Silane high altitude emergency release system and method

Abstract

The application discloses a silane high-altitude emergency release system and method, which comprises a steel structure tower, a release vertical pipe arranged in the steel structure tower, a molecular seal arranged on the release vertical pipe, a molecular seal condensate discharge pipeline arranged on the molecular seal, the molecular seal being connected with a release combustor, a horizontal silane release gas pipeline arranged in the middle part of the steel structure tower, a pressure transmitter and a release quick closing valve being sequentially arranged on the horizontal silane release gas pipeline, a fresh water pipeline arranged in the lower part of the steel structure tower, a nitrogen gas purging pipeline arranged in the upper part of the steel structure tower, a branch pipe arranged on the nitrogen gas purging pipeline, a check valve arranged on the branch pipe, release gas entering the horizontal silane release gas pipeline and entering the release vertical pipe through the pressure transmitter and the release quick closing valve, and the release gas is combusted in the release combustor through the molecular seal and is discharged without pollution, and the condensate in the molecular seal flows into a sewage collecting position through the molecular seal condensate discharge pipeline. The application has the advantages of compact structure, convenient operation, multi-stage release, safety and reliability, stable flame, high rigidity, long equipment service life and the like.

Description

TECHNICAL FIELD

[0001] The present application relates to a kind of silane high air emergency release system and method, especially suitable for handling electronic, information, energy, material, chemical, mechanical and optical field generated silane waste gas. BACKGROUND

[0002] Silane can be prepared by thermal decomposition or chemical reaction with other gases, such as single crystal silicon, polycrystalline silicon, amorphous silicon, metal silicide, silicon nitride, silicon carbide, silicon oxide and a series of silicon-containing substances, which are widely used in high-tech and increasingly important. Concentration greater than 8% of silane reacts with oxygen, appears intense combustion phenomenon, reaction produces a large amount of heat to make silane rapidly decomposed into (S i H2) X and further combustion to generate S i O2, silane will also stimulate the eyes, skin and respiratory system. In view of the self-ignition and harmfulness of silane, the silane waste gas generated by the upstream device overpressure or production process needs special treatment, at this time a silane emergency release system is needed.

[0003] In the prior art, the release gas pipeline is usually provided with only one release quick closing valve to control the discharge of release gas, and the failure of the release quick closing valve can easily cause the upstream device of the release system to be over-pressured. At the same time, under small flow conditions, the pressure signal value detected by the release system is small, and it is difficult to set the accurate signal matching the opening pressure of the release quick closing valve. In the prior art, the condensate in the molecular seal is discharged through the hand valve of the molecular seal condensate pipeline, which can easily cause the condensate in the molecular seal to be discharged, and the silane gas in the condensate pipeline can easily contact with air and ignite. In the prior art, the valve of the release system is of a conventional form, and when the valve leaks internally or externally, the silane gas can contact with air and ignite. SUMMARY

[0004] Technical problem: The purpose of the present application is to overcome the deficiencies in the prior art, and to provide a silane high air emergency release system and method, so that the silane waste gas generated by the upstream device overpressure or production process can be safely and effectively treated, without over-pressurization, without tempering, complete combustion, strong flow applicability, economic and environmental protection.

[0005] Technical solution: To achieve the above-mentioned purpose, a silane high-altitude emergency release system of the application comprises a steel structure tower, a release vertical pipe arranged in the steel structure tower, a molecular seal arranged at the top of the release vertical pipe, a molecular seal condensate discharge pipeline arranged at the bottom of the molecular seal, a connecting pipe extending out of the top of the steel structure tower from the upper end of the molecular seal, and a release burner flange connected with the connecting pipe; a horizontal silane release gas pipeline communicated with the release vertical pipe is arranged in the middle of the steel structure tower; a pressure transmitter and a release quick closing valve are sequentially arranged on the horizontal silane release gas pipeline; a fresh water pipeline communicated with the lower part of the molecular seal condensate discharge pipeline is arranged at the lower part of the steel structure tower; a nitrogen blowing pipeline for continuously injecting nitrogen into the horizontal silane release gas pipeline and the release vertical pipe is arranged at the upper part of the steel structure tower; a branch pipe communicated with the horizontal silane release gas pipeline is arranged on the nitrogen blowing pipeline; a check valve is arranged on the branch pipe; the release gas entering the horizontal silane release gas pipeline passes through the pressure transmitter and the release quick closing valve to enter the release vertical pipe, and then enters the release burner to burn and discharge without pollution; the condensate in the molecular seal flows into the sewage collection through the molecular seal condensate discharge pipeline.

