A fully automatic receiving machine for semiconductor materials

Abstract

The present invention discloses a fully automatic semiconductor material receiving machine, comprising: a material box access area, a material temporary storage area, a material access module, a manual sampling inspection, a temporary storage area for initial inspection, a material cover module for opening and closing the material box cover, a product receiving area, an electronic control system, and a machine frame. The present invention integrates the material box access area, the material temporary storage area, the material access module, the manual sampling inspection, the temporary storage area for initial inspection, the material cover module, and the product receiving area, thereby realizing the function of autonomous storage and management of semiconductor materials.

Description

Technical field:

[0001] The present invention belongs to the technical field of semiconductor material receiving equipment, and in particular relates to a fully automatic semiconductor material receiving machine. Background technology:

[0002] With the continuous development of modern industry, the automation level of semiconductor industry production is also gradually improving. Traditional semiconductor material receiving machines can realize the automatic operation of placing the products of the previous station into the empty material box. When the material box is full, it is necessary to manually take out the full material box and then transport it to the next workstation for operation. On the one hand, manual operation is labor-intensive and inefficient; on the other hand, the functions of the receiving machine are relatively simple. It lacks areas such as automatic opening and closing of the material box cover, auxiliary manual sampling, and storage of empty material boxes, making it difficult to realize the function of autonomous management and storage.

[0003] The information disclosed in this background technology section is only intended to enhance understanding of the overall background of the invention and should not be regarded as an admission or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the invention:

[0004] The object of the present invention is to provide a fully automatic semiconductor material receiving machine to overcome the above-mentioned defects in the prior art.

[0005] In order to achieve the above object, the present invention provides a fully automatic semiconductor material receiving machine, comprising:

[0006] The material box loading and unloading area is used to place the material boxes. The material boxes are loaded and unloaded by the overhead crane in this area, and the materials are also loaded and unloaded in this area;

[0007] Material temporary storage area, used for temporary storage of materials;

[0008] The material picking and placing module is used to pick and place materials in the material temporary storage area and the material box picking and placing area;

[0009] Manual sampling inspection and first inspection temporary storage area, used for the first inspection of products and manual sampling inspection, when sampling inspection or first inspection is required, it is convenient for manual taking and placing of materials;

[0010] Material switch cover module, used for material box switch cover;

[0011] Product receiving area, used to transfer the incoming materials from the previous workstation into the material box;

[0012] The electronic control system is used to control the operation of the material pick-up and place module and the material opening and closing cover module;

[0013] The rack is used to centralize the material box picking and placing area, material temporary storage area, material picking and placing module, manual sampling, first inspection temporary storage area, material opening and closing cover module, product receiving area and electronic control system.

[0014] Furthermore, as a preference, the material box taking and placing area is provided with a material box positioning box, and the material box is placed in the material box positioning box and taken and placed by an overhead crane.

[0015] Furthermore, preferably, the material temporary storage area is provided with a plurality of material box pallets, and the material boxes are clamped in the material box pallets.

[0016] Furthermore, as a preference, the end of the material box is an open structure, and a swing rod is provided on the edge of the end, and a slot matching the swing rod is left at the end. When the swing rod is stuck in the slot, the swing rod acts as a box cover to cover the end of the material box, and when the swing rod is moved out of the slot, the swing rod acts as a box cover to open from the end of the material box.

[0017] Furthermore, as a preference, the material taking and placing module includes an X-axial moving component, a Y-axial moving component, a Z-axial moving component and a clamping mechanism;

[0018] The X-axial moving assembly includes an X-axial transmission belt, an X-axial slider and an X-axial motor, wherein the X-axial transmission belt and the X-axial slider are respectively connected to the frame, and the X-axial motor is connected to the X-axial transmission belt to drive the X-axial transmission belt;

[0019] The Y-axis moving assembly includes a Y-axis slide, a Y-axis screw cylinder and a Y-axis slider. The Y-axis slide is arranged on the X-axis slider and the X-axis transmission belt. The Y-axis screw cylinder is arranged on the Y-axis slide, and the Y-axis slider is connected to the Y-axis screw cylinder.

