An automatic liquid dispensing device

Abstract

The present application relates to the technical field of silicon wafer cleaning liquid preparation, in particular to an automatic liquid preparation device, comprising a weighing pipeline, one end of which is connected to a stock solution tank through a first power pump; a flushing pipeline, one end of which is connected to a liquid tank, and the other end of which is connected to the other end of the weighing pipeline; a liquid level sensor, which is arranged at the weighing pipeline and is used to sense the liquid level of the stock solution in the weighing pipeline; a flushing port, which is arranged on the flushing pipeline; a first valve is arranged at the connection between the weighing pipeline and the flushing pipeline; when the stock solution triggers the liquid level sensor, the first power pump stops working; the arrangement of the liquid level sensor in the present application can accurately extract the stock solution; since the liquid level sensor is fixed on the weighing pipeline, the extraction of the stock solution can maintain a basically same amount each time the liquid is prepared, so that the concentration of the prepared liquid remains basically consistent, improving the accuracy and stability of the prepared liquid; the automatic preparation of the liquid with accurate and stable concentration can be realized without contact by the staff.

Description

Technical Field

[0001] This invention relates to the field of silicon wafer cleaning solution preparation technology, and more specifically, to an automatic solution preparation device. Background Technology

[0002] After polishing, silicon wafers will have a large number of particles / metals / inorganic contaminants remaining on their surface. In order to obtain polished wafers with clean surfaces, chemical cleaning is widely used in wet cleaning processes.

[0003] Accurate and stable concentration of cleaning solution plays a crucial role in cleaning. Currently, if a cleaning machine wants to add a cleaning solution tank, it will encounter the problem of solution preparation. Manual solution preparation increases the risk of personnel coming into contact with chemicals, and the concentration of the prepared solution varies, making it impossible to guarantee accuracy and stability.

[0004] In view of this, an automatic liquid preparation device is proposed. Summary of the Invention

[0005] In view of the above-mentioned problems in the prior art, the present invention provides an automatic liquid preparation device.

[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution:

[0007] An automatic liquid dispensing device, comprising,

[0008] The weighing pipe is connected to the raw liquid tank at one end via the first power pump.

[0009] The flushing pipe is connected at one end to the medicine tank and at the other end to the other end of the weighing pipe.

[0010] A liquid level sensor is installed at the weighing pipe and is used to sense the liquid level of the original liquid in the weighing pipe.

[0011] A flushing port is provided on the flushing pipe;

[0012] A first valve is provided at the connection between the weighing pipe and the rinsing pipe; when the raw liquid triggers the liquid level sensor, the first power pump stops working.

[0013] Preferably, the system further includes a branch pipe arranged at an angle to the weighing pipe, one end of which is connected to the weighing pipe; the liquid level sensor is disposed on the branch pipe.

[0014] Preferably, the other end of the weighing pipe is connected to the other end of the flushing pipe via a connector; the first valve is located at the connector.

[0015] Preferably, the first valve is a pneumatic valve.

[0016] Preferably, the weighing pipe is also provided with graduation lines for measuring the original liquid in the weighing pipe.

[0017] Preferably, the rinsing port is connected to a water tank via a second power pump.

[0018] Preferably, the system also includes a control console, which has a first button and a second button.

[0019] The first button is electrically connected to the first power pump;

[0020] The second button is electrically connected to the first valve and the second power pump.

[0021] Preferably, the system also includes a second relay and a timer electrically connected to the second relay;

[0022] The second relay is electrically connected to the first button and the liquid level sensor, or the second relay is electrically connected to the second button.

[0023] The present invention has at least the following beneficial effects:

[0024] 1. This application enables staff to automatically prepare drug solutions with accurate and stable concentrations without contact.

[0025] 2. The liquid level sensor in this application can accurately extract and weigh the raw liquid. Since the liquid level sensor is fixedly installed on the weighing pipe, the amount of raw liquid extracted can be kept basically the same each time the medicine is prepared, thereby further ensuring that the concentration of the prepared medicine is kept basically consistent, improving the accuracy and stability of the prepared medicine.

