A silicon nitride atmosphere sintering furnace

Abstract

The present invention discloses a silicon nitride atmosphere sintering furnace, belonging to the field of ceramic technology, which includes a furnace body and a control cabinet. The inner side wall of the arc-shaped groove formed on the outer side walls at both ends of the furnace body is connected with an arc-shaped plate, and the side wall of the arc-shaped plate is connected with a clamping component. A furnace cover is arranged on one side of the clamping component, and a double-layer water-cooling ring is connected to the side wall of the furnace cover. A connecting flange and eight layers of high-temperature molybdenum plates are respectively arranged in the double-layer water-cooling ring. Fixed plates are connected to the outer side walls at both ends of the furnace body, and a limiting rubber plate is connected to the side wall of the fixed plate. A plurality of heating plates are connected to the inner side wall of the furnace body. Through the arrangement of the limiting rubber plate and the double-layer water-cooling ring, the present invention can limit the rotation of the furnace cover after opening and closing, facilitating loading the furnace with materials, improving production efficiency, and also facilitating rapid cooling of the furnace interior. The cylindrical arrangement of the heating plates and the heating chamber can make the temperature in the furnace body uniform, ensuring the quality of the produced ceramics and reducing heat loss during the heating and firing process.

Description

Technical Field

[0001] The present invention relates to the technical field of ceramics, and in particular to a silicon nitride atmosphere sintering furnace. Background Art

[0002] A sintering furnace is a special equipment that enables powder compacts to obtain the required physical and mechanical properties as well as microstructures through sintering. The sintering furnace is used to dry the slurry on the silicon wafer, remove the organic components in the slurry, and complete the sintering of the aluminum back field and grid lines.

[0003] There is a closely related relationship between the field of nitride product production and sintering furnaces. Developing a silicon nitride atmosphere sintering furnace is of great significance. The effective usable space of the silicon nitride atmosphere sintering furnace is 650mm * 650mm * 2100mm, which can be used for sintering larger ceramic products. This equipment solves the market demand for large-size silicon nitride products and fills the gap in large-scale atmosphere sintering furnaces in China at present. This process is necessary to promote technological progress and industry development. Summary of the Invention

[0004] The purpose of the present invention is to solve the problem of how to achieve automated high-yield production of large-volume functional ceramics in the prior art, and to propose a silicon nitride atmosphere sintering furnace.

[0005] In order to achieve the above purpose, the present invention adopts the following technical scheme:

[0006] A silicon nitride atmosphere sintering furnace includes a furnace body and a control cabinet. The inner side walls of the arc-shaped grooves opened on the outer side walls at both ends of the furnace body are connected with arc-shaped plates. A clamping component is connected to the side wall of the arc-shaped plate. A furnace cover is arranged on one side of the clamping component. A double-layer water-cooling ring is connected to the side wall of the furnace cover. A connecting flange and eight layers of high-temperature molybdenum plates are respectively arranged in the double-layer water-cooling ring. Fixing plates are connected to the outer side walls at both ends of the furnace body. A limiting rubber plate is connected to the side wall of the fixing plate. A plurality of heating plates are connected to the inner side wall of the furnace body. A seven-layer high-temperature molybdenum reflection screen and a heating chamber are arranged inside the heating plates. A placing platform is connected to the inner side wall of the heating chamber. A vacuum pump component is connected to the back side wall of the control cabinet.

[0007] Preferably, the clamping component is composed of a fixed rod, a limiting plate and a clamping plate. The end of the fixed rod is fixedly connected to the side wall of the arc-shaped plate. The other end of the fixed rod is fixedly connected to the side wall of the limiting plate. The side wall of the arc-shaped plate is slidably connected to the inner side wall of the arc-shaped groove opened on the outer side wall of the furnace body.

[0008] Preferably, a groove is opened on the clamping plate. The inner side wall of the groove is adapted to the outer side wall of the fixed rod. The bottom end of the clamping plate is fixedly connected to the outer side wall of the double-layer water-cooling ring. The side wall of the double-layer water-cooling ring is fixedly connected to the side wall of the furnace cover.

