Ignition device and furnace tube apparatus

Abstract

The application provides a kind of ignition device and furnace tube equipment, the ignition device includes: ignition cavity;At least one gas inlet pipe, located at the first end of the ignition cavity, is configured to pass into at least one ignition gas into the ignition cavity;Gas outlet pipe, located at the second end of the ignition cavity, is configured to guide the combustion products of ignition gas in the ignition cavity;Flow guide baffle is set in the ignition cavity and is close to the second end of the ignition cavity, the flow guide baffle includes a plurality of uniformly distributed flow guide holes;Wherein, the at least one gas inlet pipe extends from the first end of the ignition cavity to the second end of the ignition cavity and turns when reaching a set distance from the flow guide baffle, so that the nozzle of the at least one gas inlet pipe is directed towards the first end.The end of the gas inlet pipe is reversed by turning, which can improve the problems of unstable flame, uneven water vapor concentration and particle peeling off the inner wall of the ignition chamber.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to an ignition device and furnace tube equipment. Background Technology

[0002] Furnace tube equipment is widely used in semiconductor manufacturing processes, with atmospheric pressure oxidation being a common process. It is mainly divided into dry oxidation and wet oxidation. Wet oxidation uses the combustion of hydrogen and oxygen to generate water vapor, which is then introduced into the furnace tube cavity. At high temperatures, the water vapor reacts with the silicon wafer surface to form silicon oxide. Silicon oxide formed by wet oxidation has advantages such as fast oxidation speed and excellent film quality.

[0003] With the development of the process, the requirements for the uniformity of the film in wet oxidation are constantly increasing. However, the external ignition structure of the furnace tube has not been significantly improved over the decades, and the method of introducing water vapor into the furnace tube has also remained largely unchanged. Due to fluctuations in plant negative pressure and fluctuations introduced by the control process of the pressure control butterfly valve, the concentration distribution of water vapor is uneven and the flame fluctuates, resulting in many unstable factors in the wet oxidation process that urgently need to be addressed.

[0004] Therefore, it is necessary to provide more effective and reliable technical solutions. Summary of the Invention

[0005] This application provides an ignition device and furnace tube equipment, which can improve problems such as unstable flame in the ignition device, uneven water vapor concentration entering the furnace tube equipment, and particle peeling off the inner wall of the ignition chamber of the ignition device.

[0006] One aspect of this application provides an ignition device, comprising: an ignition chamber; at least one inlet pipe located at a first end of the ignition chamber and configured to introduce at least one ignition gas into the ignition chamber; an outlet pipe located at a second end of the ignition chamber and configured to discharge combustion products of the ignition gas in the ignition chamber, the second end and the first end being located on two opposite planes of the ignition chamber; and a flow guide baffle disposed within the ignition chamber and near the second end of the ignition chamber, the flow guide baffle including a plurality of uniformly distributed flow guide holes; wherein the at least one inlet pipe extends from the first end of the ignition chamber toward the second end and rotates when it reaches a predetermined distance from the flow guide baffle, such that the inlet of the at least one inlet pipe faces the first end.

[0007] In some embodiments of this application, the at least one air inlet pipe includes a first air supply pipe and a second air supply pipe, the second air supply pipe being sleeved outside the first air supply pipe, the end of the second air supply pipe protruding beyond the end of the first air supply pipe, and the second air supply pipe being used to deliver oxygen.

[0008] In some embodiments of this application, the first gas supply pipe includes an air inlet portion, a main body portion, and a rotating portion; the second gas supply pipe includes an air inlet portion, a main body portion, and a rotating portion, the delivery portion and the rotating portion of the second gas supply pipe are sleeved outside the delivery portion and the rotating portion of the first gas supply pipe, and the delivery portions of the first gas supply pipe and the second gas supply pipe pass through the first end of the ignition chamber.

[0009] In some embodiments of this application, the rotating portions of the first and second gas pipes are U-shaped bends.

[0010] In some embodiments of this application, the U-shaped bending structure is a right-angle structure or a circular arc structure.

[0011] In some embodiments of this application, the ignition device further includes: a bracket for supporting the rotating portions of the first gas supply pipe and the second gas supply pipe, one end of the bracket being connected to the inner wall of the ignition chamber, and the other end of the bracket being connected to the rotating portion of the second gas supply pipe.

[0012] In some embodiments of this application, the delivery portion of the second gas supply pipe is disposed along the inner wall of the ignition chamber.

[0013] In some embodiments of this application, the end of the at least one intake pipe is located on the horizontal central axis of the ignition chamber, and the end of the at least one intake pipe is located on the side near the second end of the ignition chamber.

[0014] In some embodiments of this application, the flow guide baffle includes a first flow guide baffle and a second flow guide baffle arranged in parallel, the second flow guide baffle being close to the air outlet pipe and the distribution density of the flow guide holes on the second flow guide baffle being greater than the distribution density of the flow guide holes on the first flow guide baffle.

