Inductive Coil Assembly Drive System and Its Control Method

Abstract

An embodiment of the present application provides an induction coil assembly driving system and a control method thereof. Among them, the induction coil assembly driving system includes: a rotary driver; a lifting assembly, and the rotary driver is drivingly connected to the induction coil assembly through the lifting assembly to drive the induction coil assembly to lift; a controller, configured to determine the theoretical rotational speed of the rotary driver based on the target lifting speed of the induction coil assembly within a preset time period, where the theoretical rotational speed is the rotational speed at which the rotary driver runs uniformly within the preset time period; determine whether the theoretical rotational speed of the rotary driver is less than or equal to a preset rotational speed, where the preset rotational speed is the critical rotational speed at which the rotary driver generates vibration; in the case where the theoretical rotational speed of the rotary driver is less than or equal to the preset rotational speed, control the rotary driver to alternately stop running and run at the target rotational speed within the preset time period, so that the average rotational speed of the rotary driver within the preset time period is equal to the theoretical rotational speed, and the target rotational speed is greater than the preset rotational speed.

Description

Technical Field

[0001] The present application relates to the technical field of driving devices, and particularly to an induction coil assembly driving system and a control method thereof. Background Art

[0002] During the implementation of semiconductor processes, it is sometimes necessary to heat a device to be heated using an induction coil assembly and use a driving device to drive the induction coil assembly to move in order to heat various parts of the device to be heated. Refer to Figure 1 , for example, during the process of preparing crystals based on the PVT (Physical Vapor Transport process), it is necessary to move the induction coil assembly 10 outside the crystal preparation equipment 20 to heat the crystal preparation equipment 20 according to process requirements.

[0003] In the related art, a rotary driver and a lifting assembly can be used to drive the induction coil assembly 10 to lift. However, it can be understood that a rotary driver generally has an applicable speed range. When the moving speed of the induction coil assembly 10 is relatively low, the movement accuracy of the output end of the rotary driver will decrease. In this way, the rotary driver will not be able to accurately drive the induction coil assembly 10 to move. Summary of the Invention

[0004] Embodiments of the present application provide an induction coil assembly driving system and a control method thereof to solve the problem of how to improve the driving accuracy of a rotary driver.

[0005] In a first aspect, embodiments of the present application provide an induction coil assembly driving system.

[0006] The induction coil assembly driving system provided by embodiments of the present application is applied to semiconductor process equipment and includes:

[0007] A rotary driver;

[0008] A lifting assembly, the rotary driver is drivingly connected to the lifting assembly, and the lifting assembly is used for driving connection with an induction coil assembly to drive the induction coil assembly to lift; and,

[0009] A controller, configured to determine a theoretical rotation speed of the rotary driver based on a target lifting speed of the induction coil assembly within a preset time period, where the theoretical rotation speed is the rotation speed at which the rotary driver operates uniformly within the preset time period;

[0010] Determine whether the theoretical rotation speed of the rotary driver is less than or equal to a preset rotation speed, where the preset rotation speed is a critical rotation speed at which the rotary driver generates vibration;

[0011] When the theoretical rotational speed of the rotary drive is less than or equal to the preset rotational speed, control the rotary drive to alternately stop running and run at a target rotational speed within the preset duration, so that the average rotational speed of the rotary drive within the preset duration is equal to the theoretical rotational speed, where the target rotational speed is greater than the preset rotational speed.

[0012] Optionally, when the theoretical rotational speed of the rotary drive is less than or equal to the preset rotational speed, within the preset duration, the number of times the rotary drive switches to the stopped running state is multiple times, and the rotary drive maintains a first duration each time in the stopped running state; the number of times the rotary drive switches to the state of running at a target rotational speed is equal to the number of times the rotary drive switches to the stopped running state, and the rotary drive maintains a second duration each time in the state of running at a target rotational speed; the sum of the cumulative duration of the rotary drive in the stopped running state and the cumulative duration in the state of running at a target rotational speed is equal to the preset duration.

[0013] Optionally, the controller is further configured to control the rotary drive to run at the theoretical rotational speed within the preset duration to drive the lifting of the induction coil assembly when the theoretical rotational speed is greater than the preset rotational speed.

[0014] Optionally, the lifting assembly includes a screw rod and a slider, the slider is threadedly connected to the screw rod to drive the slider to move by rotating the screw rod; the rotary drive is drivingly connected to the screw rod, and the rotary drive is used to drive the screw rod to rotate; the slider is used to be connected to the induction coil assembly.

[0015] Optionally, the induction coil assembly drive system further includes: a rotary encoder, the rotary encoder is connected to the screw rod, and the rotary encoder is also electrically connected to the controller.

[0016] Optionally, the induction coil assembly drive system further includes a speed reducer, and the rotary drive is drivingly connected to the screw rod through the speed reducer.

