Coating device

Abstract

The present invention discloses a coating device, which includes a base module, an inclination module, a carrier module, a displacement module and a rotation module. The inclination module includes a first drive unit and a first linkage unit. The first drive unit is movably connected to the base module. The first linkage unit is connected to the first drive unit and is passed through the base module. The carrier module is connected to the first linkage unit, the carrier module has an opening, and the carrier module is used to hold an object. The displacement module is movably connected to the carrier module, and the displacement module is used to drive the carrier module to shift in the first direction or the second direction, or to open or cover the opening. The rotation module is movably connected to the carrier module, and the rotation module is used to drive the carrier module to rotate. The first drive unit is used to drive the first linkage unit to rotate in the third direction or the fourth direction, so that the carrier module is tilted.

Description

Technical Field

[0001] The present invention relates to a film coating device, in particular to a film coating device with multi-tilt angle function. Background Art

[0002] In recent years, superconducting electronics has seen widespread demand and application in fields such as quantum computing, high-performance digital integrated circuits, and microwave radiation detection. The Josephson junction is a fundamental component in electronics, and fabricating it has become a challenge for those skilled in the art. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a coating device with a multi-tilt function in view of the shortcomings of the prior art.

[0004] In order to solve the above-mentioned technical problems, one of the technical solutions adopted by the present invention is to provide a coating device, which includes a base module, an inclination module, a carrier module, a displacement module and a rotation module. The inclination module includes a first driving unit and a first linkage unit. The first driving unit can be movably connected to the base module. The first linkage unit is connected to the first driving unit and is passed through the base module. The carrier module is connected to the first linkage unit, and the carrier module has an opening, and the carrier module is used to hold an object. The displacement module can be movably connected to the carrier module, and the displacement module is used to drive the carrier module to shift in the first direction or the second direction, or to open or cover the opening. The rotation module can be movably connected to the carrier module, and the rotation module is used to drive the carrier module to rotate. Wherein, the first driving unit is used to drive the first linkage unit to rotate in the third direction or the fourth direction, so that the carrier module is in a tilted state.

[0005] One of the beneficial effects of the present invention is that the coating device provided by the present invention can improve the convenience of preparing Josephson junctions on objects through the technical solution of "the inclination module includes a first driving unit and a first linkage unit. The first driving unit can be movably connected to the base module. The first linkage unit is connected to the first driving unit and is penetrated by the base module. The carrying module is connected to the first linkage unit, the carrying module has an opening, and the carrying module is used to hold an object. The displacement module can be movably connected to the carrying module, and the displacement module is used to drive the carrying module to shift in the first direction or the second direction, or to open or cover the opening. The rotation module can be movably connected to the carrying module, and the rotation module is used to drive the carrying module to rotate. Wherein, the first driving unit is used to drive the first linkage unit to rotate in the third direction or the fourth direction, so that the carrying module is in an inclined state."

[0006] To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are only for reference and illustration and are not intended to limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Figure 1 FIG. 1 is a perspective diagram of a coating device according to a first embodiment of the present invention from one viewing angle.

[0008] Figure 2 FIG. 1 is a perspective schematic diagram of the coating device according to the first embodiment of the present invention from another perspective.

[0009] Figure 3 FIG. 1 is a partially exploded schematic diagram of a coating device according to a first embodiment of the present invention.

[0010] Figure 4 FIG. 1 is a partial cross-sectional schematic diagram of a coating device according to a first embodiment of the present invention.

[0011] Figure 5 FIG. 1 is a schematic top view of a coating device according to a first embodiment of the present invention.

[0012] Figure 6 Schematic diagram of the coating device in use according to the first embodiment of the present invention.

[0013] Figure 7 FIG. 1 is a schematic front view of a coating device according to a first embodiment of the present invention.

[0014] Figure 8 FIG. 1 is a tilted schematic diagram of a coating device according to a first embodiment of the present invention.

[0015] Figure 9 FIG. 4 is a block diagram of a coating device according to a first embodiment of the present invention.

[0016] Figure 10 FIG. 1 is a partial cross-sectional schematic diagram of one implementation manner of a coating device according to a second embodiment of the present invention.

[0017] Figure 11 FIG. 1 is a partial schematic diagram of one implementation manner of a coating device according to a second embodiment of the present invention.

[0018] Figure 12 FIG. 1 is a partial cross-sectional schematic diagram of another implementation manner of the coating device according to the second embodiment of the present invention.

[0019] Figure 13 This is a schematic diagram of the coating device in use in another embodiment of the second embodiment of the present invention.

[0020] Figure 14 FIG. 1 is a partial cross-sectional schematic diagram of a coating device according to a third embodiment of the present invention.

