Device for improving etching resistance of photoresist and method of using the same

Abstract

The present invention discloses a device for improving the etching resistance of photoresist and a method for using the device, including a main body, a fixture alarm, a fixture installed on the top of the main body, a cleaning box installed on the inner wall of the fixture, a waterproof shell installed on the inner bottom wall of the cleaning box, a motor fixedly installed on the outer wall of the telescopic tube, a driving gear installed on the output end of the motor, and the driving gear meshes with the gear groove, and a plurality of cleaning nozzles are installed at the bottom of the cleaning disk. The present invention can realize the cleaning function by installing a cleaning box, placing the parts to be etched on the conveyor belt, and continuing to move forward after chemical etching, the first electric telescopic rod drives the limit rod to move downward, so that the limit rod drives the ring and the cleaning disk to move downward, and then the cleaning disk drives the telescopic tube to extend, so that the cleaning disk covers the parts, the first water pump pumps out the water in the cleaning tank, and the parts are cleaned by the cleaning nozzle to realize the cleaning function.

Description

Technical Field

[0001] The invention relates to the technical field of etching, in particular to a device for improving the etching resistance of photoresist and a use method thereof. Background Art

[0002] Etching machines can be divided into two categories: chemical etcher and electrolytic etcher. In chemical etching, chemical solutions are used to achieve the purpose of etching through chemical reactions. Chemical etcher is a technology that removes materials by chemical reactions or physical impacts. Etching machines are mainly used in aviation, machinery, and signage industries. Etching machine technology is widely used to reduce weight (Weight Reduction) instrument panels, nameplates, and thin workpieces that are difficult to process by traditional processing methods. Etching is an indispensable technology in semiconductor and circuit board manufacturing processes. It can also etch patterns, patterns, and geometric shapes on the surfaces of various metals such as iron, copper, aluminum, titanium, stainless steel, zinc plates, and other metals and metal products, and can accurately hollow them out. It can also professionally etch and cut thin plates for various types of domestic and imported stainless steel. It is now widely used in gold card sign processing, mobile phone button processing, stainless steel filter processing, stainless steel elevator decorative plate processing, metal lead frame processing, metal glasses temple processing, circuit board processing, decorative metal plate processing and other industrial purposes.

[0003] The defects of existing etching machines are:

[0004] 1. Patent document CN113675114A discloses an etching device, and the protected claim "the etching device comprises an etcher and a cooling system; the cooling system comprises an evaporator, an exhaust mechanism, a condenser and a control unit; the evaporator has an evaporation chamber, the evaporation chamber is filled with a refrigerant, and is connected with an outlet and an inlet; the etcher is connected with a cooling pipeline, the cooling pipeline is circulated with an etching liquid, and is adjacent to the evaporation chamber; the evaporator is used to cool the etching liquid by heat exchange between the refrigerant and the etching liquid, and the refrigerant evaporates from a liquid state to a gas state after absorbing heat; the exhaust mechanism is connected to the outlet of the evaporation chamber to transport the gaseous refrigerant to the condenser; the condenser is respectively connected to the exhaust mechanism and the inlet of the evaporation chamber to condense the gaseous refrigerant into a liquid state, and then transport the liquid refrigerant to the evaporation chamber for circulation; the control unit is respectively connected to and controls the evaporator, the exhaust mechanism and the condenser", and the components need to be cleaned after etching, but if the sides or edges of the components are not cleaned carefully enough, residues are likely to be left;

[0005] 2. Patent document CN108461420A discloses an etching device, and the protected claim "includes a sealing cover, a supporting plate and a plurality of exhaust structures, the supporting plate is located in the sealing cover, and the plurality of exhaust structures are arranged around the supporting plate, each exhaust structure includes an exhaust pipe and an air pump, the exhaust pipe includes an air inlet and an air outlet, the air inlet is connected to the sealing cover, the air outlet is connected to the air pump, and a plurality of air inlet holes are arranged on the pipe wall of the exhaust pipe, the air flow direction of the air inlet holes is perpendicular to the pipe wall of the exhaust pipe, and the air flow direction generated by the air pump is parallel to the pipe wall of the exhaust pipe. The wall of the exhaust pipe of the etching device proposed in the present invention is provided with a plurality of air inlet holes, and the air flow in the air inlet holes will deviate from the pipe wall of the exhaust pipe and head toward the air outlet under the action of the air flow generated by the air pump, so that the particles generated in the etching process are not easily deposited on the pipe wall of the exhaust pipe, the etching environment is optimized, the yield of the etching process is improved, and the maintenance cycle of the equipment is extended". When the existing device is used, it is necessary to use another device for drying, which increases the complexity of the process and is not convenient enough;

