A vacuum welding apparatus for semiconductor laser fabrication

Abstract

The present application relates to a kind of vacuum welding equipment for semiconductor laser preparation, including welding box, feed table, discharge table, top plate and support plate are horizontally arranged in the middle of welding box, the center of top plate and support plate is equipped with movable port;Preheating furnace is placed on top plate, and the upper end of preheating furnace is equipped with upper welding furnace, and upper sealing device is arranged between upper welding furnace and preheating furnace;Lower welding furnace is equipped below support plate, and lower sealing device is arranged between the top of lower welding furnace and the bottom of support plate;Movable load carrier is vertically movably arranged in movable port, and one load carrier is respectively arranged on the upper end and lower end of movable load carrier.Top plate and support plate are vertically movably arranged in the middle of welding box, and movable load carrier is driven to be lifted by lifting drive mechanism arranged in welding box, and two load carriers are sequentially loaded, preheated, vacuum welded and discharged respectively.Using the structure of upper and lower double stations, different load carriers are lifted to different processing equipment, so that different processes are processed, and the welding efficiency is improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of laser production, and particularly relates to a vacuum welding device for semiconductor laser preparation. BACKGROUND

[0002] In the production process of semiconductor lasers, the cover plate needs to be welded and packaged with the base shell. In the prior art, fasteners are generally used to fix the cover plate and the base shell. However, this method has poor sealing performance. If the conventional welding method is used, welding in a conventional atmospheric environment will produce cavities, resulting in low welding quality and affecting the sealing performance.

[0003] Patent No. CN202210773344.0 discloses an online three-cavity vacuum welding furnace and a vacuum welding process. The furnace body is provided with a preheating cavity, a welding cavity and a cooling cavity in sequence inside the furnace body according to the material conveying direction. Adjacent two cavities are provided with automatic isolation plates capable of being positioned and moved up and down to seal and separate adjacent cavities. Independent formic acid charging devices and nitrogen gas charging devices are respectively positioned in the preheating cavity and the welding cavity. Independent vacuum pumping devices are respectively positioned in the preheating cavity, the welding cavity and the cooling cavity. The preheating cavity, the welding cavity and the cooling cavity are sequentially arranged in the furnace body. The tray is driven by the conveying mechanism to pass through the above cavities in sequence, thereby realizing the vacuum welding process. However, in actual use, first, when only the conveying mechanism such as a conveyor belt is used for conveying, the sealing performance between each cavity cannot be guaranteed, especially when the cavity cannot be absolutely sealed during vacuumization, which will cause the generation of welds, thereby affecting the welding quality of electrical components. In addition, during the welding process, the feeding is carried out one by one, which will relatively reduce the welding efficiency. The frequent opening and closing between each cavity will cause heat loss, thereby increasing the cost of energy consumption. SUMMARY

[0004] The present application discloses a vacuum welding device for semiconductor laser preparation, which can realize double-station simultaneous processing and ensure the sealing performance of the vacuum chamber, while avoiding heat loss in the preheating chamber.

[0005] The specific technical solution is as follows:

[0006] The utility model provides a vacuum welding equipment for semiconductor laser preparation, including welding box, feed table, discharge table, both sides of welding box are equipped with inlet and outlet, and the position of inlet and outlet on both sides of welding box is provided with feed table and discharge table respectively, and feed table and discharge table are equipped with feed assembly, and one end of two feed assemblies respectively extends to welding box through inlet and outlet, and the feed assembly is used for conveying the tray with laser shell, and the tray is rectangular groove structure, and the top of both sides of the wall of tray is horizontally bent and is provided with wing plate, the middle part of welding box is horizontally provided with top plate and support plate, the top plate is located above support plate, and the center of top plate and support plate is equipped with movable mouth, the top plate is provided with preheating furnace, and the inner wall of preheating furnace is equipped with heating assembly, and the center of preheating furnace is equipped with circular structure and is provided with mouth, and the top of preheating furnace is provided with upper welding furnace, and the top of upper welding furnace is fixedly connected with the inner wall of the top of welding box through support hanger, and the center of lower end of upper welding furnace is equipped with the opening corresponding with the position of mouth, and the inner diameter size of opening is equal with the inner diameter size of mouth, and upper sealing device is arranged between upper welding furnace and preheating furnace, the lower part of support plate is provided with lower welding furnace, and the size and shape of lower welding furnace are equal with the size and shape of upper welding furnace, and lower welding furnace and upper welding furnace are oppositely arranged, and the opening of lower welding furnace corresponds with the position of movable mouth of support plate, and independent vacuumizing device is arranged in lower welding furnace and upper welding furnace, and heating assembly is arranged on the inner wall of lower welding furnace and upper welding furnace, and lower sealing device is arranged between the top of lower welding furnace and the bottom of support plate.

[0007] The movable mouth is longitudinally movably provided with movable loading frame, and the upper and lower ends of movable loading frame are respectively provided with one loading table, and each loading table is used for loading tray, the movable loading frame is driven to ascend and descend by the lifting drive mechanism arranged in welding box, and two loading tables are sequentially loaded, preheated, vacuum welded and unloaded, a sealing groove is arranged between two loading tables on movable loading frame, and sealing groove is matched with upper sealing device and lower sealing device to seal upper welding furnace or lower welding furnace, and the both ends of movable mouth on support plate are respectively provided with loading mechanism and unloading mechanism, the loading mechanism is used for loading tray on feed assembly to one loading table, and the unloading mechanism is used for unloading tray on one loading table to the other end of feed assembly.

[0008] Further, the movable carrier frame comprises a sealing seat, a lower sealing cover, an upper sealing cover and a fixing pipe, the sealing seat, the lower sealing cover and the upper sealing cover are circular structures, a sealing groove is arranged on the side wall of the sealing seat, the cross section of the sealing groove is isosceles trapezoidal structure, two fixing pipes are vertically arranged on the sealing seat, the two fixing pipes are respectively located on the two sides of the sealing seat, the two fixing pipes are hollow structures, and the inner wall of one of the two fixing pipes is provided with internal threads, the upper sealing cover and the lower sealing cover are respectively arranged on the upper end and the lower end of the sealing seat and are oppositely arranged, the two sides of the upper sealing cover and the lower sealing cover are vertically penetrated by the two fixing pipes, and the top end and the bottom end of the fixing pipe are flush with the top of the upper sealing cover and the bottom of the lower sealing cover; the upper surface of the sealing seat and the upper surface of the lower sealing cover are both provided with a positioning groove for accommodating a tray, and the tray is placed on the upper surfaces of the sealing seat and the lower sealing cover through the wings, the positioning groove is arranged along the direction of the material conveying assembly and is located between the two fixing pipes, so that the upper end of the sealing seat and the upper end of the lower sealing cover form the carrier table.

