Pick-and-place device and processing apparatus

Abstract

Embodiments of the present application provide a material taking and placing device and a processing equipment. The material taking and placing device comprises a material taking and placing body, a rotary driving mechanism arranged on the material taking and placing body, a support shaft having a first end in driving connection with the rotary driving mechanism, a first material taking and placing assembly and a second material taking and placing assembly connected to a second end of the support shaft through a connecting assembly, the support shaft driving the first material taking and placing assembly and the second material taking and placing assembly to be movable along an arc-shaped track under the driving of the rotary driving mechanism, so that the first material taking and placing assembly and the second material taking and placing assembly can exchange positions, and an axial force support connected between the support shaft and the material taking and placing body, the axial force support being closer to the first end than to the second end, and the axial force support being used for sharing axial force borne by the support shaft. The first material taking and placing assembly and the second material taking and placing assembly can exchange positions to realize alternating taking and placing of materials. The material taking and placing device does not need to be provided with special material taking and placing mechanisms.

Description

Technical Field

[0001] This invention relates to the field of material processing technology, and more specifically, to a material handling device and processing equipment having the same. Background Technology

[0002] In the field of material processing, taking semiconductor devices (such as wafers) as an example, the dicing process is a crucial step. There are generally two dicing methods: rotary cutting and laser cutting. Taking laser cutting (also known in the industry as stealth cutting, or simply stealth dicing) as an example, it primarily involves focusing a laser beam inside the material to be processed to create a focal point. By precisely controlling the distance between the focusing lens and the material surface, microcracks are formed inside the material, and then adjacent grains are separated using a cleaver or vacuum dicing device.

[0003] Traditional laser processing equipment mainly includes a loading device, a conveying device, a picking device, a discharging device, a processing device, and an unloading device. Specifically, the conveying device transports the material to be processed from the loading device's hopper to a designated position. The picking device then transports the material from the designated position to the processing device's platform, where the processing mechanism cuts the material on the platform to form the processed material. The discharging device places the processed material back to its designated position. The conveying device then transports the processed material from the designated position to the unloading device. The conveying device continues conveying, and the processing device continues processing, repeating this process continuously.

[0004] However, traditional material handling devices use a dedicated material handling mechanism to place the material to be processed from a designated location onto the platform, and a dedicated material unloading mechanism to place the processed material back into the designated location. Furthermore, the material handling and unloading mechanisms typically move in a straight line to complete the tasks separately. Therefore, the structure of the material handling and unloading device is relatively complex, and the entire machine occupies a large space. Even in some laser processing equipment that integrates the material handling and unloading mechanisms, the excessive axial force results in a shorter service life. Summary of the Invention

[0005] To at least partially address the problems existing in the prior art, according to one aspect of the present invention, a material handling device is provided. The material handling device includes: a material handling body; a rotary drive mechanism disposed on the material handling body; a support shaft, a first end of which is drively connected to the rotary drive mechanism; a first material handling assembly and a second material handling assembly, the first and second material handling assemblies being connected to a second end of the support shaft via a connecting assembly, the support shaft driving the first and second material handling assemblies to move along an arcuate trajectory under the drive of the rotary drive mechanism, so that the first and second material handling assemblies can exchange positions; and an axial force support member connected between the support shaft and the material handling body, and closer to the first end relative to the second end, the axial force support member being used to share the axial force on the support bearing.

[0006] For example, the connecting assembly includes a crossbeam, the first and second picking and placing components are respectively connected to the two ends of the crossbeam, and the second end of the support shaft is connected to the middle between the two ends of the crossbeam.

[0007] For example, the middle part of the crossbeam is the center of the crossbeam, and the first picking and placing assembly and the second picking and placing assembly are symmetrically arranged with respect to the support axis.

[0008] For example, the connecting assembly further includes: a first cylinder mounting plate and a second cylinder mounting plate respectively disposed at both ends of the crossbeam; and a first cylinder and a second cylinder respectively connected to the first cylinder mounting plate and the second cylinder mounting plate, wherein the first picking and dispensing assembly is connected to the piston rod of the first cylinder, the second picking and dispensing assembly is connected to the piston rod of the second cylinder, and the first cylinder and the second cylinder are respectively used to drive the first picking and dispensing assembly and the second picking and dispensing assembly to move vertically between an extended position and a retracted position.

[0009] For example, the material handling device further includes a first tensile elastic element and a second tensile elastic element. One end of the first tensile elastic element is connected to the body of the first cylinder and / or the first cylinder mounting plate and / or the crossbeam, and the other end of the first tensile elastic element is connected to the first material handling assembly. One end of the second tensile elastic element is connected to the body of the second cylinder and / or the second cylinder mounting plate and / or the crossbeam, and the other end of the second tensile elastic element is connected to the second material handling assembly.

[0010] For example, the first tension elastic member is configured to pull the first pick-and-place assembly back or toward the retracted position or keep the first pick-and-place assembly in the retracted position when the air circuit structure of the first cylinder fails, and the second tension elastic member is configured to pull the second pick-and-place assembly back or toward the retracted position or keep the second pick-and-place assembly in the retracted position when the air circuit structure of the second cylinder fails.