[0017] Optionally, the speed reducer includes a first sub-speed reducer and a second sub-speed reducer, where the second sub-speed reducer is a reversing speed reducer, and the second sub-speed reducer is provided with a second power output shaft; the rotary drive is drivingly connected to the first sub-speed reducer, the first sub-speed reducer is drivingly connected to the second sub-speed reducer, the second power output shaft is arranged along the height direction of the induction coil assembly drive system, and the screw rod is coaxially connected to the second power output shaft.

[0018] Optionally, the first sub-reducer is provided with a first power output shaft, and the induction coil assembly drive system further includes an electromagnetic brake. The electromagnetic brake includes a magnetic fixing member and a magnetic attracting member, and the magnetic attracting member is circumferentially and limit-connected to the first power output shaft; when the electromagnetic brake is in a power-off state, the magnetic attracting member is switched from a separated state to an attracted state with the magnetic fixing member.

[0019] In a second aspect, an embodiment of the present application provides a control method for an induction coil assembly drive system.

[0020] The induction coil assembly drive system provided by the embodiment of the present application is applied to any one of the induction coil assembly drive systems provided by the embodiment of the present application;

[0021] The control method of the induction coil assembly drive system includes:

[0022] Based on the target lifting speed of the induction coil assembly within a preset time period, the controller is used to determine the theoretical rotational speed of the rotary driver, where the theoretical rotational speed is the rotational speed at which the rotary driver runs at a constant speed within the preset time period;

[0023] The controller is used to determine whether the theoretical rotational speed of the rotary driver is less than or equal to a preset rotational speed, where the preset rotational speed is the critical rotational speed at which the rotary driver generates vibration;

[0024] When the theoretical rotational speed of the rotary driver is less than or equal to the preset rotational speed, the controller is used to control the rotary driver to alternately stop running and run at a target rotational speed within the preset time period, so that the average rotational speed of the rotary driver within the preset time period is equal to the theoretical rotational speed, where the target rotational speed is greater than the preset rotational speed.

[0025] Optionally, the control method of the induction coil assembly drive system further includes: when the theoretical rotational speed is greater than the preset rotational speed, the controller is used to control the rotary driver to run at the theoretical rotational speed within the preset time period to drive the induction coil assembly to lift.

[0026] In a third aspect, an embodiment of the present application provides a readable storage medium.

[0027] The readable storage medium of the embodiment of the present application is applied to any one of the induction coil assembly drive systems provided by the embodiment of the present application. Programs or instructions are stored on the readable storage medium, and when the programs or instructions are executed by a processor, the steps of the control method of any one of the induction coil assembly drive systems provided by the embodiment of the present application are implemented.

[0028] The above at least one technical solution adopted in the embodiments of the present application can achieve the following beneficial effects:

[0029] In the embodiments of the present application, the rotary drive can be alternately stopped and run at a target speed. Wherein, when the rotary drive runs at the target speed, the target speed can be greater than the critical speed at which the rotary drive generates vibration. In this way, vibration of the rotary drive can be avoided, thereby improving the driving accuracy of the rotary drive. Furthermore, the induction coil assembly can be driven to lift more precisely by using the rotary drive and the lifting assembly. Description of the Drawings

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present application or related technologies, the following will briefly introduce the drawings required for use in the description of the embodiments or related technologies. Obviously, the drawings in the following description are only some embodiments recorded in the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0031] Figure 1 Schematic diagram of an induction coil assembly and crystal preparation equipment provided in the embodiments of the present application;

[0032] Figure 2 Schematic diagram of a driving system for an induction coil assembly provided in the embodiments of the present application;

[0033] Figure 3 Schematic diagram of an induction coil assembly provided in the embodiments of the present application;

[0034] Figure 4 Schematic diagram of a transmission mechanism provided in the embodiments of the present application;

[0035] Figure 5 Partial cross-sectional view of a driving system for an induction coil assembly provided in the embodiments of the present application;

[0036] Figure 6 Flowchart of a control method for a driving system of an induction coil assembly provided in the embodiments of the present application.

[0037] Explanation of the reference numerals in the drawings:

[0038] 10 - induction coil group; 20 - crystal preparation equipment;

[0039] 100 - Induction coil assembly drive system; 110 - Rotary drive; 120 - Reducer; 121 - First sub - reducer; 122 - Second sub - reducer; 130 - Lifting assembly; 131 - Screw; 132 - Slide block; 140 - Electromagnetic brake; 141 - Magnetic fixing part; 142 - Magnetic attracting part; 150 - Controller; 160 - Rotary encoder; 200 - Induction coil assembly. Detailed implementation mode

[0040] To make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in conjunction with the specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present application.

[0041] In the description of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0042] In addition, although the terms used in the present application are selected from well - known and commonly used terms, some of the terms mentioned in the specification of the present application may be selected by the applicant according to his or her judgment, and their detailed meanings are described in the relevant parts of the description herein.

[0043] In addition, it is required to understand the present application not only through the actual terms used, but also through the meaning implied by each term.

[0044] In order to enable those skilled in the art to better understand the inventive concept of the present application, it is necessary to briefly introduce other solutions for driving the induction coil assembly to lift in the related art first.

