High-precision motion platform based on negative pressure motor hybrid

Abstract

The present invention provides a high-precision motion platform based on negative pressure motor hybrid, including a motor screw mechanism, a large active cylinder, a small active cylinder, a passive cylinder, a functional platform and a support. The motor screw mechanism is arranged on the support and has a first motor and a screw slider. The large active cylinder is arranged on the support and has a large sleeve and a large piston body arranged inside the large sleeve. The large piston body is drive-connected to the screw slider. The small active cylinder is arranged on the support and has a small sleeve and a small piston body; the passive cylinder has a passive cylinder barrel and a passive cylinder piston, and the functional platform is arranged on the passive cylinder barrel; the controller is respectively connected to the first motor and the second motor signals. The present invention realizes that the passive cylinder drives the functional platform to move by adjusting the fluid in the large sleeve and the small sleeve to enter the passive cylinder barrel respectively, so as to achieve rapid and precise adjustment of the position of the functional platform and has the advantages of low noise, high precision and no vibration interference.

Description

Technical Field

[0001] The present invention relates to the technical field of mechanical equipment, and in particular to a high-precision motion platform based on negative pressure motor hybrid. Background Art

[0002] With technological advancements, automated production equipment is becoming increasingly popular. Motion platforms, for example, are often used to implement various functions in many automated production equipment. Linear motion platforms, for example, are driven by motors or pneumatic cylinders to achieve linear motion. When driven by a motor, the motor typically drives a lead screw to convert rotary motion into linear motion. For example, in laser cutting and laser marking equipment, a linear motion platform transports the workpiece to a predetermined location, where it is then processed.

[0003] However, it is often difficult to achieve high-precision drive in traditional motion platforms using a motor to drive a lead screw. Either the accuracy is insufficient and the workpiece processing accuracy cannot be guaranteed, or the structure is complex, with defects such as low precision, susceptibility to vibration interference, and inconvenience in use. Summary of the Invention

[0004] In view of the defects in the prior art, the purpose of the present invention is to provide a high-precision motion platform based on negative pressure motor hybrid.

[0005] According to the present invention, a high-precision motion platform based on a negative pressure motor hybrid is provided, comprising:

[0006] A support having a first slide rail;

[0007] a motor-screw mechanism, arranged on the support and comprising a first motor, a screw drivingly connected to the first motor, and a screw slider threadedly engaged with the screw;

[0008] a large active cylinder, arranged on the support and comprising a large sleeve and a large piston body disposed within the large sleeve, wherein a first enclosed space is formed between the large piston body and the large sleeve, and wherein the large piston body is drivingly connected to the lead screw slider so that when the lead screw slider moves, the large piston body can be driven to move, thereby adjusting the size of the first enclosed space;

[0009] A small active cylinder is arranged on the support and comprises a small sleeve, a small piston body arranged inside the small sleeve, and a power assembly capable of driving the small piston body to move, wherein a second closed space is formed between the small sleeve and the small piston body;

[0010] a passive cylinder comprising a passive cylinder barrel slidably engaged with the first slide rail, a passive cylinder piston and a passive piston rod disposed in the passive cylinder barrel, wherein a third enclosed space is formed between the passive cylinder barrel and the passive cylinder piston, one end of the passive piston rod being fixed to the support, and the other end of the passive piston rod extending into the interior of the passive cylinder barrel and connected to the passive cylinder piston, the third enclosed space being connected to the first enclosed space and the second enclosed space via a first valve and a second valve, respectively;

[0011] A functional platform is arranged on the passive cylinder;

[0012] The controller is signal-connected to the first motor, the second motor, the first valve, and the second valve respectively.

[0013] Preferably, the inner diameter of the passive cylinder is R1, and the inner diameter of the small active cylinder is R2.

[0014] Preferably, the inner diameter of the passive cylinder is smaller than or equal to the inner diameter of the large active cylinder.

[0015] Preferably, a displacement sensor is further included, and the displacement sensor is arranged on the passive cylinder so that when the passive cylinder drives the functional platform to move, the displacement of the functional platform can be obtained through the displacement sensor.

