A piezoceramic actuator displacement estimation system, system and terminal

Abstract

The piezoelectric ceramic actuator displacement estimation system, the system and the terminal provided by the application comprise a controller, a power amplifier, a piezoelectric ceramic actuator and a charge storage element connected in series, and both ends of the piezoelectric ceramic actuator are connected with a voltage sampling circuit, the above method and system combine software and hardware, design a sensorless displacement estimation circuit and a displacement estimation algorithm containing real-time disturbance observation compensation, design a corresponding compensation circuit for charge leakage effect, realize long-term high-precision and stable piezoelectric ceramic displacement estimation, and can provide the piezoelectric ceramic controller as a displacement feedback signal, the method is simple to implement, the effect is obvious, and has obvious superiority, through the method, the piezoelectric ceramic can realize displacement sensing while being used as a displacement actuator and does not depend on a sensor, and is suitable for piezoelectric ceramic high-precision positioning and control scenes in a compact assembly environment where external sensors cannot be integrated.

Description

Technical Field

[0001] This application relates to the field of precision sensor detection, and in particular to a displacement estimation system, system and terminal for a piezoelectric ceramic actuator. Background Technology

[0002] Piezoelectric ceramic actuators, with their micro-nano level control precision and ultra-wide operating bandwidth, have been widely used in precision opto-mechatronic systems such as atomic force microscopes, micro-nano positioning stages, fast reflectors, and deformable mirrors. A typical piezoelectric ceramic control system mainly consists of three parts: a piezoelectric actuator, a piezoelectric ceramic actuator, and an external displacement sensor. Displacement feedback is generally essential for precision positioning applications because piezoelectric ceramic materials exhibit significant displacement hysteresis and creep effects within their operating voltage range, which can lead to a significant reduction in positioning accuracy. Therefore, a closed-loop control circuit must be constructed through real-time displacement measurement to ensure the application's effectiveness.

[0003] However, in special applications where space is strictly limited and the installation of external displacement sensors is not permitted, such as for micro pumps, fuel injectors, and piezoelectric valves, the lack of displacement feedback can lead to a decrease in the overall performance of the product. Due to model uncertainties and the influence of external noise interference, it is difficult to achieve stable positioning under high dynamic conditions over extended periods. Summary of the Invention

[0004] Therefore, it is necessary to provide a piezoelectric ceramic actuator displacement estimation system, system, and terminal that can realize real-time monitoring of actuator output displacement without the need for additional installation or integration of displacement sensors, addressing the shortcomings of existing technologies.

[0005] To solve the above problems, this application adopts the following technical solution:

[0006] One objective of this application is to provide a displacement estimation system for a piezoelectric ceramic actuator, comprising a controller, a power amplifier, a piezoelectric ceramic actuator, and a charge storage element connected in series. Voltage sampling circuits are connected to both ends of the piezoelectric ceramic actuator. The power amplifier amplifies the signal from the controller to a voltage range required to drive the piezoelectric ceramic actuator. The charge storage element measures the charge flowing through the piezoelectric ceramic actuator. Based on the circuit configuration described above, the system acquires the charge flowing through the piezoelectric ceramic actuator. It obtains the output voltage of the power amplifier and the voltage of the charge storage element, acquires real-time interference observations based on these values, acquires the dynamic equivalent charge of the piezoelectric ceramic actuator based on the interference observations, and acquires the estimated displacement of the piezoelectric ceramic actuator based on the dynamic equivalent charge.

[0007] In some embodiments, the charge storage element is a temperature-insensitive element.

[0008] In some embodiments, the charge-discharging element is a Schottky diode, which matches the charge leaking from the piezoelectric ceramic actuator with the charge accumulated at the sampling point by the voltage sampling circuit.

[0009] In some embodiments, one end of the voltage sampling circuit is also connected to a charge conduction element, which is connected in parallel with the charge storage element.

[0010] The second objective of this application is to provide an estimation method for the displacement estimation system of the piezoelectric ceramic actuator, comprising the following steps:

[0011] Acquire the charge flowing through the piezoelectric ceramic actuator;

[0012] Obtain the output voltage of the power amplifier and the voltage of the charge storage element;

[0013] Real-time interference observation values ​​are obtained based on the output voltage of the power amplifier and the voltage of the charge storage element;

[0014] The dynamic equivalent charge of the piezoelectric ceramic actuator is obtained based on the observed interference values.

