A type of copy machine

Abstract

This invention discloses a photolithography machine, comprising an upper vacuum section and a lower vacuum section, which are hinged together. The upper vacuum section includes an upper plate, an upper plate frame, a handle, and a vacuum connector. The upper plate is a circular flat plate with a square hole in the center, and the upper plate frame is a circular frame with a circular hole in the center. One side of the frame has a circular groove coaxial with the circular hole, and the upper plate is embedded in and fixedly connected to the circular groove. The handle is fixedly connected to the top of the upper plate frame at a certain angle. The top surface of the upper plate frame has two through threaded holes, each threaded hole being threadedly connected to a vacuum connector. The lower vacuum section includes a base plate, a base plate sealing cover, a lower plate frame, a lower plate frame pressure plate, a vacuum connector, and a sealing gasket. One side of the top surface of the base plate is hinged to the upper plate frame via a hinge, thereby achieving the hinged connection between the upper and lower vacuum sections. This invention can achieve the linewidth accuracy of photolithography plates and meet process and production requirements.

Description

Technical Field

[0001] This invention relates to the field of semiconductor device chip manufacturing technology, and more specifically, to a copying machine. Background Technology

[0002] The flipping machine is an essential lithography equipment in silicon wafer production lines with wafers smaller than 6 inches. Its function is to flip the mother plate into multiple daughter plates, which are then used by multiple lithography machines to etch silicon wafers.

[0003] The existing copying machines on the production line can only copy 5-inch photomasks (used for 4-inch silicon wafer production), and these copying machines are all imported from abroad. There are no copying machines available for purchase domestically, and an imported machine costs around 1.9 million yuan. In order to reduce costs, it is necessary to redevelop copying machines to meet the requirements of domestic production. The technical requirements of the copying machine must meet the line width accuracy requirements of the photomasks (9.5-10um), and the two photomasks must be in close contact during copying, otherwise the requirements cannot be met. They must be in close contact, but there must be no cross-contact to avoid scratching the mother board and the daughter board. The working environment must be clean, and it must be easy to change boards, etc. Summary of the Invention

[0004] To overcome the shortcomings of the prior art, the present invention provides a photolithography machine that can achieve the line width accuracy of photolithography plates and meet process and production requirements.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0006] A flipping machine comprises an upper vacuum section and a lower vacuum section, which are hinged together. The upper vacuum section includes an upper plate, an upper plate frame, a handle, and a vacuum connector. The upper plate is a circular flat plate with a square hole in the center. A groove is provided around the square hole, and two through holes are provided in the groove. The upper plate frame is a circular frame with a round hole in the center, and a round groove coaxial with the round hole is provided on one side. The upper plate is embedded in the round groove and fixedly connected to it. The handle is fixedly connected to the top of the upper plate frame at a certain angle. The top surface of the upper plate frame has two through threaded holes, which correspond to and are connected to the through holes in the groove. Each threaded hole is threadedly connected to a vacuum connector. The lower vacuum section includes a bottom plate, a bottom plate sealing cover, a lower plate frame, a lower plate frame pressure plate, and a vacuum connector. A sealing gasket is provided. The top surface of the base plate is hinged to the upper plate frame via a hinge, thereby achieving a hinged connection between the upper and lower vacuum parts. The center of the base plate has a circular groove three, and the bottom of the circular groove three has a circular hole two. The base plate sealing cover is circular in shape and is fastened to the bottom surface of the base plate and fixedly connected to the base plate. The lower plate frame pressure plate consists of an upper square frame and a lower circular frame. The lower plate frame is sleeved on the outer periphery of the square frame of the lower plate frame pressure plate and fixedly connected to the circular frame, thereby achieving a fixed connection between the lower plate frame pressure plate and the lower plate frame. A sealing gasket is sandwiched between the upper surface of the lower plate frame pressure plate and the lower plate frame. The lower plate frame is fixedly connected in the circular groove three, and the circular frame of the lower plate frame pressure plate is recessed in the circular hole two. Each of the two sides of the base plate has a threaded hole two that communicates with the circular groove three. Each of the threaded holes two is fixedly connected to a vacuum connector two.

