Automatic feeding device and feeding process for nitrogen trifluoride electrolytic cell

Abstract

The present invention provides an automatic feeding device and feeding process for a nitrogen trifluoride electrolyzer, wherein the feeding device comprises a feeding mechanism; a reactor is installed on the right side of the feeding mechanism; an electrolyzer is installed on the right side of the reactor; a connecting mechanism is installed on the right side of the electrolyzer, and a control valve A connected to the storage tank is controlled by the internal pressure of a mixing tank and a reactor, and the raw materials are automatically replenished after the raw materials in the mixing tank and the reactor become less, and the preliminary electrolyte is passed into the electrolyzer, and the amount of the preliminary electrolyte is controlled by a liquid level meter. When the electrolyte is less, the control valve B will be opened to replenish the electrolyte in the electrolyzer, and ammonia and nitrogen are mixed in a certain proportion in the mixing tank and then passed into the electrolyzer. The present invention solves the problem that when preparing nitrogen trifluoride, the electrolyzer needs to be fed to facilitate the preparation, and the manual feeding method will occupy a large amount of human resources, the labor cost is high, and the manual feeding speed is slow, which affects the processing efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of nitrogen trifluoride production, and in particular to an automatic feeding device and a feeding process for a nitrogen trifluoride electrolytic cell. Background Art

[0002] Nitrogen trifluoride is a colorless, odorless, stable gas at room temperature. It is a strong oxidant. It is used as an excellent plasma etching gas in the microelectronics industry. Although nitrogen trifluoride is a low-toxic substance, it can strongly irritate the eyes, skin and respiratory mucosa and corrode tissues. Inhalation of high concentrations of NF3 can cause headaches, vomiting and diarrhea. Long-term inhalation of low concentrations of NF3 can damage teeth and bones, causing yellow spots on teeth and deformed bones. It has strong oxidizing properties. It can react strongly with reducing agents, causing combustion and explosion.

[0003] When preparing nitrogen trifluoride, it is necessary to add materials to the electrolytic cell to facilitate the production. If manual feeding is used, it will take up a lot of human resources, the labor cost is high, and the manual feeding speed is slow, which affects the processing efficiency. At the same time, when collecting nitrogen trifluoride gas after production, it takes a long time to replace the collection bottle. During the replacement of the collection bottle, the nitrogen trifluoride remaining in the pipeline is easy to escape, causing harm to nearby workers, posing a safety hazard and having a low safety level.

[0004] Therefore, an automatic feeding device and feeding process for a nitrogen trifluoride electrolytic cell are proposed to solve the above problems. Summary of the invention

[0005] The technical problem to be solved by the present invention is to provide a nitrogen trifluoride electrolytic cell automatic feeding device and a feeding process in view of the deficiencies of the above-mentioned prior art. The device and the process solve the problem that when preparing nitrogen trifluoride, the electrolytic cell needs to be fed with materials to facilitate the preparation. The manual feeding method will occupy a large amount of human resources, the labor cost is high, and the manual feeding speed is slow, which affects the processing efficiency.

[0006] In order to solve the above technical problems, the technical solution adopted by the present invention is: an automatic feeding device for a nitrogen trifluoride electrolytic cell, a storage mechanism, the storage mechanism is arranged on one side of a reactor, and an electrolytic cell is arranged on the other side of the reactor; the storage mechanism includes a storage tank A, a storage tank B and a storage tank C, the storage tank A is connected to the top of the reactor, and the bottom of the reactor is connected to the electrolytic cell; the storage tank B and the storage tank C are both connected to the outer side wall of a mixing tank, the top of the mixing tank is connected to the reactor, and the top of the mixing tank is also connected to the electrolytic cell; a connecting mechanism is installed on the electrolytic cell.

[0007] Preferably, the reaction kettle comprises a kettle body, a top cover and a bottom cover, the inner upper end of the kettle body is provided with two spiral guide plates in opposite directions, the upper end of the kettle body is sealed with the top cover, and the lower end of the kettle body is sealed with the bottom cover.

[0008] Preferably, the storage tank A is connected to the top cover via a first pipeline, and a control valve A is provided on the first pipeline.

[0009] Preferably, the storage tank B is connected to the outer wall of the mixing tank through a second pipeline, and the control valve A is provided on the second pipeline; the storage tank C is connected to the outer wall of the mixing tank through a third pipeline, and the control valve A and the vaporizer are provided on the third pipeline; the top of the mixing tank is connected to the top cover.

