An Attenuator Processing Method and Equipment

Abstract

The present invention belongs to the technical field of traveling wave tube processing, and specifically provides a method and device for processing an attenuator, including a housing, a gas supply assembly, a heating mechanism, and a clamping mechanism. A vacuum chamber is formed inside the housing; the gas supply assembly can supply n-heptane gas to the vacuum chamber; the heating mechanism is arranged in the vacuum chamber and can radiate heat outward; the clamping mechanism can position and clamp a rod so that the rod extends along a first direction and approaches a heating surface, so that the rod can receive the heat radiated from the heating mechanism; the heating mechanism has a wedge-shaped heat conducting plate, the outer side surface of the wedge-shaped heat conducting plate forms a heating surface, and the thickness of the wedge-shaped heat conducting plate changes sequentially along the first direction to adjust the distance between any position of the rod and the heating surface, and further adjust the temperature of different positions of the rod.

Description

Technical Field

[0001] The present invention belongs to the technical field of traveling wave tube processing, and specifically provides a method and equipment for processing an attenuator. Background Art

[0002] A traveling wave tube is a wide-band high-gain device. In order to prevent oscillations caused by internal reflections, an attenuator needs to be provided inside the tube to cut off the feedback path. One type of attenuator structure is a carbon film attenuator, which pyrolyzes compounds such as n-heptane in a vacuum to deposit carbon on a dielectric rod, forming a carbon thin film concentrated attenuator.

[0003] The inventors have learned that in related technical solutions, in order to control the carbon film thickness of the tapered section of the attenuator, a baffle or other shielding member is provided in a vacuum coating machine. The baffle is located between the evaporation source and the clamping rod. When the baffle shields the corresponding position of the clamping rod, the clamping rod cannot be coated. The thickness of the coating at that position is controlled by controlling the exposure time of the corresponding area of the clamping rod in the chamber of the vacuum coating machine. However, in this solution, the single movement distance of the baffle is 0.5 mm, resulting in the carbon film thickness of the tapered section of the clamping rod not changing uniformly, but showing a multi-step stepped jump in the carbon film thickness. Summary of the Invention

[0004] The purpose of the present invention is to provide a method and equipment for processing an attenuator to at least solve one of the above technical problems.

[0005] To solve the above problems in the prior art, one or more embodiments of the present invention provide an attenuator processing equipment, including a housing, a gas supply component, a heating mechanism, and a clamping mechanism. A vacuum chamber is formed inside the housing; the gas supply component can supply n-heptane gas to the vacuum chamber; the heating mechanism is arranged in the vacuum chamber and can radiate heat outward; the clamping mechanism can position and clamp the clamping rod and drive the clamping rod to rotate, so that the clamping rod extends along a first direction and approaches the heating surface, and further enables the clamping rod to receive the heat radiated from the heating mechanism. The heating mechanism has a wedge-shaped heat conducting plate, the outer side surface of the wedge-shaped heat conducting plate forms a heating surface, and the thickness of the wedge-shaped heat conducting plate changes sequentially along the first direction to adjust the distance between any position of the clamping rod and the heating surface, and further adjust the temperature of different positions of the clamping rod.

[0006] One or more embodiments of the present invention provide an attenuator processing method, including the following steps:

[0007] Cover the positions on the clamping rod where no carbon film needs to be plated with stickers;

[0008] Open the housing, and bring the area of the clamping rod that needs to be plated with carbon film close to the heating surface; move and position the clamping rod along the first direction so that the area of the clamping rod that needs to be plated with carbon film is adapted to the radiation heating area of the heating mechanism;

[0009] Fix the clamping rod using the clamping mechanism, close and seal the housing;

[0010] Start the heating mechanism and supply n-heptane gas to the vacuum chamber;

[0011] The heating mechanism radiates heat to the positioned clamping rod through the wedge-shaped heat-conducting surface, and the temperature at the set position along the length direction of the clamping rod varies in a gradient manner due to the different distances from the heating surface;

[0012] The temperatures at different positions of the clamping rod are different, and thus the thickness of the carbon film formed by the thermal decomposition of n-heptane at the set area of the clamping rod changes sequentially along the first direction.

