Metal fluoride trap and excimer laser

Abstract

The present invention provides a metal fluoride trap and an excimer laser. The metal fluoride trap comprises: a cylinder, a fan and a boost motor; an air inlet is provided in the middle of the cylinder; a boost chamber is provided at both ends of the cylinder; an air outlet is provided on the side wall of the boost chamber; the fan is rotatably arranged in the boost chamber; the power output shaft of the boost motor is connected to the fan, driving the fan to rotate, and forcing the purified working gas to be discharged from the air outlet. This application achieves a boosting effect by adding a boost motor and a fan at both ends of the cylinder of the metal fluoride trap, utilizing the high-speed rotation of the fan to increase the working gas flow rate of the reflux discharge chamber and enhance the metal fluoride trap's ability to filter metal fluorides; while boosting and increasing the airflow, the circulation of the purified working gas greatly improves the ability of the Brewster window to purge and remove dust, and the dust removal effect is also improved.

Description

Technical Field

[0001] The present invention relates to the technical field of lasers, and in particular to a metal fluoride trap and an excimer laser. Background Art

[0002] Currently, during the operation of an excimer laser, a large amount of metal fluoride is generated in the laser cavity. This metal fluoride can degrade laser performance and, if deposited on the inner surface of the Brewster window, can damage the window and reduce the laser life. Traditional excimer lasers include a metal fluoride trap (MFT), which uses the principle of electrostatic dust removal to adsorb charged metal fluoride. The MFT operates as follows: an airflow containing charged dust particles enters the MFT through the air inlet in the middle of the MFT, undergoes electrostatic dust removal inside the MFT, and then flows back into the discharge cavity through the air outlets at both ends.

[0003] Due to the internal flow resistance of the existing metal fluoride trap MFT, the gas flow rate flowing back to the discharge chamber is small, so the dust removal efficiency is low. Summary of the Invention

[0004] The object of the present invention is to provide a metal fluoride trap and an excimer laser to solve at least one of the above-mentioned technical problems existing in the prior art.

[0005] In order to solve the above technical problems, the present invention provides a metal fluoride trap, comprising: a cylinder (or metal fluoride trap body), a fan and a booster motor;

[0006] An air inlet is provided in the middle of the cylinder; and pressurized chambers are provided at both ends of the cylinder.

[0007] An air outlet is provided on the side wall of the boost chamber;

[0008] The fan is rotatably disposed in the boost chamber;

[0009] The power output shaft of the boost motor is connected to the fan to drive the fan to rotate, so as to force the purified working gas to be discharged from the gas outlet.

[0010] The present application adds a booster motor and a fan at both ends of the cylinder of the metal fluoride trap, and utilizes the high-speed rotation of the fan to achieve a boosting effect, thereby increasing the working gas flow rate of the reflux discharge chamber and enhancing the filtering ability of the metal fluoride trap (MFT) for metal fluorides; at the same time, while boosting the pressure and increasing the airflow, the ability of the purified working gas to blow and remove dust from the Brewster window is greatly improved, that is, the dust removal effect is also improved, and the purification effect on the window is greatly improved.

[0011] Furthermore, a guide structure is provided in the boost chamber near the air outlet, for guiding the working gas to gather, boost the pressure and discharge from the air outlet.

[0012] Furthermore, the guide structure is in a bell-mouth shape as a whole, the boost motor is arranged on the opening side of the bell-mouth, and the air outlet is arranged on the narrow side of the bell-mouth.

[0013] Furthermore, the guide structure is formed by two arc-shaped guide plates.

[0014] Furthermore, it also includes a shell for forming the boost chamber, and the shell is detachably connected to the end of the cylinder body;

[0015] The housing is cylindrical in shape as a whole, and a bearing mounting hole and a motor mounting hole are symmetrically provided on the side wall of the housing;

[0016] A motor mounting plate is detachably provided on the motor mounting hole, the boost motor is fixed on the outside of the motor mounting plate, and the power output shaft of the boost motor passes through the shaft hole on the motor mounting plate from the outside and extends into the boost chamber;

[0017] One end of the main shaft of the fan is rotatably mounted on the bearing mounting hole through a bearing; the other end of the main shaft is connected to the power output shaft of the boost motor.

[0018] Preferably, the housing is detachably provided with a bearing baffle on the outside of the bearing mounting hole.

