A copper sheet rack for wet oxidation process

Abstract

The present invention relates to the field of semiconductor device processing and production equipment. A copper sheet rack for wet oxidation process, comprising a support frame for supporting copper sheets, the support frame comprising a support rod, and the opposite sides of the support rod are provided with notches that penetrate left and right along the axial direction; at least three isolation rings arranged from left to right are sleeved on the support rod, and adjacent isolation rings are connected to form a slot portion with a width increasing from inside to outside; the interior of the isolation ring is hollowed out, and the isolation ring comprises an outer ring, and the inner side of the isolation ring is provided with two slider portions that are arranged oppositely and used to slide into the support rod laterally, and the outer ring is connected to the slider portion through a guide portion; the isolation ring comprises a middle isolation ring located in the middle, a left isolation ring located at the left end, and a right isolation ring located at the right end, and all the middle isolation rings have the same structure; the two ends of the support rod are also threadedly connected to limit members, and the limit members at the two ends of the support rod respectively abut against the left isolation ring and the right isolation ring. The present invention can make the liquid medicine flow fully along the radial and longitudinal direction of the copper sheet rack.

Description

Technical Field

[0001] The invention relates to the field of semiconductor device processing and production equipment, and in particular to wet oxidation auxiliary equipment for DCB substrates. Background Art

[0002] In order to improve the production efficiency and reliability of copper sheet oxidation, DCB manufacturers have gradually introduced the wet oxidation method, that is, pre-oxidation of copper sheets by wet oxidation before sintering. In the process of wet oxidation, the copper sheet rack is an indispensable tooling. The copper sheet rack is used to carry the copper sheet for oxidation so that the copper sheet is fully in contact with the chemical solution.

[0003] The existing copper sheet rack has the following problems:

[0004] 1) Since the distance between the copper sheet frame and the copper sheet in contact is too small (usually 3-4 mm), the liquid is easily accumulated and difficult to remove, causing uneven local oxide layer during infiltration and drying.

[0005] 2) The exchange between the chemical solution and the copper sheet is insufficient, which affects the wet oxidation effect of the copper sheet. Summary of the invention

[0006] In view of the problems existing in the prior art, the present invention provides a copper sheet rack for a wet oxidation process, which solves at least one of the above technical problems.

[0007] The technical solution of the present invention is: a copper sheet rack for wet oxidation process, comprising a support frame for supporting a copper sheet, characterized in that the support frame comprises a support rod, and opposite sides of the support rod are provided with notches penetrating left and right along the axial direction;

[0008] The support rod is sleeved with at least three isolation rings arranged from left to right, and adjacent isolation rings are connected to form an insert slot portion with a width increasing from inside to outside;

[0009] The interior of the isolation ring is hollowed out, and the isolation ring includes an outer ring, and the inner side of the isolation ring is provided with two slider parts which are arranged opposite to each other and are used to slide into the support rod laterally, and the outer ring is connected to the slider part through a guide part;

[0010] The isolation rings include a middle isolation ring located in the middle, a left isolation ring located at the left end, and a right isolation ring located at the right end, and all the middle isolation rings have the same structure;

[0011] The two ends of the support rod are also threadedly connected with limiting members, and the limiting members at the two ends of the support rod respectively abut against the left end isolation ring and the right end isolation ring.

[0012] The invention optimizes the structure of the support frame, so that the liquid medicine can flow fully along the radial and longitudinal directions of the copper sheet frame, thereby solving the problem that the distance between the frame and the copper sheet is too small and the liquid medicine accumulated at the contact point is difficult to remove.

[0013] The hollow structure of the middle isolation ring allows sufficient exchange between the chemical solution and the copper sheet, thus improving the yield of wet oxidation of the copper sheet.

[0014] More preferably, the center angle of the outer side of the slider portion is 20°-30°, and the center angle of the inner side of the slider portion is 40°-50°.

[0015] Increase the size of the cutout area.

