A gemstone substrate wafer non-contact thickness detection system

Abstract

The present application relates to the technical field of thickness detection, and more particularly to a gem substrate sheet non-contact thickness detection system, which comprises a feeding trolley piece, a mounting frame, a feeding mechanism, a discharging mechanism, a detection mechanism and a discharging trolley piece; the feeding trolley piece and the discharging trolley piece are respectively installed at two ends of the mounting frame, the feeding mechanism is fixedly installed at one end of the mounting frame to guide the ceramic disc into the feeding mechanism; the discharging mechanism is fixedly installed at the other end of the mounting frame to guide the ceramic disc out; and the detection mechanism is fixedly installed at the middle part of the mounting frame. The present application realizes five-point measurement, can meet the process measurement accuracy of inch wafers, and fills the industry gap.

Description

Technical Field

[0001] This invention relates to the field of thickness detection technology, and in particular to a non-contact thickness detection system for gemstone substrates. Background Technology

[0002] Currently, the internationally accepted sizes for sapphire substrates are 2, 3, 4, and 6 inches. However, due to the fact that using larger sapphire substrates can reduce LED chip costs, increase chip yield, and improve single-unit chip output, the market demand for larger sapphire substrates is increasing, and the quality requirements are becoming more stringent. As a result, 8-inch sapphire substrates will have an increasingly larger market share in the entire sapphire substrate market.

[0003] In the production of 8-inch sapphire substrate wafers, the wafers must undergo single-sided grinding to remove a large amount of surface material while ensuring good flatness and low roughness on the substrate surface. After single-sided grinding, the thickness of the wafer needs to be measured to ensure that the wafer thickness variation meets the standard limit requirements, in preparation for the subsequent polishing process.

[0004] Traditional wafer thickness measurement typically employs manual micrometers or laser equipment. The limitations and shortcomings of existing technologies are as follows:

[0005] 1. Manual measurement with a dial indicator has problems such as low measurement efficiency, poor accuracy, and significant wear on the ceramic disc.

[0006] 2. Current laser measurement equipment can only measure the thickness of small-sized sapphire substrates, which cannot meet the measurement process requirements of 8-inch sapphire substrates;

[0007] Therefore, in order to address the technical shortcomings of measuring product thickness on the substrate during current substrate processing and to meet the development needs of 8-inch sapphire substrate manufacturing processes, there is an urgent need to improve substrate thickness measurement technology so as to better ensure efficient wafer production and promote the development of the wafer industry. Summary of the Invention

[0008] The purpose of this invention is to address the shortcomings of existing technologies that cannot meet the measurement process requirements of 8-inch sapphire substrates, and to propose a non-contact thickness detection system for sapphire substrates.

[0009] To achieve the above objectives, the present invention adopts the following technical solution:

[0010] Design a non-contact thickness detection system for gemstone substrates, comprising a loading trolley, a mounting frame, a loading mechanism, an unloading mechanism, a detection mechanism, and an unloading trolley; the loading trolley and the unloading trolley are respectively installed at both ends of the mounting frame; the loading mechanism is fixedly installed at one end of the mounting frame to guide the ceramic disc into the loading mechanism; the unloading mechanism is fixedly installed at the other end of the mounting frame to unload the ceramic disc; and the detection mechanism is fixedly installed in the middle of the mounting frame.

[0011] Preferably, the loading trolley includes a support frame, several casters, several support seats, a sliding seat, a movable plate, a placement rack, and a push rod; several casters are rotatably mounted on the bottom of the support frame, several support seats are fixedly mounted on the bottom of the support frame, the sliding seat is slidably mounted on the support frame, the placement rack is fixedly mounted on the top of the movable plate and is used to place the ceramic disc, and the push rod is fixedly mounted on the outside of the support frame.

[0012] Preferably, the feeding mechanism includes a guide frame, a first lead screw, a first slider, two guide rods, and a first motor; the guide frame is fixedly installed on the top of the mounting frame, the first lead screw is rotatably installed on the inner side of the guide frame, both guide rods are fixedly installed on the inner side of the guide frame and are arranged parallel to the first lead screw, the first slider is threadedly installed on the first lead screw, and the two ends of the first slider are slidably connected to the two guide rods respectively, and the first motor is fixedly installed on the top of the mounting frame, and its output shaft is fixedly connected to the first lead screw.

[0013] Preferably, the feeding mechanism includes a mounting plate, a first conveyor belt, and a material picking component; the mounting plate is fixedly mounted on one end of the first slider, the first conveyor belt is fixedly mounted on the mounting plate, and the material picking component is mounted in the middle of the mounting plate.