[0019] Furthermore, a plug hole is provided at the other end of the main shaft and along the central axis of the main shaft, and the power output shaft is inserted into the plug hole;

[0020] And, it also includes a pressing block, and a notch is provided on the side surface of the other end of the main shaft;

[0021] The power output shaft is provided with a bayonet at a position corresponding to the notch, and the pressure block is simultaneously engaged with the notch and the bayonet to fix the power output shaft and the main shaft in connection.

[0022] Among them, after the pressure block is inserted into the notch and the clamping mouth is fixedly connected to the main shaft by means of screws.

[0023] Furthermore, a sealing gasket is provided between the motor mounting plate and the bearing seat plate and the housing to prevent air leakage from the boost chamber (111).

[0024] Furthermore, the housing is provided with a sealing end plate at one end facing away from the cylinder body.

[0025] The second aspect of the present application discloses an excimer laser with the above-mentioned metal fluoride trap, which comprises: a discharge cavity;

[0026] A cross-flow fan is provided in the discharge chamber;

[0027] The gas outlet of the cylinder is connected to the gas inlet of the discharge chamber through an air path. The (purified) working gas discharged from the gas outlet of the cylinder flows through the inner side of the Brewster window and then flows back into the discharge chamber through the slit.

[0028] Furthermore, the discharge chamber is provided with: a flow guide cover and a first actuator; the flow guide cover includes a left cover body away from the side of the cross-flow fan and a right cover body close to the side of the cross-flow fan; the right cover body is movably arranged; the first actuator is used to drive the right cover body to move, thereby changing the gap between the right cover body and the cross-flow fan.

[0029] In the present application, the right cover body is movably arranged, and can be driven to move by the first actuator as the wind speed of the cross-flow fan changes, thereby adjusting the gap between the right cover body and the cross-flow fan, thereby changing the layout structure of the flow field in the entire discharge chamber, thereby effectively reducing wind resistance, vibration and noise.

[0030] By adopting the above technical solution, the present invention has the following beneficial effects:

[0031] The present invention provides a metal fluoride trap and an excimer laser. By adding a booster motor and a fan at both ends of the cylinder of the metal fluoride trap, the high-speed rotation of the fan is utilized to achieve a boosting effect, thereby increasing the working gas flow rate of the reflux discharge chamber and enhancing the filtering ability of the metal fluoride trap (MFT) for metal fluorides. At the same time, as the boosting amount is increased, the dust removal ability of the purified working gas on the Brewster window is greatly improved, that is, the dust removal effect is also improved, and the purification effect of the window is greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0033] Figure 1 A schematic diagram of the connection between the metal fluoride trap and the discharge chamber provided in Example 1 of the present invention;

[0034] Figure 2 for Figure 1 A perspective view of the metal fluoride trap;

[0035] Figure 3 for Figure 2 A magnified perspective view of the middle shell;

[0036] Figure 4 This is a schematic diagram of the internal structure of the rear housing in Example 1;

[0037] Figure 5 Schematic diagram of the fan and air guide structure in Example 1;

[0038] Figure 6 for Figure 5 Schematic diagram of the decomposition;

[0039] Figure 7 This is a structural diagram of the layout of the guide vanes in the housing in Example 1;

[0040] Figure 8 A schematic diagram of the connection between the cylinder and the discharge chamber provided in Example 2 of the present invention;

[0041] Figure 9 Schematic diagram of the structure of the gas inlet of the discharge chamber in Example 2 of the present invention;

[0042] Figure 10 A schematic structural diagram of a discharge chamber with adjustable flow channel width provided in Example 3 of the present invention;

[0043] Figure 11 Schematic diagram of the installation structure of the bracket, the first actuator and the second actuator in Example 3;

[0044] Figure 12 for Figure 11 A transverse cross-sectional view of the mounting structure shown;

[0045] Figure 13 Schematic diagram of the structure of the swing cover plate in Example 3 of the present invention;

[0046] Figure 14 for Figure 13 Enlarged view of point A in the middle;

[0047] Figure 15 is a three-dimensional diagram of the protective assembly in Example 4 of the present invention;

[0048] Figure 16 This is a schematic diagram of the structure of the protection component in Example 4 of the present invention.