[0006] The bypass pipe communicated with the outlet pipe is arranged on the release gas dynamic quick closing valve inlet pipeline, and the bursting disc or bursting needle valve and the DN50 small caliber valve are connected in parallel on the bypass pipeline.

[0007] The lower part of the release vertical pipe is provided with an inclined baffle capable of periodically discharging condensed liquid, and a valve controlled condensate discharge pipeline is arranged at the inclined baffle.

[0008] The bottom plate of the molecular seal is arranged obliquely to prevent air from entering the release vertical pipe and the upstream system through the burner outlet, and a condensate discharge port is arranged at the inclined angle of the bottom plate to discharge the accumulated liquid at any time.

[0009] The bottom of the molecular seal condensate discharge pipeline is a U-shaped water seal structure, and the U-shaped bottom of the U-shaped water seal structure is provided with a blowdown pipe.

[0010] The release burner is sequentially provided with a porous wind shield and a fire stabilizing ring.

[0011] The nitrogen blowing pipeline is respectively provided with control valves for controlling the release vertical pipe and the branch pipe communicated with the horizontal silane release gas pipeline.

[0012] The silane high-altitude emergency release method of the above-mentioned silane high-altitude emergency release system comprises the following steps:

[0013] S1, a pressure transmitter and a release quick closing valve are arranged on the horizontal silane release gas pipeline, a bypass pipe communicated with the outlet pipe is arranged on the release quick closing valve inlet pipeline, and the bursting disc or bursting needle valve and the DN50 small caliber valve are connected in parallel on the bypass pipeline;

[0014] S2, set an inclined baffle at the bottom of the dispersion stand pipe, and set a condensate pipeline at the lowest part of the inclined baffle; set a molecular seal with an inclined bottom plate at the upper part of the dispersion stand pipe, and set a condensate outlet at the inclined angle of the bottom plate of the molecular seal; set a molecular seal condensate pipeline at the condensate outlet, the bottom of the molecular seal condensate pipeline is a U-shaped water seal structure, and a fresh water pipeline is configured to continuously supply water, and a blowdown pipe is set at the low point of the U-shaped water seal structure;

[0015] S3, set a wind shield and a flame stabilizing ring on the dispersion burner above the molecular seal to improve the flame rigidity of the dispersion gas and ensure the continuity and stability of the flame; fix the dispersion stand pipe, the molecular seal and the dispersion burner on the steel structure tower;

[0016] S4, open the nitrogen purge pipeline, and the nitrogen gas enters in two ways, one way purges the root of the molecular seal, and the other way purges before the dispersion quick closing valve; the continuous nitrogen purge in the molecular seal, the dispersion quick closing valve and its bypass ensures the safety of the entire dispersion system;

[0017] S5, at the same time, the silane dispersion gas enters through the horizontal silane dispersion gas pipeline, and the silane dispersion gas or upstream purge nitrogen is sent to the dispersion stand pipe through a small-bore valve; when the pressure transmitter detects that the pressure of the silane dispersion gas reaches the set value of the system, the dispersion quick closing valve opens quickly, and the silane dispersion gas is directly sent to the dispersion stand pipe; the silane dispersion gas enters the burner inlet through the molecular seal at the upper part of the dispersion stand pipe, and is self-ignited from the burner outlet, and is pollution-free after combustion; the accumulated liquid in the molecular seal is discharged in real time through the condensate outlet at the lowest part of the inclined bottom plate of the molecular seal to prevent the system from being blocked;

