Clamping claw, net stretching device and net stretching method

Abstract

The application provides a clamping jaw, a net stretching device and a net stretching method. The guide unit of the clamping jaw comprises an air floating guide rail with at least two connecting shafts. The clamping unit is subjected to two or more guide forces during the stretching process, so that the mask plate is prevented from being damaged or deviated from the target welding area due to torsion, and the net stretching precision is affected. Moreover, the feedback unit monitors the stretching displacement of the mask plate in real time and feeds back to the control unit in the net stretching device, and the control unit adjusts the pulling force provided by the driving unit accordingly, so that the net stretching precision is improved, and the mask plate is prevented from being damaged by pulling. In addition, the driving unit of the clamping jaw is additionally provided with a stretching protection device, which can prevent the mask plate from being damaged by pulling. When the pulling force acting on the mask plate is greater than the elastic force setting value of the elastic member, the elastic member increases the elastic deformation to extend out of the first frame, drives the cover plate to separate from the first frame, so as to balance the pulling force, reduce the stress of the mask plate, and further protect the mask plate from being damaged by pulling, thereby improving the yield and economic benefits.

Description

Technical Field

[0001] The present invention relates to the technical field of integrated circuit manufacturing, and in particular to a clamping claw, a net stretching device and a net stretching method. Background Art

[0002] The stretching device is a key piece of equipment in OLED (Organic Light-Emitting Diode) organic material vapor deposition production lines. It secures the high-precision metal mask to the frame, ensuring that the mask maintains the correct image position and prevents deformation or distortion during subsequent processing. The existing process uses a clamping system to grip and stretch the metal mask, positioning it in the target welding area before welding it in place.

[0003] However, when the jaws grip and stretch the metal mask, the motor force can easily exceed the metal mask's load capacity, causing the metal mask to break or otherwise damage. Furthermore, during the existing jaw stretching process, poor guidance and fixation can result in uneven force on the metal mask, causing it to twist and deviate from the target welding area, impacting the mesh tensioning accuracy. Furthermore, the existing mesh tensioning devices lack high tensioning accuracy, so damage or misalignment of the metal mask further increases the number of mesh tensioning rounds, resulting in reduced productivity and economic benefits.

[0004] Therefore, a new clamping claw, a net stretching device and a method are needed to improve the net stretching accuracy, avoid the damage of the metal mask, reduce economic losses and improve productivity. Summary of the Invention

[0005] The object of the present invention is to provide a clamping claw, a net stretching device and a net stretching method to solve at least one of the problems of low net stretching accuracy and how to avoid the damage of the mask plate.

[0006] In order to solve the above technical problems, the present invention provides a clamping claw for clamping and stretching a mask, comprising: a clamping unit, a guide unit, a driving unit and a feedback unit;

[0007] The clamping unit is used to clamp the mask;

[0008] The guide unit includes an air-floating guide rail having at least two connecting shafts; the at least two connecting shafts are respectively connected to the clamping unit to define the movement direction of the clamping unit;

[0009] The driving unit includes a first motor and a stretching protection device; the first motor is used to drive the clamping unit to move along a defined movement direction to stretch the mask; the stretching protection device includes a first frame, an elastic member and a cover plate; the outer wall of the first frame is connected to the first motor; the elastic member is arranged in the first frame, and one end thereof is fixed to the inner wall of the first frame, and the other end is connected to the cover plate; the cover plate abuts against and covers an opening of the first frame, and when the tension applied to the mask is greater than the elastic force set value of the elastic member, the elastic member extends out of the first frame and drives the cover plate to separate from the first frame to balance the tension;

[0010] The feedback unit includes a grating ruler for monitoring the stretching displacement of the mask in real time.

[0011] Optionally, in the clamping jaw, the elastic member is arranged along the movement direction of the clamping unit, so that when the first motor provides a pulling force, the elastic deformation direction of the elastic member is the same as the pulling force direction.

[0012] Optionally, in the clamping jaws, a setting value of the elastic force of the elastic member is smaller than an allowable value of the tensile force that causes damage to the mask plate.

