Passive vibration reduction support mechanism for workbench and semiconductor equipment

Abstract

The present invention relates to the field of semiconductor equipment technology, and more specifically, to a passive vibration reduction support mechanism for a workbench, comprising a base, a flexible support column, and a damping material plate. The base comprises a detachably connected upper cover and a lower base; the flexible support column comprises an upper support portion, a middle conical body portion, and a lower decoupling portion; a conical groove is provided at the bottom of the upper cover, and the conical body portion is correspondingly arranged in the conical groove; the damping material plate is correspondingly arranged between the conical groove and the conical body portion; a second through-hole is provided at the top of the upper cover for the support portion to pass through; a conical pit is provided at the top of the lower base, and the decoupling portion is located in the conical pit, and the bottom end of the decoupling portion is a spherical structure, and the spherical structure abuts against the inner wall of the conical pit. It can not only meet the support function of the workbench, but also ensure the integrated accuracy of the workbench assembly.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a passive vibration reduction support mechanism of a workbench and semiconductor equipment. Background Art

[0002] For the workbench in some semiconductor-specific equipment, since dynamic alternating loads are generated during normal operation of the workbench, the support mechanism between the workbench and the base must not only meet the function of supporting the workbench, but also have the function of vibration reduction.

[0003] The support mechanism between the workbench and the base generally uses metal adapters or rubber vibration isolation pads, which can achieve basic support functions. Although metal adapters can achieve a fixed connection with six degrees of freedom, they do not have a vibration reduction function; and although rubber vibration isolation pads can achieve a vibration reduction function, due to their soft material, they cannot guarantee assembly accuracy. Summary of the Invention

[0004] The object of the present invention is to provide a passive vibration reduction support mechanism for a workbench, which can not only meet the support function of the workbench but also ensure the integration accuracy of the workbench assembly.

[0005] Another object of the present invention is to provide a semiconductor device that can satisfy the support function of the workbench when the workbench and the base are assembled, while ensuring the integration accuracy of the workbench assembly.

[0006] The technical solution of the present invention is achieved as follows:

[0007] A passive vibration reduction support mechanism for a workbench is provided between the workbench and a base, comprising: a base body, a flexible support and a damping material plate, wherein the base body comprises a detachably connected upper cover and a lower base;

[0008] The flexible support comprises an upper support portion, a middle conical body portion and a lower decoupling portion, wherein the support portion, the conical body portion and the decoupling portion are an integral structure and are coaxial;

[0009] A conical groove is formed at the bottom of the upper cover seat, the top diameter of the conical groove is smaller than the bottom diameter, the top surface of the conical body is a conical surface, and the conical body is correspondingly arranged in the conical groove;

[0010] The damping material plate is tapered as a whole, and is correspondingly arranged between the tapered groove and the tapered body. A first through-hole is formed at the top end of the damping material plate, and the support portion is passed through the first through-hole.

[0011] A second through hole communicating with the tapered groove is formed on the top of the upper cover seat, and the support portion is passed through the second through hole and extends beyond the top surface of the upper cover seat;

[0012] A conical pit is provided on the top of the lower base, the top diameter of the conical pit is larger than the bottom diameter, the decoupling part is located in the conical pit, and the bottom end of the decoupling part is a spherical structure, and the spherical structure abuts against the inner wall of the conical pit.

[0013] Furthermore, the bottom end diameter of the damping material plate is larger than the top end diameter of the conical pit, and the bottom end of the damping material plate is in contact with the top surface of the lower base.

[0014] Furthermore, the upper cover seat and the lower base are cylindrical structures with the same diameter.

[0015] Furthermore, the conical groove, the conical pit, the flexible support and the seat body are coaxially arranged.

[0016] Furthermore, the damping material plate is made of rubber or plastic.

[0017] Furthermore, the flexible support also includes a connecting rod portion, the conical body portion and the decoupling portion are connected through the connecting rod portion, the connecting rod portion and the decoupling portion are both located in the conical pit, and the supporting portion, the conical body portion, the connecting rod portion and the decoupling portion are an integrated structure and are coaxial.

[0018] Furthermore, the upper cover seat and the lower base are connected by a plurality of first bolts.

