A size control device and method for avoiding waste of ITO target material

Abstract

The present invention belongs to the technical field of ITO target production, and in particular to a size control device and method for avoiding waste of ITO target. In view of the problems in the prior art that uneven heating of the green body leads to large differences in lateral sintering shrinkage, low target material utilization, a heating difference between the lower part of the green body and other parts of the green body, and the shrinkage resistance of the green body manifests as a gradient decrease in shrinkage from top to bottom, the following scheme is proposed, which includes: a sintering furnace, and a supporting table located in the sintering furnace, a door panel being slidably connected to the sintering furnace, an arc-shaped limit plate being fixedly connected to the inner wall of the side of the sintering furnace away from the door panel, and a plurality of universal wheels being provided at the bottom of the supporting table. In the present invention, the supporting table and the green body are driven to rotate, so that the green body is heated evenly in the sintering furnace, and deformation of the green body is avoided, and the rotation of the fan blades blows the hot air in the sintering furnace upward, so as to avoid a heating difference between the lower part of the green body and other parts of the green body, which makes the shape of the green body uncontrollable.

Description

Technical Field

[0001] The present invention relates to the technical field of ITO target material production, and in particular to a size control device and method for avoiding waste of ITO target material. Background Art

[0002] The production process of ITO targets at home and abroad mainly includes: preparation, forming, sintering, post-processing and testing of ITO powder. When sintering tubular ITO target blanks in China, most of them are placed directly on the setter plate, or a layer of material is spread on the setter plate before placing the ITO target blank, in order to reduce the shrinkage resistance during sintering. However, due to the uneven sintering temperature during sintering, the vertical sintering shrinkage rate of the ITO target blank varies greatly. In addition, since the lower part of the blank bears more weight than the upper part, and the friction between the bottom of the blank and the contact surface of the setter plate during sintering shrinkage is affected, the shrinkage resistance of the entire blank is different, which is manifested as a gradient decrease in shrinkage from top to bottom.

[0003] However, the existing technology still has the following shortcomings when installing photovoltaic panels:

[0004] 1. However, during sintering, the lateral sintering shrinkage rate of the ITO target blank varies greatly due to the uneven sintering temperature in the sintering furnace. This causes the shape of the ITO target blank to be uncontrollable after sintering. After sintering, it needs to be processed again, resulting in low target utilization and waste of ITO targets.

[0005] 2. Since the lower part of the blank bears more weight than the upper part, and the lower part of the blank is in contact with the support plate, there is a difference in the heat received by the lower part of the blank and other parts of the blank. In addition, during sintering shrinkage, the friction between the bottom of the blank and the contact surface of the support plate is applied, and the shrinkage resistance of the entire blank is different, which is manifested as a gradient decrease in shrinkage rate from top to bottom. Therefore, the shape of the IT0 target blank after sintering is uncontrollable, resulting in low target utilization.

[0006] In response to the above problems, the present invention document proposes a size control device and method for avoiding waste of ITO target materials. Summary of the Invention

[0007] The present invention provides a size control device and method for avoiding waste of ITO target materials, which solves the shortcomings in the prior art of uneven heating of the green body leading to large differences in lateral sintering shrinkage rates, low target material utilization, a difference in heating between the lower part of the green body and other parts of the green body, and the shrinkage resistance of the green body manifested as a gradient decrease in shrinkage rate from top to bottom.

[0008] The present invention provides the following technical solutions:

[0009] A size control device for avoiding waste of ITO target material comprises: a sintering furnace and a firing platform located in the sintering furnace, wherein a door panel is slidably connected to the sintering furnace, an arc-shaped limit plate is fixedly connected to the inner wall of the sintering furnace on a side away from the door panel, and a plurality of universal wheels are provided at the bottom of the firing platform;

[0010] The rotating assembly is arranged in the sintering furnace and is used to make the sintering table rotate smoothly in the sintering furnace so that the embryo body is heated evenly;

[0011] The blowing assembly is arranged in the firing platform and is used to heat the bottom and the top of the embryo evenly;

[0012] The control component is arranged on the top of the firing table and is used to control the shrinkage rate of the bottom of the embryo.

[0013] In one possible design, the rotating assembly includes a transmission chamber arranged in the sintering furnace, the bottom inner wall of the transmission chamber is fixedly connected to a drive motor, the output shaft of the drive motor is fixedly connected to a first slide rod, the outer wall of the first slide rod is slidably connected to a sliding sleeve, and the top of the sliding sleeve slides through the bottom inner wall of the sintering furnace and is fixedly connected to a disc, and the top of the disc touches the bottom of the sintering table.

[0014] In one possible design, the blowing assembly includes a groove arranged at the top of the firing platform, the bottom inner wall of the groove is rotatably connected to a rotating shaft, the outer wall of the rotating shaft is fixedly connected to a plurality of fan blades, the outer wall of the rotating shaft is fixedly sleeved with a first bevel gear located below the fan blades, a rotating shaft is rotatably passed through the firing platform, one end of the rotating shaft extends into the groove and is fixedly connected to a second bevel gear, and the second bevel gear is meshed with the first bevel gear, the other end of the rotating shaft is fixedly connected to a bevel gear, an arc-shaped limiting plate is provided with an arc-shaped groove on the side close to the firing platform, the top inner wall of the arc-shaped groove is fixedly connected to a bevel gear ring, and the bevel gear extends into the arc-shaped groove and meshes with the bevel gear ring.

[0015] In one possible design, the control component includes a plurality of sliding blocks slidably connected to the top of the supporting platform, a circular groove is provided in the supporting platform, and a plurality of rectangular holes connected to the circular groove are provided on the top of the supporting platform, a sliding rod fixedly connected to the bottom of the sliding block is slidably connected in the rectangular hole, a rotating motor is fixedly connected to the bottom inner wall of the circular groove, the output shaft of the rotating motor is fixedly connected to a rotating disk, a plurality of arc holes are provided in the rotating disk, and the bottom end of the sliding rod extends into the arc hole and is slidably connected to the arc hole, the top of the sliding block is fixedly connected to the supporting plate, a plurality of through holes are provided in the supporting plate, one end of the rotating shaft passes through one of the sliding rods, and the bottom of the circular groove is fixedly connected to a heat insulation cover for protecting the rotating motor.

[0016] In one possible design, a hexagonal groove is provided at the bottom of the firing platform, and a hexagonal protrusion that cooperates with the hexagonal groove is fixedly connected to the top of the disc. When the disc moves upward, the hexagonal protrusion is stuck in the hexagonal groove. Then, when the disc rotates later, the cooperation between the hexagonal protrusion and the hexagonal groove can drive the firing platform to rotate, so that the embryo is heated evenly in the sintering furnace.