[0014] Preferably, the material handling assembly includes a first mounting base, a first slide rail, a second slider, a second lead screw, a support plate, a second motor, a first gear, and a second gear; the first mounting base is fixedly mounted on the top of the mounting plate, the first slide rail is fixedly mounted on the inner side of the first mounting base, the second lead screw is rotatably mounted on the inner side of the first mounting base and is parallel to the first slide rail, the bottom end of the second slider is slidably connected to the first slide rail, the top end of the second slider is threadedly connected to the second lead screw, the support plate is fixedly mounted on the top of the second slider, the second motor is fixedly mounted on the inner side of the first mounting base, the first gear is fixedly mounted on the output shaft of the second motor, and the second gear is fixedly mounted on the end of the second lead screw and meshes with the first gear.

[0015] Preferably, the loading trolley and the unloading trolley have the same shape and structure, and the loading mechanism and the unloading mechanism have the same shape and structure.

[0016] Preferably, the testing mechanism includes a testing platform, a plurality of first cylinders, a second mounting base, a second conveyor belt, a mounting rod, and a testing head assembly; the testing platform is fixedly mounted on the top of the mounting frame, the plurality of first cylinders are fixedly mounted on the top of the testing platform, the output ends of the plurality of first cylinders are all fixedly connected to the second mounting base, the second conveyor belt is fixedly mounted on the second mounting base, the mounting rod is fixedly mounted on one end of the testing platform, and the testing head assembly is fixedly mounted on the top of the mounting rod.

[0017] Preferably, a rotating assembly is installed on the top of the testing platform. The rotating assembly includes a second slide rail, a movable seat, a second cylinder, and a rotating table. The second slide rail is fixedly installed on the top of the testing platform, the movable seat is slidably installed on the second slide rail, the second cylinder is fixedly installed on the mounting rod and its output end is fixedly connected to the movable seat, and the rotating table is rotatably installed on the top of the movable seat.

[0018] Preferably, the rotating assembly further includes a first bevel gear, a second bevel gear, and a third motor; the first bevel gear is coaxially and fixedly connected to the rotary table, the third motor is fixedly mounted on the outside of the mounting rod and its output shaft is fixedly connected to the second bevel gear, and the second bevel gear meshes with the first bevel gear.

[0019] The present invention proposes a non-contact thickness detection system for gemstone substrate wafers. Its advantages lie in the following: a rotary table drives the measured ceramic disk to rotate, while a second cylinder controls the movable seat to move the rotary table linearly along a second slide rail. This allows for sequential detection of the outer and inner wafer rings. The detection head assembly transmits the detected wafer thickness data to the controller's display via a signal converter, and the wafer thickness is then accurately calculated. The entire process is simple to operate, achieving five-point measurement, meeting the process measurement accuracy requirements for inch-sized wafers, and filling a gap in the industry. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of a non-contact thickness detection system for a gemstone substrate proposed in this invention;

[0021] Figure 2 This is a schematic diagram of the loading trolley component of a non-contact thickness detection system for gemstone substrates proposed in this invention.

[0022] Figure 3 This is a schematic diagram of the feeding mechanism of a non-contact thickness detection system for gemstone substrates proposed in this invention.

[0023] Figure 4 This is a schematic diagram of the material handling component of a non-contact thickness detection system for gemstone substrates proposed in this invention.

[0024] Figure 5This is a schematic diagram of the detection mechanism of a non-contact thickness detection system for gemstone substrates proposed in this invention.

[0025] Figure 6 This is a schematic diagram of the structure of a rotating component of a non-contact thickness detection system for a gemstone substrate proposed in this invention;

[0026] In the diagram: 1. Loading trolley; 11. Support frame; 12. Casters; 13. Support base; 14. Sliding seat; 15. Movable plate; 16. Placement rack; 17. Ceramic disc; 18. Push rod; 19. Third cylinder; 2. Mounting frame; 3. Loading mechanism; 31. Guide frame; 32. First lead screw; 33. First slider; 34. Guide rod; 35. First motor; 36. Mounting plate; 37. First conveyor belt; 38. Material handling assembly; 381. First mounting base; 382. First slide rail; 383. Second slider; 384. Second lead screw. Pallet 385, second motor 386, first gear 387, second gear 388, unloading mechanism 4, detection mechanism 5, detection table 51, first cylinder 52, second mounting base 53, second conveyor belt 54, mounting rod 55, detection head assembly 56, rotating component 57, second slide rail 571, movable seat 572, second cylinder 573, rotary table 574, first bevel gear 575, second bevel gear 576, third motor 577, telescopic shaft 578, unloading table carriage 6. Detailed Implementation