[0021] Figure 15 FIG. 4 is a partial schematic diagram of a coating device according to a third embodiment of the present invention.

[0022] Figure 16 FIG. 4 is a partial cross-sectional schematic diagram of a coating device according to a fourth embodiment of the present invention.

[0023] Figure 17 FIG. 4 is a perspective schematic diagram of a coating device according to a fifth embodiment of the present invention. DETAILED DESCRIPTION

[0024] The following is an explanation of the implementation of the "film coating device" disclosed in the present invention through specific embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, it should be stated in advance that the drawings of the present invention are only simple schematic illustrations and are not depicted according to actual dimensions. The following embodiments will further explain the relevant technical contents of the present invention in detail, but the disclosed contents are not intended to limit the scope of protection of the present invention.

[0025] It should be understood that although terms such as "first," "second," and "third" may be used herein to describe various components, these components should not be limited by these terms. These terms are primarily used to distinguish one component from another. In addition, the term "or" used herein may include any one or more combinations of the associated listed items, depending on the actual situation.

[0026] First embodiment

[0027] See also Figures 1 to 9 , respectively, a perspective schematic diagram from one perspective, a perspective schematic diagram from another perspective, a partially exploded schematic diagram, a partially cross-sectional schematic diagram, a top view schematic diagram, a schematic diagram in use, a front view schematic diagram, a tilted schematic diagram, and a block diagram of a coating device according to a first embodiment of the present invention. As shown in the figures, the first embodiment of the present invention provides a coating device Z, which includes a base module 1, a tilt module 2, a carrier module 3, a displacement module 4, and a rotation module 5.

[0028] For example, with Figures 1 to 3 As shown, the base module 1 of the present invention can be detachably connected to the vacuum chamber VC. The first drive unit 20 of the tilt module 2 is located at one end of the base module 1, while the carrier module 3, displacement module 4, and rotation module 5 are located at the other end. Furthermore, the first linkage unit 21 of the tilt module 2 can be installed in the vacuum chamber VC, while the carrier module 3, displacement module 4, and rotation module 5 are located within the vacuum chamber VC.

[0029] Furthermore, cooperation Figures 1 to 3 As shown, the base module 1 may include a base unit 10 and a barrier unit 11. The base unit 10 can be detachably fixed to the ground or the stage. The barrier unit 11 may be a hollow structure, and the barrier unit 11 is connected to the base unit 10 and is located on the base unit 10; wherein, the barrier unit 11 may be a single component or assembled from multiple components. The first driving unit 20 of the inclination module 2 can be detachably connected to the base unit 10 and is adjacent to one end of the barrier unit 11, and the carrying module 3, the displacement module 4 and the rotation module 5 are located at the other end of the barrier unit 11. Moreover, the other end of the barrier unit 11 can be detachably connected to the vacuum chamber VC, and the interior of the barrier unit 11 is in communication with the internal volume of the vacuum chamber VC.

[0030] Next, cooperate Figures 1 to 5As shown, the inclination module 2 of the present invention may include a first drive unit 20 and a first linkage unit 21. The first drive unit 20 is movably connected to the base module 1. The first linkage unit 21 is connected to the first drive unit 20 and is disposed through the base module 1. For example, the first drive unit 20 of the present invention may be a motor or other type of driver, and the first drive unit 20 may be detachably connected to the base unit 10. The first linkage unit 21 may include a transmission element 210, a fixing element 211, and a supporting element 212. The transmission element 210 is movably connected to the first drive unit 20; wherein the transmission element 210 may further include a transmission wheel 2100, a transmission belt 2101, and a movable part 2102. The transmission belt 2101 is movably connected to the transmission wheel 2100 and the first drive unit 20. The movable member 2102 has a T-shaped structure and is partially hollow. One end of the movable member 2102 is detachably connected to the transmission element 210, and the other end of the movable member 2102 is movably inserted into the fixed element 211. A magnetic fluid may be disposed between the movable member 2102 and the fixed element 211 to seal the gap between the movable member 2102 and the fixed element 211 and lubricate the rotation of the movable member 2102. The fixed element 211 is hollow and connected to the barrier unit 11. The support element 212 is disposed between the barrier unit 11 and the fixed element 211. One end of the support element 212 is detachably connected to the movable member 2102, while the other end of the support element 212 is exposed outside the barrier unit 11 and connected to the carrier module 3. The support element 212 can be an elongated structure and can be a single component or assembled from multiple components. When the support element 212 is assembled from multiple components, the operator can adjust the length of the support element 212 by adjusting the distance between the multiple components. Furthermore, the first drive unit 20 can be used to drive the first linkage unit 21 to rotate in a third direction or a fourth direction to tilt the carrier module 3. The third direction can be clockwise or counterclockwise, and the fourth direction can be clockwise or counterclockwise, with the third direction and the fourth direction being opposite to each other. The transmission element 210 also includes a stopper 2103, which is detachably mounted on the transmission wheel 2100 and can be arc-shaped. Furthermore, the base unit 10 includes a positioning element 100, which has a recessed portion 100a. A first stopper 2103a of the stopper 2103 can be movably positioned within the recessed portion 100a.