[0010] Preferably, a mounting hole is provided at the center of the top cover, a driving member is fixedly provided at the upper end of the top cover, a main shaft of the driving member extends into the kettle body through the mounting hole, a mixing member is provided at the lower end of the main shaft; and a pressure gauge is provided at the lower end of the bottom cover.

[0011] Preferably, the electrolytic cell comprises a cell body, a cell cover and an electrode, the cell cover is sealed and installed on the upper end of the cell body, the electrode is divided into an anode and a cathode, the electrode passes through the cell cover and extends into the cell body; an anode gas outlet hole and a cathode gas outlet hole are provided on the cell cover, a measuring hole is provided in the middle of the cell cover; a connecting mechanism is provided at the upper end of the cell cover.

[0012] Preferably, a liquid level gauge is inserted into the measuring hole; the bottom cover is connected to the tank cover via a conduit, a control valve B is provided on the conduit, and the liquid level gauge is electrically connected to the control valve B.

[0013] Preferably, the connecting mechanism includes a sealing member, an elastic member and a connecting member, the outer side wall of the sealing member is connected to one end of a rotating shaft, one end of the sealing member is connected to the slot cover through a pipe, the other end of the sealing member is provided with a connecting hole, the bottom end of the sealing member is provided with a limiting groove, and the inside of the limiting groove of the sealing member is connected with an elastic member through a spring; a rotating hole is provided at the center of the connecting member, the other end of the rotating shaft is inserted into the rotating hole, a sealing groove is provided on one side of the connecting member, and the outer end surface of the sealing groove is provided with six circumferentially arranged external holes; the outer end surface of the sealing groove of the connecting member is provided with six circumferentially arranged card grooves.

[0014] The present invention also provides a process for automatically feeding a nitrogen trifluoride electrolytic cell using the feeding device, the process comprising the following steps:

[0015] S1, introducing the hydrogen fluoride liquid in the storage tank A into the reactor, and introducing the liquid ammonia in the storage tank C into the reactor after being vaporized by the vaporizer to react with the hydrogen fluoride liquid to form ammonium bifluoride and hydrogen fluoride solution, i.e., a preliminary electrolyte;

[0016] S2, the control valve A connected to the storage tank A and the storage tank C is controlled by the internal pressure of the mixing tank and the reactor, and automatically replenishes the raw materials when the raw materials in the mixing tank and the reactor become less;

[0017] S3, passing the preliminary electrolyte obtained in S1 into the electrolytic cell, and controlling the amount of the preliminary electrolyte by the liquid level meter. When the preliminary electrolyte in the electrolytic cell is less, the control valve B will open to add the preliminary electrolyte to the electrolytic cell;

[0018] S4, passing the nitrogen in the storage tank B into the mixing tank, mixing it with the ammonia in the mixing tank to obtain a mixed gas; passing the mixed gas into the electrolytic cell, reacting it with the preliminary electrolyte, and obtaining a final electrolyte.

[0019] Preferably, the volume ratio of ammonium bifluoride and hydrogen fluoride generated by the hydrogen fluoride liquid and ammonia in the reactor in S1 is (1-5):1; the volume ratio of nitrogen and ammonia in the mixed gas in S4 is (1-10):1; the volume ratio of ammonium bifluoride and hydrogen fluoride in the final electrolyte in S4 is (5-15):1.

[0020] Compared with the prior art, the present invention has the following advantages:

[0021] 1. In the present invention, a certain amount of hydrogen fluoride liquid is introduced into the reactor from the storage tank A, and then liquid ammonia is gasified by a vaporizer and introduced into the reactor to react with hydrogen fluoride to form ammonium hydrogen fluoride and hydrogen fluoride solution, i.e., a preliminary electrolyte. The control valve A connected to the storage tank is controlled by the internal pressure of the mixing tank and the reactor. When the raw materials in the mixing tank and the reactor become less, the raw materials are automatically replenished, and the preliminary electrolyte is introduced into the electrolytic cell. The amount of the preliminary electrolyte is controlled by a liquid level meter. When the electrolyte is less, the control valve B is opened to replenish the electrolyte into the electrolytic cell. After a certain proportion of ammonia and nitrogen are mixed in the mixing tank, they are introduced into the electrolytic cell to react with the preliminary electrolyte to form a final electrolyte of a suitable proportion. Nitrogen trifluoride is generated at the anode through the electrolytic reaction, and the cathode gas is discharged after being treated harmlessly by a treatment tower, thereby realizing automatic feeding in the production of nitrogen trifluoride by electrolysis, and the process is simple and practical, while reducing the cost of raw materials and improving work efficiency.

