Digital control circuit device of micro-hemispherical resonator gyroscope based on parameter average model

Abstract

The application discloses a micro-hemispherical resonator gyroscope digital control circuit device based on a parameter average model, which is composed of a micro-hemispherical resonator gyroscope, an analog processing circuit, a signal conversion circuit and an FPGA control module. The analog processing circuit comprises a detection interface circuit, an analog demodulation filter circuit, a voltage comparator circuit and a driving interface circuit; the signal conversion circuit comprises an analog-to-digital converter circuit and a digital-to-analog converter circuit; and the FPGA control module comprises a reference signal generator module, a digital filter module, a parameter calculator module, a PI controller module and an output signal conditioning module. The application establishes a model of the vibration state of the gyroscope by using a parameter average method, realizes a control algorithm by using an FPGA, and directly samples and acquires phase information by using an FPGA system working clock, so that the phase control resolution and precision of the micro-hemispherical resonator gyroscope are improved, and the overall performance of the gyroscope is improved.

Description

Technical Field

[0001] This invention relates to the measurement and control technology of microelectromechanical systems and micro inertial devices, specifically to a digital control circuit device for a micro hemispherical resonant gyroscope based on a parameter averaging model. Background Technology

[0002] The micro-hemispherical resonator gyroscope is a novel high-precision solid-state vibrating gyroscope based on the Coriolis effect. Thanks to advancements in 3D micromachining technology, the performance of microscale hemispherical resonator gyroscopes has rapidly improved in recent years. Micro-hemispherical resonator gyroscopes offer similar high performance, high reliability, and high precision to traditional hemispherical resonator gyroscopes, but are smaller, less expensive, and consume less power. Compared to microelectromechanical (MEMS) gyroscopes, micro-hemispherical resonator gyroscopes offer higher precision and longer lifespan, providing significant advantages in applications such as high-precision, long-life inertial navigation, automotive positioning and orientation, spacecraft and aircraft navigation, precision guidance and strategic weapon control systems, and astronomical telescopes.

[0003] The parameter-averaged model of a micro-hemispherical resonant gyroscope is an average model that characterizes the vibration state of the gyroscope through state parameters. Because the micro-hemispherical resonant gyroscope has an axisymmetric structure, its natural resonant frequencies in the two axes are quite close. Therefore, the displacement of the gyroscope in the two axes can be considered as a high-frequency sinusoidal vibration close to the isotropic natural resonant frequency ω. Compared to the gyroscope's vibration displacement, the system's vibration energy, orthogonal vibration, vibration phase, and modal deflection angle state parameters change at extremely slow rates, and can be considered constant within a period corresponding to one gyroscope resonant frequency. Therefore, the vibration displacement of the micro-hemispherical resonant gyroscope can be considered a "fast variable," and the state parameters can be considered "slow variables." By controlling the "slow variables" corresponding to the gyroscope's state parameters, the control objectives of automatic gain control of vibration energy, orthogonal vibration suppression, and force balance feedback of the micro-hemispherical resonant gyroscope can be achieved.

[0004] High-precision and high-stability control circuits are key to maximizing the performance of a micro-hemispherical resonator gyroscope. Digital control circuits offer higher stability and flexibility compared to analog control circuits, making them more suitable for implementing complex control algorithms. However, digital control circuits inevitably introduce quantization errors, leading to a decrease in control accuracy. Micro-hemispherical resonator gyroscopes have extremely high quality factors and sharp amplitude-frequency response curves, with dramatic phase changes in the output signal near the resonant frequency. Therefore, micro-hemispherical resonator gyroscopes require high-resolution and high-precision phase control. Published literature indicates that most digital control circuits use an AD converter circuit to directly sample the micro-hemispherical resonator gyroscope output signal, then demodulate and filter it using digital circuits to extract the phase information. This method's phase control resolution is limited by the AD converter circuit's conversion rate, making further improvement difficult. Using a high-conversion-rate AD converter circuit inevitably leads to reduced conversion accuracy, affecting the control accuracy of other amplitude control loops in the micro-hemispherical resonator gyroscope. Therefore, improving the resolution and accuracy of the phase control loop without reducing the accuracy of the amplitude control loop is crucial to improving the performance of the digital control circuit of a micro-hemispherical resonator gyroscope. Summary of the Invention

[0005] To address the aforementioned issues, this invention discloses a digital control circuit device for a micro-hemispherical resonant gyroscope based on a parameter averaging model. A model of the gyroscope's vibration state is established using the parameter averaging method, and the control algorithm is implemented using an FPGA. Phase information is directly sampled and acquired using the FPGA system's operating clock, thereby improving the phase control resolution and accuracy of the micro-hemispherical resonant gyroscope and enhancing its overall performance.

[0006] The digital control circuit device for a micro-hemispherical resonant gyroscope based on a parameter averaging model consists of a micro-hemispherical resonant gyroscope, an analog processing circuit, a signal conversion circuit, and an FPGA control module. The micro-hemispherical resonant gyroscope has an axisymmetric structure, and its natural resonant frequencies along the two axes are quite close. The displacement of the micro-hemispherical resonant gyroscope along the two axes can be considered as a high-frequency sinusoidal vibration close to the isotropic natural resonant frequency ω. The gyroscope's vibration state parameters, including system energy, orthogonal amplitude, vibration phase, and modal deflection, change at extremely slow rates. Their average values ​​within one vibration cycle can be considered constant and are referred to as "slow variables." Based on this, a parameter averaging model of the micro-hemispherical resonant gyroscope is established. By performing a secondary combination of the amplitude information of the gyroscope's principal and secondary axes, the "slow variables" corresponding to the resonator's state variables are calculated and controlled to achieve automatic gain control of the micro-hemispherical resonant gyroscope's driving amplitude, orthogonal vibration suppression, and force balance feedback.

