A smart water-cooling device for single crystal furnace production

Abstract

This invention relates to the field of single crystal furnace production technology, specifically to an intelligent water-cooling device for single crystal furnace production. The device includes a furnace body, with an annular plate fixedly installed on the inner side of the furnace body. A plurality of first water-cooling plates are arranged in a circular array along the inner wall of the holes in the annular plate via a driving mechanism in the middle of the annular plate. The driving mechanism drives the plurality of first water-cooling plates to move synchronously toward or away from the center of the annular plate. A second water-cooling plate is connected to the end of each adjacent first water-cooling plate via a connecting structure. The connecting mechanism drives the plurality of second water-cooling plates to move synchronously when the first water-cooling plates move, while maintaining a constant angle between them. A water-passing mechanism is provided between the plurality of first and second water-cooling plates, allowing cooling water to be injected from the tops of the first and second water-cooling plates into them and discharged out of the furnace body through their bottoms. This solves the problem that existing single crystal furnaces cannot switch between water-cooled heat shields of different sizes during production.

Description

Technical Field

[0001] This invention relates to the field of single crystal furnace production technology, specifically to an intelligent water-cooling device for single crystal furnace production. Background Technology

[0002] Monocrystalline silicon, as a semiconductor material, is generally used to manufacture integrated circuits and other electronic components. Currently, there are two main growth techniques for monocrystalline silicon: the zone melting method and the Czochralski method, with the Czochralski method being the more commonly used approach. In the Czochralski method, polycrystalline silicon is placed in a quartz crucible and melted at high temperatures. A seed crystal is then lowered from the top into the molten polycrystalline silicon. By controlling the temperature of the liquid surface, the molten seed crystal recrystallizes around itself, forming neatly arranged monocrystalline silicon rods. Traditional temperature control involves adding a water-cooled heatsink to the furnace, through which a cooling liquid flows. As the crystal rod moves upwards past the heatsink, the heat generated during crystallization is carried away by the water.

[0003] In existing technologies, the structure of water-cooled heat shields is relatively fixed. When producing monocrystalline silicon rods of different diameters, in order to ensure a small gap between the monocrystalline silicon rods and the water-cooled heat shields and to accelerate the cooling of the monocrystalline silicon rods, it is necessary to replace the water-cooled heat shields of appropriate size before production and processing. When the previous set of monocrystalline silicon rods has just been produced, the temperature inside the monocrystalline furnace is high, making it difficult to replace the water-cooled heat shields immediately. Furthermore, existing monocrystalline furnaces cannot switch between water-cooled heat shields of different sizes during the production and processing process.

[0004] Based on this, the present invention designs an intelligent water-cooling device for single crystal furnace production to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to provide an intelligent water-cooling device for single crystal furnace production with the function of changing the size of the water-cooled heat shield, so as to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: an intelligent water-cooling device for single crystal furnace production, comprising a furnace body, an annular plate fixedly installed on the inner side of the furnace body, and a plurality of first water-cooling plates arranged in a ring array along the inner wall of the holes of the annular plate through a driving mechanism in the middle of the annular plate. The driving mechanism is used to drive the plurality of first water-cooling plates to move synchronously toward or away from the center of the annular plate. A second water-cooling plate is provided at the end of each of two adjacent first water-cooling plates that are close to each other through a connecting structure. The connecting mechanism is used to drive the plurality of second water-cooling plates to move synchronously when the first water-cooling plates move, and the angle between them remains unchanged. A water-passing mechanism is provided between the plurality of first water-cooling plates and the plurality of second water-cooling plates. The water-passing mechanism is used to inject cooling water from the top of the first water-cooling plates and the second water-cooling plates into them and discharge it out of the furnace body through the bottom of them.

