A winding type vacuum coating equipment

By installing pressure relief bolts, pressure plates, isolation plates and sealing plugs in the liquid injection chamber of the winding vacuum coating equipment, the supplementary method of pressurizing the target when the stock of the target pool is insufficient, the problem of the equipment stopping operation due to insufficient capacity of the target pool is solved, and the coating efficiency and effect are improved.

CN116219389BActive Publication Date: 2025-05-27SHENZHEN TIANCHENG VACUUM TECH CO LTD
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Patent Information

Application Number
CN202310078548.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-02-08
Publication Date
2025-05-27
Estimated Expiration
2043-02-08

AI Technical Summary

Technical Problem

When the maximum storage capacity of the target pool cannot meet the single coating requirements, the existing winding vacuum coating equipment needs to be stopped to inject new targets and perform secondary vacuuming, resulting in the coil being exposed to the atmosphere, affecting the coating effect and efficiency.

Method used

A winding vacuum coating equipment is designed. The liquid injection chamber is divided into an isolation chamber, a liquid injection chamber and a pressing chamber through the arrangement of pressure relief bolts, pressure plates, isolation plates and sealing plugs. By adjusting the pressure relief bolts, the pressure in the pressing chamber increases, and the pressure plate squeezes the liquid target in the injection chamber and the isolation chamber into the target pool, optimizing the target replenishment process.

Benefits of technology

It effectively avoids equipment stop operation and secondary vacuum problems caused by the small maximum storage capacity of the target pool, optimizes the working efficiency of target material supplementation, and improves the effect and efficiency of coating.

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Abstract

The present invention provides a winding type vacuum coating device, which includes a feeding chamber, a winding chamber, a coating chamber, a liquid injection chamber, a control unit and a fixing plate. The liquid injection chamber includes a liquid injection shell, a pressure relief bolt, a pressing plate, a partition plate and a sealing plug. The partition plate and the pressing plate cooperate to divide the inner cavity of the liquid injection chamber into an isolation cavity, a liquid injection cavity and a pressing cavity. The pressure relief bolt is installed on the side wall of the pressing cavity. A liquid injection hole is provided between the liquid injection cavity and the isolation cavity, and the sealing plug seals the liquid injection hole. When the stock of the target material in the target material pool is insufficient, the liquid injection cavity and the isolation cavity are filled with liquid target material. By adjusting the pressure relief bolt connected to the pressing cavity, the pressure in the pressing cavity is increased, and the pressing plate squeezes the liquid target material in the liquid injection cavity and the isolation cavity into the target material pool. When the liquid target material stored in the target material pool meets the preset requirements, the pressure relief bolt stops relieving pressure. At the same time, the second vacuum machine evacuates the pressing cavity. This effectively avoids the problem of affecting the working efficiency by injecting the target material and then evacuating the vacuum after stopping the operation of the device.
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Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating equipment, and particularly relates to a winding type vacuum coating equipment. Background Art

[0002] Vacuum coating machines mainly refer to a class of machines that need to coat films under a relatively high vacuum. For the coating of flexible products, in order to ensure the uniformity of the coating layer and avoid the occurrence of wrinkles in the products during the coating process, winding type vacuum coating is mostly used.

[0003] Currently, the size of the coil materials for winding coating is gradually expanding, so the demand for target materials to be used is also gradually increasing. When the maximum storage capacity of the target material pool of the coating equipment cannot meet the single - coating demand, the equipment can only be stopped, and after injecting new target materials, the vacuum pumping operation needs to be carried out again. Therefore, not only are the coil materials exposed to the atmosphere, but also the secondary vacuum pumping time is increased, affecting the coating effect and coating efficiency. Summary of the Invention

[0004] In order to overcome the technical problem that when the maximum storage capacity of the target material pool of the current coating equipment cannot meet the single - coating demand, the equipment can only be stopped, and after injecting new target materials, the vacuum pumping operation needs to be carried out again, thus not only exposing the coil materials to the atmosphere, the present invention provides a winding type vacuum coating equipment.

