Powder coating equipment

Abstract

The present technology relates to a powder coating device. The powder coating device of the present technology includes: a reactor that increases the reactivity of the powder contained therein while rotating; a rotating unit having a roller, the roller being located below the reactor and rotating in direct contact with the reactor to rotate the reactor; and a chamber unit that at least partially accommodates the reactor and the rotating unit and creates a predetermined environment for the powder deposition reaction inside the reactor, wherein the chamber unit includes a switchable cover so that the reactor can be replaced with a new reactor. According to the present technology, there are no fastening parts, so that it becomes easy for a robot arm to fully automate the separation of the reactor for mass production from the chamber and transfer it to a bracket, thereby reducing the time to the next process and being able to improve the yield of the product.

Description

Technical Field

[0001] The present invention relates to a powder coating device, and more particularly, to a powder coating device for a thin film deposition process in a rotary manner. Background Art

[0002] As the powder-related market expands, various methods for forming high-quality thin films on large amounts of powder are being used.

[0003] For example, thin-film-coated powders can improve the electrochemical and mechanical properties of batteries, and are therefore attracting attention as technologies that can lead the cutting-edge semiconductor and battery markets, such as active materials for negative and positive electrode materials and CMP polishing slurries.

[0004] To apply this nano-scale thin film, chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes can be applied. Among them, powder atomic layer deposition (P-ALD) is a method that places powder (base material) inside a rotating reactor and uniformly deposits a thin film on its surface.

[0005] However, the conventional rotary thin-film deposition process presents several challenges. Due to the small internal volume of existing reactors, the amount of powder that can be loaded per process step is relatively small, resulting in a low yield required for practical mass production. Furthermore, the reactor shaft and chamber must be manually connected for each process step, leading to problems such as reactor tilt due to vibration, reducing the reliability of accurately recovering powder.

[0006] In order to solve these problems, the inventors of the present invention have completed the present invention after long-term research and repeated experiments. Summary of the Invention

[0007] Technical issues

[0008] Embodiments of the present invention provide a reactor for a large-capacity powder coating apparatus that improves batch production yield and increases reliability in recovering powder at precise locations.

[0009] On the other hand, other objects of the present invention which are not mentioned herein will be additionally considered within the scope that can be easily inferred from the following detailed description and the effects thereof.

[0010] Technical Solution

[0011] According to an embodiment of the present invention, a powder coating device includes: a reactor that increases the reactivity of the powder contained therein while rotating; a rotating unit having a roller, which is located below the reactor and rotates in direct contact with the reactor to rotate the reactor; and a chamber unit that at least partially accommodates the reactor and the rotating unit and creates a predetermined environment for the powder deposition reaction inside the reactor, wherein the chamber unit includes a switchable cover so that the reactor can be replaced with a new reactor.

[0012] The chamber unit may further include a slide drive module configured to slide the cover from a closed position to an open position.

[0013] The slide driving module may include: a moving block that moves along a transfer line extending in one direction; and a cylinder that is provided on the moving block and pushes the cover upward to open it.

[0014] The moving block may include: a plurality of blocks placed on the transfer line; a body providing a space for mounting the plurality of blocks; and an auxiliary guide coupled to the body to assist alignment during the sliding movement.

[0015] The chamber unit may further include an upper heater for heating the reactor located inside the chamber unit from above.

[0016] The upper heater is in a state of being combined with the cover and is pushed upward together when the cylinder pushes the cover upward, so that the upper portion of the reactor is fully exposed through the upper side of the chamber unit when the cover is in an open position.

[0017] The upper heater may be coupled to the cover via fasteners.

[0018] The powder coating apparatus may further include: a robot arm configured to grip the reactor; and a bracket, wherein the robot arm may be driven to grip the exposed reactor and to lead the reactor vertically upward and place it on the bracket.

[0019] The roller may include a first roller arranged on one side of the lower portion of the reactor and a second roller arranged on the other side of the lower portion of the reactor, and the first roller and the second roller are arranged at positions where they do not interfere with each other during the process of replacing the reactor with a new reactor.

[0020] The reactor may include a liner that reduces an accommodation space inside the reactor for accommodating the powder.

[0021] The first roller and the second roller may have sleeves formed with a diameter adapted to the diameter of the reactor so as to be in direct contact with the reactor regardless of the diameter of the reactor.