[0009] Further, a protruding block is arranged on the inner wall of the through port at the lower end of the preheating furnace, and a closed groove is formed at the upper end and the lower end of the protruding block, the two closed grooves are symmetrically arranged, and the two closed grooves are matched with the upper sealing cover and the lower sealing cover to realize the sealing of the through port at the lower end of the preheating furnace.

[0010] Further, the lifting driving mechanism comprises a solid guide rod, a hollow guide pipe, a rotating shaft and a lifting driving motor, the solid guide rod is longitudinally arranged on one side in the movable port, the upper end of the solid guide rod is fixedly connected with the inner wall of the top end of the upper welding furnace, the lower end of the solid guide rod is fixedly connected with the inner wall of the bottom end of the lower welding furnace, and the solid guide rod longitudinally penetrates one of the fixed pipes on the movable load carrier and is slidingly connected with the fixed pipe; the hollow guide pipe is two in number, one of the hollow guide pipes is fixedly connected with the top end of the upper welding furnace, the other hollow guide pipe is fixedly connected with the inner wall of the bottom end of the lower welding furnace, the two hollow guide pipes are located on the same straight line and on the other side in the movable port, and a gap is left between the adjacent ends of the two hollow guide pipes, the gap is located at the position of the lower end through port of the preheating furnace, the two hollow guide pipes longitudinally penetrate the other fixed pipe on the movable load carrier and are slidingly connected with the fixed pipe; the rotating shaft longitudinally penetrates the two hollow guide pipes, the upper and lower ends of the rotating shaft are respectively rotatably connected with the two hollow guide pipes through the outer walls of the upper and lower ends of the rotating shaft and at least two bearings, the bottom end of the rotating shaft is rotatably arranged on the inner wall of the bottom end of the lower welding furnace through a bearing, the upper end of the rotating shaft penetrates the top end of the upper welding furnace upward and is rotatably connected with the top end of the welding box through a bearing, the rotating shaft is provided with a threaded connecting seat at the gap position between the two hollow guide pipes, the side wall of the threaded connecting seat is provided with external threads, and the threaded connecting seat is threadedly connected with the internal threads on the fixed pipe through the external threads on the side wall; the lifting driving motor is fixedly arranged on the top end of the welding box, the output shaft of the lifting driving motor vertically penetrates the top end of the welding box and is connected with a driving shaft, the driving shaft and the rotating shaft are drivingly connected through a transmission wheel and a transmission belt, the rotating shaft is rotated by the lifting driving motor, and the rotating shaft is threadedly connected with one of the fixed pipes on the movable load carrier through the threaded connecting seat in the rotating process, so that the movable load carrier is lifted on the solid guide rod and the hollow guide pipe.

[0011] Further, the upper sealing device and the lower sealing device each comprise a mounting plate, a driving cylinder, a movable ring, a connecting rod, and movable blades, the movable ring is horizontally arranged, a plurality of arc-shaped sliding ports are uniformly distributed on the movable ring, a guide shaft is longitudinally arranged in each of the arc-shaped sliding ports, two limiting blocks are arranged on the guide shaft, and the two limiting blocks are respectively attached to the upper and lower ends of the movable ring to limit the longitudinal movement of the movable ring, and the lower end of the guide shaft is perpendicularly arranged on the mounting plate, and the mounting plate is fixedly arranged on the inner wall of the welded box body; the driving cylinder is horizontally arranged, one end of the driving cylinder is hingedly arranged on the inner wall of the welded box body through a hinge seat, a rotating sleeve is arranged at one end of the movable rod of the driving cylinder, a connecting rod is rotatably arranged in the rotating sleeve, and the bottom end of the connecting rod is perpendicularly connected with the movable ring; a plurality of movable blades are arranged on the inner side of the movable ring, the plurality of movable blades are annularly arranged, one end surface of each movable blade is rotatably connected with the connecting rod through a rotating shaft, the other end surface of each movable blade is perpendicularly provided with a rotating shaft, and the lower end of each rotating shaft is rotatably connected with the surface of the mounting plate, so that the driving cylinder drives the movable ring to rotate and drives the plurality of movable blades to simultaneously expand or close under the action of the connecting rod; the inner wall of each movable blade is in an arc shape, and a sealing rubber sleeve is arranged on the inner wall of each movable blade, the size and shape of the inner wall of the sealing rubber sleeve are adapted to the size and shape of the sealing groove, and the plurality of sealing rubber sleeves are in a circular ring structure, so that the plurality of sealing rubber sleeves are matched with the sealing groove to realize sealing when the plurality of movable blades are closed, and the adjacent two sealing rubber sleeves are pressed against each other.

[0012] Further, a sealing ring is arranged at the position of the opening at the bottom of the upper welding furnace, and a sealing ring is also arranged at the position of the opening at the top of the lower welding furnace, and the outer wall of the sealing ring is inclined; each side surface of each sealing rubber sleeve near the sealing ring is provided with an arc-shaped sealing strip, and the inner wall of the sealing strip is inclined, so that the movable blades are pressed against the sealing ring through the sealing strip when the movable blades are closed.

[0013] Further, the material conveying assembly comprises a material conveying support, a conveying motor, a conveying roller, and a conveying belt, the number of the material conveying supports is two and the two material conveying supports are distributed on the left and right sides, the conveying roller is arranged on the adjacent side of the two material conveying supports, the conveying roller is driven to rotate by the conveying motor mounted on the side wall of the material conveying support, and the conveying belt is arranged on the conveying roller, and the conveying belts on the two material conveying supports support and convey the wing plates on the two sides of the material disc.

[0014] Further, the feeding mechanism comprises a cylinder seat, a feeding cylinder, a pushing block, a first lifting cylinder and a first lifting plate, the first lifting cylinder is arranged at the bottom of the support plate, the piston rod of the first lifting cylinder penetrates the support plate upward and horizontally arranges the first lifting plate, the first lifting plate is located between the two conveying belts, and the first lifting plate is lifted under the pushing of the first lifting cylinder to lift the tray on the feeding assembly, and the position of the lifted tray corresponds to the position of the positioning groove on one of the loading tables; the cylinder seat is arranged on the support plate through a support and located above the feeding assembly, the feeding cylinder is horizontally arranged on the cylinder seat, the piston rod of the feeding cylinder is provided with the pushing block, and the pushing block is used for pushing the tray on the first lifting plate to the loading table.

