Semiconductor coating shower head flatness regulator

Abstract

The present invention discloses a semiconductor coating spray head flatness regulator, the spray head height adjustment plate passes through three evenly distributed shoulder hinge pins, and is connected to the spray head shaft sealing pad plate through three evenly distributed screw spring groups, three locking micrometer heads are evenly installed on the spray head height adjustment plate, the measuring head with the locking micrometer head is on the spray head shaft sealing pad plate, the upper end of the spray head shaft sealing pad plate is sealed and fixed with a spray head ceramic connector, and the lower end of the spray head shaft sealing pad plate is sealed and fixed with a spray head ceramic sleeve. The present invention adopts a locking micrometer head to adjust the up and down movement, the accuracy of the micrometer itself is 0.5mm / 50=0.01mm, which improves the overall adjustment accuracy, in addition, the micrometer head itself has an axial lock, the locking adjustment rod position is stable and fast, and the efficiency is further improved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor coating, and in particular to a semiconductor coating shower head planarity regulator. Background Art

[0002] In the process of existing semiconductor coating equipment, due to the special properties of the thin film, the spray device and its corresponding heating body are required to maintain a certain flatness during the thin film deposition process. In this case, the spray device itself needs to have a high flatness or be designed with a device to adjust the flatness. The traditional adjustment method is to adjust through the three top screws on the cavity and finally lock it with a locking nut. This is not only inefficient, but also causes the top screw position to move when the top screw locking nut is finally locked, resulting in the failure of the previous adjustment. Summary of the invention

[0003] In order to solve the above problems, the present invention provides a semiconductor coating shower head planarity regulator.

[0004] In order to solve the above technical problems, the technical solution of the present invention is: a semiconductor coating shower head planarity regulator, including a shower head height adjustment plate, the shower head height adjustment plate passes through three evenly distributed shoulder hinge pins, and is connected to the shower head shaft sealing pad through three evenly distributed screw spring groups, three locking micrometer heads are evenly installed on the shower head height adjustment plate, the measuring head with the locking micrometer head is pressed on the shower head shaft sealing pad, the upper end of the shower head shaft sealing pad is sealed and fixed with a shower head ceramic connector, and the lower end of the shower head shaft sealing pad is sealed and fixed with a shower head ceramic sleeve; the screw spring group includes a tension spring, screw rod one and screw rod two, the lower end of the tension spring is connected to screw rod one, screw rod one is threadedly connected to the shower head shaft sealing pad, the upper end of the tension spring is connected to screw rod two, screw rod two passes through the shower head height adjustment plate and is fixed by a nut, and the nut is located above the shower head height adjustment plate.

[0005] Furthermore, the upper end of the nozzle shaft sealing plate is sealed and fixed with a nozzle ceramic connector through an O-ring and a screw.

[0006] Furthermore, the lower end of the nozzle shaft sealing plate is sealed and fixed with a nozzle ceramic sleeve through an O-ring and screws.

[0007] Furthermore, a nozzle ceramic fixing is sleeved on the outer surface of the nozzle shaft sealing pad, and the nozzle ceramic fixing is located on the nozzle ceramic sleeve, and an O-ring three is sleeved on the nozzle ceramic sleeve. The nozzle ceramic sleeve is crimped onto the upper cavity and fastened by the nozzle ceramic fixing and the pin screw.

[0008] Furthermore, the nozzle height adjustment plate is connected to the 12-inch sprinkler head through a locking nut.

[0009] The present invention adopts a locking micrometer head to adjust the up and down movement. The accuracy of the micrometer itself is 0.5mm / 50=0.01mm, which improves the overall adjustment accuracy. In addition, the micrometer head itself has an axial lock, and the locking adjustment rod position is stable and fast, which further improves the efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a schematic diagram of the structure of the present invention;

[0011] Figure 2 It is the front view of the present invention;

[0012] Figure 3 yes Figure 2 AA section view;

[0013] Figure 4 It is a schematic diagram of the structure of the present invention assembled to the upper cavity;

[0014] Figure 5 It is a cross-sectional view of the present invention assembled to the upper cavity.

[0015] Among them: 1. 12-inch sprinkler head 2. Sprinkler head height adjustment plate 3. Hinge pin with shoulder 4. Tension spring 5. Micrometer head with locking 6. Sprinkler head shaft sealing plate 7. Sprinkler head ceramic sleeve 8. Sprinkler head ceramic connector 9. Sprinkler head ceramic fixing 10. O-ring one 11. O-ring two 12. O-ring three 13. Screw one 14. Screw two 15. Nut. DETAILED DESCRIPTION

[0016] The following is combined with Figure 1-5 The specific implementation modes of the present invention are further described.