[0011] For example, the axial force support includes an angular contact ball bearing connected between the outer periphery of the support shaft and the material handling body.

[0012] For example, the rotary drive mechanism includes a rotary drive component and a rotary transmission component. The rotary transmission component drives the support shaft to rotate under the drive of the rotary drive component. The material handling body is provided with a first mounting hole and a second mounting hole. The rotary drive component and the support shaft pass through and are connected to the first mounting hole and the second mounting hole, respectively. The first material handling assembly and the second material handling assembly are located on one side of the material handling body, and the rotary transmission component is located on the other side of the material handling body.

[0013] For example, the first pick-and-place assembly includes a first bracket and at least one first nozzle connected to the end of the first bracket, and the second pick-and-place assembly includes a second bracket and at least one second nozzle connected to the end of the second bracket, wherein both the first bracket and the second bracket are connected to the connecting assembly.

[0014] For example, both the first bracket and the second bracket are X-shaped, the connecting assembly is connected to the middle of the first bracket and the middle of the second bracket, each end of the first bracket is provided with the first suction nozzle, and each end of the second bracket is provided with the second suction nozzle.

[0015] For example, the support shaft is provided with a channel extending through it along its axial direction, a first bearing is provided at the first end, and the outer ring of the first bearing is connected to the side wall of the channel, a second bearing is provided at the second end, and the outer ring of the second bearing is connected to the side wall of the channel, the axial force support is located between the first bearing and the second bearing, and the inner rings of the first bearing and the second bearing are respectively used to fix the components passing through the channel.

[0016] According to one aspect of the present invention, a processing apparatus is also provided. The processing apparatus includes the material handling device as described in any of the preceding embodiments.

[0017] For example, the processing equipment further includes a platform and a positioning device. The platform is used to carry materials, and the positioning device includes a positioning mechanism for adjusting the posture of the materials. The first pick-and-place component and the second pick-and-place component are used to move alternately above the platform and above the positioning mechanism.

[0018] For example, the positioning device further includes a travel compensation mechanism for driving the positioning mechanism to move in a horizontal direction so that the travel of the positioning mechanism intersects with the arc-shaped trajectory.

[0019] For example, the travel compensation mechanism includes a travel drive and a travel guide rail, the travel drive being used to drive the positioning mechanism to move along the travel guide rail, the travel guide rail extending radially along the arcuate trajectory.

[0020] The material handling device provided in this embodiment of the invention allows the first and second material handling components to move along an arc-shaped trajectory, thereby exchanging positions to alternately handle materials. Therefore, the device does not require dedicated material handling and dispensing mechanisms. Furthermore, compared to existing material handling mechanisms that use linear movement, the first and second material handling components can move along the same arc-shaped trajectory. This results in a simpler structure, more rational layout, higher space utilization, and a smaller overall footprint. The alternating movement of the first and second material handling components also improves the device's working efficiency, giving it a competitive edge in the market. Additionally, the device can be driven simultaneously by a single rotary drive mechanism, resulting in lower manufacturing costs. However, due to the significant weight of components such as the connecting assembly, the first and second material handling components, and the need for them to pick up materials, the support shaft must withstand a substantial axial force. Axial force support components can share the axial force on the support bearing, thereby improving the stability of the material handling device and extending its service life.

[0021] A series of simplified concepts are introduced in the description of the invention, which will be further explained in detail in the detailed description section. This description is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0022] The advantages and features of the present invention will be described in detail below with reference to the accompanying drawings. Attached Figure Description

[0023] The following figures are included as part of this invention for understanding its principles. The figures illustrate embodiments of the invention and their descriptions, serving to explain the principles of the invention. In the figures,

[0024] Figure 1 A perspective view of a processing apparatus according to an exemplary embodiment of the invention;

[0025] Figure 2 for Figure 1 The perspective view of the positioning device, the material handling device, and the processing device shown in the figure; and

[0026] Figure 3 for Figure 2 The figure shows a perspective view of the material handling device.

[0027] The above figures include the following reference numerals:

[0028] 100. Material handling device; 200. Material handling body; 210. First mounting hole; 220. Second mounting hole; 300. Rotary drive mechanism; 310. Rotary drive component; 320. Rotary transmission component; 410. Support shaft; 420. Connecting assembly; 421. Crossbeam; 422. First cylinder mounting plate; 423. Second cylinder mounting plate; 424. First cylinder; 425. Second cylinder; 500. First material handling assembly; 510. First bracket; 520. First suction nozzle; 6 00. Second material handling assembly; 610. Second support; 620. Second suction nozzle; 710. First tensile elastic element; 720. Second tensile elastic element; 800. Axial force support mounting base; 900. Processing equipment; 910. Loading and unloading device; 920. Handling device; 930. Anti-drop device; 940. Positioning device; 941. Positioning mechanism; 942. Stroke compensation mechanism; 943. Stroke drive element; 944. Stroke guide rail; 950. Processing device; 951. Platform. Detailed Implementation

[0029] In the following description, numerous details are provided to enable a thorough understanding of the invention. However, those skilled in the art will appreciate that the following description merely illustrates preferred embodiments of the invention, and that the invention can be practiced without one or more of these details. Furthermore, to avoid obscuring the invention, some technical features well-known in the art have not been described in detail.