[0015] Further, the unloading mechanism comprises a movable seat, sliding rails, a first driving motor, a first screw rod, a second driving motor, a second screw rod, a guide rod, clamping plates, a second lifting cylinder and a second lifting plate, the movable seat is slidably arranged at the bottom of the top plate through the sliding rails on the two sides of the top of the movable seat, and the movable seat is displaced along the direction of the feeding assembly, the first screw rod is rotatably arranged at the bottom of the top plate through a rotating seat and located between the two sliding rails, one end of the first screw rod is driven to rotate through the first driving motor, the top of the movable seat is provided with a connecting block, the connecting block is threadedly connected with the first screw rod, the displacement of the movable seat under the driving of the first driving motor is realized, one end of the movable seat close to the movable opening is provided with a support plate on each side, the guide rod and the second screw rod are horizontally arranged between the two support plates, the second screw rod is driven to rotate through the second driving motor arranged on the outer wall of one of the support plates, the guide rod and the second screw rod are provided with two clamping plates, the two clamping plates are arranged on the left and right sides, and the two clamping plates are horizontally arranged, the two clamping plates are slidably arranged on the guide rod through linear bearings, the two clamping plates are threadedly connected with the second screw rod through threaded sleeves, and the threaded directions of the threaded sleeves on the two clamping plates are opposite, so that the second screw rod drives the two clamping plates to move in opposite directions when the second screw rod rotates; the second lifting cylinder is arranged at the bottom of the support plate, the piston rod of the second lifting cylinder penetrates the support plate upward and horizontally arranges the second lifting plate, the second lifting plate is located between the two conveying belts, and the second lifting plate is lifted under the pushing of the second lifting cylinder to support the tray between the two clamping plates, after the two clamping plates are reset, the tray is placed on the feeding assembly under the driving of the second lifting plate.

[0016] Further, the support plate is further provided with a cooling device, the cooling device comprises cooling fans arranged on the two sides of the movable opening, the two cooling fans are symmetrically arranged and cool the laser shell on the loading table.

[0017] The beneficial effects of the present application are embodied in:

[0018] The movable carrier frame in the application adopts double-station structure, and can be lifted under the drive of the lifting drive mechanism, realizes lifting of different carrier tables to different processing equipment, and thus different process treatment, which not only reduces the space occupation of the equipment, but also improves the welding efficiency.

[0019] The upper and lower welding furnaces are equipped with sealing devices, the sealing devices rotate the movable ring through the drive of the air cylinder, so that the multiple movable vanes rotate synchronously, thereby realizing unfolding or closing, when the multiple movable vanes are unfolded, the movable vanes can be retracted into the gap, so as to avoid interference with the lifting of the movable carrier frame; when the multiple movable vanes are closed, the movable vanes are matched with the sealing grooves in the middle of the movable carrier frame through the sealing rubber sleeves, thereby realizing sealing of the welding furnace, ensuring that the welding process can be in an absolute vacuum environment, reducing the generation of gaps, cracking and other phenomena, and effectively improving the welding quality.

[0020] The upper and lower ends of the movable carrier frame are provided with sealing covers, the two sealing covers can be sequentially matched with the upper and lower two closed grooves at the lower end opening of the preheating furnace, thereby realizing the closure of the preheating furnace, preventing the heat loss in the preheating furnace during the vacuum welding process of the upper and lower two welding furnaces, and achieving the effect of reducing energy consumption.

[0021] The lifting drive mechanism adopts a solid guide rod and a hollow guide pipe matched with a fixed pipe, realizes the guidance of the two sides of the lifting carrier frame, and the hollow guide pipe and the solid guide rod are fixedly connected between the inner walls of the welding furnaces, thereby effectively ensuring the sealing property of the upper and lower welding furnaces, avoiding the influence of the rotating structure on the sealing property of the furnace; a threaded connection seat is arranged at the gap between the two hollow guide pipes, and the threaded connection seat is threadedly connected with one of the fixed pipes, when the lifting drive motor drives the rotating shaft and the threaded connection seat to rotate, thereby realizing the drive of the lifting of the movable carrier frame, since the position of the threaded connection seat is located at the lower end opening of the preheating furnace, thereby ensuring that the fixed pipe in the movable carrier frame can be always threadedly connected, so that the lifting drive mechanism can stably operate, and has high practicability. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a perspective view of the application.

[0023] Figure 2 It is a front view of the application.

[0024] Figure 3 It is a side view of the application.

[0025] Figure 4 It is Figure 3 It is an enlarged view of A in the middle.

[0026] Figure 5The internal structure diagram of the present application after the movable loading rack is removed.

[0027] Figure 6 The internal structure diagram of the present application after the movable loading rack is removed. Figure 5 The enlarged diagram at B.

[0028] Figure 7 The internal structure diagram of the present application after the movable loading rack is removed. Figure 5 The enlarged diagram at C.

[0029] Figure 8 The structure diagram between the loading mechanism and the unloading mechanism in the present application.

[0030] Figure 9 The structure diagram of the present application after the upper sealing device is folded.

[0031] Figure 10 The structure diagram of the present application after the upper sealing device is unfolded.

[0032] Welding box 1, inlet and outlet 101, feeding table 11, unloading table 12, top plate 13, support plate 14, movable port 141, preheating furnace 15, heating device 151, through port 152, protruding block 153, closed groove 154, upper welding furnace 16, sealing ring 161, lower welding furnace 17, vacuum pumping device 18, cooling fan 19;

[0033] Feeding assembly 2, feeding support 21, conveying roller 22, conveying belt 23;

[0034] Movable loading rack 3, loading table 301, sealing seat 31, sealing groove 311, positioning groove 312, lower sealing cover 32, upper sealing cover 33, fixed tube 34;

[0035] Lifting drive mechanism 4, solid guide rod 41, hollow guide pipe 42, rotating shaft 43, threaded connection seat 431, lifting drive motor 44;

[0036] Upper sealing device 5, mounting plate 51, drive cylinder 52, rotating sleeve 521, movable ring 53, connecting rod 531, arc-shaped sliding port 532, guide shaft 533, limiting block 534, linkage rod 54, movable blade 55, rotating shaft 551, sealing rubber sleeve 56, sealing strip 561

[0037] Lower sealing device 6;

[0038] Loading mechanism 7, cylinder seat 71, loading cylinder 72, pushing block 73, first lifting cylinder 74, first lifting plate 75;

[0039] The unloading mechanism 8, the movable seat 81, the support plate 811, the connecting block 812, the sliding rail 82, the first driving motor 83, the first screw rod 84, the second driving motor 85, the second screw rod 86, the guide rod 87, the clamping plate 88, the second lifting cylinder 89, and the second lifting plate 90.