[0016] Preferably, the power assembly includes a second motor, and the second motor is a linear motor.

[0017] Preferably, the support is further provided with a second slide rail, and the lead screw slider matches the second slide rail.

[0018] Preferably, the third enclosed space is connected to the first enclosed space and the second enclosed space through a fluid conduit, and the fluid conduit is a flexible structure.

[0019] Preferably, a sealing structure is provided between the large piston body and the large sleeve, between the small piston body and the small sleeve, and between the passive cylinder piston and the passive cylinder barrel.

[0020] Preferably, the first enclosed space, the second enclosed space and the third enclosed space are all filled with fluid, and the fluid is liquid or gas.

[0021] Preferably, the large piston body and the lead screw slider are connected by magnetic drive.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] 1. In the present invention, the inner diameter of the passive cylinder is smaller than or equal to the inner diameter of the large sleeve and larger than the inner diameter of the small sleeve. By adjusting the fluid in the large sleeve and the small sleeve to enter the interior of the passive cylinder respectively or extracting the fluid in the passive cylinder to form a negative pressure inside, the passive cylinder drives the functional platform to move in both directions, thereby realizing rapid and precise adjustment of the position of the functional platform, solving the defect of inaccurate screw drive adjustment, and having the advantages of low noise, high drive precision, and no vibration interference.

[0024] 2. The present invention uses a flexible fluid conduit to transfer fluid, so that the passive cylinder can be arranged and moved at different positions in space, and has good versatility. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Other features, objects and advantages of the present invention will become more apparent upon reading the detailed description of non-limiting embodiments with reference to the following drawings:

[0026] Figure 1 This is a schematic top view of the structure of the present invention, wherein the functional platform is not shown;

[0027] Figure 2 This is a schematic top view of the structure of the present invention, wherein the functional platform has been drawn;

[0028] Figure 3 for Figure 2 Schematic diagram of the AA section structure;

[0029] Figure 4 for Figure 2 Schematic diagram of the side structure;

[0030] Figure 5 This is a schematic diagram of the structural cross-section of the passive cylinder.

[0031] The figure shows:

[0032] Motor screw mechanism 1

[0033] The first motor 11

[0034] Screw 12

[0035] Screw slider 13

[0036] Coupling 14

[0037] Screw rear support 15

[0038] Screw front support 16

[0039] Large active cylinder 2

[0040] Small active cylinder 3

[0041] Small sleeve 31

[0042] Small piston body 32

[0043] Second motor 33

[0044] Second confined space 34

[0045] Second valve 35

[0046] Small piston body push rod 36

[0047] Passive cylinder 4

[0048] Passive cylinder 41

[0049] Passive cylinder piston 42

[0050] Passive piston rod 43

[0051] The third confined space 44

[0052] The third valve 45

[0053] Sealing ring 46

[0054] Functional Platform 5

[0055] Support 6

[0056] First slide rail 61 DETAILED DESCRIPTION

[0057] The present invention will be described in detail below with reference to specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but are not intended to limit the present invention in any form. It should be noted that, for those skilled in the art, several changes and improvements can be made without departing from the scope of the present invention. These all fall within the scope of protection of the present invention.

[0058] The present invention provides a high-precision motion platform based on negative pressure motor hybrid, including a motor screw mechanism 1, a large active cylinder 2, a small active cylinder 3, a passive cylinder 4, a functional platform 5, a displacement sensor and a support 6, wherein the support 6 has a first slide rail 61 and a second slide rail; the motor screw mechanism 1 is arranged on the support 6 and has a first motor 11, a screw 12 driven by the first motor 11 and a screw slider 13 threadedly engaged with the screw 12, such as Figure 3 As shown, the front end of the screw 12 is assembled on the front screw support 16 through a bearing, and the rear end of the screw 12 is assembled on the rear screw support 15 through a bearing and passes through the rear screw support 15 and is driven and connected to the first motor 11 through a coupling 14. The screw slider 13 is mounted on the screw 12, and the bottom of the screw slider 13 slides with the second slide rail. When the first motor 11 rotates, it can drive the screw 12 to rotate. At this time, the screw slider 13 can be driven to move along the axial direction of the screw 12. The second slide rail plays a role in guiding the movement of the screw slider 13 to prevent the screw slider 13 from flipping over.