[0007] As a further embodiment of the present invention, the connecting mechanism includes connecting grooves formed on the side of the second water-cooled plate near the center of the annular plate, connecting blocks fixedly installed on the sides of the first water-cooled plates that are close to each other, the connecting blocks being located inside the connecting grooves and slidably connected thereto, the ends of the first water-cooled plates being tightly fitted to the sidewalls of the second water-cooled plates, a first connecting plate fixedly installed on the top of the first water-cooled plate, a second connecting plate fixedly installed on the top of the second water-cooled plates, the bottom ends of the second connecting plates being slidably connected to the top of the annular plate, the bottom ends of the first connecting plates being slidably connected to the top of the second connecting plates, and a sealing mechanism provided at the end of the first connecting plate away from the first water-cooled plate, the sealing mechanism being used to seal between the first connecting plate and the connecting ring.

[0008] As a further embodiment of the present invention, a first water trough is formed in the middle of the first water-cooled plate, and a second water trough is formed in the middle of the second water-cooled plate. Two water plates are slidably connected to the inner side of each of the second water troughs. A C-shaped rod is fixedly installed at the end of each connecting block away from the center of the annular plate. The bottom end of each C-shaped rod passes through the second water-cooled plate and is fixedly connected to the water plate. The vertical ends of two adjacent C-shaped rods have different lengths. A sealing plate is fixedly installed at the bottom end of each C-shaped rod. The sealing plate is tightly fitted to the second water-cooled plate and blocks the interface between the second water-cooled plate and the C-shaped rod.

[0009] As a further embodiment of the present invention, the sealing mechanism includes an arc-shaped rod fixedly installed at one end of the first connecting plate away from the center of the annular plate. The bottom end of the arc-shaped rod is in contact with the annular plate. Slide rods are fixedly installed at both ends of the arc-shaped rod. An L-shaped rod is slidably connected to the outer side of the slide rod through a tension spring. The L-shaped rod is in close contact with the first connecting plate and the second connecting plate.

[0010] As a further embodiment of the present invention, the driving mechanism includes a fixing block fixedly installed on the top of the first connecting plate, and a plurality of mounting blocks corresponding one-to-one with the fixing blocks fixedly installed on the top of the annular plate. The top of each mounting block is rotatably connected to a screw. The end of each screw near the first water-cooling plate passes through the fixing block and is threadedly connected to it. The side of each mounting block near the fixing block is fixedly installed with a guide rod. The other end of each guide rod passes through the fixing block and is slidably connected to it. The plurality of screws are connected to each other by a synchronization mechanism, which is used to drive the plurality of screws to rotate synchronously from the outside of the furnace body.

[0011] As a further embodiment of the present invention, the synchronization mechanism includes several limiting blocks fixedly installed at the top of the annular plate, and a first annular bevel gear slidably connected to the top of the limiting blocks. The limiting blocks are used to restrict the stable rotation of the first annular bevel gear. A second annular bevel gear is fixedly installed on the outer side of the end of the screw near the mounting block. The second annular bevel gear meshes with the first annular bevel gear. A rotating rod is rotatably connected to the left end of the furnace body. A transmission bevel gear is fixedly installed on the right end of the rotating rod. The transmission bevel gear meshes with the first annular bevel gear.

[0012] As a further embodiment of the present invention, the water circulation mechanism includes a first annular pipe fixedly installed at the top of the annular plate, a plurality of first sleeves fixedly installed and connected to the side of the first annular pipe away from the inner wall of the furnace, a shaped pipe fixedly installed at the top of each of the first water-cooling plates, the bottom end of each shaped pipe connected to the first water tank, and the other end of each shaped pipe passing through the first sleeve and slidably connected to it, a water inlet pipe fixedly installed at the top of each of the second water-cooling plates, the bottom end of each water inlet pipe connected to the second water tank, and the other end of each water inlet pipe passing through the first sleeve and slidably connected to it, the right end of the first annular pipe passing through the furnace body and connected to the outside, and a drainage mechanism provided at the bottom of the first water-cooling plate and the second water-cooling plate, the drainage mechanism being used to discharge the liquid in the first water tank and the second water tank to the outside of the furnace.