[0030] According to one aspect of the present invention, a material handling device is provided. This material handling device can be applied to any suitable equipment, including but not limited to processing equipment or transfer equipment. Therefore, according to another aspect of the present invention, a processing equipment is also provided. The processing equipment includes, but is not limited to, laser processing equipment. The processing equipment can perform loading, processing, unloading, and other treatments on materials. The materials include, but are not limited to, wafers. The material handling device and processing equipment of the present invention will be described in detail below with reference to specific embodiments.

[0031] like Figure 2-3 As shown, the material handling device 100 may include a material handling body 200, a rotary drive mechanism 300, a support shaft 410, a first material handling assembly 500, a second material handling assembly 600, a connecting assembly 420, and an axial force support member (not shown due to angle issues).

[0032] The material handling body 200 can be any suitable structure such as a support, plate, or rod.

[0033] The rotary drive mechanism 300 can be mounted on the material handling body 200 by any suitable method such as welding, connecting with connectors, or snap-fit. The first end of the support shaft 410 can be connected to the rotary drive mechanism 300 for transmission. In this way, the rotary drive mechanism 300 can drive the support shaft 410 to rotate. The rotary drive mechanism 300 includes, but is not limited to, a motor drive mechanism or a rotary cylinder drive mechanism.

[0034] The first picking and placing component 500 includes, but is not limited to, grippers, shovels, hooks, and / or suction cups shown in the figure, as long as it can pick up and place materials. The second picking and placing component 600 includes, but is not limited to, grippers, shovels, hooks, and / or suction cups shown in the figure, as long as it can pick up and place materials. The first picking and placing component 500 and the second picking and placing component 600 can be the same or different. The first picking and placing component 500 can pick up and place materials. The second picking and placing component 600 can pick up and place materials. The first picking and placing component 500 and the second picking and placing component 600 can be connected to the second end of the support shaft 410 through a connecting component 420. The connecting component 420 can be any suitable structure such as a connecting rod, a connecting plate, or a connecting bracket. The first end and the second end can be arranged opposite to each other. In an embodiment where the support shaft 410 is arranged in a vertical direction, the first end can be the upper end and the second end can be the lower end.

[0035] Driven by the rotary drive mechanism 300, the support shaft 410 can drive the first pick-and-place assembly 500 and the second pick-and-place assembly 600 to move along an arc-shaped trajectory via the connecting assembly 420. This allows the first pick-and-place assembly 500 and the second pick-and-place assembly 600 to exchange positions. The first pick-and-place assembly 500 and the second pick-and-place assembly 600 can each pick up materials and interchange their positions. Thus, during their movement, the first pick-and-place assembly 500 and the second pick-and-place assembly 600 can respectively perform loading and unloading operations.

[0036] The axial force support can be connected between the support shaft 410 and the material handling body 200 in any suitable manner. In the embodiment shown in the figure, the material handling device 100 may further include an axial force support mounting base 800. The axial force support mounting base 800 may be located on the outer periphery of the support shaft 410 and connected to the material handling body 200. The axial force support mounting base 800 may have a support groove to support the axial force support.

[0037] The axial force support member can be positioned closer to the first end than the second end of the support shaft 410. Because components such as the connecting assembly 420, the first pick-and-place assembly 500, and the second pick-and-place assembly 600 are relatively heavy, the support shaft 410 needs to withstand a significant axial force. The axial force support member can distribute the axial force borne by the support shaft 410, thereby improving the operational stability of the pick-and-place device 100 and extending its service life. This is especially true when the first pick-and-place assembly 500 and the second pick-and-place assembly 600 pick up materials separately, as the axial force on the support shaft 410 is even greater. Therefore, the axial force support member is particularly important.

[0038] Axial force support components include, but are not limited to, support rings or bearings. Preferably, the bearing can be an angular contact ball bearing. The angular contact ball bearing can be connected between the outer periphery of the support shaft 410 and the material handling body 200. Angular contact ball bearings can withstand larger axial forces and have a longer service life. Thus, the material handling device 100 using angular contact ball bearings has higher mechanical strength and a longer service life.

[0039] The material handling device 100 provided in this embodiment of the invention allows the first material handling component 500 and the second material handling component 600 to move along an arc-shaped trajectory, thereby exchanging positions to achieve alternating material handling. Therefore, the material handling device 100 does not require dedicated material handling and dispensing mechanisms. Furthermore, compared to existing material handling mechanisms that use linear movement, the first and second material handling components 500 and 600 can move along an arc-shaped trajectory. Therefore, the structure of the material handling device is simpler, the layout is more rational, the space utilization is higher, and the overall machine occupies less space. Moreover, the alternating movement of the first and second material handling components 500 and 600 can improve the working efficiency of the material handling device 100, giving it better market competitiveness. Additionally, the material handling device 100 can simultaneously drive the first and second material handling components 500 and 600 using a single rotary drive mechanism 300, thus reducing manufacturing costs. Meanwhile, because components such as the connecting assembly 420, the first picking and dispensing assembly 500, and the second picking and dispensing assembly 600 are relatively heavy, and because the first picking and dispensing assembly 500 and the second picking and dispensing assembly 600 need to pick up materials, the support shaft needs to withstand a large axial force. The axial force support can share the axial force on the support bearing, thereby improving the operational stability of the picking and dispensing device 100 and extending its service life.

