A gas reference material preparation device

Abstract

A gas reference material preparation device, which relates to a gas preparation device. The present invention aims to solve the problem of low preparation efficiency existing in the existing gas reference material preparation devices. One end of the piping control component of the present invention is connected to an external gas source through a sealing joint, and the other end of the piping control component is connected to a cylinder. The vacuum pumping component is connected in parallel to the piping control component and evacuates the piping control component; the cylinder includes a cylinder body and a defoaming component. The defoaming component is hermetically inserted into the cylinder body. The defoaming component includes a liquid inlet pipe body and a defoaming plate body. The liquid inlet pipe body is hermetically and fixedly installed at the bottle mouth of the cylinder body. The lower part of the liquid inlet pipe body extends downward and extends into the lower part of the cylinder body. The defoaming plate body is slidably sleeved on the liquid inlet pipe body, and the defoaming plate body floats vertically with the liquid level height as the liquid moves. A plurality of air holes are opened on the defoaming plate body, and the bubbles are punctured when passing through the air holes on the defoaming plate body. The present invention is used for the preparation of gas reference materials.

Description

Technical Field

[0001] The present invention relates to a gas configuration device, and more particularly to a gas reference material configuration device. Background Art

[0002] Gas reference materials are configured by the partial pressure method or the weighing method. The weighing method has high requirements for the accuracy of weighing equipment. The partial pressure method is configured based on the principle that in the same volume, the ratio of the pressures of different gases is equal to the ratio of the amounts of substances of the gases. For reference materials with a component content above 0.1%, it is feasible to configure them using the above two methods. When the component content is at the ppm (parts per million) level, high-concentration standard gas needs to be diluted, and the product is achieved through multiple configurations.

[0003] Generally, when configuring gas reference materials, cryogenic fluids such as liquid nitrogen, liquid oxygen, or liquid hydrogen are used. Compared with conventional fluids (water and refrigerants), the most significant characteristic of cryogenic fluids is that their latent heat of vaporization is relatively small, and the liquid-phase and gas-phase density ratios are relatively low. Therefore, cryogenic fluids are very likely to absorb heat during storage and transportation, resulting in pool boiling or flow boiling.

[0004] When configuring gas reference materials using hydrogen and nitrogen, during the flow of liquid nitrogen in the pipeline, it is very easy to be heated to form bubbles. Especially in a vertical pipeline, the bubbles move, collide, and aggregate continuously during the upward movement. In the flow boiling of liquid nitrogen, the aggregation phenomenon is more obvious, while the rupture phenomenon is not obvious.

[0005] When liquid nitrogen enters the steel cylinder through the piping control component, there are still bubbles. Liquid nitrogen in the steel cylinder is also in a strong inertial motion state, and the bubbles break slowly. This is one of the reasons why the reference material needs to be left standing for 24 hours before analysis and detection. Only after standing for 24 hours can the analysis value be close to the actual content of the components. This situation is applicable to cases where there is no urgent need for use. In special cases, such as forest fire extinguishing or the medical field, there is an urgent need for a large number of configured gas reference materials. Therefore, in the existing configuration of gas reference materials, due to the strong inertial motion state still existing after mechanical mixing in the steel cylinder, it is impossible to achieve immediate inspection after configuration, resulting in the problem of low configuration efficiency of gas reference materials.

[0006] In summary, the existing gas reference material configuration device has the problem of low configuration efficiency. Summary of the Invention

[0007] The purpose of the present invention is to solve the problem of low configuration efficiency existing in the existing gas reference material configuration device, and further provide a gas reference material configuration device.

[0008] The technical solution of the present invention is as follows: A gas reference material configuration device includes a vacuum pumping component. It further includes a steel cylinder and a piping control component. One end of the piping control component is connected to an external gas source through a sealing joint, and the other end of the piping control component is connected to the steel cylinder. The vacuum pumping component is connected in parallel to the piping control component and evacuates the piping control component; the steel cylinder includes a cylinder body and a defoaming component. The defoaming component is hermetically inserted into the cylinder body. The defoaming component includes a liquid inlet pipe body and a defoaming plate body. The liquid inlet pipe body is hermetically and fixedly installed at the bottle mouth of the cylinder body. The lower part of the liquid inlet pipe body extends downward and extends into the lower part of the cylinder body. The defoaming plate body is slidably sleeved on the liquid inlet pipe body, and the defoaming plate body floats vertically with the liquid level height as the liquid moves. A plurality of air holes are formed in the defoaming plate body, and the air bubbles are punctured when passing through the air holes on the defoaming plate body.