[0013] As a further embodiment of the present invention, the drainage mechanism includes a second annular pipe fixedly installed on the inner wall of the furnace body. A plurality of second sleeves are fixedly installed on the side of the second annular pipe away from the inner wall of the furnace body and connected thereto. Drainage pipes are fixedly installed at the bottom ends of the first water-cooling plate and the second water-cooling plate. One end of the plurality of drainage pipes is connected to the first water tank and the second water tank respectively, and the other end of the plurality of drainage pipes passes through the second sleeves and is slidably connected thereto.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] 1. This invention uses a first water-cooled plate and a second water-cooled plate. The driving mechanism starts and drives several first water-cooled plates to move synchronously towards the inner wall of the furnace. While the first water-cooled plates are moving, they push the second water-cooled plates to move towards the inner wall of the furnace. This increases the area enclosed by the first and second water-cooled plates, making it easier for workers to adjust the size of the silicon rods to be produced. This makes the device suitable for the production of silicon rods of different sizes, increasing its applicability.

[0016] 2. By setting up a driving mechanism, the present invention allows the operator to adjust the first and second water-cooled plates from outside the furnace body. When the furnace body has just completed the production of one set of silicon rods and needs to continue producing silicon rods of other sizes, the operator does not need to open the furnace body for adjustment and replacement, avoiding heat loss in the furnace body during the replacement process, reducing energy waste, and saving production and processing costs. The operation steps are very simple, which brings convenience to the operator's work and solves the problem that existing single crystal furnaces cannot switch between water-cooled heat shields of different sizes during production and processing. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0018] Figure 2 This is a schematic diagram of the internal structure of the present invention from a frontal perspective.

[0019] Figure 3 This is a schematic diagram of the stepped cross-section of the internal structure of the present invention from a forward-looking perspective;

[0020] Figure 4 For the present invention Figure 3 Enlarged structural diagram at point A in the middle;

[0021] Figure 5 This is a schematic diagram of the connection structure between the first sleeve and the shaped tube in this invention;

[0022] Figure 6 For the present invention Figure 5 Enlarged structural diagram at point B;

[0023] Figure 7 This is a schematic diagram of the connection structure between the second water tank and the water inlet pipe in this invention;

[0024] Figure 8 For the present invention Figure 7 Enlarged structural diagram at point C;

[0025] Figure 9 This is a schematic diagram of the connection structure between the second annular tube and the second sleeve in this invention;

[0026] Figure 10 This is a schematic diagram of the connection structure between the first water-cooled plate and the second water-cooled plate in this invention;

[0027] Figure 11 For the present invention Figure 10 Enlarged structural diagram at point D;

[0028] Figure 12 This is a schematic diagram of the connection structure between the second water tank and the water plate in this invention;

[0029] Figure 13This is a schematic diagram of the connection structure between the C-shaped rod and the sealing plate in this invention.

[0030] The attached diagram lists the components represented by each number as follows:

[0031] 1. Furnace body; 2. Annular plate; 3. First water-cooled plate; 4. Second water-cooled plate; 5. Connecting groove; 6. Connecting block; 7. First connecting plate; 8. Second connecting plate; 9. First water tank; 10. Second water tank; 11. Water plate; 12. C-shaped rod; 13. Sealing plate; 14. Arc rod; 15. Sliding rod; 16. L-shaped rod; 17. Fixing block; 18. Mounting block; 19. Screw; 20. Guide rod; 21. Limiting block; 22. First annular bevel gear; 23. Second annular bevel gear; 24. Rotating rod; 25. Transmission bevel gear; 26. First annular pipe; 27. First sleeve; 28. Irregular pipe; 29. ​​Water inlet pipe; 30. Second annular pipe; 31. Second sleeve; 32. Drain pipe. Detailed Implementation