[0026] 3. By setting up a branch pipe, this application can distinguish the route of the raw liquid entering the other end of the weighing pipe from the route of the rising liquid level of the raw liquid in the other end of the weighing pipe. The liquid level sensor is set on the route of the rising liquid level of the raw liquid in the other end of the weighing pipe, thereby making the triggering method of the liquid level sensor unique and improving the accuracy and stability of the drug solution preparation. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the automatic liquid preparation device in this application.

[0028] The names of the parts referred to by the numbers in the attached diagram are as follows:

[0029] 110. Weighing pipe; 111. First power pump; 112. Scale mark; 120. Raw material tank; 130. Flushing pipe; 131. Flushing port; 140. Medicine tank; 150. Liquid level sensor; 181. First valve; 170. Branch pipe; 180. Connector. Detailed Implementation

[0030] To further understand the content of this invention, a detailed description of the invention will be provided in conjunction with the accompanying drawings and embodiments. It should be understood that the embodiments are merely illustrative and not limiting of the invention.

[0031] like Figure 1 As shown, this embodiment provides an automatic liquid preparation device, which includes,

[0032] Weighing pipe 110, one end of which is connected to raw liquid tank 120 via first power pump 111;

[0033] The rinsing pipe 130 is connected at one end to the medicine tank 140 and at the other end to the other end of the weighing pipe 110;

[0034] A liquid level sensor 150 is installed at the weighing pipe 110 and is used to sense the liquid level of the original liquid in the weighing pipe 110.

[0035] A flushing port 131 is provided on the flushing pipe 130;

[0036] A first valve 181 is provided at the connection between the weighing pipe 110 and the rinsing pipe 130; when the raw liquid triggers the liquid level sensor 150, the first power pump 111 stops working.

[0037] In this embodiment, the raw materials that can be placed in the raw material tank 120 include HF (hydrofluoric acid), ammonia, hydrogen peroxide, and HCl (hydrochloric acid).

[0038] With the structure in this embodiment, during use, the first valve 181 and the flushing port 131 are first closed, and then the first power pump 111 is started, so that the first power pump 111 draws raw liquid from the raw liquid tank 120 into the weighing pipe 110. During this process, since the first valve 181 is in the closed state, the weighing pipe 110 and the flushing pipe 130 are not connected. Therefore, when the raw liquid enters the weighing pipe 110, the raw liquid will remain in the other end of the weighing pipe 110, so that the liquid level of the raw liquid in the other end of the weighing pipe 110 will continue to rise. Since the liquid level sensor 150 is set on the weighing pipe 110, when the liquid level of the raw liquid in the weighing pipe 110 rises until it reaches the position of the liquid level sensor 150, the liquid level sensor 150 senses the raw liquid and then controls the first power pump 111 to stop working, and the raw liquid extraction is completed.

[0039] Then, the first valve 181 and the flushing port 131 are opened. At this time, the raw liquid in the weighing pipe 110 will fall into the flushing pipe 130 under the action of gravity. Pure water is flushed into the flushing pipe 130 through the flushing port 131, thereby flushing the raw liquid that has fallen into the flushing pipe 130 into the medicine tank 140, thus realizing the preparation of the medicine.

[0040] By setting the liquid level sensor 150 in this embodiment, the raw liquid can be drawn and weighed more accurately. Since the liquid level sensor 150 is fixedly set on the weighing pipe 110, the amount of raw liquid drawn can be kept basically the same each time the medicine is prepared, thereby further ensuring that the concentration of the prepared medicine is kept basically consistent, improving the accuracy and stability of the prepared medicine.

[0041] Furthermore, by setting the rinsing port 131, after the stock solution enters the rinsing pipe 130, pure water is poured in through the rinsing port 131 to rinse the rinsing pipe 130, which can prevent the stock solution from adhering to the side wall of the rinsing pipe 130, thus reducing the concentration of the prepared medicine solution.