[0007] The micro-hemispherical resonant gyroscope is provided with at least two sets of signal-sensitive electrodes, including a positive electrode and a negative electrode of the main axis sensing electrode, a positive electrode and a negative electrode of the secondary axis sensing electrode, and a positive electrode and a negative electrode of the torque feedback electrode corresponding to the signal-sensitive electrodes.

[0008] The analog processing circuit consists of two detection interface circuits corresponding to the main spindle and the secondary spindle, two analog demodulation and filtering circuits, one comparator circuit, and two drive interface circuits; the signal conversion circuit consists of four AD conversion circuits and two DA conversion circuits; the FPGA control module consists of a reference signal generator module, a digital filter module, a parameter calculator module, a PI controller module, and an output signal conditioning module.

[0009] The output of the spindle sensing electrode serves as the input of the first detection interface circuit, and the output of the first drive interface circuit serves as the input of the spindle torque feedback electrode.

[0010] The output of the secondary axis sensitive electrode serves as the input of the second detection interface circuit, and the output of the second drive interface circuit serves as the input of the secondary axis torque feedback electrode.

[0011] The output of the first detection interface circuit serves as the signal input to the first analog demodulation and filtering circuit. The output of the first detection interface analog processing circuit also serves as the input to the voltage comparator. The output of the second detection interface circuit serves as the signal input to the second analog demodulation and filtering circuit. The in-phase and quadrature square wave signals output from the reference signal generator module in the FPGA control module serve as the demodulation reference signal inputs to the first and second analog demodulation and filtering circuits. The output of the first analog demodulation and filtering circuit serves as the input to the first and second AD converter circuits. The output of the second analog demodulation and filtering circuit serves as the input to the third and fourth AD converter circuits. The FPGA control module includes a reference signal generator module, a digital filter module, a parameter calculator module, a PI controller module, and an output signal conditioning module. The first, second, third, and fourth digital filter modules are respectively connected to the first, second, third, and fourth AD converter circuits. The first, second, third, and fourth digital filter modules are connected to the parameter calculator module. The parameter calculator module is connected to the first, second, and third PI controller modules and the output signal conditioning module. The PI controller module is connected to the output signal conditioning module. The output signal conditioning module is connected to the first and second DA converter circuits.

[0012] The reference signal generator module is used for amplitude demodulation of sensitive signals and conditioning of control signals. It includes a first edge detection module, a second edge detection module, a logic judgment module, a PI controller module, a first vector memory module, a second vector memory module, a first vector register module, a second vector register module, and a complex multiplier module. The output of the voltage comparator is connected to the first edge comparator module as the input of the reference signal generator module. One square wave signal output from the complex multiplier module is connected to the second edge comparator module. The first and second edge detector modules are connected to the logic judgment module. The logic judgment module compares the outputs of the two edge detection modules and outputs a leading or lagging signal based on the output values ​​of the two edge detector modules. The system has three states: locked, locked, and multiplied. The logic judgment module is connected to the PI controller module. The PI controller module is connected to the first vector memory module and the second vector memory module, respectively. The sine and cosine signal outputs of the complex multiplier module are connected to the first vector register module and the second vector register module, respectively. The first vector memory module, the second vector memory module, the first vector register module, and the second vector register module are connected to the complex multiplier module. The complex multiplier module performs multiplication of two complex vectors to generate two mutually orthogonal sine reference signals. The reference signal generator module is connected to the first analog signal demodulation and filtering circuit, the second analog signal demodulation and filtering circuit, and the output signal conditioning module.

[0013] The digital filter module adopts a transposed type II structure, including a first parameter memory module, a second parameter memory module, a third parameter memory module, a fourth parameter memory module, a fifth parameter memory module, a first input multiplier module, a second input multiplier module, a third input multiplier module, a first feedback multiplier module, a second feedback multiplier module, a first adder module, a second adder module, a third adder module, a first register module, and a second register module. The AD converter circuit is connected to the first, second, and third input multiplier modules respectively. The first, second, and third parameter memory modules are connected to the first, second, and third input multiplier modules respectively, serving as another input to the input multiplier modules. The first, second, and third input multiplier modules are connected to the first adder module, the second adder module, and the third adder module. The three adder modules are connected in series; the outputs of the first and second register modules are connected to the first and second adder modules respectively, serving as the second inputs of the first and second adder modules; the output of the third adder module is connected to the second register module; the second adder module is connected to the first register module; the first adder module is connected to the first and second feedback multiplier modules respectively; the fourth and fifth parameter memory modules are connected to the first and second feedback multiplier modules respectively; the first feedback multiplier module is connected to the second adder module, serving as the third input of the second adder module; the second feedback multiplier module is connected to the third adder module, serving as the second input of the third adder module; the output of the first adder module is connected to the parameter calculator module.