[0013] Optionally, in the clamping jaw, the clamping unit includes a second frame, a first guide rail, a second guide rail, a third guide rail, a fourth guide rail, a first connecting member, and a second connecting member;

[0014] The first guide rail and the second guide rail extend in parallel and are respectively fixed to two opposite side surfaces in the second frame; the third guide rail extends in a direction perpendicular to the first guide rail and is fixed to a side surface in the second frame that is in contact with the two side surfaces; the fourth guide rail extends in a direction that is inclined at an angle to the extension direction of the second guide rail and is fixed to the first connecting member;

[0015] Wherein, a slider is provided on each of the first guide rail, the second guide rail, the third guide rail and the fourth guide rail, and the sliders on the first guide rail and the second guide rail are connected to the first connecting member so that the first connecting member moves along the extension direction of the first guide rail and the second guide rail; the sliders on the third guide rail and the fourth guide rail are connected to the second connecting member so that when the first connecting member drives the fourth guide rail to move, it also drives the second connecting member to move along the extension direction of the third guide rail.

[0016] Optionally, in the clamping jaw, the clamping unit further comprises an upper clamping head, a lower clamping head and a second motor;

[0017] The lower clamp is fixedly arranged on the outer side wall of the side where the third guide rail is located, and the side where the third guide rail is located is provided with a first hole, and the second connecting member extends through the first hole and is connected to the upper clamp;

[0018] The second motor is arranged outside the second frame and is connected to the first connecting member through a second hole on the second frame, and is used to drive the first connecting member to move, and drive the second connection and the upper clamp to move, so that the upper clamp and the lower clamp are moved closer to or away from each other to clamp or place the mask.

[0019] Optionally, in the clamping jaw, the clamping jaw further includes a base, and the clamping unit, the guiding unit, the driving unit and the feedback unit are all arranged on the base; and the feedback unit is arranged close to the lower clamping head.

[0020] Optionally, in the clamping jaw, the clamping jaw further includes a tension sensor for detecting the tension value applied to the mask plate; the tension sensor is connected to the air-floating guide rail and the cover plate respectively.

[0021] Optionally, in the clamp, the connecting shaft includes a sliding sleeve and an axis core; the axis core is fixedly connected to the clamping unit and the tension sensor, and the sliding sleeve is sleeved on the axis core and can slide along the axis core.

[0022] Optionally, in the clamping jaw, the air-floating guide rail has two connecting shafts, and the two connecting shafts are arranged in parallel along the movement direction of the clamping unit.

[0023] Optionally, in the clamping jaw, the elastic member includes a spring.

[0024] Based on the same inventive concept, the present invention also provides a net stretching device, comprising a welding unit, a detection unit, a control unit and the clamping claw;

[0025] The welding unit includes a laser welding head for welding the mask plate and the target frame;

[0026] The detection unit is used to detect whether the clamping claw stretches the mask plate to the target welding area;

[0027] The control unit is used to control the operation of the welding unit, the detection unit and the clamping jaws;

[0028] The feedback unit in the clamp monitors the tensile displacement of the mask in real time and feeds back the monitoring data to the control unit, and the control unit adjusts the tension provided by the first motor according to the monitoring data.

[0029] Based on the same inventive concept, the present invention also provides a netting method, comprising:

[0030] A plurality of clamping claws clamp the mask plate to a position to be welded in the target frame;

[0031] The plurality of clamps stretch the mask plate, and at the same time, the feedback unit monitors the stretching displacement of the mask plate in real time and feeds back the monitoring data to the control unit;

[0032] The control unit adjusts the tension provided by the first motor according to the monitoring data until the mask is located in the target welding area;

[0033] The welding unit welds the mask plate and the target frame.