[0027] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0028] Example 1:

[0029] Reference Figure 1 A non-contact thickness detection system for gemstone substrates includes a loading trolley 1, a mounting frame 2, a loading mechanism 3, an unloading mechanism 4, a detection mechanism 5, and an unloading trolley 6. The loading trolley 1 and the unloading trolley 6 are respectively installed at both ends of the mounting frame 2. The loading mechanism 3 is fixedly installed at one end of the mounting frame 2 to guide a ceramic disc 17 into the loading mechanism 3. The unloading mechanism 4 is fixedly installed at the other end of the mounting frame 2 to unload the ceramic disc 17. The detection mechanism 5 is fixedly installed in the middle of the mounting frame 2.

[0030] The loading trolley 1 includes a support frame 11, several casters 12, several support seats 13, a sliding seat 14, a movable plate 15, a placement rack 16, a push rod 18, and a third cylinder 19. The casters 12 are rotatably mounted on the bottom of the support frame 11, the support seats 13 are fixedly mounted on the bottom of the support frame 11, the sliding seat 14 is slidably mounted on the support frame 11, the placement rack 16 is fixedly mounted on the top of the movable plate 15 and places the ceramic disc 17, the push rod 18 is fixedly mounted on the outside of the support frame 11, and the third cylinder 19 is fixedly mounted on the bottom of the support frame 11 and its output end is fixedly connected to the movable plate 15. The ceramic disc 17 is placed by the placement rack 16, and then the third cylinder 19 is controlled to move the movable plate 15 up or down, which allows the placement rack 16 to move up or down, thereby adjusting the height of the placement rack 16.

[0031] Working principle: First, by pushing the push rod 18, the entire support frame 11 is moved to the position of the mounting frame 2, and all the ceramic discs 17 are placed inside the placement frame 16. By controlling the third cylinder 19, the movable plate 15 can be moved up or down, which allows the placement frame 16 to be moved up or down, thereby adjusting the height of the placement frame 16. Then, the ceramic discs 17 are introduced into the detection mechanism 5 for detection by the feeding mechanism 3, and then the ceramic discs 17 are introduced into the unloading trolley 6 for outward export by the unloading mechanism 4.

[0032] Example 2:

[0033] Reference Figure 1-4 As another preferred embodiment of the present invention, the difference from embodiment 1 is that the feeding mechanism 3 includes a guide frame 31, a first lead screw 32, a first slider 33, two guide rods 34, a first motor 35, a mounting plate 36, a first conveyor belt 37, and a material picking assembly 38; the guide frame 31 is fixedly installed on the top of the mounting frame 2, the first lead screw 32 is rotatably installed on the inner side of the guide frame 31, the two guide rods 34 are both fixedly installed on the inner side of the guide frame 31 and are arranged parallel to the first lead screw 32, the first slider 33 is threadedly installed on the first lead screw 32, and the two ends of the first slider 33 are slidably connected to the two guide rods 34 respectively, the first motor 35 is fixedly installed on the top of the mounting frame 2, and the output shaft is fixedly connected to the first lead screw 32; the mounting plate 36 is fixedly installed on one end of the first slider 33, the first conveyor belt 37 is fixedly installed on the mounting plate 36, and the material picking assembly 38 is installed in the middle of the mounting plate 36. The material handling component 38 can guide the ceramic disc 17 onto the first conveyor belt 37, and then the first motor 35 causes the first lead screw 32 to rotate, thereby causing the first slider 33 to move up and down along the guide rod 34. This allows the first conveyor belt 37 to move up and down, thus facilitating the guidance of the ceramic disc 17 onto the detection mechanism 5 for detection.

[0034] The material handling assembly 38 includes a first mounting base 381, a first slide rail 382, ​​a second slider 383, a second lead screw 384, a support plate 385, a second motor 386, a first gear 387, and a second gear 388. The first mounting base 381 is fixedly mounted on the top of the mounting plate 36, the first slide rail 382 is fixedly mounted on the inner side of the first mounting base 381, the second lead screw 384 is rotatably mounted on the inner side of the first mounting base 381 and is parallel to the first slide rail 382, ​​and the bottom end of the second slider 383 is parallel to the first slide rail 382. The sliding connection is used, with the top of the second slider 383 threadedly connected to the second lead screw 384. The support plate 385 is fixedly installed on the top of the second slider 383. The second motor 386 is fixedly installed on the inner side of the first mounting base 381. The first gear 387 is fixedly installed on the output shaft of the second motor 386. The second gear 388 is fixedly installed on the end of the second lead screw 384 and meshes with the first gear 387. The loading platform 1 and the unloading platform 6 have the same shape and structure, and the loading mechanism 3 and the unloading mechanism 4 have the same shape and structure.