[0042] It is understandable that the opening of the first valve 181 and the flushing of the flushing pipe 130 through the flushing port 131 can be carried out simultaneously, or the first valve 181 can be opened first and then flushing can be carried out, or flushing can be started first and then the first valve 181 can be opened, both of which can achieve the same effect.

[0043] Furthermore, the position of the liquid level sensor 150 on the weighing pipe 110 can be adjusted according to actual needs, thereby enabling the extraction of different amounts of raw liquid and the preparation of drug solutions of different concentrations.

[0044] In this embodiment, a branch pipe 170 is also provided at an angle to the weighing pipe 110, one end of which is connected to the weighing pipe 110; the liquid level sensor 150 is disposed on the branch pipe 170.

[0045] With the structure in this embodiment, during use, the first power pump 111 draws the raw liquid into the other end of the weighing pipe 110, causing the liquid level of the raw liquid in the other end of the weighing pipe 110 to rise continuously. When the raw liquid rises until it reaches the position of one end of the branch pipe 170, the raw liquid continues to rise in the weighing pipe 110 and also enters the branch pipe 170, and the liquid level in the branch pipe 170 also continues to rise. Since the liquid level sensor 150 is set on the branch pipe 170, when the liquid level of the raw liquid in the branch pipe 170 rises to the liquid level sensor 150, the liquid level sensor 150 is triggered, thereby controlling the first power pump 111 to stop working, thus completing the extraction of the raw liquid.

[0046] It is worth mentioning that when the liquid level sensor 150 is set on the weighing pipe 110, when the first power pump 111 draws the raw liquid, the liquid level sensor 150 will be triggered when the raw liquid enters from one end of the weighing pipe 110 to the other end. When the liquid level of the raw liquid in the other end of the weighing pipe 110 rises, the liquid level sensor 150 will be triggered again. Therefore, such a setting can easily lead to the malfunction of the liquid level sensor 150 in actual use. In this embodiment, by setting the branch pipe 170, the route of the raw liquid entering the other end of the weighing pipe 110 can be separated from the route of the liquid level rising in the other end of the weighing pipe 110. The liquid level sensor 150 is set on the route of the liquid level rising in the other end of the weighing pipe 110, thereby making the triggering method of the liquid level sensor 150 unique and improving the accuracy and stability of the drug preparation.

[0047] Similarly, the position of the liquid level sensor 150 on the branch pipe 170 can be adjusted according to actual needs, thereby enabling the preparation of drug solutions of different concentrations.

[0048] It should be noted that the included angle between the weighing pipe 110 and the branch pipe 170 can be in at least the following situations:

[0049] 1) The weighing pipe 110 and the branch pipe 170 are set at an acute angle;

[0050] 2) The weighing pipe 110 and the branch pipe 170 are set at a right angle. In this case, when the liquid level of the raw liquid at the other end of the weighing pipe 110 rises to the end of the branch pipe 170, the raw liquid will flow into the branch pipe 170. At this time, the liquid level of the raw liquid in the weighing pipe 110 will no longer rise. After the raw liquid flows into the branch pipe 170, the liquid level sensor 150 is triggered, and the first power pump 111 stops working. In this case, the connection position between the end of the branch pipe 170 and the weighing pipe 110 can be adjusted to prepare drug solutions of different concentrations.

[0051] The above 1) is further divided into the following situations:

[0052] 1.1) The other end of the branch pipe 170 is tilted away from the flushing pipe 130. In this case, when the stock solution rises to the position of one end of the branch pipe 170, the stock solution will also enter the branch pipe 170 while continuing to rise in the weighing pipe 110, and the liquid level in the branch pipe 170 will continue to rise until the liquid level sensor 150 is triggered. In this case, the position of the liquid level sensor 150 on the branch pipe 170 can be adjusted to prepare different concentrations of medicine solution.