[0017] The top end of the second sliding rod touches the bottom of the door panel, and the outer wall of the sliding sleeve is provided with a ring, and the connecting rod is rotatably connected to the ring away from the second sliding rod. The door panel moves downward to push the second sliding rod downward, and the second sliding rod pushes the connecting rod to rotate clockwise, and the connecting rod can cooperate with the ring to push the sliding sleeve and the disc upward. It can not only make the hexagonal protrusion fit into the hexagonal groove to facilitate the rotation of the firing platform, but also push the firing platform up, so that the firing platform can rotate more smoothly when the firing platform rotates, preventing shaking during the rotation of the firing platform, resulting in uneven heating of the embryo and uncontrollable shape of the embryo.

[0018] In one possible design, a first placement groove is provided on the top inner wall of the sintering furnace, and a second placement groove is provided on one side inner wall of the sintering furnace. A first high-temperature kiln camera is fixedly connected to the top inner wall of the first placement groove, and a second high-temperature kiln camera is fixedly connected to the inner wall of the second placement groove on the side away from the firing platform. Insulating glass is provided in both the first placement groove and the second placement groove to protect the first high-temperature kiln camera and the second high-temperature kiln camera.

[0019] In one possible design, a cross bar is provided on the side of the firing platform close to the door panel, and an arc-shaped baffle is fixedly connected to the side of the door panel close to the firing platform. When the door panel is moved down and reset, the arc-shaped limit plate and the arc-shaped baffle cooperate to limit the firing platform, which facilitates the alignment of the hexagonal protrusion and the hexagonal groove. After the sintering of the blank is completed, the cross bar is hooked by the push rod with a hook, and the firing platform is pulled to the outside of the sintering furnace to avoid burns to the staff when the firing platform is pulled out manually.

[0020] In one possible design, a cooling fan and a placement table are fixedly connected to one side of the sintering furnace, and the cooling fan is located above the placement table. A placement tray is rotatably connected to the placement table. The cross bar is hooked by a hooked push rod to pull the sintering table onto the placement tray, and the placed blank to be sintered is placed on one side of the placement tray. The placement tray is rotated to swap the position of the sintered blank with the blank to be sintered, and the blank to be sintered is pushed back into the sintering furnace for sintering. The sintered blank is rotated again to the bottom of the cooling fan, and the cooling fan is started to cool the blank, thereby accelerating the cooling time of the blank and facilitating the transportation of the blank.

[0021] The method for using the size control device to avoid wasting ITO target material comprises the following steps:

[0022] S1. Place the ITO target blank on top of multiple setters, with the blank located in the center of the multiple setters. Pull the door panel upward, which drives the arc-shaped baffle upward. Push the setter into the sintering furnace through the push rod with a hook until the setter touches the arc-shaped limit plate and the bevel gear can extend into the arc-shaped groove to push the door panel downward.

[0023] S2. The door panel moves down to close the sintering furnace. The bottom of the door panel pushes the second slide bar down, and the second slide bar drives the connecting rod to rotate clockwise. The connecting rod cooperates with the circular ring to drive the sliding sleeve, the circular disc and the hexagonal protrusion to move up. The hexagonal protrusion extends into the hexagonal groove, and the sliding sleeve continues to move up. The circular disc drives the firing table to move up a certain distance. The firing table drives the bevel gear to move up. The bevel gear just meshes with the bevel gear ring, and the universal wheel disengages from the bottom inner wall of the sintering furnace. At this time, the door panel moves down to the bottom, and the arc-shaped baffle just cooperates with the arc-shaped limit plate to limit the firing table.

[0024] S3. The sintering furnace starts to sinter the embryo above the setter plate. The driving motor is started to drive the first slide bar to rotate. The first slide bar drives the setter plate to rotate slowly through the sliding sleeve, the disc, the hexagonal protrusion and the hexagonal groove. The setter plate drives the setter plate and the embryo to rotate in the sintering furnace. As a result, the embryo can be evenly heated in the sintering furnace, avoiding uneven heating of the embryo body that makes the embryo body shape uncontrollable, resulting in low target material utilization and waste of ITO target material.

[0025] S4. During the rotation of the setter, the setter drives the rotating shaft and the bevel gear to rotate with the sliding sleeve as the center. The bevel gear meshes with the bevel gear ring. Under the action of the bevel gear ring, the bevel gear drives the rotating shaft and the second bevel gear to rotate. The second bevel gear drives the rotating shaft and the fan blades through the first bevel gear. The fan blades blow the hot air from the sintering furnace upward. The hot air can heat the contact area between the blank and the setter through the through hole, avoiding the difference in heating between the lower part of the blank and other parts of the blank, which makes the blank shape uncontrollable.

[0026] S5. When the setter drives the embryo to rotate, the first high-temperature kiln camera and the second high-temperature kiln camera can capture the three-dimensional data of the embryo in real time. When the shrinkage rate of the embryo bottom is less than that of the embryo top, the rotation motor is started to drive the rotating disk to rotate. The sliding rod cooperates with the arc hole. Then, under the action of the arc hole, the sliding rod and the sliding block move toward the center along the trajectory of the rectangular hole, so that the multiple setter plates move closer to the center, thereby preventing a large difference in shrinkage rate between the top and bottom of the embryo, ensuring the controllable shape of the embryo, and avoiding waste of ITO target material;

[0027] S6. When the sintering of the embryo is completed, push the door panel upward, and the sliding sleeve, disc and hexagonal protrusion move downward under the action of their own gravity. The hexagonal protrusion is disengaged from the hexagonal groove, and the cross bar is hooked by the push rod with a hook, and the firing platform is pulled onto the placement plate. The placed embryo to be sintered is placed on one side of the placement plate, and the placement plate is rotated to exchange the position of the sintered embryo with that to be sintered, and the embryo to be sintered is pushed back into the sintering furnace for sintering. The sintered embryo is rotated again to the bottom of the cooling fan, and the cooling fan is started to cool the embryo, thereby accelerating the cooling time of the embryo and facilitating the transportation of the embryo.

[0028] It should be understood that the foregoing general description and the following detailed description are exemplary only and are not restrictive of the invention.

