Optical path perpendicularity detection device and method

Abstract

The application discloses a light path perpendicularity detection device and method, and relates to the technical field of light path perpendicularity detection devices, and solves the problem of light path perpendicularity detection under the requirement of micro-angle adjustment.

Description

Technical Field

[0001] This invention relates to the field of optical path perpendicularity detection, specifically to an optical path perpendicularity detection device and method. Background Technology

[0002] In the field of optics, the perpendicularity of the optical path is crucial for optical inspection equipment. During product debugging, non-perpendicularity of the optical path often leads to errors in the debugging results. Most existing optical path perpendicularity tests are designed for perpendicular incidence and rarely consider the need for small-angle debugging.

[0003] If the product being debugged requires adjustment to a tiny angle to achieve the desired measurement results, the debugging process is much more difficult than debugging for the requirement of perpendicular incidence, and it is difficult to use the debugging methods for the requirement of perpendicular incidence to determine whether the optical path is perpendicular.

[0004] Therefore, it is necessary to provide a method for detecting the perpendicularity of an optical path to achieve optical path perpendicularity detection under the requirement of minute angle adjustment. Summary of the Invention

[0005] To overcome the shortcomings of the prior art, the present invention provides an optical path perpendicularity detection device and method to solve at least one of the above-mentioned technical problems.

[0006] This invention is achieved through the following technical solutions:

[0007] According to one aspect of the present invention, a light path perpendicularity detection device is provided, comprising a housing, wherein a first reflector, a second reflector, and a third reflector are disposed within the housing, the first reflector and the second reflector are disposed opposite to each other, the second reflector and the third reflector are disposed on the same side, and the second reflector and the third reflector are partially opposite to each other; light entering the housing through a light-transmitting hole is incident on the first reflector, and after multiple reflections between the first reflector and the second reflector, it is incident on the third reflector and then incident on the observation window via the third reflector.

[0008] The above technical solution increases the optical path by continuous reflection of the optical path and amplifies the changes in the optical path at tiny angles to detect whether the optical path is perpendicular, thus solving the problem of optical path perpendicularity detection under the requirement of tiny angle adjustment.

[0009] As a further technical solution, the enclosure includes an upper enclosure, a lower enclosure, and an observation enclosure, with the first reflector disposed in the upper enclosure, the second reflector disposed in the lower enclosure, and the third reflector disposed in the observation enclosure.

[0010] Optionally, the upper and lower housings are stacked together, with the light-passing aperture located on the upper right of the upper housing and the light-exiting aperture located on the lower left of the lower housing. A light path reflection space is formed between the upper and lower housings. Light enters the reflection space through the light-passing aperture and is reflected multiple times between the first and second reflecting mirrors until it exits from the light-exiting aperture.

[0011] Furthermore, the light emitted from the light outlet is incident on the third reflecting mirror, which faces the observation window and reflects the light to the observation window so that the center of the incident light can be seen through the observation window to be located at the position of the observation screen.

[0012] Optionally, the third reflector is a 45-degree reflector. A portion of the third reflector extends into the lower housing and contacts the second reflector, so that the light reflected by the first reflector can only be reflected onto the second or third reflector, avoiding the loss of light reflected by the first reflector and causing detection errors.

[0013] As a further technical solution, the upper and lower housings are arranged adjacent to each other, and the observation housing is located on the side of the lower housing away from the upper housing. The observation housing is positioned at the light outlet of the lower housing to receive light reflected from the first reflecting mirror.

[0014] As a further technical solution, the light-transmitting aperture is positioned diagonally opposite the observation window. This arrangement allows for a longer optical path of reflected light, further increasing the relative distance between the measurement light and the reference light seen through the observation window, facilitating fine-angle adjustments.

[0015] As a further technical solution, the upper and lower housings are identical in shape and size. This arrangement facilitates installation and adjustment, ensuring that incident light is reflected by multiple mirrors before reaching the observation window.

[0016] As a further technical solution, the reflecting surfaces of the first and second reflectors are opposite each other and have the same length. This arrangement can further increase the optical path length of light reflected between the two reflectors.

[0017] As a further technical solution, both the first and second reflectors are trapezoidal, with the reflecting surfaces of the two reflectors located on the hypotenuse of the trapezoid.

[0018] As a further technical solution, the reflective surfaces of the second and third reflectors are connected. This arrangement ensures that the light reflected by the first reflector can only be reflected onto the second or third reflector, preventing the light reflected by the first reflector from being missed and causing detection errors.

[0019] As a further technical solution, an observation screen is provided at the observation window. The observation screen has a calibrated scale to facilitate reading the position of the measurement light center on the observation screen, thereby facilitating fine angle adjustments.

[0020] According to one aspect of the present invention, a method for detecting the perpendicularity of an optical path is provided, which is implemented using the aforementioned detection device, the method comprising:

[0021] An observation screen is set in the observation window, and the observation screen has a calibrated scale;

[0022] The reference light is incident on the first reflecting mirror through the light aperture. After multiple reflections between the first and second reflecting mirrors, it is incident on the third reflecting mirror and reflected to the observation screen to obtain the position of the center of the reference light on the observation screen.