[0032] Please see Figures 1-13 This invention provides a technical solution: an intelligent water-cooling device for single crystal furnace production, comprising a furnace body 1, an annular plate 2 fixedly installed on the inner side of the furnace body 1, a plurality of first water-cooling plates 3 arranged in a ring array along the inner wall of the holes of the annular plate 2 through a driving mechanism in the middle part of the annular plate 2, the driving mechanism being used to drive the plurality of first water-cooling plates 3 to move synchronously toward or away from the center of the annular plate 2, and a second water-cooling plate 4 being arranged at the end of two adjacent first water-cooling plates 3 that are close to each other through a connecting structure, the connecting mechanism being used to drive the plurality of second water-cooling plates 4 to move synchronously when the first water-cooling plates 3 move, and the angle between the two remains unchanged, a water-passing mechanism being arranged between the plurality of first water-cooling plates 3 and the plurality of second water-cooling plates 4, the water-passing mechanism being used to inject cooling water from the top of the first water-cooling plates 3 and the second water-cooling plates 4 into the two, and discharge it to the outside of the furnace body 1 through the bottom of the two.

[0033] The connecting mechanism includes connecting grooves 5 opened on the side of the second water-cooled plate 4 near the center of the annular plate 2. Connecting blocks 6 are fixedly installed on the sides of the first water-cooled plates 3 that are close to each other. The connecting blocks 6 are all inside the connecting grooves 5 and are slidably connected to them. The ends of the first water-cooled plates 3 are tightly fitted to the sidewalls of the second water-cooled plates 4. A first connecting plate 7 is fixedly installed on the top of the first water-cooled plates 3. A second connecting plate 8 is fixedly installed on the top of the second water-cooled plates 4. The bottom ends of the second connecting plates 8 are slidably connected to the top of the annular plate 2. The bottom ends of the first connecting plates 7 are slidably connected to the top of the second connecting plates 8. A sealing mechanism is provided at the end of the first connecting plate 7 away from the first water-cooled plate 3. The sealing mechanism is used to seal the first connecting plate 7 and the connecting ring.

[0034] During operation, the water supply mechanism continuously inputs cooling water into the first water-cooled plate 3 and the second water-cooled plate 4. After absorbing heat, the cooling water is discharged from the bottom of the first water-cooled plate 3 and the second water-cooled plate 4 to the outside of the furnace body 1, ensuring that the first water-cooled plate 3 and the second water-cooled plate 4 continuously cool the silicon crystal. When it is necessary to produce silicon rods of different sizes, simply start the drive mechanism. Taking the production of silicon rods with larger diameters as an example, the drive mechanism starts and drives several first water-cooled plates 3 to move synchronously towards the inner wall of the furnace body 1. The movement of the first water-cooled plates 3 causes the connecting block 6 to slide in the connecting groove 5. At this time, the connecting block 6 limits the connecting groove 5, so that the angle between the first water-cooled plate 3 and the second water-cooled plate 4 remains constant. While the first water-cooled plate 3 moves, it pushes the second water-cooled plate 4 to move towards the inner wall of the furnace body 1, thereby increasing the area enclosed by the first water-cooled plate 3 and the second water-cooled plate 4. This makes it convenient for the staff to adjust according to the required diameter of the silicon rod to be produced, making the device applicable to the production of silicon rods of different sizes, thus increasing the applicability of the device.

[0035] This invention, by setting up a driving mechanism, allows operators to adjust the first water-cooled plate 3 and the second water-cooled plate 4 from outside the furnace body 1. When the furnace body 1 has just completed a set of production and needs to continue producing silicon rods of other sizes, the operators do not need to open the furnace body 1 for adjustment and replacement, avoiding heat loss inside the furnace body 1 during the replacement process, reducing energy waste, and saving production and processing costs. The operation steps are very simple, bringing convenience to the operators' work, and solving the problem that existing single crystal furnaces cannot switch between water-cooled heat shields of different sizes during production and processing.