[0022] The first roller and the second roller may have a concavo-convex contact structure with the reactor.

[0023] The chamber unit may further include: a gas supply module for supplying process gas to one side of the reactor; and a gas damper module closely attached to the other side of the reactor to play a buffering role.

[0024] Furthermore, the powder coating device according to an embodiment of the present invention includes: a reactor, which increases the reactivity of the powder contained therein while rotating; a rotating unit, which is located below the above-mentioned reactor and rotates in direct contact with the above-mentioned reactor to rotate the above-mentioned reactor; and a chamber unit, which at least partially accommodates the above-mentioned reactor and the above-mentioned rotating unit and creates a predetermined environment for the powder deposition reaction inside the above-mentioned reactor, wherein the above-mentioned chamber unit includes a cover, which is configured to be able to slide in a first direction and expose the upper part of the above-mentioned reactor arranged inside the above-mentioned chamber unit to the outside, and the above-mentioned powder coating device may also include a robotic arm, which is configured to be able to slide in a second direction and lead out the exposed above-mentioned reactor along a third direction.

[0025] Beneficial effects

[0026] According to the present technology, there is no fastening part, making it easy for a robot arm to fully automate the separation of the reactor and chamber unit for mass production and transfer them to a bracket, thereby reducing the time to the next process and improving the product yield.

[0027] Furthermore, this technology can provide an apparatus that is interchangeable with reactors of various sizes and can change structure, so that a maximum of 10 kg of powder can be loaded and coated when using a batch production apparatus for deposition of small amounts of powder or a batch production apparatus for deposition of large amounts of powder.

[0028] In addition, according to the present technology, the reactor is rotated by a rotating unit using a pulley without a separate fastening portion such as a gear, so as to stir a large amount of powder loaded therein, and by adjusting the size of the roller of the rotating unit and the protrusion / groove portion serving as a key, reactors of various sizes can be fastened, and structures and gaskets of various sizes and shapes can be arranged inside the reactor, so that not only a small amount of powder but also a large amount of powder can be deposited.

[0029] In addition, the present technology can provide a powder coating apparatus for mass production with fully automated characteristics, which allows the reactor to be freely fastened by a rotation unit using pulleys without gears when opening and closing the chamber cover before and after the process, so that the reactor can be freely moved by a robot arm. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 1 is a diagram showing the overall configuration of a powder coating apparatus according to an embodiment of the present invention.

[0031] Figure 2 For showing Figure 1 Diagram of the internal structure of the chamber unit.

[0032] Figure 3 For showing the Figure 1 Diagrams showing the overall structure of a powder coating device viewed from different directions.

[0033] Figure 4 For showing Figure 3 Diagram of the internal structure of the chamber unit.

[0034] Figure 5 It is a diagram showing a vertical cross section of the interior of a powder coating apparatus according to an embodiment of the present invention.

[0035] Figure 6 FIG. 1 is a diagram illustrating a state in which a cover of a chamber unit is opened by a slide driving module according to an embodiment of the present invention.

[0036] Figure 7 and Figure 8 FIG. 1 is a diagram showing the entire configuration of a powder coating apparatus for explaining reactor replacement according to an embodiment of the present invention.

[0037] Figures 9a to 9c 1 and 2 are diagrams illustrating various embodiments of the relationship between a reactor and a drum according to an embodiment of the present invention.

[0038] Figures 10a to 10c FIG2 is a diagram showing various embodiments of the relationship between a reactor and a drum according to another embodiment of the present invention.

[0039] The disclosed drawings are for illustration to provide further understanding of the technical spirit of the present invention, and thus the scope of the present invention should not be interpreted as being limited by the drawings.

