Optical parallel window part transmission wavefront shaping method

Abstract

The application provides an optical parallel window part transmission wave front shaping method and relates to the technical field of optical processing. The method comprises the following steps: obtaining first detection data of a first optical parallel window part transmission wave front; determining second detection data of the first optical parallel window part transmission wave front based on the first detection data and an optical path difference calculation principle; and shaping the first optical parallel window part by using an ion beam polishing device based on the second detection data to obtain a second optical parallel window part; and third detection data of a second optical parallel window part transmission wave front is less than the first detection data. Through the detection of the first optical parallel window part transmission wave front, the optical path difference calculation principle and the combination of the ion beam polishing, the shaping of the optical parallel window part transmission wave front is realized, and the precision of the optical parallel window part transmission wave front is improved.

Description

Technical Field

[0001] This invention relates to the field of optical processing technology, and in particular to a method for modifying the transmission wavefront of an optical parallel window component. Background Technology

[0002] In the optical cold processing industry, optical components have high requirements for the precision of their overall surface shape. Generally, cold processing and other methods are used to polish the two surfaces of the optical components to a high precision in order to achieve the desired overall surface shape.

[0003] In related technologies, classical polishing is mainly used to achieve the requirements of the two surfaces mentioned above. However, due to the high precision required, classical polishing itself has great uncertainty and requires a high level of skill and polishing experience. Achieving high precision is very difficult, resulting in low overall surface accuracy of optical components. Summary of the Invention

[0004] This invention provides a method for modifying the transmission wavefront of an optical parallel window component to solve the problem of low overall surface accuracy of optical elements in the prior art.

[0005] This invention provides a method for modifying the transmission wavefront of an optical parallel window component, comprising:

[0006] Acquire the first detection data of the transmitted wavefront of the first optical parallel window component;

[0007] Based on the first detection data and the optical path difference calculation principle, the second detection data of the transmitted wavefront of the first optical parallel window component is determined.

[0008] Based on the second detection data, the first optical parallel window part is reshaped using an ion beam polishing device to obtain a second optical parallel window part; the third detection data of the second optical parallel window part transmitted through the wavefront is less than the first detection data.

[0009] According to the present invention, a method for modifying the transmission wavefront of an optical parallel window component, wherein acquiring first detection data of the transmission wavefront of the first optical parallel window component includes:

[0010] Based on the principle of interference, a laser interferometer is used to detect the transmitted wavefront of the first optical parallel window component to obtain the first detection data.

[0011] According to the present invention, a method for modifying the transmission wavefront of an optical parallel window component, wherein determining second detection data of the transmission wavefront of the first optical parallel window component based on the first detection data and the optical path difference calculation principle includes:

[0012] Import the first detection data into the interferometer surface shape analysis software;

[0013] Based on the principle of optical path difference calculation and the refractive index corresponding to the first optical parallel window component, the first coefficient corresponding to the first optical parallel window component is determined.

[0014] Based on the first coefficient, the comprehensive surface shape corresponding to the first detection data is superimposed on a single surface of the first optical parallel window component to obtain the second detection data of the transmitted wavefront of the first optical parallel window component.

[0015] According to the present invention, a method for modifying the transmission wavefront of an optical parallel window component includes, based on the first coefficient, superimposing the composite surface shape corresponding to the first detection data onto a single surface of the first optical parallel window component to obtain second detection data of the transmission wavefront of the first optical parallel window component, comprising:

[0016] Multiply the first coefficient and the first detection data, and superimpose the comprehensive surface shape corresponding to the first detection data onto a single surface of the first optical parallel window component to obtain the second detection data of the first optical parallel window component transmitted wavefront.

[0017] According to the present invention, a method for modifying the transmission wavefront of an optical parallel window component is provided, wherein the surface shape distribution corresponding to the second detection data is opposite to the surface shape distribution corresponding to the first detection data.

[0018] According to the present invention, a method for modifying the transmission wavefront of an optical parallel window component, wherein the first optical parallel window component is modified using an ion beam polishing device based on the second detection data to obtain a second optical parallel window component, includes:

[0019] Use the surface shape corresponding to the second detection data as the basic surface shape;

[0020] The basic surface shape is iteratively modified using an ion beam polishing device to obtain the second optical parallel window component.