[0015] In some embodiments of this application, the diameter of the guide hole on the second guide baffle is smaller than the diameter of the guide hole on the first guide baffle.

[0016] In some embodiments of this application, the diameters of the guide holes on the second guide baffle are the same, and the diameters of the guide holes on the first guide baffle are the same.

[0017] Another aspect of this application provides a furnace tube device, comprising: a reaction chamber, the reaction chamber including an inlet pipe and an exhaust pipe respectively disposed on both sides of the reaction chamber, the inlet pipe being disposed along the side wall of the reaction chamber, the inlet of the inlet pipe being located at the bottom of the reaction chamber, the outlet of the inlet pipe being located at the top of the reaction chamber, and the exhaust pipe being connected to the bottom of the reaction chamber; and an ignition device as described above, wherein the outlet pipe of the ignition device is connected to the inlet of the inlet pipe.

[0018] This application provides an ignition device and furnace tube equipment. The end of the air inlet pipe in the ignition device is rotated in the opposite direction, so that the combustion products have a buffer space. Combined with the flow guide baffle to guide the gas, it can improve the problems of unstable flame in the ignition device, uneven water vapor concentration entering the furnace tube equipment, and particle peeling off the inner wall of the ignition chamber of the ignition device. Attached Figure Description

[0019] The following accompanying drawings describe in detail the exemplary embodiments disclosed in this application. The same reference numerals denote similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting and exemplary, and the drawings are for illustrative purposes only and are not intended to limit the scope of this application. Other embodiments may similarly fulfill the inventive intent of this application. It should be understood that the drawings are not drawn to scale.

[0020] in:

[0021] Figure 1 This is a schematic diagram of an ignition device.

[0022] Figure 2 This is a schematic diagram of the ignition device described in the embodiments of this application;

[0023] Figure 3 This is a schematic diagram of the structure of the first gas supply pipe in the ignition device described in the embodiments of this application;

[0024] Figure 4 This is a schematic diagram of the structure of the second gas supply pipe in the ignition device described in the embodiments of this application;

[0025] Figure 5 This is a schematic diagram of the structure of at least one air intake pipe in the ignition device described in the embodiments of this application;

[0026] Figure 6 This is a schematic diagram of the structure of the first flow guide baffle in the ignition device described in the embodiments of this application;

[0027] Figure 7 This is a schematic diagram of the structure of the second flow guide baffle in the ignition device described in the embodiments of this application;

[0028] Figure 8 This is a first cross-sectional view of the ignition device described in the embodiments of this application;

[0029] Figure 9 This is a second cross-sectional view of the ignition device described in the embodiments of this application;

[0030] Figure 10 This is a schematic diagram of the furnace tube equipment described in the embodiments of this application. Detailed Implementation

[0031] The following description provides specific application scenarios and requirements for this application, intended to enable those skilled in the art to make and use the content of this application. Various partial modifications to the disclosed embodiments will be apparent to those skilled in the art, and the general principles defined herein can be applied to other embodiments and applications without departing from the spirit and scope of this application. Therefore, this application is not limited to the embodiments shown, but rather to the widest scope consistent with the claims.

[0032] The technical solution of the present invention will be described in detail below with reference to the embodiments and accompanying drawings.

[0033] Figure 1 This is a schematic diagram of the structure of an ignition device 100.

[0034] refer to Figure 1 As shown, the ignition device 100 includes: an ignition chamber 110; at least one inlet pipe 130 located at a first end of the ignition chamber 110, configured to introduce at least one ignition gas into the ignition chamber 110; and an outlet pipe 120 located at a second end of the ignition chamber 110, configured to discharge the combustion products of the ignition gas in the ignition chamber 110. The second end and the first end are located on two opposite planes of the ignition chamber 110. The at least one inlet pipe 130 includes a first gas supply pipe 131 and a second gas supply pipe 132. The first gas supply pipe 131 is used to supply hydrogen, and the second gas supply pipe 132 is used to supply oxygen. A portion of the second gas supply pipe 132 is sleeved outside the first gas supply pipe 131. When oxygen and hydrogen are introduced, oxygen surrounds the first gas supply pipe 131 to ensure that when oxygen and hydrogen leave the inlet pipe 130 and enter the ignition chamber 110, oxygen can surround hydrogen, improving combustion efficiency.

[0035] refer to Figure 1 As shown, the ignition chamber 110 is a cylindrical cavity. A heating structure, such as a resistance wire surrounding the outer surface of the ignition chamber 110, is provided on its outer surface. This heating structure heats the ignition chamber 110 to a high temperature of 650 to 750 degrees Celsius. Oxygen is then introduced through the second gas supply pipe 132, and hydrogen is introduced through the first gas supply pipe 131. The hydrogen and oxygen automatically combust at high temperature to generate water vapor, which is then introduced into the furnace tube equipment through the gas outlet pipe 120 for wet oxidation.

