A clamping and transfer device for scanning electron microscopes

Abstract

This application discloses a clamping and transfer device for scanning electron microscopes, comprising: a through-structure, a connecting rod, a connector, and a sample stage. The through-structure is sealed to the side wall of a cavity and has a hollow portion. The connecting rod is axially rotatable within the hollow portion, and a first locking structure is provided at the end of the connecting rod near the cavity. The connector is connected to the end of the through-structure near the cavity and has a first insertion structure. The sample stage is disposed within the cavity and has a second insertion structure that inserts into the first insertion structure, a second locking structure that engages with the first locking structure, and a sample loading hole for fixing the sample. This application addresses the technical problems of poor sealing and the inability of the clamping and transfer device to separate from the sample in a timely manner when using existing clamping and transfer devices for scanning electron microscopes.

Description

Technical Field

[0001] This application relates to the field of scanning electron microscopy, and more specifically to a clamping and transfer device for scanning electron microscopy. Background Technology

[0002] A scanning electron microscope (SEM) is an electron optics instrument that uses a focused electron beam to scan the surface of a sample line by line. The electron beam bombards the sample surface, generating secondary electrons or backscattered electrons. The efficiency of this generation depends on the sample surface morphology and material. The SEM collects these secondary electrons or backscattered electrons and represents the position of the electron beam scan and the number of generated secondary electrons or backscattered electrons in a two-dimensional image, thus obtaining the SEM secondary electron image or backscattered electron image. The resolution of SEM images can reach the nanometer level or even better than 1.0 nanometer, playing an irreplaceable role in fields such as new materials, new energy, national defense, and scientific research.

[0003] Scanning electron microscopes (SEMs) operate within a vacuum chamber, requiring a clamping and transfer device to move the sample to the appropriate position. Existing clamping and transfer devices for SEMs have the following problems: the operating end of the clamping and transfer device is located outside the vacuum chamber, which can easily allow external air to enter the vacuum chamber during sample clamping and transfer, affecting the working effect of the SEM; after the sample is moved, the clamping and transfer device remains connected to the sample, causing it to interfere with the beam illumination when the SEM scans the sample, thus affecting the scanning effect. Summary of the Invention

[0004] This application aims to address the technical problems of poor sealing and inability to promptly separate the clamping and transfer device from the sample when using existing clamping and transfer devices for scanning electron microscopes. Therefore, it provides a clamping and transfer device for scanning electron microscopes.

[0005] To solve the above-mentioned technical problems, the technical solution of this application is as follows: A clamping and transfer device for a scanning electron microscope, comprising:

[0006] It has a through-structure that is sealed to the side wall of the cavity and has a hollow section;

[0007] A connecting rod is axially rotatably disposed within the hollow portion, and a first locking structure is provided at the end of the connecting rod near the cavity.

[0008] A connector is connected to one end of the through-structure near the cavity, and the connector is provided with a first plug-in structure;

[0009] The sample stage is set in a cavity and is provided with a second plug-in structure that plugs into and cooperates with the first plug-in structure, a second locking structure that snaps into and cooperates with the first locking structure, and a sample loading hole for fixing the sample.

[0010] The through-structure is adapted to move axially and drive the first plug-in structure to engage or disengage with the second plug-in structure. The connecting rod is adapted to drive the first locking structure to rotate axially and engage or disengage with the second locking structure, thereby realizing the connection or separation of the sample stage and the through-structure.

[0011] Preferably, the first insertion structure is a guide head or a guide hole, and correspondingly, the second insertion structure is a guide hole or a guide head, with the guide head and the guide hole being disposed opposite to each other.

[0012] Preferably, the through structure includes a through plate that is sealed to the side wall of the cavity and a through pipe that passes through the through plate and connects the inside and outside of the cavity, and a sealing element is provided at the connection between the through pipe and the through plate.

[0013] Preferably, the first locking structure is a key or a latch, and correspondingly, the second locking structure is a latch or a key. The latch is positioned facing the key, and the latch includes two oppositely arranged "L"-shaped latches with their openings facing each other. The two latches form a "T"-shaped latching part in the middle, and the end of the key facing the latch is provided with a "T"-shaped latching block that engages with the latching part.