[0007] Preferably, the central axes of the upper plate, upper plate frame, three circular grooves, one circular hole, bottom plate sealing cover, lower plate frame, and lower plate frame pressure plate are collinear.

[0008] Preferably, the top surface of the bottom plate sealing cover is provided with a sealing groove, and a sealing ring is embedded in the circumference of the sealing groove. The bottom surface of the bottom plate presses on the sealing ring to achieve a seal.

[0009] Preferably, a sealing groove II is provided around the bottom of the circular groove III, and a sealing ring II is embedded in the sealing groove II around the periphery. The lower plate frame presses on the sealing ring II to achieve sealing.

[0010] Preferably, the top surface of the base plate is provided with a sealing groove three around the perimeter of the circular groove three, and a sealing ring three is embedded in the sealing groove three around the perimeter. The bottom surface of the upper plate frame is pressed on the sealing ring three, thereby achieving a seal.

[0011] Preferably, a support rod is hinged to the side of the upper plate frame. The end of the support rod is a conical structure made of PVDF material. A conical hole is provided on one side of the top surface of the bottom plate. When the upper plate frame lifts the upper plate, the end of the support rod abuts into the conical hole to support the upper plate frame and the upper plate.

[0012] Preferably, the lower surface of the upper plate is provided with four "T"-shaped recesses, each recess being inlaid and fixedly connected with a limiting block, and the upper surface of the lower plate frame is provided with four "T"-shaped recesses, each recess being inlaid and fixedly connected with a limiting block, with each recess corresponding to the first and second recesses.

[0013] Preferably, the end of the limiting block is provided with a rectangular protrusion, which protrudes a certain distance from the lower plane of the upper plate and the upper plane of the lower plate frame.

[0014] Preferably, a certain gap is provided between the upper plate and the lower plate frame to form a vacuum cavity.

[0015] Preferably, the bottom plate sealing cover has a threaded through hole at its center, and a vent valve is fixedly connected to the threaded through hole.

[0016] The beneficial effects of this invention are as follows:

[0017] The upper vacuum section of this invention can firmly adsorb the mother plate, and the lower vacuum section can adsorb the daughter plate. Under exposure conditions, the mother plate and the daughter plate will not be deformed, and the working environment is clean and sealed. Furthermore, the limiting block can ensure accurate correspondence between the mother plate and the daughter plate. This invention is convenient for changing plates, can achieve the line width accuracy of the photolithography plate, meet the process and production requirements, and improve product performance. Attached Figure Description

[0018] Figure 1 This is the front view of the present invention;

[0019] Figure 2 Here is a cross-sectional view of AA;

[0020] Figure 3 This is the main view of the upper panel;

[0021] Figure 4 This is a cross-sectional view of BB;

[0022] Figure 5 This is the front view of the base plate;

[0023] Figure 6 This is a cross-sectional view of CC;

[0024] Figure 7 This is the main view of the lower panel frame;

[0025] Figure 8 This is a cross-sectional view of DD;

[0026] Figure 9 This is the front view of the lower frame pressure plate;

[0027] Figure 10 This is a cross-sectional view of EE;

[0028] Figure 11 This is a schematic diagram of the cross-section of the limiting block;

[0029] The attached diagram is labeled as follows: 1-Upper plate, 2-Upper plate frame, 3-Handle, 4-Vacuum connector one, 5-Bottom plate, 6-Bottom plate sealing cover, 7-Lower plate frame, 8-Lower plate frame pressure plate, 9-Vacuum connector two, 10-Sealing gasket, 11-Sealing ring one, 12-Sealing ring two, 13-Sealing ring three, 14-Support rod, 15-Limiting block, 16-Ventilation valve, 17-Vacuum chamber, 18-Sealing groove one, 101-Square hole one, 102-Groove one, 103-Through hole, 104-Recess one, 201-Round hole one, 202-Round groove two, 203-Threaded hole one, 501-Round groove three, 502-Round hole two, 503-Sealing groove two, 504-Sealing groove three, 505-Conical hole, 506-Threaded hole two, 601-Threaded through hole, 701-Recess two, 801- Directional frame, 802 - circular frame, 1501 - rectangular protrusion. Detailed Implementation

[0030] The following is a detailed description of this design scheme with reference to the accompanying drawings.