[0006] 3. Patent document CN107507793A discloses an etching device, and the protected item "includes an etching chamber, and a rotatable carrying platform for accommodating the etching chamber, an upper electrode plate parallel to the surface of the carrying platform, a lower electrode plate and two shielding plates; the lower electrode plate is arranged on the carrying platform, the upper electrode plate is arranged on the top of the etching chamber, two shielding plates are arranged between the upper electrode plate and the lower electrode plate, and the shielding plates move relative to the carrying platform, the two shielding plates are symmetrically arranged about the axis of the carrying platform, the orthographic projection of each shielding plate on the surface of the carrying platform extends from the axis of the carrying platform along the radius of the rotation trajectory of the carrying platform, the length of the orthographic projection of the shielding plate is equal to the length of the radius, the substrate includes a central area and an edge area from the axis to the outside, and the central area and the edge area of ​​the substrate are etched to the same depth by changing the width of the shielding plate perpendicular to the radial direction or / and the rotational angular velocity of the rotating carrying platform". Most of the existing devices cannot detect the liquid content, which is not convenient enough;

[0007] 4. Patent document CN110349828A discloses dry etching equipment, and the protected claim "the dry etching equipment includes an etching chamber, a first electrode and a second electrode. When the substrate is dry-etched, the first electrode and the second electrode are arranged opposite to each other and located in the etching chamber, the first electrode is provided with a protruding pattern, the substrate is placed on a supporting surface of the protruding pattern, an etching unit is used to input etching gas into the etching chamber, and under the control of the electric field formed by the first electrode and the second electrode, the film layer of the substrate is etched, and an anti-static component is used to pre-treat the first electrode to alleviate the accumulation of static electricity on the substrate; based on the anti-static component, the dry etching equipment provided by the present invention alleviates the accumulation of static electricity on the substrate when etching the film layer, avoids damage to the display panel caused by static electricity release, alleviates the technical problem of static electricity release damaging the display panel in the existing dry etching equipment, and improves the manufacturing yield of the display panel", most of the existing devices cannot warn the staff, which is not convenient enough. Summary of the invention

[0008] The object of the present invention is to provide a device for improving the etching resistance of photoresist and a method of using the same, so as to solve the problems raised in the above-mentioned background technology.

[0009] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a device for improving the etching resistance of photoresist, comprising a main body, a fixture alarm, a fixture installed on the top of the main body, a cleaning box installed on the inner wall of the fixture, a waterproof shell installed on the inner bottom wall of the cleaning box, a first water pump installed on the inner bottom wall of the waterproof shell, a telescopic tube installed on the output end of the first water pump, a first electric telescopic rod installed on the inner top wall of the main body, a bearing installed on the bottom of the telescopic tube, a cleaning disc installed on the bottom of the bearing, a ring installed on the top of the cleaning disc, a limiting groove is provided on the top of the ring, a limiting rod is installed through the inner wall of the limiting groove, and the top of the limiting rod is connected to the bottom of the first electric telescopic rod, a gear groove is provided on the top of the cleaning disc, a motor is fixedly installed on the outer wall of the telescopic tube, a driving gear is installed on the output end of the motor, and the driving gear is meshed with the gear groove, and a plurality of cleaning nozzles are installed on the bottom of the cleaning disc;

[0010] An alarm is installed on the outer wall of the main body.

[0011] Preferably, a cover plate is installed on the top of the main body, a handle is installed on the top of the cover plate, a display screen is installed on the outer wall of the main body, a plurality of control buttons are installed on the outer wall of the main body, a motor is installed on the outer wall of the main body, a plurality of transmission rods are installed on the inner wall of the main body, a conveyor belt is installed around the outer wall of the transmission rod, and one end of the transmission rod is connected to the output end of the motor, a storage cavity is installed on the inner wall of the fixture, a heating cavity is installed on the inner wall of the fixture, a No. 1 detector is installed on the inner bottom wall of the main body, a No. 2 detector is installed on the inner top wall of the cleaning box, and a partition plate is installed on the inner bottom wall of the main body.

[0012] Preferably, a fixed shell is installed on the inner bottom wall of the storage chamber, a second water pump is installed on the inner bottom wall of the fixed shell, a retractable connecting pipe is installed on the output end of the second water pump, a fixed plate is installed on the bottom of the connecting pipe, a plurality of etching nozzles are installed on the bottom of the fixed plate, a second electric telescopic rod is installed on the inner top wall of the main body, and the bottom of the second electric telescopic rod is connected to the top of the fixed plate.