[0035] Working principle: First, the first motor 35 causes the first lead screw 32 to rotate, thereby causing the first slider 33 to move up and down along the guide rod 34, which in turn enables the first conveyor belt 37 to move up and down, thereby moving the pallet 385 to the corresponding height.

[0036] Then, the second motor 386 causes the first gear 387 to rotate, which in turn causes the second gear 388 to drive the second lead screw 384 to rotate, thereby causing the second gear 388 to move horizontally along the first slide rail 382. This causes the pallet 385 to move to the corresponding position on the placement rack 16, allowing the pallet 385 to remove the ceramic disc 17. The ceramic disc 17 is then guided to the detection mechanism 5 for detection via the first conveyor belt 37.

[0037] After the testing mechanism 5 completes the measurement, the ceramic disc is placed on the second conveyor belt 54 by the rise of the pallet 385. The first slider 33 moves up and down to scan the unloading carriage 6 and record the height of each layer. The pallet 385 receives the ceramic disc from the second conveyor belt 54. The pallet 385 moves to the designated layer and places the ceramic disc into the unloading carriage 6.

[0038] Example 3:

[0039] Reference Figure 1-6In another preferred embodiment of the present invention, the difference from Embodiment 1 or Embodiment 2 is that the detection mechanism 5 includes a detection platform 51, a plurality of first cylinders 52, a second mounting base 53, a second conveyor belt 54, a mounting rod 55, and a detection head assembly 56. The detection platform 51 is fixedly installed on the top of the mounting frame 2, the plurality of first cylinders 52 are fixedly installed on the top of the detection platform 51, the output ends of the plurality of first cylinders 52 are all fixedly connected to the second mounting base 53, the second conveyor belt 54 is fixedly installed on the second mounting base 53, the mounting rod 55 is fixedly installed on one end of the detection platform 51, and the detection head assembly 56 is fixedly installed on the top of the mounting rod 55. A corresponding display is fixedly installed on the outside of the detection platform 51, and the detection head assembly 56 is connected to the display signal. By controlling the first cylinders 52, the second mounting base 53 can move up or down, which allows the second conveyor belt 54 to guide the ceramic disk 17 to the rotating assembly 57, and then the thickness of the ceramic disk 17 is detected by the detection head assembly 56.

[0040] A rotating assembly 57 is mounted on the top of the testing table 51. The rotating assembly 57 includes a second slide rail 571, a movable seat 572, a second cylinder 573, a rotary table 574, a first bevel gear 575, a second bevel gear 576, a third motor 577, and a telescopic shaft 578. The second slide rail 571 is fixedly mounted on the top of the testing table 51, the movable seat 572 is slidably mounted on the second slide rail 571, the second cylinder 573 is fixedly mounted on the mounting rod 55 and its output end is fixedly connected to the movable seat 572, and the rotary table 574 is rotatably mounted on the top of the movable seat 572. The first bevel gear 575 is coaxially fixedly connected to the rotary table 574, the third motor 577 is fixedly mounted on the outside of the mounting rod 55 and its output shaft is fixedly connected to the telescopic shaft 578, and the end of the telescopic shaft 578 is fixedly connected to the second bevel gear 576, which meshes with the first bevel gear 575.

[0041] During testing, the third motor 577 is activated to rotate the second bevel gear 576, which in turn causes the first bevel gear 575 to drive the rotary table 574 to rotate synchronously. This causes the rotary table 574 to rotate the ceramic disk being measured. Simultaneously, the second cylinder 573 is controlled to move the movable seat 572 along the second slide rail 571 in a straight line, allowing the outer and inner wafers to be tested sequentially. The detection head assembly 56 transmits the detected wafer thickness data to the controller's display via a signal converter, and the wafer thickness is then accurately calculated. The entire process is simple to operate, achieving five-point measurement, which meets the process measurement accuracy requirements for 8-inch wafers, filling a gap in the industry.