[0034] In summary, the present invention provides a clamp, a net stretching device, and a net stretching method. The clamp comprises: a clamping unit, a guide unit, a drive unit, and a feedback unit. The clamping unit is used to clamp the mask. The guide unit comprises an air-floating guide rail having at least two connecting shafts. The at least two connecting shafts are respectively connected to the clamping unit, which increases the force points of the clamping unit, so that the clamping unit is subjected to two or more guiding forces during the stretching process, thereby avoiding damage to the mask or deviation from the target welding area caused by torsion or uneven force, thereby affecting the accuracy of the net stretching. In addition, the added feedback unit monitors the stretching displacement of the mask in real time and can feed back to the control unit in the net stretching device. The control unit adjusts the tension provided by the drive unit according to the monitoring data, which can not only improve the accuracy of the net stretching, but also avoid damage to the mask due to excessive tension, thereby improving productivity and reducing losses.

[0035] Furthermore, the clamping jaws' drive unit incorporates a stretch protection device to prevent damage to the mask. When the tension applied to the mask exceeds the set elastic force of the elastic member, the elastic member deforms further, extending out of the first frame and driving the cover plate apart from the first frame. This balances the tension, reduces the stress on the mask, and protects the mask from damage, improving productivity and economic efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 1 is a schematic structural diagram of a clamping jaw according to an embodiment of the present invention;

[0037] Figure 2 Schematic diagram of the force acting on the stretching protection device in an embodiment of the present invention;

[0038] Figure 3 Schematic diagram of the force acting on the stretching protection device in an embodiment of the present invention;

[0039] Figure 4 2 is a schematic structural diagram of a net stretching device in an embodiment of the present invention;

[0040] Figure 5 is a schematic diagram of a clamping claw holding a mask in an embodiment of the present invention;

[0041] Figure 6 is a schematic diagram of a stretching monitoring mode in an embodiment of the present invention;

[0042] Figure 7 is a schematic diagram of a stretching monitoring mode in an embodiment of the present invention;

[0043] Wherein, the accompanying drawings are marked as follows:

[0044] 10-clamping unit; 101-second frame; 102-first guide rail; 103-second guide rail; 104-third guide rail; 105-fourth guide rail; 106-first connecting member; 107-second connecting member; 108a-upper clamp; 108b-lower clamp; 109-second motor;

[0045] 20-guide unit; 201-connecting shaft; 202-bracket; 203-anti-twist piece;

[0046] 30-driving unit; 301-first motor; 302-stretching protection device; 3021-first frame; 3022-elastic member; 3023-cover plate;

[0047] 40-feedback unit; 50-tension sensor; 60-base; 70-welding unit; 80-detection unit; 90-gripper; 100-control unit; P-gantry; M-mask; m-slider. DETAILED DESCRIPTION

[0048] In order to make the objects, advantages and features of the present invention clearer, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis required to be shown in each drawing is different, and sometimes different scales are used. It should also be understood that, unless otherwise specified or indicated, the terms "first", "second", "third" and the like in the specification are only used to distinguish between the various components, elements, steps, etc. in the specification, and are not used to represent the logical relationship or sequential relationship between the various components, elements, steps, etc.

[0049] In order to solve the above technical problems, this embodiment provides a clamping claw, such as Figure 1As shown, the clamp is used to clamp and stretch the mask, and includes: a clamping unit 10 , a guide unit 20 , a drive unit 30 , a feedback unit 40 and a tension sensor 50 .

[0050] The clamping unit 10 is used to clamp the mask. The clamping unit 10 includes a second frame 101, a first guide rail 102, a second guide rail 103, a third guide rail 104, a fourth guide rail 105, a first connector 106, a second connector 107, an upper clamp 108a, a lower clamp 108b, and a second motor 109. The second frame 101 is rectangular in shape, and the first guide rail 102, the second guide rail 103, the third guide rail 104, the fourth guide rail 105, the first connector 106, and the second connector 107 are all disposed within the second frame 101. The upper clamp 108a, the lower clamp 108b, and the second motor 109 are all disposed outside the second frame 101.

[0051] Furthermore, the extension directions of the first guide rail 102 and the second guide rail 103 are parallel, that is, they are both arranged along the movement direction X of the clamping unit 10, and are respectively fixedly connected to the two opposite side surfaces in the second frame 101. The third guide rail 104 is close to the first guide rail 102, and extends in a direction perpendicular to the first guide rail 102 (that is, it is arranged perpendicular to the movement direction X), and is fixedly connected to the other side surface in the second frame 101, and the other side surface is respectively connected to the side surface where the first guide rail 102 is located and the side surface where the second guide rail 103 is located. The fourth guide rail 105 is arranged close to the second guide rail 105, and its extension direction is at an inclined angle to the extension direction of the second guide rail 103, and is fixed to the first connecting member 106. The inclined angle is an acute angle.

