connected to the moving mechanism screw; a moving mechanism nut is provided on the moving mechanism screw; and the first visual system 10 is mounted on the moving mechanism nut. The first moving mechanism 8 can drive the first visual system 10 to move linearly along the X-axis direction through the rotation of the moving mechanism motor.

[0068] In this embodiment, the V-shaped support platform 7 is used to support and place the silicon rod 2 when detecting the size parameters of the silicon rod 2. The V-shaped support platform 7 has a V-shaped groove, and the angle of the V-shaped groove is a standard 90°, which can stand up one edge of the silicon rod 2 and place the silicon rod 2 in a diamond shape; the present invention adopts a V-shaped support platform 7, which has good stability and can adapt to the measurement of silicon rods 2 of different sizes and models; the V-shaped support method is adopted, and the square rod is placed in the position accurately, does not require secondary correction, the support accuracy is better, and the position state of the square rod is more stable and not easy to change. At the same time, this method is conducive to the layout of the sensor, and can cover the synchronous measurement of 4 faces and 4 chamfers (vertices). It solves the problems of the traditional flat measurement method, which requires secondary correction and is difficult to layout the sensor.

[0069] Taking the detection on the upper left side as an example, square bars of different sizes are placed on the V-shaped support platform 7. The upper left side only increases and decreases at an angle of 45° upward, which helps to use a single set of high-precision mobile modules to achieve compatibility with more sizes.

[0070] The first vision system 10 includes: a first line array camera and a second line array camera; the first line array camera C1 and the second line array camera C2 are respectively arranged above the upper edge of the diamond-shaped through hole, and the shooting direction is perpendicular to the side of the silicon rod standard component (silicon rod standard size and placement standard); specifically, the first line array camera C1 is located above the upper left edge of the diamond-shaped through hole, and is used to photograph the first side surface of the silicon rod 2 and detect surface defects on the first side surface of the silicon rod 2; the second line array camera C2 is located above the upper right edge of the diamond-shaped through hole, and is used to photograph the second side surface of the silicon rod 2 and detect surface defects on the second side surface of the silicon rod 2.

[0071] The sensor system 9 is mounted on the sliding mounting stand 26 and includes a plurality of contact sensors and four laser sensors. Figure 9As shown, multiple contact sensors are arranged around the diamond-shaped through-hole. Specifically, there are 12 contact sensors (S1-S12). Among them, four contact sensors (S1-S4) are arranged outside the four corners of the diamond-shaped through-hole to detect the diagonal distance of silicon rods 2 of different sizes. Eight contact sensors (S5-S12) are arranged in pairs outside each side of the diamond-shaped through-hole to detect the distance between opposite sides of silicon rods 2 of different sizes. All relatively installed contact sensors are in a collinear state, for example, S5 and S7 are collinear, and S6 and S8 are collinear.

[0072] The diagonal distance LC1 of silicon ingot 2 is obtained from data collected by contact sensors S1 and S2, while the diagonal distance LC2 of silicon ingot 2 is obtained from data collected by contact sensors S3 and S4. The side-to-side distance LD1 of silicon ingot 2 is obtained from data collected by contact sensors S5 and S6 and the opposite contact sensors S7 and S8. The side-to-side distance LD2 of silicon ingot 2 is obtained from data collected by contact sensors S9 and S10 and the opposite contact sensors S11 and S12. Furthermore, the perpendicularity of each side can also be obtained from data collected by contact sensors S5-S12.

[0073] like Figure 9 As shown, four laser sensors (L3-L6) are placed outside the four corners of the diamond-shaped through-hole. The arc length (CA1-CA4) and arc length projection (LR1-LR4, LR5-LR8) are obtained from the data collected by laser sensors L3-L6.

[0074] In the present invention, the contact sensors (S1-S12) and four laser sensors (L3-L6) are each mounted via a movable module 23. Mounting each sensor via the movable module 23 allows for adjustment of each sensor's detection position. The selection and installation of single-axis or dual-axis movable modules can be adjusted based on specific operating conditions. Each line array camera can also perform acquisition without moving its position, or can be mounted and adjusted via the movable module, without specific limitations in the present invention.