[0009] Preferably, the side wall of the furnace cover is fixedly connected to the side wall of the connecting flange, the side wall of the eight-layer high-temperature molybdenum plate is fixedly connected to the side wall of the furnace cover, the side walls of the double-layer water-cooled ring and both ends of the furnace body are provided with flow holes, and adjacent two of the flow holes are communicated through a telescopic hose.

[0010] Preferably, the side wall of the fixing plate is fixedly connected to the outer side wall of the furnace body, the side wall of the fixing plate is fixedly connected to the side wall of the limiting rubber plate, three limiting grooves are provided on the side wall of the limiting rubber plate, and rotating shafts are fixedly connected to the upper and lower end faces of the square groove provided on the fixing plate.

[0011] Preferably, three rotating rings are rotatably connected to the outer side wall of the rotating shaft, a connecting rod is fixedly connected to the outer side wall of the rotating ring, and the outer side wall of the connecting rod is adapted to the inner side wall of the limiting groove on the limiting rubber plate.

[0012] Preferably, the inner side wall of the furnace body is fixedly connected to the side walls of a plurality of heating plates respectively, and the plurality of heating plates are arranged in an annular array. Two right-angle support plates are fixedly connected to the inner side wall of the furnace body, and the top side wall of the right-angle support plate is fixedly connected to the outer side wall of the seven-layer high-temperature molybdenum reflection screen.

[0013] Preferably, the inner side wall of the seven-layer high-temperature molybdenum reflection screen is fixedly connected to the outer side wall of the heating chamber, the inner side wall of the heating chamber is fixedly connected to the outer side wall of the placement platform, and the end face of the seven-layer high-temperature molybdenum reflection screen is adapted to the side wall of the eight-layer high-temperature molybdenum plate.

[0014] Preferably, two brackets are fixedly connected to the outer side wall of the bottom end of the furnace body, a base is fixedly connected to the bottom end of the bracket, and an air duct and a temperature-sensitive connecting rod are respectively fixedly connected to the side wall of the furnace body.

[0015] Preferably, the vacuum pump assembly is composed of a diffusion pump and a Roots pump. Both the diffusion pump and the Roots pump are fixedly connected to the back side wall of the control cabinet through an air extraction pipe. The side wall of the control cabinet is respectively fixedly connected to the end parts of the air duct and the temperature-sensitive connecting rod, and a display screen is arranged on the front side wall of the control cabinet.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0017] 1. In this solution, through the arrangement of the limiting rubber plate and the double-layer water-cooled ring, the rotation can be limited after the furnace cover is opened and closed, which facilitates loading the furnace with materials, improves the production efficiency, and also facilitates the rapid cooling of the furnace interior.

[0018] 2. In this solution, through the cylindrical arrangement of the heating plates and the heating chamber, the temperature inside the furnace body can be made uniform, the quality of the produced ceramics is ensured, and the heat loss during the heating and firing process is reduced.

[0019] 3. In this solution, through the setting of the vacuum pump assembly, the production process of silicon nitride ceramics can be made more streamlined and efficient, significantly improving the comprehensive performance of silicon nitride ceramics. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 FIG. is a schematic structural diagram of a silicon nitride atmosphere sintering furnace proposed by the present invention;

[0021] Figure 2 FIG. is a schematic structural diagram of a temperature-sensitive connecting rod in a silicon nitride atmosphere sintering furnace proposed by the present invention;

[0022] Figure 3 FIG. is a schematic structural diagram of a placement platform in a silicon nitride atmosphere sintering furnace proposed by the present invention;

[0023] Figure 4 FIG. is a schematic structural diagram of a connecting flange in a silicon nitride atmosphere sintering furnace proposed by the present invention;

[0024] Figure 5 FIG. is a schematic structural diagram of a heating plate in a silicon nitride atmosphere sintering furnace proposed by the present invention;

[0025] Figure 6 is Figure 1 an enlarged view of part A in;

[0026] Figure 7 is Figure 4 an enlarged view of part B in.

