Coating device for depositing a coating material on a substrate

Abstract

The present invention relates to a coating device (1) having a vacuum chamber (8), a crucible (6), at least one spray head (7) for preprocessing a coating material, and a spray pipe (5), wherein the spray pipe (5) is designed to guide the preprocessed coating material to the crucible (6) and is connected to the crucible (6), wherein at least one spray head (7) is movable between an operating position and a removal position, in the operating position, the spray head (7) supplies the preprocessed coating material to the spray pipe (5), and wherein at least one removal chamber (12) designed to be accessible from outside the vacuum chamber (8) is provided, the removal chamber is sealable relative to the vacuum chamber (8), and in the removal chamber at least one spray head (7) is arranged in its removal position to be hermetically separated from the vacuum chamber (8).

Description

Field of the Invention

[0001] The present invention relates to a coating device for depositing a coating material on a substrate, wherein the coating device has a vacuum chamber, a crucible arranged within the vacuum chamber, at least one spray head for preprocessing the coating material, and a spray pipe arranged within the vacuum chamber, wherein the spray pipe is designed to guide the coating material preprocessed in the at least one spray head to the crucible and is connected to the crucible. Background Art

[0002] Coating devices of the above type are known, for example, from WO 2016 / 042079A1. In this known coating device, two wire materials are continuously supplied as the coating material, and the coating material reaches the spray head, where the two material lines form a cathode and an anode and are connected to a DC voltage source, so that an arc is formed between the two material lines, and the supplied coating material in the form of the two material lines is thereby evaporated and / or liquefied. Further, an air flow is supplied to the spray head, and the air flow transports the evaporated or liquefied coating material to the crucible via the spray pipe. The coating material transported to the crucible is then completely evaporated within the heated crucible and is guided from the crucible to the substrate to be coated, where the substrate can be, for example, a steel strip. To ensure an oxygen-free environment, the coating process is carried out in the vacuum chamber at a pressure significantly below atmospheric pressure.

[0003] During the operation of this known coating device, the spray head may malfunction and must be replaced, and it may also be necessary to perform regular maintenance on the spray head. To remove the spray head from the vacuum chamber of the coating device, the entire coating device must be shut down, cooled, and completely ventilated, which takes a lot of time, is very expensive, and prolongs the duration of major production outages. Summary of the Invention

[0004] The object of the present invention is to obtain a solution for providing an improved coating device in a structurally simple manner, by which the costs for maintenance and replacement of the spray head can be reduced, and the operating interruptions can be minimized.

[0005] A coating device for depositing a coating material on a substrate according to the present invention has a vacuum chamber, one or more crucibles designed for heat insulation and, if necessary, re-evaporation, which are arranged within the vacuum chamber, at least one spray head designed for pre-processing the coating material, and a spray pipe arranged within the vacuum chamber. The spray pipe is designed to guide the coating material pre-processed in at least one spray head to the crucible and is connected to the crucible, wherein at least one spray head has an outlet for the pre-processed coating material and is designed to be movable between an operating position (in which at least one spray head is arranged to supply the pre-processed coating material to the spray pipe) and a removal position. Here, at least one removal chamber designed to be accessible from outside the vacuum chamber is provided, the removal chamber is designed to be sealable relative to the vacuum chamber, and in the removal chamber, at least the outlet of at least one spray head is arranged to be hermetically separated from the vacuum chamber in the removal position of the spray head. The crucible is designed for heat insulation and, if necessary, re-evaporating the coating material, wherein the actual heating of the coating material takes place in at least one spray head. In its operating position, at least one spray head is sealed steam-tightly relative to the spray pipe.

[0006] The present invention provides a coating device, which is characterized by a simple structure, and by means of this coating device, the spray head can be removed from the coating device and replaced, for example, with a new spray head in a relatively short time by simple means. Since at least one spray head is arranged to be hermetically separated from the vacuum chamber in the removal chamber in its removal position, for repair and maintenance purposes, the spray head can be removed from the removal chamber accessible from outside the vacuum chamber during the operation of the coating device without interrupting the vacuum in the vacuum chamber.