[0053] 1.2) The other end of the branch pipe 170 is tilted towards the side closer to the flushing pipe 130. In this case, when the liquid level of the original liquid in the other end of the weighing pipe 110 rises to the end of the branch pipe 170, the original liquid will flow into the branch pipe 170. At this time, the liquid level of the original liquid in the weighing pipe 110 will no longer rise. After the original liquid flows into the branch pipe 170, the liquid level sensor 150 is triggered, and the first power pump 111 stops working. In this case, the connection position between the end of the branch pipe 170 and the weighing pipe 110 can be adjusted to prepare different concentrations of medicine solution.

[0054] In this embodiment, the method described in 1.1) above is adopted, that is, the weighing pipe 110 and the branch pipe 170 are set at an acute angle and the other end of the branch pipe 170 is inclined to the side away from the flushing pipe 130.

[0055] Furthermore, in this embodiment, the other end of the branch pipe 170 is in a vented state. When the raw liquid is drawn by the first power pump 111, the raw liquid will collide in the weighing pipe 110, resulting in air bubbles in the raw liquid that finally enters the other end of the weighing pipe 110. Since the air bubbles have the characteristic of floating, the gas can be discharged through the branch pipe 170. Correspondingly, the other end of the branch pipe 170 can be connected to a waste liquid drain pipe, so that excess raw liquid in the branch pipe 170 can be discharged.

[0056] In this embodiment, the other end of the weighing pipe 110 is connected to the other end of the flushing pipe 130 via a connector 180; the first valve 181 is located at the connector 180.

[0057] The connector 180 in this embodiment allows for a better connection between the weighing pipe 110 and the rinsing pipe 130, while also facilitating the placement of the first valve 181 between the weighing pipe 110 and the rinsing pipe 130.

[0058] Furthermore, by setting the first valve 181 on the connector 180, when the first valve 181 is damaged, the first valve 181 can be repaired and replaced by removing the connector 180, which facilitates its use.

[0059] In this embodiment, the first valve 181 is a pneumatic valve.

[0060] The pneumatic valve in this embodiment enables better connection and sealing between the weighing pipe 110 and the flushing pipe 130.

[0061] In this embodiment, the weighing pipe 110 is also provided with a scale line 112 for measuring the original liquid in the weighing pipe 110.

[0062] By setting the scale line 112 in this embodiment, the original liquid can be measured more accurately. At the same time, when one end of the branch pipe 170 is connected to the weighing pipe 110, it serves as a reference point, making it easy to adjust the position of one end of the branch pipe 170, thereby preparing medicine solutions of different concentrations.

[0063] Furthermore, in this embodiment, the weighing pipe 110 is provided with two scale lines 112, one marked as 14ml and the other as 15ml. That is, the amount of original liquid drawn into the other end of the weighing pipe 110 by the first power pump 111 is in the range of 14ml-15ml.

[0064] In this embodiment, the rinsing port 131 is connected to a water tank via a second power pump.

[0065] With the construction in this embodiment, a second power pump is connected to a water tank at the rinsing port 131, so that when the rinsing pipe 130 needs to be rinsed, only the second power pump needs to be turned on to draw pure water from the water tank to rinse the rinsing pipe 130, which is convenient to operate and improves the efficiency of preparing the medicine solution.

[0066] This embodiment also includes a console, which has a first button and a second button.

[0067] The first button is electrically connected to the first power pump 111;

[0068] The second button is electrically connected to the first valve 181 and the second power pump.

[0069] In this embodiment, the first button is electrically connected to the first power pump via a first relay.

[0070] With the structure in this embodiment, when in use, pressing the first button starts the first power pump 111, while the first valve 181 and the second power pump are in the closed state by default. The first power pump 111 extracts the raw liquid. When the liquid level of the raw liquid at the other end of the weighing pipe 110 rises until the liquid level sensor 150 is triggered, the first power pump 111 stops working. At this time, pressing the second button opens the first valve 181 and starts the second power pump, allowing the raw liquid to enter the flushing pipe 130. The second power pump then extracts pure water to flush the flushing pipe 130, thus realizing the preparation of the medicine solution.

[0071] In this embodiment, by using the automatic liquid preparation device in conjunction with the control console, it is possible to further save manpower and resources, and improve the effectiveness and stability of the drug preparation.