[0049] Reference numerals:

[0050] 1-working gas; 2-metal fluoride trap; 3-Brewster window; 4-slit; 5-middle cavity; 10-discharge chamber; 11-electrode; 12-insulating seat; 20-flow guide cover; 21-left cover body; 22-right cover body; 22a-base; 22b-swing cover plate; 22c-through hole; 22d-connecting seat; 22e-rib plate; 23-flow guide spring; 24-bracket; 25-dust suction net; 30-crossflow fan; 31-impeller; 31a-air outlet; 31b-return air outlet; 31c-transition part; 33-shaft disc; 36-through hole; 40-first actuator; 50-second actuator; 60-protective assembly; 61-housing; 61a-cable outlet; 61b-cable sealing ring; 62-bellows; 63-thrust piece; 70-fan motor;

[0051] 100-cylinder body; 110-housing; 111-boost chamber; 101-air inlet; 102-air outlet; 103-sealing gasket; 104-bearing; 105-motor mounting hole; 106-bearing mounting hole; 120-motor mounting plate; 130-sealing end plate; 140-guide vane; 150-bearing baffle; 200-boost motor; 210-pressure block; 300-fan. DETAILED DESCRIPTION

[0052] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0053] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0054] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0055] The present invention will be further explained below with reference to specific embodiments.

[0056] Example 1

[0057] like Figure 1 As shown, this embodiment provides a metal fluoride capturer 2 and a connection structure, wherein the metal fluoride capturer 2 is used to purify the working gas 1 in the discharge chamber 10; a Brewster window 3 and a slit 4 are provided on the discharge chamber 10; an intermediate cavity 5 is provided between the Brewster window 3 and the slit 4.

[0058] like Figure 2-7 As shown, the metal fluoride trap 2 includes a cylinder 100 (or metal fluoride trap housing), a fan 300 and a boost motor 200 .

[0059] The gas outlet 102 of the cylinder 100 is connected to the gas inlet of the discharge chamber 10 via an air path. The purified working gas 1 discharged from the gas outlet 102 of the cylinder 100 flows through the intermediate cavity 5, purging the inner surface of the Brewster window 3, forming a dust-proof air curtain inside the Brewster window 3. This prevents the working gas 1 that enters the intermediate cavity 5 from within the discharge chamber 10 through the slit 4 from approaching and contaminating the Brewster window 3. The crossflow blower 30 guides the working gas 1, increasing the flow rate of clean gas flowing through the intermediate cavity 5, strengthening the purge of the clean gas against the Brewster window 3, and effectively preventing particulate matter in the working gas 1 that enters the intermediate cavity 5 from within the discharge chamber 10 through the slit 4 from approaching and contaminating the Brewster window 3.

[0060] An air inlet 101 is provided in the middle of the cylinder body 100 of the metal fluoride trap 2 of this embodiment; different from the existing metal fluoride trap 2 (MFT), a boost chamber 111 is provided at both ends of the cylinder body 100; an air outlet 102 is provided on the side wall of the boost chamber 111; a fan 300 is rotatably provided in the boost chamber 111; the power output shaft of the boost motor 200 is connected to the fan 300, driving the fan 300 to rotate, so as to force the purified working gas to be discharged from the air outlet 102; due to the action of the boost motor 200, the gas discharge speed is accelerated and the pressure is increased, thereby enhancing the scanning and dust removal effect of the Brewster window 3; the boost motor 200 also improves the circulation speed of the working gas between the metal fluoride trap 2 (MFT) and the discharge chamber 10, thereby also improving the filtering capacity of the metal fluoride trap 2 (MFT) for metal fluorides per unit time.

[0061] Preferably, a flow guide structure is provided within the boost chamber 111 and at the edge of the air outlet 102 to guide the working gas to converge and be discharged from the air outlet 102. The flow guide structure is generally bell-shaped, with the boost motor 200 positioned on the wide side of the bell and the air outlet 102 positioned on the narrow side of the bell. In this embodiment, the flow guide structure is formed by two curved guide plates 140. Of course, the flow guide structure can also be a true bell-shaped structure, which is closed on all sides and open at both ends, to achieve a better flow diversion effect.

[0062] In this embodiment, the pressurizing chambers 111 at both ends of the cylinder body 100 are formed by two shells 110 provided at both ends of the cylinder body 100. The two shells 110 are detachably connected to the two ends of the cylinder body 100 by fasteners; Figure 7 As shown, the housing 110 is cylindrical in shape as a whole, and the side wall of the housing 110 is symmetrically provided with a bearing mounting hole 106 and a motor mounting hole 105. The two housings 110 can also be formed integrally with the cylinder body 100.