[0040] The tray 10. DETAILED DESCRIPTION

[0041] In order to make the technical scheme of the present application clearer and more explicit, the present application will be further described below in conjunction with the drawings. Any equivalent replacement and routine inference of the technical features of the technical scheme of the present application all fall within the protection scope of the present application. The fixed connection and fixed setting mentioned in the present application are all general connection modes in the mechanical field, and can be welding, bolt and nut connection, and screw connection.

[0042] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0043] As Figures 1-10As shown, a vacuum welding device for semiconductor laser preparation, including welding box 1, feeding table 11, discharge table 12, the welding box 1 both sides are provided with inlet and outlet 101, and the welding box 1 both sides are located at the position of inlet and outlet 101 respectively setting the feeding table 11 and discharge table 12, the feeding table 11 and discharge table 12 are equipped with feeding assembly 2, one end of two feeding assembly 2 respectively through the inlet and outlet 101 extends to the welding box 1, and the feeding assembly 2 is used for conveying the tray 10 provided with laser shell, and the upper cover and base shell of the laser shell are fixed by the clamp, the tray 10 is rectangular groove structure, the both sides of the tray 10 are provided with wing plate which is horizontally bent at the top end; the welding box 1 is provided with top plate 13 and support plate 14 in the middle, the top plate 13 is located above the support plate 14, and the center of the top plate 13 and the support plate 14 are provided with movable port 141; the top plate 13 is provided with preheating furnace 15, the inner wall of the preheating furnace 15 is provided with heating assembly, the preheating furnace 15 is provided with circular structure through port 152 in the center of the upper and lower ends, and the preheating furnace 15 is provided with upper welding furnace 16 at the upper end, the upper welding furnace 16 is fixedly connected with the inner wall of the top end of the welding box 1 through the support hanger around the top end, the lower end of the upper welding furnace 16 is provided with opening corresponding to the position of the through port 152, the inner diameter of the opening is equal to the inner diameter of the through port 152, and the upper sealing device 5 is arranged between the upper welding furnace 16 and the preheating furnace 15; the support plate 14 is provided with lower welding furnace 17 below, the size and shape of the lower welding furnace 17 are equal to those of the upper welding furnace 16, and the lower welding furnace 17 is arranged opposite to the upper welding furnace 16, the opening of the lower welding furnace 17 corresponds to the position of the movable port 141 of the support plate 14, and the lower welding furnace 17 and the upper welding furnace 16 are provided with independent vacuumizing device 18, and the inner wall of the lower welding furnace 17 and the upper welding furnace 16 is also provided with heating assembly, the heating assembly comprises a plurality of heating pipes, and the plurality of heating pipes are mounted on the inner wall of the upper welding furnace 16, the lower welding furnace 17 and the preheating furnace 15; and the lower sealing device 6 is arranged between the top of the lower welding furnace 17 and the bottom of the support plate 14; the cooling device is arranged on the support plate 14, and the cooling device comprises cooling fan arranged on both sides of the movable port 141, the two cooling fans 19 are symmetrically arranged and cool the laser shell on the loading table 301.

[0044] The movable loading rack 3 is longitudinally movably arranged in the movable port 141, and a loading table 301 is arranged at the upper end and the lower end of the movable loading rack 3 respectively, and a tray 10 is arranged on each loading table 301 respectively. The movable loading rack 3 is driven to move up and down by the lifting driving mechanism 4 arranged in the welded box body 1, and the two loading tables 301 are sequentially subjected to the processes of loading, preheating, vacuum welding and unloading respectively. A sealing groove 311 is arranged between the two loading tables 301 on the movable loading rack 3, and the sealing groove 311 is matched with the upper sealing device 5 and the lower sealing device 6 respectively to realize the sealing of the upper welding furnace 16 or the lower welding furnace 17. The upper end and the lower end of the support plate 14 are respectively provided with a loading mechanism 7 and an unloading mechanism 8. The loading mechanism 7 is used for loading the tray 10 on the feeding assembly 2 to one of the loading tables 301, and the unloading mechanism 8 is used for unloading the tray 10 on one of the loading tables 301 to the feeding assembly 2 at the other end.

[0045] The movable loading rack 3 comprises a sealing seat 31, a lower sealing cover 32, an upper sealing cover 33 and a fixed tube 34. The sealing seat 31, the lower sealing cover 32 and the upper sealing cover 33 are all circular structures, and the diameter of the sealing seat 31 is smaller than the diameter of the upper sealing cover 33 and the lower sealing cover 32. A sealing groove 311 is arranged on the side wall of the sealing seat 31, and the cross section of the sealing groove 311 is isosceles trapezoidal structure. Two fixed tubes 34 are longitudinally arranged on the sealing seat 31, and the two fixed tubes 34 are arranged on the two sides of the sealing seat 31 respectively. The two fixed tubes 34 are both hollow structures, and the inner wall of one of the fixed tubes 34 is provided with internal threads. The upper sealing cover 33 and the lower sealing cover 32 are arranged on the upper end and the lower end of the sealing seat 31 respectively and oppositely, and the two sides of the upper sealing cover 33 and the lower sealing cover 32 are vertically penetrated by the two fixed tubes 34 respectively, and the top end and the bottom end of the fixed tube 34 are flush with the top of the upper sealing cover 33 and the bottom of the lower sealing cover 32 respectively. The upper surface of the sealing seat 31 and the upper surface of the lower sealing cover 32 are both provided with a positioning groove 312 for accommodating the tray 10, and the tray 10 is placed on the upper surfaces of the sealing seat 31 and the lower sealing cover 32 through the wing plates on the two sides of the tray 10. The positioning groove 312 is arranged along the direction of the feeding assembly 2 and between the two fixed tubes 34, so that the upper end of the sealing seat 31 and the upper end of the lower sealing cover 32 form the loading table 301 respectively, and the two loading tables 301 can be simultaneously arranged at different stations respectively, so that different processes can be performed.