[0040] In some embodiments, such as Figure 1 As shown, the material handling device 100 can be applied to the processing equipment 900. The processing equipment 900 may further include a loading / unloading device 910, a conveying device 920, an anti-drop device 930, a positioning device 940, and a processing device 950. The loading / unloading device 910 can be used to store materials (including materials to be processed and processed materials). The conveying device 920 can move materials between the loading / unloading device 910 and the target position. The anti-drop device 930 can be installed between the loading / unloading device 910 and the target position. During the material handling process, the anti-drop device 930 can support the materials to prevent them from falling. After the conveying device 920 moves the materials to be processed to the target position, the positioning device 940 can adjust the posture of the materials and move them to a waiting position. The first material handling component 500 can pick up the materials to be processed from the waiting position and then move them to the processing device 950. The processing device 950 can process the materials to be processed to form processed materials. After processing is completed, the first material handling assembly 500 can pick up the processed material from the processing device 950 and transport it to the waiting position. Then, the positioning device 940 can adjust the posture of the processed material and transport the processed material from the waiting position to the target position. The conveying device 920 can transport the processed material from the target position to the loading / unloading device 910. The processing equipment 900 can repeatedly perform the above operations to process more materials.

[0041] Driven by the rotary drive mechanism 300, the first pick-and-place assembly 500 and the second pick-and-place assembly 600 can move alternately between the waiting position and the processing device 950. For example, after the first pick-and-place assembly 500 transports the currently processed material to the processing device 950, the second pick-and-place assembly 600 can simultaneously move to the waiting position. In this way, the second pick-and-place assembly 600 can pick up the next material to be processed. After the first pick-and-place assembly 500 transports the currently processed material to the waiting position, the second pick-and-place assembly 600 can simultaneously move to the processing device 950. In this way, the second pick-and-place assembly 600 can place the next material to be processed on the processing device 950, ready for processing.

[0042] For example, such as Figure 1-2 As shown, the processing device 950 may include a platform 951. The platform 951 can be used to carry materials. A first pick-and-place assembly 500 or a second pick-and-place assembly 600 can place the material to be processed on the platform 951 for processing. The positioning device 940 may include a positioning mechanism 941. The positioning mechanism 941 can be used to adjust the posture of the materials (including the material to be processed and the processed material). The first pick-and-place assembly 500 and the second pick-and-place assembly 600 can be used to move alternately above the platform 951 and above the positioning mechanism 941. The material waiting to be positioned can be located on the positioning mechanism 941. In this way, the first pick-and-place assembly 500 and the second pick-and-place assembly 600 can respectively transport the material between the platform 951 and the positioning mechanism 941. The position of the material after posture adjustment better meets the expected requirements, thereby facilitating pickup by the first pick-and-place assembly 500 and the second pick-and-place assembly 600, and thus improving the reliability of the processing equipment 900.

[0043] For example, such as Figure 2-3 As shown, the positioning device 940 may further include a stroke compensation mechanism 942. The stroke compensation mechanism 942 can drive the positioning mechanism 941 to move horizontally. The stroke compensation mechanism 942 includes, but is not limited to, a motor stroke compensation mechanism, a cylinder stroke compensation mechanism, or an electric cylinder stroke compensation mechanism. The stroke of the positioning mechanism 941 may intersect with the arcuate trajectory. Thus, the positioning mechanism 941 can approach and move away from the arcuate trajectory. The positioning mechanism 941 can handle materials. Furthermore, the movable positioning mechanism 941 allows for a relatively small arcuate trajectory, thereby making the material handling device 100 more compact. Also, the relatively small arcuate trajectory reduces the centrifugal force during the movement of the first material handling assembly 500 and the second material handling assembly 600, thus preventing damage.

[0044] For example, such as Figure 2-3As shown, the stroke compensation mechanism 942 may include a stroke drive 943 and a stroke guide 944. The stroke guide 944 may extend radially along the arc-shaped trajectory. The stroke drive 943 may drive the positioning mechanism 941 to move along the stroke guide 944. The stroke drive 943 includes, but is not limited to, a motor, a cylinder, or an electric cylinder. Compared to moving in other directions, the positioning mechanism 941, which moves radially along the arc-shaped trajectory, can move materials closer to and further away from the loading and unloading device 100 more quickly. This results in higher efficiency and lower energy consumption for the processing equipment.

[0045] For example, such as Figure 3 As shown, the connecting assembly 420 may include a crossbeam 421. The first and second picking-and-dispensing assemblies 500 and 600 can be connected to both ends of the crossbeam 421, respectively. The second end of the support shaft 410 can be connected to the middle of the crossbeam 421. The middle of the crossbeam 421 can be located between its two ends. In this way, the structure of the picking-and-dispensing device 100 is relatively symmetrical, thereby allowing for more uniform force distribution.