[0007] For a compact construction, in the design of the present invention, at least one spray head has at least one coating material supply part and at least one gas supply part, wherein in the operating position of at least one spray head, at least one coating material supply part and at least one gas supply part are designed to be guided into the vacuum chamber from outside the vacuum chamber through a vacuum feedthrough. With the vacuum feedthrough, each supply part is thus guided from outside the vacuum chamber through the vacuum feedthrough into the vacuum chamber to the spray head.

[0008] According to a design of the present invention, the movable design of at least one spray head is achieved by mounting at least one spray head at a flange (the flange is connected to the wall of the vacuum chamber via a bellows-shaped connecting element).

[0009] Here, in the design of the present invention, when at least one removal chamber is formed by the bellows-shaped connecting element, particularly little structural space is required. In the unfolded or open state of the bellows-shaped connecting element, the connecting element itself provides sufficient space to be able to accommodate the spray head to be accessed for maintenance or replacement reasons.

[0010] In order to remove the spray head during the operation of the coating device, it is provided in the design that, in the removal position, at least one spray head is completely arranged within a bellows-shaped connecting element. Here, the bellows-shaped connecting element is designed to be elastic and is designed in the type of an accordion-folded hose.

[0011] In a design of the present invention, another solution for removing the spray head during the operation of the coating device is given by forming at least one removal chamber by a chamber wall element and forming a seal by means of a sealing element against at least one spray head that can be moved from the operating position to the removal position and can be moved back. Here, the sealing element can be, for example, an O-ring.

[0012] According to a design of the present invention, at least one spray head is mounted at a flange with its longitudinal end facing away from the discharge opening, wherein a vacuum feedthrough is formed at the flange.

[0013] Here, the vacuum feedthrough can be formed at the flange in another design of the present invention. In this case, a conceivable variant is then provided, namely that the flange can be connected to the wall of the vacuum chamber via a bellows-shaped connecting element.

[0014] As an alternative design, it can also be envisaged that the vacuum feedthrough is arranged or designed within at least one spray head.

[0015] Furthermore, according to another design of the present invention, it can be envisaged that the removal chamber is arranged or designed to be within or outside the vacuum chamber.

[0016] In another design of the present invention, structurally advantageously, at least one spray head is mounted at a flange, wherein in the removal position, at least one spray head is completely arranged within the bellows-shaped connecting element. Thus, the spray head is movable between its operating position and its removal position via the flange (which flange is thus movably mounted at the vacuum chamber via the bellows-shaped connecting element).

[0017] In order to maintain the vacuum prevailing during the operation of the coating device in the vacuum chamber during the maintenance or replacement of the spray head, the present invention provides in another design that a locking device is movably arranged within the vacuum chamber between a release position and a locking position, wherein in the locking position, the locking device hermetically separates at least one spray head arranged in its removal position from the vacuum chamber.

[0018] The present invention provides in another design that at least one removal chamber has a ventilation valve. Once the locking device is arranged in the locking position and thus the spray head is hermetically separated from the vacuum chamber, the removal chamber (in which the spray head to be maintained or replaced is arranged) can be flooded, for example, with an inert gas, so that the cooled spray head can then be removed.

[0019] The injection tube (through which the evaporated or molten coating material is guided from the nozzle head to the crucible) is heated to a predetermined temperature during operation of the coating device to prevent condensation of the coating material in the injection tube. Here, the predetermined temperature can be, for example, a temperature above the condensation temperature of the supplied coating material. For this reason, in another embodiment of the present invention, it is provided that the injection tube is made of a high-temperature resistant material (such as graphite), wherein, for reasons of material compatibility, it may be necessary to cover the surface of the graphite in contact with the gas or vapor with a ceramic layer, or alternatively, the injection tube is made entirely of ceramic. Correspondingly, the present invention provides that the high-temperature resistant material can be graphite or ceramic.