[0014] The parameter calculator module is used for calculating average parameters and includes a first input register module, a second input register module, a third input register module, a fourth input register module, a first multiplier module, a second multiplier module, a third multiplier module, a fourth multiplier module, a fifth multiplier module, a sixth multiplier module, a seventh multiplier module, an eighth multiplier module, a first adder module, a second adder module, a third adder module, a fourth adder module, a modal angle calculator module, a shift register module, and a sine / cosine calculator module; the outputs of the first, second, third, and fourth digital filter modules serve as the inputs of the first, second, third, and fourth input register modules, respectively; the first input register... The output of the first input register module serves as the two inputs of the second input register module; the output of the second input register module serves as the two inputs of the second input register module; the output of the third input register module serves as the two inputs of the third input register module; the output of the fourth input register module serves as the two inputs of the fourth input register module; the outputs of the first and third input register modules serve as the inputs of the fifth input register module; the outputs of the second and fourth input register modules serve as the inputs of the sixth input register module; the outputs of the first and fourth input register modules serve as the inputs of the seventh input register module; the second input register module... The outputs of the first, second, third, and fourth multiplier modules are used as inputs to the eighth multiplier module; the outputs of the first, second, third, and fourth multiplier modules are used as inputs to the first adder module to calculate parameters characterizing the vibration energy of the micro-hemispherical resonant gyroscope; the outputs of the first, second, third, and fourth multiplier modules are used as inputs to the second adder module to calculate parameters characterizing the cosine value of the second-mode deflection angle of the micro-hemispherical resonant gyroscope; the outputs of the fifth and sixth multiplier modules are used as inputs to the third adder module to calculate parameters characterizing the sine value of the second-mode deflection angle of the micro-hemispherical resonant gyroscope; the outputs of the seventh and eighth multiplier modules are used as inputs to the fourth adder module to calculate parameters characterizing the orthogonal vibration of the micro-hemispherical resonant gyroscope. The outputs of the second and third adder modules are connected to the modal angle calculator module to calculate the parameters characterizing the twice-mode deflection angle of the micro-hemispherical resonator gyroscope; the modal angle calculator module is connected to the shift register module to compress the output of the modal angle calculator module to obtain the modal deflection angle value; the shift register module is connected to the sine and cosine calculator module to calculate the sine and cosine values ​​of the modal deflection angle; the first adder module is connected to the first PI controller module; the modal angle calculator module is connected to the second PI controller module; the two outputs of the sine and cosine calculator module are connected to the output signal conditioning module; the fourth adder module is connected to the third PI controller module.

[0015] The PI controller module employs a positional PI control algorithm and includes a reference module, a comparator module, a proportional multiplier module, an integral multiplier module, an incremental adder module, an integral memory module, and an output adder module. The parameter calculator module is connected to the comparator module; the reference module is connected to the comparator module; the output of the comparator module is connected to both the proportional multiplier module and the integral multiplier module; the proportional multiplier module is connected to the output adder module; the integral multiplier module is connected to the incremental adder module; the output of the incremental adder module is connected to the integral memory module; the output of the integral memory module serves as the feedback input to the integral-incremental adder module; the integral memory module is connected to the output adder module, serving as another input to the output adder module; and the output adder module is connected to the output signal conditioning module.

[0016] The output signal conditioning module is used for conditioning and coordinate transformation of the control signals of the primary and secondary axes of the micro-hemispherical resonant gyroscope. It includes a first input register module, a second input register module, a third input register module, a fourth input register module, a fifth input register module, a sixth input register module, a seventh input register module, a first input multiplier module, a second input multiplier module, a third input multiplier module, a fourth input multiplier module, a fifth input multiplier module, a sixth input multiplier module, a first adder module, and a second adder module. The first PI controller module, the second PI controller module, and the third PI controller module are respectively connected to the first, second, and third input register modules. The two outputs of the parameter calculator module are connected to the fourth and fifth input register modules. The reference signal generator module is connected to the sixth and seventh input register modules. The outputs of the first, fifth, and sixth input register modules are connected to the first multiplier module. The modules are connected in the following ways: the outputs of the first, fourth, and sixth input register modules are connected to the second multiplier module; the outputs of the second, fourth, and seventh input register modules are connected to the third multiplier module; the outputs of the second, fifth, and seventh input register modules are connected to the fourth multiplier module; the outputs of the third, fourth, and sixth input register modules are connected to the fifth multiplier module; the outputs of the third, fifth, and sixth input register modules are connected to the sixth multiplier module; the first, third, and fifth multiplier modules are connected to the first adder module; the second, fourth, and sixth multiplier modules are connected to the second adder module; the first adder module is connected to the first DA converter circuit; and the second adder module is connected to the second DA converter circuit.

[0017] This invention is based on the parameter averaging model of a micro-hemispherical resonant gyroscope. It uses a voltage comparator to extract phase information from the sensitive signal and achieves phase control through direct sampling via an FPGA. It uses analog demodulation to obtain amplitude information from the sensitive signal and achieves high-precision sampling of amplitude information through a low-speed, high-DC-precision AD converter circuit. Based on the amplitude information in the sensitive signal, it calculates the parameters characterizing the gyroscope's state changes and performs closed-loop control on each parameter characterizing the gyroscope's state changes. This achieves high-precision and stable control of the micro-hemispherical resonant gyroscope in force balance mode, improving the overall performance of the gyroscope.

[0018] The beneficial effects of this invention are:

[0019] 1. The control algorithm of the digital control circuit of the micro-hemispherical resonant gyroscope is implemented by FPGA, which has the advantages of high integration, small size and low power consumption;

[0020] 2. A parameter averaging model of a micro-hemispherical resonant gyroscope was adopted to achieve high-precision closed-loop control of various state parameters of the gyroscope;

[0021] 3. The phase information in the sensitive signal is directly sampled by the FPGA, which improves the phase control resolution and accuracy of the micro-hemispherical resonant gyroscope;

[0022] 4. The vibration amplitude of the micro-hemispherical resonant gyroscope is directly sampled using a high DC accuracy AD converter circuit, which improves the overall circuit accuracy. Attached Figure Description

[0023] Figure 1 This is a general block diagram of the present invention;

[0024] Figure 2 Here is a block diagram of the reference signal generator module;

[0025] Figure 3 This is a block diagram of a transposed type II IIR filter module;

[0026] Figure 4 Here is a block diagram of the parameter calculator;

[0027] Figure 5 This is a block diagram illustrating the principle of a position-based PI control algorithm.