[0005] The present invention provides a winding type vacuum coating equipment, which includes a feeding chamber, a winding chamber, a coating chamber, a liquid injection chamber, a control part and a fixing plate. The feeding chamber is connected to one end of the coating chamber, the winding chamber is connected to the other end of the coating chamber, the coating chamber and the control part are respectively connected to the fixing plate. The control part is placed in front of the coating chamber and is connected to the coating chamber. The liquid injection chamber is placed at the bottom of the winding chamber, and the top and side of the liquid injection chamber are respectively connected to the winding chamber and the coating chamber. The liquid injection chamber includes a liquid injection shell, a pressure - relief bolt, a pressing plate, a partition plate and a sealing plug. The partition plate and the pressing plate cooperate to divide the inner cavity of the liquid injection chamber into an isolation cavity, a liquid injection cavity and a pressing cavity. The isolation cavity is placed on one side of the liquid injection cavity and the pressing cavity, and the pressing cavity is placed on the top of the liquid injection cavity. The pressure - relief bolt is installed on the side wall of the pressing cavity. There is a liquid injection hole between the liquid injection cavity and the isolation cavity, and the sealing plug seals the liquid injection hole.

[0006] Further, the liquid injection chamber further is provided with a first spring and a second spring. There are more than 3 first springs, and the first springs are symmetrically placed in the pressing cavity. Two ends of the first spring are respectively connected to the top of the pressing plate and the top of the pressing cavity. The second spring is placed in the isolation cavity, and two ends of the second spring are respectively connected to the sealing plug and the side wall of the isolation cavity.

[0007] Further, the sealing plug is in the shape of a flat-top cone. The size of the sealing plug on the side close to the isolation chamber is smaller than the size of the sealing plug on the side close to the liquid injection chamber. The bottom of the liquid injection chamber is concave, and the sealing plug is placed in the concave.

[0008] Further, the coating chamber is provided with 2 coating rollers, 2 target material pools and a plurality of guide rollers. The target material pools are orderly installed below the coating rollers. Both ends of the coating rollers, the target material pools and the guide rollers are respectively connected to the inner wall of the coating chamber. A pipeline chamber is also provided on the side of the coating chamber away from the control part. A liquid injection pipe is provided in the pipeline chamber, and one end of the liquid injection pipe is connected to the liquid injection chamber. The other end of the liquid injection pipe is bifurcated and respectively connected to 2 of the target material pools.

[0009] Further, a feeding roller is provided in the feeding chamber, and a feeding port is provided on the side of the feeding chamber close to the coating chamber. A winding roller is provided in the winding chamber, and a discharging port is provided on the side of the winding roller close to the coating chamber.

[0010] Further, the control part includes a control box, a slide rail and a slide block. The slide rails are symmetrically arranged at the bottom of the slide block and are installed on the fixing plate. The slide rails and the slide block slide relative to each other. The control box is installed at one end of the slide block away from the coating chamber. One end of the slide block close to the coating chamber is fixedly connected to the lower part of the side wall of the coating chamber. The upper part of the coating chamber is connected to the slide block through a pull rod. The side wall of the coating chamber close to the control part can slide relative to the coating chamber.

[0011] Further, the control part is also provided with a motor, a gear and a rack. A chute is provided at the bottom of the slide block. The rack is placed in the chute and fixedly connected to the fixing plate. The motor is fixedly connected to the slide block and is installed on the chute corresponding to the position of the chute. The output end of the motor is connected to the gear. The gear penetrates through the slide block and meshes with the rack. A dust-proof cover is provided at the position of the motor and the gear.

[0012] Further, the winding type vacuum coating equipment is also provided with a vacuum part, including a first vacuum machine and a second vacuum machine. The first vacuum machine and the second vacuum machine are placed on the side of the coating chamber away from the control part, and the first vacuum machine and the second vacuum machine are fixedly connected to the fixing plate. The first vacuum machine is respectively connected to the feeding chamber, the winding chamber and the coating chamber through pipelines. The second vacuum machine is connected to the pressing chamber through a pipeline.