[0046] The inner wall of the through opening 152 at the lower end of the preheating furnace 15 is centrally provided with a ring of protruding blocks 153, the cross section of the protruding blocks 153 is in the shape of an isosceles trapezoid, and the upper and lower ends of the protruding blocks 153 are respectively formed with a closed groove 154, the two closed grooves 154 are symmetrically arranged, and the two closed grooves 154 are respectively matched with the upper sealing cover 33 and the lower sealing cover 32 to realize the sealing of the through opening 152 at the lower end of the preheating furnace 15, so that when the upper welding furnace 16 and the lower welding furnace 17 respectively perform the welding process, the upper sealing cover 33 and the lower sealing cover 32 can be matched with the two closed grooves 154 in sequence to realize sealing, so as to prevent the heat in the preheating furnace 15 from being lost, and the inner diameter size of the protruding blocks 153 is adapted to the diameter size of the sealing seat 31, so that when the upper end of the material loading table 301 is located in the preheating furnace 15, the side wall of the sealing seat 31 is close to the inner wall of the protruding blocks 153, thereby playing a certain sealing role and preventing the heat in the preheating furnace 15 from being lost.

[0047] The lifting driving mechanism 4 comprises a solid guide rod 41, a hollow guide pipe 42, a rotating shaft 43 and a lifting driving motor 44, the solid guide rod is longitudinally arranged on one side in the movable opening 141, the upper end of the solid guide rod 41 is fixedly connected with the inner wall at the top end of the upper welding furnace 16, the lower end of the solid guide rod 41 is fixedly connected with the inner wall at the bottom end of the lower welding furnace 17, and the solid guide rod 41 longitudinally penetrates one of the fixed pipes 34 on the movable material loading frame 3 and is slidingly connected with the fixed pipe 34; the hollow guide pipe 42 is two in number, one upper end of the hollow guide pipe 42 is fixedly connected with the top end of the upper welding furnace 16, the other lower end of the hollow guide pipe 42 is fixedly connected with the inner wall at the bottom end of the lower welding furnace 17, the two hollow guide pipes 42 are located on the same straight line and on the other side in the movable opening 141, and a gap is left between the adjacent ends of the two hollow guide pipes 42, the gap is located at the position of the through opening 152 at the lower end of the preheating furnace 15, the two hollow guide pipes 42 longitudinally penetrate the other fixed pipe 34 on the movable material loading frame 3 and are slidingly connected with the fixed pipe 34; the rotating shaft 43 longitudinally penetrates the two hollow guide pipes 42, the outer walls at the upper and lower ends of the rotating shaft 43 are respectively rotationally connected with the two hollow guide pipes 42 through at least two bearings, the bottom end of the rotating shaft 43 is rotationally arranged on the inner wall at the bottom end of the lower welding furnace 17 through a bearing, and the upper end of the rotating shaft 43 upwardly penetrates the top end of the upper welding furnace 16 and is rotationally connected with the top end of the welding box body 1 through a bearing, thereby realizing the positioning of the rotating shaft 43 to the two hollow guide pipes 42 to prevent the hollow guide pipes 42 from shaking, and the rotating shaft 43 is provided with a threaded connecting seat 431 at the gap position between the two hollow guide pipes 42 (as shown in Figure 6The threaded seat 431 is in a cylindrical structure, the side wall of the threaded seat 431 is flush with the side wall of the hollow conduit 42, the side wall of the threaded seat 431 is provided with external threads, and the threaded seat 431 is threadedly connected with the internal threads on the fixed tube 34 through the external threads on the side wall; the lifting driving motor 44 is fixedly arranged at the top end of the welded box body 1, the output shaft of the lifting driving motor 44 vertically penetrates the top end of the welded box body 1 and is connected with a driving shaft, the driving shaft and the rotating shaft 43 are drivingly connected through a transmission wheel and a transmission belt, the rotating shaft 43 is rotated by the lifting driving motor 44, and the rotating shaft 43 is threadedly connected with one of the fixed tubes 34 on the movable material loading frame 3 in the rotating process, so that the movable material loading frame 3 is lifted on the solid guide rod 41 and the hollow conduit 42.

[0048] The upper sealing device 5 and the lower sealing device 6 each comprise a mounting plate 51, a driving cylinder 52, a movable ring 53, a connecting rod 54 and a movable blade 55. The movable ring 53 is horizontally arranged, and a plurality of arc-shaped sliding openings 532 are uniformly distributed on the movable ring 53. A guide shaft 533 is longitudinally arranged in each arc-shaped sliding opening 532. Two limiting blocks 534 are arranged on the guide shaft 533 and are in close contact with the upper and lower ends of the movable ring 53, so as to limit the longitudinal movement of the movable ring 53. The lower end of the guide shaft 533 is vertically arranged on the mounting plate 51, which is fixedly arranged on the inner wall of the welded box body 1. The driving cylinder 52 is horizontally arranged, and one end of the driving cylinder 52 is hingedly arranged on the inner wall of the welded box body 1 through a hinge seat. One end of the movable rod of the driving cylinder 52 is provided with a rotating sleeve 521. The connecting rod 531 is rotatably arranged in the rotating sleeve 521. The bottom end of the connecting rod 531 is vertically connected with the movable ring 53. A plurality of movable blades 55 are arranged on the inner side of the movable ring 53, and the plurality of movable blades 55 are annularly arranged. One end surface of each movable blade 55 is rotatably connected with the connecting rod 54 through a rotating shaft. The other end surface of each movable blade 55 is rotatably connected with the surface of the movable ring 53 through a rotating shaft. The other end surface of each movable blade 55 is vertically provided with a rotating shaft 551, and the lower end of the rotating shaft 551 is rotatably connected with the surface of the mounting plate 51. The driving cylinder 52 drives the movable ring 53 to rotate and drives the plurality of movable blades 55 to simultaneously expand or close under the action of the connecting rod 54 (as shown in FIG. 6). Figures 9-10 The inner side wall of each movable blade 55 is in an arc-shaped structure, and a sealing rubber sleeve 56 is arranged on the inner side wall of each movable blade 55. The size and shape of the inner side wall of the sealing rubber sleeve 56 are adapted to the size and shape of the sealing groove 311. The plurality of sealing rubber sleeves 56 are in a circular ring structure, so that the plurality of sealing rubber sleeves 56 are matched with the sealing groove 311 to realize sealing when the plurality of movable blades 55 are closed, and the adjacent two sealing rubber sleeves 56 are pressed against each other to realize sealing.