[0020] In another embodiment, a particularly compact configuration of the coating device according to the present invention is provided in the following manner, i.e., at least one nozzle head at least partially extends into the injection tube in its operating position, and at least one nozzle head is designed to be movable coaxially in the injection tube and hermetically guided when moving out of the operating position in the direction of the removal position.

[0021] In order to keep the hot steam and liquid in the crucible even when the nozzle head needs to be removed or replaced for repair or maintenance purposes, in another embodiment of the present invention, it is provided that the injection tube has a locking valve, which is designed to be movable between a release position and a locking position, wherein the locking valve blocks the flow through the injection tube in the locking position. This particularly avoids contamination of the vacuum chamber by the evaporated material. Here, it is advantageous if the locking valve is made of a high-temperature resistant material.

[0022] Here, according to another advantageous embodiment, in the locking position of the locking valve, at least one nozzle head can be at least partially arranged within the injection tube.

[0023] It should be understood that, without departing from the scope of the present invention, the features mentioned above and to be explained below can be used not only in the respectively given combinations, but also in other combinations or alone.

[0024] Other details, features and advantages of the subject matter of the present invention will result from the following description in conjunction with the drawings, which show exemplary and preferred embodiments of the present invention. Description of the Drawings

[0025] The figures show:

[0026] Figure 1 is a schematic view of the coating device, wherein the nozzle head is arranged in the operating position,

[0027] Figure 2 is a schematic view of the coating device, wherein the nozzle head is arranged in the intermediate position,

[0028] Figure 3is a schematic view of a coating device, in which the spray head is arranged at the take-out position,

[0029] Figure 4 is a schematic view of another coating device, in which the spray head is arranged at the operating position. Detailed implementation mode

[0030] Figures 1 to 3 shows schematically a coating device 1 for depositing a coating material on a substrate according to the invention, where the substrate can be a strip of material made of steel. Here, for example, by means of drive rollers not shown in the figure, a wire material is supplied to the coating device 1 via the coating material supply parts 2 and 3, such that when the material strand supplied via the coating material supply part 2 is set as the cathode and the material strand supplied via the coating material supply part 3 is set as the anode by means of a DC power supply, an arc is formed between the two supplied wire material strands, thereby evaporating and / or at least melting the end portion on the front end side. Further, an air flow is supplied by the gas supply part 4, and the evaporated and / or melted coating material is introduced into the crucible 6 through this air flow and through the injection tube 5. The crucible can be heated, for example, by induction heating and can be heat-insulated to avoid heat loss. The substrate to be coated is moved at an appropriate feed rate at a short distance relative to the opening of the crucible 6, such that the evaporated coating material impinges on the surface of the substrate to be coated.

[0031] The unit for preprocessing the coating material and transferring it to the injection tube 5 is implemented as a spray head 7, which has the gas supply part 4 and the coating material supply parts 2 and 3. Further, the spray head 7 designed for preprocessing the coating material can have a heating part, a cooling part, and a nozzle, a cathode and an anode or a DC power supply for guiding the preprocessed coating material to the injection tube 5. The spray head 7 should have the elements required for forming an arc and an air flow, and the elements for supplying a wire or strip coating material can also be part of the spray head 7. At least the part of the spray head 7 facing the injection tube 5 is arranged within the vacuum chamber 8, which spray head has a discharge port 17, from which the coating material preprocessed in the spray head 7 is discharged. The crucible 6 and the injection tube 5 are also arranged within the vacuum chamber 8. The injection tube is designed to guide the coating material preprocessed in the spray head 7 to the crucible 6 and is connected to the crucible 6. To prevent the preprocessed coating material from condensing in the injection tube 5, the injection tube 5 is heated to a predetermined temperature, where the predetermined temperature can be, for example, a temperature higher than the condensation temperature of the supplied coating material. Therefore, the injection tube 5 can be made of a high-temperature resistant material, preferably made of graphite. For reasons of material compatibility, it may be necessary to cover the surface of the graphite in contact with the gas or the melt with a ceramic layer, or to be made entirely of ceramic.