[0036] However, in the ignition device 100, instability in pressure and flow control can easily lead to unstable combustion flames and uneven steam concentration. Furthermore, the connection between the outlet pipe 120 of the ignition device 100 and the furnace tube is prone to uneven aging and atomization, which can generate particles over time, affecting process quality. In addition, for safety reasons, the flow control of hydrogen and oxygen needs to be based on flame detection. Once the flame disappears, the hydrogen flow must be shut off to prevent safety issues caused by pipeline leaks or ignition device malfunctions. However, due to airflow fluctuations, flame detection loss during the process is also a common problem.

[0037] Therefore, in view of the above problems, this application provides an ignition device and furnace tube equipment. The end of the gas inlet pipe in the ignition device is rotated in the opposite direction, so that the combustion products have a buffer space. Combined with the flow guide baffle to guide the gas, it can improve the problems of unstable flame in the ignition device, uneven water vapor concentration entering the furnace tube equipment and particle peeling on the inner wall of the ignition chamber of the ignition device.

[0038] Figure 2 This is a schematic diagram of the ignition device described in an embodiment of this application. The ignition device 200 described in this application will now be described in detail with reference to the accompanying drawings.

[0039] Embodiments of this application provide an ignition device 200, see reference. Figure 2 As shown, the ignition device 200 includes: an ignition chamber 210; at least one inlet pipe 230 located at the first end of the ignition chamber 210 and configured to introduce at least one ignition gas into the ignition chamber 210; an outlet pipe 220 located at the second end of the ignition chamber 210 and configured to discharge the combustion products of the ignition gas in the ignition chamber 210, the second end and the first end being located on two opposite planes of the ignition chamber 210 (i.e., the left and right ends in the figure); and a flow guide baffle 240 disposed in the ignition chamber 210 and close to the second end of the ignition chamber 210, the flow guide baffle 240 including a plurality of evenly distributed flow guide holes; wherein, the at least one inlet pipe 230 extends from the first end of the ignition chamber 210 towards the second end and rotates when it reaches a set distance from the flow guide baffle 240, so that the opening of the at least one inlet pipe 230 faces the first end.

[0040] refer to Figure 2As shown, the ignition device 200 can serve as an external ignition structure for the furnace tube equipment, providing steam to the furnace tube equipment. Specifically, the ignition chamber 210 is first heated to a high temperature of 650 to 750 degrees Celsius; then, oxygen and hydrogen are successively introduced into the ignition chamber 210 through at least one inlet pipe 230. The oxygen and hydrogen meet in the ignition chamber 210 and automatically combust at high temperature to generate steam, which then enters the furnace tube equipment through the outlet pipe 220.

[0041] Continue to refer to Figure 2 As shown, in the technical solution of this application, at least one intake pipe 230 extends from the first end of the ignition chamber 210 towards the second end and rotates when it reaches a set distance from the guide baffle 240, so that the opening of the at least one intake pipe 230 faces the first end. In this structure, the combustion product water vapor first moves towards the first end under the influence of airflow, and then flows back towards the second end under the influence of air pressure, passing through the guide baffle 240 and the outlet pipe 220. Figure 1 Compared to other ignition devices, the steam travels a longer path and has more buffer time, resulting in a more uniform steam concentration distribution. Furthermore, the baffle 240 further guides the steam flow, making the steam concentration distribution even more uniform. This can improve problems such as flame instability in ignition devices, uneven steam concentration entering the furnace tube, and particle shedding from the inner wall of the ignition chamber.

[0042] The structure of the ignition device described in the embodiments of this application will be described in detail below with reference to the accompanying drawings.

[0043] refer to Figure 2 As shown, the ignition device 200 includes an ignition chamber 210. The ignition chamber 210 is cylindrical in the horizontal direction. The ignition chamber 210 provides a reaction space for the combustion of oxygen and hydrogen, and provides a buffer space for the combustion product water vapor, so that the water vapor can be evenly distributed before entering the furnace tube equipment.

[0044] In some embodiments of this application, the ignition chamber 210 is made of quartz.

[0045] In some embodiments of this application, the diameter of the ignition chamber 210 is 120 to 180 mm. The wall thickness of the ignition chamber 210 is 2 to 6 mm. The length of the ignition chamber 210 is 300 to 600 mm.

[0046] Continue to refer to Figure 2 As shown, the ignition device 200 also includes at least one air inlet pipe 230, located at the first end of the ignition chamber 210 (i.e., Figure 2(Right end of the ignition chamber 210). The at least one intake pipe 230 is configured to introduce at least one ignition gas, such as oxygen and hydrogen, into the ignition chamber 210. The at least one intake pipe 230 extends from the first end of the ignition chamber 210 to the second end (i.e., the right end of the ignition chamber 210). Figure 2 The left end of the ignition chamber 210 extends and rotates when it reaches a set distance from the baffle 240, so that the opening of the at least one intake pipe 230 faces the first end.