[0014] Preferably, the two locking elements are respectively positioned diagonally opposite each other on the latch.

[0015] Preferably, the connector has a through hole along the axial direction, and the locking block of the key passes through the outside of the through hole.

[0016] Preferably, the outer wall of the key is provided with a limiting groove with two non-connected ends along the circumferential direction, and a limiting member located in the limiting groove is fixed on the through tube. When the limiting member abuts against the two ends of the limiting groove, the key and the lock are in a locked or unlocked state.

[0017] Preferably, the outer wall of the key is provided with a sealing groove with two connected ends along the circumferential direction, and the sealing groove is sealed to the inner wall of the through tube through the sealing element.

[0018] Preferably, a handle seat is fixedly connected to the end of the through tube away from the cavity. The handle seat is provided with a limiting hole in the same direction as the axial direction of the through tube. A guide rod is slidably provided in the limiting hole, and one end of the guide rod is connected to the through plate.

[0019] Preferably, the handle seat is axially rotatably connected to the end away from the cavity, and the handle is connected to the connecting rod.

[0020] The technical solution of this application has the following advantages:

[0021] 1. The scanning electron microscope (SEM) clamping and transfer device provided in this application includes a sample stage for easy sample fixation. Through the insertion and engagement of the first and second insertion structures, and the snap-fit ​​engagement of the first and second locking structures, the connector and sample stage are fixedly connected, facilitating the clamping and transfer of the sample stage. After clamping and transferring the sample stage, the first and second locking structures are released, the first and second insertion structures are separated, and the connector is moved away from the sample stage. This avoids the problem of the connector or through-hole structure being too close to the sample during SEM scanning, thus preventing interference with the beam illumination. Furthermore, the through-hole structure is connected to the side of the cavity via a seal, ensuring that even if there is relative displacement between the through-hole structure and the side wall of the cavity, the cavity's sealing is not easily compromised. This device is easy to operate, has a reasonable structural design, strong operational stability, and high economic efficiency, making it suitable for widespread application.

[0022] 2. In the scanning electron microscope clamping and transfer device provided in this application, the "T"-shaped locking part, after engaging with the "T"-shaped locking block, can limit the axial displacement of the locking block and the sample stage. Combined with the insertion and clamping engagement of the guide head and guide hole, this makes the connection between the connector and the sample stage more stable. When it is necessary to release the locking block and locking part, simply rotate the connecting rod. The connecting rod drives the locking block to rotate, and when the locking block and locking part are misaligned, the release state can be switched, facilitating operation. Compared to setting the two locking parts vertically or horizontally opposite each other, setting the two locking parts diagonally opposite the locking buckle helps improve the stability of the locking block and locking part engagement.

[0023] 3. The clamping and transfer device for scanning electron microscope provided in this application has a compact structure, occupies little space, and is reliably sealed during operation. The length of components such as the through tube, connecting rod, and key can be changed according to the actual transfer distance and position requirements, making it highly adaptable and conducive to wide application.

[0024] 4. In the clamping and transfer device for scanning electron microscope provided in this application, the key's locking block is engaged with the locking piece through the through hole on the connector. The through hole limits the key, preventing it from shifting. It also helps to reduce the space occupied by the clamping and transfer device in the cavity, thus improving the precision of the device.

[0025] 5. In the scanning electron microscope clamping and transfer device provided in this application, the limiting groove and the limiting member restrict the rotation range of the key. When the limiting member abuts against one end of the limiting groove, the locking block and the locking member are in a locked state; when the limiting member abuts against the other end of the limiting groove, the locking block and the locking member are in a released state. With the limiting groove and the limiting member provided, the locking block and the locking member can be precisely switched between locked and released states.

[0026] 6. In the clamping and transfer device for scanning electron microscope provided in this application, a sealing groove is provided on the outer wall of the key. The sealing groove is sealed to the inner wall of the through tube through a sealing element. When the key rotates in the through tube, the key and the through tube can still maintain good sealing performance.

[0027] 7. In the clamping and transfer device for scanning electron microscope provided in this application, the limiting hole and the guide rod restrict the through tube to move only along the axial direction, prevent the through tube from deviating, prevent the guide head from misaligning with the guide hole, and prevent the key from misaligning with the lock, thereby improving the accuracy and stability of the device during use.