[0019] Also provided is a semiconductor device comprising a workbench and a base, and also comprising a passive vibration reduction support mechanism of the workbench.

[0020] Furthermore, a plurality of passive vibration reduction support mechanisms of the workbench are arranged between the workbench and the base, the seat body is connected to the base, and the support portion supports the workbench.

[0021] Furthermore, the number of the passive vibration reduction support mechanisms of the workbench is three and they are distributed in a triangular shape.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] The passive vibration reduction support mechanism in the present application is arranged between the workbench and the base, and supports the workbench through the support part of the flexible pillar. The workbench squeezes the flexible pillar downward as a whole, and at the same time, the damping effect of the damping material plate can suppress the vibration peak of the workbench at the resonant frequency of the entire system, which has a damping vibration suppression effect and can meet the support and vibration reduction functions of the workbench; at the same time, the spherical structure at the bottom of the flexible pillar abuts and cooperates with the inner wall of the conical surface of the conical pit of the lower base. When the parallelism between the workbench and the base assembly surface is poor, the decoupling of the parallelism difference between the workbench and the base assembly surface can also be achieved, thereby avoiding the virtual connection phenomenon between the contact surfaces and ensuring the integration accuracy of the assembly of the workbench and the base. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0025] Figure 1 A three-dimensional structural diagram of the passive vibration reduction support mechanism of the present invention;

[0026] Figure 2 is a cross-sectional view of the passive vibration reduction support mechanism of the present invention;

[0027] Figure 3 It is a cross-sectional view of the upper cover seat of the present invention;

[0028] Figure 4 is a cross-sectional view of the lower base of the present invention;

[0029] Figure 5 is a cross-sectional view of the flexible support of the present invention;

[0030] Figure 6 This is a schematic diagram of the structure of the passive vibration reduction support mechanism of the present invention disposed between the workbench and the base;

[0031] Figure 7 It is a structural schematic diagram of the three passive vibration reduction support mechanisms of the present invention distributed in a triangle.

[0032] In the picture:

[0033] 1-base; 11-upper cover; 111-conical groove; 112-second through hole;

[0034] 12-lower base; 121-conical pit;

[0035] 2-flexible support; 21-support portion; 22-conical body portion; 23-decoupling portion; 24-connecting rod portion;

[0036] 3-damping material plate; 4-working table; 5-base; 6-first bolt; 7-second bolt. DETAILED DESCRIPTION

[0037] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0038] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0039] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0040] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like indicate positions or locations based on the positions shown in the accompanying drawings, or the positions or locations in which the inventive product is typically placed when in use. These terms are intended solely to facilitate the description of the present invention and to simplify the description, and are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0041] Furthermore, terms such as "horizontal," "vertical," and "overhanging" do not necessarily imply that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0042] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; and they may refer to internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0043] The following embodiments of the present invention are described in detail with reference to the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.

[0044] Example 1

[0045] Reference Figure 1-Figure 5 This embodiment provides a passive vibration reduction support mechanism for a workbench, which is arranged between a workbench 4 and a base 5, and includes: a base body 1, a flexible support 2 and a damping material plate 3, and the base body 1 includes a detachably connected upper cover seat 11 and a lower base 12.

[0046] The flexible support 2 comprises an upper support portion 21, a middle tapered portion 22, and a lower decoupling portion 23. The support portion 21, the tapered portion 22, and the decoupling portion 23 are integrally structured and coaxial. The flexible support 2 is made of a flexible or elastic material and deforms when squeezed, returning to its original shape when the force is removed.

[0047] The support portion 21 can be designed as a cylindrical structure, or as a square, rhombus, or other regular polygonal shapes. In this embodiment, the support portion 21 is preferably designed as a cylindrical structure so that the workbench 4 can squeeze the flexible pillar 2 so that the force is evenly distributed.