[0047] Figure 1 At least one intake pipe 130 in the ignition device 100 shown faces the second end of the ignition chamber 110 (i.e., Figure 1 At the left end of the ignition chamber 110, the combustion product water vapor moves directly from the first end to the second end under the influence of the airflow. The water vapor buffer time is short, and the water vapor concentration distribution may not be uniform. Furthermore, at least one intake pipe 130 is located close to the second end, and the flame generated by combustion at this pipe may affect the second end, producing more quartz particles there, thus impacting the service life of the ignition chamber and the particle size of the process. Figure 2 In the ignition device 200 of the present application shown in the technical solution, the port of the at least one air inlet pipe 230 faces the first end after rotation. Therefore, the water vapor has more buffer time, which can improve the uniformity of water vapor concentration distribution. Moreover, the port is far from the inner wall of the ignition chamber, so it has less impact on the ignition chamber. In addition, it can also reduce the influence of flame on the water vapor when passing through the guide baffle.

[0048] Figure 3 This is a schematic diagram of the structure of the first gas supply pipe in the ignition device described in the embodiments of this application. Figure 4 This is a schematic diagram of the structure of the second gas supply pipe in the ignition device described in the embodiment of this application. Figure 5 This is a schematic diagram of the structure of at least one air intake pipe in the ignition device described in the embodiments of this application. The following is in conjunction with... Figures 3 to 5 The at least one intake pipe 230 is described in detail.

[0049] refer to Figure 3 , Figure 4 and Figure 5 As shown, the at least one air inlet pipe 230 includes a first air supply pipe 231 and a second air supply pipe 232. The second air supply pipe 232 is partially sleeved outside the first air supply pipe 231, and the end of the second air supply pipe 232 protrudes beyond the end of the first air supply pipe 231. The second air supply pipe 232 is used to transport oxygen, and the first air supply pipe 231 is used to transport hydrogen.

[0050] In some embodiments of this application, the end of the second gas supply pipe 232 protrudes 1 to 5 millimeters beyond the end of the first gas supply pipe 231.

[0051] A portion of the second gas supply pipe 232 is sleeved outside the first gas supply pipe 231. Therefore, when oxygen and hydrogen are introduced, oxygen surrounds the outside of the first gas supply pipe 231, and the end of the second gas supply pipe 232 protrudes beyond the end of the first gas supply pipe 231. This ensures that when oxygen and hydrogen leave the inlet pipe 230 and enter the ignition chamber 210, oxygen can surround hydrogen. The oxygen flow has a shielding effect on the hydrogen flow, ensuring the accumulation of hydrogen, which helps stabilize the flame shape, reduces false alarms in flame detection, improves combustion efficiency, and prevents hydrogen diffusion.

[0052] Continue to refer to Figure 3 , Figure 4 and Figure 5 As shown, the first air supply pipe 231 includes an air inlet portion 231A, a main body portion 231B, and a rotating portion 231C. The second air supply pipe 232 includes an air inlet portion 232A, a main body portion 232B, and a rotating portion 232C. The conveying portion 232B and the rotating portion 232C of the second air supply pipe 232 are sleeved outside the conveying portion 231B and the rotating portion 231C of the first air supply pipe 231. After the first air supply pipe 231 and the second air supply pipe 232 are sleeved together, the at least one air inlet pipe 230 also includes an air inlet portion 230A, a main body portion 230B, and a rotating portion 230C.

[0053] refer to Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, the delivery portion 231B of the first air supply pipe 231 and the delivery portion 232B of the second air supply pipe 232 (that is, the delivery portion 230B of at least one air intake pipe 230) pass through the first end of the ignition chamber 210, thereby connecting the inside and outside of the ignition chamber 210. The air intake portion 231A of the first air supply pipe 231 and the air intake portion 232A of the second air supply pipe 232 (that is, the air intake portion 230A of at least one air intake pipe 230) branch into two independent air intakes outside the ignition chamber 210.

[0054] Combustion gases enter the at least one intake pipe 230 through the intake portion 230A of the at least one intake pipe 230. Specifically, oxygen enters the second gas supply pipe 232 through the intake portion 232A of the second gas supply pipe 232; hydrogen enters the first gas supply pipe 231 through the intake portion 231A of the first gas supply pipe 231.

