Substrate processing apparatus and control method for a substrate processing apparatus

Abstract

Disclosed is a substrate processing apparatus including: a substrate conveying section on which a conveying object is received; and an ejection system section including: an inkjet main body that ejects ink over an upper surface of the substrate conveying section and prints on the conveying object; an ink module conveying section that conveys the inkjet main body; an encoder that is provided around the ink module conveying section to output a movement signal per unit movement distance of the ink module conveying section; an ink ejection controller that interoperates with the inkjet main body to control ink ejection timing of the inkjet main body; and a signal separator that interoperates with the encoder to count the movement signal, reset a width of the counted movement signal, and transmit the movement signal whose width is reset to the ink ejection controller.

Description

TECHNICAL FIELD

[0001] Embodiments of the inventive concept described herein relate to a substrate processing apparatus, and more particularly, to a substrate processing apparatus for ejecting and printing ink on a substrate and a control method for the substrate processing apparatus. BACKGROUND

[0002] In a display manufacturing facility, there is an ejection system that ejects a chemical liquid ink such as an alignment film onto a glass.

[0003] Such an ejection system drives nozzles of a head in a piezoelectric manner to eject ink onto a glass for a display while moving an inkjet head and an ejection module transfer apparatus in a two-dimensional (2D) plane.

[0004] In this case, generally, when an X-axis and a Y-axis are divided in the 2D plane, the ejection system prints ink on an entire upper surface of a transfer object while repeating a process of applying ink, while in a state in which the transfer object to which ink is to be applied is transferred by a certain distance along the X-axis on a lower transfer base, the ejection module transfer apparatus disposed above the transfer object and coupled to the ink ejection module is moved along the Y-axis, and after the application is completed, the transfer object to be applied is again moved by a certain distance along the X-axis, and the ejection module transfer apparatus is again transferred along the Y-axis.

[0005] At this time, the ejection system receives a pulse wave to recognize a time point of ejecting ink through an encoder. The encoder generates a pulse wave at every specific movement interval of the ejection module transfer apparatus and inputs the pulse wave to an ink ejection controller. Upon receipt of the pulse wave, the ink ejection controller recognizes a position of the ejection module transfer apparatus to eject ink based on the number of the received pulse wave.

[0006] Here, when a resolution is set to 100 nm, and when the ejection module transfer apparatus moves 100 nm, the encoder generates one pulse wave signal. At this time, the ink ejection controller recognizes that the ejection module transfer apparatus moves 100 nm, and based on this, various control drives such as PID control are performed on the ejection module transfer apparatus. In this case, the ink ejection controller determines that the ejection module transfer apparatus moves 100 nm for one pulse wave signal, and ejects ink when a corresponding point is a position on which ink should be ejected.

[0007] In this case, the ejection system ejects ink in a process in which the ejection module transfer apparatus continuously moves. At this time, when the resolution of the encoder is 100 nm, and when the ejection module transfer apparatus moves at an interval of 20 um, the ejection system can know an ejection position by counting about 200 pulse waves.

[0008] Since a conventional jetting system has a low printing resolution and has a sufficient production time, generally, its use is a method of applying ink by connecting a plurality of ink jetting controllers in a daisy chain method.

[0009] However, in recent years, there has been an effort to shorten the production time as much as possible. Therefore, due to a difference in the length of a cable, a signal delay problem has occurred. In order to solve this problem, the ink jetting controller solves the problem in a manner that sets the output timing of a signal separator to have the same time delay even when the length of the cable is different.

[0010] However, as such, despite the setting for adjusting the time delay of the signal separator or the like, since the resolution of printing should be increased and the production time should be shortened, the jetting module transfer device should move at a higher speed than before.

[0011] Therefore, the width of the pulse wave generated by the encoder per 100 nm is much narrower than before. For example, since the width of the pulse wave of the encoder is formed as 100 ns when the jetting module transfer device moves at 1 m / s, the width of the pulse wave is much narrower than before.

[0012] At this time, in order to make the ink jetting controller distinguish the pulse wave generated by the encoder from the transient input noise, an expensive controller capable of processing a signal at a high speed should be employed.

[0013] However, as such, when the expensive ink jetting controller is employed, since the cost sharply increases compared to the effect, there is actually no choice but to find another method.

[0014] Therefore, in order to solve the conventional problem caused by the narrowing of the width of the pulse wave generated by the encoder, the pulse wave of the encoder should be able to be distinguished from noise and the ink jetting controller should not recognize the pulse wave of the encoder as noise.

[0015] For example, assuming that the jetting module transfer device moves at 1 m / s and the width of the pulse wave generated by the encoder per 100 nm is 100 ns, when strong noise having a width of 100 ns occurs around the cable and the signal processing stage, the ink jetting controller recognizes the strong noise having a width of 100 ns as the pulse wave of the encoder. Therefore, since the position recognized by the ink jetting controller is recognized one step ahead, the inkjet position is different from the planned position.