[0021] According to the present invention, a method for modifying the transmission wavefront of an optical parallel window component, wherein the basic surface shape is iteratively modified using an ion beam polishing device to obtain a second optical parallel window component, includes:

[0022] The basic surface shape is reshaped using an ion beam polishing device to obtain the first reshaped surface shape.

[0023] Determine the third detection data corresponding to the first surface shape;

[0024] Based on the third detection data, the second optical parallel window component is obtained.

[0025] According to the present invention, a method for modifying the transmission wavefront of an optical parallel window component, wherein obtaining the second optical parallel window component based on the third detection data includes:

[0026] Determine whether the third detection data is less than a preset threshold;

[0027] Based on the judgment result, the second optical parallel window component is obtained.

[0028] According to the present invention, a method for modifying the transmission wavefront of an optical parallel window component, wherein obtaining the second optical parallel window component based on the judgment result includes:

[0029] If the third detection data is not less than the preset threshold, repeat the above steps of determining the third detection data corresponding to the first surface shape.

[0030] If the third detection data is less than the preset threshold, the surface shape corresponding to the third detection data is taken as the final modified surface shape, and the second optical parallel window component is obtained based on the final modified surface shape.

[0031] According to a method for modifying the transmission wavefront of an optical parallel window component provided by the present invention, before acquiring the first detection data of the transmission wavefront of the first optical parallel window component, the method further includes:

[0032] The initial optical parallel window component was polished using a low-speed polishing method to obtain the first optical parallel window component.

[0033] The method for modifying the transmission wavefront of an optical parallel window component provided by this invention involves obtaining first detection data of the transmission wavefront of a first optical parallel window component, determining second detection data of the first optical parallel window component based on the first detection data and the principle of optical path difference calculation, and then modifying the first optical parallel window component using an ion beam polishing device based on the second detection data to obtain a second optical parallel window component. The third detection data of the second optical parallel window component is less than the first detection data. By combining the detection of the transmission wavefront of the first optical parallel window component, the principle of optical path difference calculation, and the use of ion beam polishing, the method achieves the modification of the transmission wavefront of the optical parallel window component, thereby improving the accuracy of the transmission wavefront of the optical parallel window component. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0035] Figure 1 This is one of the flowcharts illustrating the transmission wavefront shaping method for optical parallel window components provided by the present invention;

[0036] Figure 2 This is the second schematic flowchart of the method for modifying the transmission wavefront of an optical parallel window component provided by the present invention. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0038] To facilitate a clearer understanding of the various embodiments of this application, some relevant knowledge will be introduced as follows.

[0039] Optical parallel window: refers to a part whose two sides are precision polished, and the parallelism between the two sides is generally within 3 minutes. It is widely used in precision measurement and laser fields.

[0040] Composite surface shape: also known as the transmitted wavefront, refers to the shape of an ideal wavefront after passing through the front surface, material, and back surface of an optical parallel window.

[0041] Ion beam polishing: a modern non-contact polishing technology based on ion sources.

[0042] In the current optical cold processing industry, if optical components require high precision in their overall surface shape, cold processing is generally used to polish the two surfaces of the optical component to a state where the values ​​are basically equal but the shapes are opposite, i.e., one surface is concave and the other is convex. For example, for an optical component with dimensions of 220×150 mm and a thickness of 35 mm, made of quartz, if the overall surface shape requires a peak-to-valley (PV) value of less than 0.1Lambda@633nm (Lambda represents wavelength, Lambda@633nm represents a wavelength of 633nm, and 0.1Lambda@633nm represents 0.1 wavelength), then typically one surface is polished to +0.1Lambda@633nm, while the other surface is polished to -0.1Lambda@633nm. By superimposing the two surfaces, a high precision overall surface shape is achieved.

[0043] Existing polishing technologies suffer from two main problems: First, the processing is extremely difficult. Due to the high precision requirements of the overall surface shape of optical components, classical asphalt polishing inherently involves significant uncertainties and demands extremely high levels of skill and polishing experience, making it very difficult to achieve high precision. Second, classical asphalt polishing neglects the influence of the inherent material properties of the optical components. If there are uniformity issues within the material, polishing both sides and then layering the polishes cannot compensate for these uniformity problems. In other words, regardless of the precision achieved on either side, the internal material properties will still be reflected in the overall surface shape of the optical component. Therefore, if material problems arise, the raw materials must be replaced; otherwise, the required precision for the overall surface shape cannot be achieved.