[0055] Then, the hydrogen and oxygen are supplied from the outside of the ignition chamber 210 to the inside of the ignition chamber 210 through the delivery portion 230B of the at least one inlet pipe 230. Specifically, hydrogen is supplied from the outside of the ignition chamber 210 to the inside of the ignition chamber 210 through the delivery portion 231B of the first gas delivery pipe 231; oxygen is supplied from the outside of the ignition chamber 210 to the inside of the ignition chamber 210 through the delivery portion 232B of the second gas delivery pipe 232. During the supply process, oxygen surrounds the outer wall of the first gas delivery pipe 231.

[0056] Finally, the hydrogen and oxygen gas rotate from the second end to the first end through the rotating portion 230C of the at least one inlet pipe 230, and the hydrogen and oxygen gas are ejected towards the first end. When the hydrogen and oxygen gas are ejected from the end of the at least one inlet pipe 230, because the oxygen surrounds the hydrogen gas and the end of the second gas delivery pipe 232 protrudes beyond the end of the first gas delivery pipe 231, the oxygen gas flow can surround the hydrogen gas flow, ensuring the accumulation of hydrogen gas, which helps stabilize the flame pattern, reduces false alarms in flame detection, improves combustion efficiency, and prevents hydrogen diffusion.

[0057] Continue to refer to Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, in some embodiments of this application, the rotating portion 231C of the first gas supply pipe 231 and the rotating portion 232C of the second gas supply pipe 232 (that is, the rotating portion 230C of at least one air inlet pipe 230) are U-shaped bends. In some embodiments of this application, the U-shaped bend is a right-angle structure or an arc structure. The arc structure allows for smoother gas flow and direction, preventing gas flow fluctuations that could affect the flame.

[0058] In some embodiments of this application, the air inlet portion 231A of the first air supply pipe 231 may be integrally manufactured with the conveying portion 231B, or the air inlet portion 231A may be externally connected. In some embodiments of this application, the air inlet portion 232A of the second air supply pipe 232 may be integrally manufactured with the conveying portion 232B, or the air inlet portion 232A may be externally connected.

[0059] In some embodiments of this application, the first gas supply pipe 231 is made of quartz. In some embodiments of this application, the second gas supply pipe 232 is made of quartz.

[0060] In some embodiments of this application, the inner diameter of the conveying portion 231B and the rotating portion 231C of the first gas supply pipe 231 is 3-7 mm. The outer diameter of the conveying portion 231B and the rotating portion 231C of the first gas supply pipe 231 is 4-10 mm. The outer diameter of the air inlet portion 231A of the first gas supply pipe 231 is three-eighths or one-quarter inch standard pipe diameter.

[0061] In some embodiments of this application, the end opening of the first gas delivery pipe 231 is constricted inward to further accumulate hydrogen gas. After the end opening of the first gas delivery pipe 231 is constricted inward, the inner diameter of the opening is 1.5-3.5 mm.

[0062] In some embodiments of this application, the inner diameter of the conveying portion 232B and the rotating portion 232C of the second gas supply pipe 232 is 9-15 mm. The outer diameter of the conveying portion 232B and the rotating portion 232C of the second gas supply pipe 232 is 14-20 mm. The outer diameter of the air inlet portion 232A of the second gas supply pipe 232 is one-half or three-eighths of an inch standard pipe diameter. The wall thickness of the second gas supply pipe 232 is 1.5-2.5 mm.

[0063] In some embodiments of this application, the distance between the second gas supply pipe 232 and the first gas supply pipe 231 is 2-4 mm.

[0064] In some embodiments of this application, the length of the rotating portion 230C of the at least one intake pipe 230 is 20 to 120 mm. The distance between the rotating portion 230C of the at least one intake pipe 230 and the second end of the ignition chamber 210 is 50 to 150 mm.

[0065] In some embodiments of this application, the delivery portion 230B of the at least one intake pipe 230 is along the inner wall of the ignition chamber 210 (specifically, as shown in the figure). Figure 2 The lower wall of the ignition chamber 210 is provided, specifically, the delivery portion 232B of the second air supply pipe 232 is provided along the inner wall of the ignition chamber 210 (the delivery portion 232B of the second air supply pipe 232 is welded to the inner wall of the ignition chamber 210). Because the at least one air intake pipe 230 has the rotating portion 230C, the at least one air intake pipe 230 cannot be like... Figure 1 The structure is located near the horizontal central axis of the ignition chamber, just like the structure in the ignition chamber. Instead, sufficient rotation space should be left for the rotating part 230C.

[0066] In some embodiments of this application, the end of the at least one air intake pipe 230 is located on the horizontal central axis of the ignition chamber 210 to prevent the flame from getting too close to the inner wall of the ignition chamber 210 and affecting the inner wall to generate quartz particles. The end of the at least one air intake pipe 230 is located on the side closer to the second end of the ignition chamber 210 to prevent the flame from getting too close to the first end, so as to provide sufficient buffer space for the combustion product water vapor.