[0029] In the present invention, a first placement groove is provided on the top inner wall of the sintering furnace, and a second placement groove is provided on one side inner wall of the sintering furnace. A first high-temperature kiln camera is fixedly connected to the top inner wall of the first placement groove, and a second high-temperature kiln camera is fixedly connected to the inner wall of the second placement groove away from the firing platform. When the firing platform drives the embryo to rotate, the first high-temperature kiln camera and the second high-temperature kiln camera can capture three-dimensional data of the embryo in real time. When the shrinkage rate of the bottom of the embryo is less than that of the top of the embryo, the rotating motor is started to drive the rotating disk to rotate, so that the multiple firing plates are moved closer to the middle, thereby preventing excessive difference in shrinkage rate between the top and bottom of the embryo, ensuring that the shape of the embryo is controllable, and avoiding waste of ITO target material.

[0030] In the present invention, the outer wall of the rotating shaft is fixedly connected to a plurality of fan blades, the outer wall of the rotating shaft is fixedly sleeved with a first bevel gear, and a rotating shaft is rotated through the firing platform, one end of the rotating shaft is fixedly connected to a second bevel gear meshed with the first bevel gear, and the other end of the rotating shaft is fixedly connected to a bevel gear, and the bevel gear extends into the arc groove and meshes with the bevel gear ring, the firing platform drives the rotating shaft to rotate, and the bevel gear drives the rotating shaft and the second bevel gear to rotate under the action of the bevel gear ring, and the second bevel gear drives the fan blades to rotate, and the fan blades blow the hot air from the sintering furnace upward, and the hot air can heat the position where the embryo body contacts the firing plate through the through hole, thereby avoiding the difference in heating between the lower part of the embryo body and other parts of the embryo body, which makes the embryo body shape uncontrollable;

[0031] In the present invention, a sliding rod fixedly connected to the bottom of the sliding block is slidably connected in the rectangular hole, the output shaft of the rotating motor is fixedly connected to the rotating disk, a plurality of arc-shaped holes are provided in the rotating disk, and the sliding rod is slidably connected to the arc-shaped holes, and the top of the sliding block is fixedly connected to the firing plate. When the shrinkage rate of the bottom of the embryo body is less than that of the top of the embryo body, the rotating motor is started to drive the rotating disk to rotate, and the sliding rod cooperates with the arc-shaped hole, and then under the action of the arc-shaped hole, the sliding rod and the sliding block move toward the middle along the trajectory of the rectangular hole, so that the multiple firing plates are brought closer to the middle, thereby preventing the shrinkage rate of the top and bottom of the embryo body from being too different, ensuring that the shape of the embryo body is controllable, and avoiding waste of ITO target material;

[0032] In the present invention, the bottom inner wall of the transmission cavity is fixedly connected to a driving motor, the output shaft of the driving motor is fixedly connected to a first sliding rod, the outer wall of the first sliding rod is slidably connected to a sliding sleeve, and the top end of the sliding sleeve slides through the bottom inner wall of the sintering furnace and is fixedly connected to a disc, the driving motor is started to drive the first sliding rod to rotate, the first sliding rod drives the supporting table to rotate slowly through the sliding sleeve and the hexagonal groove, the supporting table drives the supporting plate and the embryo to rotate in the sintering furnace, and then the embryo can be evenly heated in the sintering furnace, avoiding uneven heating of the embryo that makes the embryo shape uncontrollable, resulting in low target material utilization and waste of ITO target material.

[0033] In the present invention, the driving motor drives the firing table and the embryo to rotate, so that the embryo is heated evenly in the sintering furnace to avoid deformation of the embryo. During the rotation of the embryo, the fan blades rotate to blow the hot air in the sintering furnace upward to avoid the heating difference between the lower part of the embryo and other parts of the embryo, making the shape of the embryo uncontrollable. In addition, the first high-temperature kiln camera and the second high-temperature kiln camera capture the three-dimensional data of the embryo in real time, and control the rotation of the rotating motor to drive the firing plate to move toward the middle, which can prevent the shrinkage rate of the top and bottom of the embryo from being too different, and avoid waste of ITO target material. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 A schematic diagram of a front cross-sectional structure of a size control device for avoiding waste of ITO target provided by an embodiment of the present invention;

[0035] Figure 2 A schematic diagram of a three-dimensional cross-sectional structure of a sliding sleeve of a size control device for avoiding waste of ITO target provided by an embodiment of the present invention;

[0036] Figure 3 A schematic diagram of a three-dimensional cross-sectional structure of a sintering platform of a size control device for avoiding waste of ITO targets provided by an embodiment of the present invention, as viewed from a first perspective;

[0037] Figure 4A schematic diagram of the three-dimensional structure of the support plate and the rotating motor of a size control device for avoiding waste of ITO targets provided by an embodiment of the present invention;

[0038] Figure 5 A schematic diagram of a three-dimensional cross-sectional structure from a second perspective of a sintering platform of a size control device for avoiding waste of ITO targets provided by an embodiment of the present invention;

[0039] Figure 6 A schematic diagram of the three-dimensional structure of a rotating shaft of a size control device for avoiding waste of ITO target provided by an embodiment of the present invention;

[0040] Figure 7 A schematic diagram of a three-dimensional cross-sectional structure of a curved limiting plate of a size control device for avoiding waste of ITO target provided by an embodiment of the present invention;

[0041] Figure 8 This is a schematic diagram of the main cross-sectional structure of a size control device for avoiding waste of ITO target materials provided by the embodiment of the present invention in Example 2.

[0042] Reference numerals:

[0043] 1. Sintering furnace; 2. Arc-shaped limit plate; 3. Firing platform; 4. Universal wheel; 5. Door panel; 6. Transmission chamber; 7. Drive motor; 8. First slide bar; 9. Sliding sleeve; 10. Disc; 11. Hexagonal projection; 12. Hexagonal groove; 13. Circular ring; 14. Connecting rod; 15. Second slide bar; 16. Sliding block; 17. Firing plate; 18. Sliding rod; 19. Circular groove; 20. Rotating motor; 21. Rotating disc; 22. Arc-shaped hole; 23. Groove; 24. Rotating shaft 25. First bevel gear; 26. Rotating shaft; 27. Second bevel gear; 28. Bevel gear; 29. ​​Arc groove; 30. Bevel gear ring; 31. Insulation cover; 32. Fan blades; 33. First placement slot; 34. Second placement slot; 35. First high-temperature kiln camera; 36. Second high-temperature kiln camera; 37. Insulation glass; 38. Through hole; 39. Cross bar; 40. Arc baffle; 41. Cooling fan; 42. Placement table; 43. Placement tray; 44. Rectangular hole. DETAILED DESCRIPTION

[0044] The embodiments of the present invention are described below with reference to the accompanying drawings.