[0015] The estimated displacement of the piezoelectric ceramic actuator is obtained based on the dynamic equivalent charge.

[0016] In some embodiments, the step of obtaining the charge flowing through the piezoelectric ceramic actuator according to the circuit settings specifically includes:

[0017] According to the law of conservation of charge, after the charge conduction element matches the charge leaking from the piezoelectric ceramic actuator and the charge accumulated at the sampling point by the voltage sampling circuit, the charge q flowing through the charge storage element... c (t) is equivalent to the superposition of the charge q(t) flowing through the piezoelectric ceramic actuator and the system interference:

[0018] q c (t)=q(t)+d(t)#

[0019] Wherein: d(t) represents the system disturbance, including but not limited to system parameter perturbation, measurement noise, drift caused by temperature and environmental changes, etc.

[0020] In some embodiments, the steps of obtaining the output voltage of the power amplifier and the voltage of the charge storage element specifically include:

[0021] The output voltage V of the power amplifier a (t) and the voltage V of the charge storage element c(t) is measured by the voltage sampling circuit. The voltage V of the charge storage element is... c (t) is:

[0022] V c (t)=q c (t) / C c #

[0023] Where: C c q is the capacitance value of the charge storage element. c (t) represents the charge of the charge storage element, i.e., the voltage V of the charge storage element. c (t) represents the charge q(t) flowing through the piezoelectric ceramic actuator, including system disturbance d(t).

[0024] The interference signal d1(t) containing high-frequency components is obtained through the following calculation method:

[0025]

[0026] Where: V o (t) represents the voltage generated by the signal source, which is a given command signal. The voltage amplification factor k of the power amplifier is known, and the static equivalent capacitance C of the piezoelectric ceramic actuator is... pn C can be measured using an impedance meter. c The capacitance value of the charge storage element.

[0027] In some embodiments, the step of obtaining real-time interference observations based on the output voltage of the power amplifier and the voltage of the charge storage element specifically includes:

[0028] The real-time interference observation value d2(t) is obtained by passing the obtained interference signal d1(t) containing high-frequency components through a filter, and is in the following form:

[0029] d2(t)=-α1*d2(t-1)+α2d1(t-1)+α3d1(t)#

[0030] Where d1(t-1) and d2(t-1) represent the d1 and d2 values ​​at the previous sampling time, respectively, and d1(t) and d2(t) represent the d1 and d2 values ​​at the current sampling time, respectively. α1, α2, and α3 are constants describing the filter's performance. The typical range of these three parameters is as follows:

[0031] In this embodiment, the step of obtaining the dynamic equivalent charge of the piezoelectric ceramic actuator based on the interference observation value specifically includes:

[0032] The dynamic equivalent charge of the piezoelectric ceramic actuator is obtained from the interference observation value d2(t) in the following manner:

[0033]

[0034] Where: C p (t) represents the dynamic equivalent charge, the voltage amplification factor k of the power amplifier is known, and the static equivalent capacitance C of the piezoelectric ceramic actuator is known. pn C can be measured using an impedance meter. c The capacitance of the charge storage element, the real-time disturbance observation value d2(t), and the output voltage V of the power amplifier are given. a (t).

[0035] In some embodiments, the step of obtaining the estimated displacement of the piezoelectric ceramic actuator based on the dynamic equivalent charge specifically includes:

[0036] The charge q involved in the piezoelectric ceramic actuator x (t) is represented as:

[0037] q x (t)=C c V c (t)+(C c +C p (t))d2(t)#

[0038] charge q x The linear relationship between x(t) and the piezoelectric ceramic displacement x(t) can be obtained through calibration using an external sensor:

[0039] x(t)=α4(q x (t)-α5)#

[0040] Where α4 and α5 are constants describing the calculated q x The linear relationship between (t) and the piezoelectric ceramic displacement x(t), where α4 represents the charge change Δq. x (t) represents the ratio of the piezoelectric ceramic displacement change Δx(t); α5 represents the charge q. x The bias relationship (t) under zero initial conditions can be fitted to parameters α4 and α5 using calibration methods including but not limited to two-point calibration and multi-point calibration.

[0041] A third objective of this application is to provide a terminal, the terminal including a processor and a memory coupled to the processor, wherein...

[0042] The memory stores program instructions for implementing the piezoelectric ceramic actuator displacement estimation system.

[0043] The processor is used to execute the program instructions stored in the memory to control the displacement estimation of the piezoelectric ceramic actuator.