[0059] like Figure 1 、 Figure 2 As shown, the large active cylinder 2 is arranged on the support 6 and has a large sleeve and a large piston body arranged inside the large sleeve. A first enclosed space is formed between the large piston body and the large sleeve. The large piston body is driven and connected to the screw slider 13. Preferably, the large piston body and the screw slider 13 are magnetically driven and connected. There is a magnetic attraction between the large piston body and the screw slider 13. When the screw slider 13 moves, it can drive the large piston body to move synchronously. As for the magnetic drive connection between the large piston body and the screw slider 13, it belongs to the existing technology and belongs to the magnetic piston rodless technology. For example, the magnetic piston rodless technology disclosed in "Magnetic Rodless Cylinder", "Manufacturing Technology and Machine Tools", pages 43-44, Liao Yuanmou, 1991, will not be repeated here. By driving the screw slider 13 to move, the large piston body can be driven to move synchronously, and then when the screw slider 13 moves, it can drive the large piston body to move, thereby adjusting the space size in the first enclosed space.

[0060] like Figure 1 、 Figure 3 As shown, the small active cylinder 3 is preferably detachably arranged on the support 6. The small active cylinder 3 has a small sleeve 31, a small piston body 32 arranged inside the small sleeve 31, and a power component that can drive the small piston body 32 to move. A second enclosed space 34 is formed between the small sleeve 31 and the small piston body 32. The power component includes a second motor 33. The second motor 33 is preferably a linear motor. The operation of the second motor 33 can drive the small piston body push rod 36 to move in the axial direction, and then drive the small piston body 32 to move in the axial direction, thereby changing the size of the second enclosed space 34.

[0061] like Figure 1 、 Figure 5 As shown, the passive cylinder 4 has a passive cylinder barrel 41 that slides with the first slide rail 61, a passive cylinder piston 42 and a passive piston rod 43 arranged in the passive cylinder barrel 41, and a third enclosed space 44 is formed between the passive cylinder barrel 41 and the passive cylinder piston 42. The first enclosed space, the second enclosed space 34 and the third enclosed space 44 are all filled with fluid, which is liquid or gas. One end of the passive piston rod 43 is fixed on the support 6, and the other end of the passive piston rod 43 extends to the interior of the passive cylinder barrel 41 and is connected to the passive cylinder piston 42.

[0062] It should be noted that sealing structures are provided between the large piston body and the large sleeve, between the small piston body 32 and the small sleeve 31, and between the passive cylinder piston 42 and the passive cylinder 41. For example, a sealing ring 46 is provided between the passive cylinder 41 and the passive cylinder piston 42, so that the third enclosed space 44 is separated from the outside. When fluid enters the third enclosed space 44, it can drive the passive cylinder 41 to slide to the left along the first slide rail 61. When the fluid in the third enclosed space 44 is extracted, the fluid in the third enclosed space 44 decreases, the internal pressure decreases, and a negative pressure environment is created. Under the action of the external atmospheric pressure, the passive cylinder 41 is pushed to the right, thereby reducing the volume of the third enclosed space 44. The functional platform 5 is arranged on the passive cylinder 41. By driving the passive cylinder 41 to move, the functional platform 5 can be driven to move synchronously, thereby adjusting the position of the functional platform 5.

[0063] The controller is respectively connected to the first motor 11, the second motor 33, the first valve 21, and the second valve 35 by signals. The controller is equivalent to the headquarters of the present invention, which can control the operation or stop of the first motor 11 and the second motor 33, and can also control the opening or closing of the first valve 21 and the second valve 35 according to control needs. The third confined space 44 is connected to the first confined space and the second confined space 34 through the first valve 21 and the second valve 35, respectively.