[0052] The lower chuck 108b is fixedly mounted on the outer sidewall of the side of the third guide rail 104, and a first hole is provided on the side of the third guide rail 104. The second connecting member 107 extends through the first hole and is connected to the upper chuck 108a. The second motor 109 is disposed outside the second frame 101 and is connected to the first connecting member 106 through a second hole in the second frame 101. Furthermore, a slider N is provided on each of the first guide rail 102, the second guide rail 103, the third guide rail 104, and the fourth guide rail 105. The sliders N on the first guide rail 102 and the second guide rail 103 are connected to the first connecting member 106, and the sliders N on the third guide rail 104 and the fourth guide rail 105 are connected to the second connecting member 107.

[0053] When the second motor 109 provides an acting force, the first connecting piece 106 is driven to move along the extension direction of the first guide rail 102 and the second guide rail 103. When the first connecting piece 106 moves, the fourth guide rail 105 moves synchronously, and then the slider N on the fourth guide rail 105 moves, and drives the second connecting piece 107 to move along the extension direction of the third guide rail 104, that is, perpendicular to the movement direction of the clamping unit 10. Therefore, the second connecting piece 107 drives the upper chuck 108a to move, so that the upper chuck 108a and the lower chuck 108b move close to or away from each other, that is, the upper chuck 108a and the lower chuck 108b can realize the action of opening and closing, thereby realizing the function of clamping or placing the mask plate.

[0054] It can be seen that the clamping unit 10 provided by the embodiment realizes the clamping of the mask plate by adopting the multi-stage linkage setting mode. Among them, the parallel double guide rail setting has large bearing stiffness, can realize the smallest guide gap and deformation under the premise of high clamping force, improves the clamping precision, so that the mask plate between the upper chuck 108a and the lower chuck 108b in the clamping process produces a clamping horizontal slip of less than 10 microns, and the clamping stability is good.

[0055] Please continue to refer to Figure 1 , the guide unit 20 includes an air floating guide rail with at least two connecting shafts 201. The at least two connecting shafts 201 are respectively connected with the clamping unit 10 to limit the movement direction of the clamping unit 10. Further, the number of the connecting shafts 201 includes but is not limited to two, which can be three or four, etc. The at least two connecting shafts 201 are respectively connected with the clamping unit 10, which increases the stress points of the clamping unit 10, so that the clamping unit 10 is subjected to two or more guide forces during the stretching process, avoiding the mask plate damage or deviation from the target welding area caused by torsion or uneven stress, affecting the tensioning precision. Among them, Figure 1 as shown is an air floating guide rail with two connecting shafts 201. Each connecting shaft 201 includes a sliding sleeve and a shaft core. The shaft core is fixedly connected with the second frame 106 and the tension sensor 50, and the sliding sleeve is sleeved on the shaft core and can slide along the shaft core. Further, the air floating guide rail further includes a bracket 202 and an anti-twist member 203. The bracket 202 is fixedly connected with the two connecting shafts 201 to ensure that the connecting shafts 201 are arranged in parallel along the movement direction X of the clamping unit 10, and the bracket 202 is connected with all the shaft cores and the tension sensor. The anti-twist member is used to prevent the connecting shaft 201 from twisting, so as to further avoid the mask plate damage or deviation from the target welding area caused by torsion or uneven stress, affecting the tensioning precision.