[0013] Preferably, a plurality of metal rods are installed on the inner wall of the heating chamber, electric heating wires are installed around the outer walls of the metal rods, a fan is installed on the outer wall of the fixer, a heating tube is installed through the bottom of the heating chamber, a control valve is installed on the outer wall of the heating tube, a drying plate is installed on the bottom of the heating tube, a support plate is installed on the outer wall of the drying plate, a sealing groove is installed on the inner wall of the control valve, a fixing frame is installed on the outer wall of the control valve, a third electric telescopic rod is installed on the inner wall of the fixing frame, and a sealing plate is installed on one end of the third electric telescopic rod.

[0014] Preferably, the input end of the first water pump extends out of the outer wall of the waterproof shell, the control button is located on one side of the display screen, the input end of the second water pump extends out of the outer wall of the fixed shell, and one end of the sealing plate extends into the interior of the control valve.

[0015] Preferably, a battery is installed on the inner top wall of the No. 2 detector, a signal transmitter is installed through the bottom of the No. 2 detector, a signal receiver is installed through the bottom of the No. 2 detector, a sliding rod is installed on the bottom of the No. 2 detector, a floating block is installed on the outer wall of the sliding rod, and a reflecting plate is installed on the top of the floating block.

[0016] Preferably, a lifting rod is installed through the top of the detector No. 1, a floating plate is installed on the top of the lifting rod, a first spring is installed around the outer wall of the lifting rod, a conductive block is installed on the outer wall of the lifting rod, an L-shaped conductive rod is installed on the inner top wall of the detector No. 1, a partition plate is installed on the inner bottom wall of the main body, a protective shell is installed on the outer wall of the partition plate, a third water pump is installed on the inner bottom wall of the protective shell, and a control switch is installed on the outer wall of the third water pump.

[0017] Preferably, a warning light is installed on the inner wall of the alarm device, and a buzzer is installed on the inner wall of the alarm device.

[0018] Preferably, the working steps of the etching device are as follows:

[0019] S1. Put the component to be etched on the conveyor belt, the motor drives the transmission rod to rotate, the transmission rod drives the conveyor belt to rotate, so that the component moves forward, and then after chemical etching, it continues to move forward, the first electric telescopic rod drives the limit rod to move downward, so that the limit rod drives the ring and the cleaning disk to move downward, and then the cleaning disk drives the telescopic tube to extend, so that the cleaning disk covers the component, the first water pump pumps out the water in the cleaning tank, and the component is cleaned through the cleaning nozzle to achieve the cleaning function;

[0020] S2. After cleaning, the fan works to pump the external air into the heating chamber. The electric heating wire and the metal rod heat the air. Then the control valve is opened to allow the hot air to be sprayed toward the components through the heating tube and the drying plate to dry the components, thus achieving the drying function.

[0021] S3. When detecting the water volume inside the cleaning box, the signal transmitter transmits a signal, the signal receiver receives the signal, the float rises and falls with the liquid level, driving the reflector to rise and fall, the reflector reflects the signal, and the amount of water can be judged according to the length of the signal reflection time, thus realizing the detection function;

[0022] S4. When giving a warning, the warning light and buzzer will work to alert the surrounding staff.

[0023] Preferably, the step S1 further includes the following steps:

[0024] S11. When etching is performed, the second electric telescopic rod drives the fixed plate to move downward, the etching nozzle is located above the component, and the second water pump draws the etching solution from the storage chamber and sprays it onto the surface of the component to achieve the etching function;

[0025] The S2 also includes the following steps:

[0026] S21, the third electric telescopic rod is shortened to drive the sealing plate to move, and the sealing plate is separated from the sealing groove, thereby opening the control valve to facilitate air circulation;

[0027] The S3 also includes the following steps:

[0028] S31. When detecting the waste liquid content, the float plate floats with the liquid surface. When the waste liquid is large, the float plate drives the lifting rod to rise, and the first spring contracts, so that the conductive block contacts the conductive rod, and the third water pump is controlled to start working to pump out the waste liquid to realize the detection function.