[0020] The Z-axis moving assembly includes a Z-axis slide and a Z-axis slider, wherein the Z-axis slide is arranged on the Y-axis slider, and the Z-axis slider is arranged on the Z-axis slide;

[0021] The clamping mechanism includes a pair of clamping jaws and a clamping jaw adjusting screw cylinder. The clamping jaw adjusting screw cylinder is fixed on the Z-axial slide, and the pair of clamping jaws are connected to the clamping jaw adjusting screw cylinder.

[0022] Furthermore, as a preference, the manual sampling and first inspection temporary storage area is a support plate structure for placing materials.

[0023] Further, as a preference, the material switch cover module includes a base, a side positioning block of a material box, a Z-axial fixing seat, an up and down slide seat, an up and down slider and a switch cover motor. A support platform is provided at the bottom of the base, and the support platform is connected to the frame. A side adjustment motor is provided on the side positioning block of the material box, and the side adjustment motor is fixed on the support platform. The Z-axial fixing seat is arranged on the base, the up and down slide seat is arranged on the Z-axial fixing seat, the up and down slider is arranged on the up and down slide seat, the switch cover motor is arranged on the up and down slider, a switch cover column is provided on the switch cover column, a switch cover slot is provided on the switch cover slot, and the switch cover slot is matched with the swing arm.

[0024] Furthermore, as a preference, a material box position adjustment cylinder is further provided on the base, and a push bar is provided on the material box position adjustment cylinder, and the push bar is located outside the end of the material box.

[0025] Furthermore, as a preference, a fixing seat adjustment cylinder is further provided at the bottom of the Z-axis fixing seat, and the fixing seat adjustment cylinder is arranged on the base.

[0026] Furthermore, preferably, the product receiving area includes a material warehouse, a plurality of material box stations are provided in the material warehouse, the material warehouse is connected to the frame, the material box station is used to place the material box, and the incoming material from the previous station is transferred to the material box in the material warehouse.

[0027] Compared with the prior art, one aspect of the present invention has the following beneficial effects:

[0028] (1) The present invention integrates a material box pick-up and placement area, a material temporary storage area, a material pick-up and placement module, a manual sampling inspection area, a first inspection temporary storage area, a material switch cover module, and a product receiving area, thereby realizing the function of autonomous storage and management of semiconductor materials;

[0029] (2) The material handling module can realize the function of automatically taking and placing materials from different areas;

[0030] (3) The material opening and closing cover module can realize the function of automatically opening and closing the cover of the material box. Description of the drawings:

[0031] Figure 1 、 Figure 2 Schematic diagram of a fully automatic semiconductor material receiving machine of the present invention;

[0032] Figure 3 This is an enlarged schematic diagram of the material box of the present invention;

[0033] Figure 4 It is an enlarged schematic diagram of a local structure of the material box of the present invention;

[0034] Figure 5This is an enlarged schematic diagram of the material box positioning box of the present invention;

[0035] Figure 6 、 Figure 7 This is an enlarged schematic diagram of the material taking and placing module of the present invention;

[0036] Figure 8 、 Figure 9 、 Figure 10 This is an enlarged schematic diagram of the material switch cover module of the present invention;

[0037] Figure 11 、 Figure 12 It is a partial structural enlarged schematic diagram of the material switch cover module of the present invention;