[0009] Further, a limiting boss is provided on the lower end surface of the liquid inlet pipe body.

[0010] Further, an indented arc-shaped slideway is formed on the outer circumferential side wall of the liquid inlet pipe body, and the arc-shaped slideway is vertically arranged.

[0011] Further, the air holes on the defoaming plate body are conical air holes.

[0012] Further, a plurality of puncturing protrusions are processed on the inner wall of the air hole.

[0013] Still further, the defoaming component further includes a puncturing cover body and a puncturing needle. A puncturing cover body is covered above each air hole. The puncturing needle is installed on the inner end surface of the puncturing cover body, and the tip of the puncturing needle faces the liquid.

[0014] Further, the puncturing cover body is a hollow cover body plated with an anti-corrosion layer.

[0015] Further, balls are slidably embedded at the connection between the outer side walls of the defoaming plate body and the liquid inlet pipe body.

[0016] Further, the piping control assembly includes a first pipeline, a first needle valve, a second needle valve, a third needle valve, a second pipeline, a first three-way valve, a second three-way valve, a third three-way valve, a fourth three-way valve, a fourth needle valve, a fifth needle valve, a first metering pipe, a second metering pipe, a third metering pipe, a fourth metering pipe, a third pipeline, a fourth pipeline, a fifth pipeline, a sixth pipeline, a seventh pipeline, an eighth pipeline and a pressure gauge. One end of the first pipeline is fixedly connected to the sealing joint, and the other end of the first pipeline is respectively provided with the first needle valve and the second needle valve. The end of the second needle valve is connected to one end of the second pipeline, and the other end of the second pipeline is connected to the cylinder. The third needle valve, the first three-way valve, the second three-way valve, the third three-way valve and the fourth three-way valve are sequentially connected through the first metering pipe, the second metering pipe, the third metering pipe and the fourth metering pipe. The end of the fourth three-way valve is connected to the eighth pipeline. The fifth needle valve and the pressure gauge are installed on the eighth pipeline. The third needle valve is connected to the first pipeline between the first needle valve and the second needle valve through the third pipeline. The first three-way valve is connected to the second pipeline through the fourth pipeline. The second three-way valve is connected to the second pipeline through the fifth pipeline. The third three-way valve is connected to the second pipeline through the sixth pipeline. The fourth three-way valve is connected to the second pipeline through the seventh pipeline. A fourth needle valve is installed between the eighth pipeline and the second pipeline.

[0017] Further, the vacuum pumping assembly includes a vacuum pump, a ninth pipeline, a fifth needle valve and a tenth pipeline. One end of the ninth pipeline is connected to the vacuum pump, the other end of the ninth pipeline is connected to the second pipeline, the fifth needle valve is installed on the ninth pipeline. One end of the tenth pipeline is connected to the vacuum pump, and the other end of the tenth pipeline is connected to the eighth pipeline.

[0018] The present invention has the following effects compared with the prior art:

[0019] 1. The defoaming plate body 3 in the defoaming assembly of the present invention can rise and fall along the liquid inlet pipe body 2 under the action of buoyancy as the liquid level rises. When the defoaming plate body 3 rises with the liquid level, the bubbles in the liquid continuously gather during the rising movement until they rise to the liquid surface. When the bubbles are on the liquid surface, the bubbles encounter the pore wall of the conical air hole and burst, realizing defoaming. Since during the rising process of the bubbles, small bubbles may rise along the center of the conical air hole, or form aggregations at the pore wall without bursting. At this time, the puncturing needle 9 punctures the bubbles.

[0020] In addition, under the action of realizing defoaming, the defoaming assembly of the present invention also has the function of disturbing the flow of the liquid undergoing mixing and stirring. This flow disturbing function is mainly concentrated on changing the original stirring flow direction of the liquid, facilitating the full mixing of the liquid, and ensuring the configuration accuracy of the gas standard substance. At the same time, the defoaming plate body 3 of the present invention also has a buffering effect on the upper liquid.