[0063] The motor mounting hole 105 is detachably provided with a motor mounting plate 120, the boost motor 200 is fixed to the outside of the motor mounting plate 120, and the power output shaft of the boost motor 200 passes through the shaft hole on the motor mounting plate 120 from the outside and extends into the boost chamber 111. Of course, the housing 110 and the motor mounting plate 120 can be integrally formed.

[0064] One end of the fan 300's main shaft is rotatably mounted in a bearing mounting hole 106 via a bearing 104; the other end of the main shaft is connected to the power output shaft of the booster motor 200. A bearing baffle 150 is removably mounted outside the housing 110's bearing mounting hole 106. Of course, the housing 110 and bearing baffle 150 can be integrally formed.

[0065] Specifically, the fan 300 has a socket (not shown) at the other end of the main shaft and along its central axis, into which the power output shaft of the booster motor 200 is inserted. Furthermore, the fan 300 includes a pressure block 210, which has a notch on the side of the other end of the main shaft. The power output shaft has a bayonet at a location corresponding to the notch, and the pressure block 210 engages both the notch and the bayonet to securely connect the power output shaft to the main shaft. After the pressure block 210 engages the notch and the bayonet, it is secured to the main shaft using screws.

[0066] Furthermore, sealing gaskets 103 are provided between the motor mounting plate 120 and the housing 110, and between the bearing baffle 150 and the housing 110, respectively, to prevent air leakage from the boost chamber 111. Furthermore, a sealing end plate 130 is provided at the end of the housing 110 facing away from the cylinder body 100. Of course, the housing 110 and the sealing end plate 130 may also be integrally formed.

[0067] The present application adds a boosting motor 200 and a fan 300 at both ends of the cylinder 100 of the metal fluoride catcher, and utilizes the high-speed rotation of the fan 300 to achieve a boosting effect, thereby increasing the flow rate of the working gas 1 flowing back into the discharge chamber 10 and enhancing the filtering ability of the metal fluoride catcher 2 (MFT) for metal fluorides; at the same time, as the boosting increases, the dust removal ability of the purified working gas 1 on the Brewster window 3 is greatly improved, that is, the dust removal effect is also improved.

[0068] Example 2

[0069] See also Figure 8 and 9 As shown, the present application provides an excimer laser with the above-mentioned metal fluoride trap, which includes: a discharge chamber 10;

[0070] A cross-flow fan 30 is provided in the discharge chamber 10 ; the air outlet 102 of the cylinder 100 is connected to the air inlet of the discharge chamber 10 .

[0071] More preferably, in this embodiment, the discharge chamber 10 has a different air intake structure. The air intake of the discharge chamber 10 is located at the bearing seat of the crossflow blower 30. Specifically, shaft discs 33 are provided at both ends of the crossflow blower 30. The outer ends of the shaft discs 33 are rotatably mounted on the sidewalls of the discharge chamber 10 via connecting shafts and bearings. The connecting shaft on one side extends out of the discharge chamber 10 and connects to the fan motor 70. The working gas 1 circuit outlet, i.e., the air intake of the discharge chamber 10, is located facing the shaft disc 33. The shaft disc 33 is provided with a through hole 36 connecting the inside and outside of the impeller chamber of the crossflow blower 30. The working gas 1 discharged from the circuit outlet enters the impeller chamber of the crossflow blower 30 through the through hole 36 and then flows back into the chamber 10.

[0072] In this embodiment, the working gas flow rate within the discharge chamber 10 is significantly enhanced, thereby improving the metal fluoride filtering capability of the metal fluoride trap (MFT). The circulating dust removal capability of the working gas is significantly enhanced, thereby improving the dust removal effect. Furthermore, the purified working gas 1 is delivered to the shaft disc 33 of the crossflow blower 30, enters the crossflow blower 30 through the through-hole 36 therein, and is then fed into the discharge chamber 10 by the crossflow blower 30. The purified working gas 1 creates a superior dust-proof environment around the bearing structures at both ends of the shaft disc 33, effectively reducing the ingress of particulate matter into the bearing structures.