[0022] 2. In the present invention, the connector and the seal are sealed by a sealing rubber ring, and the connector is connected to multiple collection bottles through the external holes. After one collection bottle is full, the lever of the elastic member is pushed to release the limit between the connector and the seal. Then, by rotating the seal, the seal can be aligned with other external holes of the connector to output nitrogen trifluoride to other collection bottles. Through the above structure, when the staff replaces the collection bottle, the inside of the output conduit will not directly contact the external environment, which can prevent the residual nitrogen trifluoride in the conduit from escaping into the air, ensuring safety. At the same time, compared with closing the output, replacing the collection bottle is simplified, which can effectively improve work efficiency.

[0023] The present invention is further described in detail below with reference to the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the feeding device of the present invention.

[0025] Figure 2 It is an overall exploded view of the feeding device of the present invention.

[0026] Figure 3 It is a three-dimensional structural schematic diagram of the material storage mechanism of the material replenishing device of the present invention.

[0027] Figure 4 It is an assembly diagram of the reactor of the feeding device of the present invention.

[0028] Figure 5 It is a schematic diagram of the electrolytic cell structure of the feeding device of the present invention.

[0029] Figure 6 It is a three-dimensional cross-sectional schematic diagram of a reactor of the feeding device of the present invention.

[0030] Figure 7 It is a three-dimensional cross-sectional schematic diagram of the electrolytic cell of the feeding device of the present invention.

[0031] Figure 8 It is a three-dimensional cross-sectional schematic diagram of the connection mechanism of the feeding device of the present invention.

[0032] Fig. 9 yes Figure 8 A local enlarged schematic diagram of point A in the middle.

[0033] Fig.10 It is a three-dimensional cross-sectional schematic diagram of the sealing component of the feeding device of the present invention.

[0034] Fig.11 yes Fig.10 A local enlarged schematic diagram of point B in the middle.

[0035] Description of reference numerals:

[0036] 1—storage mechanism; 101—storage tank A; 102—storage tank B; 103—storage tank C; 104—control valve A; 105—vaporizer; 106—mixing tank; 2—reactor; 201—reactor body; 202—top cover; 203—bottom cover; 204—driving element; 205—mixing element; 3—electrolytic cell; 301—cell body; 302—cell cover; 303—electrode; 304—liquid level gauge; 305—control valve B; 4—connecting mechanism; 401—sealing element; 402—elastic element; 403—connecting element. DETAILED DESCRIPTION

[0037] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0038] like Figure 1-11 As shown, the automatic feeding device for nitrogen trifluoride electrolytic cell of the present invention comprises a storage mechanism 1, wherein the storage mechanism 1 is arranged on the left side of the reactor 2, and an electrolytic cell 3 is arranged on the right side of the reactor 2; the storage mechanism 1 comprises a storage tank A 101, a storage tank B 102 and a storage tank C 103, wherein the storage tank A 101 is connected to the top of the reactor 2, and the bottom of the reactor 2 is connected to the electrolytic cell 3; the storage tank B 102 and the storage tank C 103 are both connected to the outer side wall of a mixing tank 106, the top of the mixing tank 106 is connected to the reactor 2, and the top of the mixing tank 106 is also connected to the electrolytic cell 3; a connecting mechanism 4 is installed on the electrolytic cell 3;

[0039] The reactor 2 comprises a reactor body 201, a top cover 202, a bottom cover 203 and a driving member 204. The upper end of the reactor body 201 is provided with two spiral guide plates in opposite directions. The upper end of the reactor body 201 is sealed with the top cover 202, and the lower end of the reactor body 201 is sealed with the bottom cover 203. The top cover 202 is provided with two feed inlets. The storage tank A 101 is connected to one of the feed inlets on the top cover 202 through a first pipeline, and a control valve A 104 is provided on the first pipeline. The storage tank B 102 is connected to the outer wall of the mixing tank 106 through a second pipeline, and a control valve A is provided on the second pipeline. The storage tank C 103 is connected to the outer wall of the mixing tank 106 through a third pipeline, and a control valve A and a vaporizer 105 are arranged on the third pipeline; the top of the mixing tank 106 is connected to another feed port on the top cover 202; a mounting hole is provided in the center of the top cover 202, a driving member 204 is fixedly provided on the upper end of the top cover 202, the main shaft of the driving member 204 extends into the kettle body 201 through the mounting hole, and a mixing member 205 is arranged at the lower end of the main shaft; a pressure gauge is arranged at the lower end of the bottom cover 203;