[0031] Next, cooperate Figures 1 to 5As shown, the carrier module 3 of the present invention can be detachably connected to the first linkage unit 21, and the carrier module 3 is used to hold the object B; wherein, the object B can be a wafer, a display panel or other types of objects. For example, the carrier module 3 may include a shielding unit 30 and an object holding unit 31. The shielding unit 30 can be detachably connected to the supporting element 212 of the first linkage unit 21, and the shielding unit 30 may have an accommodating space 300 and an opening 301, and the opening 301 is in communication with the accommodating space 300. Further, the shielding unit 30 may include a frame element 302 and a limiting element 303, the frame element 302 may be in a three-dimensional geometric shape and a hollow structure, the frame element 302 may have an opening 301 below, and the frame element 302 may be open above (such as Figure 1 (as shown) or closed. A limiting element 303 is disposed within the frame element 302; the limiting element 303 may be, but is not limited to, a screw or a guide rail. An object holding unit 31 is located within the accommodating space 300 and is used to hold the object B. The object holding unit 31 is movably connected to the limiting element 303.

[0032] Next, cooperate Figures 1 to 5 As shown, the displacement module 4 of the present invention can be movably connected to the carrier module 3, and the displacement module 4 is used to drive the carrier module 3 to shift in the first direction F1 or the second direction F2. For example, the displacement module 4 includes a second drive unit 40 and a second linkage unit 41. The second drive unit 40 can be a motor or other type of drive, and the second drive unit 40 can be detachably connected to the shielding unit 30; further, the second drive unit 40 can be detachably connected to the frame element 302, and the second drive unit 40 is located on the side of the frame element 302 and outside the frame element 302. The second linkage unit 41 can be movably inserted into the frame element 302, and the second linkage unit 41 can be movably connected to the object holding unit 31 and the second drive unit 40; wherein, the second linkage unit 41 can be a screw or a guide member of the same type. Furthermore, the first direction F1 and the second direction F2 are parallel to the second linkage unit 41, the first direction F1 and the second direction F2 are perpendicular to the support element 212, and the first direction F1 and the second direction F2 are opposite to each other; for example, with Figure 5 and Figure 7 As shown, if the position of the carrier module 3 is located in front of the support element 212 (or the base module 1), the first direction F1 corresponds to the right of the support element 212 (or the base module 1), and the second direction F2 corresponds to the left of the support element 212 (or the base module 1), but is not limited to this.

[0033] Furthermore, cooperation Figures 1 to 5As shown, the second driving unit 40 and the second linkage unit 41 can be arranged parallel to or perpendicular to each other, the support element 212 and the second linkage unit 41 can be arranged perpendicular to each other, and the support element 212 and the second driving unit 40 can be arranged parallel to or perpendicular to each other. Furthermore, the second linkage unit 41 and the limiting element 303 of the shielding unit 30 can be arranged parallel to each other.

[0034] Next, cooperate Figures 1 to 7 As shown, the rotation module 5 of the present invention can be movably connected to the carrier module 3, and the rotation module 5 is used to drive the carrier module 3 to rotate. For example, the rotation module 5 can be a motor or other types of drivers. The rotation module 5 can be movably connected to the object holding unit 31, and the rotation module 5 is located above the object holding unit 31, and the object B can be held below the object holding unit 31. Furthermore, the object holding unit 31 can also include a main body element 310 and a clamping element 311. The main body element 310 can be movably connected to the limiting element 303 (that is, the limiting element 303 is inserted into the main body element 310), and the rotation module 5 is arranged above the main body element 310. The clamping element 311 is inserted into the main body element 310, and the object holding portion 311a of the clamping element 311 is exposed on the lower exterior of the main body element 310; wherein, the object holding portion 311a can fix the object B by clamping, adsorption or other fixing methods.

[0035] Therefore, with Figures 1 to 6 As shown, when the coating apparatus Z of the present invention is performing a coating process, the carrier module 3 and the portion of the support element 212 exposed outside the barrier unit 11 can be located within a vacuum chamber VC. A coating source CS (e.g., a crucible, but not limited thereto) is disposed within the vacuum chamber VC. The coating source CS is located below the carrier module 3 (i.e., the opening 301 of the carrier module 3 faces the coating source CS). Furthermore, the object holding unit 31 of the carrier module 3 can hold an object B (a wafer is used as an example in this embodiment, but not limited thereto).