[0028] 8. The clamping and transfer device for scanning electron microscope provided in this application is provided with a handle base and a handle. The axial movement of the through tube is controlled by the handle base, and the rotation of the connecting rod is controlled by the handle, which facilitates the operation of the device. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the overall structure of the clamping and transfer device for scanning electron microscope in the embodiments of this application;

[0031] Figure 2 This is a schematic diagram showing the cooperation between the clamping and transfer mechanism and the sample stage in the embodiments of this application;

[0032] Figure 3 A cross-sectional schematic diagram of the clamping and transferring mechanism in the embodiments of this application;

[0033] Figure 4 This is a schematic diagram of the overall structure of the sample stage in the embodiments of this application.

[0034] Figure 5 This is a schematic diagram of the overall structure of the key in an embodiment of this application;

[0035] Figure 6 This is a schematic diagram of the overall structure of the connector in the embodiments of this application.

[0036] Explanation of reference numerals in the attached drawings: 1. Cavity; 2. Sample stage; 3. Connector; 4. Through pipe; 5. Handle seat; 6. Handle; 7. Limiting block; 8. Guide rod; 9. Guide head; 10. Through plate; 11. Seal; 12. Key; 13. Limiting component; 14. Fixing component; 15. Limiting hole; 16. Connecting rod; 17. Sleeve; 18. Sample loading hole; 19. Guide hole; 20. Lock; 21. Clip; 22. Clip block; 23. Limiting groove; 24. Sealing groove; 25. Through hole. Detailed Implementation

[0037] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0038] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0039] Example 1

[0040] This embodiment provides a clamping and transfer device for a scanning electron microscope (SEM), used in conjunction with the SEM, which typically operates within a vacuum chamber 1. For example... Figure 1 - Figure 6 As shown, the clamping and transfer device for this scanning electron microscope includes a through structure, a connecting rod 16, a connector 3, and a sample stage 2.

[0041] The scanning electron microscope (SEM) scans the sample within the cavity chamber 1. A through-structure is sealed to the side wall of the cavity chamber 1. The through-structure has a cylindrical hollow section connecting the inside and outside of the cavity chamber 1. A connecting rod 16 is disposed within the hollow section and can rotate around its own axis within the hollow section. A first locking structure is provided at the end of the connecting rod 16 near the cavity chamber 1. A connector 3 is connected to the end of the through-structure near the cavity chamber 1 and has a first insertion structure. A sample stage 2 is disposed within the cavity chamber 1. The sample stage 2 has a second insertion structure that engages with the first insertion structure, a second locking structure that engages with the first locking structure, and a sample loading hole 18 for fixing the sample.

[0042] The through-structure is adapted to move along its own axis and drive the first plug-in structure to plug in or separate from the second plug-in structure. The connecting rod 16 is adapted to drive the first locking structure to rotate around its own axis and be in a snap-fit ​​or unscrewed state with the second locking structure, thereby realizing the connection or separation of the sample stage 2 and the through-structure.

[0043] The working process of the scanning electron microscope clamping and transfer device provided in this embodiment is as follows: First, the sample to be scanned is placed on the sample loading hole 18. Then, the through-hole structure is pushed to move it closer to the sample stage 2. The through-hole structure drives the connector 3 and the first insertion structure to move towards the sample stage 2. Pushing the through-hole structure stops when the first insertion structure and the second insertion structure on the sample stage 2 are engaged. After the first insertion structure and the second insertion structure are engaged, they can only be separated after axial relative displacement. Twisting the connecting rod 16 around its own axis causes the first locking structure to rotate axially. When the first locking structure rotates a certain angle, it reaches a locking state with the second locking structure. After the first locking structure and the second locking structure reach the locking state, they can restrict the axial relative displacement of the first insertion structure and the second insertion structure. At this point, the connector 3 is fixedly connected to the sample stage 2. The sample stage 2 can be moved through the through structure. After moving the sample stage 2 to the appropriate position, stop moving it, and then twist the connecting rod 16 to rotate around its own axis. The connecting rod 16 drives the first locking structure to rotate axially. When the first locking structure rotates again to a certain angle, it reaches a loose state with the second locking structure. After the first locking structure and the second locking structure reach the loose state, they will not restrict the axial relative displacement of the first insertion structure and the second insertion structure. At this time, pull the through structure away from the sample stage 2 to separate the first insertion structure and the second insertion structure. At this time, the sample is fixed in an appropriate position in the cavity 1 by the sample stage 2. It should be noted that the sample stage 2 can be installed in the cavity 1 by guide rails or other structures. How the sample stage 2 is fixed in the cavity 1 is existing technology and is not the focus of this invention, so it will not be described in detail.