[0032] The coating material supply units 2 and 3 and the gas supply unit 5 are guided from the atmosphere outside the vacuum chamber 8 into the vacuum or the interior of the vacuum chamber 8 by means of the vacuum feedthrough 18. Correspondingly, the coating material supply units 2 and 3 and the gas supply unit 5 are designed to be introduced into the vacuum chamber 8 from outside the vacuum chamber 8 via the vacuum feedthrough 18. As Figures 1 to 3 schematically shown, the vacuum feedthrough 18 is designed on the flange 9. The flange 9 is arranged outside the vacuum chamber 8 and is connected to the wall 11 of the vacuum chamber 8 via a bellows-shaped connecting element 10. Here, the spray head 7 is mounted at the flange 9, where the flange 9 is again connected to the vacuum chamber 8 via a connecting element 10 designed according to the shape of the bellows. The connecting element 10 designed according to the shape of the bellows is mounted at the passage opening of the vacuum chamber 8 such that the spray head 7 mounted at the flange 9 can move freely within the vacuum chamber 8. In Figure 1 it, the spray head 7 is arranged in the operating position, in which the spray head 7 is arranged in the form of supplying pre-processed coating material to the injection pipe 5. In the operating position, the discharge port 17 of the spray head 7 designed according to the shape of the nozzle, i.e., the part of the spray head 7 facing the injection pipe 5, extends into the injection pipe 5, where the discharge port 17 of the spray head 7 or the spray head 7 itself can move coaxially within the injection pipe 5. Here, the spray head 7 is hermetically guided within the injection pipe 5 and is arranged as much as possible in the manner of being pushed into the injection pipe 5 during the operation of the coating device 1. Thus, when the spray head 7 is arranged in the operating position, the injection pipe 5 hermetically connects the spray head 7 to the crucible 6.

[0033] If the spray head 7 is to be removed for reasons of repair or maintenance, the spray head 7 is first switched off by cutting off the gas supply via the gas supply unit 4 and no longer supplying coating material to the spray head 7 via the coating material supply units 2 and 3, where the power supply must also be switched off. Then, the locking valve 14 is moved from Figure 1 the release position shown to Figure 2 the locking position shown to seal the injection pipe 5 relative to the vacuum chamber 8 before the spray head 7 is completely pulled out of the injection pipe 5. Subsequently, the spray head 7 is pulled out of the injection pipe 5 for replacement, as Figure 2 shown. Thus, for removing the spray head 7, the spray head 7 is always arranged in its operating position where it forms a vapor seal against the injection pipe 5 until the locking valve 14 is arranged in its locking position. In Figure 2 it, the spray head 7 is in the intermediate position, in which the spray head 7 is arranged in a manner located outside the injection pipe 5. In this movement of the spray head 7, the bellows-shaped connecting element 10 is pulled apart, where the spray head 7 is arranged in a manner partially located within the connecting element 10 (see Figure 2)). The injection tube 5 is equipped with a locking valve 14 which can be closed from outside the vacuum chamber 8. The locking valve 14, also made of high-temperature resistant material, is used to keep the hot steam and liquid in the crucible 6, thus preventing the evaporation material from contaminating the vacuum chamber 8. Therefore, when the spray head 7 is arranged in its operating position, or its intermediate position, or its removal position, the locking valve 14 arranged in its closed position, i.e., the locked position (see, for example, Figure 2 ) blocks the flow through the injection tube 5, and the locking valve 14 must be arranged in its locked position before the spray head 7 is completely removed from the injection tube 5.