[0046] Furthermore, the middle part of the crossbeam 421 can be the center of the crossbeam 421. The first pick-and-place assembly 500 and the second pick-and-place assembly 600 can be arranged symmetrically with respect to the support shaft 410. In this way, the structure of the pick-and-place device 100 is more symmetrical, thereby making its force distribution more uniform.

[0047] For example, such as Figure 3 As shown, the connecting assembly 420 may further include a first cylinder mounting plate 422, a second cylinder mounting plate 423, a first cylinder 424, and a second cylinder 425. The first cylinder mounting plate 422 and the second cylinder mounting plate 423 may be respectively disposed at both ends of the crossbeam 421. The body of the first cylinder 424 may be connected to the first cylinder mounting plate 422. The first pick-and-place assembly 500 may be connected to the piston rod of the first cylinder 424. The piston rod of the first cylinder 424 is vertically extendable relative to the body of the first cylinder 424. The first cylinder 424 can drive the first pick-and-place assembly 500 to move vertically between an extended position and a retracted position. The body of the second cylinder 425 may be connected to the second cylinder mounting plate 423. The second pick-and-place assembly 600 may be connected to the piston rod of the second cylinder 425. The piston rod of the second cylinder 425 is vertically extendable relative to the body of the second cylinder 425. The second cylinder 425 can drive the second material handling assembly 600 to move vertically between the extended position and the retracted position.

[0048] It should be noted that the first pick-and-place component 500 and the second pick-and-place component 600 can move independently. Therefore, the extended positions of the first pick-and-place component 500 and the second pick-and-place component 600 are different, and their retracted positions are also different. The extended position of the first pick-and-place component 500 can be lower than its retracted position. The extended position of the second pick-and-place component 600 can also be lower than its retracted position.

[0049] With this configuration, the first cylinder 424 can drive the first pick-and-place assembly 500 downwards to the extended position, allowing it to pick up or place materials. After picking up or placing materials, the first cylinder 424 can drive the first pick-and-place assembly 500 upwards to the retracted position, ready to transport materials. This prevents the first pick-and-place assembly 500 from colliding with other components during material transport. Similarly, the second cylinder 425 can drive the second pick-and-place assembly 600 downwards to the extended position, allowing it to pick up or place materials. After picking up or placing materials, the second cylinder 425 can drive the second pick-and-place assembly 600 upwards to the retracted position, ready to transport materials. This also prevents the second pick-and-place assembly 600 from colliding with other components during material transport.

[0050] For example, such as Figure 3 As shown, the material handling device 100 may further include a first tensile elastic element 710 and a second tensile elastic element 720. One end of the first tensile elastic element 710 may be connected to the body of the first cylinder 424 and / or the first cylinder mounting plate 422 and / or the crossbeam 421. The body of the first cylinder 424 may include the cylinder barrel and / or end cap of the first cylinder 424, etc. The other end of the first tensile elastic element 710 may be connected to the first material handling assembly 500. The first tensile elastic element 710 may be in a stretched state in the vertical direction. The first tensile elastic element 710 includes, but is not limited to, a tension spring or a tension member made of an elastic material such as rubber.

[0051] In practical applications, when a power outage, gas outage, or other malfunction occurs, the first cylinder 424 will lose its holding force on the first pick-and-place assembly 500. As a result, the first pick-and-place assembly 500 will fall under the influence of gravity. This could potentially damage the first pick-and-place assembly 500, the material picked up on it (if already picked up), and / or other components below it. In this case, the first tension elastic member 710 can be in a stretched state, applying an upward tensile force to the first pick-and-place assembly 500 to act as a buffer, thereby inhibiting the first pick-and-place assembly 500 from falling. Thus, the first pick-and-place assembly 500 will fall slowly, or even not fall at all. Therefore, the first pick-and-place assembly 500, the material picked up on it (if already picked up), and / or other components below it will not be damaged due to excessive falling speed. Furthermore, when the equipment to which the material handling device 100 is applied restarts, the first material handling assembly 500 and the material picked up by the first material handling assembly 500 (if already picked up) will not collide with other components. Thus, the first material handling assembly 500 and the material picked up by the first material handling assembly 500 (if already picked up) can be in a safe position, avoiding other components and thus preventing potential collisions during equipment restart. Therefore, the material handling device 100 offers good safety.

[0052] For example, the first tension elastic member 710 can be configured to pull the first pick-and-place assembly 500 back or near its retracted position, or to hold the first pick-and-place assembly 500 in its retracted position, in the event of a malfunction in the air passage structure of the first cylinder 424. The malfunction in the air passage structure includes, but is not limited to, an interruption of compressed air or a leak in the air supply pipe. That is, when the air passage structure malfunctions, the performance of the first cylinder 424 will fail. At this time, the first cylinder 424 will lose its holding force on the first pick-and-place assembly 500. Thus, the first tension elastic member 710 can apply an upward force to the first pick-and-place assembly 500, thereby pulling the first pick-and-place assembly 500 back or near its retracted position, or holding the first pick-and-place assembly 500 in its retracted position. With this configuration, the first tension elastic member 710 can ensure that the first pick-and-place assembly 500 and the material picked up by the first pick-and-place assembly 500 (if already picked up) are in a safe position when the first cylinder 424 malfunctions due to an air passage structure malfunction.