[0044] This embodiment includes a sample stage 2 for sample fixation. Through the insertion and engagement of the first and second insertion structures, and the snap-fitting of the first and second locking structures, the connector 3 and sample stage 2 are fixedly connected, facilitating the clamping and transfer of the sample stage 2. After clamping and transferring the sample stage 2, the first and second locking structures are released, and the first and second insertion structures are separated, moving the connector 3 away from the sample stage 2. This avoids the problem of the connector 3 or the through-hole structure being too close to the sample and affecting the beam illumination during scanning with the scanning electron microscope. Furthermore, the through-hole structure is connected to the side of the cavity 1 via a sealing element 11, so even if there is relative displacement between the through-hole structure and the side wall of the cavity 1, the sealing of the cavity 1 is not easily compromised. This device is easy to operate, has a reasonable structural design, strong operational stability, and high economic efficiency, making it suitable for widespread application.

[0045] Example 2

[0046] This embodiment is a further improvement on Embodiment 1. The first insertion structure is a guide head 9 or a guide hole 19, and correspondingly, the second insertion structure is a guide hole 19 or a guide head 9, with the guide head 9 and the guide hole 19 arranged opposite to each other. That is, one of the first and second insertion structures is a guide head 9, and the other is a guide hole 19. Figure 4 and Figure 6 As shown, in this embodiment, the first insertion structure is set as the guide head 9, and the second insertion structure is set as the guide hole 19.

[0047] The through-hole structure includes a through-hole plate 10 that is sealed to the side wall of the cavity 1, and a through-hole pipe 4 that passes through the through-hole plate 10 and connects the inside and outside of the cavity 1. A sealing element 11 is provided at the connection between the through-hole pipe 4 and the through-hole plate 10. The through-hole plate 10 is fixedly installed on the side wall of the cavity 1, and the through-hole plate 10 will not have relative displacement with the cavity 1 when using this device. The hollow part of the through-hole pipe 4 is the hollow section, and the through-hole pipe 4 can move along its own axial direction on the through-hole plate 10. The end of the through-hole pipe 4 closest to the cavity 1 is connected to the connector 3.

[0048] The first locking structure is a key 12 or a latch 20. Correspondingly, the second locking structure is a latch 20 or a key 12. The latch 20 is positioned facing the key 12. That is, one of the first and second locking structures is a key 12, and the other is a latch 20. In this embodiment, the first locking structure is set as the key 12, and the second locking structure is set as the latch 20. Figure 4 As shown, the latch 20 includes two L-shaped locking members 21 arranged opposite each other. The openings of the two locking members 21 are arranged opposite each other, and the two locking members 21 are respectively located diagonally opposite each other on the latch 20. The two locking members 21 form a T-shaped locking part in the middle, as shown. Figure 5As shown, the end of the key 12 facing the latch 20 is provided with a "T"-shaped locking block 22 that engages with the locking part.