[0040] Description of Reference Numerals

[0041] 1: Powder coating device

[0042] 10: Reactor

[0043] 11: Padding

[0044] 12: Fastening parts

[0045] 13: Blade

[0046] 20: Rotation unit

[0047] 21: Roller

[0048] 211, 212: first roller, second roller

[0049] 22: Rotating pulley

[0050] 221, 222: first rotating pulley, second rotating pulley

[0051] 23: Motor pulley

[0052] 30: Chamber unit

[0053] 31: Cover

[0054] 32: Sliding drive module

[0055] 321: Move Block

[0056] 322: Cylinder

[0057] 3211: Block

[0058] 3213: Main body

[0059] 3215: Auxiliary guide

[0060] 33: Upper heater

[0061] 331: Fasteners

[0062] 34: Air supply module

[0063] 35: Gas damper module

[0064] 351: Cylinder

[0065] 352: Bellows

[0066] 36: Lower heater

[0067] 37: Pumping module

[0068] 40: Robotic Arm

[0069] 41: A pair of grips

[0070] 50: Bracket

[0071] 51, 52: First bracket, second bracket

[0072] FR: Frame

[0073] PR: Protrusion

[0074] CA: Groove Department

[0075] TL: Transfer Line

[0076] STL: Auxiliary transfer line

[0077] ML: Moving Line

[0078] SL: Sleeve DETAILED DESCRIPTION

[0079] The most preferred embodiment of the present invention will be described below. In the accompanying drawings, thicknesses and spacings are shown for ease of explanation and may be exaggerated compared to actual physical thicknesses. Known structures not relevant to the present invention are omitted from the description of the present invention. When adding reference numerals to components throughout the drawings, it should be noted that the same reference numerals refer to the same components, even when shown in different drawings.

[0080] Figure 1 2 is a diagram showing the entire configuration of a powder coating apparatus according to an embodiment of the present invention.

[0081] Figure 2 For showing Figure 1 Diagram of the internal structure of the chamber unit.

[0082] Figure 3 For showing the Figure 1 Diagrams showing the overall structure of a powder coating device viewed from different directions.

[0083] Figure 4 For showing Figure 3 Diagram of the internal structure of the chamber unit.

[0084] Figure 5 It is a diagram showing a vertical cross section of the interior of a powder coating apparatus according to an embodiment of the present invention.

[0085] First refer to Figure 1 and Figure 2 The powder coating apparatus 1 includes a reactor 10 , a rotating unit 20 and a chamber unit 30 .

[0086] The reactor 10 increases the reactivity of the powder (not shown) contained therein while rotating. The powder is coated inside the reactor.

[0087] The reactor is made of metal or metal alloy material. However, the present invention is not limited thereto, and the reactor can also be made of Teflon material with corrosion resistance and chemical resistance.

[0088] The rotating unit 20 includes a drum 21 for rotating the reactor 10. The drum 21 is located below the reactor 10 and rotates in direct contact with the reactor to rotate the reactor.

[0089] The roller 21 includes a first roller 211 and a second roller 212. The first roller 211 is arranged on one side of the lower portion of the reactor 10, and the second roller 212 is arranged on the other side of the lower portion of the reactor 10. The first roller and the second roller are spaced apart by a distance d (refer to FIG. Figures 9a to 10c ) are spaced apart from each other. This is also the arrangement position where the reactor and the rollers do not interfere with each other when the reactor is replaced. The outer surfaces of the first roller 211 and the second roller 212 are in direct contact with the outer surface of the reactor 10. Therefore, when the first roller and the second roller rotate, the reactor can rotate due to the friction between the outer surfaces.

[0090] At this time, in order to increase the contact area, a concavo-convex structure can be added. A protrusion PR can be provided along its outer circumferential surface on the outer surface of the reactor 10. A groove portion CA can be provided along its outer circumferential surface on the outer surface of the drum 21. The protrusion and the groove portion can have a structure that cooperates with each other. For example, the protrusion can be accommodated in the groove portion. This concavo-convex structure increases the overall friction between the reactor and the drum, allowing the reactor 10 to rotate more smoothly through the drum 21.

[0091] Furthermore, these concave and convex structures engage with each other to prevent the reactor from moving forward or backward during rotation. This advantage prevents the reactor from sliding longitudinally parallel to the direction of rotation while allowing the reactor to be easily loaded and unloaded. Furthermore, by supporting the weight of the mass production reactor with a relatively large contact area, the applied load is effectively distributed.

[0092] Structurally, the first roller and the second roller support the weight of the reactor. Therefore, by adding the effect of the concave-convex structure, the first roller and the second roller that bear the weight of the reactor can make the reactor rotate more smoothly.

[0093] The rotating unit 20 further includes a rotating pulley 22 and a motor pulley 23. The motor pulley 23 provides a driving force to rotate the rotating pulley 22. The rotating pulley 22 rotates the drum 21 connected thereto. In other words, the rotational force of the motor pulley is provided to the drum via the rotating pulley, resulting in the rotation of the reactor.