[0073] Example 3

[0074] like Figure 10 As shown, this embodiment is basically the same as embodiment 2, except that:

[0075] In this embodiment, the discharge chamber 10 is provided with: a flow guide cover 20, a crossflow fan 30 and a first actuator 40; the flow guide cover 20 includes a left cover body 21 on a side away from the crossflow fan 30 and a right cover body 22 on a side close to the crossflow fan 30; the right cover body 22 is movably arranged; the first actuator 40 is used to drive the right cover body 22 to move, thereby changing the gap between the right cover body 22 and the crossflow fan 30.

[0076] More preferably, the top surfaces of the left and right covers 21 and 22 rest against the bottom surface of the insulating base 12 of the discharge chamber's lower electrode 11, and the right cover 22 is movable along the bottom surface of the insulating base 12. Dynamic seals are provided between the ends of the right cover 22 and the inner wall of the chamber 10, and between the left and right covers 21 and 22. This maintains the integrity of the outer contour of the entire shroud 20 during movement of the right cover 22, thereby achieving smooth and unimpeded flow guidance for the working gas.

[0077] In this embodiment, there are two first actuators 40, and the end face of each first actuator 40 is fixed on the discharge chamber 10. Of course, there can also be one or more first actuators. One end of the telescopic portion of the first actuator 40 is connected to the right cover body 22, which is used to drive the right cover body 22 to move along the bottom surface of the insulating seat 12.

[0078] Generally, the flow guide hood 20 is disposed within the discharge chamber 10. The flow guide hood 20 is cylindrical in shape and is disposed parallel to the crossflow blower 30. The left cover 21 and the right cover 22 together form a cylindrical body. Alternatively, the upper surfaces of the left cover 21 and the right cover 22 may be respectively abutted against the bottom surface of the insulating seat 12 of the lower electrode 11 (the left cover 21, the insulating seat 12, and the right cover 22 together form a relatively closed cylindrical cavity). The left cover 21 and the right cover 22 are tightly connected to each other at one side edge near the flow channel 13, with a smooth transition to facilitate the smooth flow of the working gas. The first actuator 40 is disposed within the flow guide hood 20.

[0079] In the present application, the right cover body 22 is movably arranged. As the wind speed of the crossflow blower 30 changes, the first actuator 40 is used to drive the right cover body 22 to move, thereby adjusting the gap between the right cover body 22 and the crossflow blower 30, thereby changing the layout structure of the flow field in the entire discharge chamber 10, thereby effectively reducing wind resistance, vibration and noise.

[0080] More preferably, referring to Figure 10-12 As shown, the impeller 31 of the crossflow fan 30 includes an air outlet 31a and a return air outlet 31b (or an air inlet); the interior of the discharge chamber includes a gas flow channel 13 surrounding the air guide cover 20 and connecting the air outlet 31a and the return air outlet 31b of the crossflow fan 30 at both ends; a transition portion 31c is provided on the impeller 31 of the crossflow fan 30 between the air outlet 31a and the return air outlet 31b and on the side close to the air guide cover 20.

[0081] The right cover body 22 comprises a base 22a and a pivoting cover plate 22b. The pivoting cover plate 22b is positioned opposite the transition portion 31c. One side of the pivoting cover plate 22b is pivotally hingedly connected to the base 22a, allowing adjustment of the gap and angle between the pivoting cover plate 22b and the transition portion 31c. Preferably, the base 22a is a substrate positioned against the bottom surface of the insulator. The right cover body 22 also includes a second actuator 50 for driving the pivoting cover plate 22b to pivot. One end of the second actuator 50 is pivotally connected to the base 22a, and the other end is hingedly connected to the pivoting cover plate 22b.

[0082] Among them, the cross-flow fan 30 generally includes an impeller 31 arranged in the electric chamber and a motor arranged outside the electric chamber; the impeller structure is the same in its circumferential direction, the above-mentioned transition portion 31c is also called the vortex tongue portion, and the air outlet 31a, the return air outlet 31b and the transition portion 31c are a name for different functional areas in the circumferential direction of the impeller 31 when it is working.

[0083] Of course, the swing cover plate 22b can also be arranged at other positions of the air deflector 20, for example, above, below, on the left side of the air deflector 20, to adjust the gas flow path by changing the outer contour of the air deflector 20.

[0084] A bracket 24 is mounted on the base 22a. The main body of the second actuator 50 is pivotally connected to the bracket 24. The telescopic portion of the second actuator 50 is hingedly connected to the swing cover plate 22b. One end of the telescopic portion of the first actuator 40 is hingedly connected to the bracket 24. The first actuator 40 drives the entire right cover 22 through the bracket 24.