[0049] A sealing ring 161 is arranged at the bottom of the upper welding furnace 16 at the position of the opening, and a sealing ring 161 is also arranged at the top of the lower welding furnace 17 at the position of the opening, and the outer wall of the sealing ring 161 is arranged to be inclined; the side surface of each sealing rubber sleeve 56 close to the sealing ring 161 is provided with a sealing strip 561 in arc structure, and the inner side wall of the sealing strip 561 is arranged to be inclined, so that when the movable blade 55 is closed, the sealing strip 561 is passed and the sealing ring 161 is matched to realize the pressing sealing. The bottom of the sealing rubber sleeve 56 in the upper sealing device 5 is attached to the top of the preheating furnace 15, so that the sealing rubber sleeve 56 can seal the gap between the preheating furnace 15 and the upper welding furnace 16, preventing heat loss from the gap between the preheating furnace 15 and the upper welding furnace 16.

[0050] The material conveying assembly 2 comprises material conveying supports 21, a conveying motor, conveying rollers 22 and a conveying belt 23. The material conveying supports 21 are two in number and are distributed left and right. The conveying rollers 22 are arranged on the adjacent sides of the two material conveying supports 21. The conveying rollers 22 are driven to rotate by the conveying motor mounted on the side wall of the material conveying support 21. The conveying belt 23 is arranged on the conveying rollers 22. The conveying belts 23 on the two conveying supports support and convey the wing plates on the two sides of the material disc 10, respectively.

[0051] The feeding mechanism 7 comprises a cylinder seat 71, a feeding cylinder 72, a pushing block 73, a first lifting cylinder 74 and a first lifting plate 75. The first lifting cylinder 74 is arranged at the bottom of the support plate 14. The piston rod of the first lifting cylinder 74 penetrates the support plate 14 upward and horizontally arranges the first lifting plate 75. The first lifting plate 75 is located between the two conveying belts 23 and is arranged close to the movable opening 141 at one end. Limiting strips are arranged on the two sides of the first lifting plate 75. The two limiting strips are used for limiting and guiding the material disc 10. The first lifting plate 75 is lifted by the first lifting cylinder 74 and lifts the material disc 10 on the material conveying assembly 2. The position of the lifted material disc 10 corresponds to the position of the positioning groove 312 on one of the material loading platforms 301. The cylinder seat 71 is arranged on the support plate 14 above the material conveying assembly 2 through a support. The feeding cylinder 72 is horizontally arranged on the cylinder seat 71. The pushing block 73 is arranged on the piston rod of the feeding cylinder 72. The pushing block 73 is used for pushing the material disc 10 on the first lifting plate 75 to the material loading platform 301. The two sides of the end of the positioning groove 312 close to the pushing block 73 are arranged to be chamfered, so as to facilitate the embedding of the material disc 10 into the positioning groove 312.

[0052] As Figure 7As shown, the discharging mechanism 8 comprises a movable seat 81, slide rails 82, a first driving motor 83, a first screw rod 84, a second driving motor 85, a second screw rod 86, a guide rod 87, clamping plates 88, a second lifting cylinder 89, and a second lifting plate 90. The movable seat 81 is slidably arranged at the bottom of the top plate 13 through the slide rails 82 at both sides of the top of the movable seat 81, and the movable seat 81 is displaced along the direction of the material conveying assembly 2. The first screw rod 84 is rotatably arranged at the bottom of the top plate 13 between the two slide rails 82, and one end of the first screw rod 84 is driven to rotate by the first driving motor 83. A connecting block 812 is arranged at the center of the top of the movable seat 81, and the connecting block 812 is threadedly connected with the first screw rod 84, so that the movable seat 81 is displaced under the drive of the first driving motor 83. Two support plates 811 are arranged at both sides of one end of the movable seat 81 close to the movable opening 141, and the guide rod 87 and the second screw rod 86 are horizontally arranged between the two support plates 811. The second screw rod 86 is driven to rotate by the second driving motor 85 arranged on the outer wall of one of the support plates 811. Two clamping plates 88 are arranged on the guide rod 87 and the second screw rod 86, and the two clamping plates 88 are arranged on the left and right sides and are horizontally arranged. The two clamping plates 88 are slidably arranged on the guide rod 87 through linear bearings, and are threadedly connected with the second screw rod 86 through threaded sleeves. The threads of the threaded sleeves on the two clamping plates 88 are opposite, so that when the second screw rod 86 rotates, the two clamping plates 88 are displaced in opposite directions, and the two clamping plates 88 clamp and fix the wing plates on both sides of the material disc 10 and are displaced under the drive of the movable seat 81 to realize discharging. The second lifting cylinder 89 is arranged at the bottom of the support plate 14, the piston rod of the second lifting cylinder 89 penetrates the support plate 14 upward and horizontally arranges the second lifting plate 90, the second lifting plate 90 is located between the two conveying belts 23, and one end of the second lifting plate 90 is arranged close to the movable opening 141. The second lifting plate 90 also has two limiting strips at both sides, and the second lifting plate 90 is lifted under the drive of the second lifting cylinder 89 to support the material disc 10 between the two clamping plates 88. After the two clamping plates 88 are reset, the material disc 10 is placed on the material conveying assembly 2 under the drive of the second lifting plate 90.

[0053] Working principle: at the beginning of work, the movable carrier 3 is in the initial state, the movable carrier 3 is located at the lowermost position, that is, the upper end of the carrier table 301 is located at one end of the material conveying assembly 2, and the lower end of the carrier table 301 is located in the lower welding furnace 17; then the tray 10 is moved to one end close to the movable port 141 under the conveying of the conveying belt 23, the first lifting cylinder 74 pushes the first lifting plate 75 to rise, and the tray 10 on the material conveying belt is lifted, the position of the lifted tray 10 corresponds to the position of the positioning groove 312 on the carrier table 301, then the feeding cylinder 72 pushes the tray 10 on the first lifting plate 75 through the pushing block 73, so that the tray 10 is horizontally embedded into the positioning groove 312; then the lifting drive motor 44 drives the rotating shaft 43 to rotate in the two hollow conduits 42 through the transmission wheel cooperating with the transmission belt, so that the threaded connection seat 431 is matched with the internal thread on the inner wall of the fixed pipe 34 through the outer nut, thereby driving the movable carrier 3 to rise, at this time the upper end of the carrier table 301 rises into the preheating furnace 15, and the workpiece in the tray 10 is preheated by the heating device 151, and the lower end of the carrier table 301 is located at one end of the material conveying assembly 2 and is fed by the feeding mechanism 7; when the upper end of the workpiece is preheated, the movable carrier 3 continues to rise, so that the upper end of the carrier table 301 enters the upper welding furnace 16 to perform vacuum welding treatment, the upper sealing device 5 is started and cooperates with the sealing groove 311 through the movable blade 55 and the sealing sleeve 56, so as to realize the sealing of the upper welding furnace 16, and at the same time the lower end of the carrier table 301 enters the preheating furnace 15 to perform heating treatment. When the welding process and the preheating process are completed, the movable carrier 3 descends to the lowest end, so that the lower end of the carrier table 301 enters the lower welding furnace 17 to perform vacuum welding treatment, and the upper end of the carrier table 301 descends to the initial position at this time, and the cooling fan 19 cools the workpiece on the upper end of the carrier table 301, and after cooling, the movable seat 81 in the unloading mechanism 8 moves to the movable port 141 under the drive of the first lead screw 84, and the two clamping plates 88 respectively move to the carrier table 301 and are located on both sides of the two wings of the tray 10, the second lead screw 86 rotates to drive the two clamping plates 88 to move in opposite directions, the two clamping plates 88 clamp and fix the wings on both sides of the tray 10, then the movable seat 81 resets, the second lifting plate 90 rises under the push of the second lifting cylinder 89 and supports the bottom of the tray 10 between the two clamping plates 88, after the two clamping plates 88 reset, the tray 10 is placed on the material conveying assembly 2 again under the drive of the second lifting plate 90, the unloading is completed, and the feeding, preheating, vacuum welding, cooling and unloading processes are sequentially and repeatedly performed.