[0016] Further preferably, the slider portion of the middle isolation portion includes a convex area extending axially out of the guide portion, and an end portion of the slider portion of the middle isolation portion away from the convex area is axially retracted into the guide portion so that the end portion of the sliding portion is retracted into the retracted area of ​​the guide portion;

[0017] The axial length of the convex area is greater than the axial length of the retracted area.

[0018] Further preferably, the convex area of ​​the middle isolation ring is partially inserted into the retracted area of ​​the adjacent middle isolation ring;

[0019] The slider portion of the left end isolation ring is provided with a groove for inserting into the convex area, the left end surface of the left end isolation ring is flat, and the left end surface of the left end isolation ring is used to abut against the limiting member;

[0020] The slider portion of the right isolating ring includes a protrusion extending axially out of the guide portion. The right end surface of the right end isolating ring is planar, and the right end surface of the right end isolating ring is used to abut against the limiting member.

[0021] Further preferably, the axial length of the groove matches the axial length of the retracted area of ​​the middle isolation ring;

[0022] The axial length of the protrusion matches the axial length of the outer protruding area of ​​the middle isolation ring.

[0023] Further preferably, the axial length of the convex area is 6 mm, and the axial length of the retracted area is 2 mm.

[0024] Further preferably, the guide portion and the slider portion have equal widths in the front-to-rear direction, and the front side surfaces of the guide portion and the slider portion are flush, and the rear side surfaces are flush.

[0025] Further preferably, the outer diameter of the slider portion is 5 mm and the inner diameter is 3 mm;

[0026] The outer diameter of the support rod is 5 mm, the inner side of the notch is an arc-shaped surface, and the inner diameter of the arc-shaped surface is 3 mm.

[0027] Further preferably, the two side walls of the insert slot are inclined at 22° from inside to outside.

[0028] Further preferably, the inner diameter of the outer ring is 3 mm, the outer diameter is 10 mm, and the axial length of the outermost side of the outer ring is 2 mm;

[0029] The total axial length of the intermediate isolation ring is 10 mm. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a structural schematic diagram of a specific embodiment 1 of the present invention;

[0031] Figure 2 It is an exploded view of the isolation ring of the specific embodiment 1 of the present invention;

[0032] Figure 3 It is a side view of the isolation ring of specific embodiment 1 of the present invention.

[0033] Figure 4 is a cross-sectional view of a support rod according to a specific embodiment 1 of the present invention;

[0034] Figure 5 It is a schematic structural diagram of a middle isolation ring of a specific embodiment 1 of the present invention;

[0035] Figure 6 It is a schematic structural diagram of the middle isolation ring of the specific embodiment 1 of the present invention from another perspective.

[0036] In the figure: 1 is a middle isolating ring, 2 is a left isolating ring, 3 is a right isolating ring, 4 is a limiter, 5 is a support rod, 11 is an outer ring, 12 is a guide part, 13 is a slider part, and 51 is a notch. DETAILED DESCRIPTION

[0037] The present invention will be further described below in conjunction with the accompanying drawings.

[0038] See also Figures 1 to 6, Specific embodiment 1, a copper sheet rack for wet oxidation process, including a support frame for supporting copper sheets, the support frame including a support rod 5, and a notch 51 penetrating left and right along the axial direction is opened on the opposite side of the support rod 5; at least three isolation rings arranged from left to right are sleeved on the support rod 5, and adjacent isolation rings are connected to form a slot portion with a width increasing from inside to outside; the interior of the isolation ring is hollowed out, the isolation ring includes an outer ring 11, and the inner side of the isolation ring is provided with two slider portions 13 arranged oppositely and used to slide into the support rod 5 laterally, and the outer ring 11 is connected to the slider portion 13 through a guide portion 12; the isolation ring includes a middle isolation ring 1 located in the middle, a left isolation ring 2 located at the left end, and a right isolation ring 3 located at the right end, and all the middle isolation rings 1 have the same structure; the two ends of the support rod 5 are also threadedly connected to the limiter 4, and the limiters 4 at the two ends of the support rod 5 respectively abut against the left isolation ring 2 and the right isolation ring 3. The limiter 4 can be a nut. The two ends of the support rod 5 are provided with threads for threading the nut.

