A multi-specification wafer cassette and a positioning mechanism thereof

Abstract

The application provides a multi-specification wafer box and a positioning mechanism thereof, the wafer box comprises a wafer box body, the wafer box body comprises two side plates and a top plate arranged on the two side plates, the top plate is provided with an opening, a placing cavity for placing wafers is formed between the two side plates, the wafer box body forms wafer box bodies of different specifications according to the spacing between the two side plates, a positioning cross bar is arranged between the two side plates, and the bottom of each side plate is further provided with a positioning groove; the positioning mechanism comprises a fixed bearing table, a wafer box positioning block and a cross bar positioning block, the wafer box positioning block and the cross bar positioning block are both fixed on the upper surface of the fixed bearing table, the cross bar positioning block is provided with a horizontal clamping groove for clamping the positioning cross bar, and the two sides of the wafer box positioning block are respectively provided with trapezoidal tables matched with the positioning grooves of wafer box bodies of different specifications; the wafer box provided by the application can place wafers of different specifications, and the positioning mechanism can position wafer boxes of different sizes.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of wafer processing, in particular to a multi-specification wafer box and a positioning mechanism thereof. BACKGROUND

[0002] In the field of semiconductor, currently, wafers are usually placed in wafer boxes, and a fixed bearing table can only place a wafer box of one specification and cannot be compatible with wafer boxes of multiple specifications. When a wafer processing factory produces wafers of multiple specifications, it needs to respectively use fixed bearing tables corresponding to the wafer box specifications to produce wafers. Producing wafers of multiple specifications requires multiple sets of corresponding bearing tables, resulting in high fixed investment of equipment. In the actual production and manufacturing process of a photolithography device, corresponding tooling can be arranged for wafer boxes of different specifications to produce wafers of corresponding specifications. When wafers of corresponding specifications are produced, corresponding tooling is installed and replaced on the fixed bearing table, so that one fixed bearing table can produce wafers of multiple specifications. However, the production of tooling corresponding to each specification of wafer box requires a large amount of manpower and material resources, and the replacement of tooling in production requires a high investment cost and low production efficiency. SUMMARY

[0003] The present application aims to overcome the deficiencies of the prior art and provide a multi-specification wafer box and a positioning mechanism thereof to solve the technical problems presented in the background.

[0004] The purpose of the present application is achieved by the following technical solutions:

[0005] A multi-specification wafer box comprises a wafer box body, the wafer box body comprises two side plates and a top plate arranged on the two side plates, the top plate is provided with an opening, a placement cavity for placing wafers is formed between the two side plates, the wafer box body forms wafer box bodies of different specifications according to the spacing between the two side plates, a positioning cross bar is arranged between the two side plates, and a positioning groove is further arranged at the bottom of the two side plates.

[0006] A positioning mechanism of a multi-specification wafer box comprises a fixed bearing table, a wafer box positioning block, and a cross bar positioning block, the wafer box positioning block and the cross bar positioning block are both fixed on the upper surface of the fixed bearing table, the cross bar positioning block is provided with a horizontal clamping groove for clamping the positioning cross bar, and the two sides of the wafer box positioning block are respectively provided with a trapezoidal table matched with the positioning groove of the wafer box body of different specifications.

[0007] In the above summary, further, a stepped hole is symmetrically arranged on the wafer box positioning block, the surface of the fixed bearing table corresponding to the stepped hole is provided with a screw hole, a rotating block is further arranged in the stepped hole, the rotating block is arranged in the stepped hole and can rotate along the inner wall of the stepped hole, the rotating block is provided with a through groove, a locking bolt passes through the through groove and is fixed on the upper surface of the fixed bearing table through the screw hole.

[0008] Further, the rotating block comprises a first rotating part and a second rotating part, the sidewalls of the first rotating part and the second rotating part are in arc-shaped structure, the arc-shaped sidewall of the first rotating part is matched with the inner wall of the upper end of the stepped hole, and the arc-shaped sidewall of the second rotating part is matched with the inner wall of the lower end of the stepped hole.

[0009] Further, the trapezoidal table comprises a first trapezoidal table and a second trapezoidal table, and the first trapezoidal table and the second trapezoidal table can be matched with the positioning grooves of the wafer box bodies of two sizes respectively.

[0010] Further, the cross rod positioning block is fixed on the upper surface of the fixed bearing table through a screw.

[0011] The wafer box provided by the present application can accommodate wafers of different specifications, and the positioning mechanism can position wafer boxes of different sizes, improving the operation convenience and the production efficiency of the photolithography machine.