[0045] In the related art, a fast - slow lifting and positioning system can be composed of a dual - motor, a two - way clutch, a multi - stage reducer and a multi - stage synchronous belt drive to drive the induction coil assembly to lift. Among them, the dual - motor includes a slow - speed motor and a fast - speed motor. The multi - stage synchronous belt drive includes a first synchronous belt, a second synchronous belt and a third synchronous belt. The multi - stage reducer includes a first reducer and a second reducer.

[0046] The slow-speed motor is directly connected to the first speed reducer, connected to the lower input end of the bidirectional clutch through the first synchronous belt, and then connected to the second speed reducer and the lifting assembly through the third synchronous belt, forming a slow-speed lifting and positioning mechanism. The fast-speed motor is connected to the upper input end of the bidirectional clutch through the second synchronous belt, and also connected to the second speed reducer and the lifting assembly through the third synchronous belt, forming a fast-speed lifting and positioning mechanism. Thus, the switching between fast and slow speeds is achieved by controlling the power-on or power-off of the clutches at the upper and lower input ends of the bidirectional clutch.

[0047] For example, in the case where it is necessary to drive the induction coil assembly to lift at a slower speed, the bidirectional clutch can be used to enable the slow-speed motor to output power, and the power of the fast-speed motor can be cut off. In the case where it is necessary to drive the induction coil assembly to lift at a faster speed, the bidirectional clutch can be used to enable the fast-speed motor to output power, and the power of the slow-speed motor can be cut off.

[0048] In the solutions in the related art, it is necessary to connect two-stage synchronous belts to transmit the power of the motor to the lifting assembly. Since the belt drive is a flexible drive, it is impossible to achieve the same transmission accuracy as that of gears, and the more the number of synchronous belt transmission stages, the greater the cumulative lifting and positioning error relative to the gear drive. It can be seen from this that the solutions in the related art have the problems of complex structure and low accuracy.

[0049] The following will describe in detail the technical solutions provided by each embodiment of the present application with reference to the accompanying drawings.

[0050] An embodiment of the present application provides an induction coil assembly driving system, and the induction coil assembly driving system is applied to semiconductor process equipment. Refer to Figures 2 to 5 , the induction coil assembly driving system 100 provided by the embodiment of the present application may include: a rotation driver 110, a lifting assembly 130, and a controller 150.

[0051] The rotation driver 110 may be drivingly connected to the lifting assembly 130, and the lifting assembly 130 is used for drivingly connecting with the induction coil assembly 200 to drive the induction coil assembly 200 to lift.

[0052] The controller 150 is configured to determine a theoretical rotational speed of the rotary driver 110 based on a target lifting speed of the induction coil assembly 200 within a preset time period, where the theoretical rotational speed is the rotational speed at which the rotary driver 110 operates at a constant speed within the preset time period. The controller 150 is further configured to determine whether the theoretical rotational speed of the rotary driver 110 is less than or equal to a preset rotational speed, where the preset rotational speed is a critical rotational speed at which the rotary driver 110 generates vibration. The controller 150 is further configured to, when the theoretical rotational speed of the rotary driver 110 is less than or equal to the preset rotational speed, control the rotary driver 110 to alternately stop operating and operate at the target rotational speed within the preset time period, so that the average rotational speed of the rotary driver 110 within the preset time period is equal to the theoretical rotational speed, where the target rotational speed is greater than the preset rotational speed.

[0053] In this way, in the embodiments of the present application, the rotary driver 110 can be made to alternately stop operating and operate at the target rotational speed. Wherein, when the rotary driver 110 operates at the target rotational speed, the target rotational speed can be greater than the critical rotational speed at which the rotary driver 110 generates vibration. In this way, vibration of the rotary driver 110 can be avoided, thereby improving the driving accuracy of the rotary driver 110. Furthermore, the induction coil assembly 200 can be driven by the rotary driver 110 and the lifting assembly 130 to perform lifting more precisely.

[0054] It should also be noted that, compared with the solutions in the related art, the solution provided by the embodiments of the present application has the advantages of not requiring a clutch for switching; one rotary driver 110 can control the induction coil assembly 200 to perform both rapid positioning and slow positioning; the structure is simple, the installation is convenient, and the hardware cost is low.

[0055] In the embodiments of the present application, when the theoretical rotational speed of the rotary driver 110 is less than or equal to the preset rotational speed, within the preset time period, the number of times the rotary driver 110 switches to the stopped operating state is multiple times, and the rotary driver 110 maintains the first time period in the stopped operating state each time. The number of times the rotary driver 110 switches to the operating state at the target rotational speed is equal to the number of times the rotary driver 110 switches to the stopped operating state, and the rotary driver 110 maintains the second time period in the operating state at the target rotational speed each time. The sum of the cumulative time periods in which the rotary driver 110 is in the stopped operating state and the cumulative time periods in which it is in the operating state at the target rotational speed is equal to the preset time period.