[0036] Next, during the coating process on the object B, the coating source CS can provide a coating material (not shown in the figure) toward the carrier module 3, and the coating material can adhere to the surface of the object B through the opening 301 of the carrier module 3, thereby forming a film layer (not shown in the figure).

[0037] Furthermore, cooperation Figures 1 to 9As shown, the coating device Z of the present invention can drive the transmission element 210 to rotate in the third direction or the fourth direction around its own axis AC1 through the first driving unit 20, so that the transmission element 210 drives the movable part 2102 and the supporting element 212 to rotate together; at this time, the supporting element 212 will drive the supporting module 3 (i.e., the shielding unit 30 and the object holding unit 31) to rotate together, and make the supporting module 3 present an inclined state (such as Figure 8 Then, when the coating source CS provides the coating material to the carrier module 3 , more coating material may adhere to the surface of the object B closer to the opening 301 , and less coating material may adhere to the surface of the object B farther from the opening 301 .

[0038] And, cooperate Figure 5 As shown, the coating device Z of the present invention can also drive the second linkage unit 41 to rotate through the second driving unit 40, and at the same time drive the object holding unit 31 to shift in the first direction F1 or the second direction F2, so that the surface to be coated of the object B can be closer to or correspond to the opening 301.

[0039] Moreover, cooperation Figure 7 As shown, the coating device Z of the present invention can also cause the object holding unit 31 to rotate axially (i.e., rotate in place) about its own axis AC2 via the rotation module 5, so that the surface of the object B to be coated can be close to or corresponding to the opening 301. The rotation module 5 can cause the object holding unit 31 to rotate in a clockwise or counterclockwise direction.

[0040] Thus, when performing a coating process, the coating device Z of the present invention can drive the carrier module 3 to perform multi-axial movement through the tilt module 2, the displacement module 4, and the rotation module 5 separately or simultaneously to adjust the position or angle of the carrier module 3. In combination with the preparation method for preparing a Josephson junction, a Josephson junction can be formed on the surface of the object B. Furthermore, the coating device Z of the present invention can also form a coating of uniform thickness on the surface of a large-sized object B. At the same time, it can also uniformly coat specific areas on the surface of the object B, thereby improving the convenience and uniformity of the coating. It is worth noting that the coating device Z of the present invention is not limited to the preparation of Josephson junctions, but can also be applied to other coating fields.

[0041] Furthermore, the coating apparatus Z of the present invention may further include a control module 6. This control module 6 may be, but is not limited to, a circuit board or a control machine with processing functions. The control module 6 may be connected to the first drive unit 20 of the tilt module 2, the second drive unit 40 of the displacement module 4, and the rotation module 5. The control module 6 may drive at least one of the first drive unit 20, the second drive unit 40, and the rotation module 5 to operate in accordance with at least one control command (e.g., an instruction or signal, but not limited to such).

[0042] It is worth noting that, in the present invention, the barrier unit 11 may have a plurality of through holes (not shown in the drawings) so that the drivers (such as the second driving unit 40 and the rotation module 5, such as Figure 1 As shown, but not limited to this) can be connected to the control module 6 located outside the vacuum chamber VC.

[0043] However, the above example is only one feasible embodiment and is not intended to limit the present invention.

[0044] Second embodiment

[0045] See also Figures 10 to 13 , respectively, are a partial cross-sectional schematic diagram of one embodiment of the coating device of the second embodiment of the present invention, a partial schematic diagram of one embodiment, a partial cross-sectional schematic diagram of another embodiment, and a schematic diagram of the use state of another embodiment, and please refer to Figures 1 to 9 . As shown in the figure, the coating device Z of this embodiment is substantially similar to the coating device Z of the first embodiment described above. Therefore, the arrangement or actuation of the same components will not be described in detail here. The difference between this embodiment and the first embodiment described above is that, in this embodiment, the displacement module 4 may include a second driving unit 40 and a second linkage unit 41. The second driving unit 40 is provided through the shielding unit 30. The second linkage unit 41 is connected to the object holding unit 31 and can be movably connected to the second driving unit 40. The second driving unit 40 is used to drive the second linkage unit 41 to shift, so that the second linkage unit 41 drives the object holding unit 31 to shift in the first direction or the second direction.