[0021] The defoaming, buffering, and flow disturbance effects brought by the above defoaming component can effectively reduce the problem that gas reference materials need to be statically placed for up to 24 hours during the configuration process. According to different gas reference materials configured in the present invention, the static placement time is reduced by at least 16 hours. The transportation time of the gas reference materials is saved, providing convenience for users who urgently need such gas reference materials. Especially in environments such as the petrochemical field, fire, or medical systems where gas reference materials are widely used. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic diagram of the overall structure of the present invention; Figure 2 is a cross-sectional view of the gas cylinder 1; Figure 3 is Figure 2 a schematic diagram of the principle during use, with the arrow indicating the liquid flow direction; Figure 4 is Figure 1 a partial enlarged view at A; Figure 5 is Figure 4 a schematic diagram of the principle during operation; Figure 6 is a top view of the puncturing cover 8. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] DETAILED DESCRIPTION OF THE EMBODIMENT 1: In combination with Figures 1 to 6 to illustrate this embodiment. A gas reference material configuration device in this embodiment includes a vacuum pumping component. It further includes a gas cylinder 1 and a piping control component. One end of the piping control component is connected to an external gas source through a sealing joint, and the other end of the piping control component is connected to the gas cylinder 1. The vacuum pumping component is connected in parallel to the piping control component and evacuates the piping control component. The gas cylinder 1 includes a cylinder body 1-1 and a defoaming component. The defoaming component is hermetically inserted into the cylinder body 1-1. The defoaming component includes a liquid inlet pipe body 2 and a defoaming plate body 3. The liquid inlet pipe body 2 is hermetically and fixedly installed at the bottle mouth of the cylinder body 1-1. The lower part of the liquid inlet pipe body 2 extends downward and extends into the lower part of the cylinder body 1-1. The defoaming plate body 3 is slidably sleeved on the liquid inlet pipe body 2, and the defoaming plate body 3 floats vertically with the liquid level height as the liquid moves. A plurality of air holes 4 are opened on the defoaming plate body 3, and the air bubbles are punctured when passing through the air holes 4 on the defoaming plate body 3.

[0024] In this embodiment, the vacuum pumping component can clean the entire piping control component. The principle is: pumping out the gas or liquid located in the pipeline, thereby ensuring the cleanliness of the piping control component, making the components of the configured gas reference material more accurate, and avoiding the residue of gas or liquid in the pipeline.

[0025] In this embodiment, the material of the defoaming component used is the same as that of the gas cylinder, and corresponding anti-corrosion and other treatments are also carried out.

[0026] The pores on the foam extinguishing plate body 3 of this embodiment, in addition to having the function of extinguishing foam, facilitate reducing the weight of the entire foam extinguishing plate body 3. Secondly, since the lower end surface of the foam extinguishing plate body 3 of the present invention is in contact with the liquid, it is ensured that the buoyancy of the liquid received by it is sufficient to lift it up.

[0027] The material of the foam extinguishing plate body 3 of this embodiment is high-foamed foam plastic, and its density is less than 0.1 g / cm 3 , and an anti-corrosion coating is sprayed on its outer surface. The thickness of the anti-corrosion coating is 0.05 mm. On the premise of ensuring the anti-corrosion function, its weight is relatively light. The specific gravity of liquid nitrogen is 0.808 g / cm 3 , therefore, even on the premise that the foam extinguishing plate body 3 has a coating, it can still float smoothly on the liquid nitrogen. The same is true for configuring other gas reference materials.

[0028] Specific embodiment two: Combining Figure 2 and Figure 3 to illustrate this embodiment, a limiting boss 5 is provided on the lower end surface of the liquid inlet pipe body 2 of this embodiment.

[0029] With such a setting, the limit position of the foam extinguishing plate body 3 is limited, and at the same time, the foam extinguishing plate body 3 is prevented from falling. The other components and connection relationships are the same as those in the first specific embodiment.

[0030] Specific embodiment three: Combining Figures 2 to 5 to illustrate this embodiment, an indented arc-shaped slideway 6 is opened on the outer circumferential side wall of the liquid inlet pipe body 2 of this embodiment, and the arc-shaped slideway 6 is vertically opened. With such a setting, it is convenient for the foam extinguishing plate body 3 to rise and fall smoothly along the liquid inlet pipe body 2, ensuring the foam extinguishing effect. The other components and connection relationships are the same as those in the first or second specific embodiment.

[0031] In this embodiment, the upper part of the liquid inlet pipe body 2 and the bottle mouth of the bottle body 1-1 are fixedly connected by welding.

[0032] Specific embodiment four: Combining Figures 2 to 5 to illustrate this embodiment, the pores 4 on the foam extinguishing plate body 3 of this embodiment are conical pores. With such a setting, it is convenient for the large-end pores to contact more bubbles preferentially during the rising process of the bubbles, realizing the bursting of a large number of bubbles. At the same time, for local positions with strong flow disturbance, the liquid can also be stirred through the pores. The other components and connection relationships are the same as those in the first, second, or third specific embodiment.