[0036] When the first water-cooled plate 3 and the second water-cooled plate 4 move, the movement of the second water-cooled plate 4 causes the second connecting plate 8 to slide at the top of the annular plate 2. At this time, the first water-cooled plate 3 moves and the first connecting plate 7 slides at the top of the second connecting plate 8. The first connecting plate 7 and the second connecting plate 8 block the connection between the first water-cooled plate 3 and the second water-cooled plate 4 and the annular plate 2, thereby ensuring that the gas flow in the single crystal furnace is not affected. The gas can be directly guided to the surface of the silicon solution through the space enclosed by the first water-cooled plate 3 and the second water-cooled plate 4.

[0037] As a further embodiment of the present invention, a first water trough 9 is provided in the middle of the first water-cooled plate 3, and a second water trough 10 is provided in the middle of the second water-cooled plate 4. Two water plates 11 are slidably connected to the inner side of the second water trough 10. A C-shaped rod 12 is fixedly installed at the end of the connecting block 6 away from the center of the annular plate 2. The bottom end of the C-shaped rod 12 near the second water-cooled plate 4 passes through the second water-cooled plate 4 and is fixedly connected to the water plate 11. The vertical ends of two adjacent C-shaped rods 12 have different lengths. A sealing plate 13 is fixedly installed at the bottom end of the C-shaped rod 12. The sealing plate 13 is tightly fitted to the second water-cooled plate 4 and blocks the interface between the second water-cooled plate 4 and the C-shaped rod 12.

[0038] During operation, the connecting plate moves via the C-shaped rod 12, causing the water plate 11 to move, so that the distance between the two water plates 11 is always equal to the distance between the closest ends of the two adjacent first water-cooled plates 3. Since the cooling water flows between the two water plates 11, the cooling water in the second water tank 10 always corresponds to the gap between the two adjacent first water-cooled plates 3. When the device cools the upward-growing silicon rod, cooling water flows only on the inner side of the part of the second water-cooled plate 4 adjacent to the silicon rod, thereby improving the utilization rate of the cooling water in the second water tank 10 and avoiding excessive heat consumption of the furnace body 1 by the cooling water in the second water tank 10.

[0039] As a further embodiment of the present invention, the sealing mechanism includes an arc-shaped rod 14 fixedly installed at one end of the first connecting plate 7 away from the center of the annular plate 2. The bottom end of the arc-shaped rod 14 is in contact with the annular plate 2. Slide rods 15 are fixedly installed at both ends of the arc-shaped rod 14. L-shaped rods 16 are slidably connected to the outer side of the slide rods 15 through tension springs. The L-shaped rods 16 are in close contact with the first connecting plate 7 and the second connecting plate 8.

[0040] When the first connecting plate 7 moves, the arc-shaped rod 14 and the L-shaped rod 16 always slide at the top of the annular plate 2. At this time, the end of the L-shaped rod 16 away from the inner wall of the furnace body 1 is always in contact with the second connecting plate 8 under the action of the tension spring, thereby preventing the gas input at the top of the furnace body 1 from passing through the gap between the first connecting plate 7 and the annular plate 2, and improving the guiding effect of the first water-cooled plate 3 and the second water-cooled plate 4.

[0041] As a further embodiment of the present invention, the driving mechanism includes a fixing block 17 fixedly installed at the top of the first connecting plate 7, and a plurality of mounting blocks 18 corresponding one-to-one with the fixing block 17 fixedly installed at the top of the annular plate 2. The top of each mounting block 18 is rotatably connected to a screw 19. The end of each screw 19 near the first water-cooling plate 3 passes through the fixing block 17 and is threadedly connected to it. The side of each mounting block 18 near the fixing block 17 is fixedly installed with a guide rod 20. The other end of each guide rod 20 passes through the fixing block 17 and is slidably connected to it. The plurality of screws 19 are connected to each other by a synchronization mechanism. The synchronization mechanism is used to drive the plurality of screws 19 to rotate synchronously from the outside of the furnace body 1.