[0056] For example, the preset time period is T, the theoretical rotational speed of the rotary driver 110 is V0, the target rotational speed of the rotary driver 110 is V1, the time duration for which the rotary driver 110 operates at the target rotational speed V1 each time is T1, and the time duration for which the rotary driver 110 stops operating each time is T2. Then it can be obtained that the number of times the rotary driver 110 operates alternately is N, where T = N(T1 + T2), and V0 = NV1×T1 / T.

[0057] In an embodiment of the present application, the controller 150 is further configured to control the rotary driver 110 to operate at the theoretical speed within a preset duration when the theoretical speed is greater than the preset speed, so as to drive the induction coil assembly 200 to move up and down. That is, in an embodiment of the present application, when the theoretical speed is greater than the critical speed at which the rotary driver 110 generates vibration, the rotary driver 110 can directly operate at a uniform speed at the theoretical speed. In this way, the control difficulty of the controller 150 can be reduced.

[0058] In an embodiment of the present application, the lifting assembly 130 may include a screw 131 and a slider 132. The slider 132 is threadedly connected to the screw 131 to drive the slider 132 to move by using the rotating screw 131. The rotary driver 110 is drivingly connected to the screw 131, and the rotary driver 110 is used to drive the screw 131 to rotate. The slider 132 is used to connect to the induction coil assembly 200. In this way, the rotary driver 110 can be used to drive the screw 131 to rotate. Furthermore, the rotating screw 131 can drive the slider 132 to move. Thus, the induction coil assembly 200 can be driven to move up and down by the slider 132.

[0059] In addition, in other embodiments of the present application, the lifting assembly 130 may include a cam and a push rod. The rotary driver 110 may be drivingly connected to the cam to drive the cam to rotate. The rotating cam can drive the push rod to move up and down. Furthermore, the induction coil assembly 200 can be driven to move up and down by using the push rod that moves up and down.

[0060] In an embodiment of the present application, the induction coil assembly drive system 100 may further include a speed reducer 120. The rotary driver 110 may be drivingly connected to the screw 131 through the speed reducer 120.

[0061] Reference Figure 2 In an embodiment of the present application, the speed reducer 120 may include a first sub-speed reducer 121 and a second sub-speed reducer 122. Among them, the second sub-speed reducer 122 is a reversing speed reducer, and the second sub-speed reducer 122 is provided with a second power output shaft. The rotary driver 110 is drivingly connected to the first sub-speed reducer 121, and the first sub-speed reducer 121 is drivingly connected to the second sub-speed reducer 122. The second power output shaft is arranged along the height direction of the induction coil assembly drive system 100, and the screw 131 is coaxially connected to the second power output shaft. In this way, the screw 131 can be arranged in the vertical direction, so as to facilitate driving the slider 132 threadedly connected to the screw 131 to move up and down by using the vertically arranged screw 131, so that the induction coil assembly 200 moves up and down with the slider 132.

[0062] Exemplarily, in an embodiment of the present application, both the first sub-speed reducer 121 and the second sub-speed reducer 122 may be gear speed reducers.

[0063] In an embodiment of the present application, the first sub-reducer 121 is provided with a first power output shaft, and the induction coil assembly drive system 100 may further include an electromagnetic brake 140. The electromagnetic brake 140 may include a magnetic fixing member 141 and a magnetic attracting member 142, and the magnetic attracting member 142 is circumferentially and limitedly connected to the first power output shaft; when the electromagnetic brake 140 is in a power-off state, the magnetic attracting member 142 is switched from a separated state to an attracted state with the magnetic fixing member 141. In this way, when it is necessary to stop the lifting of the induction coil assembly 200, the electromagnetic brake 140 can be in a power-off state, so that the electromagnetic brake 140 can brake the first power output shaft of the first sub-reducer 121 to stop the rotation of the first power output shaft, thereby cutting off the power transmitted to the induction coil assembly 200.

[0064] In an embodiment of the present application, the first sub-reducer 121 may be provided with a first power input shaft, and the rotary driver 110 may be drivingly connected to the first power input shaft to transmit the power output by the rotary driver 110 to the first sub-reducer 121.

[0065] In an embodiment of the present application, the second sub-reducer 122 may be provided with a second power input shaft, and the first power output shaft of the first sub-reducer 121 may be drivingly connected to the second power input shaft through a first coupling and a transmission shaft in sequence. In this way, the power output by the rotary driver 110 can be transmitted to the second sub-reducer 122 through the first sub-reducer 121, the first coupling, and the transmission shaft in sequence.

[0066] Further, the second power output shaft of the second sub-reducer 122 may be drivingly connected to the screw 131 through a second coupling. In this way, the power output by the rotary driver 110 can be transmitted to the screw 131. Thus, the rotating screw 131 can be used to drive the slider 132 threadedly connected to the screw 131 to lift, so that the induction coil assembly 200 can lift with the slider 132.