[0044] Based on this, this invention proposes a method for modifying the transmission wavefront of optical parallel window components. First, ion beam polishing is a deterministic polishing method based on detection data, resulting in high certainty and controllability. Second, by using the principle of optical path difference simulation calculation, internal material defects can be introduced into the surface modification process. By superimposing a corresponding optical path difference on one of the surfaces using ion beam polishing, the purpose of compensating for internal material defects can be achieved, thereby obtaining a high-precision comprehensive surface shape. The solution of this invention will be described below with reference to the accompanying drawings.

[0045] Figure 1 This is one of the flowcharts illustrating the transmission wavefront shaping method for an optical parallel window component provided in an embodiment of the present invention, such as... Figure 1 As shown, the method includes steps 101-103;

[0046] in,

[0047] Step 101: Obtain the first detection data of the transmitted wavefront of the first optical parallel window component.

[0048] Specifically, the first detection data is the PV value of the transmitted wavefront of the first optical parallel window component, where the PV value represents the height difference between the highest and lowest points of the two surfaces of the first optical parallel window component. For example, the first detection data is 0.59 Lambda@633nm. The PV value of the transmitted wavefront of the first optical parallel window component can be obtained through detection equipment.

[0049] Optionally, before acquiring the first detection data before the transmitted wave of the first optical parallel window component, the method further includes:

[0050] The initial optical parallel window component was polished using a low-speed polishing method to obtain the first optical parallel window component.

[0051] Specifically, the low-speed polishing method can be either the classical asphalt polishing method or other polishing methods; the initial optical parallel window part is the part that has not yet been polished. First, the initial optical parallel window part is polished using the low-speed polishing method to obtain the polished first optical parallel window part.

[0052] For example, the initial optical parallel window component has dimensions of 220×150mm and a thickness of 35mm, and is made of quartz. The required transmission wavefront PV value for this initial optical parallel window component is less than 0.1Lambda@633nm. By using classical pitch polishing, the two surfaces of the initial optical parallel window component are polished to +0.1Lambda@633nm and -0.1Lambda@633nm respectively, resulting in a polished first optical parallel window component. Typically, by stacking the two surfaces, the transmission wavefront of the polished first optical parallel window component should meet the requirements. However, testing revealed that the transmission wavefront only reaches 0.59Lambda@633nm, and regardless of polishing methods, the surface distribution corresponding to the transmission wavefront is essentially the same. Therefore, it can be determined that the internal uniformity of the material in the polished first optical parallel window component is defective.

[0053] Step 102: Based on the first detection data and the optical path difference calculation principle, determine the second detection data of the transmitted wavefront of the first optical parallel window component.

[0054] Specifically, for parallel windows, to address the inhomogeneous defects within the material, these defects can be superimposed onto any surface. This surface then compensates for the internal defects. Based on the principle of optical path difference calculation, the highest and lowest points in the surface distribution corresponding to the first detection data can be inversely superimposed to obtain the second detection data for the transmitted wavefront of the first optical parallel window component. For example, if the second detection data is 1.285 Lambda@633nm, it can be determined that the second detection data is 2.18 times that of the first detection data.

[0055] Optionally, the surface distribution corresponding to the second detection data is opposite to the surface distribution corresponding to the first detection data.

[0056] Specifically, the highest point in the surface distribution corresponding to the first detection data corresponds to the lowest point in the surface distribution corresponding to the second detection data, and the lowest point in the surface distribution corresponding to the first detection data corresponds to the highest point in the surface distribution corresponding to the second detection data. This can compensate for the inhomogeneity inside the material and thus improve the accuracy of the transmitted wavefront.

[0057] Step 103: Based on the second detection data, the first optical parallel window part is reshaped using an ion beam polishing device to obtain a second optical parallel window part; the third detection data of the second optical parallel window part transmitted through the wavefront is less than the first detection data.