[0027] In the figure: 1, furnace body; 2, control cabinet; 3, arc plate; 4, fixed rod; 5, limit plate; 6, clamping plate; 7, furnace cover; 8, double-layer water-cooled ring; 9, connecting flange; 10, eight-layer high-temperature molybdenum plate; 11, fixing plate; 12, rotating shaft; 13, rotating ring; 14, connecting rod; 15, limit rubber plate; 16, heating plate; 17, right-angle support plate; 18, seven-layer high-temperature molybdenum reflection screen; 19, heating chamber; 20, placement platform; 21, support; 22, base; 23, air duct; 24, temperature-sensitive connecting rod; 25, display screen; 26, diffusion pump; 27, Roots pump; 28, suction pipe. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0028] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0029] Embodiment 1

[0030] Refer to Figures 1-7, a silicon nitride atmosphere sintering furnace, comprising a furnace body 1 and a control cabinet 2. An arc-shaped plate 3 is connected to the inner side wall of the arc-shaped groove opened on the outer side walls at both ends of the furnace body 1. A clamping assembly is connected to the side wall of the arc-shaped plate 3. A furnace cover 7 is arranged on one side of the clamping assembly. A double-layer water cooling ring 8 is connected to the side wall of the furnace cover 7. A connecting flange 9 and eight layers of high-temperature molybdenum plates 10 are respectively arranged inside the double-layer water cooling ring 8. Fixed plates 11 are connected to the outer side walls at both ends of the furnace body 1. A limiting rubber plate 15 is connected to the side wall of the fixed plate 11;

[0031] Further, the clamping assembly is composed of a fixed rod 4, a limiting plate 5 and a clamping plate 6. The end of the fixed rod 4 is fixedly connected to the side wall of the arc-shaped plate 3. The other end of the fixed rod 4 is fixedly connected to the side wall of the limiting plate 5. The side wall of the arc-shaped plate 3 is slidably connected to the inner side wall of the arc-shaped groove opened on the outer side wall of the furnace body 1. A groove is opened on the clamping plate 6, and the inner side wall of the groove is adapted to the outer side wall of the fixed rod 4. The bottom end of the clamping plate 6 is fixedly connected to the outer side wall of the double-layer water cooling ring 8. The side wall of the double-layer water cooling ring 8 is fixedly connected to the side wall of the furnace cover 7. The side wall of the furnace cover 7 is fixedly connected to the side wall of the connecting flange 9. The side wall of the eight layers of high-temperature molybdenum plates 10 is fixedly connected to the side wall of the furnace cover 7. Flow holes are opened on the side walls of the double-layer water cooling ring 8 and both ends of the furnace body 1. Adjacent two flow holes are communicated through a telescopic hose. The side wall of the fixed plate 11 is fixedly connected to the outer side wall of the furnace body 1. The side wall of the fixed plate 11 is fixedly connected to the side wall of the limiting rubber plate 15. Three limiting grooves are opened on the side wall of the limiting rubber plate 15. A rotating shaft 12 is fixedly connected to the upper and lower end faces of the square groove opened on the fixed plate 11. Three rotating rings 13 are rotatably connected to the outer side wall of the rotating shaft 12. A connecting rod 14 is fixedly connected to the outer side wall of the rotating ring 13. The outer side wall of the connecting rod 14 is adapted to the inner side wall of the limiting groove on the limiting rubber plate 15;

[0032] It should be noted that: according to the shape and size of the pressed blank, the furnace loading plan is designed to maximize the use of the furnace space, reduce waste and save costs. The shells of the silicon nitride atmosphere sintering furnace are all of a three-section structure, including a front furnace cover 7, a furnace body 1 and a rear furnace cover 7 from front to back. The furnace body 1 and the front and rear furnace covers 7 both adopt a double-layer water sandwich structure. The circulating cooling water can be supplied to the front furnace cover 7, the inside of the furnace body 1 and the rear furnace cover 7 respectively by a water pump and then through a water tank to achieve the purpose of cooling. After closing the furnace cover 7, slide the arc-shaped plate 3 and drive the limiting plate 5 to slide together through the fixed rod 4. After the fixed rod 4 enters the groove on the clamping plate 6, the rotation of the furnace cover 7 can be limited. The eight layers of high-temperature molybdenum plates 10 and the seven layers of high-temperature molybdenum reflection screens 18 form a closed environment. When feeding, open the furnace cover 7 and let the connecting rod 14 rotate into the limiting groove on the heating limiting rubber plate 15, which can limit the rotation of the furnace cover 7 after it is opened and avoid affecting the feeding. The outer layer of the furnace body 1 and the furnace cover 7 is made of high-quality carbon steel material, and the inner layer of the furnace body 1, the furnace cover 7 and the connecting flange 9 are made of stainless steel material. Cooling water is introduced into the sandwich to help the furnace body 1 cool down quickly;

[0033] The further advantages of adopting the above are as follows: It can limit the rotation of the furnace cover 7 after opening and closing, facilitating the charging of the furnace, improving production efficiency, and also facilitating the rapid cooling of the furnace interior.