[0038] Figure markings: 1-material box, 101-swing rod, 102-card slot, 2-material box pick-up and placement area, 3-material temporary storage area, 301-material box card plate, 4-material pick-up and placement module, 41-X axial moving component, 411-X axial transmission belt, 412-X axial slider, 413-X axial motor, 42-Y axial moving component, 421-Y axial slide, 422-Y axial screw cylinder, 423-Y axial slider, 43-Z axial moving component, 431-Z axial slide, 432-Z axial slider, 44-clamping mechanism, 441-clamping claw, 442-clamping claw adjusting screw cylinder , 5-manual random inspection, first inspection temporary storage area, 6-material switch cover module, 61-base, 62-material box side positioning block, 63-Z axial fixed seat, 64-up and down direction slide, 65-up and down direction slide, 66-switch cover motor, 67-support table, 68-side adjustment motor, 69-switch cover column, 610-switch cover slot, 611-material box position adjustment cylinder, 612-push bar, 613-fixed seat adjustment cylinder, 614-vertical baffle, 7-product receiving area, 71-material warehouse, 72-material box station, 8-electric control system, 9-rack, 10-material box positioning box. Specific implementation method:

[0039] The specific embodiments of the present invention are described in detail below, but it should be understood that the protection scope of the present invention is not limited by the specific embodiments.

[0040] The following is a brief summary of one or more aspects to provide a basic understanding of these aspects. This summary is not an exhaustive overview of all conceivable aspects and is neither intended to identify key or critical elements of all aspects nor to define the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed description that will be provided later.

[0041] Example 1:

[0042] like Figure 1 、 Figure 2 As shown, a fully automatic semiconductor material receiving machine includes:

[0043] The material box loading and unloading area 2 is used to place the material box 1. The material box 1 is loaded and unloaded in this area by the overhead crane, and the materials are also loaded and unloaded in this area. There are four workstations in this area, and each workstation can be used to place an empty material box 1 or a fully loaded material box 1.

[0044] Material temporary storage area 3, used for temporary storage of materials;

[0045] The material loading and unloading module 4 is used to load and unload materials in the material temporary storage area 3 and the material box loading and unloading area 2;

[0046] Manual sampling and first inspection temporary storage area 5 is used for the first inspection of products and manual sampling. When sampling or first inspection is required, it is convenient for manual taking and placing of materials;

[0047] Material switch cover module 6, used for opening and closing the cover of the material box 1;

[0048] The product receiving area 7 is used to transfer the incoming materials from the previous station into the material box 1;

[0049] The electric control system 8 is used to control the operation of the material taking and placing module 4 and the material opening and closing cover module 6;

[0050] The frame 9 is used to centralize the material box picking and placing area 2, the material temporary storage area 3, the material picking and placing module 4, the manual sampling and first inspection temporary storage area 5, the material opening and closing cover module 6, the product receiving area 7 and the electronic control system 8.

[0051] Further, such as Figure 3 、 Figure 4 、 Figure 5 As shown, as an example, the material box placement area 2 is provided with a material box positioning box 10, and the material box 1 is placed in the material box positioning box 10 and placed by an overhead crane. Each material box positioning box is provided with a plurality of material box stations, and the material box is placed in the material box positioning box and placed on the corresponding station.

[0052] Further, such as Figure 1 、 Figure 2 As shown, preferably, the material temporary storage area 3 is provided with a plurality of material box clamping plates 301, and the material box 1 is clamped in the material box clamping plates 301. The material box clamping plates 301 can play a role of limiting and separating the material box 1.

[0053] Further, such as Figure 3 、 Figure 4As shown, preferably, the end of the material box 1 is an open structure, and a swing rod 101 is provided on the edge of the end, and a card slot 102 matching the swing rod 101 is left at the end. When the swing rod 101 is stuck in the card slot 102, the swing rod 101 serves as a box cover to cover the end of the material box 1. When the swing rod 101 is moved out of the card slot 102, the swing rod 101 serves as a box cover to open from the end of the material box 1.

[0054] Further, such as Figure 6 、 Figure 7 As shown, as an example, the material taking and placing module 4 includes an X-axial moving component 41, a Y-axial moving component 42, a Z-axial moving component 43 and a clamping mechanism 44;

[0055] The X-axis moving assembly 41 includes an X-axis transmission belt 411, an X-axis slider 412 and an X-axis motor 413. The X-axis transmission belt 411 and the X-axis slider 412 are respectively connected to the frame 9. The X-axis motor 413 is connected to the X-axis transmission belt 411 to drive the X-axis transmission belt 411 for transmission.