[0058] Specifically, ion beam polishing is a modern non-contact polishing technology based on an ion source. The second optical parallel window component is the part that has undergone multiple ion beam polishing processes to refine its shape. The third detection data of the second optical parallel window component before transmission is lower than the first detection data, which meets the finished product requirements. For example, the third detection data is 0.091 Lamb da@633nm, which meets the requirement of being less than 0.1 Lamb da@633nm.

[0059] In practice, based on the surface shape corresponding to the second detection data, the surface shape of the second optical parallel window part can be modified multiple times using an ion beam polishing device, and finally a second optical parallel window part that meets the requirements can be obtained.

[0060] The method for modifying the transmission wavefront of an optical parallel window component provided by this invention involves obtaining first detection data of the transmission wavefront of a first optical parallel window component, determining second detection data of the first optical parallel window component based on the first detection data and the principle of optical path difference calculation, and then modifying the first optical parallel window component using an ion beam polishing device based on the second detection data to obtain a second optical parallel window component. The third detection data of the second optical parallel window component is less than the first detection data. By combining the detection of the transmission wavefront of the first optical parallel window component, the principle of optical path difference calculation, and the use of ion beam polishing, the method achieves the modification of the transmission wavefront of the optical parallel window component, thereby improving the accuracy of the transmission wavefront of the optical parallel window component.

[0061] Optionally, the specific implementation of step 101 above includes:

[0062] Based on the principle of interference, a laser interferometer is used to detect the transmitted wavefront of the first optical parallel window component to obtain the first detection data.

[0063] Specifically, after obtaining the first optical parallel window part polished by a low-speed polishing method, a laser interferometer can be used to detect the transmitted wavefront of the first optical parallel window part based on the interference principle, thereby obtaining the first detection data detected by the detection equipment.

[0064] Optionally, the specific implementation of step 102 above includes:

[0065] 1) Import the first detection data into the interferometer surface analysis software.

[0066] Specifically, after obtaining the first detection data, the first detection data is imported into the interferometer surface shape analysis software, such as the Zygo interferometer surface shape analysis software.

[0067] 2) Based on the principle of optical path difference calculation and the refractive index corresponding to the first optical parallel window component, determine the first coefficient corresponding to the first optical parallel window component.

[0068] Specifically, the first coefficient corresponding to the first optical parallel window component is calculated as: 1 / -(n-1), where n represents the refractive index of the material of the first optical parallel window component. For example, if the material of the first optical parallel window component is quartz, and its refractive index is 1.45846 under a 632.8nm laser, then the calculated result of the first coefficient is -2.18.

[0069] 3) Based on the first coefficient, the comprehensive surface shape corresponding to the first detection data is superimposed on a single surface of the first optical parallel window component to obtain the second detection data of the transmitted wavefront of the first optical parallel window component.

[0070] Specifically, after obtaining the first coefficient, the comprehensive surface shape corresponding to the first detection data is superimposed onto a single surface of the first optical parallel window component based on the first coefficient, thereby obtaining the second detection data of the transmitted wavefront of the first optical parallel window component.

[0071] In practice, by clicking the Scale Data command in the Zygo interferometer surface shape software and entering the first coefficient (e.g., -2.18), the composite surface shape corresponding to the first detection data is superimposed onto a single surface of the first optical parallel window component through the first coefficient. This yields the second detection data of the transmitted wavefront of the first optical parallel window component, which is a new surface shape distribution result obtained after superimposing the composite surface shape onto a single surface of the first optical parallel window component.

[0072] Optionally, the specific implementation of step 3) above includes:

[0073] Multiply the first coefficient and the first detection data, and superimpose the comprehensive surface shape corresponding to the first detection data onto a single surface of the first optical parallel window component to obtain the second detection data of the first optical parallel window component transmitted wavefront.

[0074] Specifically, after inputting the first coefficient in the Zygo interferometer surface shape analysis software, the first coefficient is multiplied by the first detection data to superimpose the comprehensive surface shape corresponding to the first detection data onto a single surface of the first optical parallel window component, thereby obtaining the second detection data of the transmitted wavefront of the first optical parallel window component. This avoids the influence of internal material defects and thus improves the accuracy of the transmitted wavefront of the optical parallel window component.

[0075] Optionally, the specific implementation of step 103 above includes:

[0076] The surface shape corresponding to the second detection data is used as the basic surface shape; the basic surface shape is modified using an ion beam polishing device to obtain the second optical parallel window part.