[0018] S6, configure a fresh water pipeline to continuously supply water to the U-shaped water seal structure, so that the U-shaped pipe forms a water seal that effectively isolates the internal space of the molecular seal condensate pipeline from the air height of the downstream pipeline, and ensures that the silane dispersion gas does not overflow from the condensate pipeline while the accumulated liquid in the molecular seal is continuously discharged;

[0019] S7, improve the flame rigidity of the dispersion gas through the multi-hole wind shield at the upper part of the dispersion burner, and ensure the continuity and stability of the flame through the flame stabilizing ring at the outlet.

[0020] When the quick closing valve fails to open, the dispersion gas is sent to the dispersion stand pipe through the bypass rupture disc or the burst needle valve to realize multi-stage dispersion while ensuring that the system does not block pressure.

[0021] Beneficial effects: The silane high-altitude emergency release system of the present application adopts a pressure transmitter, a release quick closing valve, a rupture disc or burst needle valve and a small-bore valve in the bypass of the quick closing valve, wherein the release quick closing valve and the small-bore valve are in the form of corrugated pipe valves or diaphragm valves for preventing internal and external leakage; the small-bore valve is supplied with a small-flow silane release gas and an upstream purge gas, and the release quick closing valve will be quickly opened when the pressure transmitter detects a certain pressure in the large-flow release. If the release quick closing valve fails, the release gas can break through the rupture disc or burst needle valve to the release vertical pipe, ensuring that the silane release gas is timely and safely and reliably released in multiple stages. The continuous small-flow water supply can form a certain height of water seal in the lower U-shaped pipe of the molecular seal and condenser pipeline, effectively isolating the internal space of the molecular seal and condenser pipeline from the air in the downstream pipeline, while continuously discharging the molecular seal liquid, and preventing the silane gas from overflowing from the condenser pipeline during release. A blowdown pipe is arranged at the bottom of the U-shaped pipe to ensure that the pipeline is not blocked. A wind shield and a stable flame ring are arranged, the porous wind shield at the upper part of the release burner can interfere with the flow field on the leeward side of the burner, change the trajectory of air flow, destroy the vortex structure of the air flow, effectively improve the negative pressure area formed by the release burner on the leeward side in the crosswind, and improve the flame rigidity of the release gas. The stable flame ring at the outlet of the release burner ensures the continuity and stability of the flame. The nitrogen purge pipeline is purged at the molecular seal root and before the release quick closing valve, and the purge points maintain a sufficient safety flow rate of nitrogen, and the continuous nitrogen purge of the molecular seal, the release quick closing valve and its bypass ensures the safety of the entire release system.

[0022] 1) The silane high-altitude emergency release system of the present application can realize multi-stage release, and can well meet the small-flow normal working condition and the large-flow accident working condition. The small-flow release or the upstream purge gas is sent to the release vertical pipe through the small-bore valve, and the release quick closing valve is quickly opened to send to the release vertical pipe when the pressure transmitter detects a certain pressure in the large-flow release.

[0023] 2) The silane high-altitude emergency release system of the present application does not store pressure, does not temper, is safe and reliable, and has a simple process.

[0024] 3) The silane high-altitude emergency release system of the present application has stable and strong flame, and high equipment life.

[0025] 4) The silane high-altitude emergency release system of the present application uses valves in the form of corrugated pipe valves or diaphragm valves in the silane exhaust pipeline, and the valves have no internal and external leakage, and are safe. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is a structural schematic diagram of a silane high-altitude emergency release system of the present application.