[0016] In addition, when the jetting module transfer device is momentarily accelerated during movement at 1 m / s, the width of the pulse wave is reduced to 100 ns or less. At this time, when a situation in which the ink jetting controller does not recognize the pulse wave of the encoder occurs, since the position actually recognized by the ink jetting controller is recognized one step backward, the inkjet position is different from the planned position. SUMMARY

[0017] Embodiments of the present inventive concept provide a substrate processing apparatus for distinguishing a pulse wave input to an encoder of an ink ejection controller from noise, without using an expensive ink ejection controller, without increasing production costs, and with an inkjet body moving at a higher speed than before to improve productivity, and a control method for a substrate processing apparatus.

[0018] According to an embodiment, a substrate processing apparatus can include: a substrate transfer portion on which a transfer object is received; and an ejection system portion including: an inkjet body that ejects and prints ink on the transfer object over an upper surface of the substrate transfer portion; an ink module transfer portion that transfers the inkjet body; an encoder that is disposed around the ink module transfer portion and outputs a movement signal per unit movement distance of the ink module transfer portion; an ink ejection controller that interoperates with the inkjet body to control ejection timing of the inkjet body; and a signal separator that interoperates with the encoder to count the movement signal, reset a width of the counted movement signal, and transmit the width-reset movement signal to the ink ejection controller.

[0019] According to an embodiment, the encoder can output the movement signal as a pulse wave. The signal separator can count a width of the pulse wave and can reset the counted width to output a substitute pulse wave.

[0020] According to an embodiment, the signal separator can count the pulse wave output by the encoder for each defined unit, and can reset a width of the counted pulse wave to output a substitute pulse wave.

[0021] According to an embodiment, the signal separator can output a substitute pulse wave for precise movement together with the substitute pulse wave in a non-defined unit deviated from a defined unit.

[0022] According to an embodiment, the signal separator can subtract a width corresponding to one or more pulse waves output by the encoder from the pulse wave output by the encoder, or add a width corresponding to one or more pulse waves output by the encoder to the pulse wave output by the encoder, when outputting the substitute pulse wave for precise movement.

[0023] According to an embodiment, a plurality of inkjet bodies and a plurality of ink ejection controllers can interoperate with each other to eject ink. The signal separator can output a substitute pulse wave to each of the plurality of ink ejection controllers.

[0024] According to an embodiment, the signal separator can generate the substitute pulse wave using a multiplier.

[0025] According to an embodiment, the ink module transfer part can include a module base on which the inkjet body is mounted, an actuator driving part that transfers the module base in one direction, and an ink module position controller that controls the actuator driving part to transfer the module base and controls a position at which ink is jetted.

[0026] According to an embodiment, the ink module position controller can interoperate with the encoder to obtain position information of the module base from the encoder.

[0027] According to an embodiment, the substrate transfer part can include a base controller that makes a transfer object dependent on a predetermined work command.

[0028] According to an embodiment, a control method for a substrate processing apparatus can include transferring, by an ink module transfer part included in the substrate processing apparatus, an inkjet body disposed on a transfer object, outputting, by an encoder included in the substrate processing apparatus, a movement signal per movement distance as the inkjet body moves, receiving, by a signal separator included in the substrate processing apparatus, the movement signal, counting, by the signal separator, the movement signal, resetting, by the signal separator, a width of the counted movement signal, and outputting, by the signal separator, the movement signal of which the width is reset, outputting, by the signal separator, the movement signal of which the width is reset and distributing to each ink jetting controller, and identifying, by the ink jetting controller, a position of the inkjet body based on the movement signal of which the width is reset, and adjusting and setting, by the ink jetting controller, position information of the inkjet body based on the movement signal of which the width is reset, and transmitting, by the ink jetting controller, a jetting command so that the inkjet body jets ink when the adjusted position corresponds to a jetting position.

[0029] According to an embodiment, the encoder can output the movement signal as a pulse wave. The signal separator can count a width of the pulse wave and can reset the counted width to output a substitute pulse wave.

[0030] According to an embodiment, the signal separator can count the pulse wave output by the encoder for each defined unit, and can reset a width of the counted pulse wave to output a substitute pulse wave.

[0031] According to an embodiment, the signal separator can output, with the substitute pulse wave for precise movement, a non-defined unit deviated from the defined unit.

[0032] According to an embodiment, the signal separator can subtract, from the pulse wave output by the encoder, a width corresponding to one or more pulse waves output by the encoder, or add the width corresponding to one or more pulse waves output by the encoder to the pulse wave output by the encoder, when outputting the substitute pulse wave for precise movement.