[0064] Specifically, the inner diameter of the passive cylinder 4 is smaller than or equal to the inner diameter of the large active cylinder 2 and larger than the inner diameter of the small active cylinder 3. The inner diameter of the passive cylinder 4 is R1, and the inner diameter of the small active cylinder 3 is R2. The value of can be reasonably designed according to the requirements of high-precision motion platform, for example For example The inner diameter of the passive cylinder 41 is preferably comparable to the inner diameter of the large active cylinder 2. For example, the inner diameters of the two cylinders are equal. For another example, the inner diameter of the large active cylinder 2 is slightly larger than the inner diameter of the passive cylinder 41. For example, the ratio of the inner diameter of the large active cylinder 2 to the inner diameter of the passive cylinder 41 is 1.2:1, or 2:1. By controlling the movement of the first motor 11, the fluid in the first confined space can be controlled to enter the third confined space 44 or flow out of the third confined space 44, thereby driving the movement of the passive cylinder 41, thereby achieving the purpose of roughly positioning the functional platform 5. By controlling the fluid in the second confined space 34 to enter the third confined space 44 or flow out of the third confined space 44, thereby driving the movement of the passive cylinder 41, the purpose of precisely positioning the functional platform 5 is achieved, which can achieve both rapid positioning of the functional platform 5 and precise positioning of the functional platform 5.

[0065] Specifically, the displacement sensor is preferably configured on the passive cylinder 41 so that when the passive cylinder 41 drives the functional platform 5 to move, the displacement of the functional platform 5 can be obtained through the displacement sensor, and then the accurate position of the functional platform 5 is obtained. The displacement sensor is connected to the controller signal, and the displacement sensor transmits the collected displacement information to the controller, and then the controller controls the accurate movement of each motor or valve.

[0066] It should be noted that the third enclosed space 44 is connected to the first enclosed space and the second enclosed space 34 through a fluid conduit. The fluid conduit is a flexible structure. The flexible structure of the fluid conduit connected to the passive cylinder 41 is conducive to unrestricted movement of the passive cylinder 41.

[0067] In order to facilitate the control process and maintenance, a third valve 45 can be set between the passive cylinder 41 and the fluid conduit 11. The first valve 21, the second valve 35, and the third valve 45 can all be set as solenoid valves to achieve remote control.

[0068] like Figures 1 to 5 As shown, the working principle of the present invention is as follows:

[0069] By controlling the stopping and running of the first motor 11 and the second motor 33 and the opening and closing of the first valve 21 and the second valve 35, the position of the functional platform 5 can be adjusted quickly and accurately. Specifically, when the first motor 11 is controlled to rotate forward, the screw slider 13 can be driven to move along the axial direction of the screw 12 in the direction away from the first motor 11. The magnetic force of the screw slider 13 drives the large piston body to move, and the first confined space becomes smaller. At this time, the first valve 21 is opened, and the fluid in the first confined space is pushed into the third confined space 44, thereby pushing the passive cylinder 41 to drive the functional platform 5 It moves in the direction away from the passive cylinder piston 42. When the position feedback function platform 5 is close to the target position through the displacement sensor, the operation of the first motor 11 is stopped, the second motor 33 is started to rotate forward and the second valve 35 is opened. At this time, the small piston body 32 moves in the direction away from the second motor 33, the volume of the second confined space 34 becomes smaller, and the fluid in the second confined space 34 enters the third confined space 44, thereby pushing the passive cylinder 41 to drive the functional platform 5 to move in the direction away from the passive cylinder piston 42, thereby accurately positioning the position of the functional platform 5.

[0070] When it is necessary to drive the passive cylinder 41 to drive the functional platform 5 to move toward the direction close to the passive cylinder piston 42 to adjust the position, it is necessary to control the first motor 11 and the second motor 33 to reverse respectively. At this time, the fluid in the third confined space 44 is extracted, and the third confined space 44 forms a negative pressure. Under the action of the external atmospheric pressure, the passive cylinder 41 can be driven to drive the functional platform 5 to move toward the direction close to the passive cylinder piston 42, and then the position of the functional platform 5 can be coarsely and finely adjusted to achieve precise adjustment of the position of the functional platform 5.