[0034] When the locking valve 14 is closed to spatially separate the spray head 7 from the hot steam and liquid in the crucible 6, the flange 9 and the spray head 7 arranged thereon move in a direction away from the crucible 6, thereby further pulling back the spray head 7 by continuously moving the bellows-shaped connecting element 10 outwards, as shown in Figure 3 . In Figure 3 , the spray head 7 is arranged in its removal position, in which the spray head 7 is completely arranged within the bellows-shaped connecting element 10. In the removal position of the spray head 7, the bellows-shaped connecting element 10 forms a removal chamber 12 in which the discharge port 17 of the spray head 7 is arranged. The removal chamber 12 is designed to be accessible from outside the vacuum chamber 8. In the embodiment shown in Figures 1 to 3 , the removal chamber 12 is designed outside the vacuum chamber 8. In an alternative design, it is also conceivable that the removal chamber 12 is designed and arranged within the vacuum chamber 8. The removal chamber 12 is designed to be sealable relative to the vacuum chamber 8, and in the removal chamber 12, the spray head 7 is arranged in its removal position to be hermetically separated from the vacuum chamber 8. For this purpose, when the spray head 7 is arranged in the removal position, the locking device 15, for example located at the wall portion 11 of the vacuum chamber 8, is closed, and the locking device 15 is arranged in the locked position here (see Figure 3 ), while the locking devices 15 in Figure 1 and 2 are arranged in the released position. The locking device 15 is used to maintain the vacuum prevailing in the vacuum chamber 8 and is manufactured to withstand a high pressure difference. Once the locking device 15 is closed and the spray head 7 and the vacuum chamber 8 are hermetically separated from each other, the bellows-shaped connecting element 10 in which the spray head 7 is located can be flooded by means of the vent valve 16 (preferably with an inert gas). As shown in Figures 1 to 3 , the vent valve 16 is arranged at the removal chamber 12. After flooding the removal chamber 12 and cooling the spray head 7, the flange 9 can be disassembled from the bellows-shaped connecting element 10 or the bellows-shaped connecting element 10 can be disassembled from the vacuum chamber 4, so that the cooled spray head 7 can then be removed.

[0035] Preferably, the coating device 1 is equipped with at least two spray heads 7 such that one spray head 7 is always in operation while the other spray head 7 can be replaced. In order to maintain operation even in the event of a defective spray head 7, the vacuum chamber 8 is preferably equipped with three spray heads 7 under ideal conditions, so that there is still a spray head 7 in operation even during maintenance.

[0036] The maintained or repaired spray head 7 or a new spray head 7 is then installed in the reverse order, where after the spray head 7 is flange-connected to the bellows-shaped connecting element 10, the connecting element 10 is first evacuated. Subsequently, the spray head 7 is heated, the locking device 15 is opened and then the locking valve 14 is opened so that the spray head 7 enters the vacuum chamber 8 from the removal chamber 12 and can then be pushed into the injection tube 5. Before the locking valve 14 is opened, the spray head 7 must have been at least partially arranged within the injection tube 5, in which the spray head 7 can move coaxially and is hermetically guided.

[0037] Figure 4 An alternative embodiment of the coating device 1 according to the invention is shown, where the same reference numerals are used for the same components as in the Figures 1 to 3 embodiment shown, and the above description in terms of function and mode of operation also applies to Figure 4 the components of the alternative embodiment, so that reference can be made to the above description of these components. In Figure 4 this, the spray head 7 is arranged in its operating position, in which the spray head 7 is arranged at least partially in a manner that is hermetically located within the injection tube 5. Figure 4 The embodiment of the coating device 1 shown does not have a vacuum feedthrough formed at the flange. Instead, in Figure 4 the embodiment shown, a vacuum feedthrough 19 is arranged and designed in the spray head 7. Here, Figure 4 the embodiment shown also does not have a flange at which the spray head 7 is installed. Instead, in Figure 4 the embodiment shown, it can be provided that the chamber wall element 20 forms the removal chamber 12. The chamber wall element 20 extends outside the vacuum chamber 8 at the wall portion 11 at the passage opening of the vacuum chamber 8 here. The chamber wall element 20 forms a seal against the outer wall 21 of the spray head 7 by means of a sealing element 22. With this design, the spray head 7 is designed to be movable in its operating position or its removal position, where the sealing element 22 seals the chamber wall element 20 and the outer wall 21 of the spray head 7 from each other. The sealing element 22 can be implemented as an O-ring, for example. In Figure 4In the illustrated embodiment, in the removal position of the spray head 7, the discharge port 17 is arranged within the removal chamber 12, wherein the removal chamber 12 can also be formed within the vacuum chamber 8 when the chamber wall element 20 extends within the vacuum chamber 8. To remove the spray head 7, first the locking valve 14 is closed, and then the spray head 7 is moved to its removal position, in which the discharge port 17 is arranged so as to be within the removal chamber 12. Then, the locking device 15 is moved to its locking position so that the removal chamber 12 is hermetically separated from the vacuum chamber 8, in order to subsequently flood the removal chamber 12 via the vent valve 16, as has already been described for Figures 1 to 3 the embodiment.