[0033] According to an embodiment, the signal separator can generate a substitute pulse wave using a multiplier.

[0034] According to an embodiment, the ink module transfer part can include a module base on which the ink body is mounted, an actuator driving part that transfers the module base in one direction, and an ink module position controller that controls the actuator driving part to transfer the module base and controls a position at which the ink is ejected.

[0035] According to an embodiment, the ink module position controller can interoperate with an encoder to obtain position information of the module base from the encoder.

[0036] According to an embodiment, the control method can further include, before transferring the ink body, transferring a transfer object received on the substrate transfer part according to a predetermined command of the base controller to arrange the transfer object at a specific position under the ink body.

[0037] According to an embodiment, a substrate processing apparatus can include: a substrate transfer portion on which a substrate transfer object is received; and an ejection system portion including: an inkjet body that ejects and prints ink on the transfer object over an upper surface of the substrate transfer portion; an ink module transfer portion that transfers the inkjet body; an encoder provided around the ink module transfer portion to output a movement signal per unit movement distance of the ink module transfer portion; an ink ejection controller that interoperates with the inkjet body to control an ejection timing of the inkjet body; and a signal separator that interoperates with the encoder to count the movement signal, reset a width of the counted movement signal, and transmit the width-reseting movement signal to the ink ejection controller. The encoder can output the movement signal as a pulse wave. The signal separator can count a width of the pulse wave and can reset the counted width to output a replacement pulse wave. The signal separator can count the pulse wave output by the encoder per a defined unit and can reset a width of the counted pulse wave to output a replacement pulse wave. The signal separator can output the replacement pulse wave for a precise movement together with the replacement pulse wave in a non-defined unit deviated from the defined unit. The signal separator can subtract a width corresponding to one or more pulse waves output by the encoder from the pulse wave output by the encoder or add the width corresponding to one or more pulse waves output by the encoder to the pulse wave output by the encoder when outputting the replacement pulse wave for the precise movement. A plurality of inkjet bodies and a plurality of ink ejection controllers can interoperate with each other to eject ink. The signal separator can output the replacement pulse wave to each of the plurality of ink ejection controllers. The signal separator can generate the replacement pulse wave using a multiplier. The ink module transfer portion can include: a module base on which the inkjet body is mounted; an actuator driving portion that transfers the module base in one direction; and an ink module position controller that controls the actuator driving portion to transfer the module base and controls a position at which ink is ejected. The ink module position controller can interoperate with the encoder to obtain position information of the module base from the encoder. BRIEF DESCRIPTION OF DRAWINGS

[0038] The above and other objects and features will become apparent from the following description of embodiments given with reference to the accompanying drawings, in which like reference numerals refer to like elements unless otherwise specified, and in which:

[0039] Figure 1 is a drawing illustrating a configuration of a substrate processing apparatus according to an embodiment of the inventive concept;

[0040] Figure 2 is a graph for comparing a pulse wave output from an encoder shown in Figure 1 with a replacement pulse wave output from a signal separator shown in Figure 1 at the same time zone;

[0041] Figure 3 is a graph of a state in which the alternative pulse wave shown in Figure 2 is transformed into another alternative pulse wave; and

[0042] Figure 4 is a flowchart of a control method for a substrate processing apparatus according to an embodiment of the inventive concept. DETAILED DESCRIPTION

[0043] Hereinafter, embodiments for implementing the inventive concept will be described with reference to the accompanying drawings. In this case, unless otherwise specified, throughout the specification, when a certain part "comprises" a certain component, it is considered to mean that it can further include other components than the certain component, rather than excluding the other components. Also, the term "…unit" used in the specification can refer to a unit processing at least one function or operation when describing electronic hardware or electronic software, and it is considered to refer to one part, function, purpose, point, or driving element when describing mechanical apparatuses. Also, hereinafter, the same reference numerals will be used to describe the same configurations or similar configurations, and repetitive description of the same components will be omitted.

[0044] Figure 1 is a drawing illustrating a configuration of a substrate processing apparatus according to an embodiment of the inventive concept. Figure 2 is a graph for comparing a pulse wave output from an encoder shown in Figure 1 with an alternative pulse wave output from a signal separator shown in Figure 1 in the same time zone. Figure 3 is a graph of a state in which the alternative pulse wave shown in Figure 2 is transformed into another alternative pulse wave.

[0045] As shown in Figure 1 , a substrate processing apparatus according to an embodiment of the inventive concept can include a substrate transfer part 10 and a spray system part 20.