[0077] Specifically, the surface shape corresponding to the second detection data is used as the basic surface shape, and then the basic surface shape is further modified by using an ion beam polishing device to finally obtain a second optical parallel window part whose PV value on the transmitted wavefront meets the requirements.

[0078] Optionally, the step of using an ion beam polishing device to reshape the base surface to obtain the second optical parallel window component includes:

[0079] The basic surface shape is reshaped using an ion beam polishing device to obtain a reshaped first surface shape; the third detection data corresponding to the first surface shape is determined; and the second optical parallel window part is obtained based on the third detection data.

[0080] Specifically, the basic surface shape is first reshaped using an ion beam polishing device to obtain the first reshaped surface shape. Then, a laser interferometer is used to detect the transmitted wavefront of the first surface shape to obtain the third detection data. After obtaining the third detection data, the second optical parallel window part can be further obtained.

[0081] Optionally, obtaining the second optical parallel window component based on the third detection data includes:

[0082] Determine whether the third detection data is less than a preset threshold; based on the determination result, obtain the second optical parallel window component.

[0083] Specifically, the preset threshold is a pre-set PV value before the transmitted wavefront, for example, a preset threshold of 0.1 Lambda@633nm. It is determined whether the third detection data is less than the preset threshold, that is, whether the second optical parallel window component corresponding to the third detection data meets the requirements. Further, based on the determination result, it can be determined whether the second optical parallel window component corresponding to the third detection data is the final optical parallel window component.

[0084] Optionally, obtaining the second optical parallel window component based on the judgment result includes:

[0085] If the third detection data is not less than the preset threshold, the above steps of determining the third detection data corresponding to the first surface shape are repeated; if the third detection data is less than the preset threshold, the surface shape corresponding to the third detection data is taken as the final modified surface shape, and the second optical parallel window component is obtained based on the final modified surface shape.

[0086] Specifically, if the third detection data is not less than a preset threshold, the first surface shape is used as the new base surface shape, and the new base surface shape is reshaped using an ion beam polishing device to obtain the reshaped second surface shape; a laser interferometer is used to detect the fourth detection data corresponding to the second surface shape, and it is determined whether the fourth detection data is less than the preset threshold. If the fourth detection data is not less than the preset threshold, the third surface shape corresponding to the fourth detection data is used as the base surface shape for the next reshaping, and this process is repeated until the final detection data is less than the preset threshold.

[0087] If the third detection data is less than a preset threshold, the surface shape corresponding to the third detection data is taken as the final modified surface shape, and the second optical parallel window part is obtained based on the final modified surface shape.

[0088] Figure 2 This is the second schematic flowchart of the transmission wavefront shaping method for optical parallel window components provided by the present invention, as shown below. Figure 2 As shown, the method includes steps 201-210; wherein,

[0089] Step 201: Polish the initial optical parallel window component using a low-speed polishing method to obtain the first optical parallel window component.

[0090] Step 202: Use a laser interferometer to detect the transmitted wavefront of the first optical parallel window component to obtain the first detection data.

[0091] Step 203: Import the first detection data into the interferometer surface shape analysis software.

[0092] Step 204: Calculate the first coefficient corresponding to the first optical parallel window component based on the optical path difference calculation principle and the refractive index corresponding to the first optical parallel window component.

[0093] Step 205: Multiply the first coefficient and the first detection data, and superimpose the comprehensive surface shape corresponding to the first detection data onto a single surface of the first optical parallel window component to obtain the second detection data of the transmitted wavefront of the first optical parallel window component.

[0094] Step 206: Use the surface shape corresponding to the second detection data as the basic surface shape; wherein the surface shape distribution corresponding to the second detection data is opposite to the surface shape distribution corresponding to the first detection data.

[0095] Step 207: Use an ion beam polishing device to reshape the base surface shape to obtain the first reshaped surface shape.

[0096] Step 208: Use a laser interferometer to detect the third detection data corresponding to the first surface shape.

[0097] Step 209: Determine whether the third detection data is less than a preset threshold. If the third detection data is not less than the preset threshold, proceed to step 203; if the third detection data is less than the preset threshold, proceed to step 210.

[0098] Step 210: Take the surface shape corresponding to the third detection data as the final modified surface shape, and obtain the second optical parallel window part based on the final modified surface shape.