[0085] Preferably, a dynamic sealing structure is provided between the swing cover plate 22b and the base body 22a.

[0086] Furthermore, a dynamic sealing structure is provided between the swing cover plate 22b and the left cover body 21. In this embodiment, the sealing structure is a guide spring 23 made of elastic material, which is arranged between the left cover body 21 and the swing cover plate 22b and is used to maintain the seal between the swing cover plate 22b and the left cover body 21 during the swinging process of the swing cover plate 22b. Figure 12 Only the deflector springs 23 on the lower side of the swing cover plate 22 are shown. In other embodiments, the upper side of the swing cover plate 22 is also provided with other forms of sealing structures such as deflector springs or sealing strips, thereby achieving sealing between the upper side of the swing cover plate 22 and the left cover body 21.

[0087] In the cross section of the right cover body 22, the left cover body 21, the base 22a, the swing cover plate 22b and the guide spring 23 enclose a ring or cylindrical body; the two ends of the guide spring 23 are respectively sealed with the swing cover plate 22b and the left cover body 21. During the swinging process of the swing cover plate 22b, the guide spring 23 is deformed, thereby avoiding the formation of a gap between the two and preventing the working gas from flowing into the right cover body 22 through the gap.

[0088] More preferably, the outer side surface of the swing cover plate 22b is in an arc shape.

[0089] The swing cover plate 22b is arranged in the inner area of ​​the flow field of the crossflow fan 30 (i.e., the flow channel 13 inside the discharge chamber) (i.e., the area corresponding to the transition portion 31c of the crossflow fan 30 mentioned above). The structural shape of the swing cover plate 22b and the parameters such as the gap between the swing cover plate 22b and the crossflow fan 30 have the greatest impact on the flow of the circulating air. At the same time, due to its close proximity to the crossflow fan 30, it is strongly impacted by the airflow. The structure between the swing cover plate 22b and the transition portion 31c of the crossflow fan 30 becomes the main source of noise and vibration. The curved shape of the swing cover plate 22b can make the airflow smoother, greatly reducing the generation of noise and vibration.

[0090] Reference Figure 12-14 As shown, the swing cover plate 22b is provided with through holes 22c, and a dust collection net 25 is placed on the inner side of the swing cover plate 22b. The swing cover plate 22b is provided with a connecting seat 22d for pivoting with the second actuator 50, and a plurality of ribs 22e are spaced apart along its length. Preferably, the dust collection net 25 includes a first dust collection net 25 positioned closely against the inner side of the swing cover plate 22b, and a second dust collection net 25 positioned outside the first dust collection net 25. The aperture of the first dust collection net 25 is 300-500 mesh, while the aperture of the second dust collection net 25 is 80-120 mesh. More preferably, the aperture of the first dust collection net 25 is 400 mesh, while the aperture of the second dust collection net 25 is 100 mesh. The apertures of the through holes 22c vary in size, and the multiple through holes 22c are irregularly arranged on the surface of the swing cover plate 22b. The diameter of the through hole 22c is 0.5mm-4mm. The through hole 22c ratio of the swing cover plate 22b is 60-70%.

[0091] The present invention provides a discharge chamber with adjustable flow channel width. By setting an adjustable flow channel structure, the gap between the right cover body 22 and the cross-flow blower 30, as well as the outer contour of part of the right cover body 22 itself, can be changed to adapt to the change of the working gas flow rate, thereby achieving a good effect of noise reduction and vibration reduction.

[0092] Example 4

[0093] This embodiment is basically the same as embodiment 3, except that:

[0094] In this embodiment, the first actuator 40 and the second actuator 50 are ceramic piezoelectric actuators. Figure 12 、 15 As shown in Figure 16 , the ceramic piezoelectric actuator is provided with a protective assembly 60 to protect it from corrosion by the working gas. The protective assembly 60 comprises a housing 61, a bellows 62, and a pusher 63. The housing 61 houses the main body of the ceramic piezoelectric actuator and is provided with a through hole for the extension of the actuator's telescopic portion. One end of the bellows 62 is sealedly connected to the through hole, while the other end of the bellows 62 is sealedly connected to the end plate of the pusher 63. The telescopic portion extends from the through hole, into the bellows 62, and is connected to the pusher 63. The first actuator 40 is connected to the right cover 22 via the pusher 63, driving the right cover 22 to move. The second actuator 50 is connected to the swing cover plate 22b via the pusher 63, driving the swing cover plate 22b to swing. A cable outlet 61a is provided at the bottom of the housing 61, with a cable sealing ring at the edge of the cable outlet 61a.