[0046] For example, with Figure 10 and Figure 11 As shown, the displacement module 4 of the present invention includes a second drive unit 40 and a second linkage unit 41. The second drive unit 40 can be a motor or other type of driver, and the second linkage unit 41 can be a plate, but is not limited thereto. The second drive unit 40 can be located in the barrier unit 11 and has a drive portion 400 that penetrates the barrier unit 11, the fixed element 211, the movable member 2102, and the frame element 302 of the shielding unit 30. The second linkage unit 41 can have an L-shaped cross-section. One side of the second linkage unit 41 is connected to the main body element 310 of the object holding unit 31. The other side of the second linkage unit 41 has a first linkage portion 410. The first linkage portion 410 and the drive portion 400 can be movably connected to each other by meshing or other engaging means.

[0047] Therefore, when the coating device Z of the present invention is performing a coating process, the driving portion 400 of the second driving unit 40 can drive the first linkage portion 410 of the second linkage unit 41 to shift, thereby causing the second linkage unit 41 to shift the object holding unit 31 in the first direction or the second direction, thereby allowing the surface to be coated of the object B to approach or correspond to the opening 301. The first direction and the second direction in this embodiment are the same as those described in the first embodiment and will not be further described herein.

[0048] And, cooperate Figure 10 and Figure 11 As shown, the shielding unit 30 may further include a plurality of limiting elements 303, each located on either side of the object holding unit 31. The second linkage unit 41 is adjacent to one of the limiting elements 303. The object holding unit 31 may further include a plurality of guide elements 312, each disposed on either side of the main body 310. Each guide element 312 is movably connected to one of the limiting elements 303. Each guide element 312 may comprise a support column and a guide wheel, but this is not limiting and may also be other types of guide elements.

[0049] In addition, in other optional implementations of this embodiment, the displacement module 4 of the present invention may include a second drive unit 40 and a shielding unit 42. The second drive unit 40 is disposed through the shielding unit 30, and the shielding unit 42 is located in the accommodating space 300 and is movably connected to the second drive unit 40; wherein the second drive unit 40 is used to drive the shielding unit 42 to move, so that the shielding unit 42 opens or shields the opening 301.

[0050] For example, with Figures 10 to 13 As shown, the displacement module 4 of the present invention may not include the second linkage unit 41, but may instead include a shielding unit 42. Shielding unit 42 may be a plate member and positioned between the object holding unit 31 and the opening 301. Shielding unit 42 extends outward from a side corresponding to the driving portion 400 of the second driving unit 40 to form a second linkage portion 420. The second linkage portion 420 and the driving portion 400 can be movably connected to each other through meshing or other engaging means.

[0051] Therefore, with Figure 12 and Figure 13As shown, the coating device Z of the present invention can drive the second linkage portion 420 of the shielding unit 42 to shift via the driving portion 400 of the second driving unit 40, thereby enabling the shielding unit 42 to fully open the opening 301, partially cover the opening 301, or completely cover the opening 301. In other words, during the coating process, the coating device Z of the present invention can drive the shielding unit 42 via the second driving unit 40 to open the opening 301 or partially cover the opening 301, allowing the coating material to adhere to a specific area on the surface of the object B. Simultaneously, the coating device Z cooperates with the tilt module 2 and the rotation module 5 to drive the carrier module 3 to perform multi-axial motion.

[0052] However, the above example is only one feasible embodiment and is not intended to limit the present invention.

[0053] Third embodiment

[0054] See also Figure 14 and Figure 15 FIG2 is a partial cross-sectional schematic diagram and a partial schematic diagram of a coating device according to a third embodiment of the present invention, and please refer to FIG2 for reference. Figures 1 to 13 . As shown in the figure, the coating device Z of this embodiment is roughly similar to the coating device Z of the above-mentioned embodiments. Therefore, the arrangement or actuation of the same components will not be repeated here. The difference between this embodiment and the above-mentioned embodiments is that, in this embodiment, the rotation module 5 may include a third drive unit 50, a connecting rod unit 51 and a transmission unit 52. The third drive unit 50 may be a motor or other type of driver, and the third drive unit 50 may be arranged in the movable part 2102 of the first linkage unit 21. One end of the connecting rod unit 51 is connected to the third drive unit 50, and the other end of the connecting rod unit 51 is movably connected to the second linkage unit 41. The transmission unit 52 is arranged at the other end of the connecting rod unit 51, and the transmission unit 52 can be movably connected to a transmission part 311b of the clamping element 311.

[0055] Therefore, with Figure 14 and Figure 15 As shown, when the coating device Z of the present invention is performing a coating process, the third driving unit 50 can drive the connecting rod unit 51 to rotate, and the connecting rod unit 51 drives the transmission unit 52 to rotate, and then the transmission unit 52 drives the clamp element 311 to rotate axially around its own axis AC2.