[0048] The cross-sectional structure of the upper cover 11 is as follows: Figure 3 As shown, a conical groove 111 is provided at the bottom of the upper cover seat 11. The top diameter of the conical groove 111 is smaller than the bottom diameter, that is, the diameter of the conical groove 111 increases from top to bottom. The top surface of the conical body 22 is a conical surface, and the conical body 22 is correspondingly arranged in the conical groove 111. A sandwich layer space is provided between the top surface (conical surface) of the conical body 22 and the inner wall of the conical groove 111. The sandwich layer space is used to install the damping material plate 3. The damping material plate 3 is a conical plate structure as a whole, and its cross-sectional structure is as shown in FIG. Figure 2As shown, a first through-hole is provided at the top end of the damping material plate. The purpose of providing the first through-hole is to enable the support portion 21 of the damping material plate 3 to pass through the first through-hole when the damping material plate 3 is installed on the flexible support 2, and to enable the inner conical surface of the damping material plate 3 to fit with the top surface (conical surface) of the conical body 22. A second through-hole 112 is provided at the top of the upper cover seat 11, which is connected to the conical groove 111. After the damping material plate 3 is installed on the conical body 22 of the flexible support 2, the support portion 21 of the flexible support 2 is pushed upward from the conical groove 111 from the bottom of the upper cover seat 11, and passes through the second through-hole 112, until the outer conical surface of the damping material plate 3 fits with the inner wall surface (conical surface) of the conical groove 111, and the top of the support portion 21 exceeds the top surface of the upper cover seat 11, so as to support the workbench 4.

[0049] It should be noted that the conical body 22 is a solid structure, and the damping material plate 3 is a hollow conical plate structure, which can fit exactly on the outer conical surface of the conical body 22.

[0050] The cross-sectional structure of the lower base 12 and the conical pit 121 is as follows: Figure 4 As shown, a conical pit 121 is formed on the top of the lower base 12. The top diameter of the conical pit 121 is larger than the bottom diameter, that is, the diameter of the conical pit 121 increases from bottom to top. After the support portion 21 and the conical body 22 of the flexible support 2 are installed on the upper cover 11, the lower base 12 is installed. The lower base 12 and the upper cover 11 can be bolted together using a plurality of first bolts 6. After the connection, the decoupling portion 23 is located in the conical pit 121, and the bottom end of the decoupling portion 23 is a spherical structure. The spherical structure abuts against the inner wall of the conical pit 121, and the inner wall surface of the conical pit 121 is a conical surface.

[0051] It should be noted that the number of first bolts 6 is preferably three and evenly distributed on the seat body 1 .

[0052] In this embodiment, preferably: the upper cover seat 11 and the lower base 12 can both be cylindrical structures, and their diameters can be the same or different. More preferably: the upper cover seat 11 and the lower base 12 are cylindrical structures with the same diameter. Then the seat body 1 as a whole is also a cylindrical structure, and the conical groove 111, the conical pit 121, and the flexible pillar 2 are coaxially arranged with the seat body 1, that is, the central axes of the conical groove 111, the conical pit 121, and the flexible pillar 2 are all coaxial with the central axis of the seat body 1. In this way, when the workbench 4 acts on or applies pressure to the entire passive vibration reduction support mechanism, each position of the passive vibration reduction support mechanism can be evenly stressed, and the support is more stable.

[0053] Preferably, the connection structure between the damping material plate 3, the tapered groove 111 and the lower base 12 is as follows: Figure 2In this way, the workbench 4 squeezes the flexible pillar 2 downward as a whole, and at the same time, the damping effect of the damping material plate 3 can suppress the vibration peak of the workbench 4 at the resonant frequency of the entire system, which has a damping and vibration suppression effect and can meet the support and vibration reduction functions of the workbench 4.

[0054] The damping material plate 3 is made of damping material, which is a material that converts solid mechanical vibration energy into heat energy and dissipates it. It is mainly used for vibration and noise control. Damping materials are divided into five categories according to their characteristics:

[0055] ① Rubber and plastic damping panels: used as sandwich layer materials. Commonly used materials include butyl, acrylate, polysulfide, nitrile, silicone rubber, polyurethane, polyvinyl chloride, and epoxy resin. These materials can meet operating requirements within the range of -50 to 200°C.

[0056] ② Rubber and foam plastics: used as damping and sound-absorbing materials. Butyl rubber and polyurethane foam are commonly used, and the purpose of sound absorption is achieved by controlling the size of the bubbles, and whether they are open or closed.

[0057] ③ Damping composite materials: used for vibration and noise control. They use the first two types of materials as the damping sandwich layer, and then combine them with metal or non-metallic structural materials to form various sandwich structure panels and beams, etc., which are then machined into various structural parts.

