A target substrate carrier
By designing a target substrate carrier and using a rotating circle and a triangular material block to flatten the auxiliary sliding powder, the problem of inconsistent slope is solved, uniform heating and forming effects are achieved during the target sintering process, and the quality of the target is improved.
Patent Information
- Application Number
- CN202310292222.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-03-23
- Publication Date
- 2025-10-10
- Estimated Expiration
- 2043-03-23
AI Technical Summary
In the prior art, the closed annular powder pile formed by the auxiliary sliding powder on the setter plate has inconsistent position slopes, which affects the sintering and molding effect of the target material.
A target substrate carrier is used, which includes a circular base, a rotating ring, a bevel ring, a movable plate and a triangular material-digging block. The movable plate and the material-digging block are driven by rotating the bevel ring to flatten and scrape out a uniform slope. Combined with the worm and worm gear transmission system, the target material is evenly heated in the sintering furnace.
The slope consistency of the auxiliary sliding powder is achieved, the molding effect of the target sintering is improved, and the target is ensured to be heated evenly during the sintering process, thereby improving the processing quality of the target.
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Figure CN116356264B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of target material production and processing, and in particular to a target material substrate carrying carrier. Background Art
[0002] According to a target material sintering method disclosed in patent document CN113372124A, this method uses spherical granular alumina powder as auxiliary sliding powder, and the target material is placed on the spherical granular alumina for sintering. Compared with sintering on irregularly shaped alumina powder, even if the target material green body is heavier, the alumina powder is more likely to roll during shrinkage, thereby converting the contact friction between the target material and the support plate into rolling friction, reducing the friction resistance generated when the target material green body shrinks, and preventing irregular deformation and cracking of the target material caused by friction resistance.
[0003] The support plate in this method has certain defects during use. For example, after laying the auxiliary sliding powder on the support plate, it is difficult to ensure that the slopes of various positions on the closed circular ring powder pile formed by the auxiliary sliding powder are consistent, which affects the molding effect during target sintering. Summary of the Invention
[0004] The purpose of the present invention is to solve the problems existing in the prior art and to propose a target substrate carrying carrier.
[0005] In order to achieve the above object, the present invention adopts the following technical solutions:
[0006] A target substrate carrier comprises a circular base, the upper end surface of the circular base is rotatably provided with a rotating ring, the upper end surface of the rotating ring is fixed with a bevel ring, a left movable plate and a right movable block are symmetrically arranged on the inner wall of the rotating ring, an upper material stripping plate is fixed on the side wall of the left movable plate, and a triangular material stripping block is arranged on the right movable block.
[0007] As a further technical solution of the present invention, a rotating rod is rotatably provided on the inner wall of the rotating circle, and a left threaded rod and a right threaded rod are fixed at both ends of the rotating rod respectively. A left connecting block is fixed on the side wall of the left movable plate, and the left threaded rod threads through the left connecting block. A right connecting block is fixed on the side wall of the right movable block, and the right threaded rod threads through the right connecting block.
[0008] As a further technical solution of the present invention, arc-shaped pushing blocks are fixed on both sides of the left movable plate and the right movable block.
[0009] As a further technical solution of the present invention, a right cavity is opened on one side of the right moving block, and the triangular material-selecting block is rotatably arranged on the inner wall of the right cavity. A bottom baffle is fixed to the inner bottom of the right cavity, and an elastic layer is fixed on the upper end surface of the bottom baffle.
[0010] As a further technical solution of the present invention, a left cavity is provided on the side wall of the triangular material shifting block, a right rotating shaft is fixedly provided on the inner wall of the left cavity, a worm gear sleeve is fixedly provided on the outer side wall of the right rotating shaft, a left rotating shaft is rotatably provided on the inner bottom of the right cavity, a worm sleeve is fixedly provided on the outer side wall of the left rotating shaft, the worm sleeve is meshed with the worm gear sleeve, and the upper end of the left rotating shaft rotates through the right moving block and is fixed with a knob.
[0011] As a further technical solution of the present invention, a plurality of chamfers are provided on the side wall of the triangular material-digging block.
[0012] As a further technical solution of the present invention, the lower end face of the annular base is provided with a placing base, a receiving ring is fixed on the bottom of the annular base, a worm gear ring is fixedly sleeved on the outer wall of the receiving ring, and a rotating circular groove is provided on the upper end face of the placing base for cooperating with the receiving ring. An inner cavity is provided in the placing base, a worm shaft is rotatably provided on the inner wall of the inner cavity, a notch is provided on the inner wall of the rotating circular groove for cooperating with the worm shaft, the worm shaft is meshed and connected with the worm gear ring, the worm shaft rotates through the placing base, a transmission rod is fixed to the end of the worm shaft, and a plurality of transmission keys are fixed on the outer wall of the transmission rod.