[0067] Continue to refer to Figure 2 As shown, the ignition device 200 also includes a gas outlet pipe 220, located at the second end of the ignition chamber 210 (i.e., Figure 2 The left end of the ignition chamber 210 is configured to vent the ignition gas from the combustion product water vapor in the ignition chamber 210.

[0068] In some embodiments of this application, the exhaust pipe 220 is integrally manufactured with the ignition chamber 210. The exhaust pipe 220 may also be externally connected to the ignition chamber 210.

[0069] In some embodiments of this application, the material of the vent pipe 220 is quartz.

[0070] In some embodiments of this application, the outer diameter of the vent pipe 220 is 30-60 mm.

[0071] Continue to refer to Figure 2 As shown, the ignition device 200 further includes a flow guide baffle 240 disposed within the ignition chamber 210 and near its second end. The flow guide baffle 240 includes a plurality of evenly distributed flow guide holes. Specifically, the flow guide baffle 240 is disposed between the second end of the ignition chamber 210 and the rotating portion 230C of the at least one intake pipe 230. The plane of the flow guide baffle 240 is perpendicular to the horizontal central axis of the ignition chamber 210.

[0072] The flow guide baffle 240 includes multiple evenly distributed flow guide holes, which can guide the water vapor passing through the baffle 240, further improving the uniformity of water vapor concentration distribution. In addition, the flow guide baffle 240 can also block quartz particles, preventing quartz particles generated on the inner wall of the ignition chamber 210 from entering the furnace tube through the exhaust pipe 220. The flow guide baffle 240 can also reduce the impact of pressure difference on the flame.

[0073] Figure 6 This is a schematic diagram of the structure of the first flow guide baffle in the ignition device described in the embodiment of this application. Figure 7 This is a schematic diagram of the structure of the second flow guide baffle in the ignition device described in the embodiment of this application.

[0074] refer to Figure 2 , Figure 6 and Figure 7 As shown, in some embodiments of this application, the flow guide baffle 240 includes a first flow guide baffle 241 and a second flow guide baffle 242 arranged in parallel. The second flow guide baffle 242 is close to the air outlet pipe 220 and the distribution density of the flow guide holes on the second flow guide baffle 242 is greater than the distribution density of the flow guide holes on the first flow guide baffle 241.

[0075] In some embodiments of this application, the diameter of the flow guide hole on the second flow guide baffle 242 is smaller than the diameter of the flow guide hole on the first flow guide baffle 241.

[0076] In some embodiments of this application, the diameters of the guide holes on the second guide baffle 242 are the same, and the diameters of the guide holes on the first guide baffle 241 are the same.

[0077] In some embodiments of this application, the flow guide baffle 240 may also include a greater number of flow guide baffles, such as a first flow guide baffle, a second flow guide baffle, a third flow guide baffle, and a fourth flow guide baffle. The diameter of the flow guide holes on each flow guide baffle is the same. The farther away from the second end of the ignition chamber 210, the larger the diameter of the flow guide holes on the flow guide baffle.

[0078] In some embodiments of this application, the shape of the guide hole includes circular or elliptical shapes, etc.

[0079] In some embodiments of this application, the positions of the guide holes on adjacent guide baffles are staggered to enhance the guiding effect of the guide baffles and the effect of blocking quartz particles.

[0080] In some embodiments of this application, the thickness of the first flow guide baffle 241 is 3-7 mm. The diameter of the flow guide hole on the first flow guide baffle 241 is 7-17 mm.

[0081] In some embodiments of this application, the thickness of the second flow guide baffle 242 is 2-7 mm. The diameter of the flow guide holes on the second flow guide baffle 242 is 3-7 mm.

[0082] In some embodiments of this application, the distance between the second flow guide baffle 242 and the second end of the ignition chamber 210 is 30 to 800 mm.

[0083] In some embodiments of this application, the distance between the first flow guide baffle 241 and the second flow guide baffle 242 is 20-30 mm.

[0084] Figure 8 This is a first cross-sectional view of the ignition device described in an embodiment of this application. Specifically, Figure 8 For along Figure 2The cross-sectional view created by the dashed line AA.

[0085] refer to Figure 8 As shown, in some embodiments of this application, the ignition device 200 further includes: a bracket 250 for supporting the rotating portions of the first gas supply pipe 231 and the second gas supply pipe 232, one end of the bracket 250 being connected to the inner wall of the ignition chamber 210, and the other end of the bracket 250 being connected to the rotating portion 232C of the second gas supply pipe 232.

[0086] In some embodiments of this application, the support 250 is made of quartz.

[0087] In some embodiments of this application, the connection between the bracket 250 and the rotating portion 232C of the second gas supply pipe 232 and the inner wall of the ignition chamber 210 is by welding.

[0088] In some embodiments of this application, the thickness of the bracket 250 is 4-10 mm.