[0034] Embodiment 2

[0035] Reference Figures 1-7 , a plurality of heating plates 16 are connected to the inner side wall of the furnace body 1, a seven-layer high-temperature molybdenum reflection screen 18 and a heating chamber 19 are arranged inside the heating plate 16, and a placement platform 20 is connected to the inner side wall of the heating chamber 19;

[0036] Furthermore, the inner side wall of the furnace body 1 is fixedly connected to the side walls of a plurality of heating plates 16 respectively, and the plurality of heating plates 16 are arranged in an annular array. Two right-angle support plates 17 are fixedly connected to the inner side wall of the furnace body 1. The top side wall of the right-angle support plate 17 is fixedly connected to the outer side wall of the seven-layer high-temperature molybdenum reflection screen 18. The inner side wall of the seven-layer high-temperature molybdenum reflection screen 18 is fixedly connected to the outer side wall of the heating chamber 19. The inner side wall of the heating chamber 19 is fixedly connected to the outer side wall of the placement platform 20. The end face of the seven-layer high-temperature molybdenum reflection screen 18 is adapted to the side wall of the eight-layer high-temperature molybdenum plate 10. Two supports 21 are fixedly connected to the outer side wall of the bottom end of the furnace body 1. The bottom ends of the supports 21 are fixedly connected to a base 22. The side walls of the furnace body 1 are respectively fixedly connected to a gas guide pipe 23 and a temperature-sensitive connecting rod 24;

[0037] It should be noted that during operation, a batch of small parts are stacked on the placement platform 20 by means of a support frame, and the blank products are pushed into the furnace through the placement platform 20. The heating chamber 19 adopts a cylindrical structure, and the heating plates 16 are evenly distributed in the circumferential direction to achieve good temperature uniformity. The closed heat preservation environment formed by the eight-layer high-temperature molybdenum plate 10 and the seven-layer high-temperature molybdenum reflection screen 18 can reduce heat loss during heating;

[0038] The further advantages of adopting the above are as follows: It can make the temperature inside the furnace body 1 uniform, ensure the quality of the produced ceramics, and reduce heat loss during the heating and firing process.

[0039] Embodiment 3

[0040] Reference Figures 1-7 , a vacuum pump assembly is connected to the back side wall of the control cabinet 2;

[0041] Furthermore, the vacuum pump assembly is composed of a diffusion pump 26 and a Roots pump 27. Both the diffusion pump 26 and the Roots pump 27 are fixedly connected to the back side wall of the control cabinet 2 through an air extraction pipe 28. The side walls of the control cabinet 2 are respectively fixedly connected to the ends of the gas guide pipe 23 and the temperature-sensitive connecting rod 24. A display screen 25 is arranged on the front side wall of the control cabinet 2;

[0042] It should be noted that there are control buttons on the control cabinet 2 set beside the furnace lid 7, which are used to cooperate with the operations of pushing, rotating, and pressing the furnace lid 7 to complete the furnace loading. Before work, the gas in the furnace is pumped out by the vacuum pump assembly to achieve a high-vacuum state inside the furnace. Then, sufficient high-purity nitrogen gas is connected to the pipeline, and the corresponding program is selected on the control cabinet 1 to start working until sintering is completed. The main working process is: heating up → vacuum pumping → nitrogen flushing → heat preservation → cooling → product discharging. Nitride ceramics are preferably sintered with nitrogen. The working principle of the silicon nitride atmosphere sintering furnace is to fill a certain amount of high-purity nitrogen gas into the furnace body 1 after vacuum pumping, and perform atmosphere sintering on the blank products to obtain a β-SiN4 phase with low solubility and high-temperature stable crystal form. The β-Si3N4 grains are generally columnar or needle-shaped. The appearance of columnar grains can play a role in whisker toughening. The diffusion pump 26 and the roots pump 27 are prior arts and will not be elaborated here;

[0043] The further advantages of adopting the above are as follows: This can make the production process of silicon nitride ceramics more concise and fast, and significantly improve the comprehensive performance of silicon nitride ceramics.