[0046] The substrate transfer unit 10 can include a transfer base 11 on which the transfer object 1a is received, a transfer actuator driving unit 12 for transferring the transfer base 11 in one axis or in multiple directions, and a base controller 13 for controlling the transfer actuator driving unit 12. In this case, the transfer actuator driving unit 12 can be composed of a transfer device such as a linear motor or a linear actuator. In the present embodiment, the substrate transfer unit 10 is exemplified as a one-axis transfer device that transfers the transfer base 11 in one axis. Here, the transfer object 1a transferred by the substrate transfer unit 10 can be composed of a display substrate printed with ink and can transfer the display substrate. However, the transfer object 1a transferred by the substrate transfer unit 10 is not limited to the display substrate in the inventive concept. Obviously, the transfer object 1a can be implemented by various modifications into a printed circuit board or the like. Here, the substrate transfer unit 10 can be disposed to span the ink module transfer unit 23 to be described below. For example, when the transfer object 1a is transferred in the Y axis on a plane with respect to the X axis and the Y axis, the ink module transfer unit 23 can move in the X axis to move on the plane. Further, the substrate transfer unit 10 can interoperate with the ink ejection controller 25 to transmit position information about the Y axis of the transfer object 1a. In this case, the position information about the Y axis can be transmitted from a device having an encoding function installed in the substrate transfer unit 10 to provide the position information of the Y axis. Further, the base controller 13 can interoperate with the substrate transfer unit 10 to transfer the transfer base 11 of the substrate transfer unit 10 according to a predetermined work command, thus transferring the transfer object 1a received on the transfer base 11. In this case, when the ejection system unit 20 performs an ink ejection command, the base controller 13 can stop the transfer of the transfer object 1a and can move a certain distance after printing on a partial area of the transfer object 1a to print on the next area of the transfer object 1a.

[0047] The ejection system unit 20 can include an ink ejection main body 21 for ejecting ink, an ink supply unit 22, an ink module transfer unit 23, an encoder 24, an ink ejection controller 25, and a signal separator 26.

[0048] The inkjet body 21 can be formed to include a piezoelectric element (not shown) and a head (not shown) fitted with the piezoelectric element through which ink passes. Such an inkjet body 21 can be connected with the ink supply 22. When ink supplied from the ink supply 22 is introduced into a flow path inside the head, the piezoelectric element coupled to the head can be driven to eject the ink inside the head. However, the configuration of the inkjet body 21 is not limited to the scheme using the piezoelectric element in the inventive concept. It is obvious that the configuration of the inkjet body 21 is implemented by transformation in various forms such as a type for heating the head. In this case, the inkjet body 21 can be mounted on the module base 23a to jet ink while the jetting position is varied. Such an inkjet body 21 can be composed of a plurality of inkjet bodies 21 disposed in a state that the plurality of inkjet bodies 21 are spaced apart from each other. The plurality of inkjet bodies 21 can simultaneously jet ink to the printing surface of the conveyance object 1a to reduce the ink application time.

[0049] The ink supply 22 can interoperate with the inkjet body 21 to pump and supply ink to the inkjet body 21. In this case, the ink can be variously formed to show RGB light emitting layer ink, conductive ink for wiring on a substrate layer, doping ink for doping a semiconductor, insulating ink for forming an insulating layer, etc., depending on the process.

[0050] The ink module conveyance 23 can include a module base 23a on which the inkjet body 21 is mounted, an actuator driving part 23b for conveying the module base 23a in one direction, and an ink module position controller 23c for controlling the actuator driving part 23b to convey the module base 23a and controlling the position of the jetted ink. In this case, the actuator driving part 23b can be composed of a linear motor or a linear actuator that interoperates with the module base 23a to convey the module base 23a in one axis or multiple directions. In the present embodiment, the ink module conveyance 23 is exemplified as a one-axis conveyance apparatus that conveys the module base 23a in one axis. Here, a plurality of inkjet bodies 21 can be arranged to be spaced apart from each other on the ink module conveyance 23. Further, the ink module position controller 23c can receive a pulse wave 2a from the encoder 24 to obtain position information of the encoder 24, and can control the actuator driving part 23b based on the position information of the encoder 24 to control the position of the inkjet body 21.

[0051] The encoder 24 can be installed around the ink module transfer unit 23 to detect a straight movement distance of the ink ejection body 21. In the present embodiment, the encoder 24 can output a pulse wave 2a to the signal separator 26 per unit movement distance of the ink module transfer unit 23, the pulse wave 2a being a signal for each movement distance. For example, when the ink module transfer unit 23 moves at an interval of 100 nm, the encoder 24 can output one pulse wave 2a. At this time, when the transfer speed of the ink module transfer unit 23 is 1 m / s, the width of the pulse wave 2a output from the encoder 24 can correspond to 100 ns. In this case, the more the transfer speed of the ink module transfer unit 23 increases, the shorter the width of the pulse wave 2a output from the encoder 24 can become.