[0067] As Figure 5 shown, an electromagnetic brake 140 is provided on the transmission shaft connecting the first sub-reducer 121 and the second sub-reducer 122. The magnetic attracting member 142 of the electromagnetic brake 140 is key-connected to the transmission shaft, and the magnetic fixing member 141 is fixedly connected to the housing of the second sub-reducer 122. After the system is powered on, the magnetic attracting member 142 and the magnetic fixing member 141 of the electromagnetic brake 140 are disconnected, and the transmission shaft can transmit power to the screw 131 of the lifting assembly 130 under the drive of the rotary driver 110.

[0068] After the system power-off, the magnetic attraction part 142 and the magnetic fixing part 141 of the electromagnetic brake 140 are attracted to each other. Since the magnetic fixing part 141 is fixedly connected to the housing of the second sub-reducer 122, the housing of the second sub-reducer 122 is fixedly connected to the fixed frame of the lifting assembly 130, and the fixed frame of the lifting assembly 130 is fixedly connected to the whole machine frame. In this way, it is possible to prevent the induction coil assembly 200 from falling instantaneously due to its own weight in the case where the brake power-off fails for the rotary drive 110. Thus, the safety of the induction coil assembly drive system 100 can be improved.

[0069] Optionally, in other embodiments of the present application, when the induction coil assembly driving device includes the electromagnetic brake 140, the magnetic attraction part 142 of the electromagnetic brake 140 can also be connected to the screw 131. When the electromagnetic brake 140 is in a power-off state, the magnetic attraction part 142 can be switched from a separated state to an attracted state with the magnetic fixing part 141 of the electromagnetic brake 140. In this way, it is also possible to prevent the induction coil assembly 200 from falling instantaneously due to its own weight in the case where the brake power-off fails for the rotary drive 110. Thus, the safety of the induction coil assembly drive system 100 can be improved.

[0070] Reference Figure 2 , optionally, in the embodiments of the present application, when the lifting assembly 130 can include a screw 131 and a slider 132, the induction coil assembly drive system 100 can further include: a rotary encoder 160, the rotary encoder 160 can be connected to the screw 131, and the rotary encoder 160 is also electrically connected to the controller 150. In this way, the rotation speed of the screw 131 can be obtained by using the rotary encoder 160, and thus the moving speed of the slider 132 can be determined based on the rotation speed of the screw 131. Furthermore, the moving speed of the slider 132 detected by the rotary encoder 160 can be fed back to the controller 150, so that the controller 150 can perform closed-loop control on the moving speed of the slider, thereby improving the lifting drive accuracy of the induction coil assembly 200.

[0071] For the convenience of description, hereinafter, mainly taking the rotary drive 110 as a servo motor and the controller 150 as a servo controller of the servo motor as an example, the working principle of the induction coil assembly drive system 100 will be described.

[0072] When the rotary drive 110 is a servo motor and the controller 150 is a servo controller of the servo motor, the servo controller can send a pulse signal to the servo motor, and the rotation speed of the servo motor can be controlled by controlling the pulse frequency and the number of pulses, so that the lifting speed of the induction coil assembly 200 can be controlled.

[0073] Exemplarily, the pitch of the screw 131 of the lifting assembly 130 is h, and the two-stage reduction ratio composed of the first sub-reducer 121 and the second sub-reducer 122 is i. The average speed of the rapid positioning of the induction coil assembly 200 at the initial stage of the crystal growth process is V 快 , the rotation speed of the rotary driver 110 needs to be adjusted to R 快 = iV 快 / h. During the process, when the process requires the average speed of the slow positioning of the induction coil assembly 200 to be V 慢min , the rotation speed of the rotary driver 110 needs to be adjusted to R 慢min = iV 慢min / h. When the process requires the average speed of the slow positioning of the induction coil assembly 200 to be V 慢max , the rotation speed of the rotary driver 110 needs to be adjusted to R 慢max = iV 慢max / h.

[0074] In practice, there is sometimes a difference of 10 to 10 慢max times of the order of magnitude between V 慢min and V 3 . At the same time, there is sometimes a difference of 10 快 times of the order of magnitude between V 慢min and V 4 . There is a difference of 10 times of the order of magnitude between V 快 and V 慢max , that is, the rotation speed range of the rotary driver 110 to be adjusted is R 慢min ~R 快 , and the difference between the two is 10 4 times of the order of magnitude.

[0075] Due to the fact that the transmission system is not a completely rigid structure, and the load of the induction coil assembly 200 is relatively heavy with a large inertia, when the rotary driver 110 slows down to a certain value, it may cause elastic torsion of the transmission mechanism between the motor and the load, resulting in occasional vibration of the induction coil assembly 200 at the load end. The vibration of the induction coil assembly 200 can be obtained through experimental measurement. In the embodiment of the present application, the critical rotation speed at which the rotary driver 110 generates vibration is denoted as R 临界 ; among them, the magnitude of R 临界 is related to the weight of the load of the transmission structure. After calculation, the average speed V 临界 of the lifting and positioning of the induction coil assembly 200 = R 临界 h / i, and the actual test shows that V 慢min <V 临界 <V 慢max <V 快 , corresponding to the rotation speed R 慢min <R 临界<R 慢max <R 快 .