[0094] The rotating pulley 22 includes a first rotating pulley 221 and a second rotating pulley 222. The first rotating pulley 221 is connected to the first roller 211. The second rotating pulley 222 is connected to the second roller 212. Preferably, the rotating pulley and the roller are firmly connected to each other so that the driving force from the driving pulley is transmitted to the roller without loss.

[0095] The motor pulley 23 receives electric power and converts it into rotational force, thereby rotating the rotation pulley 22 .

[0096] Considering the structure in which the reactor 10 is arranged on two rollers 211 and 212 and the rotation directions of the two rollers 211 and 212, as shown in the figure, the rotating pulley 22 and the motor pulley 23 are preferably arranged in a triangle. This is because the two rollers 211 and 212 and the reactor 10 can be rotated simultaneously by a single rotating drive shaft (i.e., the motor pulley 23).

[0097] Yet the present invention is not limited to the structure of the rotating pulley and the motor pulley shown in the figure, and can apply the rotational driving force of the various structures for rotating the drum.In addition, the present invention is not limited to the belt drive mode shown in the figure, and can adopt various power transmission modes.

[0098] As shown in the figure, the roller 21 is generally located inside the chamber unit 30. The rotating pulley 22 and the motor pulley 23 are generally located outside the chamber unit 30. That is, only the roller that is in direct contact with the rotating reactor is located inside the chamber unit.

[0099] The chamber unit 30 at least partially accommodates the reactor 10 and the rotating unit 20, and creates a predetermined environment for a deposition reaction of powder (not shown) inside the reactor 10. The predetermined environment may be, for example, a vacuum state or a state close to a vacuum state.

[0100] The chamber unit 30 has an openable lid 31. The lid 31 allows the reactor housed therein to be replaced with a new reactor as needed for cleaning, component replacement, etc. The lid 31 preferably has a sealing structure so that a predetermined internal environment can be properly formed when the chamber unit is closed.

[0101] In the drawings, since the chamber unit 30 has a rectangular parallelepiped shape as a whole, the cover 31 is shown as having a square plate shape, but the present invention is not limited to this shape.

[0102] The chamber unit 30 further includes a slide drive module 32. The slide drive module 32 is used to move the cover 31 from the closed position P1 (refer to Figure 7 ) Slide to open position P2 (refer to Figure 8 ). In the figure, the sliding movement direction is illustrated as I direction.

[0103] To this end, the slide drive module 32 includes a moving block 321 and a cylinder 322. The moving block 321 moves along a transfer line TL (refer to FIG. Figure 7 ) moves. The transfer line TL is set on the frame FR ( Figure 7). The air cylinder 322 is provided on the moving block 321, and pushes the cover 31 upward to open it. Therefore, when the cover 31 slides from the closed position P1 to the open position P2, it is first lifted upward by the air cylinder 322 and opened, and then the moving block 321 slides to completely (or almost completely) open the upper surface of the chamber unit. Therefore, the cover has a two-stage opening method. In contrast, in the case of sliding movement, the order of the above stages is reversed. The following will be described. Figure 6 Described in detail in.

[0104] Secondly, with the aforementioned Figure 1 and Figure 2 Refer to it together Figures 3 to 5 The chamber unit 30 further includes a gas supply module 34. The gas supply module 34 supplies process gases required for the process, such as a coating source, an oxidant, a purge gas, etc., to the interior of the reactor 10 under the control of an external controller (not shown in the figure). As a gas supply module, a gas supply module used in a known deposition module including CVD, ALD, sputtering, etc. can be applied. Figure 5 In FIG, the inflow direction of the process gas is indicated by an arrow.

[0105] The chamber unit 30 also includes a gas damper module 35. The gas damper module 35 comprises a cylinder 351 that moves the contact portion RC into close contact with the reactor 10, and a bellows 352 that maintains the seal of the chamber unit 30 during operation of the cylinder 351. For example, the gas damper module 35 uses a stretchable / compressible component such as a spring to store / maintain its position to absorb forces inputted by vibration or shock. This enhances the stability of the apparatus.

[0106] exist Figure 5 , the positions of the gas damper module 35 before and after movement in response to the operation of the cylinder 351 are shown as solid lines and dashed lines, respectively. As the gas damper module 35 moves from the position shown by the solid line to the position shown by the dashed line, the contact portion RC comes into close contact with the reactor 10, thereby enabling the gas damper module 35 to perform the aforementioned cushioning function.

