Wire saw

Abstract

To provide a wire saw capable of further improving the cutting accuracy of a workpiece. A wire saw (1) includes a slide saddle (4) configured to be movable in an up-down direction, a column (3) having a guide surface (3a, 3b, 3c, 3d) disposed in a cutting direction with respect to a workpiece feeding mechanism (7), a static pressure guide mechanism (9) configured to move the slide saddle (4) in a direction orthogonal to the cutting direction by supplying fluid to pockets (4a, 4b, 4c, 4d) facing the guide surfaces (3a-3d), control valves (91, 92, 93, 94) for adjusting the pressure of the fluid supplied to the guide surfaces (3a-3d), and a controller (10) configured to arbitrarily set the pressure of the fluid supplied to the guide surfaces (3a-3d) according to the cutting-in position of the workpiece W.

Description

TECHNICAL FIELD

[0001] The present application relates to a wire saw provided with a workpiece feeding mechanism. BACKGROUND

[0002] Generally, a wire saw that cuts a workpiece such as a semiconductor material or a magnetic material using a saw wire cuts the workpiece by feeding the workpiece into the saw wire using a workpiece feeding device while supplying a processing liquid to the saw wire.

[0003] The workpiece cut by the wire saw is a thin semiconductor wafer, and thus, it is required to perform cutting with high precision. The semiconductor wafer is determined in shape precision by relative displacement of the workpiece and the saw wire. Correction of the relative displacement is generally performed by thermal displacement using temperature control of each part (for example, refer to Patent Literatures 1 and 2).

[0004] In the wire saw described in Patent Literature 1, temperature control of water by control using a numerical control device (NC device) (80) displaces a roller support shaft (40) in the front-rear direction, thereby forming a good wafer surface.

[0005] In the wire saw described in Patent Literature 2, during workpiece processing, by changing the temperature of an appropriate part (20) of a support frame and elastically deforming it, the relative position of a workpiece (30) and guide rollers (16A, 16B) is changed in the arrangement direction of the saw wire set, and the cutting shape of the workpiece is controlled to a desired shape.

[0006] [Related Art]

[0007] [Patent Literature]

[0008] Patent Literature 1: Japanese Patent Application Laid-Open No. 2009-196023

[0009] Patent Literature 2: Japanese Patent Application Laid-Open No. 2004-114280 SUMMARY

[0010] [Problems to be Solved by the Invention]

[0011] However, the wire saws described in Patent Literatures 1 and 2 are structures in which a metal support frame and a roller support shaft are thermally expanded or contracted by a temperature control device. In these wire saws, it is difficult to control the relative displacement of the workpiece and the saw wire, and it is desired to further improve the cutting precision of the workpiece.

[0012] Therefore, an object of the present application is to provide a wire saw capable of further improving the cutting precision of a workpiece.

[0013] [Means for Solving the Problems]

[0014] To address the aforementioned issues, the wire saw of the present invention is characterized by comprising: a slide saddle configured to move vertically; a column having a guide surface disposed relative to the workpiece feed mechanism along the cutting direction; a hydrostatic guide mechanism that moves the slide saddle in a direction orthogonal to the cutting direction by supplying fluid to a recess disposed opposite to the guide surface; a control valve for adjusting the pressure of the fluid supplied to the guide surface; and a controller that can arbitrarily set the pressure of the fluid supplied to the guide surface according to the workpiece's entry position.

[0015] [Invention Effects]

[0016] According to the present invention, a wire saw capable of further improving the cutting accuracy of a workpiece can be provided. Attached Figure Description

[0017] Figure 1 This is a schematic perspective view of the main parts of an example of a wire saw according to an embodiment of the present invention.

[0018] Figure 2 This is a rough cross-sectional view of the main parts of the wire saw.

[0019] Figure 3 This is a rough longitudinal section view of the main parts of the wire saw.

[0020] Figure 4 This is a schematic diagram showing the state of the guide surface.

[0021] Figure 5 This is a block diagram showing the construction of a wire saw.