[0071] In the description of this application, it should be understood that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0072] The above describes specific embodiments of the present invention. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art may make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention. The embodiments of this application and the features in the embodiments may be combined with each other in any manner unless there is a conflict.

Claims

1. A high-precision motion platform based on negative pressure motor hybrid, characterized in that: include: A support (6) having a first slide rail (61); A motor-screw mechanism (1) is arranged on the support (6) and comprises a first motor (11), a screw (12) drivingly connected to the first motor (11), and a screw slider (13) threadedly engaged with the screw (12); A large active cylinder (2) is arranged on the support (6) and comprises a large sleeve and a large piston body arranged inside the large sleeve, wherein a first closed space is formed between the large piston body and the large sleeve, and the large piston body is drivingly connected to a screw slider (13) so that when the screw slider (13) moves, the large piston body can be driven to move, thereby adjusting the size of the first closed space; A small active cylinder (3) is arranged on the support (6) and comprises a small sleeve (31), a small piston body (32) disposed inside the small sleeve (31), and a power assembly capable of driving the small piston body (32) to move, wherein a second closed space (34) is formed between the small sleeve (31) and the small piston body (32); A passive cylinder (4) comprises a passive cylinder barrel (41) that is slidably engaged with the first slide rail (61), a passive cylinder piston (42) and a passive piston rod (43) arranged in the passive cylinder barrel (41); a third closed space (44) is formed between the passive cylinder barrel (41) and the passive cylinder piston (42); one end of the passive piston rod (43) is fixed to the support (6); the other end of the passive piston rod (43) extends into the interior of the passive cylinder barrel (41) and is connected to the passive cylinder piston (42); the third closed space (44) is connected to the first closed space and the second closed space (34) via a first valve (21) and a second valve (35), respectively; A functional platform (5) is arranged on the passive cylinder (41); The controller is respectively connected to the first motor (11), the second motor (33), the first valve (21), and the second valve (35) via signals.

2. The high-precision motion platform based on negative pressure motor hybrid according to claim 1 is characterized in that: The inner diameter of the passive cylinder (4) is R1, and the inner diameter of the small active cylinder (3) is R2.

3. The high-precision motion platform based on negative pressure motor hybrid according to claim 1 is characterized in that: The inner diameter of the passive cylinder (4) is smaller than or equal to the inner diameter of the large active cylinder (2).

4. The high-precision motion platform based on negative pressure motor hybrid according to claim 3 is characterized in that: It also includes a displacement sensor, which is arranged on the passive cylinder (41) so that when the passive cylinder (41) drives the functional platform (5) to move, the displacement of the functional platform (5) can be obtained through the displacement sensor.

5. The high-precision motion platform based on negative pressure motor hybrid according to claim 1 is characterized in that: The power assembly includes a second motor (33), and the second motor (33) is a linear motor.

6. The high-precision motion platform based on negative pressure motor hybrid according to claim 1 is characterized in that: The support (6) is also provided with a second slide rail, and the lead screw slider (13) matches the second slide rail.

7. The high-precision motion platform based on negative pressure motor hybrid according to claim 1 is characterized in that: The third enclosed space (44) is connected to the first enclosed space and the second enclosed space (34) via a fluid conduit, and the fluid conduit is a flexible structure.

8. The high-precision motion platform based on negative pressure motor hybrid according to claim 1 is characterized in that: Sealing structures are provided between the large piston body and the large sleeve, between the small piston body (32) and the small sleeve (31), and between the passive cylinder piston (42) and the passive cylinder (41).

9. The high-precision motion platform based on negative pressure motor hybrid according to claim 1 is characterized in that: The first enclosed space, the second enclosed space (34), and the third enclosed space (44) are all filled with fluid, and the fluid is liquid or gas.

10. The high-precision motion platform based on negative pressure motor hybrid according to claim 1, characterized in that: The large piston body is connected to the lead screw slider (13) by magnetic drive.

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