[0075] During detection, square silicon rods 2 of different sizes are placed on a V-shaped support platform 7, with the bottom arc angle positions being uniform. As for the upper arc angles having different upper and lower dimensions, a movable module 23 is provided to solve the problem of different sizes, and can adapt to the dimensional parameter detection of square silicon rods 2 of different sizes and models; and for the arc angles on the left and right sides, the arc angle positions of silicon rods 2 of different sizes are different left and right and up and down, and the movable module 23 is provided to move forward and backward (the setting direction of the movable module 23 is perpendicular to the radial direction of the silicon rod 2, the movable modules at the upper and lower corners are horizontally set, and the movable modules at the left and right corners are vertically set), which solves the problem of left and right position changes, and at the same time appropriately increases the scanning range.

[0076] The present invention adopts multiple groups of high-precision mobile modules in conjunction with contact sensors (S1-S12), which can realize the detection of the side distance and diagonal distance of square bars of different sizes. The detection accuracy can be within 0.01mm, ensuring the accuracy of side detection and diagonal distance detection; in addition, two contact sensors are set on a single side to obtain the straight line angle of the cross section, which is used to calculate the angle between the four sides and realize verticality detection.

[0077] The second visual system 15 is mounted on the conveying mechanism via a second mobile mechanism 14, which is located behind the four-axis manipulator 6. Specifically, the second mobile mechanism 14 is mounted on the third roller track 11. The second mobile mechanism 14 is identical to the first mobile mechanism 8 and includes a motor, a lead screw, and a nut. The output of the motor is in transmission connection with the lead screw, which is fitted with a nut. The nut houses the moving plate of the second visual system 15. The second mobile mechanism 14 can drive the second visual system 15 to move linearly along the conveying mechanism by rotating the motor.

[0078] like Figure 10 As shown, the second vision system 15 includes a third line scan camera 24 (C3) and a fourth line scan camera 25 (C4). The third line scan camera 24 is mounted to the side of the conveyor mechanism, and the fourth line scan camera 25 is mounted directly above the conveyor mechanism. The third line scan camera 24 faces the side and is used to capture images of the third side surface of the silicon ingot 2 to detect surface defects on this side surface. The fourth line scan camera 25 faces downward and is used to capture images of the fourth side surface of the silicon ingot 2 to detect surface defects on this side surface.

[0079] After polishing, the silicon rod 2 has polishing marks at certain angles. These marks make the surface not perfectly smooth, which has a significant impact on lighting and acquisition. It has also been confirmed that these marks are sensitive to light sources on one side and have no significant effect on the other side. However, since the marks are in an uncertain direction, it is impossible to determine which direction the light source is from. Therefore, the first line array camera C1, the second line array camera C2, the third line array camera 24 (C3), and the fourth line array camera 25 (C4) are all equipped with light sources. Figure 11As shown, two sets of left and right light sources are used. Taking the fourth line scan camera 25 (C4) as an example, during the movement of the line scan camera, the left light source illuminates first, and the line scan camera captures one line. The left light source deactivates, and the right light source illuminates, and the camera captures another line. This process is repeated, with high-frequency switching of the cameras for continuous scanning, to obtain the image to be processed. When the light source is incorrectly positioned, the captured image will contain noticeable dark areas, affecting image analysis. When the light source is correctly positioned, the captured image surface is relatively uniform, making it easier to detect and analyze defects based on brightness. The present invention utilizes dual-sided light sources, positioned on both sides. During actual acquisition, high-frequency control is used to rapidly switch the light sources, aligning the line scan camera with the acquisition. After acquisition, the correct image is extracted and transmitted to the industrial computer 18 for analysis.

[0080] In this embodiment, the electronic control components for the operation of various devices such as the conveying mechanism, proximity switch, four-axis manipulator 6, moving mechanism, lifting device, and centering and correcting device can be controlled by a PLC control system 17. The first laser sensor 20, the second laser sensor 21, the first line array camera, the second line array camera, the third line array camera 24, the fourth line array camera 25, and multiple contact sensors of the sensor system and the visual system are respectively connected to the industrial computer 18 for signal communication. The laser sensors, contact sensors, line array cameras, and other components collect measurement data of the silicon rod 2 and transmit it to the industrial computer 18. The system of the present invention realizes automatic detection, and the external industrial computer 18 performs data processing and analysis.

[0081] The working process of the automatic detection system for finished single crystal silicon rods provided by the present invention is as follows:

[0082] 1. Silicon rods 2 are loaded from the right side of the system, enter the first roller conveyor line 1 along the X direction, and then enter the second roller conveyor line 3 and stop at the designated position.