[0022] [Explanation of reference numerals in the attached figures]

[0023] 1: Wire saw; 3: Column; 3a, 3b, 3c, 3d: Guide surface; 4: Saddle; 4a, 4b, 4c, 4d: Dimples; 7: Workpiece feed mechanism; 8: Balancer; 9: Static pressure guide mechanism; 10: Controller; 70: Linear motor; 80: Cylinder assembly; 90, 91, 92, 93, 94, 95: Control valve; W: Workpiece. Detailed Implementation

[0024] Reference Figures 1-5 The wire saw according to the embodiments of the present invention will be described.

[0025] In this embodiment, Figure 1 The direction of the workpiece feed table 61 where the clamping device 6 is shown is taken as front, the direction of the workpiece feed table 61 rear is taken as back, the vertically upper side is taken as top, the vertically lower side is taken as bottom, the left direction in the drawing is taken as left, and the right direction in the drawing is taken as right. This will be explained as appropriate.

[0026] First, the workpiece W used in the wire saw 1 will be described before the wire saw 1 is described. Also, as shown in Figure 2 the main part of the wire saw 1 is formed to be substantially left-right symmetrical, so the description of one side will be appropriately described and the description of the other side will be omitted.

[0027] <Workpiece>

[0028] As shown in Figure 1 , the workpiece W is made of a hard and brittle material such as a semiconductor material, a magnetic material, or a ceramic. The workpiece W is cut and sliced by being installed on the workpiece feed table 61 of the clamping device 6 and pushed against the saw wire 54 of the machining device 5 provided in the wire saw 1.

[0029] <Wire saw>

[0030] The wire saw 1 is a slicing device that slices the workpiece W using the saw wire 54 of the machining device 5. As shown in Figure 1 or Figure 2 , the wire saw 1 is configured to mainly include a base 2, a column 3, a slide saddle 4, a machining device 5, a clamping device 6, a workpiece feed mechanism 7, a static pressure guide mechanism 9, and a controller 10 (see Figure 5 ).

[0031] <Base>

[0032] Figure 1 The base 2 shown in the drawing is a base that holds the column 3 and the machining device 5 from below. The base 2 is provided in relation to the entire lower end of the wire saw 1.

[0033] <Column>

[0034] The column 3 is a columnar member that is vertically provided on the base 2 and constitutes the main body of the wire saw 1. As shown in Figure 2 , the slide saddle 4, the static pressure guide mechanism 9, the workpiece feed mechanism 7, and the balancer 8 are provided in the column 3. The inner wall of the column 3 has guide surfaces 3a, 3b, 3c, and 3d that are provided in the cutting direction (the up-down direction) with respect to the workpiece feed of the workpiece feed mechanism 7.

[0035] <Slide saddle>

[0036] As shown in Figure 2 , the slide saddle 4 is a longitudinal feed carriage that is provided to be movable in the up-down direction with respect to the column 3. The clamping device 6 that holds the workpiece W is supported on the front surface of the slide saddle 4. As shown in Figure 4 , the slide saddle 4 has pockets 4a, 4b, 4c, and 4d on the outer peripheral surface to which oil from the static pressure pump P1 of the static pressure guide mechanism 9 is supplied via a control valve 90.

[0037] The pockets 4a to 4d are for supplying oil from the static pressure pump P1 (see Figure 5) The pressure of the oil supplied to the pockets 4a to 4d moves the slide 4 in the horizontal direction (front-rear and left-right directions) to perform position adjustment. The pockets 4a to 4d are arranged facing the guide surfaces 3a to 3d of the column 3 with a gap S1 therebetween. The gap S1 is adjustable between several μm and several tens of μm by the pressure of the oil supplied to the pocket 4a to 4d having a recessed shape, and the slide 4 is moved by the supplied hydraulic pressure.

[0038] Further, the static pressure guide mechanism 9 will be described later. In addition, for convenience, in the case of collectively referring to the control valves 91, 92, 93, 94, and 95, it is referred to as "control valve 90".