[0040] The electrolytic cell 3 comprises a cell body 301, a cell cover 302 and an electrode 303. The cell cover 302 is sealed and installed on the upper end of the cell body 301. The electrode 303 is divided into an anode and a cathode. The anode and the cathode respectively penetrate the left and right ends of the cell cover 302 and extend into the cell body 301. The cell cover 302 is provided with an anode gas outlet and a cathode gas outlet. A measuring hole is provided in the middle of the cell cover 302. A connecting mechanism 4 is provided on the upper end of the cell cover 302. A liquid level gauge 304 is inserted into the measuring hole. Two feed inlets are provided on the cell cover 302. The bottom cover 203 is connected to one feed inlet on the cell cover 302 through a conduit. A control valve B 305 is provided on the conduit. The liquid level gauge 304 is electrically connected to the control valve B 305. The top of the mixing tank 106 is connected to the other feed inlet on the cell cover 302.

[0041] The connecting mechanism 4 includes a sealing member 401, an elastic member 402 and a connecting member 403. The outer wall of the sealing member 401 is connected to one end of the rotating shaft. One end of the sealing member 401 is connected to the slot cover 302 through a pipe. The other end of the sealing member 401 is provided with a connecting hole. The bottom end of the sealing member 401 is provided with a limiting groove, and the inside of the limiting groove of the sealing member 401 is connected with the elastic member 402 through a spring. The side wall of the elastic member 402 is provided with a lever. The center of the connecting member 403 is provided with a rotating hole, and the other end of the rotating shaft is inserted into the rotating hole. The left side of the connecting member 403 is provided with a sealing groove, and the right end face of the sealing groove of the connecting member 403 is provided with six circumferentially arranged external holes, which are used to connect with multiple collecting bottles. The outer end face of the sealing groove of the connecting member 403 is provided with six circumferentially arranged card grooves. The sealing between the connecting member 403 and the sealing member 401 is achieved by a sealing rubber ring.

[0042] The principle of the feeding device of the present invention is: the storage tank A 101 introduces a certain amount of hydrogen fluoride liquid into the kettle body 201 of the reactor 2, and then the liquid ammonia is vaporized by the vaporizer 105 and introduced into the reactor 2 to react with hydrogen fluoride to form ammonium hydrogen fluoride and hydrogen fluoride solution, i.e., preliminary electrolyte. The control valve A connected to the storage tank is controlled by the internal pressure of the mixing tank 106 and the reactor 2. When the raw materials in the mixing tank 106 and the reactor 2 become less, the raw materials are automatically replenished, and the preliminary electrolyte is introduced into the electrolytic cell 3. The amount of the preliminary electrolyte is controlled by the liquid level meter. When the electrolyte is less, the control valve B305 will be opened to replenish the electrolyte into the electrolytic cell. After a certain proportion of ammonia and nitrogen are mixed in the mixing tank 106, they are introduced into the electrolytic cell to react with the preliminary electrolyte to form a final electrolyte of a suitable proportion. Nitrogen trifluoride is generated at the anode through the electrolytic reaction, and the cathode gas is discharged after being treated harmlessly by the treatment tower, thereby realizing automatic feeding in the production of nitrogen trifluoride by electrolysis;

[0043] The connector 403 and the seal 401 are sealed by a sealing rubber ring, and are connected to multiple collection bottles through the external holes of the connector 403. After a collection bottle is full, the lever of the elastic member 402 is pushed to release the limit between the connector 403 and the seal 401, and then the seal 401 is rotated to align the seal 401 with the other external holes of the connector 403 to output nitrogen trifluoride to other collection bottles. Through the above structure, when the staff replaces the collection bottle, the inside of the output conduit will not directly contact the external environment, which can prevent the residual nitrogen trifluoride in the conduit from escaping into the air, ensuring safety. At the same time, compared with closing the output, replacing the collection bottle is simplified in this way, which can effectively improve work efficiency.

