A multi-channel vacuum calibration head for integrated circuit test systems

Abstract

This invention discloses a multi-channel vacuum calibration head for an integrated circuit test system, comprising a housing and a signal adapter board disposed within the housing. The inner wall of the housing and the signal adapter board form a closed cavity, and the inner wall of the housing is adapted to the outer wall of a single digital channel of the integrated circuit test system. An evacuation port connected to an external evacuation device is provided on one side of the inner wall of the housing to create a vacuum environment and simultaneously provide power for the signal adapter board to make pogoping contact with the digital channel of the integrated circuit test system. Multiple contacts are provided on one end face of the signal adapter board, the number and position of which are determined according to the number and distribution of pogoping on a single digital channel of the integrated circuit test system. A transmission cable is provided on the other end face of the signal adapter board. This invention has high adaptability, can meet the multi-channel calibration needs of integrated circuit test systems that can be upgraded at any time, and can effectively improve the accuracy of the calibration structure.

Description

Technical Field

[0001] This invention belongs to the field of metrology technology for integrated circuit testing systems, and more specifically, relates to a multi-channel vacuum calibration head for integrated circuit testing systems. Background Technology

[0002] The performance and quality of integrated circuits used in weapons and equipment or key missions are mainly ensured by integrated circuit testing systems. Therefore, integrated circuit testing systems, as support equipment for modern weapons and equipment, play a crucial role in their accurate measurement.

[0003] Currently, for multi-channel calibration of integrated circuit test systems, calibration boards are typically connected to the pogo pins of the integrated circuits. These calibration boards are bulky, and different test systems, due to varying assembly resources and manufacturer differences, design different calibration boards that cannot be changed once designed. Furthermore, these calibration boards have specific requirements for storage space and conditions, including dryness, dust-free environments, and constant temperature and humidity. With the increasing demands of integrated circuit testing, the integration level and number of digital channels in test systems are also being updated and increased. The calibration board-based method, due to its drawbacks such as long manufacturing time, high cost, low adaptability, and stringent storage environment, can no longer flexibly meet the multi-channel calibration needs of integrated circuit test systems that require frequent configuration upgrades. In addition, the air environment at the contact surface between the calibration board and the digital channel pogo pins of the integrated circuit test system cannot be kept constant. Slight differences in laboratory environments between different integrated circuit test systems mean that dust concentration and humidity in the air can affect the accuracy of calibration results. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the purpose of this invention is to provide a multi-channel vacuum calibration head for integrated circuit test systems, which has high adaptability, can meet the multi-channel calibration needs of integrated circuit test systems that can be upgraded at any time, and can effectively improve the accuracy of the calibration structure.

[0005] To achieve the above objectives, in a first aspect, the present invention provides a multi-channel vacuum calibration head for an integrated circuit testing system, comprising a housing with an opening at one end and a signal adapter board disposed within the housing, wherein...

[0006] The signal adapter board has multiple contacts on one end face. The number and position of the contacts are determined according to the number and distribution of the single digital channel pogoping of the integrated circuit test system. The other end face of the signal adapter board has a transmission cable for transmitting the signal on the contacts to the calibration device of the integrated circuit test system through the channel switching device.

[0007] The inner wall of the housing and the signal adapter board are fixed together by a rubber ring to form a closed cavity. The inner wall of the housing is adapted to the outer wall of a single digital channel of the integrated circuit test system. The bottom of the housing is provided with a rubber ring for sealing with the digital channel. Furthermore, an evacuation hole connected to an external evacuation device is provided on one side of the inner wall of the housing to create a vacuum environment and provide power to the signal adapter board, so that each contact on the signal adapter board makes contact with each pogoping in the digital channel of the integrated circuit test system.

[0008] The multi-channel vacuum calibration head for integrated circuit testing systems provided by this invention contacts the signal adapter board in the calibration head with the pogo pins of the digital channels of the integrated circuit testing system. This point-to-surface contact method effectively reduces wear on the pogo pins. Moreover, based on this design, the number of calibration heads can be changed according to the number of digital channels to complete the calibration, eliminating the need for custom-made calibration boards and effectively increasing the adaptability and sustainable upgrade capability of the calibration device. In addition, when the calibration head contacts the pogo pins of the digital channels of the integrated circuit testing system, a pneumatic method is used, which ensures uniform force between the contact points and surfaces while effectively ensuring that the contacts are in a vacuum state, thereby effectively improving the accuracy of the calibration results.