[0039] <Processing device>

[0040] As shown in Figure 1 , the processing device 5 is a cutting mechanism that processes the unprocessed workpiece W held by the holding device 6. The processing device 5 is configured to have, for example, three processing rollers 51, 52, and 53 arranged at appropriate intervals in a manner that a triangle is drawn in a side view, a drive motor (not shown) that rotates drives the processing rollers 51, 52, and a saw wire 54 wound around the processing rollers 51, 52, the saw wire 54 that cuts the workpiece W, and a bracket 55. The processing device 5 is provided on the base 2 in the vicinity of the column 3 with the bracket 55 interposed therebetween.

[0041] The workpiece W includes a plurality of workpieces (only one is shown in the drawing) arranged side by side in the axial direction of the processing rollers 51 and 52. Further, when the wire saw 1 is operated, the advancing saw wire 54 is interposed between the processing rollers 51 and 52, and the workpiece W held by the holding device 6 is lowered toward the processing device 5 by the workpiece feeding mechanism 7 (refer to Figure 2 ) and is pressed against the saw wire 54 to be cut.

[0042] The processing rollers 51, 52, and 53 are configured to advance the saw wire 54 by being rotated by the drive motors (not shown) provided to the processing rollers 51 and 52, respectively, and being driven via a transmission mechanism (not shown) including a pulley and a belt. The processing rollers 51, 52, and 53 are at least one pair, and can be three or more if they are arranged in parallel with a gap therebetween. In addition, the drive motors (not shown) can be directly connected to the processing rollers 51 and 52 without using the pulley and the belt.

[0043] The saw wire 54 is, for example, a processing saw wire composed of one wire. The saw wire 54 is driven in a manner that it advances as a whole by repeating the quantitative advancement and the quantitative retraction by the processing rollers 51 and 52, or continuously advances in one direction.

[0044] <Holding device>

[0045] AsFigure 1 As shown, the clamping device 6 is a holding mechanism used to clamp the workpiece W when the workpiece W is being processed by the processing device 5. After clamping the unprocessed workpiece W, the clamping device 6 pushes the workpiece W against the saw wire 54 of the processing device 5 for processing until the processed workpiece W is released, thus holding the workpiece W. The clamping device 6 is configured to include: a workpiece holding part (not shown) that holds the workpiece W; a clamping part (not shown) that clamps the workpiece holding part; and a workpiece feed table 61 that uses a workpiece feed mechanism 7 to raise and lower the workpiece holding part (not shown) and the clamping part (not shown).

[0046] <Workpiece Feed Mechanism>

[0047] like Figure 3 As shown, the workpiece feed mechanism 7 is used to feed the workpiece W at the machining position where it is cut by the saw wire 54, and to feed the completed workpiece W (see reference). Figure 1 A transfer device that moves workpieces between an unprocessed workpiece W and an unprocessed workpiece W at an exchange position. Additionally, the workpiece feed mechanism 7, when processing workpiece W, functions to move workpiece W (refer to...) Figure 1 The function of the lifting device is as follows: The workpiece feeding mechanism 7 is composed of, for example, a linear motor 70, or a lifting device equipped with a ball screw and a servo motor. Hereinafter, as an example, we will explain the case where the workpiece feeding mechanism 7 is composed of a linear motor 70.

[0048] Linear Motors

[0049] like Figure 3 As shown, the linear motor 70 is a drive source for moving the slide saddle 4 in the vertical direction. The linear motor 70 is mainly configured to include: a base 75; a stator 74 fixed to the base 75 and having a permanent magnet 73; and a mover 72 arranged to be movable relative to the stator 74, and having an armature winding 71. The linear motor 70 is configured such that if an alternating current is supplied to the armature winding 71 from a power supply device (not shown), the mover 72 is driven. At this time, the armature winding 71 heats up; therefore, a cooling device 11 (see reference 11) is arranged in contact with the armature winding 71 to cool this heat. Figure 5 A permanent magnet 73 is disposed from the upper end to the lower end of the movable area of ​​the slide saddle 4. A stator 74 is fixed to a base 75, and a mover 72 is disposed on the slide saddle 4. The base 75 is connected to a column 3. A linear motor 70 is electrically connected to a power source (not shown) via a controller 10.