[0049] When it is necessary to clamp and move the sample stage 2, push the through tube 4 towards the sample stage 2. The through tube 4 drives the guide head 9 to insert into the guide hole 19 to complete the insertion. The through tube 4 drives the locking block 22 to the locking part through the connecting rod 16. At this time, the locking block 22 and the locking part are still in a loose state. By rotating the connecting rod 16, the connecting rod 16 drives the locking block 22 to rotate and lock it with the two locking pieces 21. At this time, the sample stage 2 and the connector 3 are fixedly connected. After moving the sample stage 2 to the appropriate position, it is necessary to separate the connector 3 from the sample stage 2. First, rotate the connecting rod 16. The connecting rod 16 drives the locking block 22 to rotate. After the locking block 22 rotates, it disengages from the locking part and is released from the locking pieces 21. Then, pull the through tube 4 away from the sample stage 2 until the guide head 9 is completely separated from the guide hole 19. The "T"-shaped locking part, after engaging with the "T"-shaped locking block 22, restricts axial displacement between the locking block 22 and the sample stage 2. Combined with the insertion and clamping engagement of the guide head 9 and the guide hole 19, the connection between the connector 3 and the sample stage 2 becomes more stable. When it is necessary to loosen the locking block 22 and the locking part, simply rotate the connecting rod 16. The connecting rod 16 drives the locking block 22 to rotate, and when the locking block 22 and the locking part are misaligned, the loosening state can be switched, facilitating operation. Moreover, compared to setting the two locking pieces 21 vertically or horizontally opposite each other, setting the two locking pieces 21 diagonally opposite each other on the latch 20 helps improve the stability of the locking engagement between the locking block 22 and the locking part. This device has a compact structure, occupies little space, and provides reliable sealing during operation. The lengths of components such as the through pipe 4, connecting rod 16, and key 12 can be changed according to actual transmission distance and position requirements, making it highly adaptable and facilitating wide application.

[0050] like Figure 3 and Figure 6 As shown, the connector 3 has a through hole 25 along the axial direction. Most of the key 12 is disposed in the through hole 25 or the hollow part, and the locking block 22 of the key 12 extends to the outside of the through hole 25. The locking block 22 of the key 12 is engaged with the locking piece 21 through the through hole 25 on the connector 3. The through hole 25 plays a limiting role for the key 12, preventing the key 12 from shifting. It also helps to reduce the space occupied by the clamping and transfer device in the cavity 1, thus improving the precision of the device.

[0051] The key 12 has a circumferentially circumferentially provided limiting groove 23 with non-connected ends. A limiting member 13 located within the limiting groove 23 is fixed on the through tube 4. When the limiting member 13 abuts against both ends of the limiting groove 23, the key 12 and the latch 20 are in the corresponding locked or unlocked state. The function of the limiting groove 23 and the limiting member 13 is to limit the rotation range of the key 12. When the limiting member 13 abuts against one end of the limiting groove 23, the locking block 22 and the locking member 21 are in the locked state. When the limiting member 13 abuts against the other end of the limiting groove 23, the locking block 22 and the locking member 21 are in the unlocked state. With the limiting groove 23 and the limiting member 13 provided, the locking block 22 and the locking member 21 can be precisely switched between the locked / unlocked state.

[0052] like Figure 5 As shown, the outer wall of the key 12 has a sealing groove 24 with both ends connected along the circumferential direction. The sealing groove 24 is sealed to the inner wall of the through pipe 4 through a sealing element 11. The outer wall of the key 12 has at least two sealing grooves 24 along the axial direction. The sealing grooves 24 are sealed to the inner wall of the through pipe 4 through the sealing element 11, so that a good seal can still be maintained between the key 12 and the through pipe 4 when the key 12 rotates inside the through pipe 4.

[0053] A handle seat 5 is fixedly connected to the end of the through pipe 4 away from the cavity 1. A limiting block 7 is provided below the handle seat 5. The limiting block 7 has a limiting hole 15 in the same direction as the through pipe 4. A guide rod 8 is slidably arranged in the limiting hole 15. One end of the guide rod 8 is connected to the through plate 10. A handle 6 is rotatably connected to the end of the handle seat 5 away from the cavity 1. The handle 6 is connected to the connecting rod 16 through a retaining sleeve 17 and a fixing member 14. The end of the handle 6 near the connecting rod 16 is rotatably connected to the handle seat 5, and this section of the handle seat 5 is provided with a sealing member 11.

[0054] The limiting hole 15 and the guide rod 8 restrict the through tube 4 to move only axially, preventing it from shifting and ensuring that the guide head 9 is aligned with the guide hole 19 and the key 12 with the latch 20, thus improving the accuracy and stability of the device during use. A handle seat 5 and a handle 6 are provided; the handle seat 5 controls the axial movement of the through tube 4, and the handle 6 controls the rotation of the connecting rod 16, facilitating operation of the device.