[0056] The driving unit 30 comprises a first motor 301 and a tension protection device 302. The first motor 301 is used to drive the clamping unit 10 to move along a defined direction X to stretch the mask plate. The tension protection device 302 comprises a first frame 3021, an elastic member 3022 and a cover plate 3023. Further, the first frame 3021 is in a U shape or a cylinder shape, and has an opening facing the tension sensor. The outer wall of the first frame 3021 is connected with the first motor 301, the elastic member 3022 is arranged in the first frame 3021, and one end thereof is fixed to the inner wall of the first frame 3021, and the other end is connected with the cover plate 3023. The elastic member 3022 is arranged along the movement direction X of the clamping unit 10, so that when the first motor 301 provides a tension, the elastic member 3022 deforms elastically in the same direction as the tension. Optionally, the elastic member 3022 comprises a spring. The cover plate 3023 abuts against and covers the opening of the first frame 3021, and the other side surface of the cover plate 3023 is connected with the tension sensor 50.

[0057] Please refer to Figure 2 In a normal mask plate stretching process, i.e. the elastic force of the elastic member 3022 is within the elastic force setting value thereof, the force F3 received by the cover plate 3023 is F1-F2; wherein F1 is the tension provided by the first motor 301, and F2 is the elastic force generated by the deformation of the elastic member 3022. Therefore, without considering the friction, the force F3 received by the cover plate 3023 is equal to the tension received by the mask plate. The cover plate 3023 keeps abutting against the first frame 3021. Further, the elastic force setting value of the elastic member 3022 is less than the allowable tension value of the mask plate.

[0058] When the tension provided by the first motor 301 is abnormal, i.e. the force F3 received by the cover plate 3023 is greater than the elastic force setting value of the elastic member 3022, there is a possibility that the mask plate is pulled to be damaged, as shown in Figure 3 The elastic member 3022 increases the elastic deformation, extends out of the first frame 3021, so that the elastic force F2' is increased, and the cover plate 3023 is driven to separate from the first frame 3021, thereby balancing the tension F1' as much as possible, reducing the stress of the mask plate, and further protecting the mask plate from being damaged by the tension, improving the yield and economic benefits.

[0059] Please continue to refer to Figure 1The feedback unit 40 includes a grating scale for real-time monitoring of the mask's stretched displacement and providing feedback to the control unit. The control unit adjusts the tension provided by the drive unit 30 based on the monitoring data, which not only improves the stretching accuracy but also prevents damage to the mask due to excessive tension, thereby increasing productivity and reducing losses.

[0060] The tension sensor 50 is used to detect the tension value applied to the mask plate, so as to detect whether the forces applied to each force point of the mask plate are balanced when the mask plate is stretched.

[0061] Furthermore, the clamping jaws further include a base 60, on which the clamping unit 10, the guide unit 20, the drive unit 30, the feedback unit 40, and the tension sensor 50 are all disposed. The feedback unit 40 is disposed near the lower clamping head 108b to ensure accurate measurement of the real-time displacement of the mask.

[0062] Based on the same inventive concept, this embodiment also provides a net stretching device, please refer to Figure 1 and 4 The net stretching device includes a welding unit 70, a detection unit 80, a clamping jaw 90 and a control unit 100. The welding unit 70 and the detection unit 80 are arranged on a gantry P and can slide relative to the gantry P. The welding unit 70 includes a laser welding head for welding the mask plate M to the target frame. The detection unit 80 is used to detect whether the clamping jaw 90 stretches the mask plate M to the target welding area, and detect whether the welding mark on the mask plate M is aligned with the welding mark on the target frame. The control unit 100 is used to control the operation of the welding unit 70, the detection unit 80 and the clamping jaw 90. The feedback unit 40 in the clamping jaw 90 monitors the tensile displacement of the mask plate M in real time, and feeds back the monitoring data to the control unit 100. The control unit 100 adjusts the tension provided by the first motor 301 according to the monitoring data.

[0063] Based on the same inventive concept, this embodiment also provides a method for stretching a net, please refer to Figure 1 and 4 -5, including:

[0064] Step 1: A plurality of clamping jaws 90 clamp the mask M to the position to be welded in the target frame.

[0065] in, Figure 5 The figure shows that four clamping jaws are used. This embodiment does not limit the number of the clamping jaws, and the number can be 4, 6, or 8, etc.

[0066] Step 2: The plurality of clamping jaws 90 stretch the mask M. Meanwhile, the feedback unit 40 monitors the stretching displacement of the mask M in real time and feeds back the monitoring data to the control unit 100 .