[0013] As a further technical solution of the present invention, a circular through groove is provided on the upper end surface of the placement base, and a plurality of ventilation holes are provided on the inner wall of the circular through groove, and each ventilation hole passes through the placement base.
[0014] Beneficial effects of the present invention:
[0015] 1. After the auxiliary sliding powder is laid, move the upper stripping plate and the triangular stripping block outward, and then rotate the inclined circle. The rotating circle drives the left movable plate and the right movable block to rotate together, thereby driving the upper stripping plate and the triangular stripping block to rotate together. During the rotation of the upper stripping plate, the powder pile higher than the upper stripping plate will be flattened, and then the triangular stripping block will be pushed and scraped out a slope at a certain angle on the powder pile that has been processed too much by the upper stripping plate. After the triangular stripping block rotates two circles, the slopes at each position can be scraped evenly to avoid inconsistent slopes at each position, which affects the molding effect during target sintering.
[0016] 2. The angle of the triangular material block can be adjusted to a certain extent, so that the triangular material block can scrape out slopes of different angles during the rotation around the center, which is suitable for the placement of targets of different specifications and weights.
[0017] 3. After the target material is placed on the upper end surface of the circular base, the placement base is placed in the sintering furnace. At this time, the circular base is on the upper end surface of the placement base, and the target material is on the upper end surface of the circular base. A driving rod is rotatably provided on the inner wall of the sintering furnace. The end fixed sleeve of the driving rod is provided with a transmission sleeve used in conjunction with the transmission rod and the transmission key. A driving box and a reduction box used in conjunction with the driving rod are fixed on the outer wall of the sintering furnace. The transmission rod on the placement base is inserted into the transmission sleeve, and then the sintering furnace starts to work. During this process, with the cooperation of the driving box and the reduction box, the driving rod and the transmission sleeve are driven to rotate, thereby driving the worm shaft to rotate, thereby driving the worm wheel ring and the receiving ring to rotate, so that the circular base rotates with the target material, so that the target material can be heated evenly during the heating process in the sintering furnace, thereby making the quality of the processed and produced target material better. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention;
[0019] Figure 2 This is a schematic diagram of the connection between the circular base and the rotating ring of the present invention;
[0020] Figure 3 This is a schematic diagram of the connection between the left movable plate and the upper stripping plate of the present invention;
[0021] Figure 4 This is a schematic diagram of the connection between the right moving block and the triangular material-digging block of the present invention;
[0022] Figure 5 This is a schematic diagram of the connection between the rotating rod and the left threaded rod of the present invention;
[0023] Figure 6 Schematic diagram of the internal structure of the right cavity and the left cavity of the present invention;
[0024] Figure 7 This is a schematic diagram of the connection between the annular base and the receiving ring of the present invention;
[0025] Figure 8 It is a schematic diagram of the internal structure of the rotating circular groove of the present invention.
[0026] In the figure: 1. Circular base; 2. Rotating circle; 3. Bevel circle; 4. Left movable plate; 5. Right movable block; 6. Upper material stripping plate; 7. Triangular material stripping block; 8. Rotating rod; 9. Left threaded rod; 10. Right threaded rod; 11. Left connecting block; 12. Right connecting block; 13. Arc-shaped pushing block; 14. Right cavity; 15. Bottom baffle; 16. Elastic layer; 17. Left cavity; 18. Right rotating shaft; 19. Worm gear sleeve; 20. Left rotating shaft; 21. Worm sleeve; 22. Knob; 23. Placement base; 24. Receiver ring; 25. Worm gear ring; 26. Rotating circular groove; 27. Worm shaft; 28. Transmission rod; 29. Circular through groove; 30. Vent. DETAILED DESCRIPTION
[0027] In order to further illustrate the technical means and effects adopted by the present invention to achieve the predetermined purpose of the invention, the specific implementation methods, structures, features and effects of the present invention are described in detail below in conjunction with the accompanying drawings and preferred embodiments.
[0028] Reference Figures 1-8 A target substrate carrying carrier comprises a circular base 1, a rotating circle 2 is rotatably provided on the upper end surface of the circular base 1, a bevel circle 3 is fixed on the upper end surface of the rotating circle 2, a left movable plate 4 and a right movable block 5 are symmetrically provided on the inner wall of the rotating circle 2, an upper material stripping plate 6 is fixed on the side wall of the left movable plate 4, and a triangular material stripping block 7 is provided on the right movable block 5.