[0033] Specific embodiment five: Combining Figure 4 and Figure 5 to illustrate this embodiment, a plurality of piercing protrusions 7 are processed on the inner wall of the pore 4 of this embodiment. With such a setting, the bursting of bubbles can be accelerated. The other components and connection relationships are the same as those in the first, second, third, or fourth specific embodiment.

[0034] The shape of the puncturing protrusion 7 in this embodiment is a columnar protrusion, a conical protrusion or a triangular protrusion. The mounting positions of the protrusions are arranged in a circumferential direction in a ring shape and all face the center of the air hole, so that when the air bubbles move in the air hole, they can be punctured immediately, improving the defoaming efficiency.

[0035] Specific Embodiment Six: Combining Figure 4 and Figure 5 This embodiment is described. The defoaming assembly of this embodiment further includes a puncturing cover body 8 and a puncturing needle 9. A puncturing cover body 8 is installed above each air hole 4. The puncturing needle 9 is installed on the inner end surface of the puncturing cover body 8, and the tip of the puncturing needle 9 faces the liquid. With such a setting, for the air bubbles that are not punctured, they will be quickly punctured when they touch the puncturing needle 9. The other components and connection relationships are the same as those in Specific Embodiments One, Two, Three, Four or Five.

[0036] Specific Embodiment Seven: Combining Figure 6 This embodiment is described. The puncturing cover body 8 in this embodiment is a hollowed-out cover body plated with an anti-corrosion layer. With such a setting, the hollowing-out can reduce the weight of the entire defoaming plate body 3, facilitating the smooth floating of the defoaming plate body 3. The other components and connection relationships are the same as those in Specific Embodiments One, Two, Three, Four, Five or Six.

[0037] The anti-corrosion layer in this embodiment can ensure that it does not react with the gas or liquid in the bottle after long-term use, improving its service life.

[0038] Specific Embodiment Eight: Combining Figure 4 and Figure 5 This embodiment is described. A ball 10 is slidably embedded at the connection between the outer side wall of the defoaming plate body 3 and the liquid inlet pipe body 2. With such a setting, the friction is small, facilitating the defoaming plate body 3 to float after receiving the buoyancy. The other components and connection relationships are the same as those in Specific Embodiments One, Two, Three, Four, Five or Six.

[0039] Specific Embodiment Nine: Combining Figure 1To describe this embodiment, the piping control component of this embodiment includes a first pipeline 11, a first needle valve 12, a second needle valve 13, a third needle valve 14, a second pipeline 15, a first three-way valve 16, a second three-way valve 17, a third three-way valve 18, a fourth three-way valve 19, a fourth needle valve 20, a fifth needle valve 21, a first metering pipe 22, a second metering pipe 23, a third metering pipe 24, a fourth metering pipe 25, a third pipeline 26, a fourth pipeline 27, a fifth pipeline 28, a sixth pipeline 29, a seventh pipeline 30, an eighth pipeline 31, and a pressure gauge 32. One end of the first pipeline 11 is fixedly connected to a sealing joint, and the other end of the first pipeline 11 is respectively equipped with a first needle valve 12 and a second needle valve 13. The end of the second needle valve 13 is connected to one end of the second pipeline 15, and the other end of the second pipeline 15 is connected to the cylinder 1. The third needle valve 14, the first three-way valve 16, the second three-way valve 17, the third three-way valve 18, and the fourth three-way valve 19 are sequentially connected through the first metering pipe 22, the second metering pipe 23, the third metering pipe 24, and the fourth metering pipe 25. The end of the fourth three-way valve 19 is connected to the eighth pipeline 31. The fifth needle valve 21 and the pressure gauge 32 are installed on the eighth pipeline 31. The third needle valve 14 is connected to the first pipeline 11 between the first needle valve 12 and the second needle valve 13 through the third pipeline 26. The first three-way valve 16 is connected to the second pipeline 15 through the fourth pipeline 27. The second three-way valve 17 is connected to the second pipeline 15 through the fifth pipeline 28. The third three-way valve 18 is connected to the second pipeline 15 through the sixth pipeline 29. The fourth three-way valve 19 is connected to the second pipeline 15 through the seventh pipeline 30. A fourth needle valve 20 is installed between the eighth pipeline 31 and the second pipeline 15.