[0089] Figure 9 This is a second cross-sectional view of the ignition device described in an embodiment of this application. Specifically, Figure 9 For along Figure 2 The cross-sectional view created by the dashed line BB.

[0090] refer to Figure 9 As shown, the rotating portion 230C of the at least one intake pipe 230 is U-shaped. The two sides of the U-shaped portion are located on the horizontal central axis of the ignition chamber 210 and the inner wall of the chamber, respectively.

[0091] In some embodiments of this application, the ignition device 200 further includes a heating structure (not shown) disposed on the outer wall of the ignition cavity 210. The heating structure is, for example, a resistance wire surrounding the outer surface of the ignition cavity 210. The heating structure can heat the ignition cavity 210 to a high temperature of 650 to 750 degrees Celsius.

[0092] In some embodiments of this application, the ignition device 200 further includes a flame detection device (not shown in the figure), disposed on the outer wall of the ignition chamber 210, corresponding to the end of the at least one air inlet pipe 230. The flame detection device is used to detect the flame combustion at the end of the at least one air inlet pipe 230. When the flame disappears, the hydrogen supply is stopped.

[0093] Table 1

[0094]

[0095] Table 1 shows the ignition devices described in the embodiments of this application (i.e., Figure 2 The ignition device shown) and Figure 1 The differences in the performance of the ignition devices are shown in Table 1. As can be seen from Table 1, the ignition device described in this application results in more uniform water vapor distribution, fewer particles entering the furnace tube, better flame stability, and a lower failure rate.

[0096] The ignition device described in this application embodiment has an inverted air inlet pipe that rotates in the opposite direction, providing a buffer space for combustion products. Combined with the flow guide baffle to guide the gas flow, this can improve problems such as unstable flame, uneven water vapor concentration entering the furnace tube, and particle shedding from the inner wall of the ignition chamber.

[0097] Figure 10 This is a schematic diagram of the furnace tube equipment described in the embodiments of this application.

[0098] Embodiments of this application also provide a furnace tube device 300, see reference. Figure 10 As shown, the furnace tube device 300 includes: a reaction chamber 310, the reaction chamber 310 including an inlet pipe 320 and an exhaust pipe 330 respectively disposed on both sides of the reaction chamber 310, the inlet pipe 320 being disposed along the side wall of the reaction chamber 310, the inlet of the inlet pipe 320 being located at the bottom of the reaction chamber 310, the outlet of the inlet pipe 320 being located at the top of the reaction chamber 310, and the exhaust pipe 330 being connected to the bottom of the reaction chamber 310; and the ignition device 200 described in this application embodiment, wherein the outlet pipe 220 of the ignition device 200 is connected to the inlet of the inlet pipe 320.

[0099] The detailed structure of the ignition device 200 has been described above and will not be repeated here.

[0100] refer to Figure 10 As shown, the ignition device 200 is connected to the reaction chamber 310. Hydrogen and oxygen are introduced into the ignition device 200 and burned to generate water vapor. The water vapor passes through the inlet pipe 320 along the outer wall of the side wall of the reaction chamber 310 to the top cavity of the reaction chamber 310, and then enters the center of the reaction chamber 310 through the water vapor diffusion holes. The water vapor reacts with the wafer and is discharged to the plant exhaust pipe through the exhaust pipe 330 at the bottom of the reaction chamber 310.

[0101] In the ignition device 200 described in this application embodiment, the generated water vapor concentration is uniformly distributed, and the uniform concentration of water vapor entering the reaction chamber 310 can improve the effect of water vapor reaction with the wafer. Furthermore, the ignition device 200 has higher reliability, fewer safety issues, and a lower probability of failure, ensuring the operation of the reaction chamber 310.

[0102] In some embodiments of this application, the furnace tube device 300 may also include equipment such as a wafer boat for carrying wafers (not shown in the figures).

[0103] The ignition device and furnace tube equipment described in this application have an inverted end of the air inlet pipe in the ignition device, which provides a buffer space for combustion products. Combined with the flow guide baffle to guide the gas flow, this can improve problems such as unstable flame in the ignition device, uneven water vapor concentration entering the furnace tube equipment, and particle peeling off the inner wall of the ignition chamber of the ignition device.

[0104] In summary, after reading this application, those skilled in the art will understand that the foregoing application content is presented by way of example only and is not restrictive. Although not explicitly stated herein, those skilled in the art will understand that this application is intended to encompass various reasonable changes, improvements, and modifications to the embodiments. These changes, improvements, and modifications are all within the spirit and scope of the exemplary embodiments of this application.

[0105] It should be understood that the term "and / or" as used in this embodiment includes any or all combinations of one or more of the associated listed items. It should be understood that when an element is referred to as "connected" or "coupled" to another element, it may be directly connected or coupled to the other element, or there may be an intermediate element.