[0107] The chamber unit 30 further includes an upper heater 33 and a lower heater 36. The upper heater 33 is positioned relatively above the reactor 10. The lower heater 36 is positioned relatively below the reactor. Heater 33 or 36 is used to raise the reactor temperature to the required process temperature when the reactor 10 is coating the powder. Heater 33 or 36 can be controlled by a separate heater control unit (not shown).

[0108] The shape of the upper heater 33 and the lower heater 36 can be such that they fit the reactor as closely as possible to effectively heat the reactor, that is, a shape that roughly corresponds to the shape of the reactor. For example, the upper heater or the lower heater can have a semicircular cross section (refer to Figure 6 ).

[0109] Furthermore, the upper heater 33 and lower heater 36 are physically completely separated from each other. This allows for automated reactor replacement. The rotating unit does not include a separate portion secured to the reactor. Due to its characteristics, the reactor can be removed using a robotic arm without disassembling it. This will be described below.

[0110] The chamber unit 30 further includes a pumping module 37. The pumping module 37 converts the interior of the reactor or chamber unit into a vacuum state and functions to exhaust the process gas supplied from the gas supply module 34.

[0111] On the other hand, a mesh filter with a size of 0.5um to 3.0um is fastened to the front part of the reactor to allow precursor particles of relatively different sizes to flow smoothly, and a mesh filter with a size of 3.0um to 5.0um is fastened to the discharge part in the longitudinal direction of the reactor to prevent the internal powder from leaking to the outside due to the pressure of the gas when the pulse is supplied and purged internally.

[0112] Figure 6 FIG. 1 is a diagram illustrating a state in which the cover 31 of the chamber unit 30 is opened by the slide driving module 32 according to the embodiment of the present invention.

[0113] Figure 7 and Figure 8 FIG. 1 is a diagram showing the entire configuration of a powder coating apparatus for explaining reactor replacement according to an embodiment of the present invention.

[0114] First, with the above Figure 5 Refer to it together Figure 6 , the upper heater 33 can be configured as a semi-cylindrical shape. The upper heater 33 can be configured as a semi-cylindrical shape by fasteners 331 ( Figure 5 ) is connected to the cover 31. Therefore, when the cover 31 is moved by the slide driving module 32, the upper heater 33 also moves together.

[0115] Therefore, in the open position P2 of the cover 31, the upper portion of the reactor 10 is completely exposed through the upper side of the chamber unit. As described later, when the robot arm 40 ( Figures 7 and 8 ) When replacing the reactor, the reactor can be gripped more smoothly. This facilitates the automation of reactor replacement.

[0116] The role of the cylinder 322 becomes clearer. Considering the height of the upper heater fixedly connected to the cover, the cylinder 322 plays the role of fully pushing the cover 31 upwards (first stage opening) to ensure that there is no interference from the upper heater during the subsequent second stage opening.

[0117] The moving block 321 includes: a plurality of blocks 3211, which are placed on the transfer line TL ( Figures 7 and 8 ); a main body 3213 providing space for mounting the plurality of blocks 3211; and auxiliary guides 3215 coupled to the main body to assist with alignment during sliding movement. As the plurality of blocks 3211, in direct contact with the transfer line TL, slide along the transfer line TL, the cover 31, connected to the cylinder 322 mounted on the main body 3213, slides from the closed position P1 to the open position P2 (second stage opening). At this time, as described above, the upper heater 33 also moves along with the cover.

[0118] Secondly, refer to Figure 7 and Figure 8 The powder coating device 1 includes a robot arm 40 and a bracket 50. The robot arm 40 is configured to grasp the reactor.

[0119] The robot arm 40 is positioned above the frame FR. The bracket 50 is positioned generally in the upper-middle portion of the frame FR, below the position of the robot arm 40. The robot arm 40 is positioned to facilitate gripping the reactor from above when replacing a reactor. The bracket 50 includes a first bracket 51 for a reactor 10_O that has completed a process, and a second bracket 52 for a new reactor 10_N. The first bracket 51 and the second bracket 52 are positioned generally between the robot arm 40 and the chamber unit 30, i.e., at a position that facilitates the introduction / extraction and placement of the reactor 10_O or 10_N.