[0083] 2. The first lifting device 4 lifts the silicon rod 2, and the first centering device 5 clamps and aligns the silicon rod 2 in the Y-axis direction to ensure that the X-axis axis of the silicon rod 2 is parallel to the X-axis movement trajectory of the first clamping jaw 19 and the second clamping jaw 22 of the four-axis manipulator 6.

[0084] 3. The four-axis manipulator 6 moves to the location of the silicon rod 2, so that the first clamping jaw 19 and the second clamping jaw 22 are located at both ends of the silicon rod 2. The first laser sensor 20 (L1) on the first clamping jaw 19 and the second laser sensor 21 (L2) on the second clamping jaw 22 measure the distance of the end faces on both sides of the silicon rod 2, and the obtained measurement data is sent to the industrial computer 18.

[0085] 4. After completing the length measurement, the first clamp 19 and the second clamp 22 of the four-axis manipulator 6 clamp the silicon rod 2, lift the silicon rod 2 along the Z axis and rotate it 45° along the X axis, then move it along the negative direction of the Y axis to the V-shaped support platform 7, and then place the silicon rod 2 on the V-shaped groove of the V-shaped support platform 7 along the negative direction of the Z axis. The four-axis manipulator 6 returns to its initial position.

[0086] 5. The first moving mechanism 8 drives the sensor system 9 and the first visual system 10 to move from the initial position along the negative direction of the X-axis. When they reach the first designated position, they stop moving. The moving module 23 drives the sensors in the sensor system 9 to move and measure. During the process, the contact sensor needs to control the probe extension and retraction measurement data, and the laser sensor needs to be driven by the moving module 23 to scan the measurement data. After completion, the moving module 23 drives the sensor system 9 to restore all to their original state. The first moving mechanism 8 then drives the sensor system 9 and the first visual system 10 to move to the Nth designated position, stops moving and performs the subsequent N measurements. The measurement data collected by the sensor system 9 and the first visual system 10 is sent to the industrial computer 18. This step mainly involves the sensor system 9 detecting the dimensional data. After all dimensional measurements are completed, the first detection moving mechanism 8 moves the sensor system 9 and the first visual system 10 to the tail end of the silicon rod 2 along the negative direction of the X-axis.

[0087] 6. The first detection moving mechanism 8 continuously moves the sensor system 9 and the first visual system 10 along the positive direction of the X-axis to their initial positions. During this movement, the industrial computer 18 controls the first line array camera C1 to continuously capture images of the first side surface and the second line array camera C2 to continuously capture images of the second side surface. The captured images are sent to the industrial computer 18, which performs defect analysis and processing on the images.

[0088] 7. After the first vision system 10 moves to the initial position, the four-axis robot 6 grabs the silicon rod 2 and places it on the second roller line 3 after rotating the silicon rod 2 135° clockwise. The silicon rod 2 is transported to the designated position by the roller line 3 11 and stops. After the second lifting device 12 and the second centering and correcting device 13 are activated respectively, the second moving mechanism 14 drives the second vision system 15 to scan from the initial position toward the negative direction of the X-axis. During this process, the industrial computer 18 controls the third line array camera 24 (C3) to continuously capture images of the third side and the fourth line array camera 25 (C4) to continuously capture images of the fourth side. The captured images are sent to the industrial computer 18, which performs defect analysis and processing on the images. At this point, the defect images of the four sides of the silicon rod 2 are all captured.

[0089] 8. The second inspection moving mechanism 14 returns to its original position, and the silicon rods 2 flow from the third roller line 11 to the fourth roller line 16 to the designated position and are unloaded. The entire inspection work is completed.

[0090] After the industrial computer 18 obtains the measurement data, the industrial computer 18 or a human can perform size calculation and defect analysis:

[0091] 1. Calculation of silicon rod length, such as Figure 12 As shown:

[0092] The first laser sensor 20 (L1) measures the distance to the end face of the silicon rod 2 to obtain distance data LL1;

[0093] The second laser sensor 21 (L2) measures the distance to the end face of the silicon rod 2 to obtain distance data LL2;

[0094] Since the distance between the first laser sensor 20 (L1) and the second laser sensor 21 (L2) is known to be LL3, the length LL of the silicon rod 2 is calculated as follows:

[0095] LL=LL3-LL1-LL2.