[0056] Furthermore, cooperation Figure 14 and Figure 15As shown, the connecting rod unit 51 may also include multiple transmission members 510, multiple rotating members 511 and telescopic members 512. The transmission members 510 and telescopic members 512 can be rods or other similar components, and the rotating member 511 can be a universal joint or other similar components. One of the transmission members 510 is connected to the third drive unit 50 and one of the rotating members 511, one end of the telescopic member 512 is connected to one of the rotating members 511, the other end of the telescopic member 512 is connected to another rotating member 511, and the other rotating member 511 is connected to another transmission member 510. The other transmission member 510 is disposed through the transmission unit 52 and can be movably connected to the main body element 310 and the second linkage unit 41. The telescopic member 512 may include a first telescopic rod 5120 and a second telescopic rod 5121. The first telescopic rod 5120 is a hollow structure. One end of the first telescopic rod 5120 is connected to one of the rotating members 511. The other end of the first telescopic rod 5120 extends outward to form a circular portion 5120a. The side of the circular portion 5120a facing away from the main body of the first telescopic rod 5120 extends outward to form a plurality of opposing support columns 5120b. Furthermore, one end of the second telescopic rod 5121 is movably inserted through the first telescopic rod 5120. The other end of the second telescopic rod 5121 is connected to the other rotating member 511. The main body of the second telescopic rod 5121 extends outward to form an annular portion 5121a. The outer edge of the annular portion 5121a is recessed inward to form a plurality of second stoppers 5121b. Each support column 5120b is movably inserted through one of the second stoppers 5121b.

[0057] Therefore, with Figures 10 to 15 As shown, when the driving part 400 of the second driving unit 40 of the coating device Z drives the first linkage part 410 of the second linkage unit 41 to shift, in addition to the object holding unit 31 moving together with the second linkage unit 41, the telescopic member 512 and the transmission member 510 connected to the transmission unit 52 can move together with the second linkage unit 41 through the rotation of the rotating member 511 itself; wherein, the telescopic member 512 will produce an extension or shortening movement in the process of moving together with the second linkage unit 41.

[0058] However, the above example is only one feasible embodiment and is not intended to limit the present invention.

[0059] Fourth embodiment

[0060] See also Figure 16 , which is a partial cross-sectional schematic diagram of a coating device according to a fourth embodiment of the present invention, and please refer to Figures 1 to 15As shown in the figure, the coating device Z of this embodiment is substantially similar to the coating devices Z of the aforementioned embodiments. Therefore, the configuration or operation of the same components will not be repeated here. However, the difference between this embodiment and the aforementioned embodiments is that, in this embodiment, the displacement module 4 is connected to the object holding unit 31 and can be movably connected to the shielding unit 30. The displacement module 4 is used to cause the object holding unit 31 to shift in the first direction or the second direction.

[0061] For example, with Figure 10 、 Figure 11 as well as Figure 16 As shown, the displacement module 4 of the present invention can be a piezoelectric ceramic motor or other type of actuator. Furthermore, the displacement module 4 can be movably connected to one of the limiting elements 303 of the shielding unit 30. Furthermore, the shielding unit 30 can also have multiple limiting elements 303, each located on either side of the object holding unit 31 or on one side of the object holding unit 31. The object holding unit 31 can also include multiple guiding elements 312. The structural design of the guiding elements 312 in this embodiment is the same as that of the guiding elements 312 described in the second embodiment and will not be further described here.

[0062] Therefore, when the coating device Z of the present invention is performing a coating process, the displacement module 4 can be used to perform a linear shift on the corresponding limiting element 303 to cause the object holding unit 31 to shift in the first direction or the second direction, thereby allowing the surface of the object B to be coated to be close to or correspond to the opening 301.

[0063] However, the above example is only one feasible embodiment and is not intended to limit the present invention.

[0064] Fifth embodiment

[0065] See also Figure 17 , which is a three-dimensional schematic diagram of a coating device according to a fifth embodiment of the present invention, and please refer to Figures 1 to 16 As shown in the figure, the coating device Z of this embodiment is substantially similar to the coating device Z of the aforementioned embodiments. Therefore, the configuration or operation of the same components will not be repeated here. The difference between this embodiment and the aforementioned embodiments is that, in this embodiment, the shielding unit 30 may include a frame element 302 and a plurality of blocking elements 304. The plurality of blocking elements 304 can be movably connected to the frame element 302. The plurality of blocking elements 304 and the frame element 302 form a receiving space 300. An opening 301 is formed between adjacent blocking elements 304, and the opening 301 is in a geometric shape.

[0066] For example, with Figure 16 and Figure 17As shown, the shielding unit 30 may further include a plurality of blocking elements 304, which may be plate structures and made of metal, plastic, or glass. The plurality of blocking elements 304 may be movably connected to the bottom of the frame element 302 by snapping or other means of connection.