[0044] When the present invention is in use, according to the shape and size of the pressed blank, a furnace loading plan is designed to maximize the utilization of the space inside the furnace, reduce waste, and save costs. The shells of the silicon nitride atmosphere sintering furnace are all of a three-section structure, including a front furnace lid 7, a furnace body 1, and a rear furnace lid 7 from front to back. Both the furnace body 1 and the front and rear furnace lids 7 adopt a double-layer water interlayer structure. The circulating cooling water can be supplied to the front furnace lid 7, the inside of the furnace body 1, and the rear furnace lid 7 respectively by the water pump through the water tank to achieve the purpose of cooling and temperature reduction. After closing the furnace lid 7, slide the arc-shaped plate 3 and drive the limit plate 5 to slide together through the fixed rod 4. After the fixed rod 4 enters the groove on the clamping plate 6, the rotation of the furnace lid 7 can be limited. The eight-layer high-temperature molybdenum plates 10 and the seven-layer high-temperature molybdenum reflection screens 18 form a closed environment. When feeding, open the furnace lid 7, and let the connecting rod 14 rotate into the limit groove on the heating limit rubber plate 15, which can limit the rotation of the furnace lid 7 after it is opened, avoiding affecting the feeding. The outer layer of the furnace body 1 and the furnace lid 7 is made of high-quality carbon steel, and the inner layer of the furnace body 1, the furnace lid 7, and the connecting flange 9 are made of stainless steel. Cooling water is introduced into the interlayer to help the furnace body 1 cool down quickly. In this way, the rotation of the furnace lid 7 can be limited after it is opened and closed, which facilitates furnace loading and feeding, improves production efficiency, and also facilitates rapid cooling of the inside of the furnace;

[0045] During work, a batch of small parts are stacked on the placement platform 20 by the support frame, and the blank products are pushed into the furnace through the placement platform 20. The heating chamber 19 adopts a cylindrical structure, and the heating plates 16 are evenly distributed in the circumferential direction to achieve good temperature uniformity. The closed heat preservation environment formed by the eight-layer high-temperature molybdenum plates 10 and the seven-layer high-temperature molybdenum reflection screens 18 can reduce the heat loss during heating. In this way, the temperature inside the furnace body 1 can be made uniform, ensuring the quality of the produced ceramics and reducing the heat loss during the heating and firing process;

[0046] There are control buttons on the control cabinet 2 set beside the furnace lid 7, which are used to cooperate with the operations of pushing, rotating and pressing the furnace lid 7 to complete the furnace loading. Before work, the gas in the furnace is pumped out by the vacuum pump assembly to achieve a high vacuum state in the furnace. Then, sufficient high-purity nitrogen is connected to the pipeline. Start working according to the corresponding program selected for the product on the control cabinet 1 until the sintering is completed. The main working process is: heating up → vacuum pumping → nitrogen flushing → heat preservation → cooling → product discharging. Nitride ceramics are preferably sintered with nitrogen. The working principle of the silicon nitride atmosphere sintering furnace is to fill a certain amount of high-purity nitrogen into the furnace body 1 after vacuum pumping, and perform atmosphere sintering on the blank products to obtain the β-SiN4 phase with low solubility and high-temperature stable crystal form. The β-Si3N4 grains are generally columnar or needle-shaped. The appearance of columnar grains can play a role in whisker toughening, which can make the production process of silicon nitride ceramics more concise and fast, and significantly improve the comprehensive performance of silicon nitride ceramics.

[0047] As mentioned above, only the preferred specific embodiments of the present invention are described, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.