[0045] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms, "connection", and "installation" should be understood in a broad sense. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. In addition, "communication" can be a direct connection or an indirect connection through an intermediate medium. Here, "fixed" means that the two are connected to each other and the relative position relationship after connection remains unchanged. The directional terms mentioned in the embodiments of the present invention, such as "inside", "outside", "top", "bottom", etc., are only reference to the directions of the accompanying drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of the present invention, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present invention.

[0046] In the embodiments of the present invention, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Therefore, features defined as "first" or "second" may explicitly or implicitly include one or more of the features.

[0047] In the embodiments of the present invention, "and / or" is simply a description of the association relationship between associated objects, indicating that three possible relationships exist. For example, "A and / or B" can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone. Furthermore, the character " / " in this document generally indicates that the associated objects are in an "or" relationship.

[0048] References to "one embodiment" or "some embodiments" in this specification mean that a particular feature, structure, or characteristic described in connection with that embodiment is included in one or more embodiments of the present invention. Thus, phrases such as "in one embodiment," "in some embodiments," "in other embodiments," and "in yet other embodiments" appearing in various places in this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "including," "comprising," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.

[0049] Example 1

[0050] Reference Figure 1 、 Figure 2 and Figure 3, a size control device for avoiding waste of ITO target material in this embodiment includes: a sintering furnace 1, and a sintering table 3 located in the sintering furnace 1, a door panel 5 is slidably connected to the sintering furnace 1, and an arc-shaped limit plate 2 is fixedly connected to the inner wall of the sintering furnace 1 on the side away from the door panel 5 by bolts, and a plurality of universal wheels 4 are provided at the bottom of the sintering table 3. The rotating component is arranged in the sintering furnace 1, and is used to make the sintering table 3 rotate smoothly in the sintering furnace 1 so that the embryo is heated evenly. The blowing component is arranged in the sintering table 3, and is used to make the bottom and the upper part of the embryo be heated evenly. The control group A component is provided on the top of the firing platform 3 to control the shrinkage rate of the bottom of the embryo. A cross bar 39 is provided on the side of the firing platform 3 close to the door panel 5. An arc-shaped baffle 40 is fixedly connected to the side of the door panel 5 close to the firing platform 3. When the door panel 5 is moved down and reset, the arc-shaped limit plate 2 cooperates with the arc-shaped baffle 40 to limit the firing platform 3, which is convenient for the alignment of the hexagonal protrusion 11 and the hexagonal groove 12. After the sintering of the embryo is completed, the cross bar 39 is hooked by the push rod with a hook to pull the firing platform 3 to the outside of the sintering furnace 1 to avoid burns to the staff when the firing platform 3 is manually pulled out.

[0051] Reference Figure 2 The rotating assembly includes a transmission chamber 6 arranged in the sintering furnace 1. The bottom inner wall of the transmission chamber 6 is fixedly connected to the driving motor 7 by bolts. The output shaft of the driving motor 7 is fixedly connected to the first slide bar 8 by a coupling. The outer wall of the first slide bar 8 is slidably connected to the sliding sleeve 9, and the top of the sliding sleeve 9 slides through the bottom inner wall of the sintering furnace 1 and is fixedly connected to the disc 10 by bolts, and the top of the disc 10 touches the bottom of the supporting table 3. The driving motor 7 is started to drive the first slide bar 8 to rotate. The first slide bar 8 drives the supporting table 3 to rotate slowly through the sliding sleeve 9 and the hexagonal groove 12. The supporting table 3 drives the supporting plate 17 and the embryo to rotate in the sintering furnace 1, so that the embryo can be evenly heated in the sintering furnace 1, avoiding uneven heating of the embryo that makes the embryo shape uncontrollable, resulting in low target material utilization and waste of ITO target material.

[0052] Reference Figure 6 and Figure 7The blowing assembly includes a groove 23 arranged at the top of the firing platform 3, and the inner wall of the bottom of the groove 23 is rotatably connected to the rotating shaft 24. The outer wall of the rotating shaft 24 is fixedly connected to a plurality of fan blades 32 by bolts. The outer wall of the rotating shaft 24 is fixedly sleeved with a first bevel gear 25 located below the fan blades 32. A rotating shaft 26 is rotated through the firing platform 3, and one end of the rotating shaft 26 extends into the groove 23 and is fixedly connected to the second bevel gear 27, and the second bevel gear 27 is meshed with the first bevel gear 25. The other end of the rotating shaft 26 is fixedly connected to the bevel gear 28. The arc-shaped limit plate 2 is provided on one side close to the firing platform 3. There is an arc groove 29, and the top inner wall of the arc groove 29 is fixedly connected to the bevel gear ring 30, and the bevel gear 28 extends into the arc groove 29 and meshes with the bevel gear ring 30. The firing table 3 drives the rotating shaft 26 to rotate, and the bevel gear 28 drives the rotating shaft 26 and the second bevel gear 27 to rotate under the action of the bevel gear ring 30. The second bevel gear 27 drives the fan blades 32 to rotate, and the fan blades 32 blow the hot air of the sintering furnace 1 upward. The hot air can heat the contact position between the embryo and the firing plate 17 through the through hole 38, thereby avoiding the difference in heating between the lower part of the embryo and other parts of the embryo, making the shape of the embryo uncontrollable.

[0053] Reference Figure 3 and Figure 4 The control assembly includes a plurality of sliding blocks 16 slidably connected to the top of the support platform 3, a circular groove 19 is provided in the support platform 3, and a plurality of rectangular holes 44 are provided on the top of the support platform 3 that are connected to the circular groove 19. A sliding rod 18 fixedly connected to the bottom of the sliding block 16 is slidably connected in the rectangular hole 44. A rotating motor 20 is fixedly connected to the inner wall of the bottom of the circular groove 19 by bolts. The output shaft of the rotating motor 20 is fixedly connected to a rotating disk 21 by bolts. A plurality of arc-shaped holes 22 are provided in the rotating disk 21, and the bottom end of the sliding rod 18 extends into the arc-shaped hole 22 and is slidably connected to the arc-shaped hole 22. The top of the sliding block 16 is fixed by bolts. It is connected to a firing plate 17, which has multiple through holes 38. One end of the rotating shaft 26 passes through one of the sliding rods 18. The bottom of the circular groove 19 is fixed with a heat insulation cover 31 for protecting the rotating motor 20 by bolts. The rotating motor 20 is started to drive the rotating disk 21 to rotate, and the sliding rod 18 cooperates with the arc hole 22. Then, under the action of the arc hole 22, the sliding rod 18 and the sliding block 16 move toward the middle along the trajectory of the rectangular hole 44, so that multiple firing plates 17 move closer to the middle, thereby preventing excessive difference in shrinkage rate between the top and bottom of the embryo, ensuring that the shape of the embryo is controllable, and avoiding waste of ITO target materials.