[0120] Thus, the robot arm 40 can be driven to grasp the reactor completely exposed through the second stage open upper portion as described above, lead it vertically upward (ie, along the III direction), and place it on the bracket 50 .

[0121] As for the direction in which the robotic arm grasps the reactor, as shown in the figure, considering that the robotic arm grasps the reactor in the direction of entry into the reactor (i.e., direction III), it is preferable to grasp the reactor on both sides in the longitudinal direction. To this end, the robotic arm may include a pair of grasping portions 41, the spacing between the pair of grasping portions 41 being adjustable in direction I.

[0122] As shown in the figure, the robot arm only needs to move in one direction (i.e., direction II) to replace the reactor. As shown in the figure, the chamber unit 30, first bracket 51, and second bracket 52 are arranged along direction II. Therefore, when introducing / extracting and placing the reactor 10_O or 10_N, the robot arm 40 only needs to move in direction II. In other words, the robot arm 40 only needs to move in direction II along the movement line ML defined by the frame FR. This reduces manufacturing costs by optimizing the movement direction.

[0123] As described above, the robot arm is provided at the upper portion of the frame surrounding the apparatus and slides to smoothly transport the reactor to the bracket positioned in a direction perpendicular to the chamber unit.

[0124] On the other hand, the frame FR may further include an auxiliary transfer line STL ( Figures 7 and 8 As shown in the figure, the auxiliary transfer line is set at the far end away from the chamber unit in the II direction to facilitate alignment, and the auxiliary transfer line is only involved in the middle and latter half of the sliding movement process, so it can be relatively shorter than the transfer line.

[0125] Figures 9a to 9c 1 and 2 are diagrams illustrating various embodiments of the relationship between a reactor and a drum according to an embodiment of the present invention.

[0126] like Figure 9a As shown, reactor 10 may include a liner 11 that reduces the volume of powder contained within reactor 10. The liner, which is smaller than the diameter of the hollow cylindrical reactor, enables processes with smaller powder loads compared to conventional loading volumes. Specifically, by varying the liner size, the amount of powder loaded into the liner can be adjusted from small to large quantities, enabling processes for both small and large-scale production.

[0127] The liner 11 can be coupled to the inner circumferential surface of the reactor 10 by a fastening member 12. The fastening member 12 rotates as the reactor rotates, preventing the powder from being detached from the front and rear mesh filters. Blades 13 for more smoothly stirring the loaded powder can be provided on the inner circumferential surface of the liner 11. The powder is pulled and rotated by the blades, and the plurality of blades allows the powder to be mixed in a relatively short time interval and facilitates a process that can respond to pulses and purges. Although an example of a total of six blades arranged at equal intervals along the inner circumferential surface of the liner is shown in the drawings, the present invention is not limited to this number.

[0128] The inventors conducted simulations comparing powder exposure times. Focusing on the fact that exposure time decreases as the area of ​​powder in contact with the reactor wall increases, they discovered that when performing low-powder processes in small reactors, the reduced area of ​​powder in contact with the reactor wall increases the exposure time of the injected process gas and powder. Therefore, providing a liner that narrows the internal containment space of the reactor can improve process efficiency.

[0129] Furthermore, we discovered that, in low-volume powder processes, at the same rotational speed, the powder falls freely over the blades in a relatively short cycle compared to large reactors, increasing the exposure time of the powder particle surface area to the process gas. This suggests that, in low-volume powder processes, process efficiency can be improved by reducing the amount of process gas used per exposed surface area.

[0130] Figure 9b The size of the pad 11' is larger than the above Figure 9aThe fastening member 12 and the blade 13 can be arranged accordingly. Figure 9c Shown above Figure 9a Compared with the reactor without liner. In this case, blades 13 may also be included. In this case, it is sufficient to set blades on the inner circumference of the reactor. On the other hand, it is worth noting that in the above Figures 9a to 9c The distance d between the two rollers 211 and 212 remains constant.

[0131] Another embodiment of adjusting the size of the internal accommodation space of the reactor will be described below.

[0132] Figures 10a to 10c FIG2 is a diagram showing various embodiments of the relationship between a reactor and a drum according to another embodiment of the present invention.