[0054] The above merely describes preferred specific embodiments of the present application, but the protection scope of the present application is not limited thereto, any changes or replacements within the technical scope disclosed by the present application, which can be easily thought by those skilled in the art, should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A vacuum welding apparatus for semiconductor laser fabrication, comprising a welding chamber, a conveying platform, and an unloading platform, wherein the welding chamber has inlet and outlet ports on both sides, and the conveying platform and unloading platform are respectively disposed at the inlet and outlet ports on both sides of the welding chamber; each conveying platform and unloading platform is provided with a conveying assembly, one end of each of the two conveying assemblies extending into the welding chamber through the inlet and outlet ports; the conveying assemblies are used to convey a tray containing a laser housing, and the tray has a rectangular groove structure, with wing plates horizontally bent at the top of both side walls of the tray; characterized in that... A top plate and a support plate are horizontally arranged in the middle of the welding box. The top plate is located above the support plate, and both the top plate and the support plate have movable openings at their centers. A preheating furnace is installed at the upper end of the top plate, and heating components are installed on the inner wall of the preheating furnace. Circular openings are located at the centers of both the upper and lower ends of the preheating furnace. An upper welding furnace is installed above the preheating furnace, and its top end is fixedly connected to the inner wall of the welding box top via a support bracket. An opening corresponding to the position of the movable opening is located at the center of the lower end of the upper welding furnace. An upper sealing device is installed between the upper welding furnace and the preheating furnace. A lower welding furnace is installed below the support plate, and its size and shape are the same as those of the upper welding furnace. The lower welding furnace and the upper welding furnace are arranged opposite each other, and the opening on the lower welding furnace corresponds to the position of the movable opening on the support plate. Both the lower welding furnace and the upper welding furnace are equipped with independent vacuum devices, and their inner walls are also equipped with... The system is equipped with a heating assembly, and a lower sealing device is installed between the top of the lower welding furnace and the bottom of the support plate. A movable material carrier is longitudinally movably arranged in the movable opening, with a material loading platform at each end. Each material loading platform is used to load a material tray. The movable material carrier is driven to rise and fall by a lifting drive mechanism located inside the welding box, allowing the two material loading platforms to sequentially perform loading, preheating, vacuum welding, and unloading processes. A sealing groove is provided on the movable material carrier between the two material loading platforms, which cooperates with the upper and lower sealing devices to seal the upper or lower welding furnace. A loading mechanism and an unloading mechanism are respectively provided at both ends of the movable opening on the support plate. The loading mechanism is used to load the material trays from the conveying assembly onto one of the material loading platforms, and the unloading mechanism is used to unload the material trays from one of the material loading platforms onto the conveying assembly at the other end. The movable material carrier includes a sealing seat, a lower sealing cover, an upper sealing cover, and fixing tubes. All three are circular. A sealing groove is formed on the side wall of the sealing seat, with an isosceles trapezoidal cross-section. Two fixing tubes are longitudinally inserted through the sealing seat, located on opposite sides. Both tubes are hollow, with one having an internal thread. The upper and lower sealing covers are positioned at the upper and lower ends of the sealing seat, respectively, and are perpendicular to each other. The top and bottom ends of the fixing tubes are flush with the top and bottom of the upper and lower sealing covers, respectively. Positioning grooves for accommodating the material tray are formed on the upper surface of both the sealing seat and the lower sealing cover. These grooves are positioned along the direction of the material conveying assembly and between the two fixing tubes, thus forming the material carrier platform at the upper end of the sealing seat and the upper end of the lower sealing cover. The lifting drive mechanism includes a solid guide rod, hollow guide tubes, a rotating shaft, and a lifting drive motor. The solid guide rod is longitudinally positioned on one side of the movable opening, with its upper end fixedly connected to the inner wall of the top of the upper welding furnace and its lower end fixedly connected to the inner wall of the bottom of the lower welding furnace. The solid guide rod also longitudinally passes through one of the fixed tubes on the movable material carrier, and is slidably connected to this fixed tube. There are two hollow guide tubes. The upper end of one hollow guide tube is fixedly connected to the top of the upper welding furnace, and the lower end of the other hollow guide tube is fixedly connected to the inner wall of the bottom of the lower welding furnace. The two hollow guide tubes are located on the same straight line and on the other side of the movable opening, with a gap between adjacent ends. This gap is located at the lower opening of the preheating furnace. The two hollow guide tubes also longitudinally pass through another fixed tube on the movable material carrier, and are slidably connected to this fixed tube. A sliding connection between a hollow conduit and a fixed tube; a rotating shaft is longitudinally inserted through two hollow conduits, and the upper and lower outer walls of the rotating shaft are rotatably connected to the two hollow conduits by at least two bearings respectively. The bottom end of the rotating shaft is rotatably mounted on the inner wall of the bottom end of the lower welding furnace by a bearing, and the upper end of the rotating shaft extends upward through the top end of the upper welding furnace and is rotatably connected to the top end of the welding box by a bearing. A threaded connection seat is provided at the gap between the two hollow conduits on the rotating shaft. The side wall of the threaded connection seat is provided with an external thread, and the threaded connection seat achieves a threaded connection by engaging the external thread on the side wall with the internal thread on the fixed tube; a lifting drive motor is fixedly mounted on the top end of the welding box, and the output shaft of the lifting drive motor vertically penetrates the top end of the welding box and is connected to a drive shaft. The drive shaft and the rotating shaft are connected by a transmission wheel and a transmission belt. Both the upper and lower sealing devices include a mounting plate, a drive cylinder, a movable ring, a connecting rod, and movable blades. The movable ring is horizontally positioned and has multiple evenly distributed arc-shaped sliding openings. Each arc-shaped sliding opening has a longitudinally penetrating guide shaft, which has two limiting blocks that fit against the upper and lower ends of the movable ring to limit its longitudinal movement. The lower end of the guide shaft is vertically mounted on the mounting plate, which is fixedly mounted on the inner wall of the welding box. The drive cylinder is horizontally positioned, with one end hinged to the inner wall of the welding box via a hinge seat. One end of the movable rod of the drive cylinder has a rotating sleeve, in which a connecting rod is rotatably mounted. The bottom end of the connecting rod is vertically connected to the movable ring. Multiple movable blades are arranged on the inner side of the movable ring. The moving blades are arranged in a ring. A connecting rod is rotatably mounted on one end of each moving blade via a rotating shaft. The other end of each connecting rod is rotatably connected to the surface of the moving ring via a rotating shaft. A rotating shaft is vertically mounted on the other end of each moving blade, with its lower end rotatably connected to the surface of a mounting plate. This allows a drive cylinder to rotate the moving ring, which, under the action of the connecting rod, simultaneously opens or closes the multiple moving blades. The inner walls of each moving blade are arc-shaped, and each inner wall of the moving blades is fitted with a sealing sleeve. The size and shape of the inner wall of the sealing sleeve are adapted to the size and shape of the sealing groove. The multiple sealing sleeves are arranged in a ring structure, so that when the multiple moving blades are closed, the multiple sealing sleeves cooperate with the sealing groove to achieve a seal, and adjacent sealing sleeves press against each other for sealing. The support plate is also equipped with a cooling device, which includes cooling fans located on both sides of the movable opening, with the two cooling fans arranged symmetrically between them.