[0076] By adopting the solution provided in the embodiment of the present application, the controller 150 can be used to adjust the rotation driver 110 to move and stop alternately, so that the rotation driver 110 drives the induction coil assembly 200 to move at V 慢min ~V 快 The difference is 10 4 The speed range is multiple of the order of magnitude, and the slow speed range is V 慢min ~V 慢max , a difference of 10 to 10 3 Order of magnitude multiples.

[0077] For example, when it is necessary to make the induction coil assembly 200 at V within the time T, 慢min In the case of slow positioning at an average speed, the time T can be divided into N groups of time T1 and T2, that is, T = N (T1 + T2). During the time T1, the rotary drive 110 is adjusted to R1>R 临界 The rotational drive 110 is adjusted to remain stationary during the T2 time. The induction coil assembly 200 is slowly positioned at an average speed V according to the requirements. 慢min The calculated R 慢min The size of R 慢min Adjust the ratio of T1 and T2, as well as the size of N and R1, so that R 慢min =NT1R1 / T. Thus, the rotation driver 110 drives the induction coil assembly 200 to V 慢min Size and speed slow positioning.

[0078] In order to enable those skilled in the art to better understand the solutions provided by the embodiments of the present application, more specific embodiments are provided below for reference by those skilled in the art.

[0079] In one embodiment of the present application, the pitch of the screw 131 of the lifting assembly 130 is h=5 mm, the total reduction ratio of the first sub-reducer 121 and the second sub-reducer 122 is i=600, and the maximum speed of the rotary driver 110 is R 快 =6000r / min. In the initial stage of the crystal growth process, the average speed of the rapid positioning of the induction coil assembly 200 is V 快max =50mm / min.

[0080] Through testing, it is found that when the rotation speed of the rotary drive 110 drops to R 临界 =1r / min=below 60r / h, when the positioning speed of the induction coil assembly 200 drops to 0.5mm / h, occasional vibrations may occur during the lifting process.

[0081] If it is necessary to make the average speed range of the fast and slow positioning of the induction coil assembly 200 be 1-30 mm / min, that is, V 快 = 30 mm / min, V 慢max = 1 mm / min, V 快 and V 慢max differ by 30 times. In this case, it is necessary to adjust the rotational speed range of the rotary drive 110 to be 120-3600 r / min. That is, R 快 = 3600 r / min, R 慢max = 120 r / min > R 临界 . In this way, the rotary drive 110 can operate at a uniform rotational speed theoretically.

[0082] If it is necessary to make the average speed range of the fast and slow positioning of the induction coil assembly 200 be 0.05 mm / h - 30 mm / min, that is, V 快 = 30 mm / min, V 慢min = 0.05 mm / h, V 快 and V 慢min differ by 36000 times. V 慢max and V 慢min differ by 1200 times. In this case, it is necessary to adjust the rotational speed range of the rotary drive 110 to be 6 r / h - 3600 r / min. That is, R 快 = 3600 r / min, R 慢min = 6 r / h < R 临界 .

[0083] When the rotary drive 110 rotates at a uniform speed at a rotational speed of R 慢min = 6 r / h, occasional vibration will occur during the process of driving the induction coil assembly 200 to lift and lower. By adopting the solution provided in the embodiment of the present application, it is possible to control the rotary drive 110 to alternately stop and move, so that the average speed of the rotary drive 110 driving the induction coil assembly 200 to slowly lift and lower reaches V 慢min = 0.05 mm / h, V 慢min = 0.05 mm / h.

[0084] It can be understood that the induction coil assembly 200 slowly positions 0.05 mm within 1 h. Divide T = 1 h = 60 min into N groups of T1 and T2, and control the rotary drive 110 to operate at a rotational speed of R1 = 2 r / min > R 临界 during the T1 time. And it stops during the T2 time.

[0085] According to the average speed V 慢min = 0.05 mm / h of the slow positioning of the induction coil assembly 200, it is calculated that R 慢min = 6 r / h. According to R1 = 2 r / min and R慢min = 6r / h, and according to the actual requirements during the crystal growth process, adjust the magnitudes of T1, T2, and N. For example, T = 1h = 60min can be divided into N = 6 groups of T1 and T2, where T1 = 0.5min and T2 = 9.5min, such that R 慢min = NT1R1 / T = 0.1r / min = 6r / h. Thus, the rotary drive 110 drives the induction coil assembly 200 to slowly position at an average speed of V 慢min = 0.05mm / h.

[0086] In an embodiment of the present application, the induction coil assembly 200 is fixedly connected to the slider 132 in the lifting assembly 130 through an adapter plate, and the slider 132 drives the induction coil assembly 200 to perform lifting and positioning. The rotary encoder 160 can be connected to the top end of the screw 131 of the lifting assembly 130 through a third coupling. The rotary encoder 160 is used to detect the rotation angle of the screw 131 in the lifting assembly 130 to determine the lifting displacement and speed of the induction coil assembly 200, and feed back the lifting displacement and speed signals of the induction coil assembly 200 to the controller 150. The controller 150 compares the displacement and speed fed back by the rotary encoder 160 with the adjusted and set displacement and speed, and through calculation, converts them into drive pulses and sends them to the rotary drive 110 for compensation. In this way, the positioning accuracy of the induction coil assembly drive system 100 can be greatly improved.