[0042] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A non-contact thickness detection system for gemstone substrates, characterized in that, The system includes a loading trolley (1), a mounting frame (2), a loading mechanism (3), a unloading mechanism (4), a detection mechanism (5), and an unloading trolley (6). The loading trolley (1) and the unloading trolley (6) are respectively installed at both ends of the mounting frame (2). The loading mechanism (3) is fixedly installed at one end of the mounting frame (2) to guide the ceramic disc (17) into the loading mechanism (3). The unloading mechanism (4) is fixedly installed at the other end of the mounting frame (2) to unload the ceramic disc (17). The detection mechanism (5) is fixedly installed in the middle of the mounting frame (2). The feeding mechanism (3) includes a guide frame (31), a first lead screw (32), a first slider (33), two guide rods (34), and a first motor (35); the guide frame (31) is fixedly installed on the top of the mounting frame (2), the first lead screw (32) is rotatably installed on the inner side of the guide frame (31), the two guide rods (34) are fixedly installed on the inner side of the guide frame (31) and are arranged parallel to the first lead screw (32), the first slider (33) is threaded on the first lead screw (32), the two ends of the first slider (33) are slidably connected to the two guide rods (34) respectively, and the first motor (35) is fixedly installed on the top of the mounting frame (2) and its output shaft is fixedly connected to the first lead screw (32); The feeding mechanism (3) includes a mounting plate (36), a first conveyor belt (37), and a material picking component (38); the mounting plate (36) is fixedly mounted on one end of the first slider (33), the first conveyor belt (37) is fixedly mounted on the mounting plate (36), and the material picking component (38) is mounted in the middle of the mounting plate (36); The material handling assembly (38) includes a first mounting base (381), a first slide rail (382), a second slider (383), a second lead screw (384), a support plate (385), a second motor (386), a first gear (387), and a second gear (388). The first mounting base (381) is fixedly mounted on the top of the mounting plate (36), the first slide rail (382) is fixedly mounted on the inner side of the first mounting base (381), and the second lead screw (384) is rotatably mounted on the inner side of the first mounting base (381) and parallel to the first slide rail (382). The second slider (383) is slidably connected to the first slide rail (382) at its bottom end, and threadedly connected to the second lead screw (384) at its top end. The support plate (385) is fixedly installed on the top of the second slider (383). The second motor (386) is fixedly installed on the inner side of the first mounting base (381). The first gear (387) is fixedly installed on the output shaft of the second motor (386). The second gear (388) is fixedly installed on the end of the second lead screw (384) and meshes with the first gear (387).

2. The non-contact thickness detection system for gemstone substrates according to claim 1, characterized in that, The loading trolley component (1) includes a support frame (11), several casters (12), several support seats (13), a sliding seat (14), a movable plate (15), a placement rack (16), and a push rod (18). Several casters (12) are rotatably mounted on the bottom of the support frame (11), several support seats (13) are fixedly mounted on the bottom of the support frame (11), the sliding seat (14) is slidably mounted on the support frame (11), the placement rack (16) is fixedly mounted on the top of the movable plate (15) and places the ceramic disc (17), and the push rod (18) is fixedly mounted on the outside of the support frame (11).

3. The non-contact thickness detection system for gemstone substrates according to claim 1, characterized in that, The loading trolley (1) and unloading trolley (6) have the same shape and structure, and the loading mechanism (3) and unloading mechanism (4) have the same shape and structure.

4. The non-contact thickness detection system for gemstone substrates according to claim 3, characterized in that, The testing mechanism (5) includes a testing platform (51), a plurality of first cylinders (52), a second mounting base (53), a second conveyor belt (54), a mounting rod (55), and a testing head assembly (56); the testing platform (51) is fixedly installed on the top of the mounting frame (2), the plurality of first cylinders (52) are fixedly installed on the top of the testing platform (51), the output ends of the plurality of first cylinders (52) are all fixedly connected to the second mounting base (53), the second conveyor belt (54) is fixedly installed on the second mounting base (53), the mounting rod (55) is fixedly installed on one end of the testing platform (51), and the testing head assembly (56) is fixedly installed on the top of the mounting rod (55).

5. The non-contact thickness detection system for sapphire substrates according to claim 4, characterized in that, A rotating assembly (57) is installed on the top of the testing platform (51). The rotating assembly (57) includes a second slide rail (571), a movable seat (572), a second cylinder (573), and a rotating table (574). The second slide rail (571) is fixedly installed on the top of the testing platform (51). The movable seat (572) is slidably installed on the second slide rail (571). The second cylinder (573) is fixedly installed on the mounting rod (55) and its output end is fixedly connected to the movable seat (572). The rotating table (574) is rotatably installed on the top of the movable seat (572).

6. The non-contact thickness detection system for sapphire substrates according to claim 5, characterized in that, The rotating assembly (57) further includes a first bevel gear (575), a second bevel gear (576), and a third motor (577); the first bevel gear (575) is coaxially and fixedly connected to the rotating table (574); the third motor (577) is fixedly installed on the outside of the mounting rod (55) and its output shaft is connected to the telescopic shaft (578); the end of the telescopic shaft (578) is fixedly connected to the second bevel gear (576); and the second bevel gear (576) meshes with the first bevel gear (575).

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