[0013] Advantages of the above one or more technical solutions:

[0014] In this solution, heat is radiated to the clamping rod through the heating surface of the wedge-shaped heat-conducting plate in the heating mechanism. Since the thickness of the wedge-shaped heat-conducting plate changes sequentially along the first direction to adjust the distance between any position of the clamping rod and the heating surface, the temperature at different positions of the clamping rod can be adjusted accordingly; by adjusting the surface temperature at different positions of the clamping rod, the mass of n-heptane decomposed on the surface of the clamping rod can be adjusted, and thus a carbon film with a gradually changing thickness can be formed on the clamping rod.

[0015] In this solution, the clamping rod can rotate along its own axis under the clamping and positioning of the clamping mechanism; this setting method enables the clamping rod to be heated evenly; at any length of the clamping rod, the thickness of the carbon film along the circumferential direction of the clamping rod is the same.

[0016] In this solution, the heating mechanism heats the clamping rod by means of radiative heating. By controlling the parameters of the inclined surface of the wedge-shaped heat-conducting plate, the distance between the clamping rod and the heating surface can be adjusted, so that the heat radiated to the clamping rod is different, and thus the temperature of the clamping rod changes evenly in the gradual change section. When the temperatures at each position of the clamping rod along the length direction change evenly, the thickness of the carbon film formed by decomposition on the surface of the clamping rod will change evenly, forming a uniform section of the attenuator. Compared with the method of gradually exposing the clamping rod using a shielding member, in this solution, the temperature of the gradual change section of the clamping rod can change evenly, and there will be no stepped jump in the thickness of the carbon film. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The following describes some embodiments of the present application with reference to the drawings, in which:

[0018] Figure 1 is the internal schematic diagram in the side view direction of the overall structure in the embodiment of the present invention;

[0019] Figure 2 is the internal schematic diagram in the top view direction of the overall structure in the embodiment of the present invention;

[0020] Figure 3Internal schematic diagrams of two heating mechanisms used in pairs in the embodiments of the present invention;

[0021] Figure 4 Schematic diagram when the wedge-shaped heat conducting plate is rotatably connected to the heat insulating member in the embodiments of the present invention;

[0022] Figure 5 Schematic diagram of the clamping mechanism positioning the clamping rod in the embodiments of the present invention;

[0023] Figure 6 Schematic diagram of installing the clamping rod at the base in the embodiments of the present invention;

[0024] Figure 7 is Figure 6 Enlarged structural schematic diagram of part A in;

[0025] Figure 8 Schematic diagram of the air supply mechanism communicating with the vacuum chamber in the embodiments of the present invention.

[0026] List of reference numerals: 1, clamping rod; 2, pressing plate; 3, positioning column; 4, box body; 5, heat insulation cavity; 6, heat insulation ceramic; 7, wedge-shaped heat conducting plate; 8, heating body; 9, positioning groove; 10, infrared temperature measurement camera; 11, quartz observation window; 12, vacuum sealing ring; 13, air inlet; 14, power cord; 15, air extraction port; 16, vacuum chamber; 17, sealing seat; 18, outer shell; 19, heating mechanism; 20, vacuum pump; 21, vacuum valve; 22, flow controller; 23, n-heptane; 24, constant temperature water bath; 25, base; 251, support roller; 252, rotating shaft; 253, installation groove; 254, belt pulley; 255, belt; 256, driving motor. Detailed implementation manners

[0027] Those skilled in the art should understand that the embodiments described below are only the preferred embodiments of the present application, and the preferred embodiments are only used to explain the technical principle of the present application and are not used to limit the protection scope of the present application.

[0028] It should be noted that in the description of the present application, the terms indicating directions or positional relationships such as "center", "upper", "lower", "top", "bottom", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings. This is only for convenience of description and does not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present application. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0029] In addition, it should be noted that in the description of the present application, unless otherwise clearly specified and limited, the terms "installation" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can also be the communication inside two components. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0030] As Figure 1-8 shown, a typical embodiment of the present application provides an attenuator processing device, including a housing 18, a gas supply assembly, a heating mechanism 19, and a clamping mechanism. A vacuum chamber 16 is formed inside the housing 18; the gas supply assembly can supply n-heptane 23 gas to the vacuum chamber 16; the heating mechanism 19 is arranged in the vacuum chamber 16, and the heating mechanism 19 can radiate heat outward; the clamping mechanism can position and clamp the rod 1 and drive the rod 1 to rotate self, so that the rod 1 extends along the first direction and approaches the heating surface, and further enables the rod 1 to receive the heat radiated from the heating mechanism 19.