[0028] Figure 6 Block diagram of the output signal conditioning module. Detailed Implementation

[0029] The present invention will be further illustrated below with reference to the accompanying drawings and specific embodiments. It should be understood that the following specific embodiments are for illustrative purposes only and are not intended to limit the scope of the invention. It should be noted that the terms "front," "rear," "left," "right," "up," and "down" used in the following description refer to directions in the accompanying drawings, and the terms "inner" and "outer" refer to directions toward or away from the geometric center of a specific component, respectively.

[0030] like Figure 1As shown, a digital control circuit device for a micro-hemispherical resonant gyroscope based on a parameter averaging model is constructed, comprising a micro-hemispherical resonant gyroscope 1, an analog signal processing circuit, a signal conversion circuit, and an FPGA control module. The micro-hemispherical resonant gyroscope 1 has an axisymmetric structure, and its natural resonant frequencies in the two axes (primary and secondary axes) are quite close. The gyroscope's vibration displacement in the two axes can be considered as high-frequency sinusoidal vibrations close to the isotropic natural resonant frequency ω. Relative to the resonant frequency ω, the gyroscope's state parameters, including system vibration energy, orthogonal amplitude, and modal deflection, change extremely slowly within one vibration cycle, and their average values ​​can be considered constant. Based on this characteristic, a parameter averaging model for the micro-hemispherical resonant gyroscope can be established. The parameters characterizing the gyroscope's vibration state are obtained by quadratic combination calculation of the amplitude information in the two axes of the gyroscope. The amplitude information is extracted by an analog demodulation filter circuit and sampled by a high-precision DC-DC AD conversion circuit. The state parameters are calculated by an FPGA parameter calculator, and simultaneously, automatic gain control of the system's driving amplitude, suppression of orthogonal vibration, and force balance feedback control of the modal deflection are achieved through a PI control algorithm.

[0031] The micro-hemispherical resonant gyroscope 1 includes a primary axis differential sensing electrode (Xo+, Xo-) and a primary axis torque feedback electrode (Xi+, Xi-), as well as a secondary axis differential sensing electrode (Yo+, Yo-) and a secondary axis torque feedback electrode (Yi+, Yi-). The analog processing circuit includes a first detection interface circuit 2 and a second detection interface circuit 3, a first analog demodulation and filtering circuit 4, a second analog demodulation and filtering circuit 5, a comparator circuit 6, a first drive interface circuit 23, and a second drive interface circuit 24. The signal conversion circuit includes a first AD converter circuit 7, a second AD converter circuit 8, a third AD converter circuit 9, a fourth AD converter circuit 10, a first DA converter circuit 21, and a second DA converter circuit 22. The FPGA control module includes a reference signal generator module 11, a first digital filter module 12, a second digital filter module 13, a third digital filter module 14, a fourth digital filter module 15, a parameter calculator module 16, a first PI controller module 17, a second PI controller module 18, a third PI controller module 19, and an output signal conditioning module 20.

[0032] The primary axis signal sensing electrodes (Xo+, Xo-) and secondary axis signal sensing electrodes of the micro-hemispherical resonant gyroscope 1 are respectively connected to the first detection interface circuit 2 and the second detection interface circuit 3 to realize C / V conversion, signal amplification, and filtering of the sensing electrode signals. One output of the first detection interface circuit 2 serves as the input of the voltage comparator circuit 6. The voltage comparator circuit 6 converts the output signal of the first detection interface circuit 2 into a square wave signal, retains the phase information in the sensing signal, and uses it as the signal input of the reference signal generator module 11 in the FPGA control module. The other output of the first detection interface circuit 2 is connected to the second detection interface circuit 3. The output of circuit 3 serves as the input to the first demodulation filter circuit 4 and the second demodulation filter circuit 5, respectively. The sine and cosine signal outputs of the reference signal generator module 11 in the FPGA control module serve as the two demodulation reference signal inputs for the first demodulation filter circuit 4 and the second demodulation filter circuit 5. The first analog demodulation filter circuit 4 demodulates the components of the main axis displacement sensitive signal of the micro-hemispherical resonator gyroscope 1 that are quadrature and in phase with the sine signal output by the reference signal generator module 11 in the FPGA control module. The quadrature component serves as the input to the first AD converter circuit 7, and the in-phase component serves as the input to the second AD converter circuit 8. The second analog demodulation filter circuit 5 demodulates the components of the secondary axis displacement sensitive signal of the micro-hemispherical resonator gyroscope 1 that are quadrature and in phase with the sine signal output by the reference signal generator module 11 in the FPGA control module. The quadrature component serves as the input to the third AD converter circuit 9, and the in-phase component serves as the input to the fourth AD converter circuit 10. The output of the first AD converter circuit 7 serves as the input to the first digital filter module 12 in the FPGA control module; the output of the second AD converter circuit 8 serves as the input to the second digital filter module 13 in the FPGA control module; the output of the third AD converter circuit 9 serves as the input to the third digital filter module 14 in the FPGA control module; and the output of the fourth AD converter circuit 10 serves as the input to the fourth digital filter module 15 in the FPGA control module. The outputs of the first digital filter module 12, the second digital filter module 13, the third digital filter module 14, and the fourth digital filter module 15 serve as the input to the parameter calculator module 16. The parameter calculator module 16 calculates the five state parameters of the micro-hemispherical resonant gyroscope: vibration energy, orthogonal amplitude, modal deflection angle, sine of the modal deflection angle, and cosine of the modal deflection angle. The vibration energy parameter output of the parameter calculator module 16 is used as the input of the first PI controller module 17, the orthogonal amplitude parameter output of the parameter calculator module 16 is used as the input of the second PI controller module 18, the modal deflection angle parameter output of the parameter calculator module 16 is used as the input of the third PI controller module 19, and the modal deflection angle sine and cosine values ​​output of the parameter calculator module 16 are used as the input of the output signal conditioning module 20.The outputs of the first PI controller module 17, the second PI controller module 18, and the third PI controller module 19 are input to the output signal conditioning module 20. The sine and cosine signals output from the reference signal generator module 11 are used as inputs to the output signal conditioning module 20. The output signal conditioning module 20 completes the conditioning of the control signals and coordinate transformation of the micro-hemispherical resonant gyroscope 1. Its two outputs are used as inputs to the first DA converter circuit 21 and the second DA converter circuit 22, respectively. The output of the first DA converter circuit 21 is used as the signal input of the first drive interface circuit 23, and the output of the second DA converter circuit 22 is used as the signal input of the second drive interface circuit 24. The output of the first drive interface circuit 23 is used as the input of the primary axis differential torque feedback electrode (Xi+, Xi-) of the micro-hemispherical resonant gyroscope 1, and the output of the second drive interface circuit 24 is used as the input of the secondary axis differential torque feedback electrode (Yi+, Yi-) of the micro-hemispherical resonant gyroscope 1.