[0044] The present application adopts the above technical solution, and its beneficial effects are as follows:

[0045] The piezoelectric ceramic actuator displacement estimation system, system, and terminal provided in this application acquire the charge flowing through the piezoelectric ceramic actuator according to the above circuit settings; acquire the output voltage of the power amplifier and the voltage of the charge storage element; acquire real-time interference observation values ​​based on the output voltage of the power amplifier and the voltage of the charge storage element; acquire the dynamic equivalent charge of the piezoelectric ceramic actuator based on the interference observation values; and acquire the estimated displacement of the piezoelectric ceramic actuator based on the dynamic equivalent charge. The above method and system of this application, through the combination of hardware and software, design a sensorless displacement estimation circuit and a displacement estimation algorithm including real-time interference observation compensation, and design a corresponding compensation circuit for charge leakage effect, to achieve long-term high-precision and stable piezoelectric ceramic displacement estimation, which can be provided to the piezoelectric ceramic controller as a displacement feedback signal. This method is simple to implement, effective, and has significant advantages. Through this method, the piezoelectric ceramic can be used as a displacement actuator while also realizing displacement sensing without relying on sensors. It is suitable for high-precision positioning and control scenarios of piezoelectric ceramics in compact assembly environments where external sensors cannot be integrated. Attached Figure Description

[0046] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments of this application or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0047] Figure 1 A flowchart illustrating the steps of the piezoelectric ceramic actuator displacement estimation system provided in Embodiment 1 of this application.

[0048] Figure 2 This is a sensorless displacement estimation circuit provided in Embodiment 1 of this application.

[0049] Figure 3 The estimation method for the displacement estimation system of the piezoelectric ceramic actuator provided in Embodiment 2 of this application.

[0050] Figure 4 This is a schematic diagram of the terminal structure provided in Embodiment 3 of this application. Detailed Implementation

[0051] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this application, and should not be construed as limiting this application.

[0052] In the description of this application, it should be understood that the terms "upper", "lower", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0053] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0054] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments.

[0055] Example 1

[0056] Please see Figure 1 This is a schematic diagram of a piezoelectric ceramic actuator displacement estimation system provided in Embodiment 1. It includes a controller 110, a power amplifier 120, a piezoelectric ceramic actuator 130, and a charge storage element 140 connected in series. Voltage sampling circuits 150 are connected to both ends of the piezoelectric ceramic actuator 130, one end of which is also connected to a charge conduction element 160. The charge conduction element 160 and the charge storage element 140 are connected in parallel. The controller 110 provides a control signal, and the voltage generated by the signal source can be given by the user. The power amplifier 120 amplifies the signal from the controller 110 to a voltage range required to drive the piezoelectric ceramic actuator 130. The charge storage element 140 measures the charge flowing through the piezoelectric ceramic actuator 130. The voltage sampling circuit 150 measures the output voltage of the power amplifier 120 and the voltage of the charge storage element 140.

[0057] It is understandable that in practice, the charge conduction element 160 is only used to overcome the defects of the actual circuit (since the voltage sampling circuit 150 will actually introduce errors that accumulate over time), and ideally, the charge conduction element 160 may not be needed.

[0058] The implementation method is explained in detail below.

[0059] Please see Figure 2 The sensorless displacement estimation circuit is essentially a capacitive voltage divider circuit, consisting of a piezoelectric ceramic actuator 130 and a charge storage element 140 forming a series circuit, with parallel charge conduction devices matching the leakage charge of the piezoelectric ceramic and the charge accumulation at the voltage sampling point.

[0060] In this embodiment, the charge conduction element 160 and the charge storage element 140 are connected in parallel. The long-term charge drift in the hardware mainly originates from the finite impedance of the voltage sampling circuit 150 and the piezoelectric ceramic actuator 130. Since the voltage sampling circuit 150 does not possess ideal virtual short and virtual open characteristics, and requires a certain input current (i.e., input bias current) to maintain normal operation, charge will continuously accumulate at the measurement point of the charge storage element 140 until saturation. This not only affects the long-term stability and accuracy of displacement estimation but also gradually shortens the actuation stroke of the piezoelectric ceramic under the same input reference voltage. Therefore, by connecting the charge conduction element 160 in parallel with the charge storage element 140 to provide a charge absorption channel, its typical charge leakage value matches the charge accumulation rate at the sampling point.