[0058] ④ High damping alloy: The damping performance is basically stable over a wide range of temperature and frequency. The most commonly used alloys are copper-zinc-aluminum, iron-chromium-molybdenum, and manganese-copper.

[0059] ⑤ Damping coating: Damping coating is made of polymer resin with appropriate fillers and auxiliary materials. It is a special coating that can be applied to the surface of various metal plate structures. It has vibration reduction, thermal insulation and certain sealing properties. It includes constrained damping coating and water-based damping coating.

[0060] In this embodiment, the damping material plate 3 is preferably made of rubber or polyurethane.

[0061] In this embodiment, the flexible support 2 further includes a connecting rod portion 24, and the conical body portion 22 and the decoupling portion 23 are connected via the connecting rod portion 24. The connecting rod portion 24 and the decoupling portion 23 are both located in the conical pit 121, and the support portion 21, the conical body portion 22, the connecting rod portion 24 and the decoupling portion 23 are an integral structure and are coaxial. The cross-sectional structure diagram of the flexible support 2 is shown in FIG. Figure 2 or Figure 5The spherical structure at the bottom of the flexible support 2 abuts against the inner wall of the conical surface of the conical pit 121 of the lower base 12. When the parallelism between the assembly surfaces of the workbench 4 and the base 5 is poor, the difference in parallelism between the assembly surfaces of the workbench 4 and the base 5 can be decoupled, thereby avoiding the phenomenon of virtual connection between the contact surfaces and ensuring the integration accuracy of the assembly of the workbench 4 and the base 5.

[0062] Therefore, the passive vibration reduction support mechanism of the workbench provided in the present application can not only satisfy the support function of the workbench 4, but also ensure the integrated accuracy of the assembly of the workbench 4.

[0063] Example 2

[0064] Reference Figure 6 and Figure 7 This embodiment provides a semiconductor device, including a machine (not shown), a workbench 4, a base 5, and the passive vibration reduction support mechanism of Example 1. The machine is set on the workbench 4, and the base 5 is located below the workbench 4. The base 5 and the workbench 4 are supported by multiple passive vibration reduction support mechanisms. The base 1 and the base 5 are bolted together by multiple second bolts 7. The number of second bolts 7 is set to three, and the three second bolts 7 are evenly distributed on the base 1. The three second bolts 7 are staggered with the three first bolts 6, as shown in FIG. Figure 1 shown.

[0065] In this embodiment, the number of passive vibration reduction support mechanisms is designed to be three, and they are distributed in a triangular pattern. The three passive vibration reduction support mechanisms are replaced by A, B, and C respectively. The damping material plate 3 is selected as a rubber plate. When the parallelism between the assembly surfaces of the workbench 4 and the base 5 is poor, decoupling can be achieved by cooperating between the conical inner wall of the conical pit 121 of the lower base 12 and the spherical structure of the decoupling portion 23 of the flexible support 2, thereby avoiding the phenomenon of virtual connection between the contact surfaces and ensuring the integration accuracy of the assembly of the workbench 4 and the base 5. The structural forms of A, B, and C are the same, but in the entire system, the flexible supports 2 in the three are at a certain angle to each other. By adjusting the angle between the flexible supports 2 in the triangular distribution of A, B, and C, the modal frequency of the workbench 4 in the entire system can be changed, thereby changing the frequency range that requires vibration reduction. At the same time, the damping effect of the rubber plate can suppress the vibration peak of the workbench 4 at the resonant frequency of the entire system.

[0066] The beneficial effects of the technical solution of the present invention are:

[0067] 1. By adjusting the angles between the flexible struts 2 in A, B, and C, the modal frequency of the workbench in the entire system can be changed, thereby changing the frequency range that requires vibration reduction.

[0068] 2. The damping effect of the rubber plate suppresses the vibration peak of the workbench 4 at the resonant frequency of the entire system.

[0069] 3. While achieving rubber vibration suppression, no special processing mold is required, only a standard rubber plate is needed, and it is achieved through the mutual extrusion of the upper cover seat 11, the rubber plate, the flexible support 2, and the lower base 12.