[0013] Compared with the prior art, a winding type vacuum coating equipment provided by the present invention has the following advantages:

[0014] 1. A winding type vacuum coating equipment. The setting of the pressure relief bolt, pressing plate, isolation plate and sealing plug passing through the liquid injection chamber divides the liquid injection chamber into an isolation chamber, a liquid injection chamber and a pressing chamber. The liquid injection chamber is respectively connected to the target material pool through a liquid injection pipe. When the stock of the target material in the target material pool is insufficient, the liquid injection chamber and the isolation chamber are filled with liquid target material. By adjusting the pressure relief bolt connected to the pressing chamber, the pressure in the pressing chamber is increased, and the pressing plate squeezes the liquid target material in the liquid injection chamber and the isolation chamber into the target material pool. When the liquid target material stored in the target material pool meets the preset requirements, the pressure relief bolt stops relieving pressure. At the same time, the second vacuum machine evacuates the pressing chamber. The working efficiency of replenishing the target material is optimized. It effectively avoids the problem that due to the too small maximum storage capacity of the target material pool, it is necessary to stop the equipment operation, inject the target material and then evacuate, which affects the working efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is the overall structural schematic diagram of a winding type vacuum coating equipment provided by the present invention;

[0016] Figure 2 is the structural schematic diagram of the first vacuum machine and the second vacuum machine in a winding type vacuum coating equipment provided by the present invention;

[0017] Figure 3 is the structural schematic diagram of the liquid injection chamber in a winding type vacuum coating equipment provided by the present invention;

[0018] Figure 4 is the structural schematic diagram of the motor and the gear in a winding type vacuum coating equipment provided by the present invention;

[0019] Figure 5 is the structural schematic diagram of the inner cavity of the coating chamber in a winding type vacuum coating equipment provided by the present invention.

[0020] DESCRIPTION OF THE REFERENCE NUMERALS: 1. Unwinding chamber; 2. Rewinding chamber; 3. Coating chamber; 4. Liquid injection chamber; 5. Control unit; 6. Fixed plate; 7. Vacuum unit;

[0021] 11. Unwinding roller; 12. Feed inlet; 21. Rewinding roller; 22. Discharge outlet; 31. Coating roller; 32. Guide roller; 33. Target material pool; 41. Liquid injection shell; 42. Second spring; 43. First spring; 44. Pressure relief bolt; 45. Isolation plate; 46. Pressing plate; 47. Sealing plug; 51. Dust-proof cover; 52. Pull rod; 53. Control box; 54. Slide block; 55. Slide rail; 56. Rack; 57. Gear; 58. Motor; 71. First vacuum machine; 72. Second vacuum machine; 73. Pipeline;

[0022] 411. Isolation chamber; 412. Pressing chamber; 413. Liquid injection chamber. EMBODIMENTS

[0023] In order to make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0024] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there can also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for illustrative purposes.

[0025] Please refer to Figures 1 to 5 , the present invention provides a winding type vacuum coating device, which includes a feeding chamber 1, a winding chamber 2, a coating chamber 3, a liquid injection chamber 4, a control unit 5 and a fixing plate 6. The feeding chamber 1 is connected to one end of the coating chamber 3, the winding chamber 2 is connected to the other end of the coating chamber 3, the coating chamber 3 and the control unit 5 are respectively connected to the fixing plate 6. The control unit 5 is placed in front of the coating chamber 3 and is connected to the coating chamber 3. The liquid injection chamber 4 is placed at the bottom of the winding chamber 2, and the top and side of the liquid injection chamber 4 are respectively connected to the winding chamber 2 and the coating chamber 3. The liquid injection chamber 4 includes a liquid injection shell 41, a pressure relief bolt 44, a pressing plate 46, a partition plate 45 and a sealing plug 47. The partition plate 45 and the pressing plate 46 cooperate to divide the inner cavity of the liquid injection chamber 4 into an isolation cavity 411, a liquid injection cavity 413 and a pressing cavity 412. The isolation cavity 411 is placed on one side of the liquid injection cavity 413 and the pressing cavity 412, and the pressing cavity 412 is placed on the top of the liquid injection cavity 413. The pressure relief bolt 44 is installed on the side wall of the pressing cavity 412. There is a liquid injection hole between the liquid injection cavity 413 and the isolation cavity 411, and the sealing plug 47 seals the liquid injection hole.