[0061] It can be understood that the piezoelectric ceramic actuator 130 can be equivalent to a capacitor C. p (t), a portion of the charge q(t) flowing through the piezoelectric ceramic actuator 130 is stored in the constantly changing dynamic equivalent capacitance C. p In (t), i.e. q p (t), the other part of the charge q x The displacement x(t) of the piezoelectric ceramic actuator 130 exhibits a linear correlation. This invention measures the charge q(t) flowing through the piezoelectric ceramic and estimates the charge q stored in the equivalent capacitance. p (t), the displacement x of the piezoelectric ceramic is calculated. This application is based on this principle to achieve displacement estimation.

[0062] Specifically, the piezoelectric ceramic actuator displacement estimation system provided in the above embodiments of this application operates as follows:

[0063] Step S110: Obtain the charge flowing through the piezoelectric ceramic actuator 130 according to the circuit settings.

[0064] Specifically, the charge q flowing through the charge storage element c(t) is equivalent to the superposition of the charge q(t) flowing through the piezoelectric ceramic actuator and the system interference, which is obtained by the following formula (1):

[0065] q c (t)=q(t)+d(t)# (1)

[0066] Wherein: d(t) represents the system disturbance, including but not limited to system parameter perturbation, measurement noise, drift caused by temperature and environmental changes, etc.

[0067] Step S120: Obtain the output voltage of the power amplifier 120 and the voltage of the charge storage element 140.

[0068] Specifically, the output voltage V of the power amplifier a (t) and the voltage V of the charge storage element c (t) is measured by the voltage sampling circuit. The voltage V of the charge storage element is... c (t) is:

[0069] V c (t)=q c (t) / C c # (2)

[0070] Where: C c q is the capacitance value of the charge storage element. c (t) represents the charge of the charge storage element, i.e., the voltage V of the charge storage element. c (t) represents the charge q(t) flowing through the piezoelectric ceramic actuator, including system disturbance d(t).

[0071] The interference signal d1(t) containing high-frequency components is calculated using the following formula (3):

[0072]

[0073] Where: V o (t) represents the voltage generated by the signal source, which is a given command signal. The voltage amplification factor k of the power amplifier is known, and the static equivalent capacitance C of the piezoelectric ceramic actuator is... pn C can be measured using an impedance meter. c The capacitance value of the charge storage element.

[0074] Step S130: Obtain real-time interference observation values ​​based on the output voltage of the power amplifier 120 and the voltage of the charge storage element 140.

[0075] Based on the obtained intermediate variable d1(t), the real-time interference observation value d2(t) is obtained through a filter, in the form of the following formula (4):

[0076] d2(t)=-α1*d2(t-1)+α2d1(t-1)+α3d1(t)# (4)

[0077] Where d1(t-1) and d2(t-1) represent the d1 and d2 values ​​at the previous sampling time, respectively, and d1(t) and d2(t) represent the d1 and d2 values ​​at the current sampling time, respectively. α1, α2, and α3 are constants describing the filter's performance. The typical range of these three parameters is as follows:

[0078] Step S140: Obtain the dynamic equivalent charge of the piezoelectric ceramic actuator 130 based on the interference observation value.

[0079] Specifically, the dynamic equivalent charge of the piezoelectric ceramic actuator is obtained from the interference observation value d2(t) using the following formula (5):

[0080]

[0081] Where: C p (t) represents the dynamic equivalent charge, the voltage amplification factor k of the power amplifier is known, and the static equivalent capacitance C of the piezoelectric ceramic actuator is known. pn C can be measured using an impedance meter. c The capacitance of the charge storage element, the real-time disturbance observation value d2(t), and the output voltage V of the power amplifier are given. a (t).

[0082] Step S150: Obtain the estimated displacement of the piezoelectric ceramic actuator 130 based on the dynamic equivalent charge.

[0083] Specifically, the charge q participating in the piezoelectric ceramic actuator x (t) is expressed as formula (6):

[0084] q x (t)=C c V c (t)+(C c +C p (t))d2(t)# (6)

[0085] charge q x The linear relationship between x(t) and the piezoelectric ceramic displacement x(t) can be obtained by calibration using an external sensor, as shown in the following formula (7):

[0086] x(t)=α4(q x (t)-α5)# (7)

[0087] Where α4 and α5 are constants describing the calculated q x The linear relationship between (t) and the piezoelectric ceramic displacement x(t), where α4 represents the charge change Δq. x (t) represents the ratio of the piezoelectric ceramic displacement change Δx(t); α5 represents the charge q. x The bias relationship (t) under zero initial conditions can be fitted to parameters α4 and α5 using calibration methods including but not limited to two-point calibration and multi-point calibration.