[0039] The invention optimizes the structure of the support frame, so that the liquid medicine can flow fully along the radial and longitudinal directions of the copper sheet frame, thereby solving the problem that the distance between the frame and the copper sheet is too small and the liquid medicine accumulated at the contact point is difficult to remove.

[0040] The hollow structure of the middle isolation ring 1 allows sufficient exchange between the chemical solution and the copper sheet, thereby improving the yield of wet oxidation of the copper sheet.

[0041] The center angle of the outer side of the slider portion 13 is 20°-30°. The center angle of the inner side of the slider portion 13 is 40°-50°.

[0042] Preferably, the central angle of the outer side of the slider portion 13 is 25°, and the central angle of the inner side of the slider portion 13 is 44°.

[0043] See also Figure 5 as well as Figure 6 The slider portion 13 of the middle isolation portion includes an outward convex area extending axially from the guide portion 12, and the end of the slider portion 13 of the middle isolation portion away from the outward convex area is axially retracted into the guide portion 12, so that the end of the sliding portion is retracted into the retracted area of ​​the guide portion 12; the axial length of the outward convex area is greater than the axial length of the retracted area.

[0044] The convex area of ​​the middle isolation ring 1 is partially inserted into the retracted area of ​​the adjacent middle isolation ring; the slider portion 13 of the left isolation ring 2 is provided with a groove for inserting the convex area, the left end face of the left isolation ring 2 is planar, and the left end face of the left isolation ring 2 is used to resist the limiter 4; the slider portion 13 of the right isolation ring includes a protrusion extending from the guide portion 12 in the axial direction, the right end face of the right isolation ring 3 is planar, and the right end face of the right isolation ring 3 is used to resist the limiter 4. The axial length of the groove matches the axial length of the retracted area of ​​the middle isolation ring 1; the axial length of the protrusion matches the axial length of the convex area of ​​the middle isolation ring 1. The axial length of the convex area is 6mm, and the axial length of the retracted area is 2mm.

[0045] The axial direction of the support rod 5 is the left-right direction. Two guide parts 12 are arranged up and down on the inner side of the outer ring 11. The widths of the guide part 12 and the slider part 13 in the front-to-back direction are equal, and the front side surfaces of the guide part 12 and the slider part 13 are flush, and the rear side surfaces are flush. The outer diameter of the slider part 13 is 5mm and the inner diameter is 3mm; the outer diameter of the support rod 5 is 5mm, and the inner side of the notch is an arc-shaped surface with an inner diameter of 3mm. The two side walls of the insert slot are inclined 22° from the inside to the outside.

[0046] The inner diameter of the outer ring 11 of the middle isolating ring 1, the left isolating ring 2 and the right isolating ring 3 is 3 mm, the outer diameter is 10 mm, and the axial length of the outermost side of the outer ring 11 is 2 mm.

[0047] The total length of the middle isolating ring in the axial direction is 10 mm. The total length of the isolating ring 2 at the left end in the axial direction is 4 mm. The total length of the isolating ring 3 at the right end in the axial direction is 8 cm.

[0048] By implementing the above invention, the problems of liquid medicine gathering at the contact part between the rack and the copper sheet and insufficient exchange with the copper sheet can be solved, thereby improving the yield of wet oxidation of the copper sheet.

[0049] Comparative Example 1: In a conventional copper sheet rack, a limit baffle is fixed on the support rod, and the copper sheet is inserted between adjacent limit baffles. The spacing between the limit baffles is uniform inside and outside, and is 3 to 4 mm.

