Vibration isolation assembly and molecular pump having the same

Abstract

The present application relates to the technical field of molecular pump, in particular to a vibration isolation assembly and a molecular pump with the same. The vibration isolation assembly comprises a shock-absorbing base, a plurality of shock-absorbing side plates are arranged on the shock-absorbing base in a relative manner, and a first connecting end is arranged on the inner wall of each shock-absorbing side plate; a support base is adapted to be connected with a vibration isolation platform, the support base comprises a support side plate corresponding to the shock-absorbing side plate, a second connecting end is arranged on the support side plate and faces the shock-absorbing side plate, and the first connecting end and the second connecting end are arranged in a staggered manner along the vertical direction of the vibration isolation assembly; and an elastic member is connected with the first connecting end at one end and connected with the second connecting end at the other end, so as to buffer the vibration transmitted from the support base to the shock-absorbing base or the vibration transmitted from the shock-absorbing base to the support base through the elastic member. The present application solves the problem that the vibration of the workbench caused by the influence of the external environment is transmitted to the vibration platform, and then the vibration isolation platform affects the dynamic balance or stability of the molecular pump.

Description

Technical Field

[0001] This invention relates to the field of molecular pump technology, and more specifically to a vibration isolation component and a molecular pump having the same. Background Technology

[0002] In fields such as precision measurement and microscopic imaging, low-frequency vibrations are highly sensitive. Low-frequency vibrations from the external environment can lead to inaccurate measurements and introduce measurement errors. Therefore, molecular pump isolation stages are needed to provide measurement conditions for both high-precision and high-stability scientific research and industrial production.

[0003] Following the pace of industrial development, a molecular pump vibration isolation table was developed to eliminate vibrations that affect measuring equipment. This table effectively isolates low-frequency vibrations transmitted from the ground, playing a crucial role in precision research and development and industrial production.

[0004] In actual use, there are two main factors affecting the vibration isolation effect of the molecular pump vibration isolation table: the natural vibration frequency of the vibration insulator and the external environmental vibration. On-site personnel often place the vibration isolation table on the workbench, while other molecular pumps, mechanical pumps, personnel movement, and material movement in the environment will generate vibration. The vibration is transmitted from the workbench to the vibration table, and then affects the dynamic balance or stability of the molecular pump through the vibration isolation table. Summary of the Invention

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the defects in the prior art where the worktable is affected by the external environment and vibrates, and the vibration is transmitted from the worktable to the vibration table, and then affects the dynamic balance or stability of the molecular pump through the vibration isolation table, thereby providing a vibration isolation component and a molecular pump having the same.

[0006] To address the above problems, the present invention provides a vibration isolation component, comprising:

[0007] A shock-absorbing base is provided with a set of oppositely arranged shock-absorbing side plates, and a first connecting end extends from the inner wall of each shock-absorbing side plate;

[0008] A support base is adapted to be connected to a vibration isolation table. The support base includes a support side plate corresponding to the vibration damping side plate. A second connecting end extends from the support side plate toward the vibration damping side plate. The second connecting end and the first connecting end are staggered along the vertical direction of the vibration isolation assembly.

[0009] An elastic element, one end of which is connected to a first connecting end and the other end of which is connected to a second connecting end, so as to buffer the vibration transmitted from the support seat to the damping base, or the vibration transmitted from the damping base to the support seat.

[0010] Optionally, the elastic element is a ring-shaped rectangular structure, and the opposite ends of the elastic element are respectively connected to the first connecting end and the second connecting end.

[0011] Optionally, it further includes a pressure plate, through which the first connecting end fixes the elastic element to the first connecting end; and / or,

[0012] The second connecting end fixes the elastic element to the second connecting end through the pressure plate.

[0013] Optionally, a gasket is provided between the elastic element and the first connecting end and the second connecting end, respectively.

[0014] Optionally, the support base further includes a top plate adapted to be fixedly connected to the bottom of the molecular pump.

[0015] Optionally, the shock-absorbing base is further provided with a base plate, which is fixedly connected to the shock-absorbing side plate. A groove is provided on the bottom surface of the base plate opposite to the shock-absorbing side plate, and the groove is suitable for embedding a vibration-damping rubber pad.

[0016] Optionally, a protective plate is connected to each of the two sides of the shock-absorbing side plate.

[0017] A molecular pump comprising the aforementioned vibration isolation components.

[0018] Optionally, it also includes a vibration isolation table, which is connected to the top plate of the support.