[0054] Reference Figure 2 and Figure 3A hexagonal groove 12 is provided at the bottom of the firing platform 3, and a hexagonal protrusion 11 that cooperates with the hexagonal groove 12 is fixedly connected to the top of the disc 10 by bolts. When the disc 10 moves up, the hexagonal protrusion 11 is stuck in the hexagonal groove 12, and then when the disc 10 rotates later, the cooperation between the hexagonal protrusion 11 and the hexagonal groove 12 can drive the firing platform 3 to rotate, so that the embryo is heated evenly in the sintering furnace 1.

[0055] Reference Figure 2 The top of the second slide bar 15 touches the bottom of the door panel 5, and the outer wall of the sliding sleeve 9 is provided with a ring 13, and the link bar 14 is away from one end of the second slide bar 15 and is rotatably connected with the ring 13. The door panel 5 moves down to push the second slide bar 15 down, and the second slide bar 15 pushes the link bar 14 to rotate clockwise, and the link bar 14 can cooperate with the ring 13 to push the sliding sleeve 9 and the disc 10 up. It can not only make the hexagonal protrusion 11 engage in the hexagonal groove 12 to facilitate the rotation of the firing platform 3, but also can push the firing platform 3 to move up, and then when the firing platform 3 rotates, it can make the firing platform 3 rotate more smoothly, prevent the firing platform 3 from shaking during the rotation process, resulting in uneven heating of the embryo body and uncontrollable embryo shape.

[0056] Reference Figure 1 The top inner wall of the sintering furnace 1 is provided with a first placement groove 33, and the inner wall on one side of the sintering furnace 1 is provided with a second placement groove 34. The top inner wall of the first placement groove 33 is fixedly connected with a first high-temperature kiln camera 35 by bolts, and the inner wall on the side of the second placement groove 34 away from the firing platform 3 is fixedly connected with a second high-temperature kiln camera 36 by bolts. The first placement groove 33 and the second placement groove 34 are both provided with insulating glass 37 for protecting the first high-temperature kiln camera 35 and the second high-temperature kiln camera 36. When the firing platform 3 drives the embryo to rotate, the first high-temperature kiln camera 35 and the second high-temperature kiln camera 36 can capture the three-dimensional data of the embryo in real time. When the shrinkage rate of the bottom of the embryo is less than that of the top of the embryo, the rotating motor 20 is started to drive the rotating disk 21 to rotate, so that the multiple firing plates 17 move closer to the middle to prevent the shrinkage rate of the top and bottom of the embryo from being too different, ensuring that the shape of the embryo is controllable and avoiding waste of ITO target materials.

[0057] Example 2

[0058] Reference Figure 1 、 Figure 2 and Figure 3, a size control device for avoiding waste of ITO target material in this embodiment includes: a sintering furnace 1, and a sintering table 3 located in the sintering furnace 1, a door panel 5 is slidably connected to the sintering furnace 1, and an arc-shaped limit plate 2 is fixedly connected to the inner wall of the sintering furnace 1 on the side away from the door panel 5 by bolts, and a plurality of universal wheels 4 are provided at the bottom of the sintering table 3. The rotating component is arranged in the sintering furnace 1, and is used to make the sintering table 3 rotate smoothly in the sintering furnace 1 so that the embryo is heated evenly. The blowing component is arranged in the sintering table 3, and is used to make the bottom and the upper part of the embryo be heated evenly. The control group A component is provided on the top of the firing platform 3 to control the shrinkage rate of the bottom of the embryo. A cross bar 39 is provided on the side of the firing platform 3 close to the door panel 5. An arc-shaped baffle 40 is fixedly connected to the side of the door panel 5 close to the firing platform 3. When the door panel 5 is moved down and reset, the arc-shaped limit plate 2 cooperates with the arc-shaped baffle 40 to limit the firing platform 3, which is convenient for the alignment of the hexagonal protrusion 11 and the hexagonal groove 12. After the sintering of the embryo is completed, the cross bar 39 is hooked by the push rod with a hook to pull the firing platform 3 to the outside of the sintering furnace 1 to avoid burns to the staff when the firing platform 3 is manually pulled out.

[0059] Reference Figure 2 The rotating assembly includes a transmission chamber 6 arranged in the sintering furnace 1. The bottom inner wall of the transmission chamber 6 is fixedly connected to a driving motor 7 by bolts. The output shaft of the driving motor 7 is fixedly connected to a first slide bar 8. The outer wall of the first slide bar 8 is slidably connected to a sleeve 9, and the top of the sleeve 9 slides through the bottom inner wall of the sintering furnace 1 and is fixedly connected to a disc 10 by bolts, and the top of the disc 10 touches the bottom of the sintering table 3. The driving motor 7 is started to drive the first slide bar 8 to rotate. The first slide bar 8 drives the sintering table 3 to rotate slowly through the sleeve 9 and the hexagonal groove 12. The sintering table 3 drives the sintering plate 17 and the embryo to rotate in the sintering furnace 1, so that the embryo can be evenly heated in the sintering furnace 1, avoiding uneven heating of the embryo that makes the embryo shape uncontrollable, resulting in low target material utilization and waste of ITO target material.

[0060] Reference Figure 6 and Figure 7The blowing assembly includes a groove 23 arranged at the top of the firing platform 3, and the inner wall of the bottom of the groove 23 is rotatably connected to the rotating shaft 24. The outer wall of the rotating shaft 24 is fixedly connected to a plurality of fan blades 32 by bolts. The outer wall of the rotating shaft 24 is fixedly sleeved with a first bevel gear 25 located below the fan blades 32. A rotating shaft 26 is rotated through the firing platform 3, and one end of the rotating shaft 26 extends into the groove 23 and is fixedly connected to the second bevel gear 27, and the second bevel gear 27 is meshed with the first bevel gear 25. The other end of the rotating shaft 26 is fixedly connected to the bevel gear 28. The arc-shaped limit plate 2 is provided on one side close to the firing platform 3. There is an arc groove 29, and the top inner wall of the arc groove 29 is fixedly connected to the bevel gear ring 30, and the bevel gear 28 extends into the arc groove 29 and meshes with the bevel gear ring 30. The firing table 3 drives the rotating shaft 26 to rotate, and the bevel gear 28 drives the rotating shaft 26 and the second bevel gear 27 to rotate under the action of the bevel gear ring 30. The second bevel gear 27 drives the fan blades 32 to rotate, and the fan blades 32 blow the hot air of the sintering furnace 1 upward. The hot air can heat the contact position between the embryo and the firing plate 17 through the through hole 38, thereby avoiding the difference in heating between the lower part of the embryo and other parts of the embryo, making the shape of the embryo uncontrollable.