[0027] In the figure: horizontal silane diffusion gas pipeline 1, diffusion stand pipe 2, molecular seal 3, molecular seal condensate discharge pipeline 4, diffusion burner 5, steel structure tower 6, nitrogen purge pipeline 7, pressure transmitter 1-1, diffusion quick closing valve 1-2, bursting disc or bursting needle valve 1-3, small-bore valve 1-4, inclined baffle 2-1, condensate discharge pipeline 2-2, bottom plate 3-1, U-shaped water seal structure 4-1, fresh water pipeline 4-2, blowdown pipe 4-3, wind shield 5-1, fire stabilizing ring 5-2. DETAILED DESCRIPTION

[0028] One embodiment of the present application will be further described below in conjunction with the embodiments in the accompanying drawings:

[0029] As Figure 1The silane high-altitude emergency release system of the present application mainly comprises a horizontal silane release gas pipeline 1, a release vertical pipe 2, a molecular seal 3, a molecular seal condensate discharge pipeline 4, a release burner 5, a steel structure tower 6 and a nitrogen purge pipeline 7. The steel structure tower 6 is internally provided with the release vertical pipe 2, the top of the release vertical pipe 2 is provided with the molecular seal 3, the lower part of the release vertical pipe 2 is provided with an inclined baffle 2-1 capable of periodically discharging condensate, and the inclined baffle 2-1 is provided with a valve-controlled condensate discharge pipeline 2-2. The bottom of the molecular seal 3 is provided with the molecular seal condensate discharge pipeline 4, the bottom of the molecular seal condensate discharge pipeline 4 is a U-shaped water seal structure 4-1, the U-shaped bottom of the U-shaped water seal structure 4-1 is provided with a blowdown pipe 4-3. The bottom plate 3-1 of the molecular seal 3 is obliquely arranged to prevent air from penetrating into the release vertical pipe and the upstream system from the outlet of the burner, and the inclined angle of the bottom plate 3-1 is provided with a condensate discharge port capable of discharging condensate at any time. The upper end of the molecular seal 3 extends out of the top of the steel structure tower 6 through a connecting pipe and is connected with the flange of the release burner 5, and the release burner 5 is sequentially provided with a porous wind shield 5-1 and a fire stabilizing ring 5-2. The middle part of the steel structure tower 6 is provided with the horizontal silane release gas pipeline 1 communicated with the release vertical pipe 2, the horizontal silane release gas pipeline 1 is sequentially provided with a pressure transmitter 1-1 and a release quick closing valve 1-2, the inlet pipeline of the release quick closing valve 1-2 is provided with a bypass pipe communicated with the outlet pipeline, and the bypass pipeline is connected in parallel with a bursting disc or a bursting needle valve 1-3 and a DN50 small-bore valve 1-4. The lower part of the steel structure tower 6 is provided with a fresh water pipeline 4-2 communicated with the lower part of the molecular seal condensate discharge pipeline 4, and the upper part of the steel structure tower 6 is provided with a nitrogen purge pipeline 7 communicated with the release vertical pipe 2 and capable of continuously injecting nitrogen into the horizontal silane release gas pipeline 1 and the molecular seal 3, and the purging point of the nitrogen purge pipeline 7 is the root of the molecular seal 3 and the front of the release quick closing valve 1-2. The nitrogen purge pipeline 7 is provided with a branch pipe communicated with the horizontal silane release gas pipeline 1, the branch pipe is provided with a check valve 7-1, and the nitrogen purge pipeline 7 is respectively provided with control valves controlling the release vertical pipe 2 and a branch pipe 8 communicated with the horizontal silane release gas pipeline 1. The release gas entering the horizontal silane release gas pipeline 1 enters the release vertical pipe 2 through the pressure transmitter 1-1 and the release quick closing valve 1-2, enters the release burner 5 through the molecular seal 3, is combusted in the release burner 5 and is discharged without pollution, and the condensate in the molecular seal 3 flows into a sewage collection place through the molecular seal condensate discharge pipeline 4.