[0133] like Figure 10a As shown, the size (i.e., outer diameter) of reactor 10 is designed to be small. Complementarily, the size (i.e., outer diameter) of first roller 211 and second roller 212 can also be designed to be larger. The inner diameter of the liner and the diameters of the first and second rollers define the size of the powder storage space. The interchangeability of reactors of various sizes allows for the selective use of small and large reactors, enabling both small and large powder deposition for both small and large quantities for mass production.

[0134] exist Figure 10a In order to adjust the size of the reactor, the outer diameter is adjusted. Figure 10b As shown, the inner diameter of the reactor 10 can also be adjusted. This is because even if the inner diameter is reduced, the accommodation space inside the reactor can be reduced. At this time, the sizes of the first roller 211 and the second roller 212 can also be adjusted in a complementary manner. Figure 10a and 10b For comparison, Figure 10c The reactor and drum are shown in their basic state without any adjustment of dimensions. On the other hand, it is worth noting that in the case of Figures 9a to 9c of Figures 10a to 10c The distance d between the two rollers 211, 212 remains constant. Since the firm connection between the roller and the above-mentioned rotating pulley is predetermined, the reactor and the roller of various sizes can be designed by maintaining a constant distance between the rollers without changing the design of the chamber unit itself. In addition, when adjusting the size (e.g., outer diameter) of the roller, it is preferred that a sleeve SL is provided on the roller so that the above-mentioned adjustment can be performed without changing its rotation axis. The diameter of the sleeve is adapted to the diameter of the reactor so that no matter how the diameter of the reactor is, the first roller 211 and the second roller 212 can directly contact the reactor.

[0135] On the other hand, it is noteworthy that as the sizes of the reactor and the drum are adjusted, the protrusions PR', PR", and PR and the grooves CA', CA", and CA respectively provided on the reactor and the drum are also adaptively adjusted.

[0136] According to the above-mentioned embodiment of the present invention, the following technology of interchangeable reactors is provided, namely, full automation of a robotic arm that allows the reactor to be freely attached and detached from a chamber unit is achieved through a rotating unit that is more freely than ever in terms of fastening to the reactor, and small / large volume powder coating is achieved through an internal liner.

[0137] Furthermore, the reactor can be mounted at a free position by utilizing a robotic arm without being fastened by a separate gear fastening structure or the like, by which it can be relatively freely interchangeable with reactors having various sizes and lengths.

[0138] In addition, the reactor with the completed process is transferred to the bracket by the robot arm to complete the work, and the reactors prepared on the remaining brackets are transferred to the chamber to achieve a continuous process.

[0139] This can shorten the moving distance of the robot arm and improve the efficiency of full automation, thereby increasing the yield of the overall process.

[0140] Furthermore, by varying the pad, roller, and key sizes according to embodiments of the present invention, the powder loading amount can be freely adjusted from small to large amounts, thereby enabling effective process optimization.

[0141] The reactor according to the above-mentioned embodiment of the present invention can be applied to the fields of thin film deposition, atomic layer deposition, powder coating, etc., and can also be applied to high-performance thin film coating equipment and large-capacity powder coating equipment.

[0142] The present invention has been described above using specific details such as specific structural elements and limited embodiments and figures. However, this is provided only to facilitate a more comprehensive understanding of the present invention. The present invention is not limited to the above-described embodiments. Anyone skilled in the art of the present invention can make various modifications and changes based on such descriptions. Therefore, the concept of the present invention is not limited to the above-described embodiments. Not only the scope of the appended claims falls within the scope of the concept of the present invention, but all scopes that are equivalent to or equivalently modified from such scopes also fall within the scope of the concept of the present invention.

Claims

1. A powder coating device, characterized in that include: A hollow cylindrical reactor that rotates while increasing the reactivity of the powder contained within it; a rotating unit including a roller, the roller being located below the reactor and rotating in direct contact with the reactor to rotate the reactor; and a chamber unit, at least partially accommodating the reactor and the rotating unit, and creating a predetermined environment for the powder deposition reaction inside the reactor, The chamber unit includes a switchable cover, so that the reactor can be replaced with a new reactor. The roller includes a first roller arranged on one side of the lower portion of the reactor and a second roller arranged on the other side of the lower portion of the reactor. The first roller and the second roller are arranged at positions where they do not interfere with each other during the process of replacing the reactor with a new reactor. The first roller and the second roller are provided with only two or more grooves provided along their respective outer peripheral surfaces and continuously formed along the outer peripheral surfaces, and the grooves are spaced apart from each other and arranged in parallel. The reactor is provided with only two or more protrusions arranged along the outer peripheral surface corresponding to the grooves and continuously formed along the outer peripheral surface, and the protrusions are spaced apart from each other and arranged in parallel. The groove portion and the protrusion portion are combined with each other, so that the first roller, the second roller and the reactor form a concave-convex contact structure with each other. The grooves and the protrusions not only form the concave-convex contact structure between the reactor and the first roller and the second roller, but also form the concave-convex contact structure between a new reactor that is replaced with the reactor and the first roller and the second roller. The concave-convex contact structure increases the friction between the first roller, the second roller and the reactor.