[0061] Reference Figure 3 and Figure 4 The control assembly includes a plurality of sliding blocks 16 slidably connected to the top of the support platform 3, a circular groove 19 is provided in the support platform 3, and a plurality of rectangular holes 44 are provided on the top of the support platform 3 that are connected to the circular groove 19. A sliding rod 18 fixedly connected to the bottom of the sliding block 16 is slidably connected in the rectangular hole 44. A rotating motor 20 is fixedly connected to the inner wall of the bottom of the circular groove 19 by bolts. The output shaft of the rotating motor 20 is fixedly connected to a rotating disk 21 by bolts. A plurality of arc-shaped holes 22 are provided in the rotating disk 21, and the bottom end of the sliding rod 18 extends into the arc-shaped hole 22 and is slidably connected to the arc-shaped hole 22. The top of the sliding block 16 is fixed by bolts. It is connected to a firing plate 17, which has multiple through holes 38. One end of the rotating shaft 26 passes through one of the sliding rods 18. The bottom of the circular groove 19 is fixed with a heat insulation cover 31 for protecting the rotating motor 20 by bolts. The rotating motor 20 is started to drive the rotating disk 21 to rotate, and the sliding rod 18 cooperates with the arc hole 22. Then, under the action of the arc hole 22, the sliding rod 18 and the sliding block 16 move toward the middle along the trajectory of the rectangular hole 44, so that multiple firing plates 17 move closer to the middle, thereby preventing excessive difference in shrinkage rate between the top and bottom of the embryo, ensuring that the shape of the embryo is controllable, and avoiding waste of ITO target materials.

[0062] Reference Figure 2 and Figure 3A hexagonal groove 12 is provided at the bottom of the firing platform 3, and a hexagonal protrusion 11 that cooperates with the hexagonal groove 12 is fixedly connected to the top of the disc 10 by bolts. When the disc 10 moves up, the hexagonal protrusion 11 is stuck in the hexagonal groove 12, and then when the disc 10 rotates later, the cooperation between the hexagonal protrusion 11 and the hexagonal groove 12 can drive the firing platform 3 to rotate, so that the embryo is heated evenly in the sintering furnace 1.

[0063] Reference Figure 2 The top of the second slide bar 15 touches the bottom of the door panel 5, and the outer wall of the sliding sleeve 9 is provided with a ring 13, and the link bar 14 is away from one end of the second slide bar 15 and is rotatably connected with the ring 13. The door panel 5 moves down to push the second slide bar 15 down, and the second slide bar 15 pushes the link bar 14 to rotate clockwise, and the link bar 14 can cooperate with the ring 13 to push the sliding sleeve 9 and the disc 10 up. It can not only make the hexagonal protrusion 11 engage in the hexagonal groove 12 to facilitate the rotation of the firing platform 3, but also can push the firing platform 3 to move up, and then when the firing platform 3 rotates, it can make the firing platform 3 rotate more smoothly, prevent the firing platform 3 from shaking during the rotation process, resulting in uneven heating of the embryo body and uncontrollable embryo shape.

[0064] Reference Figure 1 The top inner wall of the sintering furnace 1 is provided with a first placement groove 33, and the inner wall on one side of the sintering furnace 1 is provided with a second placement groove 34. The top inner wall of the first placement groove 33 is fixedly connected with a first high-temperature kiln camera 35 by bolts, and the inner wall on the side of the second placement groove 34 away from the firing platform 3 is fixedly connected with a second high-temperature kiln camera 36 by bolts. The first placement groove 33 and the second placement groove 34 are both provided with insulating glass 37 for protecting the first high-temperature kiln camera 35 and the second high-temperature kiln camera 36. When the firing platform 3 drives the embryo to rotate, the first high-temperature kiln camera 35 and the second high-temperature kiln camera 36 can capture the three-dimensional data of the embryo in real time. When the shrinkage rate of the bottom of the embryo is less than that of the top of the embryo, the rotating motor 20 is started to drive the rotating disk 21 to rotate, so that the multiple firing plates 17 move closer to the middle to prevent the shrinkage rate of the top and bottom of the embryo from being too different, ensuring that the shape of the embryo is controllable and avoiding waste of ITO target materials.

[0065] Reference Figure 8A cooling fan 41 and a placement table 42 are fixedly connected to one side of the sintering furnace 1 by bolts, and the cooling fan 41 is located above the placement table 42. A placement tray 43 is rotatably connected to the placement table 42. The cross bar 39 is hooked by a hook push rod to pull the firing table 3 onto the placement tray 43, and the placed blank to be sintered is placed on one side of the placement tray 43. The placement tray 43 is rotated to exchange the position of the blank to be sintered with that to be sintered, and the blank to be sintered is pushed back into the sintering furnace 1 for sintering. The blank to be sintered is rotated to the bottom of the cooling fan 41 again, and the cooling fan 41 is started to cool the blank, thereby accelerating the cooling time of the blank and facilitating the transportation of the blank.

[0066] A method for using a size control device to avoid wasting ITO target material comprises the following steps:

[0067] S1. Place the ITO target embryo on top of the multiple setter plates 17, with the embryo located in the center of the multiple setter plates 17. Pull the door panel 5 upward, which drives the arc-shaped baffle 40 to move upward. Push the setter 3 into the sintering furnace 1 through the hook push rod until the setter 3 touches the arc-shaped limit plate 2 and the bevel gear 28 can extend into the arc-shaped groove 29, pushing the door panel 5 downward.

[0068] S2, the door panel 5 moves down to close the sintering furnace 1, and the bottom of the door panel 5 pushes the second slide bar 15 to move down. The second slide bar 15 drives the connecting rod 14 to rotate clockwise. The connecting rod 14 cooperates with the circular ring 13 to drive the sliding sleeve 9, the circular disc 10 and the hexagonal protrusion 11 to move up. The hexagonal protrusion 11 extends into the hexagonal groove 12, and the sliding sleeve 9 continues to move up. The circular disc 10 drives the firing platform 3 to move up a certain distance. The firing platform 3 drives the bevel gear 28 to move up. The bevel gear 28 just meshes with the bevel gear ring 30, and the universal wheel 4 is out of contact with the bottom inner wall of the sintering furnace 1. At this time, the door panel 5 moves down to the bottom, and the arc-shaped baffle 40 just cooperates with the arc-shaped limit plate 2 to limit the firing platform 3.