[0030] The silane high-altitude emergency release method of the present application comprises the following specific steps:

[0031] S1, a pressure transmitter 1-1 and a release quick closing valve 1-2 are arranged on the horizontal silane release gas pipeline 1, a bypass pipe communicated with the outlet pipeline is arranged on the inlet pipeline of the release quick closing valve 1-2, and a bursting disc or a bursting needle valve 1-3 and a DN50 small-bore valve 1-4 are connected in parallel on the bypass pipeline;

[0032] S2, set an inclined baffle 2-1 at the bottom of the dispersion stand pipe 2, and set a condensate line 2-2 at the lowest part of the inclined baffle 2-1; set a molecular seal 3 with an inclined bottom plate at the upper part of the dispersion stand pipe 2, and set a condensate outlet at the inclined angle of the bottom plate of the molecular seal 3; set a molecular seal condensate line 4 at the condensate outlet, the bottom of the molecular seal condensate line 4 is a U-shaped water seal structure, and a fresh water line 4-2 is arranged to continuously supply water, and a blowdown pipe 4-3 is arranged at the low point of the U-shaped water seal structure;

[0033] S3, set a wind shield 5-1 and a flame stabilizing ring 5-2 on the dispersion burner 5 above the molecular seal 3 to improve the flame rigidity of the dispersion gas, ensure the continuity and stability of the flame; fix the dispersion stand pipe 2, the molecular seal 3 and the dispersion burner 5 to the steel structure tower 6,

[0034] S4, open the nitrogen purge line 7, and the purging points are the root of the molecular seal 3 and before the dispersion quick closing valve 1-2, that is, the nitrogen gas enters in two ways, one way purges the root of the molecular seal 3, and the other way purges before the dispersion quick closing valve 1-2; the continuous nitrogen purge in the molecular seal 3, before the dispersion quick closing valve 1-2 and its bypass ensures the safety of the whole dispersion system; when the quick closing valve 1-2 fails to open, the dispersion gas is sent to the dispersion stand pipe 2 through the bypass bursting disc or bursting needle valve 1-3, realizing multi-stage dispersion while ensuring that the system does not overpressure;

[0035] S5, at the same time, the silane dispersion gas generated by the overpressure of the upstream device or the production process enters through the horizontal silane dispersion gas line 1, the small-flow silane dispersion gas or the upstream purge nitrogen is sent to the dispersion stand pipe 2 through the small-diameter valve 1-4, and when the pressure transmitter 1-1 detects that the pressure of the silane dispersion gas reaches the system set value (matches the back pressure of the dispersion system), the dispersion quick closing valve 1-2 quickly opens, and the silane dispersion gas is directly sent to the dispersion stand pipe 2, the silane dispersion gas enters the burner 5 from the inlet of the burner 5 through the molecular seal 3 at the upper part of the dispersion stand pipe 2, and is self-ignited from the outlet of the burner 5, and is pollution-free after combustion; the molecular seal 3 can prevent air from entering the dispersion stand pipe 2 and the upstream system through the outlet of the burner 5, the lowest part of the inclined bottom plate 3-1 of the molecular seal is provided with a condensate outlet, and the accumulated liquid in the molecular seal 3 is discharged in real time through the condensate outlet, so that the accumulated liquid in the molecular seal 3 can be discharged at any time, and the overpressure of the system is effectively prevented;

[0036] S6, the U-shaped water seal structure 4-1 at the bottom of the molecular seal condensate line (4) is configured to continuously supply fresh water, so that the U-shaped pipe forms a water seal that effectively isolates the internal space of the molecular seal condensate line from the air height in the downstream pipeline, effectively isolates the internal space of the molecular seal condensate line from the air in the downstream pipeline, and ensures that the silane dispersion gas does not overflow from the condensate line while the accumulated liquid in the molecular seal is continuously discharged when the system is running;

[0037] S7, the flame rigidity of the diffusion gas is improved by the porous wind shield 5-1 on the upper part of the diffusion burner, and the stable flame ring 5-2 at the outlet ensures the continuity and stability of the flame.