[0050] Cooling device

[0051] like Figure 5As shown, the cooling device 11 is a device used to cool the linear motor 70 and adjust it to a predetermined temperature. The cooling device 11 is configured to include: a hydrostatic hydraulic unit 11a, a hydrostatic pump P1, an oil temperature controller 11b, flow regulators 11c and 11d, and a hydrostatic guide fluid (oil) receiver 11e for recovering the hydrostatic guide fluid (oil) supplied to the hoppers 4a to 4d. Furthermore, the cooling device 11 includes the hydrostatic pump P1, which supplies oil to the hoppers 4a to 4d of the hydrostatic guide mechanism 9 via control valve 90 and pressure switches PS1, PS2, PS3, and PS4.

[0052] Oil Temperature Controller

[0053] The oil temperature controller 11b is a device for properly maintaining the temperature of the oil used in the linear motor 70. The oil temperature controller 11b minimizes thermal displacement of the machine base 75 due to heat generated in the armature winding 71 of the linear motor 70, thus achieving stable machining accuracy by cooling the oil.

[0054] <Equalizer>

[0055] like Figure 5 As shown, the balancer 8 is a device that cancels out the weight of an object moving up and down (lifting or lowering). This weight includes, for example, the weight of the saddle 4, the weight of the mover 72 of the linear motor 70, and the weight of the workpiece W. The balancer 8 is composed of a drive source for up and down movement, and its construction and type are not particularly limited.

[0056] As an example of the balancer 8, the balancer 8 is mainly composed of a cylinder assembly 80. Furthermore, as a specific example, the balancer 8 is configured to include: a cylinder assembly 80, a pressure switch PS5, a control valve 95, and a cylinder pump P2 of a cylinder hydraulic unit 12. The balancer 8 is controlled by the controller 10 in a manner that operates synchronously with the linear motor 70.

[0057] <Cylinder assembly>

[0058] like Figure 3 As shown, the cylinder assembly 80 is a device for supporting the vertically moving components to counteract their weight. The cylinder assembly 80 comprises: a cylinder 81, a piston 82, a piston rod 83, a sliding saddle connecting structure 84, and a guide rail 85. Figure 5 As shown, the cylinder assembly 80 uses oil supplied from the cylinder hydraulic unit 12 via the control valve 95 and pressure switch PS5 to actuate the cylinder 81, thereby maintaining the slide saddle 4.

[0059] like Figure 3As shown, the cylinder 81 houses therein a piston 82 and a piston rod 83, and oil supplied from the cylinder hydraulic unit 12 via the control valve 95, the pressure switch PS5. The cylinder 81 is installed to the saddle 4 that supports the chuck 6 that holds the workpiece W. As shown in FIG. 1, the cylinder 81 is connected to the cylinder pump P2 of the cylinder hydraulic unit 12 via the pressure switch PS5 and the control valve 95. The pressure of the oil supplied to the cylinder 81 can be arbitrarily set by the controller 10 in accordance with the weight of the saddle 4, the weight of the mover 72 of the linear motor 70, and the machining resistance when the workpiece W (refer to FIG. 1) is machined. Figure 5 As shown, the cylinder 81 is connected to the cylinder pump P2 of the cylinder hydraulic unit 12 via the pressure switch PS5 and the control valve 95. The pressure of the oil supplied to the cylinder 81 can be arbitrarily set by the controller 10 in accordance with the weight of the saddle 4, the weight of the mover 72 of the linear motor 70, and the machining resistance when the workpiece W (refer to Figure 1 ) is machined.

[0060] The piston 82 and the piston rod 83 fixed to the piston 82 are fixed bodies that support the cylinder 81 that ascends and descends.

[0061] The lower end portion of the piston rod 83 is integrally fixed to the piston 82, and the saddle connecting member 84 is connected to the upper end portion of the piston rod 83.