[0026] It can be understood that the pressure relief bolt 44 is an electric pressure relief bolt 44, and the pressure relief bolt 44 is electrically connected to the control unit 5. The control unit 5 can detect the pressure in the pressing cavity 412 and can control the opening and closing of the pressure relief bolt 44 through the control unit 5.

[0027] It can be understood that the arrangement of the pressure relief bolt 44, the pressing plate 46, the isolation plate 45 and the sealing plug 47 passing through the liquid injection chamber 4 divides the liquid injection chamber 4 into an isolation chamber 411, a liquid injection chamber 413 and a pressing chamber 412. The liquid injection chamber 413 is respectively connected to the target material pool 33 through a liquid injection pipe. When the stock of the target material in the target material pool 33 is insufficient, the isolation chamber 411 and the liquid injection chamber 413 are filled with liquid target material. By adjusting the pressure relief bolt 44 connected to the pressing chamber 412, the pressure in the pressing chamber 412 is increased, and the pressing plate 46 squeezes the liquid target material in the liquid injection chamber 413 and the isolation chamber 411 into the target material pool 33. When the liquid target material stored in the target material pool 33 meets the preset requirements, the pressure relief bolt 44 stops relieving pressure. At the same time, the second vacuum machine 72 evacuates the pressing chamber 412. The working efficiency of replenishing the target material is optimized. It effectively avoids the problem that the maximum storage capacity of the target material pool 33 is too small, resulting in the need to stop the equipment operation to inject the target material and then evacuate, which affects the working efficiency.

[0028] Preferably, the liquid injection chamber 4 is further provided with a first spring 43 and a second spring 42. There are more than 3 first springs 43, and the first springs 43 are symmetrically arranged in the pressing chamber 412. Two ends of the first spring 43 are respectively connected to the top of the pressing plate 46 and the top of the pressing chamber 412. The second spring 42 is arranged in the isolation chamber 411, and two ends of the second spring 42 are respectively connected to the sealing plug 47 and the side wall of the isolation chamber 411.

[0029] It can be understood that, for example, 3 first springs 43 are arranged and symmetrically placed in the pressing chamber 412. During the operation of the equipment, the inside of the pressing chamber 412 is in a vacuum environment. When the target material pool 33 needs to add target material, the pressure relief bolt 44 injects air into the pressing chamber 412 to increase the pressure in the pressing chamber 412. The pressing plate 46 is pressed downward by the atmospheric pressure, so that the liquid target material enters the target material pool 33. After the liquid target material injection is completed, the air in the pressing chamber 412 is extracted to keep the pressing chamber 412 in a vacuum environment. When the pressure in the pressing chamber 412 is balanced with the pressure in the liquid injection chamber 413, the pressing plate 46 moves upward under the elastic force of the spring, which is convenient for injecting new target material into the liquid injection chamber 413.

[0030] It can be understood that the second spring 42 is respectively connected to the sealing plug 47 and the side wall of the isolation chamber 411. When the pressure in the isolation chamber 411 and the liquid injection chamber 413 is balanced, there is a gap between the sealing plug 47 and the isolation plate 45, and the liquid target material in the liquid injection chamber 413 can flow into the isolation chamber 411 through the gap. When the liquid target material in the liquid injection chamber 413 completely flows into the isolation chamber 411, the liquid injection chamber 413 can be depressurized to increase the gas pressure in the liquid injection chamber 413, and the sealing plug 47 is pushed by other pressures to seal the isolation chamber 411, which is convenient for injecting new liquid target material into the liquid injection chamber 413.