[0088] In this embodiment, the charge storage element 140 is a temperature-insensitive element. The charge conduction element 160 is a Schottky diode, which matches the charge leaking from the piezoelectric ceramic actuator 130 and the charge accumulated at the sampling point by the voltage sampling circuit 150.

[0089] The piezoelectric ceramic actuator displacement estimation system provided in the above embodiments of this application, through the combination of hardware and software, designs a sensorless displacement estimation circuit and a displacement estimation algorithm including real-time interference observation compensation, and designs a corresponding compensation circuit for charge leakage effect, to achieve long-term high-precision and stable piezoelectric ceramic displacement estimation, which can be provided to the piezoelectric ceramic controller as a displacement feedback signal. This method is simple to implement, has obvious effects, and has significant advantages. Through this method, piezoelectric ceramics can be used as displacement actuators while also realizing displacement sensing without relying on sensors. It is suitable for high-precision positioning and control scenarios of piezoelectric ceramics in compact assembly environments where external sensors cannot be integrated.

[0090] Example 2

[0091] Please see Figure 3 The estimation method for the piezoelectric ceramic actuator displacement estimation system provided in Embodiment 2 of this application includes the following steps S10 to S50, and the implementation of each step is described in detail below.

[0092] Step S10: Obtain the charge flowing through the piezoelectric ceramic actuator according to the above circuit settings.

[0093] Specifically, the charge q flowing through the charge storage element c (t) is equivalent to the superposition of the charge q(t) flowing through the piezoelectric ceramic actuator and the system interference, which is obtained by the following formula (1):

[0094] q c (t)=q(t)+d(t)# (1)

[0095] Wherein: d(t) represents the system disturbance, including but not limited to system parameter perturbation, measurement noise, drift caused by temperature and environmental changes, etc.

[0096] Step S20: Obtain the output voltage of the power amplifier and the voltage of the charge storage element.

[0097] Specifically, the output voltage V of the power amplifier a (t) and the voltage V of the charge storage element c (t) is measured by the voltage sampling circuit. The voltage V of the charge storage element is... c (t) is:

[0098] V c (t)=q c (t) / C c # (2)

[0099] Where: C c q is the capacitance value of the charge storage element. c (t) represents the charge of the charge storage element, i.e., the voltage V of the charge storage element. c (t) represents the charge q(t) flowing through the piezoelectric ceramic actuator, including system disturbance d(t).

[0100] The interference signal d1(t) containing high-frequency components is calculated using the following formula (3):

[0101]

[0102] Where: V o (t) represents the voltage generated by the signal source, which is a given command signal. The voltage amplification factor k of the power amplifier is known, and the static equivalent capacitance C of the piezoelectric ceramic actuator is... pn C can be measured using an impedance meter. c The capacitance value of the charge storage element.

[0103] Step S30: Obtain real-time interference observation values ​​based on the output voltage of the power amplifier and the voltage of the charge storage element.

[0104] The real-time interference observation value d2(t) is obtained by passing the obtained interference signal d1(t) containing high-frequency components through a filter, and is in the form of the following formula (4):

[0105] d2(t)=-α1*d2(t-1)+α2d1(t-1)+α3d1(t)# (4)

[0106] Where d1(t-1) and d2(t-1) represent the d1 and d2 values ​​at the previous sampling time, respectively, and d1(t) and d2(t) represent the d1 and d2 values ​​at the current sampling time, respectively. α1, α2, and α3 are constants describing the filter's performance. The typical range of these three parameters is as follows:

[0107] Step S40: Obtain the dynamic equivalent charge of the piezoelectric ceramic actuator based on the interference observation value.

[0108] Specifically, the dynamic equivalent charge of the piezoelectric ceramic actuator is obtained from the interference observation value d2(t) using the following formula (5):

[0109]

[0110] Where: C p (t) represents the dynamic equivalent charge, the voltage amplification factor k of the power amplifier is known, and the static equivalent capacitance C of the piezoelectric ceramic actuator is known. pn C can be measured using an impedance meter. c The capacitance of the charge storage element, the real-time disturbance observation value d2(t), and the output voltage V of the power amplifier are given. a (t).