[0029] During use, auxiliary sliding powder is laid on the upper end surface of the annular base 1, and then the target material to be processed is placed on the upper end surface of the auxiliary sliding powder, so as to reduce the friction between the target material and the annular base 1 when it shrinks. When laying the auxiliary sliding powder, the auxiliary sliding powder is piled into a closed circular ring powder pile arranged around the center. A slope is formed on the top of the powder pile, and the slope is higher away from the center than near the center. The auxiliary sliding powder at the slope of the powder pile tends to slide toward the center, and when it slides, it brings friction toward the center to the rotating target material, which reduces the resistance that needs to be overcome when the target material green body shrinks.
[0030] When the auxiliary sliding powder is laid, the upper stripping plate 6 and the triangular stripping block 7 are moved outward, and then the inclined circle 3 is rotated. The rotating circle 2 drives the left movable plate 4 and the right movable block 5 to rotate together, thereby driving the upper stripping plate 6 and the triangular stripping block 7 to rotate together. During the rotation of the upper stripping plate 6, the powder pile higher than the upper stripping plate 6 is flattened, and then the triangular stripping block 7 is rotated, and the powder pile that is excessively processed by the upper stripping plate 6 is pushed and scraped out a slope with a certain angle. After the triangular stripping block 7 rotates two circles, the slopes at each position can be scraped evenly to avoid inconsistent slopes at each position, which affects the molding effect during target sintering.
[0031] A rotating rod 8 is rotatably provided on the inner wall of the rotating circle 2, and a left threaded rod 9 and a right threaded rod 10 are fixed at both ends of the rotating rod 8 respectively. A left connecting block 11 is fixed on the side wall of the left movable plate 4, and the left threaded rod 9 threadably penetrates the left connecting block 11. A right connecting block 12 is fixed on the side wall of the right movable block 5, and the right threaded rod 10 threadably penetrates the right connecting block 12.
[0032] When the rotating rod 8 is rotated forward, the left threaded rod 9 and the right threaded rod 10 will be driven to rotate forward together. Since the left threaded rod 9 is threadedly connected to the left connecting block 11 and the right threaded rod 10 is threadedly connected to the right connecting block 12, when the rotating rod 8 is rotated forward, the left connecting block 11 and the right connecting block 12 will be driven away from the rotating rod 8, thereby moving the upper material stripping plate 6 and the triangular material stripping block 7 outward. The rotating rod 8 can also be directly toggled to make the rotating rod 8 drive the rotating circle 2 to rotate. In this process, the upper material stripping plate 6 and the triangular material stripping block 7 are also driven to rotate to perform the material stripping operation.
[0033] Arc-shaped pusher blocks 13 are fixed on both sides of the left movable plate 4 and the right movable block 5. Through the arrangement of the arc-shaped pusher blocks 13, the left movable plate 4 and the right movable block 5 can push the auxiliary sliding powder that has fallen down to the outside during the rotation process, thereby preventing the auxiliary sliding powder from sliding toward the center.
[0034] A right cavity 14 is opened on one side of the right movable block 5, and the triangular material-digging block 7 is rotatably set on the inner wall of the right cavity 14. A bottom baffle 15 is fixed to the inner bottom of the right cavity 14, and an elastic layer 16 is fixed on the upper end face of the bottom baffle 15. The elastic layer 16 is made of high-temperature resistant material. Through the cooperation of the bottom baffle 15 and the elastic layer 16, auxiliary sliding powder is prevented from entering the right cavity 14 when the triangular material-digging block 7 is scraping the material.
[0035] The angle of the triangular material-selecting block 7 can be adjusted to a certain extent, so that the triangular material-selecting block 7 can scrape out slopes of different angles during the rotation around the center, thereby being suitable for the placement of targets of different specifications and weights.
[0036] A left cavity 17 is provided on the side wall of the triangular material shifting block 7, and a right rotating shaft 18 is fixedly provided on the inner wall of the left cavity 17, and the right rotating shaft 18 rotates and passes through the right moving block 5. A worm gear sleeve 19 is fixedly provided on the outer side wall of the right rotating shaft 18, and a left rotating shaft 20 is rotatably provided on the inner bottom of the right cavity 14. A worm sleeve 21 is fixedly provided on the outer side wall of the left rotating shaft 20, and the worm sleeve 21 is meshed with the worm gear sleeve 19. The upper end of the left rotating shaft 20 rotates and passes through the right moving block 5 and is fixed with a knob 22.