[0033] Signal input, such as Figure 2 As shown, the reference signal generator module includes a first edge detector module 25, a second edge detector module 26, a logic judgment module 27, a PI controller module 28, a first vector memory module 29, a second vector memory module 30, a first vector register module 31, a second vector register module 32, and a complex multiplier module 33. The first vector memory module 29 and the second vector memory module 30 store complex vectors corresponding to different frequencies. The output of the comparator circuit 6 serves as the signal input of the first edge detector module 25, one output of the complex multiplier module 33 serves as the signal input of the second edge detector module 26, and the outputs of the two edge detector modules 25 and 26 serve as the input of the logic judgment module 27. The logic judgment module 27 compares the outputs of each pair of edge detector modules 25 and 26 to determine which of the three states—leading, lagging, or locked—the current output signal of the reference signal generator module 11 is in, and uses this as the output value for frequency control. The logic judgment module 27 outputs the state to the PI controller module 28 for constant control, and the output of the PI controller module 28 serves as the input of the first vector memory module 29 and the second vector register module 30. The address input of the multiplier module 30 is used to read the real and imaginary parts of the complex vector and input them to the complex multiplier module 33. The outputs of the first vector register module 31 and the second vector register module 32 are used as the real and imaginary parts of another complex vector and input to the complex multiplier module 33. The sine signal output of the complex multiplier module 33 is used as the input of the first vector register module 31, and the cosine signal output is used as the input of the second vector register module 32. The sine and cosine signal outputs of the complex multiplier module 33 are also used as the input of the output signal conditioning module 20. The in-phase square wave signal and the quadrature square wave signal output by the complex multiplier module 33 are used as the input of the first demodulation filter circuit 4 and the second demodulation filter circuit 5.

[0034] like Figure 3 As shown, the transposed type II IIR digital filter consists of three input multiplier modules 34, 36, and 38, five parameter memory modules 35, 37, 39, 46, and 48, two feedback multiplier modules 45 and 47, three adder modules 40, 42, and 44, and two register modules 41 and 43. The parameter memory modules 35, 37, 39, 46, and 48 are used to store the parameter values ​​of the filter modules. The input signals and the outputs of the first parameter memory module 35, the second parameter memory module 37, and the third parameter memory module 39 are multiplied by the first input multiplier module 34, the second input multiplier module 36, and the third input multiplier module 38, respectively. The output of the first input multiplier module 34 is added to the output of the first register module 41 by the first adder module 40. The output of the second input multiplier module 36 is added to the output of the second register module 43 and the output of the first feedback multiplier module 45 by the second adder module 42. The output of the third input multiplier module 38 is added to the output of the second feedback multiplier module 47 by the second input multiplier module 48. The third adder module 44 performs addition. The second register module 43 stores the output of the third adder module 44 at the current moment as an intermediate register and outputs it to the second adder module 42 at the next moment. The first register module 41 stores the output of the second adder module 42 at the current moment as an intermediate register and outputs it to the first adder module 40 at the next moment. The output of the first adder module 40 and the fourth parameter memory module 46 and the fifth parameter memory module 48 are multiplied by the first feedback multiplier module 45 and the second feedback multiplier module 47, respectively. The output of the first adder module 40 is also connected to the parameter calculator module 16 as the output of the digital filter module 12.