[0111] Step S50: Obtain the estimated displacement of the piezoelectric ceramic actuator based on the dynamic equivalent charge.

[0112] Specifically, the charge q participating in the piezoelectric ceramic actuator x (t) is expressed as formula (6):

[0113] q x (t)=C c V c (t)+(C c +C p (t))d2(t)# (6)

[0114] charge q x The linear relationship between x(t) and the piezoelectric ceramic displacement x(t) can be obtained by calibration using an external sensor, as shown in the following formula (7):

[0115] x(t)=α4(q x (t)-α5)# (7)

[0116] Where α4 and α5 are constants describing the calculated q x The linear relationship between (t) and the piezoelectric ceramic displacement x(t), where α4 represents the charge change Δq. x (t) represents the ratio of the piezoelectric ceramic displacement change Δx(t); α5 represents the charge q. x The bias relationship (t) under zero initial conditions can be fitted to parameters α4 and α5 using calibration methods including but not limited to two-point calibration and multi-point calibration.

[0117] The piezoelectric ceramic actuator displacement estimation method provided in the above embodiments of this application, through the combination of hardware and software, designs a sensorless displacement estimation circuit and a displacement estimation algorithm including real-time interference observation compensation, and designs a corresponding compensation circuit for charge leakage effect, to achieve long-term high-precision and stable piezoelectric ceramic displacement estimation, which can be provided to the piezoelectric ceramic controller as a displacement feedback signal. The method is simple to implement, has obvious effects, and has significant advantages. Through this method, piezoelectric ceramics can be used as displacement actuators while also realizing displacement sensing without relying on sensors. It is suitable for high-precision positioning and control scenarios of piezoelectric ceramics in compact assembly environments where external sensors cannot be integrated.

[0118] Example 3

[0119] Please see Figure 4 This is a schematic diagram of the terminal structure according to an embodiment of this application. The terminal 50 includes a processor 51 and a memory 52 coupled to the processor 51.

[0120] The memory 52 stores program instructions for implementing the piezoelectric ceramic actuator displacement estimation system.

[0121] The processor 51 is used to execute the program instructions stored in the memory to control the displacement estimation of the piezoelectric ceramic actuator.

[0122] The processor 51 can also be referred to as a CPU (Central Processing Unit). The processor 51 may be an integrated circuit chip with signal processing capabilities. The processor 51 can also be a general-purpose processor, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), an off-the-shelf programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components. A general-purpose processor can be a microprocessor or any conventional processor.

[0123] It is understood that the technical features of the above embodiments can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0124] The above are merely preferred embodiments of this application, and only specifically describe the technical principles of this application. These descriptions are only for explaining the principles of this application and should not be construed as limiting the scope of protection of this application in any way. Based on this explanation, any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application, as well as other specific embodiments of this application that can be conceived by those skilled in the art without creative effort, should be included within the scope of protection of this application.

Claims

1. A displacement estimation system for a piezoelectric ceramic actuator, characterized in that, The device includes a controller, a power amplifier, a piezoelectric ceramic actuator, and a charge storage element connected in series. Voltage sampling circuits are connected to both ends of the piezoelectric ceramic actuator. The power amplifier amplifies the signal from the controller to the voltage range required to drive the piezoelectric ceramic actuator. The charge storage element measures the charge flowing through the piezoelectric ceramic actuator. The voltage sampling circuits measure the output voltage of the power amplifier and the voltage of the charge storage element. Based on the circuit settings, the charge flowing through the piezoelectric ceramic actuator is obtained. By obtaining the output voltage of the power amplifier and the voltage of the charge storage element, real-time interference observations are obtained. Based on the interference observations, the dynamic equivalent charge of the piezoelectric ceramic actuator is obtained. Based on the dynamic equivalent charge, the estimated displacement of the piezoelectric ceramic actuator is obtained.

2. The piezoelectric ceramic actuator displacement estimation system as described in claim 1, characterized in that, The charge storage element is a component whose capacitance is not sensitive to temperature.

3. The piezoelectric ceramic actuator displacement estimation system as described in claim 1, characterized in that, The charge conduction element is a Schottky diode, which matches the charge leaked from the piezoelectric ceramic actuator and the charge accumulated at the sampling point by the voltage sampling circuit.

4. The piezoelectric ceramic actuator displacement estimation system as described in claim 1, characterized in that, One end of the voltage sampling circuit is also connected to a charge conduction element, which is arranged in parallel with the charge storage element.