[0069] S3, the sintering furnace 1 starts to sinter the embryo above the setter plate 17, and the driving motor 7 is started to drive the first slide bar 8 to rotate. The first slide bar 8 drives the setter table 3 to rotate slowly through the sliding sleeve 9, the disc 10, the hexagonal protrusion 11 and the hexagonal groove 12. The setter table 3 drives the setter plate 17 and the embryo to rotate in the sintering furnace 1, so that the embryo can be evenly heated in the sintering furnace 1, avoiding uneven heating of the embryo that makes the embryo shape uncontrollable, resulting in low target material utilization and waste of ITO target material;

[0070] S4. During the rotation of the setter 3, the setter 3 drives the rotating shaft 26 and the bevel gear 28 to rotate with the sliding sleeve 9 as the center. The bevel gear 28 meshes with the bevel gear ring 30. Under the action of the bevel gear ring 30, the bevel gear 28 drives the rotating shaft 26 and the second bevel gear 27 to rotate. The second bevel gear 27 drives the rotating shaft 24 and the fan blades 32 to rotate through the first bevel gear 25. The fan blades 32 blow the hot air from the sintering furnace 1 upward. The hot air can heat the contact position between the embryo and the setter plate 17 through the through hole 38, thereby avoiding the difference in heating between the lower part of the embryo and other parts of the embryo, which makes the embryo shape uncontrollable.

[0071] S5. When the setter 3 drives the embryo to rotate, the first high-temperature kiln camera 35 and the second high-temperature kiln camera 36 can capture the three-dimensional data of the embryo in real time. When the shrinkage rate of the embryo bottom is smaller than that of the embryo top, the rotation motor 20 is started to drive the rotating disk 21 to rotate. The sliding rod 18 cooperates with the arc hole 22. Then, under the action of the arc hole 22, the sliding rod 18 and the sliding block 16 move toward the center along the trajectory of the rectangular hole 44, so that the multiple setter plates 17 move toward the center, thereby preventing a large difference in shrinkage rate between the top and bottom of the embryo, ensuring the controllable shape of the embryo, and avoiding waste of ITO target material.

[0072] S6. When the sintering of the embryo is completed, the door panel 5 is pushed upward, and the sliding sleeve 9, the disc 10 and the hexagonal protrusion 11 move downward under the action of their own gravity. The hexagonal protrusion 11 is disengaged from the hexagonal groove 12. The cross bar 39 is hooked by the push rod with a hook, and the firing platform 3 is pulled onto the placement tray 43. The placed embryo to be sintered is placed on one side of the placement tray 43. The placement tray 43 is rotated to exchange the position of the sintered embryo with that to be sintered. The embryo to be sintered is pushed back into the sintering furnace 1 for sintering. The sintered embryo is rotated again to the bottom of the cooling fan 41, and the cooling fan 41 is started to cool the embryo, thereby accelerating the cooling time of the embryo and facilitating the transportation of the embryo.

[0073] However, as is well known to those skilled in the art, the working principles and wiring methods of the drive motor 7 and the rotating motor 20 are commonplace, and are conventional means or common knowledge, and will not be elaborated here. Those skilled in the art can make any selections according to their needs or convenience.

[0074] The above are only specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. The embodiments of the present invention and the features therein can be combined with each other unless there is a conflict. Therefore, the scope of protection of the present invention shall be based on the scope of protection of the claims.

Claims

1. A size control device for avoiding waste of ITO target material, characterized in that: include: A sintering furnace (1), and a firing platform (3) located in the sintering furnace (1), wherein a door panel (5) is slidably connected to the sintering furnace (1), an arc-shaped limiting plate (2) is fixedly connected to the inner wall of the sintering furnace (1) away from the door panel (5), and a plurality of universal wheels (4) are provided at the bottom of the firing platform (3); A rotating assembly is arranged in the sintering furnace (1) and is used to make the support table (3) rotate smoothly in the sintering furnace (1) so that the embryo body is heated evenly; the rotating assembly includes a transmission cavity (6) arranged in the sintering furnace (1), the bottom inner wall of the transmission cavity (6) is fixedly connected to a driving motor (7), the output shaft of the driving motor (7) is fixedly connected to a first slide bar (8), the outer wall of the first slide bar (8) is slidably connected to a sliding sleeve (9), and the top end of the sliding sleeve (9) slides through the bottom inner wall of the sintering furnace (1) and is fixedly connected to a disc (10), and the top end of the disc (10) contacts the bottom of the support table (3); The blowing assembly is arranged in the firing platform (3) and is used to make the bottom and the upper part of the embryo body heated evenly; the blowing assembly includes a groove (23) arranged on the top of the firing platform (3), the bottom inner wall of the groove (23) is rotatably connected to a rotating shaft (24), the outer wall of the rotating shaft (24) is fixedly connected to a plurality of fan blades (32), the outer wall of the rotating shaft (24) is fixedly provided with a first bevel gear (25) located below the fan blades (32), the outer wall of the rotating shaft (24) is fixedly sleeved with a rotating shaft (26) rotatably passing through the firing platform (3), and the rotating shaft (26) is fixedly sleeved with a first bevel gear (25) located below the fan blades (32). One end of the shaft (26) extends into the groove (23) and is fixedly connected to a second bevel gear (27), and the second bevel gear (27) is meshed with the first bevel gear (25). The other end of the rotating shaft (26) is fixedly connected to a bevel gear (28). An arc-shaped groove (29) is provided on a side of the arc-shaped limiting plate (2) close to the firing platform (3). A bevel gear ring (30) is fixedly connected to the top inner wall of the arc-shaped groove (29). The bevel gear (28) extends into the arc-shaped groove (29) and is meshed with the bevel gear ring (30). A control component is provided on the top of the firing platform (3) and is used to control the shrinkage rate of the bottom of the embryo; the control component comprises a plurality of sliding blocks (16) slidably connected to the top of the firing platform (3), a circular groove (19) is provided in the firing platform (3), a plurality of rectangular holes (44) are provided on the top of the firing platform (3) and are connected to the circular groove (19), a sliding rod (18) fixedly connected to the bottom of the sliding block (16) is slidably connected in the rectangular hole (44), a rotating motor (20) is fixedly connected to the inner wall of the bottom of the circular groove (19), and the rotating motor The output shaft of the machine (20) is fixedly connected to a rotating disk (21), a plurality of arc-shaped holes (22) are provided in the rotating disk (21), and the bottom end of the sliding rod (18) extends into the arc-shaped hole (22) and is slidably connected to the arc-shaped hole (22), the top of the sliding block (16) is fixedly connected to a firing plate (17), a plurality of through holes (38) are provided in the firing plate (17), one end of the rotating shaft (26) passes through one of the sliding rods (18), and the bottom of the circular groove (19) is fixedly connected to a heat insulation cover (31) for protecting the rotating motor (20).