[0067] Therefore, if a coating of a specific shape is to be formed on the surface of the object B, the opening 301 can be designed into any shape. For example, a rectangle is used as an example in this embodiment, but the present invention is not limited thereto. The opening 301 can also be set into a circle, diamond, ellipse, polygon or other geometric shapes.

[0068] However, the above example is only one feasible embodiment and is not intended to limit the present invention.

[0069] Advantageous Effects of the Embodiments

[0070] One of the beneficial effects of the present invention is that the coating device Z provided by the present invention can improve the convenience of preparing Josephson junctions on objects through the technical solution of "the inclination module 2 includes a first driving unit 20 and a first linkage unit 21. The first driving unit 20 can be movably connected to the base module 1. The first linkage unit 21 is connected to the first driving unit 20 and is penetrated by the base module 1. The carrying module 3 is connected to the first linkage unit 21, and the carrying module 3 is used to hold an object B. The displacement module 4 can be movably connected to the carrying module 3, and the displacement module 4 is used to drive the carrying module 3 to shift in the first direction or the second direction. The rotation module 5 can be movably connected to the carrying module 3, and the rotation module 5 is used to drive the carrying module 3 to rotate. Among them, the first driving unit 20 is used to drive the first linkage unit 21 to rotate in the third direction or the fourth direction, so that the carrying module 3 is in an inclined state."

[0071] Furthermore, the coating device Z of the present invention, through the above-described technical solution, can, during the coating process, individually or simultaneously drive the carrier module 3 to perform multi-axial movement via the tilt module 2, displacement module 4, and rotation module 5 to adjust the position or angle of the carrier module 3. This, combined with the method for forming a Josephson junction, can form a Josephson junction on the surface of the object B. Furthermore, the coating device Z of the present invention can also form a uniformly thick coating on the surface of large objects B, thereby improving the convenience and uniformity of the coating process. Furthermore, if required, the tilt module 2, displacement module 4, and rotation module 5 can be used to adjust the position or angle of the carrier module 3 to coat specific areas of the surface of the object B with a film layer of a specific pattern.

[0072] The contents disclosed above are only preferred feasible embodiments of the present invention and do not limit the scope of protection of the claims of the present invention. Therefore, all equivalent technical changes made using the contents of the description and drawings of the present invention are included in the scope of protection of the claims of the present invention.

Claims

1. A film coating device, characterized in that: include: Base module; Inclination module, including: a first driving unit, the first driving unit being movably connected to the base module; and a first linkage unit, connected to the first driving unit and passing through the base module; a carrying module, the carrying module being connected to the first linkage unit, the carrying module having an opening, and being used for holding an object; a displacement module, the displacement module being movably connected to the carrier module, the displacement module being used to drive the carrier module to shift in a first direction or a second direction, or to open or cover the opening; and A rotation module, the rotation module being movably connected to the carrier module and configured to drive the carrier module to rotate; Wherein, the first driving unit is used to drive the first linkage unit to rotate in the third direction or the fourth direction, so that the carrying module is in a tilted state; The carrying module includes a shielding unit and an object holding unit, wherein the shielding unit is connected to the first linkage unit, the shielding unit has an accommodating space, the accommodating space is communicated with the opening, the object holding unit is located in the accommodating space, and the object holding unit is used to hold the object; The displacement module includes a second driving unit and a second linkage unit, wherein the second driving unit is connected to the shielding unit, and the second linkage unit is movably connected to the object holding unit and the second driving unit; wherein the second driving unit is used to drive the second linkage unit to rotate, so that the second linkage unit drives the object holding unit to shift in the first direction or the second direction; Wherein, the shielding unit includes a frame element and a plurality of blocking elements, wherein the plurality of blocking elements can be movably connected to the frame element, the plurality of blocking elements and the frame element form the accommodating space, the opening is formed between adjacent blocking elements, and the opening is in a geometric shape.

2. The coating device according to claim 1, characterized in that The base module comprises: base unit; and a barrier unit having a hollow structure, connected to the base unit, connected to the vacuum chamber, and the interior of the barrier unit communicating with the interior volume of the vacuum chamber; The first driving unit is connected to the base unit and is adjacent to one end of the barrier unit, and the carrying module, the displacement module, and the rotation module are located at the other end of the barrier unit.

3. The coating device according to claim 2, characterized in that: The first linkage unit includes: a transmission element, the transmission element being movably connected to the first drive unit; a fixing element, the fixing element being connected to the transmission element, the fixing element being located at the one end of the blocking unit; and A supporting element is provided through the blocking unit, one end of the supporting element is connected to the fixing element, and the other end of the supporting element is connected to the carrying module.