[0062] The saddle connecting member 84 is a member for connecting the upper end portion of the piston rod 83 to the upper end portion of the saddle 4, and thus the saddle 4 can be ascended and descended by the cylinder device 80.

[0063] The cylinder device 80 ascends and descends the cylinder 81 by the hydraulic pressure of the oil supplied from the cylinder hydraulic unit 12, and holds the saddle 4.

[0064] As shown, the pressure switch PS5 is a hydraulic controller that has a control function of keeping the hydraulic pressure within a preset set range, and a protection function of stopping the hydraulic system when the hydraulic pressure is abnormal. The pressure switch PS5 is connected between the control valve 95 and the cylinder 81. Figure 5 The control valve 95 is a valve for driving the piston 82 that adjusts the pressure of the oil supplied to the cylinder 81 of the balancer 8.

[0065] The cylinder pump P2 of the cylinder hydraulic unit 12 is a pump that generates hydraulic pressure for driving the cylinder 81 to advance and retreat, and sprays oil into the cylinder 81.

[0066] The control valve 95 and the cylinder pump P2 are driven by the controller 10 in accordance with the weight of the saddle 4, the weight of the mover 72 of the linear motor 70, and the machining resistance when the workpiece W (refer to

[0067] ) is machined. Figure 1

[0068] <Hydrostatic Guiding Mechanism>

[0069] As shown, the pressure switch PS5 is a hydraulic controller that has a control function of keeping the hydraulic pressure within a preset set range, and a protection function of stopping the hydraulic system when the hydraulic pressure is abnormal. The pressure switch PS5 is connected between the control valve 95 and the cylinder 81. Figure 5 ​As shown, the static pressure guide mechanism 9 is a mechanism that applies static pressure guide liquid (oil) to supply pressure to float the slide 4 and guide using the low viscosity of the oil. The static pressure guide mechanism 9 moves the slide 4 in a direction orthogonal to the cutting direction (vertical direction) by supplying fluid to pockets 4a, 4b, 4c, 4d disposed opposite the guide surfaces 3a to 3d, and thereby enables position adjustment of the slide 4 with high accuracy. That is, as shown, the static pressure guide mechanism 9 has lubricating oil in the gap S1 between the guide surfaces 3a to 3d and the opposing surface of the slide 4 opposite the guide surfaces 3a to 3d, and thus the slide 4 is able to move smoothly with a very low coefficient of friction. Therefore, the machining error of the gap S1 between the guide surfaces 3a to 3d and the opposing surface of the slide 4 is averaged by the lubricating film, and thus the slide 4 is able to move with higher accuracy than the accuracy of the parts. Figure 4 As shown, the static pressure guide mechanism 9 has lubricating oil in the gap S1 between the guide surfaces 3a to 3d and the opposing surface of the slide 4 opposite the guide surfaces 3a to 3d, and thus the slide 4 is able to move smoothly with a very low coefficient of friction. Therefore, the machining error of the gap S1 between the guide surfaces 3a to 3d and the opposing surface of the slide 4 is averaged by the lubricating film, and thus the slide 4 is able to move with higher accuracy than the accuracy of the parts.

[0070] As shown, the static pressure guide mechanism 9 has lubricating oil in the gap S1 between the guide surfaces 3a to 3d and the opposing surface of the slide 4 opposite the guide surfaces 3a to 3d, and thus the slide 4 is able to move smoothly with a very low coefficient of friction. Therefore, the machining error of the gap S1 between the guide surfaces 3a to 3d and the opposing surface of the slide 4 is averaged by the lubricating film, and thus the slide 4 is able to move with higher accuracy than the accuracy of the parts. Figure 5 As shown, the static pressure guide mechanism 9 is configured to include the column 3 having the guide surfaces 3a to 3d, the slide 4 having the pockets 4a to 4d, an oil temperature controller 11b, pressure switches PS1 to PS5, control valves 90 (control valves 91 to 95), a controller 10, a fluid flow regulator 96, and a static pressure pump P1.