[0037] The operator rotates the knob 22 according to actual needs, the knob 22 drives the left rotating shaft 20 to rotate, the left rotating shaft 20 drives the worm sleeve 21 to rotate, since the worm sleeve 21 is meshed and connected with the worm gear sleeve 19, when the worm sleeve 21 rotates, the worm gear sleeve 19 and the right rotating shaft 18 are driven to rotate together, thereby driving the triangular stirring block 7 to rotate, and adjusting the triangular stirring block 7 to the required angle, and the operation is convenient.
[0038] The side wall of the triangular stirring block 7 is provided with a plurality of chamfers.
[0039] The lower end surface of the circular ring base 1 is provided with a placing base 23, the placing base 23 can be designed as a circular structure according to actual conditions, thereby achieving the purpose of saving space, the bottom of the circular ring base 1 is fixedly provided with a receiving ring 24, the outer side wall of the receiving ring 24 is fixedly provided with a worm gear ring 25, the upper end surface of the placing base 23 is provided with a rotating circular groove 26 matched with the receiving ring 24, the placing base 23 is provided with an inner cavity, the inner wall of the inner cavity is rotatably provided with a worm shaft 27, the inner wall of the rotating circular groove 26 is provided with a notch matched with the worm shaft 27, the worm shaft 27 is meshed and connected with the worm gear ring 25, the worm shaft 27 penetrates through the placing base 23 and rotates, the tail end of the worm shaft 27 is fixedly provided with a transmission rod 28, and the outer side wall of the transmission rod 28 is fixedly provided with a plurality of transmission keys.
[0040] When the target material is placed on the upper end surface of the circular ring base 1, the placing base 23 is placed in the sintering furnace, at this time, the circular ring base 1 is on the upper end surface of the placing base 23, and the target material is on the upper end surface of the circular ring base 1, a driving rod is rotatably arranged on the inner wall of the sintering furnace, a transmission sleeve matched with the transmission rod 28 and the transmission key is fixedly arranged on the tail end of the driving rod, a driving box and a speed reducer matched with the driving rod are fixedly arranged on the outer side wall of the sintering furnace, the transmission rod 28 on the placing base 23 is inserted into the transmission sleeve, and then the sintering furnace starts to work, in this process, under the cooperation of the driving box and the speed reducer, the driving rod and the transmission sleeve are driven to rotate, thereby driving the worm shaft 27 to rotate, thereby driving the worm gear ring 25 and the receiving ring 24 to rotate, so that the circular ring base 1 rotates with the target material, thereby making the target material evenly heated in the sintering furnace, and thus the quality of the target material produced is better.
[0041] The upper end surface of the placing base 23 is provided with a circular through groove 29, a plurality of air holes 30 are arranged on the inner wall of the circular through groove 29, and each air hole 30 penetrates through the placing base 23. Through the cooperation of the circular through groove 29 and the air holes 30, the gas in the inner circle of the target material can also flow.
[0042] When the present invention is in use, auxiliary sliding powder is laid on the upper end surface of the circular ring base 1. When the auxiliary sliding powder is laid, the upper stripping plate 6 and the triangular stripping block 7 are moved outward, and then the inclined surface circle 3 is rotated. The rotating circle 2 drives the left movable plate 4 and the right movable block 5 to rotate together, thereby driving the upper stripping plate 6 and the triangular stripping block 7 to rotate together. In the process of rotation, the upper stripping plate 6 flattens the powder pile higher than the upper stripping plate 6, and then the triangular stripping block 7 scrapes out a slope at a certain angle on the powder pile that has been processed too much by the upper stripping plate 6 during the rotation. After the triangular stripping block 7 rotates two circles, the slopes at various positions can be evenly scraped to avoid inconsistent slopes at various positions, which affects the molding effect during target sintering.
[0043] The operator rotates the knob 22 according to actual needs, and the knob 22 drives the left rotating shaft 20 to rotate, and the left rotating shaft 20 drives the worm sleeve 21 to rotate. Since the worm sleeve 21 is meshed with the worm gear sleeve 19, when the worm sleeve 21 rotates, the worm gear sleeve 19 and the right rotating shaft 18 are driven to rotate together, thereby driving the triangular material plucking block 7 to rotate and adjust it to the required angle, which is easy to operate;
[0044] The angle of the triangular stripping block 7 can be adjusted to a certain extent, so that the triangular stripping block 7 can scrape out slopes of different angles during the rotation around the center, so as to be suitable for the placement of targets of different specifications and weights. Then, the rotating rod 8 is rotated in the reverse direction to drive the upper stripping plate 6 and the triangular stripping block 7 back to the initial position to avoid affecting the placement of the target;
[0045] After the target material is placed on the upper end surface of the ring base 1, the placement base 23 is placed in the sintering furnace. At this time, the ring base 1 is on the upper end surface of the placement base 23, and the target material is on the upper end surface of the ring base 1. A driving rod is rotatably provided on the inner wall of the sintering furnace. The end fixed sleeve of the driving rod is provided with a transmission sleeve used in conjunction with the transmission rod 28 and the transmission key. A driving box and a reduction box used in conjunction with the driving rod are fixed on the outer wall of the sintering furnace. The transmission rod 28 on the placement base 23 is inserted into the transmission sleeve, and then the sintering furnace starts to work. During this process, with the cooperation of the driving box and the reduction box, the driving rod and the transmission sleeve are driven to rotate, thereby driving the worm shaft 27 to rotate, thereby driving the worm wheel ring 25 and the receiving ring 24 to rotate, so that the ring base 1 rotates with the target material, so that the target material can be heated evenly during the heating process in the sintering furnace, thereby making the quality of the processed and produced target material better.