[0040] With such a setting, it is convenient to control the configuration amount of the gas reference material according to the actual situation. Other compositions and connection relationships are the same as those in the first, second, third, fourth, fifth, or sixth specific embodiments.

[0041] Specific embodiment ten: In combination with Figure 1 To describe this embodiment, the vacuum pumping component of this embodiment includes a vacuum pump 33, a ninth pipeline 34, a fifth needle valve 35, and a tenth pipeline 36. One end of the ninth pipeline 34 is connected to the vacuum pump 33, and the other end of the ninth pipeline 34 is connected to the second pipeline 15. The fifth needle valve 35 is installed on the ninth pipeline 34. One end of the tenth pipeline 36 is connected to the vacuum pump 33, and the other end of the tenth pipeline 36 is connected to the eighth pipeline 31. With such a setting, it is convenient to achieve the functions of vacuum pumping and pipeline cleaning. Other compositions and connection relationships are the same as those in the first, second, third, fourth, fifth, or sixth specific embodiments.

[0042] In combination with Figures 1 to 6 To describe the working principle of the present invention:

[0043] The first metering pipe 22, the second metering pipe 23, the third metering pipe 24, and the fourth metering pipe 25 are all metering pipes with standard water volumes of 1 ml (10×10 -6 Nm 3 ), taking the standard gas of 5 ppm hydrogen component and nitrogen as the balance gas at 10 MPa and 40 L as an example to illustrate:

[0044] The working principle of the present invention is: According to P1V1 / T1 = P2V2 / T2, it is calculated that the total volume of gas in the final steel cylinder is 4 Nm3, and the hydrogen with a content of 5 ppm is 2.0×10 -5 Nm 3 .

[0045] Step 1: Vacuum the inside of the pipeline:

[0046] Close the first needle valve 12 and the fifth needle valve 21, open the second needle valve 13, the third needle valve 14, and the fourth needle valve 20, open the first three-way valve 16, the second three-way valve 17, the third three-way valve 18, and the fourth three-way valve 19, so that the first metering pipe 22, the second metering pipe 23, the third metering pipe 24, the fourth metering pipe 25, the eighth pipeline 31, and the second pipeline 15 are connected. Start the vacuum pump 33 to vacuum the piping control assembly, and at the same time of vacuuming, clean the pipeline;

[0047] Step 2: Introduce hydrogen:

[0048] According to the vacuum degree displayed by PI01, after the air in the pipeline is exhausted, close the second needle valve 13, the fourth needle valve 20, and the fifth needle valve 35, and introduce hydrogen through the first pipeline 11;

[0049] Step 3: Extract hydrogen:

[0050] According to the pressure in the metering pipe displayed by PI01, when the pressure in the 1 mL metering pipe is 2 MPa, the volume of hydrogen is 2.0×10 - 5 Nm 3 , close the third needle valve 14, open the second needle valve 13 and the fifth needle valve 35, start the vacuum pump 33, and after extracting the hydrogen in the third pipeline 26;

[0051] Step 4: Introduce nitrogen and fill the steel cylinder:

[0052] Close the second needle valve 13 and the fifth needle valve 35. Open the first three-way valve 16 to connect the first metering pipe 22 with the second pipeline 15, and disconnect the first metering pipe 22 from the second metering pipe 23. Introduce nitrogen through the third pipeline 26. The nitrogen passes through the first metering pipe 22 to flush the hydrogen in it into the steel cylinder. Open the second needle valve 13, and at the same time, the nitrogen flushes into the steel cylinder through the first metering pipe 22 and the second pipeline 15. When the PI pressure shows 10 MPa, close the nitrogen and the cylinder valve. After the steel cylinder is mixed evenly, calibrate the hydrogen component.

[0053] According to different component contents, charge the component gas into the steel cylinder quantitatively through the first metering pipe 22, the second metering pipe 23, the third metering pipe 24, the fourth metering pipe 25 and the pressure combination. Thus, the rapid configuration of the gas reference material is realized.

[0054] The gas reference material configuration of the present invention can configure one kind of gas or multiple kinds of gases.

[0055] Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Those skilled in the art can also make other changes within the spirit of the present invention and apply them to the fields not mentioned in the present invention. Of course, these changes made according to the spirit of the present invention should be included within the scope claimed by the present invention.