[0031] like Figures 1-11As shown, a flipping machine consists of an upper vacuum section and a lower vacuum section, which are hinged together. The upper vacuum section includes an upper plate 1, an upper plate frame 2, a handle 3, and a vacuum connector 4. The upper plate 1 is a circular plate with a square hole 101 in the center. A groove 103 is provided around the square hole 101, and two through holes 103 are provided in the groove 102. The upper plate frame 2 is a circular frame with a round hole 201 in the center. A round groove 202 coaxial with the round hole 201 is provided on one side of the frame. The upper plate 1 is embedded in the round groove 202 and fixedly connected to it. The handle 3 is fixedly connected to the top of the upper plate frame 2 at a certain angle. The top surface of the upper plate frame 2 has two through threaded holes 203. The through holes 103 on the groove 102 correspond one-to-one and are conductive. Each threaded hole 203 is threadedly connected to a vacuum connector 4. The lower vacuum section structure includes a base plate 5, a base plate sealing cover 6, a lower plate frame 7, a lower plate frame pressure plate 8, a vacuum connector 9, and a sealing gasket 10. One side of the top surface of the base plate 5 is hinged to the upper plate frame 2, thereby realizing the hinged connection between the upper and lower vacuum sections. A circular groove 501 is provided in the center of the base plate 5, and a circular hole 502 is provided at the bottom of the circular groove 501. The base plate sealing cover 6 is circular in shape and is fastened to the bottom surface of the base plate 5 and fixedly connected to the base plate 5. The lower plate frame pressure plate 8 is composed of an upper square frame 801 and a lower circular frame 802. The lower plate frame 7 is sleeved on the square frame 801 of the lower plate frame pressure plate 8. The outer periphery of the bottom plate 5 is fixedly connected to the circular frame 802, thereby achieving a fixed connection between the bottom plate frame pressure plate 8 and the bottom plate frame 7. A sealing gasket 10 is sandwiched between the upper surface of the bottom plate frame pressure plate 8 and the bottom plate frame 7. The bottom plate frame 7 is fixedly connected in the circular groove 3 501, and the circular frame 802 of the bottom plate frame pressure plate 8 is embedded in the circular hole 2 502. Each of the two sides of the bottom plate 5 is provided with a threaded hole 2 506 that communicates with the circular groove 3 501. Each threaded hole 2 506 is fixedly connected to a vacuum connector 2 9.

[0032] Among them, the central axes of the upper plate 1, upper plate frame 2, circular groove 3 501, circular hole 1 201, bottom plate sealing cover 6, lower plate frame 7, and lower plate frame pressure plate 8 are collinear.

[0033] The bottom plate sealing cover 6 has a sealing groove 18 on its top surface, and a sealing ring 11 is embedded in the sealing groove 18 along its circumference. The bottom surface of the bottom plate 5 presses on the sealing ring 11 to achieve a seal. The bottom of the circular groove 3 501 has a sealing groove 2 503 on its circumference, and a sealing ring 2 12 is embedded in the sealing groove 2 503 along its circumference. The lower plate frame 7 presses on the sealing ring 2 12 to achieve a seal. The top surface of the bottom plate 5 has a sealing groove 3 504 on its circumference along the circular groove 3 501, and a sealing ring 3 13 is embedded in the sealing groove 3 504 along its circumference. The bottom surface of the upper plate frame 2 presses on the sealing ring 3 13 to achieve a seal.

[0034] Among them, a support rod 14 is hinged to the side of the upper plate frame 2. The end of the support rod 14 is a conical structure made of PVDF material. A conical hole 505 is also provided on one side of the top surface of the bottom plate 5. When the upper plate frame 2 drives the upper plate 1 to lift, the end of the support rod 14 abuts into the conical hole 505 to support the upper plate frame 2 and the upper plate 1.