5. An estimation method for the displacement estimation system of a piezoelectric ceramic actuator as described in claim 1, characterized in that, Includes the following steps: Acquire the charge flowing through the piezoelectric ceramic actuator; Obtain the output voltage of the power amplifier and the voltage of the charge storage element; Real-time interference observation values ​​are obtained based on the output voltage of the power amplifier and the voltage of the charge storage element; The dynamic equivalent charge of the piezoelectric ceramic actuator is obtained based on the observed interference values. The estimated displacement of the piezoelectric ceramic actuator is obtained based on the dynamic equivalent charge.

6. The estimation method for the displacement estimation system of the piezoelectric ceramic actuator as described in claim 5, characterized in that, The step of obtaining the charge flowing through the piezoelectric ceramic actuator according to the circuit settings specifically includes: According to the law of conservation of charge, after the charge conduction element matches the charge leaking from the piezoelectric ceramic actuator and the charge accumulated at the sampling point by the voltage sampling circuit, the charge flows through the charge storage element. Equivalent to the charge flowing through the piezoelectric ceramic actuator Superimposed system interference: in: The system interference includes system parameter perturbations, measurement noise, and drift caused by temperature and environmental changes; The charge flowing through the piezoelectric ceramic actuator It is divided into two parts. The first part of the charge is stored in the constantly changing dynamic equivalent capacitance, and the second part of the charge... It participates in the displacement of the piezoelectric ceramic actuator.

7. The estimation method for the displacement estimation system of the piezoelectric ceramic actuator as described in claim 6, characterized in that, The steps of obtaining the output voltage of the power amplifier and the voltage of the charge storage element specifically include: The output voltage of the power amplifier and the voltage of the charge storage element The voltage of the charge storage element is measured by the voltage sampling circuit. for: in: The capacitance value of the charge storage element is given. The charge of the charge storage element; that is, the voltage of the charge storage element. This represents system interference. The charge flowing through the piezoelectric ceramic actuator ; Interference signals containing high-frequency components It is obtained through the following calculation method: in: The voltage generated by the signal source represents the given command signal, and the voltage amplification factor of the power amplifier is... It is known that the static equivalent capacitance of the piezoelectric ceramic actuator is... It can be measured by an impedance meter. The capacitance value of the charge storage element.

8. The estimation method for the displacement estimation system of the piezoelectric ceramic actuator as described in claim 7, characterized in that, The step of obtaining real-time interference observations based on the output voltage of the power amplifier and the voltage of the charge storage element specifically includes: Based on the obtained interference signal containing high-frequency components Real-time interference observations are obtained through filters. The format is as follows: in, and These represent the previous sampling time. Value and value, and These represent the current sampling time. Value and value, These are constants describing the filter's performance; the range of values ​​for the three parameters is as follows: , , .

9. The estimation method for the displacement estimation system of a piezoelectric ceramic actuator as described in claim 8, characterized in that, The step of obtaining the dynamic equivalent charge of the piezoelectric ceramic actuator based on the observed interference values ​​specifically includes: Based on the interference observations The dynamic equivalent charge of the piezoelectric ceramic actuator is obtained in the following way: in: Represented as dynamic equivalent charge, the voltage amplification factor of the power amplifier. It is known that the static equivalent capacitance of the piezoelectric ceramic actuator is... It can be measured by an impedance meter. The capacitance value of the charge storage element, and the real-time interference observation value. The output voltage of the power amplifier .

10. The estimation method for the displacement estimation system of the piezoelectric ceramic actuator as described in claim 9, characterized in that, The step of obtaining the estimated displacement of the piezoelectric ceramic actuator based on the dynamic equivalent charge specifically includes: Second part of the charge Represented as: The charge calculated at this time With piezoelectric ceramic displacement The relationship is linear and can be obtained through calibration using external sensors. in, A constant, describing the calculated value. With piezoelectric ceramic displacement The linear relationship Represents the change in charge For the displacement change of piezoelectric ceramic The ratio relationship; Representing the charge The bias relationship under zero initial conditions is fitted to parameters using a two-point calibration method or a multi-point calibration method. .

11. A terminal, characterized in that, The terminal includes a processor and a memory coupled to the processor, wherein, The memory stores program instructions for implementing the piezoelectric ceramic actuator displacement estimation system according to any one of claims 5-10; The processor is used to execute the program instructions stored in the memory to control the displacement estimation of the piezoelectric ceramic actuator.

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