[0029] Compared with the prior art, the present invention has the following beneficial effects:

[0030] 1. The present invention can realize the cleaning function by installing a cleaning box. The parts to be etched are placed on the conveyor belt. The motor drives the transmission rod to rotate, and the transmission rod drives the conveyor belt to rotate, so that the parts move forward. Then, after chemical etching, they continue to move forward. The first electric telescopic rod drives the limit rod to move downward, so that the limit rod drives the ring and the cleaning disc to move downward. Then, the cleaning disc drives the telescopic tube to extend, so that the cleaning disc covers the parts. The first water pump pumps out the water in the cleaning tank, and the parts are cleaned by the cleaning nozzle, so as to realize the cleaning function.

[0031] 2. The present invention can realize the drying function by installing a heating chamber. After the cleaning is completed, the fan works to pump the external air into the heating chamber, and the electric heating wire and the metal rod heat the air. Then the control valve is opened to allow the hot air to be sprayed toward the components through the heating pipe and the drying plate to dry the components, thereby realizing the drying function;

[0032] 3. The present invention can realize the detection function by installing a No. 1 detector and a No. 2 detector. When detecting the water volume inside the cleaning box, the signal transmitter transmits a signal, the signal receiver receives the signal, the floating block rises and falls with the liquid level, driving the reflector to rise and fall, and the reflector reflects the signal. The amount of water can be judged according to the length of the signal reflection time, thereby realizing the detection function;

[0033] 4. The present invention can realize the warning function by installing a warning device. When the warning is given, the warning light and the buzzer work to warn the surrounding staff. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0035] Figure 2 It is a side view structural schematic diagram of the present invention;

[0036] Figure 3 It is a schematic diagram of the structure of the cleaning disk of the present invention;

[0037] Figure 4 It is a schematic diagram of the side structure of the cleaning disk of the present invention;

[0038] Figure 5 It is a schematic diagram of the structure of the No. 2 detector column of the present invention;

[0039] Figure 6 It is a schematic diagram of the control valve structure of the present invention;

[0040] Figure 7 It is a schematic diagram of the structure of detector No. 1 of the present invention;

[0041] Figure 8 It is a schematic diagram of the structure of the alarm device of the present invention.

[0042] In the figure: 1, main body; 2, cover plate; 3, handle; 4, display screen; 5, control button; 6, motor; 7, transmission rod; 8, conveyor belt; 9, holder; 10, storage chamber; 11, fixed shell; 12, second water pump; 13, connecting pipe; 14, second electric telescopic rod; 15, fixed plate; 16, etching nozzle; 17, cleaning box; 18, waterproof shell; 19, first water pump; 20, first electric telescopic rod; 21, cleaning plate; 22, ring; 23, limit groove; 24, limit rod; 25, gear groove; 26, bearing; 27, telescopic tube; 28, motor; 29, driving gear; 30, cleaning nozzle; 31, heating chamber; 3 2. Fan; 33. Metal rod; 34. Heating wire; 35. Heating tube; 36. Control valve; 37. Drying plate; 38. Support plate; 39. Sealing groove; 40. Fixed frame; 41. Third electric telescopic rod; 42. Sealing plate; 43. No. 2 detector; 44. Battery; 45. Signal transmitter; 46. Signal receiver; 47. Sliding rod; 48. Floating block; 49. Reflecting plate; 50. No. 1 detector; 51. Lifting rod; 52. Floating plate; 53. First spring; 54. Conductive block; 55. Conductive rod; 56. Warning device; 57. Warning light; 58. Buzzer; 59. Partition plate; 60. Protective shell; 61. Third water pump. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0044] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0045] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] See also Figure 1 , Figure 2 , Figure 3 and Figure 4An embodiment of the present invention provides: a device for improving the etching resistance of photoresist, comprising a main body 1, a holder 9 and an alarm 56, the top of the main body 1 is equipped with a holder 9, the inner wall of the holder 9 is equipped with a cleaning box 17, the inner bottom wall of the cleaning box 17 is equipped with a waterproof shell 18, the inner bottom wall of the waterproof shell 18 is equipped with a first water pump 19, the output end of the first water pump 19 is equipped with a telescopic tube 27, the inner top wall of the main body 1 is equipped with a first electric telescopic rod 20, the bottom of the telescopic tube 27 is equipped with a bearing 26, the bottom of the bearing 26 is equipped with a cleaning disc 21, the top of the cleaning disc 21 A ring 22 is installed at the top of the ring 22, a limiting groove 23 is provided on the inner wall of the limiting groove 23, and a limiting rod 24 is installed through the inner wall of the limiting groove 23, and the top of the limiting rod 24 is connected to the bottom of the first electric telescopic rod 20, a gear groove 25 is provided on the top of the cleaning disc 21, a motor 28 is fixedly installed on the outer wall of the telescopic tube 27, a driving gear 29 is installed on the output end of the motor 28, and the driving gear 29 is meshed with the gear groove 25, a plurality of cleaning nozzles 30 are installed at the bottom of the cleaning disc 21, a warning device 56 is installed on the outer wall of the main body 1, and the input end of the first water pump 19 extends out of the outer wall of the waterproof shell 18, The control button 5 is located on one side of the display screen 4, the input end of the second water pump 12 extends out of the outer wall of the fixed shell 11, one end of the sealing plate 42 extends into the interior of the control valve 36, the top of the main body 1 is installed with a cover plate 2, the top of the cover plate 2 is installed with a handle 3, the outer wall of the main body 1 is installed with a display screen 4, the outer wall of the main body 1 is installed with a plurality of control buttons 5, the outer wall of the main body 1 is installed with a motor 6, the inner wall of the main body 1 is installed with a plurality of transmission rods 7, the outer wall of the transmission rod 7 is surrounded by a conveyor belt 8, and one end of the transmission rod 7 is connected to the output end of the motor 6, the inner wall of the holder 9 is installed with a storage cavity 10, and the inner wall of the holder 9 is installed with A heating chamber 31, a detector No. 1 50 is installed on the inner bottom wall of the main body 1, a detector No. 2 43 is installed on the inner top wall of the cleaning box 17, a partition plate 59 is installed on the inner bottom wall of the main body 1, a fixed shell 11 is installed on the inner bottom wall of the storage chamber 10, a second water pump 12 is installed on the inner bottom wall of the fixed shell 11, a retractable connecting pipe 13 is installed on the output end of the second water pump 12, a fixed plate 15 is installed on the bottom of the connecting pipe 13, a plurality of etching nozzles 16 are installed on the bottom of the fixed plate 15, a second electric telescopic rod 14 is installed on the inner top wall of the main body 1, and the bottom of the second electric telescopic rod 14 is connected to the top of the fixed plate 15.