[0087] Illustrate with an example as follows: When the rotary drive 110 needs to drive the induction coil assembly 200 to slowly position at an average speed of V 慢max = 1mm / min for 60mm within a certain period of time. That is, the rotary drive 110 needs to rotate at an average rotational speed of R 慢max = 120r / min to reach 7200 revolutions, and the screw 131 of the lifting assembly 130 needs to rotate synchronously with the rotary drive 110. During the process that the rotary encoder 160 detects that the number of revolutions of the screw 131 reaches 7200, it detects the actual number of revolutions in real time and feeds back the detection data to the controller 150. Suppose when the rotary drive 110 should rotate 1200 revolutions, the rotary encoder 160 actually detects that the number of revolutions of the screw 131 is 1199. The rotary encoder 160 feeds back the detection data to the controller 150, and the controller 150 performs motion compensation on the rotary drive 110 to ensure the accuracy of the positioning accuracy.

[0088] An embodiment of the present application provides a control method for an induction coil assembly drive system, where the induction coil assembly drive system is any one of the induction coil assembly drive systems 100 provided in the embodiments of the present application.

[0089] Refer to Figure 6, the control method of the induction coil assembly driving system provided by the embodiments of the present application may include:

[0090] Step 310, based on the target lifting speed of the induction coil assembly within a preset time period, determine the theoretical rotation speed of the rotary driver, where the theoretical rotation speed is the rotation speed at which the rotary driver operates uniformly within the preset time period.

[0091] Exemplarily, in the embodiments of the present application, the controller 150 may be used to determine the theoretical rotation speed of the rotary driver 110 based on the target lifting speed of the induction coil assembly 200 within a preset time period, where the theoretical rotation speed is the rotation speed at which the rotary driver 110 operates uniformly within the preset time period.

[0092] Step 320, determine whether the theoretical rotation speed of the rotary driver is less than or equal to a preset rotation speed, where the preset rotation speed is the critical rotation speed at which the rotary driver generates vibration.

[0093] Exemplarily, in the embodiments of the present application, the controller 150 may be used to determine whether the theoretical rotation speed of the rotary driver 110 is less than or equal to the preset rotation speed, where the preset rotation speed is the critical rotation speed at which the rotary driver 110 generates vibration.

[0094] Step 330, when the theoretical rotation speed of the rotary driver is less than or equal to the preset rotation speed, control the rotary driver to alternately stop operating and operate at the target rotation speed within the preset time period, so that the average rotation speed of the rotary driver within the preset time period is equal to the theoretical rotation speed, where the target rotation speed is greater than the preset rotation speed.

[0095] Exemplarily, in the embodiments of the present application, when the theoretical rotation speed of the rotary driver 110 is less than or equal to the preset rotation speed, the controller 150 may be used to control the rotary driver 110 to alternately stop operating and operate at the target rotation speed within the preset time period, so that the average rotation speed of the rotary driver 110 within the preset time period is equal to the theoretical rotation speed, where the target rotation speed is greater than the preset rotation speed.

[0096] Further, in the embodiments of the present application, the control method of the induction coil assembly driving system may further include:

[0097] When the theoretical rotation speed is greater than the preset rotation speed, control the rotary driver to operate at the theoretical rotation speed within the preset time period to drive the induction coil assembly to lift.

[0098] Exemplarily, in the embodiments of the present application, the controller 150 may be used to control the rotary driver 110 to operate at the theoretical rotation speed within the preset time period to drive the induction coil assembly 200 to lift.

[0099] An embodiment of the present application provides a readable storage medium, on which a program or instruction is stored. When the program or instruction is executed by a processor, the steps of the control method of any induction coil assembly driving system provided by the embodiment of the present application are implemented.

[0100] In this way, in the embodiment of the present application, the rotary driver 110 can be made to alternately stop running and run at a target speed. Wherein, when the rotary driver 110 runs at the target speed, the target speed can be greater than the critical speed at which the rotary driver 110 generates vibration. In this way, vibration of the rotary driver 110 can be avoided, thereby improving the driving accuracy of the rotary driver 110. Furthermore, the induction coil assembly 200 can be driven to lift more precisely by using the rotary driver 110 and the lifting assembly 130.

[0101] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device.

[0102] Although the embodiments of the present application have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the embodiments of the present application. The scope of the embodiments of the present application is defined by the appended claims and their equivalents.