[0056] The Y-axis moving assembly 42 includes a Y-axis slide 421, a Y-axis screw cylinder 422, and a Y-axis slider 423. The Y-axis slide 421 is arranged on the X-axis slider 412 and the X-axis transmission belt 411. The Y-axis screw cylinder 422 is arranged on the Y-axis slide 421. The Y-axis slider 423 is connected to the Y-axis screw cylinder 422.

[0057] The Z-axis moving assembly 43 includes a Z-axis slide 431 and a Z-axis slider 432. The Z-axis slide 431 is arranged on the Y-axis slider 423, and the Z-axis slider 432 is arranged on the Z-axis slide 431.

[0058] The clamping mechanism 44 includes a pair of clamping jaws 441 and a clamping jaw adjusting screw cylinder 442 . The clamping jaw adjusting screw cylinder 442 is fixed on the Z-axis slide 431 , and the pair of clamping jaws 441 are connected to the clamping jaw adjusting screw cylinder 442 .

[0059] During operation, the X-axis motor 413 drives the X-axis transmission belt 411 to work, so that the Y-axis slide 421 moves along the X-axis slider 412 under the action of the X-axis transmission belt 411 to realize the position adjustment of the Y-axis slide 421 in the X-axis direction; the Y-axis screw cylinder 422 works to drive the Y-axis slider 423 to move on the Y-axis slide 421 to realize the position adjustment of the Y-axis slider 423 in the Y-axis direction; the Z-axis slider 432 moves along the Z-axis slide 431 to realize the position adjustment of the Z-axis slider 432 in the Z-axis direction (wherein the Z-axis slide 431 can also be a screw cylinder structure, and the Z-axis slider 432 moves above it to realize the Z-axis position adjustment). After the positions in the X-axis, Y-axis, and Z-axis directions are adjusted, the clamping jaws 411 are adjusted by the screw cylinder 442. After the gap is adjusted, the clamping jaws 411 extend into the material box 1 to be taken out or put down the material box 1.

[0060] The material picking and placing module 4 can be used to take out an empty material box 1 from the material box picking and placing area 2, place it on the material switch cover module 6, open the cover, and then send it to the product receiving area 7 for material collection; it can also take out a full material box 1 from the product receiving area 7, place it on the material switch cover module 6, close the cover, and then send it to the material box picking and placing area 2. When there is a material box 1 at the material switch cover module 6, the material box can be placed in the material temporary storage area 3 for temporary storage; when random inspection or first piece is required, the material picking and placing module 4 can also take out the fully loaded material box 1 from the product receiving area 7 and place it in the manual random inspection and first inspection temporary storage area 5.

[0061] Further, such as Figure 1 、 Figure 2 As shown, as an example, the manual sampling and first inspection temporary storage area 5 is a support plate structure for placing materials. When sampling / first inspection of materials is required, the corresponding material box 1 is placed in this position through the material placement module 4.

[0062] Further, such as Figure 8-12 As shown, preferably, the material switch cover module 6 includes a base 61, a material box side positioning block 62, a Z-axial fixed seat 63, an up and down direction slide 64, an up and down direction slider 65 and a switch cover motor 66. A support platform 67 is provided at the bottom of the base 61, and the support platform 67 is connected to the frame 9. A side adjustment motor 68 is provided on the material box side positioning block 62, and the side adjustment motor 68 is fixed on the support platform 67. The Z-axial fixed seat 63 is arranged on the base 61, the up and down direction slide 64 is arranged on the Z-axial fixed seat 63, the up and down direction slider 65 is arranged on the up and down direction slide 64, the switch cover motor 66 is arranged on the up and down direction slider 65, the switch cover motor 66 is provided with a switch cover column 69, the switch cover column 69 is provided with a switch cover slot 610, and the switch cover slot 610 is matched with the swing rod 101.