[0042] When it is necessary to adjust the first water-cooled plate 3 and the second water-cooled plate 4, it is only necessary to drive several screws 19 to rotate synchronously through the synchronization mechanism. The rotation of the screws 19 drives the fixed block 17 to slide on the outside of the guide rod 20 through the thread action. At this time, the guide rod 20 limits the movement of the fixed block 17, making the movement of the fixed block 17 more stable. The movement of the fixed block 17 drives the first water-cooled plate 3 to move through the first connecting plate 7, thereby providing power for the movement of the first water-cooled plate 3.

[0043] As a further embodiment of the present invention, the synchronization mechanism includes a plurality of limiting blocks 21 fixedly installed at the top of the annular plate 2, a first annular bevel gear 22 slidably connected to the top of the plurality of limiting blocks 21, the plurality of limiting blocks 21 being used to restrict the stable rotation of the first annular bevel gear 22, a second annular bevel gear 23 fixedly installed on the outer side of the end of the screw 19 near the mounting block 18, the second annular bevel gear 23 meshing with the first annular bevel gear 22, a rotating rod 24 rotatably connected to the left end of the furnace body 1, a transmission bevel gear 25 fixedly installed on the right end of the rotating rod 24, the transmission bevel gear 25 meshing with the first annular bevel gear 22.

[0044] During operation, the operator only needs to rotate the rotating rod 24. The rotation of the rotating rod 24 drives the first ring bevel gear 22 to rotate through the transmission bevel gear 25. The rotation of the first ring bevel gear 22 drives several screws 19 to rotate synchronously through the second ring bevel gear 23. This allows the operator to adjust the first water-cooled plate 3 and the second water-cooled plate 4 from outside the furnace body 1. The operation steps are very simple, which brings convenience to the operator's work.

[0045] As a further embodiment of the present invention, the water supply mechanism includes a first annular pipe 26 fixedly installed at the top of the annular plate 2. A plurality of first sleeves 27 are fixedly installed and connected to the side of the first annular pipe 26 away from the inner wall of the furnace body 1. A special-shaped pipe 28 is fixedly installed at the top of each of the first water-cooling plates 3. The bottom end of each special-shaped pipe 28 is connected to the first water tank 9, and the other end of each special-shaped pipe 28 passes through the first sleeve 27 and is slidably connected to it. A water inlet pipe 29 is fixedly installed at the top of each of the second water-cooling plates 4. The bottom end of each water inlet pipe 29 is connected to the second water tank 10, and the other end of each water inlet pipe 29 passes through the first sleeve 27 and is slidably connected to it. The right end of the first annular pipe 26 passes through the furnace body 1 and is connected to the outside. A drainage mechanism is provided at the bottom of the first water-cooling plate 3 and the second water-cooling plate 4. The drainage mechanism is used to drain the liquid in the first water tank 9 and the second water tank 10 to the outside of the furnace body 1.

[0046] When a continuous supply of cooling water is required to the first water tank 9 and the second water tank 10, cooling water is continuously injected into the right end opening of the first annular pipe 26. The cooling water enters the first sleeve 27 through the first annular pipe 26. Part of the cooling water in the first sleeve 27 flows into the first water tank 9 through the shaped pipe 28, and the remaining cooling water in the first sleeve 27 flows into the second water tank 10 through the water inlet pipe 29, thereby achieving a continuous water supply to the first water-cooled plate 3 and the second water-cooled plate 4. When the first water-cooled plate 3 moves, the movement of the first water-cooled plate 3 causes the shaped pipe 28 to slide within the first sleeve 27. When the second water-cooled plate 4 moves, the movement of the second water-cooled plate 4 causes the water inlet pipe 29 to slide within the first sleeve 27, thereby ensuring that the position of the first water-cooled plate 3 and the second water-cooled plate 4 does not affect the supply of cooling water.