[0023] The measuring light is incident on the first reflecting mirror through the light-transmitting hole. After multiple reflections between the first and second reflecting mirrors, it is incident on the third reflecting mirror and reflected to the observation screen to obtain the position of the center of the measuring light on the observation screen.

[0024] The beam deflection angle is obtained based on the relative position between the reference light center and the measurement light center.

[0025] The detection method in the above technical solution can increase the optical path by continuous reflection of the optical path and amplify the changes in the optical path at a small angle to detect whether the optical path is perpendicular; through the detection method, not only can the perpendicularity of the optical path be detected, but also the deflection and deflection angle of the optical path can be measured.

[0026] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0027] (1) This invention increases the optical path by continuous reflection of the optical path and amplifies the changes in the optical path at a small angle to detect whether the optical path is perpendicular, thus solving the problem of optical path perpendicularity detection under the requirement of small angle adjustment.

[0028] (2) The present invention is easy to operate, easy to observe, has a wide range of applications, and is easy to maintain. Attached Figure Description

[0029] Figure 1 This is a schematic diagram illustrating the optical path perpendicularity detection principle according to an embodiment of the present invention.

[0030] Figure 2 for Figure 1 A schematic diagram showing the principle after adding a reflector.

[0031] Figure 3 (a)-(b) are schematic diagrams of the detection device according to an embodiment of the present invention.

[0032] Figure 4 This is a schematic diagram of an observation screen according to an embodiment of the present invention.

[0033] Figure 5 for Figure 3 A schematic diagram of the optical path.

[0034] In the diagram: 1. Lower housing; 2. Observation housing; 3. Observation screen; 4. Upper housing; 5. First reflecting mirror; 6. Second reflecting mirror; 7. Third reflecting mirror. Detailed Implementation

[0035] The technical solutions of various embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0036] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0037] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows for communication; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0038] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0039] This invention provides an optical path perpendicularity detection device, which increases the optical path by continuous reflection of the optical path and amplifies the changes in the optical path at a small angle to detect whether the optical path is perpendicular, thereby solving the problem of optical path perpendicularity detection under the requirement of small angle adjustment.

[0040] The detection principle of this invention is as follows: Utilizing the phenomenon of light reflection and the principle of trigonometric functions, a reference light is perpendicularly passed through the plane containing a small hole and incident on an observation screen parallel to the plane containing the hole, resulting in a light spot A. The optical path distance from the small hole to the screen is recorded as 'a'. Then, the measuring light is passed through the hole and incident on the screen, resulting in a light spot B. The distance between A and B is recorded as 'b'. At this point, the angle between the two beams can be determined using trigonometric functions. Figure 1 As shown.

[0041] However, in most cases, this angle won't be too large. Taking α = 2° and a = 100mm as an example, its b is only 3.5mm. A deviation of 2° is already considered a very large error in optics, but when projected onto the screen, it's only 3.5mm, a very small change. To increase the change in b, one must increase the length of a. If one wants to increase the length of a without changing the distance from the screen to the pinhole, then one must utilize the principle of light reflection; for example... Figure 2 As shown.

[0042] Because light has particle properties, its reflection angle and incident angle are equal. When the number of reflections of two beams of light is the same, the angle between the two beams of light will remain unchanged. However, because the optical path length increases, the distance between the two light spots that finally illuminate the screen will also increase. As long as the screen is parallel or perpendicular to the incident direction of the reference light, the angle between the two beams of light can be determined based on the distance b.

[0043] like Figure 3 (a)-(b) and Figure 5As shown, the detection device includes a housing, inside which are a first reflector, a second reflector, and a third reflector. The first and second reflectors are arranged opposite each other, the second and third reflectors are arranged on the same side, and the second and third reflectors are partially opposite each other. Light entering the housing through the light-transmitting hole is incident on the first reflector, and after multiple reflections between the first and second reflectors, it is incident on the third reflector and then incident on the observation window through the third reflector.

[0044] The enclosure includes an upper enclosure, a lower enclosure, and an observation enclosure. The first reflector is located in the upper enclosure, the second reflector is located in the lower enclosure, and the third reflector is located in the observation enclosure.

[0045] Optionally, the upper and lower housings are stacked together, with the light-passing aperture located on the upper right of the upper housing and the light-exiting aperture located on the lower left of the lower housing. A light path reflection space is formed between the upper and lower housings. Light enters the reflection space through the light-passing aperture and is reflected multiple times between the first and second reflecting mirrors until it exits from the light-exiting aperture.

[0046] Furthermore, the light emitted from the light outlet is incident on the third reflecting mirror, which faces the observation window and reflects the light to the observation window so that the center of the incident light can be seen through the observation window to be located at the position of the observation screen.

[0047] Optionally, the third reflector is a 45-degree reflector. A portion of the third reflector extends into the lower housing and contacts the second reflector, so that the light reflected by the first reflector can only be reflected onto the second or third reflector, avoiding the loss of light reflected by the first reflector and causing detection errors.