[0063] During operation, the material taking and placing module 4 places the material box 1 on the base 61. A vertical baffle 614 can be pre-set on the base 61. The side adjustment motor 68 works to push the side positioning block 62 of the material box to move, clamping the material box 1 from the side. The vertical baffle 614 can also be replaced with a group of components with the same combination as the side adjustment motor 68 and the side positioning block 62 of the material box. The two groups of components work simultaneously to clamp the material box 1 from both sides; after the up and down direction slider 65 moves to the appropriate height on the up and down direction slide 64, the switch cover motor 66 works to drive the switch cover column 69 to rotate. When the switch cover column 69 rotates to the position corresponding to the switch cover slot 610 and the swing rod 101, the up and down direction slider 65 moves slightly downward again so that the switch cover slot 610 is stuck on the swing rod 101, and the switch cover motor 66 works again, driving the switch cover column 69 to rotate, thereby driving the swing rod 101 to swing, realizing the swing rod 101 as the switch operation of the box cover.

[0064] Further, such as Figure 1 As shown, preferably, the product receiving area 7 includes a material bin 71, and a plurality of material box stations 72 are provided in the material bin 71. The material bin 71 is connected to the frame 9. The material box station 72 is used to place the material box 1, and the incoming material from the previous station is transferred to the material box in the material bin.

[0065] Example 2:

[0066] In Example 1, after the material box 1 is placed on the base 61, the position of the material box 1 can only be adjusted from the side, such as Figure 8 、 Figure 9 、 Figure 10 As shown, preferably, the base 61 is further provided with a cartridge position adjustment cylinder 611, and the cartridge position adjustment cylinder 611 is provided with a push bar 612, which is located outside the end of the cartridge 1. After the cartridge 1 is placed on the base 61, in addition to adjusting the position of the cartridge 1 from the side, the cartridge position adjustment cylinder 611 can also drive the push bar 612 to work, so that the push bar 612 pushes the end of the cartridge 1, pushing the cartridge 1 to a position close to the cover opening and closing motor 66.

[0067] Real-time example 3:

[0068] In Example 1, the position of the Z-axis fixing seat 63 is not easy to adjust, and the position of the switch cover motor 66 can only be adapted by adjusting the position of the material box 1, such as Figure 10 、 Figure 11 、 Figure 12 As shown, preferably, a fixed seat adjustment cylinder 613 is further provided at the bottom of the Z-axis fixed seat 63, and the fixed seat adjustment cylinder 613 is arranged on the base 63. The fixed seat adjustment cylinder 613 can drive the Z-axis fixed seat 63 to move, so that the switch cover motor 66 is closer to the position of the material box 1.

[0069] The present invention integrates the material box taking and placing area 2, the material temporary storage area 3, the material taking and placing module 4, the manual sampling and first inspection temporary storage area 5, the material switch cover module 6, and the product receiving area 7, which can realize the function of autonomous management and storage of semiconductor materials; among them, the material taking and placing module 4 can realize the function of automatically taking and placing materials from different areas; the material switch cover module 6 can realize the function of automatically opening and closing the cover of the material box.

[0070] The foregoing descriptions of specific exemplary embodiments of the present invention are for purposes of illustration and description. These descriptions are not intended to limit the invention to the precise forms disclosed, and it is apparent that many variations and modifications are possible in light of the foregoing teachings. The exemplary embodiments have been selected and described for the purpose of explaining the specific principles of the invention and their practical application, thereby enabling those skilled in the art to realize and utilize a variety of exemplary embodiments of the invention and various options and modifications. The scope of the invention is intended to be defined by the claims and their equivalents.