[0071] [Guide surface and pocket] [Guide surface and pocket]

[0072] The above-described guide surfaces 3a to 3d are constituted by the inner wall surface of the column 3.

[0073] The above-described pockets 4a to 4d are grooves in a concave shape in cross section that are supplied with hydraulic pressure for moving the slide 4 in the front-rear and left-right directions. For example, in the case where the pressure of the oil supplied to the pockets 4a, 4b (see Figure 2 ) is the same pressure, there is no pressure difference in the hydraulic pressure in the front-rear pockets 4a, 4b, and thus the slide 4 is disposed in the central portion of the movable range in the front-rear direction.

[0074] In the case where the hydraulic pressure supplied to the pocket 4a is greater than the hydraulic pressure supplied to the pocket 4b, the slide 4 moves in the front direction in which the pocket 4b exists. In the case where the hydraulic pressure supplied to the pocket 4a is less than the hydraulic pressure supplied to the pocket 4b, the slide 4 moves in the rear direction in which the pocket 4a exists.

[0075] In the case where the hydraulic pressure supplied to the pocket 4a is greater than the hydraulic pressure supplied to the pocket 4b, the slide 4 moves in the front direction in which the pocket 4b exists. In the case where the hydraulic pressure supplied to the pocket 4a is less than the hydraulic pressure supplied to the pocket 4b, the slide 4 moves in the rear direction in which the pocket 4a exists. Figure 2In a case where the pressure of the oil supplied is the same pressure, the hydraulic pressure in the left and right pockets 4c, 4d has no pressure difference, and therefore the slide 4 is disposed at the center of the movable range in the left-right direction. In a case where the hydraulic pressure supplied to the pocket 4c is greater than the hydraulic pressure supplied to the pocket 4d, the slide 4 moves in the right direction in which the pocket 4d exists. In a case where the hydraulic pressure supplied to the pocket 4c is smaller than the hydraulic pressure supplied to the pocket 4d, the slide 4 moves in the left direction in which the pocket 4c exists.

[0076] <Pressure switch>

[0077] The pressure switches PS1 to PS5 are hydraulic controllers having a control function of maintaining hydraulic pressure within a preset set range and a protection function of stopping the movement of the workpiece W based on the workpiece feeding mechanism 7 when the hydraulic pressure is abnormal. The pressure switches PS1 to PS5 are constituted by hydraulic protection pressure switches. The pressure switch PS1 is connected between the control valve 91 and the pocket 4a. The pressure switch PS2 is connected between the control valve 92 and the pocket 4b. The pressure switch PS3 is connected between the control valve 93 and the pocket 4c. The pressure switch PS4 is connected between the control valve 94 and the pocket 4d.

[0078] <Control valve>

[0079] The control valve 90 (control valves 91 to 94) is a valve for adjusting the pressure of the oil supplied to the pockets 4a to 4d. The control valve 90 (control valves 91 to 94) is constituted by a proportional electromagnetic pressure-reducing valve, is actuated by receiving a drive signal from the controller 10, and adjusts the pressure of the oil supplied to the pockets 4a, 4b, 4c, 4d as appropriate in accordance with the cutting-in position of the workpiece W.

[0080] <Controller>

[0081] The controller 10 is a control device having a function of being able to arbitrarily set the pressure of the oil supplied to the pockets 4a to 4d in accordance with the cutting-in position of the workpiece W. In addition, the controller 10, as described above, also has a function of driving the control valve 95 and the cylinder pump P2 in accordance with the weight of the slide 4, the weight of the mover 72 of the linear motor 70, and the machining resistance when machining the workpiece W (refer to Figure 1

[0082] <Fluid straightener>

[0083] The fluid straightener 96 is a device that straightens the flow of oil in such a manner as to flow a prescribed amount of oil, in order to suppress turbulence caused by a bend in the piping or the generation of eddies due to deterioration of the flow velocity distribution.