[0048] The upper and lower housings are arranged adjacent to each other, and the observation housing is located on the side of the lower housing away from the upper housing. The observation housing is positioned at the light outlet of the lower housing to receive light reflected from the first reflector.

[0049] Optionally, the light-transmitting aperture is positioned diagonally opposite the observation window. This arrangement allows for a longer optical path of reflected light, further increasing the relative distance between the measurement light and the reference light seen through the observation window, facilitating fine-angle adjustments.

[0050] Optionally, the upper and lower housings are identical in shape and size. This arrangement facilitates installation and adjustment, ensuring that incident light is reflected by multiple mirrors before reaching the observation window.

[0051] Optionally, the reflecting surfaces of the first and second mirrors are opposite each other and have the same length. This arrangement can further increase the optical path length of light reflected between the two mirrors.

[0052] Optionally, both the first and second reflectors are trapezoidal, with the reflecting surfaces of the two reflectors located on the hypotenuse of the trapezoid.

[0053] Optionally, the reflective surfaces of the second and third reflectors are connected. This arrangement ensures that the light reflected by the first reflector can only be reflected onto the second or third reflector, preventing the light reflected by the first reflector from being missed and causing detection errors.

[0054] like Figure 4 As shown, an observation screen is provided at the observation window. The observation screen has a calibrated scale to facilitate reading the position of the measurement light center on the observation screen, thereby facilitating fine angle adjustments.

[0055] The aforementioned detection device can not only detect the perpendicularity of the light path, but also measure the direction and angle of the light path. Specifically, the direction and angle of the light path can be determined by the center position of the light incident on the observation screen.

[0056] The present invention also provides a method for detecting the perpendicularity of an optical path, implemented using the aforementioned detection device, the method comprising:

[0057] An observation screen is set in the observation window, and the observation screen has a calibrated scale;

[0058] The reference light is incident on the first reflecting mirror through the light aperture. After multiple reflections between the first and second reflecting mirrors, it is incident on the third reflecting mirror and reflected to the observation screen to obtain the position of the center of the reference light on the observation screen.

[0059] The measuring light is incident on the first reflecting mirror through the light-transmitting hole. After multiple reflections between the first and second reflecting mirrors, it is incident on the third reflecting mirror and reflected to the observation screen to obtain the position of the center of the measuring light on the observation screen.

[0060] Based on the relative position between the reference light center and the measurement light center, the beam deflection angle is obtained, thereby enabling the adjustment of minute angles by observing changes in the position of the measurement light center on the screen.

[0061] The above detection method can increase the optical path by continuous reflection of the optical path and amplify the changes in the optical path at small angles to detect whether the optical path is perpendicular. Through the detection method, not only can the perpendicularity of the optical path be detected, but also the deflection and deflection angle of the optical path can be measured.

[0062] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the technical solutions of the embodiments of the present invention.

Claims

1. An optical path perpendicularity detection device characterized by comprising: The device includes a housing, within which are disposed a first reflector, a second reflector, and a third reflector. The first and second reflectors are positioned opposite each other, with the second and third reflectors on the same side and partially opposite each other. Light entering the housing through a light-transmitting aperture is incident on the first reflector, undergoes multiple reflections between the first and second reflectors, and then incident on the third reflector before reaching the observation window. The housing comprises an upper housing, a lower housing, and an observation housing. The first reflector is disposed in the upper housing, the second reflector in the lower housing, and the third reflector in the observation housing. The upper and lower housings are adjacent to each other, with the observation housing located on the side of the lower housing away from the upper housing. The light-transmitting aperture is diagonally positioned to the observation window. The reflective surfaces of the second and third reflectors are connected. An observation screen is provided at the observation window.

2. The device for detecting the perpendicularity of an optical path according to claim 1, wherein The upper and lower boxes are identical in shape and size.

3. The device for detecting the perpendicularity of an optical path according to claim 1, wherein The reflecting surfaces of the first and second reflectors are opposite each other and have the same length.

4. The apparatus of claim 3, wherein the light path perpendicularity detection device is characterized by: Both the first and second reflectors are trapezoidal, with the reflecting surfaces of the two reflectors located on the hypotenuse of the trapezoid.

5. A method for detecting the perpendicularity of an optical path, using the detection device according to any one of claims 1-4, characterized in that, The method includes: An observation screen is set in the observation window, and the observation screen has a calibrated scale; The reference light is incident on the first reflecting mirror through the light aperture. After multiple reflections between the first and second reflecting mirrors, it is incident on the third reflecting mirror and reflected to the observation screen to obtain the position of the center of the reference light on the observation screen. The measuring light is incident on the first reflecting mirror through the light-transmitting hole. After multiple reflections between the first and second reflecting mirrors, it is incident on the third reflecting mirror and reflected to the observation screen to obtain the position of the center of the measuring light on the observation screen. The beam deflection angle is obtained based on the relative position between the reference light center and the measurement light center.

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