[0072] In this embodiment, a second relay and a timer electrically connected to the second relay are also included;

[0073] The second relay is electrically connected to the first button and the liquid level sensor 150, or the second relay is electrically connected to the second button.

[0074] By setting the timer in this embodiment, the timing operation of any step in the preparation process of the medicine solution can be better controlled, thereby accurately controlling the time required for each preparation process and further better controlling the concentration and accuracy of the prepared medicine solution.

[0075] It should be noted that the timer can be set on any structure of the automatic liquid dispensing device in this application, that is, the timer can be set on any one of the weighing pipe 110, flushing pipe 130, branch pipe 170 or connector 180. Similarly, the number of timers can be increased or decreased according to actual needs. In this embodiment, the number of timers is 1 and it is set on the control console.

[0076] In this embodiment, the timer is configured to measure the working time of the second power pump. When in use, when the second button is pressed, the second power pump and the timer start working simultaneously, thereby measuring the rinsing time of the original solution in the rinsing pipe 130. Under normal circumstances, the rinsing pipe 130 is rinsed for 5 seconds.

[0077] Similarly, the timer can be configured to measure the time it takes for the first power pump 111 to extract the raw liquid. In use, when the first button is pressed, the first power pump 111 and the timer start working simultaneously. When the liquid level of the raw liquid at the other end of the weighing pipe 110 triggers the liquid level sensor 150, the first power pump 111 and the timer stop working simultaneously, thus obtaining the working time of the first power pump 111. Here, the working power of the first power pump 111 is set to a certain value, so that the amount of raw liquid extracted can be calculated from the working time of the first power pump 111, thereby avoiding large errors in the concentration of the prepared medicine solution and further improving the accuracy and stability of the prepared medicine solution.

[0078] Furthermore, a solenoid valve can be installed at the connection between the second power pump and the flushing pipe 130. The solenoid valve can be controlled by a second button. When the second button is pressed, the solenoid valve opens, allowing the second power pump to deliver pure water into the flushing pipe 130 for flushing. After flushing is completed, the solenoid valve is closed.

[0079] In summary, the above description is only a preferred embodiment of the present invention. All equivalent changes and modifications made within the scope of the claims of the present invention should be covered by the present invention.

Claims

1. An automatic liquid dispensing device, characterized by: The utility model relates to a kind of liquid preparation device, including, weighing pipeline, one end is connected with first power pump and stock solution tank; flushing pipeline, one end is connected with liquid tank, and the other end is connected with the other end of the weighing pipeline; liquid level sensor, which is provided at the weighing pipeline and is used to sense the liquid level of the stock solution in the weighing pipeline; flushing port, which is provided on the flushing pipeline;The water tank is connected with the second power pump at the flushing port; The connection between the weighing pipeline and the flushing pipeline is provided with a first valve;In the case that the stock solution triggers the liquid level sensor, the first power pump stops working; It also includes a branch pipe arranged at an angle with the weighing pipeline, one end of the branch pipe is connected with the weighing pipeline;The liquid level sensor is provided on the branch pipe.

2. The automatic liquid dispensing device according to claim 1, characterized in that: The other end of the weighing pipeline is connected with the other end of the flushing pipeline through a joint;The first valve is provided at the joint.

3. The automatic liquid dispensing device according to claim 2, characterized in that: The first valve is a pneumatic valve.

4. The automatic liquid dispensing device according to claim 1, characterized in that: The weighing pipeline is also provided with a scale line for measuring the stock solution in the weighing pipeline.

5. The automatic liquid dispensing device according to claim 1, characterized in that: It also includes a control console, the control console is provided with a first button and a second button, The first button is electrically connected with the first power pump; The second button is electrically connected with the first valve and the second power pump.

6. The automatic liquid dispensing device according to claim 5, characterized in that: It also includes a second relay and a timer electrically connected with the second relay; The second relay is electrically connected with the first button and the liquid level sensor, or the second relay is electrically connected with the second button.

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