4. The coating device according to claim 1, characterized in that The rotation module can be movably connected to the object holding unit, and the rotation module is used to drive the object holding unit to perform the rotation action.

5. A film coating device, characterized in that: include: Base module; Inclination module, including: a first driving unit, the first driving unit being movably connected to the base module; and a first linkage unit, connected to the first driving unit and passing through the base module; a carrying module, the carrying module being connected to the first linkage unit, the carrying module having an opening, and being used for holding an object; a displacement module, the displacement module being movably connected to the carrier module, the displacement module being used to drive the carrier module to shift in a first direction or a second direction, or to open or cover the opening; and A rotation module, the rotation module being movably connected to the carrier module and configured to drive the carrier module to rotate; Wherein, the first driving unit is used to drive the first linkage unit to rotate in the third direction or the fourth direction, so that the carrying module is in a tilted state; The carrying module includes a shielding unit and an object holding unit, wherein the shielding unit is connected to the first linkage unit, the shielding unit has an accommodating space, the accommodating space is communicated with the opening, the object holding unit is located in the accommodating space, and the object holding unit is used to hold the object; The displacement module includes a second driving unit and a shielding unit, the second driving unit is passed through the shielding unit, the shielding unit is located in the accommodating space and can be movably connected to the second driving unit; the second driving unit is used to drive the shielding unit to shift so that the shielding unit opens or shields the opening.

6. The coating device according to claim 5, characterized in that: The base module comprises: base unit; and a barrier unit having a hollow structure, connected to the base unit, connected to the vacuum chamber, and the interior of the barrier unit communicating with the interior volume of the vacuum chamber; The first driving unit is connected to the base unit and is adjacent to one end of the barrier unit, and the carrying module, the displacement module, and the rotation module are located at the other end of the barrier unit. Wherein, the first linkage unit includes: a transmission element, the transmission element being movably connected to the first drive unit; a fixing element, the fixing element being connected to the transmission element, the fixing element being located at the one end of the blocking unit; and a supporting element, the supporting element being passed through the blocking unit, one end of the supporting element being connected to the fixing element, and the other end of the supporting element being connected to the carrying module; The rotation module can be movably connected to the object holding unit, and the rotation module is used to drive the object holding unit to perform the rotation action.

7. A film coating device, characterized in that: include: Base module; Inclination module, including: a first driving unit, the first driving unit being movably connected to the base module; and a first linkage unit, connected to the first driving unit and passing through the base module; a carrying module, the carrying module being connected to the first linkage unit, the carrying module having an opening, and being used for holding an object; a displacement module, the displacement module being movably connected to the carrier module, the displacement module being used to drive the carrier module to shift in a first direction or a second direction, or to open or cover the opening; and A rotation module, the rotation module being movably connected to the carrier module and configured to drive the carrier module to rotate; Wherein, the first driving unit is used to drive the first linkage unit to rotate in the third direction or the fourth direction, so that the carrying module is in a tilted state; The carrying module includes a shielding unit and an object holding unit, wherein the shielding unit is connected to the first linkage unit, the shielding unit has an accommodating space, the accommodating space is communicated with the opening, the object holding unit is located in the accommodating space, and the object holding unit is used to hold the object; The displacement module includes a second driving unit and a second linkage unit, wherein the second driving unit is provided through the shielding unit, and the second linkage unit is connected to the object holding unit and is movably connected to the second driving unit; wherein the second driving unit is used to drive the second linkage unit to shift, so that the second linkage unit drives the object holding unit to shift in the first direction or the second direction; Wherein, the shielding unit includes a frame element and a plurality of blocking elements, wherein the plurality of blocking elements can be movably connected to the frame element, the plurality of blocking elements and the frame element form the accommodating space, the opening is formed between adjacent blocking elements, and the opening is in a geometric shape.

8. The coating device according to claim 7, characterized in that: The base module comprises: base unit; and a barrier unit having a hollow structure, connected to the base unit, connected to the vacuum chamber, and the interior of the barrier unit communicating with the interior volume of the vacuum chamber; The first driving unit is connected to the base unit and is adjacent to one end of the barrier unit, and the carrying module, the displacement module, and the rotation module are located at the other end of the barrier unit.

9. The coating device according to claim 8, characterized in that: The first linkage unit includes: a transmission element, the transmission element being movably connected to the first drive unit; a fixing element, the fixing element being connected to the transmission element, the fixing element being located at the one end of the blocking unit; and A supporting element is provided through the blocking unit, one end of the supporting element is connected to the fixing element, and the other end of the supporting element is connected to the carrying module.

10. The coating device according to claim 7, characterized in that: The rotation module can be movably connected to the object holding unit, and the rotation module is used to drive the object holding unit to perform the rotation action.

Images