[0038] Working principle: The silane diffusion gas generated by the overpressure of the upstream device or the production process, the small flow diffusion or the upstream purge gas is sent to the diffusion vertical pipe through the small diameter valve. When the large flow diffusion occurs, the pressure transmitter detects a certain pressure, and then the diffusion quick closing valve is quickly opened to send to the diffusion vertical pipe. When the quick closing valve fails, the bypass rupture disc or the burst needle valve sends to the diffusion vertical pipe to realize multi-stage diffusion. The diffusion gas is diffused to the burner through the molecular seal on the upper part of the diffusion vertical pipe, and the silane waste gas is self-ignited after being discharged from the burner. After combustion, there is no pollution emission. The molecular seal can prevent air from entering the diffusion vertical pipe and the upstream system from the outlet of the burner. The lowest part of the inclined bottom plate of the molecular seal is provided with a condensate discharge port to ensure that the accumulated liquid in the molecular seal can be discharged at any time, effectively preventing the system from being over-pressurized. The bottom of the molecular seal condensate pipeline is a U-shaped water seal structure with fresh water continuously supplied. The U-shaped pipe forms a certain height of water seal, effectively isolates the internal space of the molecular seal condensate pipeline from the air in the downstream pipeline, ensures that the silane waste gas does not overflow from the condensate pipeline while the molecular seal liquid is continuously discharged, and improves the flame rigidity of the diffusion gas by the porous wind shield on the upper part of the diffusion burner. The stable flame ring at the outlet ensures the continuity and stability of the flame. The nitrogen purge in the molecular seal, the diffusion quick closing valve and its bypass ensures the safety of the entire diffusion system.

Claims

1. A high altitude emergency release system for silane, characterized in that: It includes steel structure tower (6), the dispersion riser (2) is established in steel structure tower (6), the top of the dispersion riser (2) is equipped with molecular seal (3), the bottom of the molecular seal (3) is equipped with molecular seal condensate line (4), the upper end of molecular seal (3) extends out of the top of steel structure tower (6) through connecting pipe, and is connected with the flange of dispersion burner (5), the middle part of the steel structure tower (6) is equipped with horizontal silane dispersion gas pipeline (1) communicated with the dispersion riser (2), the horizontal silane dispersion gas pipeline (1) is sequentially equipped with pressure transmitter (1-1) and dispersion quick closing valve (1-2);The lower part of the steel structure tower (6) is equipped with fresh water pipeline (4-2) communicated with the lower part of the molecular seal condensate line (4), and the upper part of the steel structure tower (6) is equipped with nitrogen purging pipeline (7) for continuously injecting nitrogen into the horizontal silane dispersion gas pipeline (1) and the molecular seal (3) communicated with the dispersion riser (2), the nitrogen purging pipeline (7) is equipped with branch pipe communicated with the horizontal silane dispersion gas pipeline (1), and the branch pipe is equipped with check valve (7-1), the dispersion gas entering the horizontal silane dispersion gas pipeline (1) enters the dispersion riser (2) through the pressure transmitter (1-1) and the dispersion quick closing valve (1-2), and is combusted in the dispersion burner (5) through the molecular seal (3) to achieve pollution-free emission, and the condensate in the molecular seal (3) flows into the sewage collection through the molecular seal condensate line (4); The dispersion quick closing valve (1-2) is provided with a bypass pipe connected to the outlet pipe on the inlet pipe, and the bypass pipe is connected in parallel with a bursting disc or bursting needle valve (1-3) and a DN50 small diameter valve (1-4); The dispersion riser (2) is provided with an inclined baffle (2-1) at the lower part for periodically discharging condensed liquid, and a valve-controlled condensate discharge pipeline (2-2) is arranged at the inclined baffle (2-1); The bottom plate (3-1) of the molecular seal (3) is arranged obliquely to prevent air from entering the dispersion riser and the upstream system through the burner outlet, and a condensate discharge port is arranged at the inclined angle of the bottom plate (3-1) to discharge accumulated liquid at any time; The bottom of the molecular seal condensate line (4) is a U-shaped water seal structure (4-1), and the U-shaped bottom of the U-shaped water seal structure (4-1) is provided with a blowdown pipe (4-3).