[0052] The ink ejection controller 25 can be constituted by a plurality of ink ejection controllers 25 connected to the ink ejection body 21, respectively. The plurality of ink ejection controllers 25 can interoperate with the ink ejection body 21, respectively, to adjust the ejection timing of the ink ejected from the ink ejection body 21. In this case, the ink ejection controller 25 can receive the substitute pulse wave 3b from the signal separator 26 to adjust the ejection timing of the ink, can obtain the position of the ink ejection body 21 through the received substitute pulse wave 3b, and can transmit an ink ejection command to the ink ejection body 21 so that the ink is ejected from the position where the ink is to be ejected.

[0053] The signal separator 26 can be connected between the encoder 24 and the plurality of ink ejection controllers 25 and can transmit the movement signal for each movement distance output from the encoder 24 to the plurality of ink ejection controllers 25. In this case, the signal separator 26 can count the number of pulse waves 2a, which are signals for each movement distance input from the encoder 24, in a defined unit pair to generate a substitute pulse wave 3b in which a width as large as the signal width of the pulse wave 2a is reset, and can transmit the generated substitute pulse wave 3b to the ink ejection controller 25. For example, when the encoder 24 outputs one pulse wave 2a as the ink module transfer unit 23 moves at an interval of 100 nm, and when the encoder 24 outputs 10 pulse waves 2a as the ink module transfer unit 23 moves 1000 nm, the signal separator 26 can count the 10 pulse waves 2a output from the encoder 24 in a defined unit pair and can reset the width of the 10 pulse waves 2a to generate one substitute pulse wave 3b. At this time, when the width of one pulse wave 2a output from the encoder 24 is 10 ns, the signal separator 26 can generate the substitute pulse wave 3b having a width of 100 ns at the time of resetting the width of the 10 pulse waves 2a. At this time, the time point of generating the substitute pulse wave 3b can be the time point 90 ns at which the 10th pulse wave 2a output from the encoder 24 is received. In this case, as shown in FIG. 2B, since the duty of the width of the substitute pulse wave 3b can be adjusted, a substitute pulse wave 3b having a width corresponding to the width of the pulse wave 2a output from the encoder 24 can be output. Figure 3 At this time, the signal separator 26 can count the number of pulse waves 2a output from the encoder 24 in a defined unit pair to generate a substitute pulse wave 3b in which a width as large as the signal width of the pulse wave 2a is reset, and can transmit the generated substitute pulse wave 3b to the ink ejection controller 25. For example, when the encoder 24 outputs one pulse wave 2a as the ink module transfer unit 23 moves at an interval of 100 nm, and when the encoder 24 outputs 10 pulse waves 2a as the ink module transfer unit 23 moves 1000 nm, the signal separator 26 can count the 10 pulse waves 2a output from the encoder 24 in a defined unit pair and can reset the width of the 10 pulse waves 2a to generate one substitute pulse wave 3b. At this time, when the width of one pulse wave 2a output from the encoder 24 is 10 ns, the signal separator 26 can generate the substitute pulse wave 3b having a width of 100 ns at the time of resetting the width of the 10 pulse waves 2a. At this time, the time point of generating the substitute pulse wave 3b can be the time point 90 ns at which the 10th pulse wave 2a output from the encoder 24 is received. In this case, as shown in FIG. 2B, since the duty of the width of the substitute pulse wave 3b can be adjusted, a substitute pulse wave 3b having a width corresponding to the width of the pulse wave 2a output from the encoder 24 can be output.Figure 2 The alternative pulse wave 3b having a width different from the width of the alternative pulse wave 3b shown in FIG. 6. As such, it can be seen that the ink ejection controller 25 moves the ink ejection body 21 by 1000 nm whenever the alternative pulse wave 3b having a width of 100 ns is received. Here, when the pulse wave 2a output from the encoder 24 is counted in each defined unit to generate the alternative pulse wave 3b, the signal separator 26 can more effectively convert the pulse wave 2a of the encoder 24 into the alternative pulse wave 3b by using a multiplier.

[0054] As such, since the pulse waves 2a each having a short width output from the encoder 24 are formed into one alternative pulse wave 3b to transmit the alternative pulse wave 3b to the ink ejection controller 25, the signal separator 26 can distribute the signal of the encoder 24 to a plurality of ink ejection controllers 25. Also, since the ink ejection controller 25 is not selected as an expensive product group robust to noise, production costs can be reduced.