[0096] The length LL of the silicon rod 2 can be detected multiple times, and the detection and calculation methods are the same.

[0097] 2. Diagonal distance calculation, such as Figure 13 As shown:

[0098] The diagonal distance LC1 of the silicon rod 2 is obtained from data collected by the contact sensors S1 and S2 , and the diagonal distance LC2 of the silicon rod 2 is obtained from data collected by the contact sensors S3 and S4 .

[0099] Taking the calculation of diagonal distance LC1 as an example, the original distance between the contact tips of touch sensors S1 and S2 is LC1A1, and the sensor readings are both 0. During measurement, the contact tips of the touch sensors are extended, touching the surfaces of silicon rod 2 at the upper and lower arc corners and then stop. At this time, the readings of touch sensor S1 are LC1A2, and the readings of touch sensor S2 are LCA3. The obtained distance LC1 of silicon rod 2 across the edges is:

[0100] LC1=LC1A1-LC1A2-LC1A3.

[0101] The data collected by the contact sensors S3 and S4 can be used to obtain the value of the diagonal distance LC2 using the same method.

[0102] The diagonal distance of the silicon rod 2 can be detected repeatedly multiple times, and the detection and calculation methods are the same.

[0103] 3. Calculate the distance between opposite sides, such as Figure 14 As shown:

[0104] The distance LD1 across the silicon rod 2 is obtained from data collected by contact sensors S5, S6 and the contact sensors S7, S8 on the opposite sides. The distance LD2 across the silicon rod 2 is obtained from data collected by contact sensors S9, S10 and the contact sensors S11, S12 on the opposite sides.

[0105] Taking the measurement of the distance across flats LD1 as an example, the original distance between the contact tips of contact sensors S5 and S7 is LD1A1, and the contact sensor readings are both 0. During measurement, the contact tips of contact sensors S5 and S7 are extended, contact the surface of silicon rod 2, and remain stationary. At this time, the reading of contact sensor S5 is LD1A2, and the reading of contact sensor S7 is LD1A3. The distance across flats LD1A of silicon rod 2 is obtained as:

[0106] LD1A=LD1A1-LD1A2-LD1A3;

[0107] Similarly, the distance to the opposite side LD1B calculated from the data collected by the contact sensors S6 and S8 is:

[0108] LD1B=LD1B1-LD1B2-LD1B3;

[0109] Taking the average of LD1A and LD1B, we can get the distance LD1 across the edges of the silicon rod 2:

[0110] LD1=(LD1A+LD1B) / 2;

[0111] In the same way, the value of the distance LD2 of the opposite sides of the silicon rod 2 can be obtained, and the distances of the two opposite sides of the silicon rod 2 are completely obtained.

[0112] The distance between opposite sides of the silicon rod 2 can be detected repeatedly multiple times, and the detection and calculation methods are the same.

[0113] 4. Calculate the angle (perpendicularity) between the sides, such as Figure 14 As shown:

[0114] To calculate the perpendicularity of the four sides, take the two sides of the bottom as an example. Touch sensors S7 and S8 contact the surface of the silicon rod 2 and remain stationary. Touch sensors S7 and S8 are used as known points. Based on the coordinate values of touch sensors S7 and S8, the linear equation of the line on which the two points lie can be obtained, completing the calculation of the linear equation for the lower right side of the silicon rod 2.

[0115] The contact sensor S11 and the contact sensor S12 are used as known points to complete the calculation of the straight line equation of the lower left side of the silicon rod 2.

[0116] After the straight line equations of the two sides are obtained, their respective angles can be calculated according to the slopes of the straight line equations, and then the included angle can be calculated jointly. The included angle of the two sides can reflect the verticality of the two surfaces of the silicon rod 2.

[0117] Similarly, the angles between the other two sides of the silicon rod 2 are detected and calculated in the same manner.

[0118] The angle (perpendicularity) between the sides of the silicon rod 2 can be tested repeatedly, and the testing and calculation methods are the same.

[0119] 5. Calculation of arc length and arc length projection, such as Figure 15 As shown:

[0120] Laser sensors L3, L4, L5, and L6 are point laser distance sensors capable of measuring the distance LS between the current laser sensor and the measured point on the upper side of the silicon ingot 2. Each of the four laser sensors faces the four corners of the silicon ingot 2. During measurement, each laser sensor is driven by its own moving module 23, scanning the entire corner and including the straight edges on either side.