[0095] Of course, the first actuator 40 and the second actuator 50 may also adopt other forms of pushers, as well as pneumatic, electric or hydraulic telescopic mechanisms.

[0096] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An excimer laser with a metal fluoride trap, characterized in that: The metal fluoride trap comprises: a cylinder (100), a fan (300) and a boost motor (200); An air inlet (101) is provided in the middle of the cylinder (100); and pressurized chambers (111) are provided at both ends of the cylinder (100). An air outlet (102) is provided on the side wall of the boost chamber (111); The fan (300) is rotatably disposed in the boost chamber (111); The power output shaft of the boost motor (200) is connected to the fan (300), driving the fan (300) to rotate, forcing the purified working gas (1) to be discharged from the gas outlet (102); The excimer laser further includes: a discharge cavity (10); A cross-flow fan (30) is provided in the discharge chamber (10); The gas outlet (102) of the cylinder (100) is connected to the gas inlet of the discharge chamber (10) through a gas path, and the working gas (1) discharged from the gas outlet (102) of the cylinder (100) flows through the inner surface of the Brewster window (3); A shaft disc (33) is provided at both ends of the cross-flow fan (30); the outer end of the shaft disc (33) is rotatably provided on the side wall of the discharge chamber (10) through a connecting shaft and a bearing; the connecting shaft on one side extends out of the discharge chamber (10) and is connected to the fan motor 70; the loop outlet end of the working gas (1), i.e., the air inlet of the discharge chamber (10), is provided facing the shaft disc (33); the shaft disc (33) is provided with a through hole (36) communicating with the inside and outside of the impeller chamber of the cross-flow fan (30); the working gas (1) discharged from the loop outlet end enters the impeller chamber of the cross-flow fan (30) through the through hole (36) and then flows back into the cavity of the discharge chamber (10).

2. The excimer laser according to claim 1, wherein A guide structure is provided in the boosting chamber (111) at a position close to the gas outlet (102), for guiding the working gas (1) to be collected, boosted, and discharged from the gas outlet (102).

3. The excimer laser according to claim 2, wherein The flow guide structure is in the shape of a bell mouth as a whole, the boost motor (200) is arranged on the wide side of the bell mouth, and the air outlet (102) is arranged on the narrow side of the bell mouth.

4. The excimer laser according to claim 3, wherein The guide structure is formed by enclosing two arc-shaped guide plates (140).

5. The excimer laser according to claim 1, wherein It also includes a housing (110) for forming the pressurizing chamber (111), wherein the housing (110) is detachably connected to the end of the cylinder body (100); The housing (110) is cylindrical in shape as a whole, and a bearing mounting hole (106) and a motor mounting hole (105) are symmetrically provided on the side wall of the housing (110); A motor mounting plate (120) is detachably provided on the motor mounting hole (105), the boost motor (200) is fixed on the outside of the motor mounting plate (120), and the power output shaft of the boost motor (200) passes through the shaft hole on the motor mounting plate (120) from the outside and extends into the boost chamber (111); One end of the main shaft of the fan (300) is rotatably mounted on the bearing mounting hole (106) via a bearing (104); the other end of the main shaft is connected to the power output shaft of the boost motor (200).

6. The excimer laser according to claim 5, characterized in that The other end of the main shaft and the central axis of the main shaft are provided with a plug hole, and the power output shaft is inserted into the plug hole; Also included is a pressing block (210), wherein a notch is provided on the side surface of the other end of the main shaft; The power output shaft is provided with a bayonet at a position corresponding to the notch, and the pressing block (210) is simultaneously engaged with the notch and the bayonet to fix the power output shaft and the main shaft in connection.

7. The excimer laser according to claim 5, wherein A sealing gasket (103) is provided between the motor mounting plate (120), the bearing seat plate (150) and the housing (110) to prevent air leakage from the boost chamber (111).

8. The excimer laser according to claim 5, wherein The housing (110) is provided with a sealing end plate (130) at one end facing away from the cylinder body (100).

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