[0044] Example 2

[0045] The feeding device in Example 1 is used to carry out the automatic feeding process of the nitrogen trifluoride electrolyzer, and the process comprises the following steps:

[0046] S1, introducing the hydrogen fluoride liquid in the storage tank A 101 into the reactor 2, and vaporizing the liquid ammonia in the storage tank C 103 through the vaporizer 105 and introducing it into the reactor 2 to react with the hydrogen fluoride liquid to form ammonium bifluoride and hydrogen fluoride solution, i.e., a preliminary electrolyte; the volume ratio of ammonium bifluoride to hydrogen fluoride generated by the hydrogen fluoride liquid and ammonia gas in the reactor 2 is 1:1;

[0047] S2, the control valve A 104 connected to the storage tank A 101 and the control valve A connected to the storage tank C 103 are controlled by the internal pressure of the mixing tank 106 and the reactor 2, and the raw materials are automatically replenished when the raw materials in the mixing tank 106 and the reactor 2 become less;

[0048] S3, passing the preliminary electrolyte obtained in S1 into the electrolytic cell 3, and the amount of the preliminary electrolyte is controlled by the liquid level meter 304. When the preliminary electrolyte in the electrolytic cell 3 is less, the control valve B 305 will open to replenish the preliminary electrolyte into the electrolytic cell 3;

[0049] S4, passing the nitrogen in the storage tank B 102 into the mixing tank 106, and mixing it with the ammonia in the mixing tank 106 to obtain a mixed gas; passing the mixed gas into the electrolytic cell 3, reacting with the preliminary electrolyte to obtain a final electrolyte, generating nitrogen trifluoride at the anode through an electrolytic reaction, and discharging the cathode gas after being treated harmlessly in a treatment tower; the volume ratio of nitrogen to ammonia in the mixed gas is 1:1; the volume ratio of ammonium bifluoride to hydrogen fluoride in the final electrolyte is 5:1.

[0050] In this embodiment, the volume ratio of ammonium bifluoride and hydrogen fluoride generated by the hydrogen fluoride liquid and ammonia in the reactor 2 in S1 can also be 5:1, 2:1, 3:1 or 4:1; the volume ratio of nitrogen and ammonia in the mixed gas in S4 can also be 10:1, 3:1, 4:1, 5:1, 6:1, 7:1 or 8:1; the volume ratio of ammonium bifluoride and hydrogen fluoride in the final electrolyte in S4 can also be 15:1, 10:1, 7:1, 11:1, 12:1 or 14:1.

[0051] The above is only a preferred embodiment of the present invention and does not limit the present invention in any way. Any simple modification, change and equivalent change made to the above embodiment according to the technical essence of the invention still falls within the protection scope of the technical solution of the present invention.

Claims

1. An automatic feeding device for a nitrogen trifluoride electrolytic cell, comprising a material storage mechanism (1), characterized in that: The material storage mechanism (1) is arranged on one side of the reactor (2), and an electrolytic cell (3) is arranged on the other side of the reactor (2); the material storage mechanism (1) comprises a material storage tank A (101), a material storage tank B (102) and a material storage tank C (103); the material storage tank A (101) is connected to the top of the reactor (2), and the bottom of the reactor (2) is connected to the electrolytic cell (3); the material storage tank B (102) and the material storage tank C (103) are both connected to the outer wall of a mixing tank (106), the top of the mixing tank (106) is connected to the reactor (2), and the top of the mixing tank (106) is also connected to the electrolytic cell (3); a connecting mechanism (4) is installed on the electrolytic cell (3); The storage tank A (101) stores liquid hydrogen fluoride, the storage tank B stores nitrogen, and the storage tank C stores liquid ammonia; The storage tank A (101) is connected to the top cover (202) of the reaction kettle (2) via a first pipeline, and a control valve A (104) is provided on the first pipeline; The storage tank B (102) is connected to the outer wall of the mixing tank (106) via a second pipeline, and a control valve A is provided on the second pipeline; the storage tank C (103) is connected to the outer wall of the mixing tank (106) via a third pipeline, and a control valve A and a vaporizer (105) are provided on the third pipeline; The electrolytic cell (3) comprises a cell body (301), a cell cover (302) and an electrode (303); a measuring hole is provided in the middle of the cell cover (302); A liquid level gauge (304) is inserted into the measuring hole; the bottom cover (203) of the reaction kettle (2) is connected to the tank cover (302) via a conduit, a control valve B (305) is provided on the conduit, and the liquid level gauge (304) is electrically connected to the control valve B (305).