[0099] The optical parallel window component transmission wavefront shaping method provided by this invention uses ion beam polishing and optical path difference simulation calculation to quickly and efficiently improve the accuracy of the transmission wavefront of the parallel window component surface shape. At the same time, it can compensate for the influence of material defects of the parallel window component and has high determinism.

[0100] Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus necessary general-purpose hardware platforms, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solutions, in essence or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the methods described in the various embodiments or some parts of the embodiments.

[0101] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for modifying the transmission wavefront of an optical parallel window component, characterized in that, include: Acquire the first detection data of the transmitted wavefront of the first optical parallel window component; Based on the first detection data and the optical path difference calculation principle, the second detection data of the transmitted wavefront of the first optical parallel window component is determined. Based on the second detection data, the first optical parallel window part is reshaped using an ion beam polishing device to obtain the second optical parallel window part. The third detection data of the second optical parallel window component transmitted wavefront is less than the first detection data; The determination of the second detection data of the transmitted wavefront of the first optical parallel window component based on the first detection data and the optical path difference calculation principle includes: Import the first detection data into the interferometer surface shape analysis software; Based on the principle of optical path difference calculation and the refractive index corresponding to the first optical parallel window component, the first coefficient corresponding to the first optical parallel window component is determined. Based on the first coefficient, the comprehensive surface shape corresponding to the first detection data is superimposed on a single surface of the first optical parallel window component to obtain the second detection data of the transmitted wavefront of the first optical parallel window component; the surface shape distribution corresponding to the second detection data is opposite to the surface shape distribution corresponding to the first detection data.

2. The method for modifying the transmission wavefront of an optical parallel window component according to claim 1, characterized in that, The acquisition of the first detection data of the transmitted wavefront of the first optical parallel window component includes: Based on the principle of interference, a laser interferometer is used to detect the transmitted wavefront of the first optical parallel window component to obtain the first detection data.

3. The method for modifying the transmission wavefront of an optical parallel window component according to claim 1, characterized in that, The step of superimposing the composite surface shape corresponding to the first detection data onto a single surface of the first optical parallel window component based on the first coefficient to obtain the second detection data of the transmitted wavefront of the first optical parallel window component includes: Multiply the first coefficient and the first detection data, and superimpose the comprehensive surface shape corresponding to the first detection data onto a single surface of the first optical parallel window component to obtain the second detection data of the first optical parallel window component transmitted wavefront.

4. The method for modifying the transmission wavefront of an optical parallel window component according to any one of claims 1 to 3, characterized in that, The step of reshaping the first optical parallel window component using an ion beam polishing device based on the second detection data to obtain the second optical parallel window component includes: Use the surface shape corresponding to the second detection data as the basic surface shape; The base surface shape is modified using an ion beam polishing device to obtain the second optical parallel window component.

5. The method for modifying the transmission wavefront of an optical parallel window component according to claim 4, characterized in that, The process of reshaping the base surface using an ion beam polishing device to obtain the second optical parallel window component includes: The basic surface shape is reshaped using an ion beam polishing device to obtain the first reshaped surface shape. Determine the third detection data corresponding to the first surface shape; Based on the third detection data, the second optical parallel window component is obtained.

6. The method for modifying the transmission wavefront of an optical parallel window component according to claim 5, characterized in that, The step of obtaining the second optical parallel window component based on the third detection data includes: Determine whether the third detection data is less than a preset threshold; Based on the judgment result, the second optical parallel window component is obtained.

7. The method for modifying the transmission wavefront of an optical parallel window component according to claim 6, characterized in that, The process of obtaining the second optical parallel window component based on the judgment result includes: If the third detection data is not less than the preset threshold, repeat the above steps of determining the third detection data corresponding to the first surface shape. If the third detection data is less than the preset threshold, the surface shape corresponding to the third detection data is taken as the final modified surface shape, and the second optical parallel window component is obtained based on the final modified surface shape.

8. The method for modifying the transmission wavefront of an optical parallel window component according to claim 1, characterized in that, Before acquiring the first detection data before the transmission wave of the first optical parallel window component, the method further includes: The initial optical parallel window component was polished using a low-speed polishing method to obtain the first optical parallel window component.

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