[0055] Meanwhile, as described above, when the pulse wave 2a output from the encoder 24 is counted in units, the width of the pulse wave 2a is reset, and the pulse wave having the width reset is output, for example, when 10 pulse waves 2a are generated as one alternative pulse wave 3b, the signal separator 26 can not be able to detect a slight moving distance corresponding to one pulse wave 2a. For this, as described above, when the pulse wave 2a is counted in the number of pulse waves 2a added as a unit, i.e., in the same defined unit, for example, in units of 10, to generate the alternative pulse wave 3b, the signal separator 26 can adjust the number of pulse waves 2a added to be different from the existing number added at the timing of the pulse wave 2a at a certain period or a predetermined program command to output an alternative pulse wave 4b for accurate movement. For example, the signal separator 26 can count the pulse wave 2a output from the encoder 24 in units of 10 in a state in which it sets the defined unit to 10 to periodically output one alternative pulse wave 3b. At this time, in the process of periodically counting 10 pulse waves 2a in one defined unit, the signal separator 26 can correct the program so as to count 9 pulse waves 2a or 11 pulse waves 2a in one non-defined unit to generate an alternative pulse wave 4b for accurate movement. Then, receiving the alternative pulse wave 4b for accurate movement obtained by counting 9 pulse waves 2a in one non-defined unit, the ink ejection controller 25 knows that the moving distance of the ink ejection body 21 is a distance corresponding to 9, not a distance corresponding to 10. Likewise, receiving the alternative pulse wave 4b for accurate movement obtained by counting 11 pulse waves 2a in one non-defined unit, the ink ejection controller 25 knows that the moving distance of the ink ejection body 21 is a distance corresponding to 11, not a distance corresponding to 10.

[0056] Thus, the signal separator 26 can count the pulse wave 2a output from the encoder 24 to output one alternative pulse wave 3b per defined unit, and can output an alternative pulse wave 4b for accurate movement to change the number of pulse waves 2a added at a certain period or a predetermined specific timing to know the moving distance of the ink ejection body 21 in units of resolution of the encoder 24, thus ejecting ink even in a case where the ink ejection controller in a high performance product group is not used.

[0057] Hereinafter, a description will be given of a control method for the substrate processing apparatus.

[0058] Figure 4 is a flowchart of a control method for a substrate processing apparatus according to an embodiment of the inventive concept.

[0059] Referring to Figure 4 , the control method for a substrate processing apparatus according to an embodiment of the inventive concept can include conveying (S10) a conveyance object, conveying (S20) an ink ejection body, outputting (S30) a signal of an encoder, converting (S40) a signal of a signal separator, distributing (S50) the signal, and controlling (S60) ejection of ink.

[0060] First, in operation S10, Figure 1 The substrate conveying part 10 of the substrate processing apparatus according to an embodiment of the inventive concept can convey a display substrate (which is a conveyance object 1a received on the substrate conveying part 10) under a predetermined command of the base controller 13 to arrange the display substrate (which is the conveyance object 1a) at a specific position under the ink ejection body 21 of the ink module conveying part 23. Figure 1 Figure 1 The substrate conveying part 10 of the substrate processing apparatus according to an embodiment of the inventive concept can convey a display substrate (which is a conveyance object 1a received on the substrate conveying part 10) under a predetermined command of the base controller 13 to arrange the display substrate (which is the conveyance object 1a) at a specific position under the ink ejection body 21 of the ink module conveying part 23. Figure 1

[0061] In operation S20, Figure 1 The ink module conveying part 23 of the substrate processing apparatus according to an embodiment of the inventive concept can convey the ink ejection body 21 disposed on the display substrate.

[0062] In operation S30, per moving distance when the ink ejection body 21 moves, Figure 1 The encoder 24 of the substrate processing apparatus according to an embodiment of the inventive concept can output a pulse wave 2a as a moving signal. For example, as described above, as the ink module conveying part 23 is driven, the encoder 24 can output one pulse wave 2a when the ink ejection body 21 moves 100 nm.

[0063] In operation S40, Figure 1 ​​The signal separator 26 can receive the pulse wave 2a from the encoder 24, can count the number of the received pulse wave 2a, and can output a replacement pulse wave 3b when the pulse wave 2a is received in a defined unit. For example, as described above, the signal separator 26 can count the signals of the pulse wave 2a output from the encoder 24, and can output one replacement pulse wave 3b when the counted number is 10. At this time, the width of the replacement pulse wave 3b output from the encoder 24 can be output as the same as a value obtained by adding the widths of all the pulse waves 2a before reset, or can be set to be greater than or equal to the width of the pulse wave 2a of the encoder 24.

[0064] Further, as described above, in operation S40, the signal separator 26 can generate the replacement pulse wave 3b for each defined unit of the pulse wave 2a, and can output the replacement pulse wave 4b for accurate movement in a non-defined unit deviated from the defined unit, so that the moving distance of the ink ejection body 21 is detected in units of the resolution of the encoder 24.

[0065] In operation S50, the signal separator 26 can output and distribute the replacement pulse wave 3b to each of the ink ejection controllers 25. Receiving the replacement pulse wave 3b, the ink ejection controller 25 can recognize the position of the ink ejection body 21 based on the width of the replacement pulse wave 3b.