[0012] The wafer box provided by the present application can accommodate wafers of different specifications, and the positioning mechanism can position wafer boxes of different sizes, improving the operation convenience and the production efficiency of the photolithography machine. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 The present application is a structural schematic diagram;

[0014] Figure 2 The present application is a structural schematic diagram;

[0015] Figure 3 The present application is another structural schematic diagram of the wafer box body;

[0016] Figure 4 The present application is a connection schematic diagram of the wafer box body, the wafer box positioning block and the cross rod positioning block;

[0017] Figure 5 The present application is a connection schematic diagram of the wafer box positioning block and the fixed bearing table;

[0018] Figure 6 The present application is a structural schematic diagram of the rotating block.

[0019] In the figure, 1-crystal box body, 1.1-side plate, 1.2-top plate, 1.3-opening, 1.4-placing cavity, 1.5-positioning crossbar, 1.6-positioning groove, 2-positioning mechanism, 2.1-fixed bearing table, 2.2-wafer box positioning block, 2.3-crossbar positioning block, 2.4-horizontal clamping groove, 2.5-ladder-shaped table, 2.51-first ladder-shaped table, 2.52-second ladder-shaped table, 2.6-step hole, 2.7-screw hole, 2.8-rotary block, 2.81-first rotary part, 2.82-second rotary part, 2.9-through groove, 2.10-locking bolt. DETAILED DESCRIPTION

[0020] The present application is further explained by the following specific examples, which should not be construed as limiting the scope of the application. Other advantages and benefits of the present application will be readily appreciated as the same becomes better understood by reference to the following detailed description when considered in connection with the accompanying drawings wherein:

[0021] Need to be noted that the drawings provided in the following examples only illustrate the basic concept of the present application in a schematic way, and the figures only show the components related to the present application in the drawings, not drawn according to the number, shape and size of the components in actual implementation, the type, number and ratio of each component in actual implementation can be changed arbitrarily, and the component layout type can be more complex.

[0022] Example 1:

[0023] The present application provides a multi-specification wafer box, please refer to the accompanying Figure 1 -attached Figure 4 As shown, including wafer box body 1, the wafer box body 1 includes two side plates 1.1 and the top plate 1.2 arranged on the two side plates 1.1, the top plate 1.2 is provided with opening 1.3, the placing cavity 1.4 for placing wafer is formed between the two side plates 1.1, the wafer box body 1 forms different specification wafer box body 1 according to the distance between the two side plates 1.1, the positioning crossbar 1.5 is arranged between the two side plates 1.1, and the positioning groove 1.6 is further arranged at the bottom of the two side plates 1.1.

[0024] In the present application, a positioning mechanism 2 for positioning the multi-specification wafer box body 1 is also provided, the positioning mechanism 2 comprises a fixed bearing table 2.1, a wafer box positioning block 2.2 and a crossbar positioning block 2.3, the wafer box positioning block 2.2 and the crossbar positioning block 2.3 are both fixed on the upper surface of the fixed bearing table 2.1, the crossbar positioning block 2.3 is provided with a horizontal clamping groove 2.4 for clamping the positioning crossbar, and the two sides of the wafer box positioning block 2.2 are respectively provided with trapezoidal tables 2.5 matched with the positioning grooves of wafer box bodies 1 of different specifications. When positioning the wafer box body 1, the positioning crossbar 1.5 of the wafer box body 1 is clamped in the horizontal clamping groove 2.4 of the crossbar positioning block 2.3, and then the positioning groove 1.6 at the bottom of the side plate 1.1 is clamped in the trapezoidal table 2.5 of the wafer box positioning block 2.2, so as to fix the wafer box body 1.

[0025] Please refer to the accompanying drawings Figure 5 In the present embodiment, the trapezoidal table 2.5 comprises a first trapezoidal table 2.51 and a second trapezoidal table 2.52, the positioning sizes of the first trapezoidal table 2.51 and the second trapezoidal table 2.52 are different, so in the present embodiment, the first trapezoidal table 2.51 and the second trapezoidal table 2.52 can respectively match the positioning grooves 1.6 of wafer box bodies 1 of two sizes, so as to position wafer box bodies 1 of two sizes, and in the specific implementation process, other sizes and other numbers of trapezoidal tables can also be provided to adapt to the positioning of wafer box bodies 1 of more sizes.