2. The automatic feeding device for nitrogen trifluoride electrolytic cell according to claim 1, characterized in that: The reaction kettle (2) comprises a kettle body (201), a top cover (202) and a bottom cover (203); the upper end of the kettle body (201) is provided with two spiral guide plates in opposite directions; the upper end of the kettle body (201) is sealed with the top cover (202); and the lower end of the kettle body (201) is sealed with the bottom cover (203).

3. The automatic feeding device for nitrogen trifluoride electrolytic cell according to claim 1, characterized in that: The top of the mixing tank (106) is connected to the top cover (202).

4. The automatic feeding device for nitrogen trifluoride electrolytic cell according to claim 1, characterized in that: The slot cover (302) is sealedly mounted on the upper end of the slot body (301); the electrode (303) is divided into an anode and a cathode; the electrode (303) passes through the slot cover (302) and extends into the slot body (301); an anode gas outlet hole and a cathode gas outlet hole are provided on the slot cover (302); and a connecting mechanism (4) is provided at the upper end of the slot cover (302).

5. The automatic feeding device for nitrogen trifluoride electrolytic cell according to claim 2, characterized in that: A mounting hole is provided at the center of the top cover (202); a driving member (204) is fixedly provided at the upper end of the top cover (202); a main shaft of the driving member (204) extends into the kettle body (201) through the mounting hole; a mixing member (205) is provided at the lower end of the main shaft; and a pressure gauge is provided at the lower end of the bottom cover (203).

6. The automatic feeding device for nitrogen trifluoride electrolytic cell according to claim 1, characterized in that: The connection mechanism (4) comprises a sealing member (401), an elastic member (402) and a connection member (403); an outer wall of the sealing member (401) is connected to one end of a rotating shaft; one end of the sealing member (401) is connected to the slot cover (302) via a pipe; a connection hole is provided at the other end of the sealing member (401); a limiting groove is provided at the bottom end of the sealing member (401); and the elastic member (402) is connected to the limiting groove of the sealing member (401) via a spring; a rotating hole is provided at the center of the connection member (403); the other end of the rotating shaft is inserted into the rotating hole; a sealing groove is provided on one side of the connection member (403); and six circumferentially arranged external connection holes are provided on the outer end surface of the sealing groove; and six circumferentially arranged clamping grooves are provided on the outer end surface of the sealing groove of the connection member (403).

7. The process of automatically feeding a nitrogen trifluoride electrolytic cell using the feeding device according to any one of claims 1 to 6 is characterized in that: The process includes the following steps: S1, introducing the hydrogen fluoride liquid in the storage tank A (101) into the reactor (2), and vaporizing the liquid ammonia in the storage tank C (103) into ammonia gas through the vaporizer (105) and introducing the ammonia gas into the reactor (2) to react with the hydrogen fluoride liquid to form ammonium bifluoride and hydrogen fluoride solution, i.e., a preliminary electrolyte; S2, the control valve A connected to the material storage tank A (101) and the material storage tank C (103) is controlled by the internal pressure of the mixing tank (106) and the reactor (2), and when the raw materials in the mixing tank (106) and the reactor (2) become less, the raw materials are automatically replenished; S3, passing the preliminary electrolyte obtained in S1 into the electrolytic tank (3), and controlling the amount of the preliminary electrolyte by the liquid level meter (304); when the amount of the preliminary electrolyte in the electrolytic tank (3) is less, the control valve B (305) will open to replenish the preliminary electrolyte into the electrolytic tank (3); S4, passing the nitrogen in the storage tank B (102) into the mixing tank (106), mixing it with the ammonia in the mixing tank (106), and obtaining a mixed gas; passing the mixed gas into the electrolytic cell (3), reacting it with the preliminary electrolyte, and obtaining a final electrolyte.

8. The automatic feeding process for nitrogen trifluoride electrolysis cell according to claim 7, characterized in that: The volume ratio of ammonium bifluoride and hydrogen fluoride generated by the hydrogen fluoride liquid and ammonia in the reaction kettle (2) in S1 is (1-5):1; the volume ratio of nitrogen and ammonia in the mixed gas in S4 is (1-10):1; the volume ratio of ammonium bifluoride and hydrogen fluoride in the final electrolyte in S4 is (5-15):1.

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