2. A size control device for avoiding waste of ITO target according to claim 1, characterized in that: The bottom of the firing platform (3) is provided with a hexagonal groove (12), and the top of the disc (10) is fixedly connected with a hexagonal protrusion (11) that matches the hexagonal groove (12).

3. A size control device for avoiding waste of ITO target material according to claim 1, characterized in that: A connecting rod (14) is rotatably connected in the transmission chamber (6), a second slide rod (15) is slidably passed through the inner wall of the bottom of the sintering furnace (1) and extends into the transmission chamber (6), and the bottom end of the second slide rod (15) touches the top of one end of the connecting rod (14), and the top of the second slide rod (15) touches the bottom of the door panel (5), and a ring (13) is rotatably sleeved on the outer wall of the sliding sleeve (9), and the end of the connecting rod (14) away from the second slide rod (15) is rotatably connected to the ring (13).

4. A size control device for avoiding waste of ITO target according to claim 1, characterized in that: The top inner wall of the sintering furnace (1) is provided with a first placement groove (33), and the inner wall of one side of the sintering furnace (1) is provided with a second placement groove (34). The top inner wall of the first placement groove (33) is fixedly connected to a first high-temperature kiln camera (35), and the inner wall of the second placement groove (34) away from the firing platform (3) is fixedly connected to a second high-temperature kiln camera (36). The first placement groove (33) and the second placement groove (34) are both provided with insulating glass (37) for protecting the first high-temperature kiln camera (35) and the second high-temperature kiln camera (36).

5. The size control device for avoiding waste of ITO target according to claim 1, characterized in that: A cross bar (39) is provided on one side of the firing platform (3) close to the door panel (5), and an arc-shaped baffle (40) is fixedly connected to one side of the door panel (5) close to the firing platform (3).

6. The size control device for avoiding waste of ITO target according to claim 1, characterized in that: A cooling fan (41) and a placement table (42) are fixedly connected to one side of the sintering furnace (1), and the cooling fan (41) is located above the placement table (42). A placement plate (43) is rotatably connected inside the placement table (42).

7. A method for avoiding waste of ITO target size control device according to any one of claims 1 to 6, characterized in that: The following steps are involved: S1. Place the ITO target embryo on top of a plurality of support plates (17), with the embryo located at the center of the plurality of support plates (17). Pull the door panel (5) upward, and the door panel (5) drives the arc-shaped baffle (40) to move upward. Push the support platform (3) into the sintering furnace (1) through the push rod with a hook until the support platform (3) touches the arc-shaped limit plate (2), and the bevel gear (28) can extend into the arc-shaped groove (29), pushing the door panel (5) downward. S2, the door panel (5) moves down to close the sintering furnace (1), the bottom of the door panel (5) pushes the second slide bar (15) to move down, the second slide bar (15) drives the connecting rod (14) to rotate clockwise, the connecting rod (14) cooperates with the circular ring (13) to drive the sliding sleeve (9), the circular disc (10) and the hexagonal protrusion (11) to move up, the hexagonal protrusion (11) extends into the hexagonal groove (12), and the sliding sleeve (9) continues to move up, the circular disc (10) drives the firing platform (3) to move up a certain distance, the firing platform (3) drives the bevel gear (28) to move up, the bevel gear (28) just meshes with the bevel gear ring (30), the universal wheel (4) is out of contact with the bottom inner wall of the sintering furnace (1), and the door panel (5) moves down to the bottom, and the arc baffle (40) just cooperates with the arc limit plate (2) to limit the firing platform (3); S3, the sintering furnace (1) starts to sinter the embryo above the firing plate (17), starts the driving motor (7) to drive the first slide bar (8) to rotate, and the first slide bar (8) drives the firing table (3) to rotate slowly through the sliding sleeve (9), the disc (10), the hexagonal protrusion (11) and the hexagonal groove (12), and the firing table (3) drives the firing plate (17) and the embryo to rotate in the sintering furnace (1), so that the embryo can be evenly heated in the sintering furnace (1), avoiding uneven heating of the embryo that makes the embryo shape uncontrollable, resulting in low target material utilization and waste of IT0 target material; S4. During the rotation of the firing platform (3), the firing platform (3) drives the rotating shaft (26) and the bevel gear (28) to rotate with the sliding sleeve (9) as the center of the circle. The bevel gear (28) is meshed with the bevel gear ring (30). Under the action of the bevel gear ring (30), the bevel gear (28) drives the rotating shaft (26) and the second bevel gear (27) to rotate. The second bevel gear (27) drives the rotating shaft (24) and the fan blade (32) to rotate through the first bevel gear (25). The fan blade (32) blows the hot air of the sintering furnace (1) upward. The hot air can heat the contact position between the embryo and the firing plate (17) through the through hole (38), thereby avoiding the difference in heating between the lower part of the embryo and other parts of the embryo, which makes the embryo shape uncontrollable. S5. When the firing platform (3) drives the embryo to rotate, the first high-temperature kiln camera (35) and the second high-temperature kiln camera (36) can capture the three-dimensional data of the embryo in real time. When the shrinkage rate of the bottom of the embryo is less than that of the top of the embryo, the rotating motor (20) is started to drive the rotating disk (21) to rotate, and the sliding rod (18) cooperates with the arc hole (22). Then, under the action of the arc hole (22), the sliding rod (18) and the sliding block (16) move toward the middle along the trajectory of the rectangular hole (44), so that the multiple firing plates (17) move toward the middle, thereby preventing the shrinkage rate of the top and bottom of the embryo from being too different, ensuring that the shape of the embryo is controllable, and avoiding the waste of IT0 target material; S6. When the sintering of the embryo is completed, the door panel (5) is pushed upward, and the sliding sleeve (9), the disc (10) and the hexagonal protrusion (11) move downward under the action of their own gravity. The hexagonal protrusion (11) is disengaged from the hexagonal groove (12). The cross bar (39) is hooked by the push rod with a hook, and the firing platform (3) is pulled onto the placement plate (43). The embryo to be sintered is placed on one side of the placement plate (43). The placement plate (43) is rotated to exchange the position of the embryo to be sintered with that of the embryo to be sintered. The embryo to be sintered is pushed back into the sintering furnace (1) for sintering. The embryo to be sintered is rotated again to the bottom of the cooling fan (41). The cooling fan (41) is started to cool the embryo, accelerate the cooling time of the embryo, and facilitate the transportation of the embryo.

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