[0053] One end of the second tension elastic member 720 can be connected to the body of the second cylinder 425 and / or the second cylinder mounting plate 423 and / or the crossbeam 421. The body of the second cylinder 425 may include the cylinder barrel and / or end cap of the second cylinder 425. The other end of the second tension elastic member 720 can be connected to the second material handling assembly 600. The second tension elastic member 720 can be in a stretched state in the vertical direction. The second tension elastic member 720 includes, but is not limited to, a tension spring or a tension member made of an elastic material such as rubber. The second tension elastic member 720 and the first tension elastic member 710 may be the same or different.

[0054] In practical applications, when a power outage, gas outage, or other malfunction occurs, the second cylinder 425 will lose its holding force on the second pick-and-place assembly 600. As a result, the second pick-and-place assembly 600 will fall under the influence of gravity. This could potentially damage the second pick-and-place assembly 600, the material picked up on it (if already picked up), and / or other components below it. In this case, the second tension elastic member 720 can be in a stretched state, applying an upward tensile force to the second pick-and-place assembly 600 to act as a buffer, thereby inhibiting the second pick-and-place assembly 600 from falling. Thus, the second pick-and-place assembly 600 will fall slowly, or even not fall at all. Therefore, the second pick-and-place assembly 600, the material picked up on it (if already picked up), and / or other components below it will not be damaged due to excessive falling speed. Furthermore, when the equipment to which the pick-and-place device 100 is applied restarts, the second pick-and-place assembly 600 and the material picked up on it (if already picked up) will not collide with other components. Thus, the second pick-and-place assembly 600 and the material picked up on it (if already picked up) can be in a safe position, avoiding other components and preventing potential collisions during equipment restart. Therefore, the pick-and-place device 100 offers good safety.

[0055] For example, the second tension elastic member 720 can be configured to pull the second pick-and-place assembly 600 back or near its retracted position, or to hold the second pick-and-place assembly 600 in its retracted position, in the event of a malfunction in the air passage structure of the second cylinder 425. The malfunction in the air passage structure includes, but is not limited to, an interruption of compressed air or a leak in the air supply pipe. That is, when the air passage structure malfunctions, the performance of the second cylinder 425 will fail. At this time, the second cylinder 425 will lose its holding force on the second pick-and-place assembly 600. Thus, the second tension elastic member 720 can apply an upward force to the second pick-and-place assembly 600, thereby pulling the second pick-and-place assembly 600 back or near its retracted position, or holding the second pick-and-place assembly 600 in its retracted position. With this configuration, the second tension elastic member 720 can prevent the second pick-and-place assembly 600 and the material picked up on it (if already picked up) from being in a safe position when the second cylinder 425 malfunctions due to an air passage structure malfunction.

[0056] For example, such as Figure 3 As shown, the rotary drive mechanism 300 may include a rotary drive component 310 and a rotary transmission component 320. The rotary drive component 310 can be connected to the support shaft 410 via the rotary transmission component 320. Thus, the rotary transmission component 320, driven by the rotary drive component 310, can drive the support shaft 410 to rotate. Consequently, the support shaft 410 can drive the first pick-and-place assembly 500 and the second pick-and-place assembly 600 to move along an arcuate trajectory. The rotary drive component 310 includes, but is not limited to, a motor or a rotary cylinder. The rotary transmission component 320 includes, but is not limited to, a ball screw, a gear transmission component, or a belt transmission component. In some embodiments, the pick-and-place body 200 may be provided with a first mounting hole 210 and a second mounting hole 220. The rotary drive component 310 can pass through and connect to the first mounting hole 210. The support shaft 410 can pass through and connect to the second mounting hole 220. The first pick-and-place assembly 500 and the second pick-and-place assembly 600 may be located on one side of the pick-and-place body 200. The rotary transmission component 320 can be located on the other side of the pick-and-place body 200. This arrangement results in a simple structure and low manufacturing cost for the rotary drive mechanism 300. Furthermore, the pick-and-place body 200 can act as a separator, preventing accidental interference between the first pick-and-place assembly 500, the second pick-and-place assembly 600, and the rotary drive component 310.

[0057] For example, such as Figure 3As shown, the first material handling assembly 500 may include a first support 510 and a first suction nozzle 520. The first support 510 may be connected to the connecting assembly 420. There may be at least one first suction nozzle 520, for example, one, two, or more. The first suction nozzle 520 may be connected to an end of the first support 510. The first suction nozzle 520 may be disposed on one or more ends of the first support 510. Furthermore, one or more first suction nozzles 520 may be disposed on any end of the first support 510. In the embodiment shown in the figure, the first support 510 may be X-shaped. The X-shaped first support 510 may have four ends. Each end may be provided with a first suction nozzle 520. The X-shaped first support 510 includes, but is not limited to, a cross-shaped support.