[0066] In operation S60, the ink ejection controller 25 can adjust and set the position information of the ink ejection body 21 through the width of the received replacement pulse wave 3b and the counted number. When the corresponding position corresponds to a position at which ink is to be ejected, the ink ejection controller 25 can transmit an ejection command so that the ink ejection body 21 ejects ink. When the corresponding position corresponds to a position at which ink is not to be ejected, the ink ejection controller 25 can not transmit an ejection command.

[0067] As such, in the substrate processing apparatus and the control method for the substrate processing apparatus according to the embodiments of the inventive concept, the signal separator 26 can count the signals of the encoder 24 and can output the replacement pulse wave 3b of which the width is reset, so that the pulse wave 2a of the encoder 24 input to the ink ejection controller 25 is distinguished from noise, so that an expensive ink ejection controller is not used without increasing production costs, and so that the ink module transfer part 23 moves at a higher speed than before to improve productivity.

[0068] In the inventive concept, the signal separator outputs a replacement pulse wave instead of the signals of the encoder to distinguish the pulse wave of the encoder input to the ink ejection controller from noise, so that an expensive ink ejection controller is not used without increasing production costs, and so that the moving speed of the ink ejection body is more improved than before to improve productivity.

[0069] The inventive concept has been described with reference to specific details of certain embodiments thereof, but those skilled in the art will understand that the inventive concept is not limited to the details described herein. Various modifications and changes can be made to the described embodiments without departing from the scope of the inventive concept.

[0070] Hence, the spirit of the inventive concept should not be limited to the described embodiments and the claims later described should be interpreted as covering all modifications and variants that fall within the scope of the inventive concept.

Claims

1. A substrate processing apparatus comprising: a substrate transfer section on which a transfer object is received; and an ejection system section including: an inkjet body configured to eject and print ink on the transfer object over an upper surface of the substrate transfer section; an ink module transfer section configured to transfer the inkjet body; an encoder provided around the ink module transfer section and configured to output a movement signal per unit movement distance of the ink module transfer section; an ink ejection controller configured to interoperate with the inkjet body to control ink ejection timing of the inkjet body; and a signal separator configured to interoperate with the encoder to count the movement signal, reset a width of the counted movement signal, and transmit the width-reset movement signal to the ink ejection controller, wherein the encoder outputs the movement signal as a pulse wave, wherein the signal separator counts the pulse wave output by the encoder for each defined unit, and resets the width of the counted pulse wave to output a replacement pulse wave, and the signal separator outputs the replacement pulse wave for precise movement together with the replacement pulse wave in a non-defined unit deviated from the defined unit, wherein the signal separator, when outputting the replacement pulse wave for precise movement, subtracts a width corresponding to one or more pulse waves output by the encoder from the pulse wave output by the encoder, or adds a width corresponding to one or more pulse waves output by the encoder to the pulse wave output by the encoder, wherein the replacement pulse wave is generated at a point in time at which a last pulse wave in the defined unit is received by the signal separator, and the ink ejection controller receives the replacement pulse wave and the replacement pulse wave for precise movement from the signal separator, acquires a position of the inkjet body based on the received replacement pulse wave, and transmits an ink ejection command to the inkjet body when the position corresponds to a position at which the ink is to be ejected. a plurality of inkjet bodies and a plurality of ink ejection controllers interoperate with each other to eject the ink, and 2. The substrate processing apparatus of claim 1, wherein, wherein the signal separator outputs the replacement pulse wave to each of the plurality of ink ejection controllers. The signal separator generates the replacement pulse wave using a multiplier.

3. The substrate processing apparatus of claim 1, wherein, The ink module transfer section includes:

4. The substrate processing apparatus of claim 1, wherein, a module base on which the inkjet body is mounted; an actuator drive section configured to transfer the module base in one direction; and an ink module position controller configured to control the actuator drive section to transfer the module base and to control a position at which the ink is ejected. The ink module position controller interoperate with the encoder to obtain position information of the module base from the encoder.

5. The substrate processing apparatus of claim 4, wherein, The substrate transfer section includes a base controller configured to cause the transfer object to depend on a predetermined work command.