2. The vacuum welding equipment for semiconductor laser fabrication as described in claim 1, characterized in that, A raised block is provided in the center of the inner wall of the lower end of the preheating furnace opening, and a closed groove is formed at the upper and lower ends of the raised block. The two closed grooves are symmetrically arranged, and the two closed grooves cooperate with the upper sealing cover and the lower sealing cover respectively to seal the lower end of the preheating furnace opening.

3. The vacuum welding equipment for semiconductor laser fabrication as described in claim 1, characterized in that, The lifting drive motor drives the rotating shaft to rotate. During the rotation, the rotating shaft is connected to one of the fixed pipe threads on the movable material carrier through a threaded connection seat, thereby driving the movable material carrier to rise and fall on the solid guide rod and the hollow guide tube.

4. The vacuum welding equipment for semiconductor laser fabrication as described in claim 1, characterized in that, A sealing ring is provided at the bottom of the upper welding furnace at the opening position, and a sealing ring is also provided at the top of the lower welding furnace at the opening position. The outer wall of the sealing ring is inclined. Each sealing sleeve has an arc-shaped sealing strip on the side surface near the sealing ring. The inner wall of the sealing strip is inclined, so that when the movable blade closes, it can achieve pressure sealing by passing through the sealing strip and cooperating with the sealing ring.

5. The vacuum welding equipment for semiconductor laser fabrication as described in claim 1, characterized in that, The material conveying assembly includes a material conveying bracket, a conveying motor, a conveying roller, and a conveying belt. There are two material conveying brackets, which are distributed on the left and right sides. The conveying roller is set on an adjacent side of the two material conveying brackets. The conveying roller is driven to rotate by a conveying motor installed on the side wall of the material conveying bracket, and the conveying belt is set on the conveying roller. The conveying belts on the two material conveying brackets support and convey the wing plates on both sides of the material tray.

6. The vacuum welding equipment for semiconductor laser fabrication as described in claim 5, characterized in that, The feeding mechanism includes a cylinder base, a feeding cylinder, a pusher block, a first lifting cylinder, and a first lifting plate. The first lifting cylinder is located at the bottom of the support plate. The piston rod of the first lifting cylinder passes through the support plate upwards and is horizontally positioned on the first lifting plate. The first lifting plate is located between two conveyor belts and rises under the push of the first lifting cylinder, lifting the material tray on the conveying assembly. The position of the lifted material tray corresponds to the position of the positioning groove on one of the loading platforms. The bottom of the cylinder base is mounted on the support plate via a bracket and is located above the conveying assembly. The feeding cylinder is horizontally positioned on the cylinder base. The pusher block is mounted on the piston rod of the feeding cylinder. The pusher block is used to push the material tray on the first lifting plate onto the loading platform.

7. The vacuum welding equipment for semiconductor laser fabrication as described in claim 5, characterized in that, The unloading mechanism includes a movable seat, slide rails, a first drive motor, a first lead screw, a second drive motor, a second lead screw, a guide rod, a clamping plate, a second lifting cylinder, and a second lifting plate. The movable seat is slidably mounted on the bottom of a top plate via slide rails on both sides of its top, and the movable seat moves along the direction of the conveying assembly. The first lead screw is rotatably mounted on the bottom of the top plate between two slide rails via a rotating seat. One end of the first lead screw is driven to rotate by the first drive motor. A connecting block is located at the center of the top of the movable seat, and the connecting block is threadedly connected to the first lead screw, enabling the movable seat to move under the drive of the first drive motor. A support plate is located on each side of the movable seat near the movable opening. The guide rod and the second lead screw are horizontally arranged between the two support plates, and the second lead screw passes through a first guide rod mounted on the outer wall of one of the support plates. Two drive motors drive the rotation. Two clamping plates are provided on the guide rod and the second lead screw. The two clamping plates are distributed on the left and right sides and are both horizontally arranged. Both clamping plates are slidably mounted on the guide rod. Both clamping plates are threadedly connected to the second lead screw through threaded sleeves, and the threads of the threaded sleeves on the two clamping plates are opposite, so that when the second lead screw rotates, it drives the two clamping plates to move in opposite directions. The second lifting cylinder is located at the bottom of the support plate. The piston rod of the second lifting cylinder passes through the support plate upward and sets the second lifting plate horizontally. The second lifting plate is located between the two conveyor belts. The second lifting plate rises under the push of the second lifting cylinder and supports the material tray between the two clamping plates. After the two clamping plates are reset, the material tray is placed on the conveying assembly under the drive of the second lifting plate.

Images