[0055] In Embodiments 1 and 2, seals 11 and fasteners 14 are used in several locations. The seal 11 can be a sealing rubber ring or other types of seals 11. The fastener 14 can be a bolt, screw, or other fastener 14 that can achieve fixation.

[0056] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this application.

Claims

1. A clamping and transfer device for a scanning electron microscope, characterized in that, The utility model relates to a kind of sample loading device, including: Through structure, with the side wall of cavity chamber (1) sealed connection, it is equipped with hollow part; Connecting rod (16), axial rotation is arranged in the hollow part, the first locking structure is equipped in the connecting rod (16) near the end of cavity chamber (1); Joint (3), with the first insertion structure of the through structure near the end of cavity chamber (1) is connected, the first insertion structure is equipped on the joint (3); Sample loading platform (2), it is arranged in cavity chamber (1), it is equipped with the second insertion structure of the first insertion structure insertion cooperation, the second locking structure of the first locking structure clamping cooperation and the sample loading hole (18) for fixed sample; The through structure is suitable for axial insertion movement and drives the first insertion structure and the second insertion structure insertion cooperation or separation, the connecting rod is suitable for driving the first locking structure axial rotation and the second locking structure is in clamping or loosening state, to realize the connection or separation of the sample loading platform (2) and the through structure; The first insertion structure is guide head (9) or guide hole (19), correspondingly, the second insertion structure is guide hole (19) or guide head (9), the guide head (9) is oppositely arranged with the guide hole (19); The through structure includes with the side wall of cavity chamber (1) sealed connection's through plate (10) and the through pipe (4) of being threaded on the through plate (10) and being communicated inside and outside of cavity chamber (1), the connecting place of the through pipe (4) and the through plate (10) is equipped with sealing element (11).

2. The specimen holder transfer device for a scanning electron microscope according to claim 1, wherein The first locking structure is lock key (12) or lock catch (20), correspondingly, the second locking structure is lock catch (20) or lock key (12), the lock catch (20) is arranged towards the lock key (12), the lock catch (20) includes two oppositely arranged ''L'' type clamping pieces (21), the opening of two clamping pieces (21) is oppositely arranged, two clamping pieces (21) are enclosed into ''T'' type clamping portion in the middle, the lock key (12) one end towards the lock catch (20) is equipped with ''T'' type clamping block (22) of clamping cooperation with the clamping portion.

3. The specimen holder transfer device for a scanning electron microscope according to claim 2, wherein Two clamping pieces (21) are arranged on the diagonal of the lock catch (20) respectively.

4. The specimen holder transfer device for a scanning electron microscope according to claim 3, wherein The clamping block (22) of the lock key (12) is threaded outside the through hole (25) on the joint (3) along the axial direction.

5. The specimen holder transfer apparatus for a scanning electron microscope according to claim 2, wherein The outer wall of the lock key (12) is circumferentially provided with a limiting groove (23) with two ends not connected, and the limiting member (13) is fixedly arranged in the limiting groove (23) on the through pipe (4). When the limiting member (13) abuts against both ends of the limiting groove (23), the lock key (12) and the lock catch (20) are in clamping or loosening state.

6. The specimen holder transfer apparatus for a scanning electron microscope according to claim 2, wherein The outer wall of the lock key (12) is circumferentially provided with a sealing groove (24) with two ends connected, and the sealing groove (24) is sealingly connected with the inner wall of the through pipe (4) through the sealing element (11).

7. A specimen handling and positioning system for a scanning electron microscope according to any one of claims 1 to 6, wherein The through pipe (4) is fixedly connected with a handle seat (5) at one end away from the cavity chamber (1), the handle seat (5) is provided with a limiting hole (15) coaxial with the through pipe (4) in the axial direction, a guide rod (8) is slidably arranged in the limiting hole (15), and one end of the guide rod (8) is connected with the through plate (10).

8. The specimen holder transfer device for a scanning electron microscope according to claim 7, wherein The handle seat (5) is axially rotationally connected with a handle (6) at one end away from the cavity chamber (1), and the handle (6) is connected with the connecting rod (16).

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