[0121] The speed of the mobile module 23 is uniform, and the data acquisition frequency of the laser sensor is also fixed. During the scanning process, n distance values LS1, LS2, ..., LSn will be continuously acquired. The following will take an arbitrary arc angle as an example:

[0122] 1) Establish a coordinate system

[0123] The four laser sensors are coplanar, assuming this plane is P1. With the initial position of the laser sensor as the origin O, and the laser sensor's movement direction and its perpendicular direction as the x and y axes, establish a coordinate system xoy. The xoy plane should be parallel to P1.

[0124] 2) Get the arc length

[0125] along Figure 15 In the x-direction, the scanned contour is divided into n points, with point a1 as the starting point and a2 as the end point. The coordinates of each point are known (L*i / n, LSi), where i represents the i-th point. Therefore, points a1, a2, a3, and a4 are all known points in the xoy coordinate system, and the equations of the lines a1a3 and a2a4 can be derived as follows:

[0126] Line a1a3: y = k1x + b1……(1)

[0127] Line a2a4: y=k2x+b2……(2)

[0128] a3 and a4 are known points in the xoy coordinate system. The distance between a3 and a4 can be obtained, that is, the arc length.

[0129] 3) Get arc length projection

[0130] Combining the above two straight line equations, we can further calculate the coordinates of the intersection point a5 (virtual point) of the straight lines a1a3 and a2a4 (xa5, ya5). Therefore, the arc length projection of this arc angle is calculated as follows:

[0131] LR1=((xa3-xa5) 2 +(ya3-ya5) 2 ) 1 / 2

[0132] LR5=((xa4-xa5) 2 +(ya4-ya5) 2 ) 1 / 2

[0133] The arc length projections of other arc angles (LR2, LR6), (LR3, LR7), (LR4, LR8) are calculated in the same way as above.

[0134] 6. Analysis of silicon rod appearance defects

[0135] The surface images of the silicon rod 2 captured by the first line array camera C1, the second line array camera C2, the third line array camera 24 (C3) and the fourth line array camera 25 (C4) of the present invention are transmitted to the industrial computer 18, which performs defect analysis.

[0136] The measurement data collected by the sensor system 9, the first vision system 10, and the second vision system 15 of the present invention can be used to obtain various dimensional parameters of the silicon ingot 2 using mathematical principles. The present invention only provides some feasible parameter calculations; however, the specific parameters to be calculated and the calculation formula to be used can be adjusted according to actual conditions. The present invention is capable of collecting and detecting a variety of data on square silicon ingots 2.

[0137] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that modifications to the technical solutions described in the above embodiments, or equivalent replacement of some or all of the technical features therein, do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An automatic detection system for finished single crystal silicon rods, comprising: The industrial computer (18) is characterized by: The automatic detection system for finished single crystal silicon rods further includes: a conveying mechanism, a four-axis manipulator (6), a V-shaped support platform (7), a sliding mounting stand (26), a sensor system (9), a first visual system (10), and a second visual system (15); The four-axis manipulator (6) is arranged on a conveying mechanism; the four-axis manipulator (6) has a first clamping jaw (19) and a second clamping jaw (22); a first laser sensor (20) is arranged on the first clamping jaw (19), and a second laser sensor (21) is arranged on the second clamping jaw (22); the first laser sensor (20) and the second laser sensor (21) are positioned correspondingly; the first laser sensor (20) and the second laser sensor (21) are used to detect the length of the silicon rod (2); The V-shaped support platform (7) is arranged on one side of the conveying mechanism; the V-shaped support platform (7) corresponds to the position of the four-axis manipulator (6); The sliding mounting frame (26) is mounted on the V-shaped support platform (7) via a first moving mechanism (8); the sliding mounting frame (26) has a diamond-shaped through hole, and the inner angle of the diamond-shaped through hole is 90°; the sensor system (9) and the first visual system (10) are mounted on the sliding mounting frame (26); The first visual system (10) comprises: a first line array camera and a second line array camera; the first line array camera and the second line array camera are respectively arranged above the upper side of the diamond through hole; the first line array camera is used to photograph the first side of the silicon rod (2) and detect surface defects on the first side of the silicon rod (2); the second line array camera is used to photograph the second side of the silicon rod (2) and detect surface defects on the second side of the silicon rod (2); The sensor system (9) is mounted on a sliding mounting stand (26), and the sensor system (9) includes a plurality of contact sensors, and the plurality of contact sensors are arranged around the diamond through hole; there are 12 contact sensors, of which 4 contact sensors are arranged outside the four corners of the diamond through hole to detect the diagonal distances of silicon rods (2) of different sizes; and 8 contact sensors are arranged in pairs outside each side of the diamond through hole to detect the distances between opposite sides of silicon rods (2) of different sizes; The second visual system (15) is installed on the conveying mechanism via a second moving mechanism (14), and the second moving mechanism (14) is located behind the four-axis manipulator (6); The second visual system (15) comprises: a third line array camera (24) and a fourth line array camera (25); the third line array camera (24) is installed on the front side of the conveying mechanism, and the fourth line array camera (25) is installed directly above the conveying mechanism; the third line array camera (24) is used to photograph the third side of the silicon rod (2) and detect surface defects on the third side of the silicon rod (2); the fourth line array camera (25) is used to photograph the fourth side of the silicon rod (2) and detect surface defects on the fourth side of the silicon rod (2); The first laser sensor (20), the second laser sensor (21), the first line array camera, the second line array camera, the third line array camera (24), the fourth line array camera (25), and the plurality of contact sensors are respectively connected to the industrial control computer (18) by signal.