Claims

1. A fully automatic semiconductor material receiving machine, characterized in that: include: The material box loading and unloading area is used to place the material boxes. The material boxes are loaded and unloaded by the overhead crane in this area, and the materials are also loaded and unloaded in this area; Material temporary storage area, used for temporary storage of materials; The material picking and placing module is used to pick and place materials in the material temporary storage area and the material box picking and placing area; Manual sampling inspection and first inspection temporary storage area, used for the first inspection of products and manual sampling inspection, when sampling inspection or first inspection is required, it is convenient for manual taking and placing of materials; Material switch cover module, used for material box switch cover; Product receiving area, used to transfer the incoming materials from the previous workstation into the material box; The electronic control system is used to control the operation of the material pick-up and place module and the material opening and closing cover module; The rack is used to centralize the material box picking and placing area, material temporary storage area, material picking and placing module, manual sampling, first inspection temporary storage area, material opening and closing cover module, product receiving area and electronic control system; The end of the material box is an open structure, and a swing rod is provided on the edge of the end. A slot matching the swing rod is left at the end. When the swing rod is stuck in the slot, the swing rod serves as a box cover to cover the end of the material box. When the swing rod is removed from the slot, the swing rod serves as a box cover to open from the end of the material box. The material switch cover module includes a base, a side positioning block of a material box, a Z-axial fixing seat, an up and down direction slide seat, an up and down direction slider and a switch cover motor. A support platform is provided at the bottom of the base, and the support platform is connected to the frame. A side adjustment motor is provided on the side positioning block of the material box, and the side adjustment motor is fixed on the support platform. The Z-axial fixing seat is arranged on the base, the up and down direction slide seat is arranged on the Z-axial fixing seat, the up and down direction slider is arranged on the up and down direction slide seat, and the switch cover motor is arranged on the up and down direction slider. A switch cover column is provided on the switch cover motor, and a switch cover slot is provided on the switch cover column, and the switch cover slot is matched with the swing arm; The material box placement area is provided with a material box positioning box, and the material box is placed in the material box positioning box and is placed by an overhead crane; The base is also provided with a material box position adjustment cylinder, and the material box position adjustment cylinder is provided with a push bar, and the push bar is located outside the end of the material box; The bottom of the Z-axis fixed seat is also provided with a fixed seat adjustment cylinder, and the fixed seat adjustment cylinder is arranged on the base; The product receiving area includes a material warehouse, and a plurality of material box stations are arranged in the material warehouse. The material warehouse is connected to the frame. The material box station is used to place the material box, and the incoming material from the previous station is transferred to the material box in the material warehouse.

2. The fully automatic semiconductor material receiving machine according to claim 1, characterized in that: The material temporary storage area is provided with a plurality of material box clamps, and the material boxes are clamped in the material box clamps.

3. The fully automatic semiconductor material receiving machine according to claim 1, characterized in that: The material taking and placing module includes an X-axis moving component, a Y-axis moving component, a Z-axis moving component and a clamping mechanism; The X-axial moving assembly includes an X-axial transmission belt, an X-axial slider and an X-axial motor, wherein the X-axial transmission belt and the X-axial slider are respectively connected to the frame, and the X-axial motor is connected to the X-axial transmission belt to drive the X-axial transmission belt; The Y-axis moving assembly includes a Y-axis slide, a Y-axis screw cylinder and a Y-axis slider. The Y-axis slide is arranged on the X-axis slider and the X-axis transmission belt. The Y-axis screw cylinder is arranged on the Y-axis slide, and the Y-axis slider is connected to the Y-axis screw cylinder. The Z-axis moving assembly includes a Z-axis slide and a Z-axis slider, wherein the Z-axis slide is arranged on the Y-axis slider, and the Z-axis slider is arranged on the Z-axis slide; The clamping mechanism includes a pair of clamping jaws and a clamping jaw adjusting screw cylinder. The clamping jaw adjusting screw cylinder is fixed on the Z-axial slide, and the pair of clamping jaws are connected to the clamping jaw adjusting screw cylinder.

4. The fully automatic semiconductor material receiving machine according to claim 1, characterized in that: The manual sampling and first inspection temporary storage area is a support plate structure for placing materials.

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