6. The substrate processing apparatus of claim 1, wherein, 7.A control method for a substrate processing apparatus, the control method comprising: ​ transmitting an inkjet main body disposed on a transfer object through an ink module transfer portion included in the substrate processing apparatus; outputting a movement signal through an encoder included in the substrate processing apparatus per movement distance when the inkjet main body moves; receiving the movement signal through a signal separator included in the substrate processing apparatus, counting the movement signal through the signal separator, resetting a width of the counted movement signal through the signal separator, and outputting the movement signal of which the width is reset through the signal separator; outputting and distributing the movement signal of which the width is reset through the signal separator to each ink ejection controller included in the substrate processing apparatus, and recognizing a position of the inkjet main body based on the movement signal of which the width is reset through the ink ejection controller; and adjusting and setting position information of the inkjet main body based on the movement signal of which the width is reset through the ink ejection controller, and transmitting an ejection command so that the inkjet main body ejects ink when the adjusted position corresponds to an inkjet position through the ink ejection controller, wherein the encoder outputs the movement signal as a pulse wave, wherein the signal separator counts the pulse wave output by the encoder per defined unit, and resets the width of the counted pulse wave to output a substitute pulse wave, and outputs the substitute pulse wave for precise movement together with the substitute pulse wave in a non-defined unit deviated from the defined unit, wherein the signal separator subtracts or adds a width corresponding to one or more pulse waves output by the encoder from or to the pulse wave output by the encoder when outputting the substitute pulse wave for precise movement, wherein the substitute pulse wave is generated at a point in time when a last pulse wave in the defined unit is received by the signal separator, and the ink ejection controller receives the substitute pulse wave and the substitute pulse wave for precise movement from the signal separator, acquires a position of the inkjet main body based on the received substitute pulse wave, and transmits an ink ejection command to the inkjet main body when the position corresponds to a position at which the ink is to be ejected.

8. The control method according to claim 7, wherein The signal separator outputs the substitute pulse wave for precise movement together with the substitute pulse wave in a non-defined unit deviated from the defined unit.

9. The control method according to claim 8, wherein The signal separator subtracts or adds a width corresponding to one or more pulse waves output by the encoder from or to the pulse wave output by the encoder when outputting the substitute pulse wave for precise movement.

10. The control method according to claim 7, wherein The signal separator generates the substitute pulse wave using a multiplier.

11. The control method according to claim 7, wherein The ink module transfer portion includes: a module base on which the inkjet main body is mounted; an actuator drive configured to convey the module base in one direction; and an ink module position controller configured to control the actuator drive to convey the module base and to control a position at which the ink is ejected.

12. The control method according to claim 11, wherein The ink module position controller interoperates with the encoder to obtain position information of the module base from the encoder.

13. The control method according to claim 7, further comprising: conveying the conveyance object received on the substrate conveyance section according to a predetermined command of a base controller to arrange the conveyance object at a specific position below the inkjet body before conveying the inkjet body.

14. A substrate processing apparatus comprising: a substrate conveyance section on which a conveyance object is received; and an ejection system section including: an inkjet body configured to eject and print ink on the conveyance object above an upper surface of the substrate conveyance section; an ink module conveyance section configured to convey the inkjet body; an encoder provided around the ink module conveyance section and configured to output a movement signal per unit movement distance of the ink module conveyance section; an ink ejection controller configured to interoperate with the inkjet body to control ink ejection timing of the inkjet body; and a signal separator configured to interoperate with the encoder to count the movement signal, reset a width of the counted movement signal, and transmit the width-reset movement signal to the ink ejection controller, wherein the encoder outputs the movement signal to the signal separator as a pulse wave, wherein the signal separator counts a width of the pulse wave and resets the counted width to output a substitute pulse wave, wherein the signal separator counts the pulse wave output by the encoder for each defined unit and resets the width of the counted pulse wave to output the substitute pulse wave, wherein the substitute pulse wave is generated at a point in time at which a last pulse wave in the defined unit is received by the signal separator, wherein the signal separator outputs a substitute pulse wave for fine movement together with the substitute pulse wave in a non-defined unit deviated from the defined unit, wherein the signal separator subtracts a width corresponding to one or more pulse waves output by the encoder from the pulse wave output by the encoder or adds a width corresponding to one or more pulse waves output by the encoder to the pulse wave output by the encoder when outputting the substitute pulse wave for fine movement, wherein a plurality of inkjet bodies and a plurality of ink ejection controllers interoperate with each other to eject the ink, wherein the signal separator outputs the substitute pulse wave to each of the plurality of ink ejection controllers, wherein the signal separator generates the substitute pulse wave using a multiplier, wherein the ink module conveyance section includes: a module base on which the inkjet body is mounted; an actuator drive configured to convey the module base in one direction; and an ink module position controller configured to control the actuator drive to convey the module base and to control a position at which the ink is ejected. an ink module position controller configured to control the actuator drive section to convey the module base and to control a position at which the ink is ejected, and wherein the ink module position controller interoperates with the encoder to obtain position information of the module base from the encoder, and the ink ejection controller receives the substitute pulse wave and the substitute pulse wave for fine movement from the signal separator, acquires a position of the ink ejection body based on the received substitute pulse wave, and transmits an ink ejection command to the ink ejection body when the position corresponds to a position at which the ink is to be ejected.

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