[0035] The lower surface of the upper plate 1 is provided with four "T"-shaped recesses 104, each recess 104 having a limiting block 15 embedded and fixedly connected therein. The upper surface of the lower plate frame 7 is provided with four "T"-shaped recesses 701, each recess 701 having a limiting block 15 embedded and fixedly connected therein. The recesses 104 and 701 correspond one-to-one.

[0036] The end of the limiting block 15 is provided with a rectangular protrusion 1501, which protrudes a certain distance from the lower plane of the upper plate 1 and the upper plane of the lower plate frame 7.

[0037] There is a certain gap between the upper plate 1 and the lower plate frame 7 to form a vacuum cavity 17. The location of the vacuum cavity is the installation position of the mother plate and the daughter plate during the operation.

[0038] The bottom plate sealing cover 6 has a threaded through hole 601 in the center, and a vent valve 16 is fixedly connected to the threaded through hole 601. When changing the plate, the internal air pressure of the flipping machine is made to match the external air pressure, which makes it easier to open the upper plate frame and the upper plate.

[0039] Example

[0040] In practical application, the exposure machine head is positioned above the upper frame 2, exposing vertically downwards. The mother plate is mounted on the raised upper frame 2, and the photomask (daughter plate) to be copied is mounted on the lower frame 7. Negative pressure is introduced through vacuum connector 4 and vacuum connector 9, and both the mother plate and daughter plate are adsorbed by peripheral vacuum bands. The rectangular protrusions 1501 of the limiting block 15 are used to position the mother plate and daughter plate respectively, ensuring that the mother plate and daughter plate correspond in the vertical direction. The daughter plate can have slight up and down movement, the amount of movement being within... The gap should be between 0.3-0.5mm to ensure tight contact between the mother plate and the daughter plate. The upper plate 1 must be firmly attached to the mother plate and must not fall off. Lift the handle 3 and take the end of the support rod 14 out of the conical hole 505. Cover the upper plate frame 2, determine the exposure intensity and exposure time. After the time is up, the replication is complete. Open the vent valve 16 to make the air pressure inside the replica machine consistent with the external air pressure, so that the upper plate frame 2 and the upper plate 1 can be opened. Then replace the daughter plate and repeat the above replication steps to achieve continuous production.

[0041] To verify the performance of this copy printer, an experiment was conducted. The technical conditions and results are as follows:

[0042] a. Power conditions

[0043] Printer power supply: AC 220V 50HZ

[0044] Vacuum gauge reading: (20-60) cmHg

[0045] Nitrogen value on nitrogen meter: (0-2) Kgf / cm2

[0046] b. Light intensity test

[0047] The lamp intensity values ​​of the mercury lamps are all within (3.5-4.5) mw / cm2, and the uniformity is ≤6%, which meets the process requirements.

[0048] c. Stability Testing

[0049] This printing process used a light intensity of 4.1 mW / cm² and an exposure time of 11 seconds, resulting in a line width of over 9.6 μm. Four repeat printings were performed, and the line width remained consistently above 9.7 μm. The line width meets the process requirements and is suitable for production.

[0050] d. Precision testing of the copy machine

[0051] The process conditions for the copying machine are:

[0052] Light intensity (3.5~4.5) mW / cm2, exposure time 10~14 seconds. Under these process conditions, the line width of CDs reproduced by the self-made copying machine can meet the requirement of 9.5um or higher.

[0053] According to the verification plan, we continued to verify the overprinting of the photolithography plate of the self-made copying machine using sample films. There were no problems with the overprinting, and the overprinting between each engraving was accurate.

[0054] The exposure time test was conducted according to the requirements of the 6-inch photolithography plate replication process. Under the condition that the light intensity meets (3.5~4.5)mW / cm2, the exposure time was determined to be (10~14) seconds, which can meet the process requirements.