[0031] In this embodiment, the housing 18 is integrally in a box structure, one end of the housing 18 is open, and a sealing seat 17 is detachably installed at the opening. The sealing seat 17 can be hermetically installed at the opening position. When the sealing seat 17 is removed from the opening, the housing 18 is in an open state. At this time, the heating mechanism 19, the clamping mechanism, and the rod 1 to be coated with a carbon film can be installed in the inner cavity of the housing 18. In some other structural forms, the housing 18 is integrally in a box structure, and the housing 18 is evenly divided into two sub-housings, and the two sub-housings are detachably and hermetically connected. In order to achieve the seal between the sealing seat 17 and the housing 18, a vacuum sealing ring 12 is provided between the two.

[0032] In this embodiment, the clamping mechanism includes a base 25. There are a plurality of positioning grooves 9 on the base 25, and a clamping rod 1 is arranged in each positioning groove 9; an installation groove 253 is also provided on the base 25, and a plurality of support roller 251 assemblies are arranged in the installation groove 253. Each support roller 251 assembly corresponds to a positioning groove 9. Each support roller 251 assembly includes two support rollers 251 rotatably installed in the installation groove 253 through a rotating shaft 252. The rotation axis of the support roller 251 is parallel to the extension direction of the positioning groove 9. One of the support rollers 251 can rotate driven by an external drive, and then the support roller 251 assembly forms a rotation drive assembly, and the rotation drive assembly can drive the clamping rod 1 to rotate along its own axis.

[0033] Specifically, the end of the clamping rod 1 is lapped at the two support roller 251 assemblies and supported by the upper surface of the support roller 251. The upper surface of the base 25 is provided with a pressing plate 2, which can press the clamping rod 1 from above, so that the frictional force between the clamping rod 1 and the support roller 251 is greater than a set value. When the support roller 251 rotates, the clamping rod 1 is driven by the frictional force transmitted by the support roller 251 and then rotates around its own axis.

[0034] To facilitate restricting the horizontal movement of the pressing plate 2 and the base 25, a vertical positioning post 3 is provided at the base 25, and the pressing plate 2 is provided with a positioning hole adapted to the positioning post 3. The positioning post 3 is inserted into the positioning hole, so that the pressing plate 2 can only move vertically relative to the base 25.

[0035] To drive the corresponding support roller 251 in the support roller 251 assembly, a belt pulley 254 is coaxially arranged at each support roller 251, and the corresponding belt pulleys 254 are connected in sequence by a belt 255. When the belt pulley 254 at one of the support rollers 251 is driven by a drive motor 256, the remaining support rollers 251 obtain power through the belt drive assembly composed of the corresponding belt 255 and belt pulley 254.

[0036] In some other structural forms, a drive motor 256 can also be arranged at the support roller 251 that needs to obtain driving force in each support roller 251 assembly, and the multiple drive motors 256 respectively drive the corresponding support rollers 251 to rotate.

[0037] In one of the structural forms, a track along the first direction can be arranged in the outer shell 18, and the clamping mechanism is slidably installed in the vacuum chamber 16 of the outer shell 18 through the track. By sliding the clamping mechanism along the first direction, the clamping rod 1 is driven to move along the first direction, so as to adjust the positional relationship between the position of the clamping rod 1 to be coated and the heating area where the heating surface is located in the heating mechanism 19.

[0038] In some other structural forms, a rotating sleeve can be rotatably installed in the installation groove 253 through a bracket. The central axis direction of the rotating sleeve is parallel to the positioning groove 9. The middle part of the clamping rod 1 is nested in the positioning groove 9, and one end of the clamping rod 1 is inserted into the rotating sleeve. The limit between the rotating sleeve and the clamping rod 1 is realized through frictional force. A plurality of drive motors 256 are arranged in the installation groove 253, and the corresponding drive motors 256 respectively drive the rotating sleeve to rotate.

[0039] The heating mechanism 19 has a wedge-shaped heat conducting plate 7. The outer side surface of the wedge-shaped heat conducting plate 7 forms a heating surface, and the thickness of the wedge-shaped heat conducting plate 7 changes sequentially along the first direction to adjust the distance between any position of the clamping rod 1 and the heating surface, so as to adjust the temperature of different positions of the clamping rod 1.