[0031] Preferably, the sealing plug 47 is in the shape of a flat-top cone. The size of the sealing plug 47 on the side close to the isolation chamber 411 is smaller than the size of the sealing plug 47 on the side close to the liquid injection chamber 413. The bottom inside the liquid injection chamber 413 is concave, and the sealing plug 47 is placed inside the concave.

[0032] It can be understood that the size of one end of the sealing plug 47 close to the isolation chamber 411 is smaller than that of the other end, which can prevent the sealing plug 47 from entering the isolation chamber 411. At the same time, the bottom inside the liquid injection chamber 413 is concave, and the sealing plug 47 can be limited by the concave setting to prevent the sealing plug 47 from shifting in position when moving inside the liquid injection chamber 413.

[0033] Preferably, the coating chamber 3 is provided with 2 coating rollers 31, 2 target material pools 33 and a plurality of guide rollers 32. The target material pools 33 are orderly installed below the coating rollers 31. The two ends of the coating rollers 31, the target material pools 33 and the guide rollers are respectively connected to the inner wall of the coating chamber 3. A pipeline 73 chamber is also provided on the side of the coating chamber 3 away from the control part 5. A liquid injection pipe is provided inside the pipeline 73 chamber, and one end of the liquid injection pipe is connected to the liquid injection chamber 4, and the other end of the liquid injection pipe is bifurcated and respectively connected to the 2 target material pools 33.

[0034] It can be understood that the coil to be coated is limited and moved by surrounding the guide rollers 32, so that the coil to be coated can be coated by surrounding the coating rollers 31. The target material pools 33 are installed below the coating rollers 31, and by heating the liquid target material in the target material pools 33, the target material is attached to the coil to be coated.

[0035] It can be understood that the isolation chamber 411 is connected to the target material pool 33 through a liquid injection pipe. When the stock of the liquid target material in the target material pool 33 is insufficient, the liquid target material can be injected into the target material pool 33 through the isolation chamber 411.

[0036] Preferably, a feeding roller 11 is provided inside the feeding chamber 1, and a feeding port 12 is provided on the side of the feeding chamber 1 close to the coating chamber 3. A receiving roller 21 is provided in the receiving chamber 2, and a discharging port 22 is provided on the side of the receiving roller 21 close to the coating chamber 3.

[0037] It can be understood that the feeding chamber 1 is provided with a feeding port 12, and the receiving chamber 2 is provided with a discharging port 22, so that the inner cavity spaces of the feeding chamber 1, the discharging chamber and the coating chamber 3 are connected. The feeding roller 11 is used to place the coil to be coated, and the receiving roller is used to place the coil that has been coated.

[0038] Preferably, the control unit 5 includes a control box 53, a slide rail 55 and a slide block 54. The slide rails 55 are symmetrically disposed at the bottom of the slide block 54 and are mounted on the fixed plate 6. The slide rails 55 and the slide block 54 slide relative to each other. A control box 53 is mounted at one end of the slide block 54 away from the coating chamber 3. One end of the slide block 54 close to the coating chamber 3 is fixedly connected to the lower part of the side wall of the coating chamber 3. The upper part of the coating chamber 3 is connected to the slide block 54 through a pull rod 52. The side wall of the coating chamber 3 on the side close to the control unit 5 can slide relative to the coating chamber 3.

[0039] It can be understood that the side of the coating chamber 3 close to the control unit 5 can move relatively. When the guide roller 32 or the coating roller 31 is damaged, it is convenient for the user to repair the coating chamber 3. Specifically, the bottom of the side wall of the coating chamber 3 is fixedly connected to the slide block 54, and the top is connected to the slide block 54 through a pull rod 52, so that the force is evenly distributed when moving the side wall of the coating chamber 3, avoiding deformation of the side wall of the coating chamber 3, resulting in air leakage in the coating chamber 3 and inability to achieve a vacuum environment.

[0040] It can be understood that the slide block 54 drives the side wall of the coating chamber 3 to move through the slide rails 55 fixed to the fixed plate 6. The slide rails 55 are used to guide and limit the slide block 54.