[0058] In practical applications, when material needs to be picked up, the vacuum pump can create a vacuum, resulting in a negative pressure environment at the first suction nozzle 520, which allows the material to be adsorbed. When material needs to be placed, the air source can supply air to the first suction nozzle 520 to eliminate the negative pressure environment, thus separating the material from the first suction nozzle 520. With this configuration, the first suction nozzle 520 can firmly adhere to the surface of the material without damaging or abrading it. Furthermore, no tooling is required on the material, and the first picking and placing assembly 500 has low requirements for the material's shape. Therefore, the picking and placing device 100 is applicable to a wider range of materials and has strong versatility.

[0059] The second material handling assembly 600 may include a second support 610 and a second suction nozzle 620. The second support 610 may be connected to the connecting assembly 420. There may be at least one second suction nozzle 620, for example, one, two, or more. The second suction nozzle 620 may be connected to an end of the second support 610. The second suction nozzle 620 may be disposed on one or more ends of the second support 610. Furthermore, one or more second suction nozzles 620 may be disposed on any end of the second support 610. In the embodiment shown in the figures, the second support 610 may be X-shaped. The X-shaped second support 610 may have four ends. Each end may be provided with a second suction nozzle 620. The X-shaped second support 610 includes, but is not limited to, a cross-shaped support.

[0060] In practical applications, when material needs to be picked up, the vacuum pump can create a vacuum, resulting in a negative pressure environment at the second suction nozzle 620, which allows the material to be adsorbed. When material needs to be placed, the air source can supply air to the second suction nozzle 620 to eliminate the negative pressure environment, thus separating the material from the second suction nozzle 620. With this configuration, the second suction nozzle 620 can firmly adhere to the surface of the material without damaging or abrading it. Furthermore, no tooling is required on the material, and the second pick-and-place assembly 600 has low requirements regarding the shape of the material. Therefore, the pick-and-place device 100 is applicable to a wider range of materials and has strong versatility.

[0061] For example, such as Figure 3 The first support 510 and the second support 610 can both be X-shaped. The connecting component 420 can be connected to the middle of the first support 510 and the middle of the second support 610, respectively. A first suction nozzle 520 can be provided at each end of the first support 510. A second suction nozzle 620 can be provided at each end of the second support 610. With this configuration, the first material handling assembly 500 has multiple first suction nozzles 520, and these nozzles can be distributed relatively evenly. Thus, the first material handling assembly 500 has a strong and relatively uniform adsorption force on the material. The second material handling assembly 600 has multiple second suction nozzles 620, and these nozzles can be distributed relatively evenly. Thus, the second material handling assembly 600 has a strong and relatively uniform adsorption force on the material.

[0062] For example, a channel extending axially through the support shaft 410 may be provided within it. This allows components such as cables (e.g., power lines and signal lines) and air hoses to pass through the channel of the support shaft 410. Thus, the support shaft 410 can protect these components from damage by external forces. Furthermore, the material handling device 100 achieves higher space utilization and a more compact structure. Additionally, an angle sensor may be installed within the channel of the support shaft 410. The angle sensor includes, but is not limited to, a laser displacement sensor. The angle sensor can detect the rotation angle of the support shaft 410, thereby preventing deviations in the rotation of the support shaft 410 that could cause the first and second material handling assemblies 500 and 600 to fail to accurately handle materials.

[0063] Specifically, a first bearing can be provided at the first end of the support shaft 410. The outer ring of the first bearing can be connected to the side wall of the channel. A second bearing can be provided at the second end of the support shaft 410. The outer ring of the second bearing can be connected to the side wall of the channel. The first bearing and the second bearing can be the same or different. An axial force support member can be located between the first bearing and the second bearing. The inner rings of the first bearing and the second bearing can be used to fix components such as cables and air pipes passing through the channel, respectively. In this way, when the support shaft 410 rotates, the inner rings of the first bearing and the second bearing can remain relatively stationary. Therefore, components such as cables and air pipes fixed to the inner rings of the first bearing and the second bearing will not experience entanglement or other problems, thereby improving safety.

[0064] For ease of description, relative terms such as "above," "over," "on the upper surface of," and "above" are used here to describe the regional positional relationship of one or more components or features shown in the figures to other components or features. It should be understood that relative terms include not only the orientation of the component as depicted in the figure but also different orientations during use or operation. For example, if the components in the figures are inverted as a whole, "above" or "above other components or features" will include cases where the component is "below" or "under" other components or features. Thus, the exemplary term "above" can include both "above" and "below." Furthermore, these components or features may also be positioned at other different angles (e.g., rotated 90 degrees or other angles), and this document intends to include all such cases.

[0065] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, parts, components, and / or combinations thereof.