[0038] From Figures 1 to 4 the description, other embodiments can be conceived. For example, in the Figures 1 to 3 illustrated embodiment, the vacuum feedthrough can be designed within the spray head 7 instead of at the flange 9, as Figure 4 illustrated. It can also be conceived that in the Figure 4 illustrated embodiment, a flange is mounted at the longitudinal end of the spray head 7 facing away from the discharge port 17, and then a vacuum feedthrough is arranged at the flange instead of within the spray head 7.

[0039] In summary, the coating device 1 of the present invention for depositing a coating material on a substrate has been described above, wherein the coating device 1 has a vacuum chamber 8, a crucible 6 (which is arranged within the vacuum chamber 8), a spray head 7 for preprocessing the coating material, and a spray pipe 5 arranged within the vacuum chamber 8, and more than one spray head 7 for the crucible 6 can also be provided. The spray pipe 5 is designed to guide the coating material preprocessed in at least one spray head 7 to the crucible 6 and to connect with the crucible 6, wherein at least one spray head 7 is designed to be movable between an operating position and a removal position, and in the operating position, the spray head 7 is arranged so as to supply the preprocessed coating material to the spray pipe 5. Here, the coating device 1 also has a removal chamber 12 which is designed to be accessible from outside the vacuum chamber 8, the removal chamber 12 is designed to be sealable relative to the vacuum chamber 8, and in this removal chamber at least one spray head 7 is arranged in its removal position so as to be hermetically separated from the vacuum chamber 8.

[0040] The invention described is of course not limited to the embodiments described and shown. Obviously, many modifications that are obvious to a person skilled in the art can be made to the embodiments shown in the figures according to the intended application, without thereby departing from the scope of the invention. For example, a plurality of crucibles 6 can also be arranged in the vacuum chamber 8 to achieve, for example, a double-sided coating, where a plurality of injection tubes 5 can also be installed at the crucibles 6, and in each of the plurality of injection tubes 5, its own nozzle 7 is respectively arranged during the operation of the coating device 1. It is also conceivable that the coating device 1 has more than one vacuum chamber 8, where in each individual vacuum chamber 8, one or more crucibles 6 can be arranged, and each crucible is equipped with at least one injection tube 5, and then a nozzle 7 is arranged in the injection tube during operation. The invention includes all the content contained in the description and / or shown in the drawings, including content that is obvious to a person skilled in the art to deviate from the specific embodiments.

[0041] List of reference numerals

[0042] 1 Coating device

[0043] 2 Coating material supply section

[0044] 3 Coating material supply section (anode)

[0045] 4 Gas supply section

[0046] 5 Injection tube

[0047] 6 Crucible

[0048] 7 Nozzle

[0049] 8 Vacuum chamber

[0050] 9 Flange

[0051] 10 Bellows-shaped connecting element

[0052] 11 Wall part

[0053] 12 Removal chamber

[0054] 14 Locking valve

[0055] 15 Locking device

[0056] 16 Ventilation valve

[0057] 17 Exhaust port

[0058] 18 Vacuum feedthrough

[0059] 19 Vacuum feedthrough

[0060] 20 Chamber wall element

[0061] 21 Outer wall

[0062] 22 Sealing element.