[0041] Preferably, the control unit 5 is further provided with a motor 58, a gear 57 and a rack 56. A chute is provided at the bottom of the slide block 54. The rack 56 is placed in the chute and fixedly connected to the fixed plate 6. The motor 58 is fixedly connected to the slide block 54, and the motor 58 is mounted on the chute corresponding to the position of the chute, and the output end of the motor 58 is connected to the gear 57. The gear 57 passes through the slide block 54 and meshes with the rack 56. A dust-proof cover 51 is provided at the position of the motor 58 and the gear 57.

[0042] It can be understood that the control box 53 is electrically connected to the motor 58. The motor 58 is fixedly connected to the slide block 54. The output end of the motor 58 is fixedly connected to the gear 57. The gear 57 passes through the slide block 54 and meshes with the rack 56 fixed on the fixed part. And a chute is provided at the position of the slide block 54 corresponding to the rack 56 to prevent the slide block 54 from contacting the rack 56 and affecting the movement of the slide block 54. The control box 53 sends a working instruction to the motor 58, and the motor 58 starts to work. Since the motor 58 is fixed on the slide block 54 and the gear 57 and the rack 56 are meshed, it can drive the side wall of the coating chamber 3 to move towards the control box 53, thereby opening the coating chamber 3.

[0043] It can be understood that a dust-proof cover 51 is also provided at the position of the slide block 54 corresponding to the motor 58 and the gear 57, so that the motor 58 and the gear 57 are placed in the dust-proof cover 51 to prevent dust from entering the meshing part of the gear 57 and the rack 56, resulting in the inability of the slide block 54 to smoothly drive the side wall of the coating chamber 3 to move.

[0044] Preferably, the winding type vacuum coating equipment is further provided with a vacuum part 7, including a first vacuum machine 71 and a second vacuum machine 72. The first vacuum machine 71 and the second vacuum machine 72 are placed on the side of the coating chamber 3 away from the control part 5, and the first vacuum machine 71 and the second vacuum machine 72 are fixedly connected to the fixing plate 6. The first vacuum machine 71 is respectively connected to the feeding chamber 1, the receiving chamber 2 and the coating chamber 3 through pipelines 73, and the second vacuum machine 72 is connected to the pressing cavity 412 through a pipeline 73.

[0045] It can be understood that the control box 53 is electrically connected to the first vacuum machine 71 and the second vacuum machine 72, and the first vacuum machine 71 and the second vacuum machine 72 are controlled to work through the control box 53.

[0046] It can be understood that the first vacuum machine 71 and the second vacuum machine 72 are arranged on the side of the coating chamber 3 away from the control part 5, and the first vacuum machine 71 and the second vacuum machine 72 are installed on the fixing plate 6. The first vacuum machine 71 is connected to the feeding chamber 1, the receiving chamber 2 and the coating chamber 3 through pipelines 73. The air in the feeding chamber 1, the receiving chamber 2 and the coating chamber 3 is extracted through the first vacuum machine 71 to make the feeding chamber 1, the receiving chamber 2 and the coating chamber 3 reach a vacuum environment. The second vacuum machine 72 is connected to the pressing cavity 412 through a pipeline 73, and the air in the pressing cavity 412 is extracted through the second vacuum machine 72 to make the pressing cavity 412 reach a vacuum environment.

[0047] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A winding type vacuum coating equipment, characterized in that: it includes a feeding chamber, a winding chamber, a coating chamber, a liquid injection chamber, a control unit and a fixing plate. The feeding chamber is connected to one end of the coating chamber, the winding chamber is connected to the other end of the coating chamber, the coating chamber and the control unit are respectively connected to the fixing plate. The control unit is placed in front of the coating chamber and is connected to the coating chamber. The liquid injection chamber is placed at the bottom of the winding chamber, and the top and side of the liquid injection chamber are respectively connected to the winding chamber and the coating chamber; the liquid injection chamber includes a liquid injection shell, a pressure relief bolt, a pressing plate, a partition plate and a sealing plug. The partition plate and the pressing plate cooperate to divide the inner cavity of the liquid injection chamber into an isolation cavity, a liquid injection cavity and a pressing cavity. The isolation cavity is placed on one side of the liquid injection cavity and the pressing cavity, and the pressing cavity is placed at the top of the liquid injection cavity. The pressure relief bolt is installed on the side wall of the pressing cavity. There is a liquid injection hole between the liquid injection cavity and the isolation cavity, and the sealing plug seals the liquid injection hole.