[0067] Step 3: The control unit 100 adjusts the tension provided by the first motor 301 according to the monitoring data until the mask M is located in the target welding area.

[0068] Furthermore, during the stretching process, the net stretching device forms a Figure 6 and Figure 7 The two monitoring modes shown are used to avoid damage to the mask M. The four tension sensors 50 monitor the force conditions at the four clamping points of the mask M in real time to determine whether force balance is achieved. If force imbalance occurs at any clamping point, a signal is sent to the control unit 100. The control unit controls the first motor 301 of the clamping jaw to be adjusted based on the image information obtained by the detection unit 80 and the force information provided by the four tension sensors 50 to achieve force balance on the mask M and avoid damage to the mask M due to uneven force at one or more locations.

[0069] In addition, the four feedback units 40 accurately and in real time monitor the displacement of the mask M and feed back the collected data to the control unit 100. The control unit accurately adjusts the corresponding first motor 301 based on the image information obtained by the detection unit 80 and the displacement information provided by the four feedback units 40 to stretch the mask M to the target welding area, align with the corresponding welding mark, and improve the mesh stretching accuracy.

[0070] Step 5: The welding unit 70 welds the mask M and the target frame.

[0071] In summary, the embodiment provides a clamping jaw, a net stretching device and a net stretching method. The clamping jaw comprises a clamping unit 10, a guide unit 20, a driving unit 30 and a feedback unit 40. The clamping unit 10 clamps the mask plate M in a multi-stage linkage manner, improving the clamping stability. The guide unit 20 comprises an air floating guide rail with at least two connecting shafts 201. The at least two connecting shafts 201 are connected with the clamping unit 10 respectively, increasing the stress points of the clamping unit 10, so that the clamping unit 10 is subjected to two or more guide forces during the stretching process, avoiding the damage or deviation of the mask plate M caused by the torsion or uneven stress, and affecting the net stretching precision. In addition, the feedback unit 40 is additionally provided to monitor the stretching displacement of the mask plate M in real time, which is fed back to the control unit 100 in the net stretching device. The control unit 100 adjusts the tension provided by the driving unit 30 according to the monitoring data, which can not only improve the net stretching precision, but also avoid the damage of the mask plate M caused by excessive tension, improve the yield and reduce the loss.

[0072] In addition, the driving unit 30 of the clamping jaw 90 is additionally provided with a stretching protection device 302, which can avoid the damage of the mask plate caused by tension. When the tension of the mask plate M is greater than the elastic force set value of the elastic member, the elastic member 3022 increases the elastic deformation, extends the first frame 3021, and drives the cover plate 3023 to separate from the first frame 3021, so as to balance the tension and reduce the stress of the mask plate M, thereby protecting the mask plate M from being damaged by tension, improving the yield and economic benefits.

[0073] In addition, it should be recognized that although the present application has been disclosed as above with the preferred embodiments, the above embodiments are not intended to limit the present application. For any skilled person in the art, many possible changes and modifications or equivalent embodiments of the above disclosed technical content can be made without departing from the scope of the present application. Therefore, any simple modification, equivalent change and modification of the above embodiments made according to the technical essence of the present application without departing from the content of the present application shall still fall within the scope of protection of the present application.