2. The automatic detection system for finished single crystal silicon rods according to claim 1, characterized in that: The sensor system (9) further comprises: four laser sensors; Four laser sensors are arranged correspondingly on the outside of the four corners of the diamond-shaped through hole; The four laser sensors are respectively connected to the industrial control computer (18) by signal.

3. The automatic detection system for finished single crystal silicon rods according to claim 2, characterized in that: The contact sensor and the laser sensor are respectively installed through mobile modules.

4. The automatic detection system for finished single crystal silicon rods according to claim 1 or 3, characterized in that: The conveying mechanism comprises a first roller line (1), a second roller line (3), a third roller line (11) and a fourth roller line (16) which are arranged in sequence; The V-shaped support platform (7) is arranged on one side of the second roller track (3); The four-axis manipulator (6) is arranged on the second roller track (3); The second moving mechanism (14) is arranged on the third roller track (11).

5. The automatic detection system for finished single crystal silicon rods according to claim 4, characterized in that: A first lifting device (4) and a first centering and correcting device (5) are provided on the second roller track (3); A second lifting device (12) and a second centering and correcting device (13) are provided on the third roller track (11).

6. The automatic detection system for finished single crystal silicon rods according to claim 5, characterized in that: The first jacking device (4) and the second jacking device (12) respectively comprise: a jacking device cylinder (31), a jacking device slide plate (32), a lifting plate (33), a wedge block (34) and a guide wheel; The lifting device cylinder (31) is horizontally mounted on the conveying mechanism, and the telescopic rod of the lifting device cylinder (31) is connected to the lifting device slide plate (32); A wedge block (34) is provided on the jacking device slide plate (32), and a guide wheel is provided on the wedge block (34); The guide wheel is mounted on a lifting plate (33), and a plurality of lifting blocks (30) are provided on the lifting plate (33).

7. The automatic detection system for finished single crystal silicon rods according to claim 5, characterized in that: The first centering and correcting device (5) and the second centering and correcting device (13) respectively comprise: a clamping cylinder (27) and a plurality of clamping claws (28) arranged on both sides of the conveying mechanism; The telescopic rod of the clamping cylinder (27) is connected to the rotating rod (29), and the rotating rod (29) is hinged on the conveying mechanism, and a circular arc guide groove is left on the conveying mechanism, and the guide block of the rotating rod (29) extends into the circular arc guide groove; Both ends of the rotating rod (29) are respectively hinged to a correction device slide, and a plurality of clamping claws (28) are mounted on the correction device slide.

8. The automatic detection system for finished single crystal silicon rods according to claim 4, characterized in that: The first moving mechanism (8) and the second moving mechanism (14) respectively comprise: a moving mechanism motor, a moving mechanism lead screw, and a moving mechanism nut; The output end of the moving mechanism motor is connected to the moving mechanism lead screw in a transmission manner; The moving mechanism screw is matched with a moving mechanism nut; A first visual system (10) or a second visual system (15) is mounted on the moving mechanism nut.

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