2. The powder coating device according to claim 1, characterized in that The chamber unit further includes a sliding drive module configured to slide the cover from a closed position to an open position.

3. The powder coating device according to claim 2, characterized in that The above-mentioned sliding drive module includes: a moving block that moves along a transfer line extending in one direction; and The cylinder is arranged on the moving block and pushes the cover upward to open it.

4. The powder coating device according to claim 3, characterized in that The above moving blocks include: A plurality of blocks are placed on the above-mentioned transfer line; a main body providing a space for mounting the plurality of blocks; and An auxiliary guide is coupled to the main body to assist alignment during the sliding movement.

5. The powder coating device according to claim 3, characterized in that The chamber unit further includes an upper heater, which is used to heat the reactor located inside the chamber unit from above. The upper heater is in a state of being combined with the cover and is pushed upward together when the cylinder pushes the cover upward, so that the upper portion of the reactor is fully exposed through the upper side of the chamber unit when the cover is in an open position.

6. The powder coating device according to claim 5, characterized in that The upper heater is combined with the cover via fasteners.

7. The powder coating device according to claim 5, characterized in that Also includes: a robotic arm configured to grasp the reactor; as well as bracket, The robotic arm is driven to grasp the exposed reactor and to lead the reactor vertically upward and place it on the bracket.

8. The powder coating device according to claim 1, characterized in that The reactor includes a liner, which is arranged in the reactor in a structure smaller than the size of the reactor. The liner reduces the accommodation space for accommodating the powder inside the reactor.

9. The powder coating device according to claim 8, characterized in that The first roller and the second roller have sleeves formed with diameters adapted to the diameter of the reactor so as to be in direct contact with the reactor regardless of the diameter of the reactor.

10. The powder coating device according to claim 1, characterized in that The chamber unit further comprises: a gas supply module, supplying process gas to one side of the reactor; and The gas damper module is closely attached to the other side of the reactor to play a buffering role.

11. A powder coating device, characterized in that: include: A hollow cylindrical reactor that rotates while increasing the reactivity of the powder contained within it; a rotating unit, located below the reactor, and rotating in direct contact with the reactor to rotate the reactor; as well as a chamber unit, at least partially accommodating the reactor and the rotating unit, and creating a predetermined environment for the powder deposition reaction inside the reactor, The chamber unit includes a cover, which is configured to be slidable in a first direction and expose the upper portion of the reactor disposed inside the chamber unit to the outside, so that the reactor can be replaced with a new reactor. The powder coating device further includes a robot arm, which is configured to be able to slide in the second direction and lead the exposed reactor out along the third direction. The rotating unit includes a first roller arranged on one side of the lower portion of the reactor and a second roller arranged on the other side of the lower portion of the reactor. The first roller and the second roller are arranged at positions where they do not interfere with each other during the process of replacing the reactor with a new reactor. The first roller and the second roller are provided with only two or more grooves provided along their respective outer peripheral surfaces and continuously formed along the outer peripheral surfaces, and the grooves are spaced apart from each other and arranged in parallel. The reactor is provided with only two or more protrusions arranged along the outer peripheral surface corresponding to the grooves and continuously formed along the outer peripheral surface, and the protrusions are spaced apart from each other and arranged in parallel. The groove portion and the protrusion portion are combined with each other, so that the first roller, the second roller and the reactor form a concave-convex contact structure with each other. The grooves and the protrusions not only form the concave-convex contact structure between the reactor and the first roller and the second roller, but also form the concave-convex contact structure between a new reactor that is replaced with the reactor and the first roller and the second roller. The concave-convex contact structure increases the friction between the first roller, the second roller and the reactor.

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