2. The winding type vacuum coating equipment according to claim 1, characterized in that: the liquid injection chamber is further provided with a first spring and a second spring. There are more than 3 first springs, and the first springs are symmetrically placed in the pressing cavity. The two ends of the first spring are respectively connected to the top of the pressing plate and the top of the pressing cavity. The second spring is placed in the isolation cavity, and the two ends of the second spring are respectively connected to the sealing plug and the side wall of the isolation cavity.

3. The winding type vacuum coating equipment according to claim 2, characterized in that: the sealing plug is in the shape of a flat-top cone. The size of the sealing plug close to the isolation cavity side is smaller than the size of the sealing plug close to the liquid injection cavity side. The bottom of the liquid injection cavity is concave, and the sealing plug is placed in the concave.

4. The winding type vacuum coating equipment according to claim 1, characterized in that: the coating chamber is provided with 2 coating rollers, 2 target material pools and multiple guiding rollers. The target material pools are orderly installed below the coating rollers. The two ends of the coating rollers, the target material pools and the guiding rollers are respectively connected to the inner wall of the coating chamber. A pipeline chamber is further provided on the side of the coating chamber away from the control unit. A liquid injection pipe is arranged in the pipeline chamber, and one end of the liquid injection pipe is connected to the liquid injection chamber, and the other end of the liquid injection pipe is bifurcated and respectively connected to the 2 target material pools.

5. The winding type vacuum coating equipment according to claim 1, characterized in that: a feeding roller is arranged in the feeding chamber, and a feeding port is arranged on the side of the feeding chamber close to the coating chamber. A winding roller is arranged in the winding chamber, and a discharging port is arranged on the side of the winding roller close to the coating chamber.

6. The winding type vacuum coating equipment according to claim 1, characterized in that: The control unit includes a control box, slide rails and a slide block. The slide rails are symmetrically arranged at the bottom of the slide block, and the slide rails are installed on the fixed plate. The slide rails and the slide block slide relative to each other. The control box is installed at one end of the slide block away from the coating chamber. One end of the slide block close to the coating chamber is fixedly connected to the lower part of the side wall of the coating chamber. The upper part of the coating chamber is connected to the slide block through a pull rod. The side wall of the coating chamber close to the control unit can slide relative to the coating chamber.

7. The winding type vacuum coating equipment according to claim 6, characterized in that: The control unit further is provided with a motor, a gear and a rack. A chute is arranged at the bottom of the slide block. The rack is placed in the chute and fixedly connected to the fixed plate. The motor is fixedly connected to the slide block, and the motor is installed on the chute corresponding to the position of the chute. The output end of the motor is connected to the gear. The gear penetrates through the slide block and meshes with the rack. A dust-proof cover is arranged at the positions of the motor and the gear.

8. The winding type vacuum coating equipment according to claim 2, characterized in that: The winding type vacuum coating equipment further is provided with a vacuum unit, including a first vacuum machine and a second vacuum machine. The first vacuum machine and the second vacuum machine are arranged on the side of the coating chamber away from the control unit, and the first vacuum machine and the second vacuum machine are fixedly connected to the fixed plate. The first vacuum machine is respectively connected to the feeding chamber, the winding chamber and the coating chamber through pipelines. The second vacuum machine is connected to the pressing cavity through a pipeline.

Citation Information

Patent Citations

  • Multi-target material magnetron sputtering winding coating machine and coating method

    CN107245701A

  • Coating device with uniform coating

    CN110863178A