Claims

1. A silicon nitride atmosphere sintering furnace, comprising a furnace body (1) and a control cabinet (2), characterized in that, On the inner sidewalls of the arc-shaped grooves formed on the outer sidewalls at both ends of the furnace body (1), there are arc-shaped plates (3) connected. On the sidewall of the arc-shaped plate (3), there is a clamping assembly. On one side of the clamping assembly, there is a furnace cover (7). On the sidewall of the furnace cover (7), there is a double-layer water-cooling ring (8). Inside the double-layer water-cooling ring (8), there are respectively a connecting flange (9) and eight layers of high-temperature molybdenum plates (10). On the outer sidewalls at both ends of the furnace body (1), there are fixed plates (11) connected. On the sidewall of the fixed plate (11), there is a limit rubber plate (15) connected. On the inner sidewall of the furnace body (1), there are multiple heating plates (16) connected. Inside the heating plate (16), there are seven layers of high-temperature molybdenum reflection screens (18) and a heating chamber (19). On the inner sidewall of the heating chamber (19), there is a placement platform (20) connected. On the back sidewall of the control cabinet (2), there is a vacuum pump assembly; The clamping assembly is composed of a fixed rod (4), a limit plate (5), and a clamping plate (6). The end of the fixed rod (4) is fixedly connected to the sidewall of the arc-shaped plate (3). The other end of the fixed rod (4) is fixedly connected to the sidewall of the limit plate (5). The sidewall of the arc-shaped plate (3) is slidably connected to the inner sidewall of the arc-shaped groove formed on the outer sidewall of the furnace body (1). There is a groove on the clamping plate (6), and the inner sidewall of the groove is adapted to the outer sidewall of the fixed rod (4). The bottom end of the clamping plate (6) is fixedly connected to the outer sidewall of the double-layer water-cooling ring (8). The sidewall of the double-layer water-cooling ring (8) is fixedly connected to the sidewall of the furnace cover (7). The sidewall of the furnace cover (7) is fixedly connected to the sidewall of the connecting flange (9). The sidewall of the eight layers of high-temperature molybdenum plates (10) is fixedly connected to the sidewall of the furnace cover (7). There are flow holes on the sidewalls of the double-layer water-cooling ring (8) and at both ends of the furnace body (1). Adjacent two of the flow holes are connected through a telescopic hose. The sidewall of the fixed plate (11) is fixedly connected to the outer sidewall of the furnace body (1). The sidewall of the fixed plate (11) is fixedly connected to the sidewall of the limit rubber plate (15). There are three limit grooves on the sidewall of the limit rubber plate (15). On the upper and lower end faces of the square groove formed on the fixed plate (11), there are rotating shafts (12) connected. On the outer sidewall of the rotating shaft (12), there are three rotating rings (13) rotatably connected. On the outer sidewall of the rotating ring (13), there is a connecting rod (14) connected. The outer sidewall of the connecting rod (14) is adapted to the inner sidewall of the limit groove on the limit rubber plate (15). The inner sidewall of the furnace body (1) is respectively fixedly connected to the sidewalls of multiple heating plates (16), and the multiple heating plates (16) are arranged in an annular array. The inner sidewall of the furnace body (1) is fixedly connected to two right-angle support plates (17). The top sidewall of the right-angle support plate (17) is fixedly connected to the outer sidewall of the seven layers of high-temperature molybdenum reflection screens (18).

2. The silicon nitride atmosphere sintering furnace according to claim 1, characterized in that, The inner sidewall of the seven layers of high-temperature molybdenum reflection screens (18) is fixedly connected to the outer sidewall of the heating chamber (19). The inner sidewall of the heating chamber (19) is fixedly connected to the outer sidewall of the placement platform (20). The end face of the seven layers of high-temperature molybdenum reflection screens (18) is adapted to the sidewall of the eight layers of high-temperature molybdenum plates (10).

3. The silicon nitride atmosphere sintering furnace according to claim 1, wherein Two brackets (21) are fixedly connected to the outer side wall of the bottom end of the furnace body (1), a base (22) is fixedly connected to the bottom end of the bracket (21), and an air guide pipe (23) and a temperature-sensitive connecting rod (24) are respectively fixedly connected to the side wall of the furnace body (1).

4. The silicon nitride atmosphere sintering furnace according to claim 3, characterized in that, The vacuum pump assembly is composed of a diffusion pump (26) and a Roots pump (27). Both the diffusion pump (26) and the Roots pump (27) are fixedly connected to the back side wall of the control cabinet (2) through an air extraction pipe (28). The side wall of the control cabinet (2) is respectively fixedly connected to the ends of the air guide pipe (23) and the temperature-sensitive connecting rod (24). A display screen (25) is arranged on the front side wall of the control cabinet (2).

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