[0035] like Figure 4The parameter calculator module shown includes four input register modules 49, 50, 51, and 52; eight two-input multiplier modules 53, 54, 55, 56, 57, 58, 59, and 60; four adder modules 61, 62, 63, and 64; a modal angle calculator module 65; a shift register module 66; and a sine / cosine calculator module 67. The outputs of the first digital filter module 7, the second digital filter module 8, the third digital filter module 9, and the fourth digital filter module 10 are connected to the input terminals of input register modules 49, 50, 51, and 52, respectively. The first input register module 49 serves as the two inputs of the first multiplier module 53; the second input register module 50 serves as the two inputs of the second multiplier module 54; the third input register module 51 serves as the two inputs of the third multiplier module 55; and the fourth input register module 52 serves as the two inputs of the fourth multiplier module 56. The first input register module 49 and the second digital filter module 10... The three-input register module 51 serves as two inputs to the fifth multiplier module 57; the second input register module 50 and the fourth input register module 52 serve as two inputs to the sixth multiplier module 58; the first input register module 49 and the fourth input register module 52 serve as two inputs to the seventh multiplier module 59; the second input register module 50 and the third input register module 51 serve as two inputs to the eighth multiplier module 60; and the outputs of the first multiplier module 53, the second multiplier module 54, the third multiplier module 55, and the first multiplier module 56 serve as the first adder module 61. The inputs of the first PI controller module 17 and the eighth PI controller module 60 are used as inputs to calculate parameters characterizing the vibration energy of the micro-hemispherical resonator gyroscope and output to the first PI controller module 17. The outputs of the seventh multiplier module 59 and the eighth multiplier module 60 are used as inputs to the fourth adder module 64 to calculate parameters characterizing the orthogonal amplitude of the micro-hemispherical resonator gyroscope and output to the second PI controller module 19. The outputs of the first multiplier module 53, the second multiplier module 54, the third multiplier module 55, and the fourth multiplier module 56 are used as inputs to the second adder module 62 to calculate the cosine value characterizing the double mode deflection angle of the micro-hemispherical resonator gyroscope. The fifth multiplier module 57 and the sixth multiplier module 68 are used as inputs to calculate parameters characterizing the orthogonal amplitude of the micro-hemispherical resonator gyroscope. The output of multiplier module 58 is used as the input of third adder module 63 to calculate the sine value representing the twice-mode deflection angle of the micro-hemispherical resonator gyroscope. The outputs of second adder module 62 and third adder module 63 are input to modal angle calculator 65 to calculate the parameters representing the modal deflection angle of the micro-hemispherical resonator gyroscope and output to third PI controller module 18. Another output of modal angle calculator module 65 is compressed by two times by shift register module 66 and input to sine and cosine calculator module 67 to calculate the sine and cosine values ​​of the modal deflection angle. The output of sine and cosine calculator module 67 is connected to output signal conditioning module 20.

[0036] like Figure 5As shown, the positional PI controller module 17 includes a reference module 68, a comparator module 69, a proportional multiplier module 70, an integral multiplier module 71, an incremental adder module 72, an output adder module 73, and an integral memory module 74. The comparator module 69 subtracts the input signals from the digital filter module 16 and the reference module 68 to obtain an error signal. This error signal is connected to both the proportional multiplier module 70 and the integral multiplier module 71. The output of the integral multiplier module 71 is added to the output of the integral memory module 74 via the incremental adder module 72 to obtain the integral value at the current moment. The output of the incremental adder module 72 is input to the integral memory module 74 for storage. Simultaneously, another output of the incremental adder module 72 is added to the output of the proportional multiplier module 70 via the output adder module 73 to obtain the proportional-integral value. The output adder module 73 is connected to the output signal conditioning module 20.

[0037] like Figure 6As shown, the output signal conditioning module 20 mainly completes the conditioning of the output signal and coordinate transformation. This module consists of seven input register modules 75, 76, 77, 78, 79, and 80, six three-input multiplier modules 82, 83, 84, 85, 86, and 87, and two three-input adder modules 88 and 89. The first PI controller module 17, the second PI controller module 18, and the third PI controller module 19 are connected to the first input register module 75, the second input register module 76, and the third input register module 77, respectively. The modal deviation angle sine and cosine values ​​output by the parameter calculator module 20 are connected to the fourth input register module 78 and the fifth input register module 79, respectively. The sine and cosine signal outputs of the reference signal generator module 11 are connected to the sixth input register module 80 and the seventh input register module 81, respectively. The first input register module 75, the fifth input register module 79, and the sixth input register module 80 are connected to the first multiplier module 82. The first input register module 75, the fourth input register module 78, and the sixth input register module 80 are connected to the second multiplier module 83. The second input register module 76, the fourth input register module 78, and the seventh input register module 81 are connected to the first multiplier module 82. Block 81 is connected to the third multiplier module 84. The second input register module 76, the fifth input register module 79, and the seventh input register module 81 are connected to the fourth multiplier module 85. The third input register module 77, the fourth input register module 78, and the sixth input register module 80 are connected to the fifth multiplier module 86. The third input register module 77, the fifth input register module 79, and the sixth input register module 80 are connected to the sixth multiplier module 87. The first multiplier module 82, the third multiplier module 84, and the fifth multiplier module 86 are connected to the first adder module 88. The main spindle control signal is calculated and output to the first DA converter circuit 21. The second multiplier module 83, the fourth multiplier module 85, the sixth multiplier module 87, and the second adder module 89 are connected to calculate the secondary spindle control signal and output to the second DA converter circuit 22. This realizes closed-loop feedback control of the two modes of vibration of the main spindle and the secondary spindle.

[0038] The technical means disclosed in this invention are not limited to those disclosed in the above embodiments, but also include technical solutions composed of any combination of the above technical features.