Claims

1. A copy-making machine, characterized in that, Composed of an upper vacuum section and a lower vacuum section, which are hinged together. The upper vacuum section includes an upper plate, an upper plate frame, a handle, and a vacuum connector. The upper plate is a circular flat plate with a square hole in the center. A groove is provided around the square hole, and two through holes are provided in the groove. The upper plate frame is a circular frame with a round hole in the center. A round groove coaxial with the round hole is provided on one side of the frame. The upper plate is embedded in the round groove and fixedly connected to it. The handle is fixedly connected to the top of the upper plate frame at a certain angle. The top surface of the upper plate frame has two through threaded holes, which correspond to and are connected to the through holes in the groove. Each threaded hole is threadedly connected to a vacuum connector. The lower vacuum section includes a bottom plate, a bottom plate sealing cover, a lower plate frame, a lower plate frame pressure plate, a vacuum connector, and a seal. The bottom plate has a hinged connection between its top surface and the upper frame, thus connecting the upper and lower vacuum sections. A circular groove (3) is located at the center of the bottom plate, and a circular hole (2) is located at the bottom of the circular groove (3). The bottom plate sealing cover is circular in shape and is fastened to the bottom surface of the bottom plate and fixedly connected to it. The lower frame pressure plate consists of an upper square frame and a lower circular frame. The lower frame is fitted around the outer periphery of the square frame of the lower frame pressure plate and fixedly connected to the circular frame, thus achieving a fixed connection between the lower frame pressure plate and the lower frame. A sealing gasket is sandwiched between the upper surface of the lower frame pressure plate and the lower frame. The lower frame is fixedly connected within the circular groove (3), and the circular frame of the lower frame pressure plate is recessed into the circular hole (2). Each of the two sides of the bottom plate has a threaded hole (2) communicating with the circular groove (3), and each threaded hole (2) is fixedly connected to a vacuum connector (2).

2. The copying machine according to claim 1, characterized in that, The central axes of the upper plate, upper plate frame, three circular grooves, one circular hole, bottom plate sealing cover, lower plate frame, and lower plate frame pressure plate are collinear.

3. A copying machine according to claim 1, characterized in that, The top surface of the base plate sealing cover is provided with a sealing groove, and a sealing ring is embedded in the circumference of the sealing groove. The bottom surface of the base plate presses on the sealing ring to achieve a seal.

4. A copy-making machine according to claim 1, characterized in that, The bottom of the circular groove three is provided with a sealing groove two around its perimeter, and a sealing ring two is embedded in the sealing groove two around its perimeter. The lower plate frame presses on the sealing ring two, thereby achieving a seal.

5. A copy-making machine according to claim 1, characterized in that, The top surface of the base plate has a sealing groove three around the perimeter of the circular groove three. A sealing ring three is embedded in the sealing groove three around the perimeter. The bottom surface of the upper plate frame presses on the sealing ring three, thereby achieving a seal.

6. A copy-making machine according to claim 1, characterized in that, A support rod is hinged to the side of the upper plate frame. The end of the support rod is a conical structure made of PVDF material. A conical hole is provided on one side of the top surface of the bottom plate. When the upper plate frame lifts the upper plate, the end of the support rod abuts into the conical hole to support the upper plate frame and the upper plate.

7. A copying machine according to claim 1, characterized in that, The lower surface of the upper plate is provided with four "T"-shaped recesses, each recess being inlaid and fixedly connected with a limiting block. The upper surface of the lower plate frame is provided with four "T"-shaped recesses, each recess being inlaid and fixedly connected with a limiting block. The recesses one and two correspond one-to-one.

8. A copying machine according to claim 7, characterized in that, The end of the limiting block is provided with a rectangular protrusion, which protrudes a certain distance from the lower plane of the upper plate and the upper plane of the lower plate frame.

9. A copying machine according to claim 1, characterized in that, A certain gap is provided between the upper plate and the lower plate frame to form a vacuum cavity.

10. A copy-making machine according to claim 1, characterized in that, The bottom plate sealing cover has a threaded through hole in the center, and a vent valve is fixedly connected to the threaded through hole.

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