[0047] As a further embodiment of the present invention, the drainage mechanism includes a second annular pipe 30 fixedly installed on the inner wall of the furnace body 1. A plurality of second sleeves 31 are fixedly installed and connected to the side of the second annular pipe 30 away from the inner wall of the furnace body 1. Drainage pipes 32 are fixedly installed at the bottom end of the first water-cooling plate 3 and the bottom end of the second water-cooling plate 4. One end of the plurality of drainage pipes 32 is connected to the first water tank 9 and the second water tank 10 respectively, and the other end of the plurality of drainage pipes 32 passes through the second sleeves 31 and is slidably connected to them.

[0048] During operation, the heated cooling water in the first water tank 9 and the second water tank 10 enters the second sleeve 31 through the drain pipe 32. The heated cooling water in the second sleeve 31 flows into the second annular pipe 30 and then flows out from the opening at the right end of the second annular pipe 30, thereby continuously discharging the heated cooling water to the outside of the furnace body 1. When the first water-cooled plate 3 and the second water-cooled plate 4 move, the first water-cooled plate 3 and the second water-cooled plate 4 drive the drain pipe 32 to slide in the second sleeve 31, thereby ensuring that the position of the first water-cooled plate 3 and the second water-cooled plate 4 does not affect the discharge of the heated cooling water.

Claims

1. A smart water-cooling device for single crystal furnace production, comprising a furnace body (1), characterized in that: An annular plate (2) is fixedly installed on the inner side of the furnace body (1). A number of first water-cooled plates (3) are arranged in a ring array along the inner wall of the holes of the annular plate (2) through a driving mechanism. The driving mechanism is used to drive the number of first water-cooled plates (3) to move synchronously toward or away from the center of the annular plate (2). A second water-cooled plate (4) is provided at the end of each of the two adjacent first water-cooled plates (3) through a connecting structure. The connecting mechanism is used to drive the number of second water-cooled plates (4) to move synchronously when the first water-cooled plate (3) moves, and the angle between them remains unchanged. A water-passing mechanism is provided between the number of first water-cooled plates (3) and the number of second water-cooled plates (4). The water-passing mechanism is used to inject cooling water from the top of the first water-cooled plate (3) and the second water-cooled plate (4) into them and discharge them to the outside of the furnace body (1) through the bottom of them. The connecting mechanism includes connecting grooves (5) on one side of the second water-cooled plate (4) near the center of the annular plate (2), connecting blocks (6) are fixedly installed on the side of the first water-cooled plates (3) that are close to each other, the connecting blocks (6) are all inside the connecting grooves (5) and are slidably connected to them, the ends of the first water-cooled plates (3) are tightly fitted to the sidewalls of the second water-cooled plates (4), the top of the first water-cooled plates (3) is fixedly installed with a first connecting plate (7), the top of the second water-cooled plates (4) is fixedly installed with a second connecting plate (8), the bottom of the second connecting plate (8) is slidably connected to the top of the annular plate (2), the bottom of the first connecting plate (7) is slidably connected to the top of the second connecting plate (8), and a sealing mechanism is provided at the end of the first connecting plate (7) away from the first water-cooled plate (3), the sealing mechanism is used to seal the first connecting plate (7) and the connecting ring.

2. The intelligent water-cooling device for single crystal furnace production according to claim 1, characterized in that: The first water-cooled plate (3) has a first water tank (9) in the middle, and the second water-cooled plate (4) has a second water tank (10) in the middle. The inner side of the second water tank (10) is slidably connected to two water plates (11). The end of the connecting block (6) away from the center of the annular plate (2) is fixedly installed with a C-shaped rod (12). The bottom end of the C-shaped rod (12) near the second water-cooled plate (4) passes through the second water-cooled plate (4) and is fixedly connected to the water plate (11). The vertical ends of two adjacent C-shaped rods (12) have different lengths. The bottom end of the C-shaped rod (12) is fixedly installed with a sealing plate (13). The sealing plate (13) is tightly fitted to the second water-cooled plate (4) and blocks the interface between the second water-cooled plate (4) and the C-shaped rod (12).