[0040] In this embodiment, the heating surface of the wedge-shaped heat conducting plate 7 includes a straight surface and an inclined surface that are spliced together, and the straight surface is parallel to the first direction.

[0041] In this embodiment, the heating mechanisms 19 are arranged in pairs. The wedge-shaped heat conducting plates 7 of the two heating mechanisms 19 arranged in pairs are arranged oppositely and have the same thickness change trend along the first direction.

[0042] In this embodiment, the heating mechanism 19 includes a box body 4. One end of the box body 4 is open, and a wedge-shaped heat conducting plate 7 is installed at the opening. A heating body 8 is arranged in the inner cavity of the box body 4. The heating body 8 is attached to the wedge-shaped heat conducting plate 7. There is a gap between the heating body 8 and the inner wall of the box body 4. The gap here forms a heat insulation cavity 5 inside the box body 4. A heat insulation member is installed between the wedge-shaped heat conducting plate 7 and the inner wall of the box body 4. In some structural forms, the heat insulation member can adopt a heat insulation ceramic 6; in other structural forms, heat insulation members made of materials such as glass fiber and asbestos can also be adopted under the condition of meeting the use requirements.

[0043] In some structural forms, the heating body 8 can adopt a heating resistance wire, and the heating resistance wire is powered and heated through a power cord 14; in other structural forms, electromagnetic induction heating and other methods can also be adopted under the condition of meeting the use requirements.

[0044] In order to facilitate observing the temperature in the vacuum chamber 16 inside the outer shell 18, a quartz observation window 11 and an infrared temperature measurement camera 10 are arranged on the side wall of the outer shell 18. The infrared temperature measurement camera 10 can measure the temperature of corresponding components such as the clamping rod 1 in the vacuum chamber 16 of the outer shell 18.

[0045] This embodiment can generate a heat source by passing direct current through a resistance wire to generate Joule heat, heat the surface of the clamping rod 1 by means of heat radiation, place a wedge-shaped heat conducting plate 7 between the clamping rod 1 and the heat source (i.e., the resistance wire), adjust the temperature of the heat source by adjusting the current output of the DC power supply, control the distance from the heat conducting plate to the surface of the clamping rod 1 by the inclined surface angle of the wedge-shaped heat conducting plate 7, realize the temperature control of different positions on the surface of the clamping rod 1, and additionally perform vacuum heat insulation treatment on the directions where heat transfer is not required, reduce heat dissipation, and reduce power loss.

[0046] In this embodiment, the gas supply assembly includes a first bottle body and a second bottle body whose lower ends are connected through pipe fittings to form a communicating vessel. The first bottle body is arranged vertically and has a constant cross-section along the horizontal direction. The first bottle body is placed in a constant temperature water tank, and the upper end of the first bottle body is communicated with the vacuum chamber 16. The upper end of the second bottle body is communicated with a pressure relief valve through a pipeline, the pressure relief valve is communicated with an exhaust gas pipeline, and the excess volatile gas in the second bottle body is discharged into the exhaust gas pipeline. Specifically, in order to evacuate the vacuum chamber 16 and supply n-heptane 23 to the vacuum chamber 16: an air extraction port 15 is opened on the side wall of the outer shell 18, one end of an air extraction pipe is connected to the air extraction port 15, a flow controller 22 is connected in series in the air extraction pipe, and a vacuum pump 20 is installed in the air extraction pipe. An air inlet 13 is also opened on the side wall of the outer shell 18, the air inlet 13 is communicated with the upper end of the first bottle body through an air inlet pipe, and another flow controller 22 and another vacuum air valve 21 are connected in series in the air inlet pipe.

[0047] The main function of the gas supply assembly is to provide stable gas raw materials for the preparation of the attenuator. The gas raw material used in the preparation of the attenuator is n-heptane 23 vapor. At room temperature, n-heptane 23 is in a liquid state, but due to its easy volatility, the n-heptane 23 liquid will continuously volatilize n-heptane 23 vapor. The n-heptane 23 vapor will decompose into carbon and hydrogen at high temperatures (900 °C - 1200 °C), and the carbon among them will deposit on the surface of the clamping rod 1 to form the required carbon layer. The saturated vapor pressure of n-heptane 23 fluctuates with factors such as evaporation volume, evaporation temperature, and evaporation surface area, resulting in unstable pressure in the gas supply pipe and unstable gas concentration in the vacuum chamber 16, affecting the preparation effect of the attenuator. In this embodiment, control starts from the source of n-heptane 23 gas. The first bottle body is used to ensure a stable evaporation area of the n-heptane 23 liquid, the communicating vessel principle is used to ensure a stable evaporation volume, and the water bath method is used to ensure a stable evaporation temperature.