[0019] The technical solution of this invention has the following advantages:

[0020] 1. The vibration isolation component provided by the present invention includes a vibration damping base, a set of opposing vibration damping side plates on the vibration damping base, and a first connecting end extending from the inner wall of each vibration damping side plate; a support base, adapted to connect with a vibration isolation table, the support base including a support side plate corresponding to the vibration damping side plates, a second connecting end extending from the support side plate towards the vibration damping side plate, the second connecting end and the first connecting end being staggered along the vertical direction of the vibration isolation component; and an elastic element, one end connected to the first connecting end and the other end connected to the second connecting end, to buffer vibrations transmitted from the support base to the vibration damping base, or vibrations transmitted from the vibration damping base to the support base. The vibration damping base and the support base are connected only by the elastic element. When a molecular pump or other precision equipment placed on the support base operates, vibrations are generated. When the vibration is transmitted to the vibration damping base, the elastic element buffers the vibration amplitude, thereby reducing the impact of the vibration of the support base on the vibration damping base. When the vibration damping base is affected by vibrations from the external environment, the vibration is transmitted to the support base, and the elastic element buffers the vibration amplitude, thereby reducing the impact of the vibration of the vibration damping base on the support base.

[0021] 2. The vibration isolation component provided by the present invention has an elastic element in the form of a ring-shaped rectangular structure. The ring-shaped rectangular structure has the advantage of being lightweight. The two opposite ends of the elastic element are respectively connected to the first connecting end and the second connecting end, so as to realize the elastic connection between the vibration damping base and the support through the elastic element.

[0022] 3. The vibration isolation component provided by the present invention further includes a pressure plate, wherein the first connecting end fixes the elastic element to the first connecting end by means of the pressure plate; the second connecting end fixes the elastic element to the second connecting end by means of the pressure plate, thereby fixing the first connecting end and the elastic element by means of the pressure plate.

[0023] 4. In the vibration isolation component provided by the present invention, a gasket is provided between the elastic element and the first connecting end and the second connecting end respectively. The gasket plays a buffering role and avoids direct connection between the elastic element and the first connecting end and the second connecting end.

[0024] 5. The vibration isolation component provided by the present invention further includes a top plate on the support base. The top plate is adapted to be fixedly connected to the bottom of the molecular pump to realize the connection between the top plate and the molecular pump. The support base provides support for the molecular pump.

[0025] 6. The vibration isolation component provided by the present invention further includes a base plate on the vibration damping base. The base plate is fixedly connected to the vibration damping side plate. A groove is provided on the bottom surface of the base plate opposite to the vibration damping side plate. The groove is suitable for embedding a vibration damping rubber pad. The vibration damping rubber pad changes the rigid connection between the vibration damping base and the external environment.

[0026] 7. The vibration isolation component provided by the present invention has a protective plate connected to each of the two sides of the vibration damping side plate. The protective plate prevents the support from moving to the side of the vibration damping base and prevents accidents from happening.

[0027] 8. The molecular pump provided by the present invention has the advantages described in any of the above-mentioned items due to the use of the vibration isolation component described in any of the above-mentioned items, and further includes a vibration isolation table, which is connected to the top plate of the support base, so as to reduce vibration through the dual action of the vibration isolation table and the vibration isolation component. Attached Figure Description

[0028] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the vibration isolation assembly provided in an embodiment of the present invention;

[0030] Figure 2 This is a schematic diagram of the vibration isolation component provided in an embodiment of the present invention;

[0031] Figure 3 This is a schematic diagram of the structure of the vibration isolation component after the protective plate is removed in an embodiment of the present invention;

[0032] Figure 4 This is a schematic diagram of the vibration isolation assembly provided in an embodiment of the present invention after the protective plate has been removed.

[0033] Explanation of reference numerals in the attached drawings: 1. Top plate; 2. Shock-absorbing side plate; 3. First connecting end; 4. Elastic element; 5. Supporting side plate; 6. Pressure plate; 7. Gasket; 8. Bottom plate; 9. Protective plate; 10. Second connecting end; 11. Screw; 12. Nut; 13. Groove. Detailed Implementation

[0034] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0036] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0037] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0038] like Figure 1 - Figure 4One specific embodiment of the vibration isolation assembly shown includes: a damping base and a support connected by an elastic element 4, wherein the elastic element 4 is a ring-shaped rectangular structure. Specifically, the elastic element 4 is a rectangular spring.

[0039] like Figure 1 , Figure 3 and Figure 4 As shown, the shock-absorbing base includes a base plate 8 and a pair of opposing, spaced-apart shock-absorbing side plates 2 extending in the same direction from the base plate 8. The base plate 8 and the shock-absorbing side plates 2 are integrally formed. Each shock-absorbing side plate 2 has a first connecting end 3 extending from its inner wall; that is, the first connecting end 3 extending from one shock-absorbing side plate 2 faces the other shock-absorbing side plate 2. Figure 2 As shown, two rectangular grooves 13 are provided on the bottom surface of the base plate 8 away from the damping side plate 2, and the grooves 13 are suitable for embedding vibration isolation rubber pads. Figure 1 As shown, a protective plate 9 is fixedly connected to each of the two sides of the shock-absorbing side plate 2 by screws 11.