[0070] 4. The conical inner wall of the conical pit 121 of the lower base 12 cooperates with the spherical structure of the decoupling portion 23 of the flexible support 2 to achieve decoupling, avoid virtual connection between the contact surfaces, and ensure the integration accuracy of the assembly of the workbench 4 and the base 5.

[0071] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

[0072] Furthermore, those skilled in the art will appreciate that although some embodiments herein include certain features included in other embodiments but not others, combinations of features from different embodiments are intended to be within the scope of the present invention and to form different embodiments. For example, in the claims above, any of the claimed embodiments may be used in any combination. The information disclosed in this background section is intended solely to enhance understanding of the overall background of the present invention and should not be construed as an admission or any form of implication that such information constitutes prior art known to those skilled in the art.

[0073] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

[0074] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A passive vibration reduction support mechanism for a workbench, arranged between a workbench (4) and a base (5), characterized in that: include: A seat body (1), a flexible support (2) and a damping material plate (3), wherein the seat body (1) comprises a detachably connected upper cover seat (11) and a lower base seat (12); The flexible support (2) comprises an upper support portion (21), a middle conical body portion (22) and a lower decoupling portion (23), wherein the support portion (21), the conical body portion (22) and the decoupling portion (23) are an integral structure and are coaxial. A conical groove (111) is provided at the bottom of the upper cover seat (11), the top diameter of the conical groove (111) is smaller than the bottom diameter, the top surface of the conical body (22) is a conical surface, and the conical body (22) is correspondingly arranged in the conical groove (111); The damping material plate (3) is tapered as a whole, and is correspondingly arranged between the tapered groove (111) and the tapered body (22). A first through-hole is provided at the top end of the damping material plate (3), and the support portion (21) is passed through the first through-hole. A second through hole (112) communicating with the tapered groove (111) is provided on the top of the upper cover seat (11); the support portion (21) is passed through the second through hole (112) and extends beyond the top surface of the upper cover seat (11); A conical pit (121) is provided on the top of the lower base (12), the top diameter of the conical pit (121) is larger than the bottom diameter, the decoupling portion (23) is located in the conical pit (121), and the bottom end of the decoupling portion (23) is a spherical structure, and the spherical structure abuts against the inner wall of the conical pit (121).

2. The passive vibration reduction support mechanism of the workbench according to claim 1, characterized in that: The bottom diameter of the damping material plate (3) is larger than the top diameter of the conical pit (121), and the bottom end of the damping material plate (3) is in contact with the top surface of the lower base (12).

3. The passive vibration reduction support mechanism of a workbench according to claim 1, characterized in that: The upper cover seat (11) and the lower base seat (12) are cylindrical structures with the same diameter.

4. The passive vibration reduction support mechanism of the workbench according to claim 3, characterized in that: The conical groove (111), the conical pit (121), the flexible support (2) and the seat body (1) are coaxially arranged.

5. The passive vibration reduction support mechanism of a workbench according to claim 1, characterized in that: The damping material plate (3) is made of rubber or plastic.

6. The passive vibration reduction support mechanism of a workbench according to claim 1, characterized in that: The flexible support (2) further includes a connecting rod portion (24), the conical body portion (22) and the decoupling portion (23) are connected via the connecting rod portion (24), the connecting rod portion (24) and the decoupling portion (23) are both located within the conical pit (121), and the supporting portion (21), the conical body portion (22), the connecting rod portion (24) and the decoupling portion (23) are an integrated structure and are coaxial.

7. The passive vibration reduction support mechanism of a workbench according to claim 1, characterized in that: The upper cover seat (11) and the lower base seat (12) are connected via a plurality of first bolts (6).

8. A semiconductor device comprising a workbench (4) and a base (5), characterized in that: It also includes a passive vibration reduction support mechanism for the workbench according to any one of claims 1 to 7.

9. The semiconductor device according to claim 8, wherein A plurality of passive vibration reduction support mechanisms of the workbench are arranged between the workbench (4) and the base (5); the base body (1) is connected to the base (5); and the support portion (21) supports the workbench (4).

10. The semiconductor device according to claim 9, wherein The number of the passive vibration reduction support mechanisms of the workbench is three and they are distributed in a triangular shape.

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