[0047] See also Figure 2 and Figure 6A plurality of metal rods 33 are installed on the inner wall of the heating chamber 31, and an electric heating wire 34 is installed around the outer wall of the metal rod 33. A fan 32 is installed on the outer wall of the fixture 9. A heating tube 35 is installed through the bottom of the heating chamber 31, and a control valve 36 is installed on the outer wall of the heating tube 35. A drying plate 37 is installed at the bottom of the heating tube 35, and a support plate 38 is installed on the outer wall of the drying plate 37. A sealing groove 39 is installed on the inner wall of the control valve 36, and a fixing frame 40 is installed on the outer wall of the control valve 36. A third electric telescopic rod 41 is installed on the inner wall of the fixing frame 40, and a sealing plate 42 is installed on one end of the third electric telescopic rod 41.

[0048] See also Figure 5 and Figure 7 A battery 44 is installed on the inner top wall of the No. 2 detector 43, a signal transmitter 45 is installed through the bottom of the No. 2 detector 43, a signal receiver 46 is installed through the bottom of the No. 2 detector 43, a slide bar 47 is installed on the bottom of the No. 2 detector 43, a floating block 48 is installed on the outer wall of the slide bar 47, and a reflecting plate 49 is installed on the top of the floating block 48. A lifting rod 51 is installed through the top of the No. 1 detector 50, a floating plate 52 is installed on the top of the lifting rod 51, a first spring 53 is installed around the outer wall of the lifting rod 51, a conductive block 54 is installed on the outer wall of the lifting rod 51, an L-shaped conductive rod 55 is installed on the inner top wall of the No. 1 detector 50, a partition plate 59 is installed on the inner bottom wall of the main body 1, a protective shell 60 is installed on the outer wall of the partition plate 59, a third water pump 61 is installed on the inner bottom wall of the protective shell 60, and a control switch is installed on the outer wall of the third water pump 61.

[0049] See also Figure 8 A warning light 57 is installed on the inner wall of the warning device 56 , and a buzzer 58 is installed on the inner wall of the warning device 56 .