[0106] Similarly, it should be understood that when an element such as a layer, region, or substrate is referred to as being "on" another element, it may be directly on that other element, or there may be intermediate elements present. Conversely, the term "directly" means without intermediate elements. It should also be understood that the terms "comprising," "including," "including," or "comprises," when used in this application, indicate the presence of the described features, integrals, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or groups thereof.

[0107] It should also be understood that although the terms first, second, third, etc., may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. Therefore, without departing from the teachings of this application, a first element in some embodiments may be referred to as a second element in other embodiments. The same reference numerals or the same reference signs denote the same elements throughout the specification.

[0108] Furthermore, this application specification describes exemplary embodiments by referring to idealized exemplary cross-sectional views and / or plan views and / or perspective views. Therefore, differences from the illustrated shapes are foreseeable due to factors such as manufacturing techniques and / or tolerances. Therefore, exemplary embodiments should not be construed as limited to the shapes of the regions shown herein, but should include deviations in shape caused, for example, by manufacturing processes. Thus, the regions shown in the figures are substantially schematic, and their shapes are not intended to illustrate the actual shapes of the regions of the device, nor are they intended to limit the scope of the exemplary embodiments.

Claims

1. An ignition device, characterized by The ignition device comprises: an ignition cavity; at least one gas inlet pipe arranged at a first end of the ignition cavity and configured to introduce at least one ignition gas into the ignition cavity; a gas outlet pipe arranged at a second end of the ignition cavity and configured to guide combustion products of the ignition gas in the ignition cavity, the second end and the first end being arranged at two opposite planes of the ignition cavity; a flow guide baffle arranged in the ignition cavity and close to the second end of the ignition cavity, the flow guide baffle comprising a plurality of uniformly distributed flow guide holes; wherein the at least one gas inlet pipe extends from the first end of the ignition cavity to the second end of the ignition cavity and turns when reaching a set distance from the flow guide baffle, so that a pipe opening of the at least one gas inlet pipe faces the first end.

2. The ignition device of claim 1, wherein The at least one gas inlet pipe comprises a first gas pipe and a second gas pipe, the second gas pipe being arranged outside the first gas pipe, and a distal end of the second gas pipe protruding from a distal end of the first gas pipe, the second gas pipe being configured to transport oxygen.

3. The ignition device of claim 2, wherein: the first gas pipe comprises an inlet portion, a main body portion, and a turning portion; the second gas pipe comprises an inlet portion, a main body portion, and a turning portion, the inlet portion and the turning portion of the second gas pipe being arranged outside the inlet portion and the turning portion of the first gas pipe, and the inlet portion of the first gas pipe and the second gas pipe penetrating the first end of the ignition cavity.

4. The ignition device of claim 3, wherein the turning portion of the first gas pipe and the second gas pipe is a U-shaped bending structure.

5. The ignition device of claim 4, wherein the U-shaped bending structure is a right-angle structure or a circular-arc structure.

6. The ignition device of claim 3, wherein The ignition device further comprises: a support configured to support the turning portion of the first gas pipe and the second gas pipe, one end of the support being connected to an inner wall of the ignition cavity, and the other end of the support being connected to the turning portion of the second gas pipe.

7. The ignition device of claim 3, wherein the inlet portion of the second gas pipe is arranged along an inner wall of the ignition cavity.

8. The ignition device of claim 1, wherein a distal end of the at least one gas inlet pipe is arranged on a horizontal central axis of the ignition cavity, and the distal end of the at least one gas inlet pipe is arranged on a side close to the second end of the ignition cavity.

9. The ignition device of claim 1 wherein, the flow guide baffle comprises a first flow guide baffle and a second flow guide baffle arranged in parallel, the second flow guide baffle being arranged close to the gas outlet pipe, and a distribution density of the flow guide holes on the second flow guide baffle being greater than a distribution density of the flow guide holes on the first flow guide baffle.

10. The ignition device of claim 9, wherein a hole diameter of the flow guide holes on the second flow guide baffle is smaller than a hole diameter of the flow guide holes on the first flow guide baffle.

11. The ignition device of claim 9, wherein the hole diameters of the flow guide holes on the second flow guide baffle are the same, and the hole diameters of the flow guide holes on the first flow guide baffle are the same.

12. A furnace tube apparatus, characterized by, The ignition device comprises: a reaction cavity, the reaction cavity comprising a gas inlet pipe and a gas outlet pipe arranged at two sides of the reaction cavity respectively, the gas inlet pipe being arranged along a side wall of the reaction cavity, an inlet of the gas inlet pipe being arranged at a bottom of the reaction cavity, and an outlet of the gas inlet pipe being arranged at a top of the reaction cavity, and the gas outlet pipe being connected to the bottom of the reaction cavity; the ignition device of any one of claims 1 to 11, the gas outlet pipe of the ignition device being in communication with the inlet of the gas inlet pipe.

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