[0009] In one embodiment, a limiting plate is provided on the inner wall of the other side of the housing to mitigate the impact force when the signal adapter board comes into contact with the digital channel of the integrated circuit test system during pogoping.

[0010] In one embodiment, the signal adapter board has 68 contacts on one end face, and the 68 contacts are arranged in 4 rows with 17 positions in each row.

[0011] In one embodiment, a plurality of springs are provided on one end face of the signal adapter board. The springs are all located at the gaps between the contacts on the end face. The springs are used to reduce the impact force when the signal adapter board comes into contact with the digital channel of the integrated circuit test system during pogoping.

[0012] In one embodiment, the mechanical dimensions of the signal adapter board are 4.7cm × 1.2cm × 0.2cm.

[0013] Secondly, the present invention provides a multi-channel calibration system for an integrated circuit test system, comprising an integrated circuit test system calibration device, a channel switching device, a vacuum device, and the aforementioned multi-channel vacuum calibration head for an integrated circuit test system, wherein the number of calibration heads is the same as the number of digital channels of the integrated circuit test system.

[0014] Thirdly, the present invention provides a calibration method based on the multi-channel calibration system for integrated circuit testing systems described above, comprising the following steps:

[0015] (1) Configure the number of calibration heads according to the number of digital channels in the integrated circuit test system; cover each digital channel in the integrated circuit test system with all calibration heads, and use rubber rings to form a closed cavity between the housing in each calibration head and the digital channel it covers;

[0016] (2) Use an air extraction device to extract air from the air extraction holes in all calibration heads, so that the signal adapter board in each calibration head and its corresponding digital channel form a vacuum environment, thereby making the signal adapter board in each calibration head and its corresponding digital channel pogoping contact to complete signal transmission.

[0017] (3) The control channel switching device reads the signal of the specified digital channel from the calibration head and performs calibration of all digital channels one by one.

[0018] The multi-channel calibration system and method provided by this invention can be adapted to integrated circuit test systems with different configurations. When the configuration of the integrated circuit test system is upgraded, the number of digital channels will increase. Using the calibration method in this embodiment, calibration can be completed simply by increasing the number of calibration heads, without the need to customize a new calibration board. This can effectively increase the adaptability and sustainable upgrade capability of the calibration device. Moreover, the multi-channel calibration system and method provided by this invention can also achieve a vacuum environment during calibration, ensuring the stability of the calibration environment and keeping the calibration environment consistent for different sites and different test systems, thereby improving the accuracy of the calibration results. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of a multi-channel vacuum calibration head for an integrated circuit testing system provided in an embodiment of the present invention;

[0020] Figure 2 This is a schematic diagram of the structure of a digital channel in an integrated circuit testing system provided by an embodiment of the present invention;

[0021] Figure 3 This is a multi-channel calibration system for integrated circuit testing systems provided in one embodiment of the present invention. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0023] To address the issues of low compatibility and low accuracy of calibration results associated with traditional calibration boards used for signal transmission between integrated circuit test systems and their calibration devices, this invention designs a multi-channel vacuum calibration head that perfectly matches the dimensions of the integrated circuit test system's digital channel interface and directly contacts the pogo pins of the digital channel interface, thus replacing the traditional calibration board.

[0024] Figure 1 This is a schematic diagram of the structure of a multi-channel vacuum calibration head provided in an embodiment of the present invention, as shown below. Figure 1 As shown, the multi-channel vacuum calibration head includes a housing with an opening at one end and a signal adapter board disposed inside the housing.

[0025] The signal adapter board provided in this embodiment is used to connect to the digital channel pogo pin (e.g., in an integrated circuit test system) Figure 2 (As shown) They are in contact to transmit DC signals between the integrated circuit test system and the integrated circuit test system calibration device.

[0026] Specifically, the signal adapter board provided in this embodiment has multiple contacts on one end face. The number and position of the contacts are determined according to the number and distribution of pogopings in a single digital channel of the integrated circuit test system. Since a traditional integrated circuit test system has 68 pogopings in a single digital channel, arranged in 4 rows with 17 pogopings per row, the signal adapter board provided in this embodiment has 68 contacts, distributed in 4 rows with 17 contacts per row. The other end face of the signal adapter board provided in this embodiment is provided with a transmission cable for transmitting the DC signal transmitted to the signal adapter board to the integrated circuit test system calibration device through an external channel switching device.