[0040] like Figure 3 , Figure 4 As shown, the support base includes a top plate 1 and a pair of spaced-apart support side plates 5 arranged from the top plate 1 toward the bottom plate 8 of the shock-absorbing base. Each support side plate 5 has a second connecting end 10 extending toward the shock-absorbing side plate 2. The second connecting end 10 and the first connecting end 3 are vertically arranged along the height direction of the shock-absorbing base. The first connecting end 3 and the second connecting end 10 are each provided with three equally spaced through holes. Figure 3 As shown, the first connecting end 3 is fixed to the elastic element 4 by the pressure plate 6, and a washer 7 is provided between the elastic element 4 and the first connecting end 3. That is, the screw 11 passes through the shock-absorbing side plate 2, the first connecting end 3, the washer 7, the elastic element 4 and the pressure plate 6 in sequence and is then threadedly connected to the nut 12 to fix the first connecting end 3 and the elastic element 4. The second connecting end 10 is fixed to the elastic element 4 by the pressure plate 6, and a washer 7 is provided between the elastic element 4 and the second connecting end 10. That is, the screw 11 passes through the support side plate 5, the second connecting end 10, the washer 7, the elastic element 4 and the pressure plate 6 in sequence and is then threadedly connected to the nut 12 to fix the second connecting end 10 and the elastic element 4.

[0041] A molecular pump includes the aforementioned vibration isolation assembly and a vibration isolation table connected to the top plate 1 of the support base.

[0042] In actual use, the vibration damping base is placed on the workbench, and the molecular pump is fixedly connected to the support base through the vibration isolation table. When the molecular pump starts to run, the vibration generated by the molecular pump is transmitted to the vibration damping base through the support base. The vibration amplitude is buffered by the elastic element 4. Through the deformation of the elastic element 4 itself, the impact of the vibration of the support base on the vibration damping base is reduced. When the vibration damping base is affected by the vibration of the external environment, the vibration will be transmitted to the support base through the vibration damping base. The elastic element 4 will buffer the vibration amplitude, thereby reducing the impact of the vibration of the vibration damping base on the support base.

[0043] As an alternative implementation, the number of through holes in the first connecting end 3 and the second connecting end 10 may be one, two, or even more.

[0044] As an alternative implementation, the elastic element 4 can also be a rectangular rubber pad.

[0045] As an alternative implementation, a snap-fit ​​groove is provided above the first connecting end 3 and a snap-fit ​​groove is provided below the second connecting end 10. The two opposite sides of the elastic member 4 are fixed to the first connecting end 3 and the second connecting end 10 respectively by snap-fit.

[0046] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A vibration isolation assembly adapted for use with a molecular pump, characterized by, The utility model relates to a vibration isolation assembly, comprising: a damping base provided with a set of oppositely arranged damping side plates (2), each of which has a first connecting end (3) extending from the inner wall thereof; a support base adapted to be connected to the vibration isolation platform, comprising support side plates (5) corresponding to the damping side plates (2), each of which has a second connecting end (10) extending towards the damping side plates (2), the second connecting end (10) and the first connecting end (3) being staggered along the vertical direction of the vibration isolation assembly; a resilient member (4) having one end connected to the first connecting end (3) and the other end connected to the second connecting end (10) to buffer the vibration transmitted from the support base to the damping base or from the damping base to the support base through the resilient member (4); the resilient member (4) has a ring-shaped rectangular structure, and the opposite ends of the resilient member (4) are connected to the first connecting end (3) and the second connecting end (10), respectively; the first connecting end (3) is provided with a pressing plate (6) for fixing the resilient member (4) to the first connecting end (3); and / or the second connecting end (10) is provided with a pressing plate (6) for fixing the resilient member (4) to the second connecting end (10); the pressing plate (6) is spaced apart from the support side plates (5) and the damping side plates (2), respectively.

2. The vibration isolation assembly of claim 1, wherein, The resilient member (4) is provided with a gasket (7) between the first connecting end (3) and the second connecting end (10), respectively.

3. The vibration isolation assembly of claim 1, wherein, The support base further comprises a top plate (1) adapted to be fixedly connected to the bottom of the molecular pump.

4. The vibration isolation assembly of claim 1, wherein, The damping base is further provided with a bottom plate (8) fixedly connected to the damping side plates (2), the bottom surface of the bottom plate (8) away from the damping side plates (2) is provided with a groove (13) adapted to embed a vibration isolation rubber pad.

5. The vibration isolation assembly of claim 4, wherein, Each of the two side surfaces of the damping side plate (2) is connected to a protective plate (9).

6. A molecular pump, characterized by, The utility model further comprises the vibration isolation assembly according to any one of claims 1-5.

7. The molecular pump of claim 6, wherein, The utility model further comprises a vibration isolation platform connected to the top plate (1) of the support base.

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