Claims

1. A clamping jaw for clamping and stretching a mask, characterized in that: include: Clamping unit, guide unit, drive unit and feedback unit; The clamping unit is used to clamp the mask; The guide unit includes an air-floating guide rail having at least two connecting shafts; the at least two connecting shafts are respectively connected to the clamping unit to define the movement direction of the clamping unit; The driving unit includes a first motor and a stretching protection device; the first motor is used to drive the clamping unit to move along a defined movement direction to stretch the mask; the stretching protection device includes a first frame, an elastic member and a cover plate; the outer wall of the first frame is connected to the first motor; the elastic member is arranged in the first frame, and one end thereof is fixed to the inner wall of the first frame, and the other end is connected to the cover plate; the cover plate abuts against and covers an opening of the first frame, and when the tension applied to the mask is greater than the elastic force set value of the elastic member, the elastic member extends out of the first frame and drives the cover plate to separate from the first frame to balance the tension; The feedback unit includes a grating ruler for monitoring the stretching displacement of the mask in real time; as well as, The clamping unit includes a second frame, a first guide rail, a second guide rail, a third guide rail, a fourth guide rail, a first connecting member and a second connecting member; The first guide rail and the second guide rail extend in parallel and are respectively fixed to two opposite side surfaces in the second frame; the third guide rail extends in a direction perpendicular to the first guide rail and is fixed to a side surface in the second frame that is in contact with the two side surfaces; the fourth guide rail extends in a direction that is inclined at an angle to the extension direction of the second guide rail and is fixed to the first connecting member; Wherein, a slider is provided on each of the first guide rail, the second guide rail, the third guide rail and the fourth guide rail, and the sliders on the first guide rail and the second guide rail are connected to the first connecting member so that the first connecting member moves along the extension direction of the first guide rail and the second guide rail; the sliders on the third guide rail and the fourth guide rail are connected to the second connecting member so that when the first connecting member drives the fourth guide rail to move, it also drives the second connecting member to move along the extension direction of the third guide rail.

2. The clamping jaw according to claim 1, characterized in that The elastic member is arranged along the moving direction of the clamping unit, so that when the first motor provides a pulling force, the elastic deformation direction of the elastic member is the same as the pulling force direction.

3. The clamping jaw according to claim 1, characterized in that The elastic force setting value of the elastic member is smaller than the allowable pulling force value of the mask plate being damaged.

4. The clamping jaw according to claim 1, characterized in that The clamping unit further includes an upper clamping head, a lower clamping head and a second motor; The lower clamp is fixedly mounted on the outer side wall of the side where the third guide rail is located, and a first hole is provided on the side where the third guide rail is located, and the second connecting member extends through the first hole and is connected to the upper clamp; The second motor is arranged outside the second frame and is connected to the first connecting member through a second hole on the second frame, and is used to drive the first connecting member to move, and drive the second connection and the upper clamp to move, so that the upper clamp and the lower clamp are moved closer to or away from each other to clamp or place the mask.

5. The clamping jaw according to claim 4, characterized in that: The clamping jaw further includes a base, and the clamping unit, the guiding unit, the driving unit and the feedback unit are all arranged on the base; and the feedback unit is arranged close to the lower clamping head.

6. The clamping jaw according to claim 1, characterized in that The clamping jaws further include a tension sensor for detecting the tension value applied to the mask plate; the tension sensor is connected to the air-floating guide rail and the cover plate respectively.

7. The clamping jaw according to claim 6, characterized in that The connecting shaft includes a sliding sleeve and a shaft core; the shaft core is fixedly connected to the clamping unit and the tension sensor, and the sliding sleeve is sleeved on the shaft core and can slide along the shaft core.

8. The clamping jaw according to claim 1, characterized in that The air-floating guide rail has two connecting shafts, and the two connecting shafts are arranged in parallel along the moving direction of the clamping unit.

9. The clamping jaw according to claim 1, characterized in that: The elastic member includes a spring.

10. A net stretching device, characterized in that: comprising a welding unit, a detection unit, a control unit, and the clamping jaw according to any one of claims 1 to 9; The welding unit includes a laser welding head for welding the mask plate and the target frame; The detection unit is used to detect whether the clamping claw stretches the mask plate to the target welding area; The control unit is used to control the operation of the welding unit, the detection unit and the clamping jaws; The feedback unit in the clamp monitors the tensile displacement of the mask in real time and feeds back the monitoring data to the control unit, and the control unit adjusts the tension provided by the first motor according to the monitoring data.

11. A netting method, characterized in that: The net stretching device according to claim 10 comprises: A plurality of clamping claws clamp the mask plate to a position to be welded in the target frame; The plurality of clamps stretch the mask plate, and at the same time, the feedback unit monitors the stretching displacement of the mask plate in real time and feeds back the monitoring data to the control unit; The control unit adjusts the tension provided by the first motor according to the monitoring data until the mask is located in the target welding area; The welding unit welds the mask plate and the target frame.

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