Claims

1. A digital control circuit device based on a parameter average model of a micro hemispherical resonator gyroscope, comprising a micro hemispherical resonator gyroscope (1), an analog processing circuit, a signal conversion circuit, and an FPGA control module; characterized in that: The micro hemispherical resonator gyro (1) has an axisymmetric structure; at least two groups of signal sensitive electrodes and torque feedback electrodes corresponding to the signal sensitive electrodes are arranged on the micro hemispherical resonator gyro, specifically including main shaft differential signal sensitive electrodes (Xo+, Xo-); secondary shaft differential signal sensitive electrodes (Yo+, Yo-), secondary shaft differential torque feedback electrodes (Yi+, Yi-); the analog processing circuit includes a first detection interface circuit (2), a second detection interface circuit (3), a first analog signal demodulation filter circuit (4), a second analog signal demodulation filter circuit (5), a voltage comparator circuit (6), a first driving interface circuit (23) and a second driving interface circuit (24); the signal conversion circuit includes a first AD converter circuit (7), a second AD converter circuit (8), a third AD converter circuit (9), a fourth AD converter circuit (10), a first DA converter circuit (21) and a second DA converter circuit (22); the FPGA control module includes a reference signal generator module (11), a first digital filter module (12), a second digital filter module (13), a third digital filter module (14), a fourth digital filter module (15), a parameter calculator module (16), a first PI controller module (17), a second PI controller module (18), a third PI controller module (19) and an output signal conditioning module (20); the outputs of the main shaft differential signal sensitive electrodes (Xo+, Xo-) are used as the inputs of the first detection interface circuit (2), the output of the first detection interface circuit (2) is used as the signal input of the first analog signal demodulation filter circuit (4), the output of the first detection interface circuit (2) is also used as the input of the comparator circuit (6), and the two-way outputs of the first analog signal demodulation filter circuit (4) are respectively used as the inputs of the first AD converter circuit (7) and the second AD converter circuit (8).The outputs of the secondary shaft differential signal sensitive electrodes (Yo+, Yo-) are inputs of the second detection interface circuit (3), the output of the second detection interface circuit (3) is a signal input of the second analog signal demodulation filter circuit (5), the output of the second analog signal demodulation filter circuit (5) is an input of the third AD converter circuit (9) and the fourth AD converter circuit (10), the output of the first AD converter circuit (7) is an input of the first digital filter module (12), the output of the second AD converter circuit (8) is an input of the second digital filter module (13), the output of the third AD converter circuit (9) is an input of the third digital filter module (14), the output of the fourth AD converter circuit (10) is an input of the fourth digital filter module (15), the first digital filter module (12), the second digital filter module (13), the third digital filter module (14) and the fourth digital filter module (15) are collectively inputs of the parameter calculator module (16), the output of the parameter calculator module (16) is an input of the first PI controller module (17), the second PI controller module (18), the third PI controller module (19) and the output signal conditioning module (20), the voltage comparator circuit (6) is an input of the reference signal generator module (11), the two-way orthogonal square wave signal output of the reference signal generator module (11) is a demodulation reference signal input of the first analog signal demodulation filter circuit (4) and the second analog signal demodulation filter circuit (5), and the two-way orthogonal sine signal output of the reference signal generator module (11) is also an input of the output signal conditioning module (20), the output of the output signal conditioning module (20) is an input of the first DA converter circuit (21) and the second DA converter circuit (22), the outputs of the first DA converter circuit (21) and the second DA converter circuit (22) are respectively inputs of the first drive interface circuit (23) and the second drive interface circuit (24), the output of the first drive interface circuit (23) is an input of the primary shaft differential torque feedback electrode (Xi, Xi-), and the output of the second drive interface circuit (24) is an input of the secondary shaft differential torque feedback electrode positive electrode (Yi+, Yi-). ​ 2. The digital control circuit device for micro-hemispherical resonator gyroscope based on parameter average model according to claim 1, wherein: The reference signal generator module (11) includes a first edge detector module (25), a second edge detector module (26), a logic judgment module (27), a phase PI controller module (28), a first vector memory module (29), a second vector memory module (30), a first vector register module (31), a second vector register module (32) and a complex multiplier module (33); wherein the output of the comparator circuit (6) is input to the first edge detector module (25), one of the square wave outputs of the complex multiplier module (33) is input to the second edge detector module (26), the outputs of the first edge detector module (25) and the second edge detector module (26) are input to the logic judgment module (27) together, the logic judgment module (27) completes the phase calculation of the main shaft differential signal sensitive electrode (Xo+, Xo-) signal, the output of the logic judgment module (27) is input to the phase PI controller module (28), the output of the phase PI controller module (28) is input to the address of the first vector memory module (29) and the second vector memory module (30), the data outputs of the first vector memory module (29) and the second vector memory module (30) are input to the complex multiplier module (33) together with the first vector register module (31) and the second vector register module (32), the two-way orthogonal sine signal outputs of the complex multiplier module (33) are input to the feedback of the first vector register module (31) and the second vector register module (32) respectively and the output signal conditioning module (20), and the two-way orthogonal square wave signals of the complex multiplier module (33) are input to the demodulation reference signal of the first analog signal demodulation filter circuit (4) and the second analog signal demodulation filter circuit (5).

3. The digital control circuit device for micro-hemispherical resonator gyroscope based on parameter average model according to claim 1, wherein: The digital filter module (12) comprises a first parameter memory module (35), a second parameter memory module (37), a third parameter memory module (39), a fourth parameter memory module (46), a fifth parameter memory module (48), a first input multiplier module (34), a second input multiplier module (36), a third input multiplier module (38), a first feedback multiplier module (45), a second feedback multiplier module (47), a first adder module (40), a second adder module (42), a third adder module (44), a first register module (41) and a second register module (43); the output of the first AD converter circuit (7) is used as one input of the first, second and third input multiplier modules (34, 36, 38), the first, second and third parameter memory modules (35, 37, 39) are connected with the first, second and third input multiplier modules (34, 36, 38) respectively and used as another input of the input multiplier modules, the outputs of the first, second and third input multiplier modules (34, 36, 38) are used as one input of the first, second and third adder modules (40, 42, 44), the outputs of the first and second register modules (41, 43) are connected with the first and second adder modules (40, 42) respectively and used as the second end input of the first and second adder modules (40, 42), the output of the third adder module (44) is used as the input of the second register module (43), the output of the second adder module (42) is used as the input of the first register module (41), the output of the first adder module (40) is used as the input of the first and second feedback multiplier modules (45, 47), the fourth and fifth parameter memory modules (46, 48) are connected with the first and second feedback multiplier modules (45, 47) respectively, the output of the first feedback multiplier module (45) is used as the third end input of the second adder module (42), and the output of the second feedback multiplier module (47) is used as the second end input of the third adder module (44); the output of the first adder module (40) is also used as the input of the parameter calculator module (16).