Claims

1. A coating device (1) for depositing a coating material on a substrate, having a vacuum chamber (8), a crucible (6) arranged within the vacuum chamber (8), at least one spray head (7) for preprocessing the coating material, and a spray pipe (5) arranged within the vacuum chamber (8), wherein the spray pipe (5) is designed to guide the coating material preprocessed in the at least one spray head (7) to the crucible (6) and is connected to the crucible (6), wherein the at least one spray head (7) has an outlet (17) for the preprocessed coating material and is designed to be movable between an operating position and a removal position, in the operating position, the at least one spray head (7) is arranged to supply the preprocessed coating material to the spray pipe (5), and wherein at least one removal chamber (12) is provided which is designed to be accessible from outside the vacuum chamber (8), the removal chamber is designed to be sealable relative to the vacuum chamber (8), and in the removal chamber, at least the outlet (17) of the at least one spray head (7) is arranged to be hermetically separated from the vacuum chamber (8) in the removal position of the spray head (7). Characterized in that, wherein the spray pipe (5) has a locking valve (14), the locking valve is designed to be movable between a release position and a locking position, wherein the locking valve (14) blocks the flow through the spray pipe (5) in the locking position.

2. The coating device (1) according to claim 1, wherein the at least one spray head (7) has at least one coating material supply (2, 3) and at least one gas supply (4), wherein in the operating position of the at least one spray head (7), the at least one coating material supply (2, 3) and the at least one gas supply (4) are designed to be guided into the vacuum chamber (8) from outside the vacuum chamber (8) through vacuum feedthroughs (18, 19).

3. The coating device (1) according to claim 2, wherein the at least one spray head (7) is mounted at a flange (9), the flange being connected to the wall (11) of the vacuum chamber (8) via a bellows-like connecting element (10).

4. The coating device (1) according to claim 3, wherein the bellows-like connecting element (10) forms at least one removal chamber (12).

5. The coating device (1) according to claim 3, wherein in the removal position, the at least one spray head (7) is completely arranged within the bellows-like connecting element (10).

6. The coating device (1) according to claim 2, wherein a chamber wall element (20) forms the at least one removal chamber (12) and forms a seal against the at least one spray head (7) which is movable from the operating position to the removal position and can be moved back with the aid of a sealing element (22).

7. The coating device (1) according to claim 6, wherein the at least one spray head (7) is mounted at a flange with its longitudinal end facing away from the discharge opening (17), and wherein the vacuum feedthrough is formed at the flange (9).

8. The coating device (1) according to any one of claims 3 to 5, wherein the vacuum feedthrough (18) is formed at the flange (9).

9. The coating device (1) according to any one of claims 2 to 6, wherein the vacuum feedthrough (19) is designed and arranged within the at least one spray head (7).

10. The coating device (1) according to any one of claims 1 to 7, wherein the locking device (15) is arranged to be movable within the vacuum chamber (8) between a release position and a locked position, wherein in the locked position, the locking device (15) hermetically separates the at least one spray head (7) arranged in its removal position from the vacuum chamber (8).

11. The coating device (1) according to any one of claims 1 to 7, wherein the at least one removal chamber (12) has a ventilation valve (16).

12. The coating device (1) according to any one of claims 1 to 7, wherein the at least one spray head (7) at least partially projects into the spray pipe (5) in its operating position, and the at least one spray head (7) is coaxially movable and hermetically guided in the spray pipe (5) when being moved out of the operating position in the direction of the removal position.

13. The coating device (1) according to any one of claims 1 to 7, wherein in the locked position of the locking valve (14), the at least one spray head (7) is at least partially arranged within the spray pipe (5).

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