2. A high altitude silane emergency release system as defined in claim 1, wherein: The dispersion burner (5) is sequentially provided with a porous wind shield (5-1) and a fire stabilizing ring (5-2).

3. A high altitude silane emergency release system as defined in claim 1, wherein: The nitrogen purging pipeline (7) is respectively provided with control valves for controlling the entry into the dispersion riser (2) and the branch pipe (8) communicated with the horizontal silane dispersion gas pipeline (1).

4. The method of claim 1-3, wherein the method is characterized by The method comprises the following steps: S1, a pressure transmitter (1-1) and a dispersion quick closing valve (1-2) are arranged on the horizontal silane dispersion gas pipeline (1), a bypass pipe connected to the outlet pipe is arranged on the inlet pipe of the dispersion quick closing valve (1-2), and a bursting disc or bursting needle valve (1-3) and a DN50 small diameter valve (1-4) are connected in parallel on the bypass pipe; S2, set an inclined baffle (2-1) at the bottom of the dispersion stand pipe (2), and set a condensate pipeline (2-2) at the lowest part of the inclined baffle (2-1); set a molecular seal (3) with an inclined bottom plate at the upper part of the dispersion stand pipe (2), and set a condensate outlet at the inclined angle of the bottom plate of the molecular seal (3); set a molecular seal condensate pipeline (4) at the condensate outlet, the bottom of the molecular seal condensate pipeline (4) is a U-shaped water seal structure, and a fresh water pipeline (4-2) is arranged to continuously supply water, and a blowdown pipe (4-3) is arranged at the low point of the U-shaped water seal structure; S3, set a wind shield (5-1) and a flame stabilizing ring (5-2) on the dispersion burner (5) above the molecular seal (3) to improve the flame rigidity of the dispersion gas and ensure the continuity and stability of the flame; the dispersion stand pipe (2), the molecular seal (3), and the dispersion burner (5) are fixed on the steel structure tower (6); S4, open the nitrogen purge pipeline (7), and the nitrogen gas enters in two ways, one way purges the root of the molecular seal (3), and the other way purges before the dispersion quick closing valve (1-2); the continuous nitrogen purge in the molecular seal (3), the dispersion quick closing valve (1-2) and its bypass ensures the safety of the entire dispersion system; S5, at the same time, the silane dispersion gas enters through the horizontal silane dispersion gas pipeline (1), and the silane dispersion gas or upstream purge nitrogen is sent to the dispersion stand pipe (2) through the small-bore valve (1-4); when the pressure transmitter (1-1) detects that the silane dispersion gas pressure reaches the system set value, the dispersion quick closing valve (1-2) opens quickly, and the silane dispersion gas is directly sent to the dispersion stand pipe (2), and the silane dispersion gas enters the burner (5) from the inlet of the burner (5) through the molecular seal (3) at the upper part of the dispersion stand pipe (2), and is self-ignited from the outlet of the burner (5), and is pollution-free after combustion; the accumulated liquid in the molecular seal (3) is discharged in real time through the condensate outlet at the lowest part of the inclined bottom plate (3-1) of the molecular seal, so as to prevent the system from being blocked; S6, configure fresh water to continuously supplement the U-shaped water seal structure (4-1), so that the U-shaped pipe forms a water seal that effectively isolates the internal space of the molecular seal condensate pipeline from the air height of the downstream pipeline, and ensures that the silane dispersion gas does not overflow from the condensate pipeline while the accumulated liquid in the molecular seal is continuously discharged; S7, improve the flame rigidity of the dispersion gas through the multi-hole wind shield (5-1) at the upper part of the dispersion burner, and ensure the continuity and stability of the flame through the flame stabilizing ring (5-2) at the outlet.

5. The method of claim 4, wherein: When the quick closing valve (1-2) fails to open, the dispersion gas is sent to the dispersion stand pipe (2) through the bypass rupture disc or bursting needle valve (1-3), so as to realize multi-stage dispersion and ensure that the system is not blocked.

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