[0066] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0067] The present invention has been described through the above embodiments. However, it should be understood that the above embodiments are for illustrative purposes only and are not intended to limit the invention to the scope of the described embodiments. Furthermore, those skilled in the art will understand that the present invention is not limited to the above embodiments, and many more variations and modifications can be made based on the teachings of the present invention, all of which fall within the scope of protection claimed by the present invention. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A material handling device, characterized in that, include: Material handling body; A rotary drive mechanism is disposed on the material handling body; A support shaft, the first end of which is connected to the rotary drive mechanism for transmission. A first and a second material handling assembly are connected to the second end of a support shaft via a connecting assembly. Driven by a rotary drive mechanism, the support shaft moves the first and second material handling assemblies along an arc-shaped trajectory, causing them to exchange positions. This allows one of the first and second material handling assemblies to transfer the material to be processed from a waiting position onto the processing device, while the other component transfers the processed material from the processing device to the waiting position. An axial force support is provided, which connects the support shaft and the material handling body, and is closer to the first end than the second end. The axial force support is used to share the axial force on the support bearing. The connecting assembly includes a crossbeam, with the first and second material handling assemblies respectively connected to both ends of the crossbeam, and the second end of the support shaft connected to the middle portion between the two ends of the crossbeam. The connection component also includes: A first cylinder mounting plate and a second cylinder mounting plate are respectively disposed at both ends of the crossbeam; and The first cylinder and the second cylinder are respectively connected to the first cylinder mounting plate and the second cylinder mounting plate. The first material handling assembly is connected to the piston rod of the first cylinder, and the second material handling assembly is connected to the piston rod of the second cylinder. The first cylinder and the second cylinder are respectively used to drive the first material handling assembly and the second material handling assembly to move vertically between the extended position and the retracted position. The material handling device further includes a first tensile elastic element and a second tensile elastic element. One end of the first tensile elastic element is connected to the body of the first cylinder and / or the first cylinder mounting plate and / or the crossbeam, and the other end of the first tensile elastic element is connected to the first material handling assembly. One end of the second tensile elastic element is connected to the body of the second cylinder and / or the second cylinder mounting plate and / or the crossbeam, and the other end of the second tensile elastic element is connected to the second material handling assembly.

2. The material handling device as described in claim 1, characterized in that, The middle part of the crossbeam is the center of the crossbeam, and the first material handling assembly and the second material handling assembly are symmetrically arranged with respect to the support axis.

3. The material handling device as described in claim 1, characterized in that, The first tension elastic element is configured to pull the first pick-and-place assembly back or near the retracted position or keep the first pick-and-place assembly in the retracted position when the air circuit structure of the first cylinder fails. The second tension elastic element is configured to pull the second pick-and-place assembly back or near the retracted position or keep the second pick-and-place assembly in the retracted position when the air circuit structure of the second cylinder fails.

4. The material handling device as described in claim 1, characterized in that, The axial force support includes an angular contact ball bearing, which is connected between the outer periphery of the support shaft and the material handling body.

5. The material handling device as described in claim 1, characterized in that, The rotary drive mechanism includes a rotary drive component and a rotary transmission component. The rotary transmission component drives the support shaft to rotate under the drive of the rotary drive component. The material handling body is provided with a first mounting hole and a second mounting hole. The rotary drive component and the support shaft pass through and are connected to the first mounting hole and the second mounting hole, respectively. The first material handling assembly and the second material handling assembly are located on one side of the material handling body, and the rotary transmission component is located on the other side of the material handling body.

6. The material handling device as described in any one of claims 1-5, characterized in that, The first material handling assembly includes a first support and at least one first nozzle connected to the end of the first support, and the second material handling assembly includes a second support and at least one second nozzle connected to the end of the second support. Both the first support and the second support are connected to the connecting assembly.

7. The material handling device as described in claim 6, characterized in that, Both the first bracket and the second bracket are X-shaped. The connecting assembly is connected to the middle of the first bracket and the middle of the second bracket. Each end of the first bracket is provided with the first suction nozzle, and each end of the second bracket is provided with the second suction nozzle.

8. The material handling device as described in claim 1, characterized in that, The support shaft has a channel extending through it along its axial direction. A first bearing is provided at the first end, and the outer ring of the first bearing is connected to the side wall of the channel. A second bearing is provided at the second end, and the outer ring of the second bearing is connected to the side wall of the channel. The axial force support is located between the first bearing and the second bearing. The inner rings of the first bearing and the second bearing are respectively used to fix the components passing through the channel.

9. A processing equipment, characterized in that, Includes the material handling device as described in any one of claims 1-8.

10. The processing equipment as described in claim 9, characterized in that, The processing equipment also includes a platform and a positioning device. The platform is used to carry materials, and the positioning device includes a positioning mechanism for adjusting the posture of the materials. The first material handling assembly and the second material handling assembly are used to move alternately above the platform and above the positioning mechanism.

11. The processing equipment as described in claim 10, characterized in that, The positioning device further includes a stroke compensation mechanism, which drives the positioning mechanism to move horizontally so that the stroke of the positioning mechanism intersects with the arc-shaped trajectory.

12. The processing equipment as described in claim 11, characterized in that, The stroke compensation mechanism includes a stroke drive and a stroke guide. The stroke drive is used to drive the positioning mechanism to move along the stroke guide, and the stroke guide extends radially along the arc trajectory.

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