3. The intelligent water-cooling device for single crystal furnace production according to claim 1, characterized in that: The sealing mechanism includes an arc-shaped rod (14) fixedly installed at one end of the first connecting plate (7) away from the center of the annular plate (2). The bottom end of the arc-shaped rod (14) is in contact with the annular plate (2). Slide rods (15) are fixedly installed at both ends of the arc-shaped rod (14). An L-shaped rod (16) is slidably connected to the outside of the slide rod (15) through a tension spring. The L-shaped rod (16) is in close contact with the first connecting plate (7) and the second connecting plate (8).

4. The intelligent water-cooling device for single crystal furnace production according to claim 1, characterized in that: The driving mechanism includes a fixed block (17) fixedly installed on the top of the first connecting plate (7). The top of the annular plate (2) is fixedly installed with a plurality of mounting blocks (18) corresponding one-to-one with the fixed block (17). The top of each mounting block (18) is rotatably connected with a screw (19). The end of each screw (19) near the first water-cooled plate (3) passes through the fixed block (17) and is threadedly connected to it. The side of each mounting block (18) near the fixed block (17) is fixedly installed with a guide rod (20). The other end of each guide rod (20) passes through the fixed block (17) and is slidably connected to it. The plurality of screws (19) are connected to each other through a synchronization mechanism. The synchronization mechanism is used to drive the plurality of screws (19) to rotate synchronously from the outside of the furnace body (1).

5. The intelligent water-cooling device for single crystal furnace production according to claim 4, characterized in that: The synchronization mechanism includes several limiting blocks (21) fixedly installed at the top of the annular plate (2). The top of the limiting blocks (21) is slidably connected to a first annular bevel gear (22). The limiting blocks (21) are used to restrict the stable rotation of the first annular bevel gear (22). The outer side of the screw (19) near the mounting block (18) is fixedly installed with a second annular bevel gear (23). The second annular bevel gear (23) meshes with the first annular bevel gear (22). The left end of the furnace body (1) is rotatably connected to a rotating rod (24). The right end of the rotating rod (24) is fixedly installed with a transmission bevel gear (25). The transmission bevel gear (25) meshes with the first annular bevel gear (22).

6. The intelligent water-cooling device for single crystal furnace production according to claim 1, characterized in that: The water supply mechanism includes a first annular pipe (26) fixedly installed at the top of the annular plate (2). Several first sleeves (27) are fixedly installed on the side of the first annular pipe (26) away from the inner wall of the furnace body (1) and connected thereto. A shaped tube (28) is fixedly installed at the top of each of the first water-cooling plates (3). The bottom end of each shaped tube (28) is connected to the first water tank (9), and the other end of each shaped tube (28) passes through the first sleeve (27) and is slidably connected thereto. The second water-cooling plate (4)... The top of each water inlet pipe (29) is fixedly installed. The bottom end of each water inlet pipe (29) is connected to the second water tank (10). The other end of each water inlet pipe (29) passes through the first sleeve (27) and is slidably connected to it. The right end of the first annular pipe (26) passes through the furnace body (1) and is connected to the outside. The bottom ends of the first water cooling plate (3) and the second water cooling plate (4) are provided with drainage mechanisms. The drainage mechanisms are used to drain the liquid in the first water tank (9) and the second water tank (10) to the outside of the furnace body (1).

7. The intelligent water-cooling device for single crystal furnace production according to claim 6, characterized in that: The drainage mechanism includes a second annular pipe (30) fixedly installed on the inner wall of the furnace body (1). A plurality of second sleeves (31) are fixedly installed on the side of the second annular pipe (30) away from the inner wall of the furnace body (1) and connected thereto. Drainage pipes (32) are fixedly installed at the bottom end of the first water-cooled plate (3) and the bottom end of the second water-cooled plate (4). One end of the plurality of drainage pipes (32) is connected to the first water tank (9) and the second water tank (10) respectively, and the other end of the plurality of drainage pipes (32) passes through the second sleeves (31) and is slidably connected thereto.

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