[0027] This embodiment provides a housing whose inner wall is adapted to the outer wall of a single digital channel of the integrated circuit test system, allowing the calibration head to completely cover it. Since the mechanical dimensions of a single digital channel in a traditional integrated circuit test system are 4.7cm (length) × 1.2cm (width) × 1.15cm (height), the mechanical dimensions of the housing provided in this embodiment can be set to 4.8cm (length) × 1.21cm (width) × 1.6cm (height), ensuring accurate and stable coverage of the digital channel. To further ensure the accuracy of the calibration results, a rubber ring is provided at the bottom of the housing to seal the housing and the covered digital channel, forming a closed cavity and preventing environmental dust and other contaminants from affecting the calibration results. Furthermore, the housing in this embodiment has an evacuation port on one inner wall that connects to an external evacuation device to create a vacuum environment and provide power to the signal adapter board, ensuring that each contact on the signal adapter board makes one-to-one contact with each pogoping in the digital channel of the integrated circuit test system.

[0028] When calibrating an integrated circuit test system, the number of calibration heads is selected according to the number of digital channels in the integrated circuit test system to be calibrated, and then each selected calibration head is installed on each digital channel of the integrated circuit test system.

[0029] When calibration begins, the air extraction device evacuates the air extraction ports in each calibration head. At this time, for each digital channel, the air pressure in the sealed cavity formed by the signal adapter board and the housing decreases. Due to the air pressure, the sealed cavity formed by the signal adapter board and the housing will automatically and evenly move downwards, so that the contacts in the signal adapter board of each calibration head make contact with the pogo pins of the digital channel. The DC signal output by the digital channel of the integrated circuit test system will be transmitted to the contacts of the signal adapter board. The contacts will then export all the signals on the signal adapter board through the transmission cable and transmit them to the calibration device of the integrated circuit test system through the channel switching device.

[0030] The multi-channel vacuum calibration head for integrated circuit testing systems provided in this embodiment contacts the signal adapter board in the calibration head with the pogo pins of the digital channels of the integrated circuit testing system. This point-to-surface contact method effectively reduces wear on the pogo pins. Moreover, based on this design, the number of calibration heads can be changed according to the number of digital channels to complete the calibration, eliminating the need for custom-made calibration boards. This effectively increases the adaptability and sustainable upgrade capability of the calibration device. In addition, when the calibration head contacts the pogo pins of the digital channels of the integrated circuit testing system, a pneumatic method is used. This ensures uniform force between the contact points and surfaces while effectively ensuring that the contacts are in a vacuum state, which can effectively improve the accuracy of the calibration results.

[0031] In one embodiment, to mitigate the impact force when the signal adapter board contacts the digital channel pogo pins and prevent wear and damage, a limiting plate can be provided on one inner wall of the housing. Additionally, multiple springs can be provided on the end face of the signal adapter board where the contacts are located, with the springs positioned at the gaps between the contacts on this end face, further mitigating the impact force when the signal adapter board contacts the digital channel pogo pins of the integrated circuit test system.

[0032] like Figure 3 As shown, the present invention also provides a multi-channel calibration system for an integrated circuit test system, including an integrated circuit test system calibration device, a channel switching device, a vacuum device, and a multi-channel vacuum calibration head provided in the above embodiments. The number of calibration heads is the same as the number of digital channels of the integrated circuit test system.

[0033] Specifically, the calibration method for the multi-channel calibration system provided in this embodiment includes the following steps:

[0034] Step 1: Configure the number of calibration heads according to the number of digital channels in the integrated circuit test system; then cover each digital channel in the integrated circuit test system with all calibration heads, and use rubber rings to form a closed cavity between the housing of each calibration head and the digital channel it covers.

[0035] Step 2: Use a vacuum device to evacuate the vacuum holes in all calibration heads, creating a vacuum environment between the signal adapter board in each calibration head and its corresponding digital channel. This allows the signal adapter board in each calibration head to pogo-ping with its corresponding digital channel, completing signal transmission.