[0050] Compared with Comparative Example 1, the performance parameters of the present invention after wet oxidation are compared as shown in the following table:

[0051] The present invention Comparative Example 1 Yield 94％ 92.5％ Uneven edge oxidation ratio 0.10％ 0.34％ Poor oxidation, spots are long 2.616mm 6.154mm Average weight gain 0.056228g 0.053941g Weight gain standard deviation <![CDATA[5.6126×10 -6 ]]> <![CDATA[6.9126×10 -6 ]]>

[0052] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A copper sheet rack for a wet oxidation process, comprising a support frame for supporting a copper sheet, characterized in that: The support frame includes a support rod, and opposite sides of the support rod are provided with notches penetrating left and right along the axial direction; The support rod is sleeved with at least three isolation rings arranged from left to right, and adjacent isolation rings are connected to form an insert slot portion with a width increasing from inside to outside; The interior of the isolation ring is hollowed out, and the isolation ring includes an outer ring, and the inner side of the isolation ring is provided with two slider parts which are arranged opposite to each other and are used to slide into the support rod laterally, and the outer ring is connected to the slider part through a guide part; The isolation rings include a middle isolation ring located in the middle, a left isolation ring located at the left end, and a right isolation ring located at the right end, and all the middle isolation rings have the same structure; The two ends of the support rod are also threadedly connected with limiting members, and the limiting members at the two ends of the support rod respectively abut against the left end isolation ring and the right end isolation ring.

2. The copper sheet rack for wet oxidation process according to claim 1, characterized in that: The center angle of the outer side of the slider portion is 20°-30°; the center angle of the inner side of the slider portion is 40°-50°.

3. The copper sheet rack for wet oxidation process according to claim 1, characterized in that: The slider portion of the middle isolation ring includes an outer convex area extending axially from the guide portion, and an end of the slider portion of the middle isolation ring away from the outer convex area is axially retracted into the guide portion, so that the end of the slider portion is retracted into the retracted area of ​​the guide portion; The axial length of the convex area is greater than the axial length of the retracted area.

4. The copper sheet rack for wet oxidation process according to claim 3, characterized in that: The axial length of the convex area is 6 mm, and the axial length of the retracted area is 2 mm.

5. The copper sheet rack for wet oxidation process according to claim 3, characterized in that: The convex area of ​​the middle isolation ring is partially inserted into the retracted area of ​​the adjacent middle isolation ring; The slider portion of the left end isolation ring is provided with a groove for inserting into the convex area, the left end surface of the left end isolation ring is flat, and the left end surface of the left end isolation ring is used to abut against the limiting member; The slider portion of the right end isolation ring includes a protrusion extending axially out of the guide portion, and the right end surface of the right end isolation ring is planar, and the right end surface of the right end isolation ring is used to abut against the limiting member.

6. The copper sheet rack for wet oxidation process according to claim 5, characterized in that: The axial length of the groove matches the axial length of the retracted area of ​​the middle isolation ring; The axial length of the protrusion matches the axial length of the outer protruding area of ​​the middle isolation ring.

7. The copper sheet rack for wet oxidation process according to claim 1, characterized in that: The guide portion and the slider portion have the same width in the front-to-back direction, and the front side surfaces of the guide portion and the slider portion are flush with each other, and the rear side surfaces are flush with each other.

8. The copper sheet rack for wet oxidation process according to claim 1, characterized in that: The outer diameter of the slider is 5 mm and the inner diameter is 3 mm; The outer diameter of the support rod is 5 mm, the inner side of the notch is an arc-shaped surface, and the inner diameter of the arc-shaped surface is 3 mm.

9. The copper sheet rack for wet oxidation process according to claim 1, characterized in that: The two side walls of the insert slot are inclined at 22 degrees from inside to outside.

10. The copper sheet rack for wet oxidation process according to claim 1, characterized in that: The inner diameter of the outer ring is 3 mm, the outer diameter is 10 mm, and the axial length of the outermost side of the outer ring is 2 mm; The total axial length of the middle isolation ring is 10 mm.

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