[0048] As Figure 4 shown, in this embodiment, one end of the wedge-shaped heat conducting plate 7 along the first direction is rotatably connected to the body of the heating mechanism 19 and can rotate relative to the body by a set angle and be fixed to adjust the angle between the inclined surface and the first direction. When the wedge-shaped heat conducting plate 7 can rotate relative to the body of the heating mechanism 19, in order to ensure surface contact between the body of the heating mechanism 19 and the wedge-shaped heat conducting plate 7, both ends of the wedge-shaped heat conducting plate 7 are arc surfaces, and the surface of the body of the heating mechanism 19 that contacts and cooperates with the wedge-shaped heat conducting plate 7 is also an arc surface. At this time, the heating body 8 and the wedge-shaped heat conducting plate 7 are fixed and rotate synchronously. In some other embodiments, the heating mechanism 19 is rotatably installed in the inner cavity of the outer shell 18 (not shown in the figure), and the heating mechanism 19 can rotate relative to the outer shell 18 by a set angle and be fixed to adjust the angle between the inclined surface and the first direction.

[0049] It is known that in the case where the wedge-shaped heat conducting plate has an inclined surface and a straight surface, the straight surface realizes the coating of the uniform thickness section of the carbon film in the clamping rod, and the inclined surface realizes the coating of the gradually changing section of the carbon film in the clamping rod. When adjusting the thickness change gradient of the gradually changing section of the carbon film to meet clamping rods of different models, the wedge-shaped heat conducting plate can be rotated or the entire heating mechanism can be directly rotated; however, after the wedge-shaped heat conducting plate or the heating mechanism is rotated, the straight surface is no longer parallel to the first direction, and the coating effect on the uniform section of the carbon film of the clamping rod is lost. To solve the influence of the inclined surface angle adjustment on the straight surface, carbon film can be first coated using the straight surface, and the area of the gradually changing section of the clamping rod that needs to be coated is wrapped with stickers first; then the uniform section of the clamping rod is wrapped and fitted, exposing the gradually changing section area of the carbon film of the clamping rod, and the corresponding carbon film coating process is carried out using the heat radiated by the inclined surface.

[0050] One or more embodiments of the present application further provide a method for processing an attenuator, including the following steps:

[0051] Wrap the position in the clamping rod 1 that does not need to be coated with carbon film with stickers;

[0052] Open the housing 18, bring the area of the clamping rod 1 that needs to be coated with carbon film close to the heating surface; move and position the clamping rod 1 along the first direction so that the area of the clamping rod 1 that needs to be coated with carbon film is adapted to the radiation heating area of the heating mechanism 19;

[0053] Fix the clamping rod 1 using the clamping mechanism, close and seal the housing 18;

[0054] Start the heating mechanism 19 and supply n-heptane 23 gas to the vacuum chamber 16;

[0055] The heating mechanism 19 radiates heat to the positioned clamping rod 1 through the wedge-shaped heat conducting surface, and the temperature of the clamping rod 1 at the set position changes in a gradient manner due to different values of the distance from the heating surface;

[0056] The temperatures of the clamping rod 1 at different positions are different, and thus the thickness of the carbon film formed by the thermal decomposition of n-heptane 23 at different positions of the clamping rod 1 changes sequentially along the first direction.

[0057] So far, the technical solutions of the present application have been described in combination with the foregoing preferred embodiments. However, it is easy for those skilled in the art to understand that the protection scope of the present application is not limited to the above-mentioned preferred embodiments. Without departing from the technical principle of the present application, those skilled in the art can split and combine the technical solutions in the above-mentioned preferred embodiments, and can also make equivalent changes or replacements to the relevant technical features. Any changes, equivalent replacements, improvements, etc. made within the technical concept and / or technical principle of the present application will fall within the protection scope of the present application.