[0026] Example 2:

[0027] Please continue to refer to the accompanying drawings Figure 5 and the accompanying drawings Figure 6As shown, the wafer box positioning block 2.2 is symmetrically provided with a stepped hole 2.6, the surface of the fixed bearing table 2.1 corresponding to the stepped hole 2.6 is provided with a screw hole 2.7, and a rotating block 2.8 is further provided in the stepped hole 2.6. The rotating block 2.8 is placed in the stepped hole 2.6 and can rotate along the inner wall of the stepped hole 2.6. The rotating block 2.8 is provided with a through slot 2.9, and a locking bolt 2.10 passes through the through slot 2.9 and is fixed on the upper surface of the fixed bearing table 2.1 through the screw hole 2.7. The crossbar positioning block 2.3 is fixed on the upper surface of the fixed bearing table 2.1 by a screw. Specifically, in the embodiment, the screw hole 2.7 can be arranged at any position on the surface of the fixed bearing table 2.1 corresponding to the stepped hole 2.6. When the wafer box positioning block 2.2 is fixed, if the through slot 2.9 of the locking bolt 2.10 is not aligned with the screw hole 2.7, the rotating block 2.8 can be quickly rotated in the stepped hole 2.6 to align the through slot 2.9 with the screw hole 2.7. Then, the wafer box positioning block 2.2 can be fixed on the upper surface of the fixed bearing table 2.1 by the locking bolt 2.10. Therefore, in the embodiment, the screw hole 2.7 can be flexibly arranged at any position on the upper surface of the fixed bearing table 2.1 corresponding to the stepped hole 2.6 to fix the wafer box positioning block 2.2, thereby reducing the drilling accuracy of the screw hole 2.7 and speeding up the fixing efficiency of the wafer box positioning block 2.2 without affecting the fixing accuracy of the wafer box positioning block 2.2.

[0028] In the above embodiment, as a preferred embodiment, the rotating block 2.8 is provided with a first rotating part 2.81 and a second rotating part 2.82 to enhance the cooperation effect between the rotating block 2.8 and the stepped hole 2.6. The side walls of the first rotating part 2.81 and the second rotating part 2.82 are arc-shaped structures. The arc-shaped side wall of the first rotating part 2.81 cooperates with the upper end inner wall of the stepped hole 2.6, and the arc-shaped side wall of the second rotating part 2.82 cooperates with the lower end inner wall of the stepped hole 2.6. When the rotating block 2.8 is rotated, the side wall of the first rotating part 2.81 rotates along the upper end inner wall of the stepped hole 2.6, and the second rotating part 2.82 rotates along the lower end inner wall of the stepped hole 2.6, so that the rotating block 2.8 is not easy to fall off from the stepped hole 2.6.

[0029] The above-described embodiments only express the specific implementation of the present application, which is described in more detail and in more detail, but cannot be understood as a limitation on the scope of the present application. It should be noted that for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are within the scope of protection of the present application.

Claims

1. A multi-specification wafer cassette, comprising: The wafer box body includes two side plates and a top plate arranged on the two side plates, the top plate is provided with an opening, a placing cavity for placing a wafer is formed between the two side plates, wafer box bodies of different specifications are formed according to the spacing between the two side plates, a positioning cross bar is arranged between the two side plates, and a positioning groove is further arranged at the bottom of the two side plates for a positioning mechanism for positioning the multi-specification wafer box, the positioning mechanism includes a fixed bearing table, a wafer box positioning block and a cross bar positioning block, the wafer box positioning block and the cross bar positioning block are both fixed on the upper surface of the fixed bearing table, the cross bar positioning block is provided with a horizontal clamping groove for clamping the positioning cross bar, the wafer box positioning block is provided with trapezoidal tables on both sides for cooperating with the positioning grooves of wafer box bodies of different specifications; the wafer box positioning block is symmetrically provided with a stepped hole, the surface of the fixed bearing table corresponding to the stepped hole is provided with a screw hole, a rotating block is further arranged in the stepped hole, the rotating block is arranged in the stepped hole and can rotate along the inner wall of the stepped hole, the rotating block is provided with a through groove, a locking bolt passes through the through groove and fixes the wafer box positioning block on the upper surface of the fixed bearing table through the screw hole.

2. A multi-species wafer cassette according to claim 1, wherein, The rotating block includes a first rotating part and a second rotating part, the side walls of the first rotating part and the second rotating part are both arc-shaped structures, the arc-shaped side wall of the first rotating part cooperates with the upper end inner wall of the stepped hole, and the arc-shaped side wall of the second rotating part cooperates with the lower end inner wall of the stepped hole.

3. A multi-species wafer cassette according to claim 1 wherein, The trapezoidal tables include a first trapezoidal table and a second trapezoidal table, the first trapezoidal table and the second trapezoidal table can respectively cooperate with the positioning grooves of wafer box bodies of two sizes.

4. The multi-specification wafer cassette of claim 1 wherein, The cross bar positioning block is fixed on the upper surface of the fixed bearing table through a screw.

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