Claims

1. An induction coil assembly driving system, which is applied to semiconductor process equipment, is characterized in that Comprising: A rotary drive (110); A lifting assembly (130), the rotary drive (110) is drivingly connected to the lifting assembly (130), and the lifting assembly (130) is used for drivingly connecting with an induction coil assembly to drive the induction coil assembly to lift; and, A controller (150), configured to determine a theoretical rotational speed of the rotary drive (110) based on a target lifting speed of the induction coil assembly within a preset time period, wherein the theoretical rotational speed is the rotational speed at which the rotary drive (110) runs uniformly within the preset time period; Determine whether the theoretical rotational speed of the rotary drive (110) is less than or equal to a preset rotational speed, wherein the preset rotational speed is a critical rotational speed at which the rotary drive (110) generates vibration; In the case where the theoretical rotational speed of the rotary drive (110) is less than or equal to the preset rotational speed, control the rotary drive (110) to alternately stop running and run at a target rotational speed within the preset time period, so that the average rotational speed of the rotary drive (110) within the preset time period is equal to the theoretical rotational speed, wherein the target rotational speed is greater than the preset rotational speed.

2. The induction coil assembly driving system according to claim 1, wherein In the case where the theoretical rotational speed of the rotary drive (110) is less than or equal to the preset rotational speed, within the preset time period, The number of times the rotary drive (110) switches to the stopped running state is multiple times, and the rotary drive (110) maintains a first time period in the stopped running state each time; The number of times the rotary drive (110) switches to the state of running at a target rotational speed is equal to the number of times the rotary drive (110) switches to the stopped running state, and the rotary drive (110) maintains a second time period in the state of running at a target rotational speed each time; The sum of the cumulative time periods that the rotary drive (110) is in the stopped running state and the cumulative time periods that the rotary drive (110) is in the state of running at a target rotational speed is equal to the preset time period.

3. The induction coil assembly drive system according to claim 1, wherein The controller (150) is further configured to, in the case where the theoretical rotational speed is greater than the preset rotational speed, control the rotary drive (110) to run at the theoretical rotational speed within the preset time period to drive the induction coil assembly to lift.

4. The induction coil assembly driving system according to claim 1, characterized in that, The lifting assembly (130) includes a screw rod (131) and a slider (132), and the slider (132) is threadedly connected to the screw rod (131) to drive the slider (132) to move by using the rotating screw rod (131); The rotary drive (110) is drivingly connected to the screw rod (131), and the rotary drive (110) is used to drive the screw rod (131) to rotate; the slider (132) is used to connect with the induction coil assembly.

5. The induction coil assembly driving system according to claim 4, wherein, The induction coil assembly drive system further includes: a rotary encoder (160), the rotary encoder (160) is connected to the screw rod (131), and the rotary encoder (160) is also electrically connected to the controller (150).

6. The induction coil assembly driving system according to claim 4, wherein, The induction coil assembly driving system further includes a speed reducer (120), and the rotary driver (110) is drivingly connected to the screw (131) through the speed reducer (120).

7. The induction coil assembly driving system according to claim 6, characterized in that, The speed reducer (120) includes a first sub-speed reducer (121) and a second sub-speed reducer (122). Among them, the second sub-speed reducer (122) is a reversing speed reducer, and the second sub-speed reducer (122) is provided with a second power output shaft; The rotary driver (110) is drivingly connected to the first sub-speed reducer (121), the first sub-speed reducer (121) is drivingly connected to the second sub-speed reducer (122), the second power output shaft is arranged along the height direction of the induction coil assembly driving system, and the screw (131) is coaxially connected to the second power output shaft.

8. The induction coil assembly driving system according to claim 7, characterized in that, The first sub-speed reducer (121) is provided with a first power output shaft. The induction coil assembly driving system further includes an electromagnetic brake (140). The electromagnetic brake (140) includes a magnetic fixing member (141) and a magnetic attracting member (142). The magnetic attracting member (142) is circumferentially and limitedly connected to the first power output shaft; when the electromagnetic brake (140) is in a power-off state, the magnetic attracting member (142) is switched from a separated state to an attracted state to brake the first power output shaft by using the electromagnetic brake (140).

9. A control method for an induction coil assembly driving system, characterized in that, The induction coil assembly driving system is the induction coil assembly driving system according to any one of claims 1 to 8; The control method of the induction coil assembly driving system includes: Using the controller (150) to determine the theoretical speed of the rotary driver (110) based on the target lifting speed of the induction coil assembly within a preset time period, where the theoretical speed is the speed at which the rotary driver (110) runs at a constant speed within the preset time period; Using the controller (150) to determine whether the theoretical speed of the rotary driver (110) is less than or equal to a preset speed, where the preset speed is the critical speed at which the rotary driver (110) generates vibration; When the theoretical speed of the rotary driver (110) is less than or equal to the preset speed, using the controller (150) to control the rotary driver (110) to alternately stop running and run at a target speed within the preset time period, so that the average speed of the rotary driver (110) within the preset time period is equal to the theoretical speed, where the target speed is greater than the preset speed.

10. The control method of the induction coil assembly driving system according to claim 9, characterized in that The control method of the induction coil assembly driving system further includes: When the theoretical speed is greater than the preset speed, using the controller (150) to control the rotary driver (110) to run at the theoretical speed within the preset time period to drive the induction coil assembly to lift and lower.

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