[0017] The semiconductor coating shower head flatness regulator includes a shower head height adjustment plate 2, which passes through three evenly distributed shoulder hinge pins 3 and is connected to the shower head shaft sealing plate 6 through three evenly distributed screw spring groups. Three locking micrometer heads 5 are evenly installed on the shower head height adjustment plate 2 through nuts. The measuring head with the locking micrometer head 5 is placed on the shower head shaft sealing plate 6. The upper end of the shower head shaft sealing plate 6 is sealed and fixed with a shower head ceramic through an O-ring 10 and a screw. Connector 8, the lower end of the nozzle shaft sealing plate 6 is sealed and fixed with a nozzle ceramic sleeve 7 through an O-ring 11 and a screw; the screw spring group includes a tension spring 4, a screw 13 and a screw 2 14, the lower end of the tension spring 4 is connected to the screw 13, the screw 13 is threadedly connected to the nozzle shaft sealing plate 6, the upper end of the tension spring 4 is connected to the screw 2 14, the screw 2 14 passes through the nozzle height adjustment plate 2 and is fixed by a nut 15, and the nut 15 is located above the nozzle height adjustment plate 2. The nozzle shaft sealing plate 6 is sheathed with a nozzle ceramic fixing part 9, and the nozzle ceramic fixing part 9 is located on the nozzle ceramic sleeve 7, and the nozzle ceramic sleeve 7 is sheathed with an O-ring 3 12, and the nozzle ceramic sleeve 7 is crimped on the upper cavity and fastened by the nozzle ceramic fixing part 9 and the pin screw. The nozzle height adjustment plate 2 is connected to the 12-inch sprinkler head 1 through a locking nut.

[0018] When one of the locking micrometer heads 5 is rotated clockwise, the shaft of the locking micrometer head 5 extends, and the extending rod of the locking micrometer head 5 pushes the nozzle height adjustment plate 2 to move upward. The nozzle height adjustment plate 2 drives the 12-inch sprinkler head 1 to move upward close to the locking micrometer head 5. Similarly, when the positions of the other two locking micrometer heads 5 need to be raised, the same operation can be performed.

[0019] At the same time, three tension springs 4 are hooked with the nozzle height adjustment plate 2 through screw rod 13 and screw rod 2 14, so that the nozzle height adjustment plate 2 moves downward along the direction of the shoulder hinge pin 3. In this way, on the one hand, 6 points evenly apply force to make the position of the 12-inch sprinkler head 1 more stable. On the other hand, when the locking micrometer head 5 is rotated counterclockwise, the axis of the locking micrometer head 5 retracts, and the nozzle height adjustment plate 2 moves downward due to the downward pulling force of the tension spring 4. The nozzle height adjustment plate 2 drives the 12-inch sprinkler head 1 to move downward, and the adjustment of the three locking micrometer heads 5 realizes the planarity adjustment of the 12-inch sprinkler head 1.

[0020] After adjusting the 12-inch sprinkler head 1 through the above operations, the locking micrometer head 5 itself has a locking nut, which can be locked and positioned.

[0021] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A semiconductor coating shower head planarity regulator, characterized in that: The nozzle height adjustment plate (2) includes three evenly distributed shoulder hinge pins (3) and is connected to the nozzle shaft sealing plate (6) through three evenly distributed screw spring groups. Three locking micrometer heads (5) are evenly installed on the nozzle height adjustment plate (2). The measuring heads of the locking micrometer heads (5) are placed on the nozzle shaft sealing plate (6). The upper end of the nozzle shaft sealing plate (6) is sealed and fixed with a nozzle ceramic connector (8), and the lower end of the nozzle shaft sealing plate (6) is sealed and fixed with a nozzle ceramic sleeve (7). The screw spring assembly comprises a tension spring (4), a screw rod 1 (13) and a screw rod 2 (14); the lower end of the tension spring (4) is connected to the screw rod 1 (13); the screw rod 1 (13) is threadedly connected to the nozzle shaft sealing plate (6); the upper end of the tension spring (4) is connected to the screw rod 2 (14); the screw rod 2 (14) passes through the nozzle height adjustment plate (2) and is fixed by a nut (15); the nut (15) is located above the nozzle height adjustment plate (2); the nozzle height adjustment plate (2) is connected to the 12-inch sprinkler head (1) through a locking nut.

2. The semiconductor coating shower head planarity regulator according to claim 1, characterized in that: The upper end of the nozzle shaft sealing pad (6) is sealed and fixed with a nozzle ceramic connector (8) via an O-type sealing ring (10) and screws.

3. The semiconductor coating shower head planarity adjuster according to claim 1, characterized in that: The lower end of the nozzle shaft sealing pad (6) is sealed and fixed with a nozzle ceramic sleeve (7) via an O-type sealing ring (11) and screws.

4. The semiconductor coating shower head planarity adjuster according to claim 1, characterized in that: The nozzle shaft sealing pad (6) is sheathed with a nozzle ceramic fixing part (9), and the nozzle ceramic fixing part (9) is located on the nozzle ceramic sleeve (7), and the nozzle ceramic sleeve (7) is sheathed with an O-ring three (12). The nozzle ceramic sleeve (7) is crimped onto the upper cavity and fastened by the nozzle ceramic fixing part (9) and the pin screw.

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