Claims

1. A gas reference material preparation device, comprising a vacuum pumping assembly, characterized in that: It further includes a cylinder (1) and a pipeline control assembly. One end of the pipeline control assembly is connected to an external gas source through a sealing joint, and the other end of the pipeline control assembly is connected to the cylinder (1). The vacuum pumping assembly is connected in parallel to the pipeline control assembly and evacuates the pipeline control assembly; The cylinder (1) includes a cylinder body (1-1) and a defoaming assembly. The defoaming assembly is hermetically inserted into the cylinder body (1-1). The defoaming assembly includes a liquid inlet pipe body (2) and a defoaming plate body (3). The liquid inlet pipe body (2) is hermetically and fixedly installed at the bottle mouth of the cylinder body (1-1). The lower part of the liquid inlet pipe body (2) extends downward and extends into the lower part of the cylinder body (1-1). The defoaming plate body (3) is slidably sleeved on the liquid inlet pipe body (2), and the defoaming plate body (3) floats vertically with the liquid level height as the liquid moves. A plurality of air holes (4) are formed in the defoaming plate body (3), and the air bubbles are punctured when passing through the air holes (4) on the defoaming plate body (3); A limiting boss (5) is provided on the lower end surface of the liquid inlet pipe body (2); An indented arc-shaped slideway (6) is formed on the outer circumferential side wall of the liquid inlet pipe body (2), and the arc-shaped slideway (6) is vertically arranged; The air holes (4) on the defoaming plate body (3) are conical air holes; A plurality of puncturing protrusions (7) are processed on the inner wall of the air hole (4); The defoaming assembly further includes a puncturing cover body (8) and a puncturing needle (9). A puncturing cover body (8) is covered above each air hole (4). The puncturing needle (9) is installed on the inner end surface of the puncturing cover body (8), and the tip of the puncturing needle (9) faces the liquid.

2. The gas standard substance configuration device according to claim 1, characterized in that: The puncturing cover body (8) is a hollow cover body plated with an anti-corrosion layer.

3. The gas standard substance configuration device according to claim 2, characterized in that: A ball (10) is slidably embedded at the connection between the defoaming plate body (3) and the outer side wall of the liquid inlet pipe body (2).

4. The gas reference material preparation device according to claim 3, characterized in that: The pipeline control assembly includes a first pipeline (11), a first needle valve (12), a second needle valve (13), a third needle valve (14), a second pipeline (15), a first three-way valve (16), a second three-way valve (17), a third three-way valve (18), a fourth three-way valve (19), a fourth needle valve (20), a fifth needle valve (21), a first metering pipe (22), a second metering pipe (23), a third metering pipe (24), a fourth metering pipe (25), a third pipeline (26), a fourth pipeline (27), a fifth pipeline (28), a sixth pipeline (29), a seventh pipeline (30), an eighth pipeline (31) and a pressure gauge (32), One end of the first pipeline (11) is fixedly connected to the sealing joint. A first needle valve (12) and a second needle valve (13) are respectively installed at the other end of the first pipeline (11). The end of the second needle valve (13) is connected to one end of the second pipeline (15). The other end of the second pipeline (15) is connected to the cylinder (1), The third needle valve (14), the first metering tube (22), the first three-way valve (16), the second metering tube (23), the second three-way valve (17), the third metering tube (24), the third three-way valve (18), the fourth metering tube (25) and the fourth three-way valve (19) are connected in sequence. The end of the fourth three-way valve (19) is connected to the eighth pipeline (31). The fifth needle valve (21) and the pressure gauge (32) are installed on the eighth pipeline (31). The third needle valve (14) is connected to the first pipeline (11) between the first needle valve (12) and the second needle valve (13) through the third pipeline (26). The first three-way valve (16) is connected to the second pipeline (15) through the fourth pipeline (27). The second three-way valve (17) is connected to the second pipeline (15) through the fifth pipeline (28). The third three-way valve (18) is connected to the second pipeline (15) through the sixth pipeline (29). The fourth three-way valve (19) is connected to the second pipeline (15) through the seventh pipeline (30). A fourth needle valve (20) is installed between the eighth pipeline (31) and the second pipeline (15).

5. The gas reference material preparation device according to claim 1 or 4, characterized in that: The vacuum pumping assembly includes a vacuum pump (33), a ninth pipeline (34), a fifth needle valve (35) and a tenth pipeline (36). One end of the ninth pipeline (34) is connected to the vacuum pump (33), and the other end of the ninth pipeline (34) is connected to the second pipeline (15). The fifth needle valve (35) is installed on the ninth pipeline (34). One end of the tenth pipeline (36) is connected to the vacuum pump (33), and the other end of the tenth pipeline (36) is connected to the eighth pipeline (31).

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