[0084] <Static pressure pump>

[0085] ​The static pressure pump P1 of the static pressure hydraulic unit 11a is a pump that supplies oil to the pockets 4a to 4d and generates hydraulic pressure for moving the slide 4 in the horizontal direction. The static pressure pump P1 is connected to the pockets 4a to 4d via the fluid straightener 96, the control valves 91 to 94, and the pressure switches PS1 to PS4. The static pressure pump P1 is electrically connected to the controller 10 and is driven by a drive signal from the controller 10.

[0086] [Effects]

[0087] Next, the effects of the wire saw 1 according to the embodiment of the present application will be described with reference to Figures 1-5

[0088] As shown in Figure 1 , first, the workpiece W is mounted on the workpiece feed table 61. The linear motor 70 (see Figure 3 ) is driven to lower the workpiece W, and the workpiece W is pushed against the saw wire 54 of the machining device 5 to perform cutting machining.

[0089] In the case of performing cutting machining on the workpiece W, for example, the operator sets the pressure of the oil supplied to the pockets 4c and 4d of the slide 4 according to the cutting-in position of the workpiece W (see Figure 5 ) by operating the operation section of the controller 10. Therefore, by moving the slide 4 in the left-right direction according to the magnitude of the hydraulic pressure supplied to the pockets 4c and 4d, the position of the slide 4 is adjusted in the left-right direction, and thus the position of the workpiece W (see Figure 1 ) subjected to cutting machining with respect to the saw wire 54 can be arbitrarily adjusted. Figure 1

[0090] In addition, by appropriately adjusting the pressure of the oil supplied to the pockets 4a and 4b of the slide 4 by operating the operation section of the controller 10, the slide 4 can be moved in the front-rear direction according to the magnitude of the hydraulic pressure supplied to the pockets 4c and 4d, and the position of the slide 4 is adjusted in the front-rear direction. Therefore, the wire saw 1 can correct the cutting accuracy of the workpiece W and further make it high-precision.

[0091] In addition, the balancer 8 can cancel the weight of the slide 4, the weight of the mover 72 of the linear motor 70, and the machining resistance when machining the workpiece W and support them in a stable state. Therefore, since the balancer 8 can reduce the load lifted by the linear motor 70, the linear motor 70 can be downsized.

[0092] Thus, as shown in Figure 2 or Figure 5 ​​As shown, the embodiment of the present application relates to a wire saw 1 provided with: a slide 4 configured to be movable in the up-down direction; a column 3 having guide surfaces 3a, 3b, 3c, 3d provided in the cutting direction with respect to a workpiece feeding mechanism 7; a static pressure guide mechanism 9 configured to move the slide 4 in a direction orthogonal to the cutting direction by supplying fluid to pockets 4a, 4b, 4c, 4d facing the guide surfaces 3a to 3d; control valves 91, 92, 93, 94 for adjusting the pressure of the fluid supplied to the guide surfaces 3a to 3d; and a controller 10 for arbitrarily setting the pressure of the fluid supplied to the guide surfaces 3a to 3d in accordance with the cutting position of a workpiece W (refer to Figure 1 ).

[0093] According to such a structure, the wire saw 1 is provided with the static pressure guide mechanism 9 configured to move the slide 4 by supplying fluid to the pockets 4a to 4d facing the guide surfaces 3a to 3d provided in the cutting direction of the workpiece W (refer to Figure 1 ). Figure 1

[0094] Further, with respect to the static pressure guide of the guide surfaces 3a to 3d of the static pressure guide mechanism 9, the guide surfaces 3a to 3d are caused to float by supplying fluid to pressurize the pockets 4a to 4d of the slide 4, the workpiece W is caused to move in the front-back and left-right directions, the relative position of the workpiece W and the saw wire 54 is caused to be misaligned, and the position is finely adjusted. Therefore, the guide surfaces 3a to 3d and the pockets 4a to 4d are completely non-contact, and thus, the fluid has an effect of averaging the shape error of the guide surfaces 3a to 3d, and thus, the movement accuracy is high.