[0046] The above description is merely a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as above in terms of a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can, without departing from the scope of the technical solution of the present invention, make some changes or modifications to equivalent embodiments using the technical contents disclosed above. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.
Claims
1. A target substrate carrier, comprising a circular base (1), characterized in that: The upper end surface of the annular base (1) is rotatably provided with a rotating ring (2), the upper end surface of the rotating ring (2) is fixed with a bevel ring (3), the inner wall of the rotating ring (2) is symmetrically provided with a left movable plate (4) and a right movable block (5), the side wall of the left movable plate (4) is fixed with an upper material shifting plate (6), and the right movable block (5) is provided with a triangular material shifting block (7); A rotating rod (8) is rotatably provided on the inner wall of the rotating circle (2), and a left threaded rod (9) and a right threaded rod (10) are respectively fixed at both ends of the rotating rod (8). A left connecting block (11) is fixed on the side wall of the left movable plate (4), and the left threaded rod (9) is threadedly passed through the left connecting block (11). A right connecting block (12) is fixed on the side wall of the right movable block (5), and the right threaded rod (10) is threadedly passed through the right connecting block (12).
2. A target substrate carrier according to claim 1, characterized in that: Arc-shaped pusher blocks (13) are fixed on both sides of the left movable plate (4) and the right movable block (5).
3. The target substrate carrier according to claim 1, characterized in that: A right cavity (14) is provided on one side of the right moving block (5), and the triangular material-selecting block (7) is rotatably arranged on the inner wall of the right cavity (14). A bottom baffle (15) is fixed to the inner bottom of the right cavity (14), and an elastic layer (16) is fixed to the upper end surface of the bottom baffle (15).
4. The target substrate carrier according to claim 3, characterized in that: The side wall of the triangular material shifting block (7) is provided with a left cavity (17), the inner wall of the left cavity (17) is fixedly provided with a right rotating shaft (18), the outer wall of the right rotating shaft (18) is fixedly provided with a worm gear sleeve (19), the inner bottom of the right cavity (14) is rotatably provided with a left rotating shaft (20), the outer wall of the left rotating shaft (20) is fixedly provided with a worm gear sleeve (21), the worm gear sleeve (21) is meshed with the worm gear sleeve (19), and the upper end of the left rotating shaft (20) is rotatably provided through the right moving block (5) and is fixed with a knob (22).
5. The target substrate carrier according to claim 1, characterized in that: The side wall of the triangular material shifting block (7) is provided with a plurality of chamfers.
6. The target substrate carrier according to claim 1, characterized in that: The lower end surface of the annular base (1) is provided with a placement base (23), a receiving ring (24) is fixed to the bottom of the annular base (1), a worm wheel ring (25) is fixedly sleeved on the outer wall of the receiving ring (24), and a rotating circular groove (26) used to match the receiving ring (24) is provided on the upper end surface of the placement base (23). An inner cavity is provided in the placement base (23), a worm shaft (27) is rotatably provided on the inner wall of the inner cavity, and a notch is provided on the inner wall of the rotating circular groove (26) to match the worm shaft (27). The worm shaft (27) is meshed and connected with the worm wheel ring (25), and the worm shaft (27) rotates and penetrates the placement base (23). A transmission rod (28) is fixed to the end of the worm shaft (27), and a plurality of transmission keys are fixed on the outer wall of the transmission rod (28).
7. The target substrate carrier according to claim 6, characterized in that: A circular through groove (29) is provided on the upper end surface of the placement base (23), and a plurality of vent holes (30) are provided on the inner wall of the circular through groove (29), each vent hole (30) passing through the placement base (23).
Citation Information
Patent Citations
Sintering method of target material
CN113372124A
Clamp for cutting and feeding rotary target semi-finished product
CN115284029A