[0036] Step 3: Once all calibrated digital channels cover the calibration head and a vacuum testing environment is created, the integrated circuit test system controls the channel switching device to read the signal from the calibration head of the specified digital channel. This signal is compared with a pre-calibrated signal value. If the comparison deviation is within the set range, the electrical parameters in the integrated circuit test system are calibrated. Otherwise, the channel switching device is controlled to read the signal from another digital channel of the integrated circuit test system, and the above comparison process is repeated until the calibration of all digital channels is completed.

[0037] The multi-channel calibration system and method provided in this embodiment can be adapted to integrated circuit test systems with different configurations. When the configuration of the integrated circuit test system is upgraded, the number of digital channels will increase. Using the calibration method in this embodiment, calibration can be completed simply by increasing the number of calibration heads, without having to customize a new calibration board. This can effectively increase the adaptability and sustainable upgrade capability of the calibration device. Moreover, the multi-channel calibration system and method provided in this embodiment can also achieve a vacuum environment during calibration, ensuring the stability of the calibration environment and keeping the calibration environment consistent for different sites and different test systems, thereby improving the accuracy of the calibration results.

[0038] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A multi-channel vacuum calibration head for an integrated circuit testing system, characterized in that, It includes a housing with an opening at one end and a signal adapter board disposed inside the housing, wherein, The signal adapter board has multiple contacts on one end face. The number and position of the contacts are determined according to the number and distribution of the single digital channel pogoping of the integrated circuit test system. The other end face of the signal adapter board has a transmission cable for transmitting the signal on the contacts to the calibration device of the integrated circuit test system through the channel switching device. The inner wall of the housing and the signal adapter board are fixed together by a rubber ring to form a closed cavity. The inner wall of the housing is adapted to the outer wall of a single digital channel of the integrated circuit test system. The bottom of the housing is provided with a rubber ring for sealing with the digital channel. Furthermore, an evacuation hole connected to an external evacuation device is provided on one side of the inner wall of the housing to create a vacuum environment and provide power to the signal adapter board, so that each contact on the signal adapter board makes contact with each pogoping in the digital channel of the integrated circuit test system.

2. The multi-channel vacuum calibration head for an integrated circuit testing system according to claim 1, characterized in that, A limiting plate is provided on the inner wall of the other side of the housing to reduce the impact force when the signal adapter board comes into contact with the digital channel of the integrated circuit test system during pogoping.

3. The multi-channel vacuum calibration head for an integrated circuit testing system according to claim 1 or 2, characterized in that, The signal adapter board has 68 contacts on one end face, arranged in 4 rows with 17 contacts in each row.

4. The multi-channel vacuum calibration head for an integrated circuit testing system according to claim 3, characterized in that, Multiple springs are also provided on one end face of the signal adapter board. The multiple springs are all located at the gaps of the contact points on the end face. The springs are used to reduce the impact force when the signal adapter board comes into contact with the digital channel pogoping of the integrated circuit test system.

5. The multi-channel vacuum calibration head for an integrated circuit testing system according to claim 3, characterized in that, The mechanical dimensions of the signal adapter board are 4.7cm × 1.2cm × 0.2cm.

6. A multi-channel calibration system for integrated circuit testing systems, characterized in that, The device includes an integrated circuit test system calibration apparatus, a channel switching apparatus, a vacuum device, and a plurality of calibration heads for multi-channel calibration of an integrated circuit test system under vacuum environment as described in any one of claims 1 to 5, wherein the number of calibration heads is the same as the number of digital channels of the integrated circuit test system.

7. A calibration method based on the multi-channel calibration system for integrated circuit test systems as described in claim 6, characterized in that, Includes the following steps: (1) Configure the number of calibration heads according to the number of digital channels in the integrated circuit test system; cover each digital channel in the integrated circuit test system with all calibration heads, and use rubber rings to form a closed cavity between the housing in each calibration head and the digital channel it covers; (2) Use an air extraction device to extract air from the air extraction holes in all calibration heads, so that the signal adapter board in each calibration head and its corresponding digital channel form a vacuum environment, thereby making the signal adapter board in each calibration head and its corresponding digital channel pogoping contact to complete signal transmission. (3) The control channel switching device reads the signal of the specified digital channel exported from the calibration head and performs calibration on all digital channels one by one.

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