Claims

1. A method for manufacturing an attenuator, which utilizes an attenuator manufacturing device, is characterized in that Attenuator processing equipment, comprising: A housing, within which a vacuum chamber is formed; A gas supply assembly capable of supplying n - heptane gas to the vacuum chamber; A heating mechanism disposed in the vacuum chamber, the heating mechanism being capable of radiating heat outward through a heating surface; A clamping mechanism capable of positioning and clamping a rod and driving the rod to rotate self - rotatably, so that the rod extends along a first direction and approaches the heating surface, and further enabling the rod to receive the heat radiated from the heating surface; the heating mechanism has a wedge - shaped heat - conducting plate, the outer side surface of the wedge - shaped heat - conducting plate forms the heating surface, and the thickness of the wedge - shaped heat - conducting plate changes sequentially along the first direction to adjust the distance between any position of the rod and the heating surface, thereby adjusting the temperature at different positions of the rod; the heating surface of the wedge - shaped heat - conducting plate includes a straight surface and an inclined surface spliced together, the straight surface is parallel to the first direction; one end of the wedge - shaped heat - conducting plate along the first direction is rotatably connected to the body of the heating mechanism and can rotate relative to the body by a set angle and be fixed to adjust the included angle between the inclined surface and the first direction; The processing method includes the following steps: Cover the positions on the rod where no carbon film needs to be plated with stickers; Open the housing, bring the area of the rod that needs to be plated with carbon film close to the heating surface; move and position the rod along the first direction so that the area of the rod that needs to be plated with carbon film matches the radiation heating area of the heating mechanism; Fix the rod using the clamping mechanism, close and seal the housing; Start the heating mechanism, supply n - heptane gas to the vacuum chamber, and the clamping mechanism drives the rod to rotate; The heating mechanism radiates heat to the positioned rod through the wedge - shaped heat - conducting surface, and the temperature at set positions along the length direction of the rod changes in a gradient manner due to different values of the distance from the heating surface; The temperatures at different positions of the rod are different, and thus the thickness of the carbon film formed by the thermal decomposition of n - heptane at the set area of the rod changes sequentially along the first direction; When adjusting the thickness change gradient of the carbon film gradient section, first use the straight surface of the wedge - shaped heat - conducting plate to plate the carbon film, and the gradient section of the rod is covered with stickers; then cover and fit the uniform section of the rod, expose the carbon film gradient section area, adjust the included angle between the inclined surface of the wedge - shaped heat - conducting plate and the gradient section, and use the heat radiated by the inclined surface to plate the carbon film.

2. The attenuator processing method according to claim 1, characterized in that, The heating mechanisms are arranged in pairs, and the wedge - shaped heat - conducting plates of the two heating mechanisms arranged in pairs are oppositely arranged and have the same thickness change trend along the first direction.

3. The attenuator processing method according to claim 1, characterized in that, The clamping mechanism has a rotation driving assembly, and the rotation driving assembly can drive the rod to rotate along its own axis.

4. The attenuator processing method according to claim 1, wherein, A track along the first direction is arranged in the housing, and the clamping mechanism is slidably installed in the vacuum chamber of the housing through the track, and the clamping mechanism can slide and be fixed along the first direction.

5. The attenuator processing method according to claim 1, characterized in that, The heating mechanism is rotatably installed in the inner cavity of the housing, and the heating mechanism can rotate relative to the housing by a set angle and be fixed to adjust the included angle between the inclined surface and the first direction.

6. The attenuator processing method according to claim 1, characterized in that The heating mechanism includes a box body, one end of the box body is open and the wedge - shaped heat - conducting plate is installed at the opening, a heating body is arranged in the inner cavity of the box body, the heating body is attached to the wedge - shaped heat - conducting plate, there is a gap between the heating body and the inner wall of the box body, and a heat insulation member is installed between the wedge - shaped heat - conducting plate and the inner wall of the box body.

7. The attenuator processing method according to claim 1, characterized in that, The air supply assembly includes a first bottle body and a second bottle body whose lower ends are connected through pipe fittings to form a communicating vessel. The first bottle body is placed in a constant temperature water tank. The first bottle body is vertically arranged and has a constant cross-section along the horizontal direction. The upper end of the first bottle body is communicated with a vacuum chamber. The upper end of the second bottle body is communicated with a pressure relief valve through a pipeline, and the pressure relief valve is communicated with an exhaust gas pipeline.

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