[0095] Further, the guide surfaces 3a to 3d and the pockets 4a to 4d have a small frictional resistance (high responsiveness) compared to rolling guide, and also have high viscous damping properties due to the fluid, and thus, are not affected by external force disturbance, are active, and are capable of high-accuracy position adjustment. Further, the wire saw 1 is also capable of moving in the front-back and left-right directions by adjusting the pressure of the fluid supplied to the pockets 4a to 4d, and thus, is capable of processing into an arbitrary curved surface shape.

[0096] Further, the wire saw 1 is provided with a balancer 8 for canceling the weight of the member capable of moving in the up-down direction and the processing resistance when processing the workpiece W.

[0097] ​According to such a structure, the balancer 8 is able to counterbalance and support in a stable state the weight of the member capable of moving in the up-and-down direction (for example, the weight of the slide 4, the weight of the mover 72 of the linear motor 70, and the machining resistance when machining the workpiece W). Therefore, since the balancer 8 is able to reduce the load raised by the linear motor 70, the linear motor 70 can be downsized, and the entire column 3 can be downsized.

[0098] In addition, the balancer 8 is constituted by a cylinder device 80.

[0099] According to such a structure, the balancer 8 is able to support the weight of the slide 4, the weight of the mover 72 of the linear motor 70, and the machining resistance when machining the workpiece W, using the hydraulic pressure supplied to the cylinder 81 of the cylinder device 80, and is able to hold in a stable state.

[0100] In addition, as shown in Figure 2 and Figure 3 , the wire saw 1 is provided with the linear motor 70 that moves the slide 4 in the up-and-down direction (the cutting-in direction of the workpiece W).

[0101] According to such a structure, the linear motor 70 is able to move smoothly at the time of cutting machining since the armature winding 71 on the moving side moves in a non-contact state with respect to the permanent magnet 73 on the fixed side, and is not deteriorated by abrasion. In addition, the wire saw 1 is able to cancel the work of maintaining the components of the linear motor 70, and is able to improve the maintainability.

[0102] [Modified Example]

[0103] Furthermore, the present application is not limited to the above-described embodiments, and various modifications and changes can be made within the scope of the technical idea thereof, and of course, the present application also includes the inventions after such modifications and changes.

[0104] In the above-described embodiments, as an example of the static pressure guide mechanism 9, as shown in Figure 2 , a case in which the pockets 4a to 4d are provided on the front and back and left and right of the outer circumferential surface of the slide 4 is described, but is not limited thereto.

[0105] The pockets 4a to 4d to which oil is supplied can be at least the pockets 4c and 4d provided on the left and right of the outer circumferential surface of the slide 4. In this way, even if the position of the slide 4 can be adjusted only in the left-and-right direction, the thickness of the workpiece W to be machined can be adjusted, and thus, cutting machining can be performed on the workpiece W (see Figure 1 ) with high precision.

[0106] In addition, the workpiece feed mechanism 7 is not limited to the linear motor 70, and can be a lifting device constituted by a ball screw and a servo motor.

Claims

1. A wire saw, characterized in that, have: The sliding saddle is configured to move vertically. The column has a guide surface that is positioned relative to the workpiece feed mechanism along the cutting direction; The static pressure guiding mechanism supplies adjustable pressure fluid to the front and rear or left and right recesses arranged opposite to the guiding surface, thereby causing the slide saddle to move in the front, rear, left and right directions. A control valve is used to adjust the pressure of the fluid supplied to the guide surface; as well as The controller can arbitrarily set the pressure of the fluid supplied to the guide surface according to the workpiece's cutting position. The sliding saddle has a protrusion that protrudes in a direction orthogonal to the cutting direction and forms a convex shape when viewed in cross-section. The protrusion has a depression formed on a surface orthogonal to the direction in which the protrusion protrudes.

2. The wire saw according to claim 1, characterized in that, It has a balancer that offsets the weight of the component that can move vertically with the processing resistance when processing the workpiece.

3. The wire saw according to claim 2, characterized in that, The balancer is composed of a cylinder assembly.

4. The wire saw according to claim 1, characterized in that, It is equipped with a linear motor that moves the slide saddle in the vertical direction.

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