4. The digital control circuit device for micro-hemispherical resonator gyroscope based on parameter average model according to claim 1, wherein: The parameter calculator module (16) comprises first, second, third, fourth input register modules (49, 50, 51, 52), first, second, third, fourth, fifth, sixth, seventh, eighth parameter multiplier modules (53, 54, 55, 56, 57, 58, 59, 60), first, second, third, fourth parameter adder modules (61, 62, 63, 64), a mode angle calculator module (65), a shift register module (66) and a sine and cosine calculator module (67); the outputs of the first AD converter circuit (7), the second AD converter circuit (8), the third AD converter circuit (9) and the fourth AD converter circuit (10) are respectively the inputs of the first input register module (49), the second input register module (50), the third input register module (51) and the fourth input register module (52).The output of the first input register module (49) is as two-way input of the first parameter multiplier module (53), the output of the second input register module (50) is as two-way input of the second parameter multiplier module (54), the output of the third input register module (51) is as two-way input of the third parameter multiplier module (55), the output of the fourth input register module (52) is as two-way input of the fourth parameter multiplier module (56), the output of the first input register module (49) and the third input register module (51) is as input of the fifth parameter multiplier module (57), the output of the second input register module (50) and the fourth input register module (52) is as input of the sixth parameter multiplier module (58), the output of the first input register module (49) and the fourth input register module (52) is as input of the seventh parameter multiplier module (59), the output of the second input register module (50) and the third input register module (51) is as input of the eighth parameter multiplier module (60), the output of the first, second, third and fourth parameter multiplier modules (53, 54, 55, 56) is as input of the first parameter adder module (61), the output of the first, second, third and fourth parameter multiplier modules (53, 54, 55, 56) is as input of the second parameter adder module (62), the output of the fifth and sixth parameter multiplier modules (57, 58) is as input of the third parameter adder module (63), the output of the seventh and eighth parameter multiplier modules (59, 60) is as input of the fourth parameter adder module (64), the output of the second and third parameter adder modules (62, 63) is as input of the modal angle calculator module (65), the output of the modal angle calculator module (65) is as input of the shift register module (66), the output of the shift register module (66) is as input of the cosine and sine calculator module (67), the output of the first parameter adder module (61) is as input of the first PI controller module (17), the output of the fourth parameter adder module (64) is as input of the third PI controller module (19), the output of the modal angle calculator module (65) is as input of the second PI controller module (18), the output of the cosine and sine calculator module (67) is as input of the output signal conditioning module (20).

5. The digital control circuit device for micro-hemispherical resonator gyroscope based on parameter average model according to claim 1, wherein: The first PI controller module (17) comprises a comparator module (69), a reference module (68), a proportional multiplier module (70), an integral multiplier module (71), an output adder module (73), an incremental adder module (72), an integral memory module (74); the output of the parameter calculator module (16) and the output of the reference module (68) are inputs of the comparator module (69), the output of the comparator module (69) is respectively input of the proportional multiplier module (70) and the integral multiplier module (71), the output of the integral multiplier module (71) and the output of the integral memory module (74) are inputs of the incremental adder module (72), the output of the incremental adder module (72) is input of the integral memory module (74), the outputs of the incremental adder module (72) and the proportional multiplier module (70) are inputs of the output adder module (73), the output of the output adder module (73) is input of the output signal conditioning module (20).

6. The digital control circuit device for micro-hemispherical resonator gyro based on parameter average model according to claim 1, wherein: The signal conditioning module (20) is composed of a fifth input register module (75), a sixth input register module (76), a seventh input register module (77), an eighth input register module (78), a ninth input register module (79), a tenth input register module (80), an eleventh input register module (81), a first multiplier module (82), a second multiplier module (83), a third multiplier module (84), a fourth multiplier module (85), a fifth multiplier module (86), a sixth multiplier module (87), a fourth adder module (88) and a fifth adder module (89); the output of the first PI controller module (17) is input to the fifth input register module (75), the output of the second PI controller module (18) is input to the sixth input register module (76), the output of the third PI controller module (19) is input to the seventh input register module (77), the two-way output of the parameter calculator module (16) is input to the eighth input register module (78) and the ninth input register module (79) respectively, the two-way output of the reference signal generator module (11) is input to the tenth input register module (80) and the eleventh input register module (81) respectively, the outputs of the fifth input register module (75), the ninth input register module (79) and the tenth input register module (80) are input to the first multiplier module (82) together, the outputs of the fifth input register module (75), the eighth input register module (78) and the tenth input register module (80) are input to the second multiplier module (83) together, the outputs of the sixth input register module (76), the eighth input register module (78) and the eleventh input register module (81) are input to the third multiplier module (84) together, the outputs of the sixth input register module (76), the ninth input register module (79) and the eleventh input register module (81) are input to the fourth multiplier module (85) together, the outputs of the seventh input register module (77), the eighth input register module (78) and the tenth input register module (80) are input to the fifth multiplier module (86) together, the outputs of the seventh input register module (77), the ninth input register module (79) and the tenth input register module (80) are input to the sixth multiplier module (87) together, the outputs of the first multiplier module (82), the third multiplier module (84) and the fifth multiplier module (86) are input to the fourth adder module (88) together, the outputs of the second multiplier module (83), the fourth multiplier module (85) and the sixth multiplier module (87) are input to the fifth adder module (89) together, the output of the fourth adder module (88) is input to the first DA converter circuit (21), and the output of the fifth adder module (89) is input to the second DA converter circuit (22).

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