[0050] The working steps of the etching equipment are as follows:

[0051] S1. Put the component to be etched on the conveyor belt 8, the motor 6 drives the transmission rod 7 to rotate, and the transmission rod 7 drives the conveyor belt 8 to rotate, so that the component moves forward, and then after chemical etching, it continues to move forward, the first electric telescopic rod 20 drives the limit rod 24 to move downward, so that the limit rod 24 drives the ring 22 and the cleaning disc 21 to move downward, and then the cleaning disc 21 drives the telescopic tube 27 to extend, so that the cleaning disc 21 covers the component, and the first water pump 19 pumps out the water in the cleaning tank 17, and cleans the component through the cleaning nozzle 30 to achieve the cleaning function;

[0052] S2. After cleaning, the fan 32 works to pump external air into the heating chamber 31. The electric heating wire 34 and the metal rod 33 heat the air. Then the control valve 36 is opened to allow the hot air to be sprayed toward the components through the heating tube 35 and the drying plate 37 to dry the components, thus achieving the drying function.

[0053] S3. When detecting the amount of water inside the cleaning box 17, the signal transmitter 45 transmits a signal, the signal receiver 46 receives the signal, the float 48 rises and falls with the liquid level, driving the reflector 49 to rise and fall, and the reflector 49 reflects the signal. The amount of water can be determined according to the length of the signal reflection time, thereby realizing the detection function;

[0054] S4: When giving a warning, the warning light 57 and the buzzer 58 work to warn the surrounding staff.

[0055] The step S1 also includes the following steps:

[0056] S11, when etching is performed, the second electric telescopic rod 14 drives the fixed plate 15 to move downward, the etching nozzle 16 is located above the component, and the second water pump 12 draws the etching solution from the storage chamber 10 and sprays it onto the surface of the component to achieve the etching function;

[0057] The S2 also includes the following steps:

[0058] S21, the third electric telescopic rod 41 is shortened to drive the sealing plate 42 to move, and the sealing plate 42 is separated from the sealing groove 39, so that the control valve 36 is opened to facilitate air circulation;

[0059] The S3 also includes the following steps:

[0060] S31. When detecting the waste liquid content, the float plate 52 floats with the liquid surface. When the waste liquid is large, the float plate 52 drives the lifting rod 51 to rise, and the first spring 53 contracts, so that the conductive block 54 contacts the conductive rod 55, and the third water pump 61 is controlled to start working to pump out the waste liquid to realize the detection function.

[0061] Working principle: put the component to be etched on the conveyor belt 8, the motor 6 drives the transmission rod 7 to rotate, and the transmission rod 7 drives the conveyor belt 8 to rotate, so that the component moves forward, and then after chemical etching, it continues to move forward, the first electric telescopic rod 20 drives the limit rod 24 to move downward, so that the limit rod 24 drives the ring 22 and the cleaning disc 21 to move downward, and then the cleaning disc 21 drives the telescopic tube 27 to extend, so that the cleaning disc 21 covers the component, and the first water pump 19 pumps out the water in the cleaning tank 17, and cleans the component through the cleaning nozzle 30 to realize the cleaning function. When etching, the second electric telescopic rod 14 drives the fixed plate 15 to move downward, and the etching nozzle 16 is located above the component. The second water pump 12 pumps the etching solution out of the storage chamber 10 and sprays it on the surface of the component to realize the etching function;

[0062] After cleaning, the fan 32 works to pump external air into the heating chamber 31, and the electric heating wire 34 and the metal rod 33 heat the air. Then, the control valve 36 is opened, so that the hot air is sprayed toward the components through the heating tube 35 and the drying plate 37 to dry the components, thus realizing the drying function. The third electric telescopic rod 41 is shortened to drive the sealing plate 42 to move, and the sealing plate 42 is separated from the sealing groove 39, thereby opening the control valve 36 to facilitate air circulation.

[0063] When detecting the amount of water inside the cleaning box 17, the signal transmitter 45 transmits a signal, the signal receiver 46 receives the signal, the floating block 48 rises and falls with the liquid level, driving the reflecting plate 49 to rise and fall, and the reflecting plate 49 reflects the signal. The amount of water can be judged according to the length of the signal reflection time, thereby realizing the detection function. When detecting the content of waste liquid, the floating plate 52 floats with the liquid level. When the waste liquid is relatively large, the floating plate 52 drives the lifting rod 51 to rise, and the first spring 53 contracts, so that the conductive block 54 contacts the conductive rod 55, and the third water pump 61 is controlled to start working to pump out the waste liquid, thereby realizing the detection function.

[0064] When the warning is given, the warning light 57 and the buzzer 58 work to warn the surrounding staff.

[0065] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A device for improving the etching resistance of photoresist, comprising a main body (1), a fixture (9) and a warning device (56), characterized in that: A holder (9) is mounted on the top of the main body (1); a cleaning box (17) is mounted on the inner wall of the holder (9); a waterproof shell (18) is mounted on the inner bottom wall of the cleaning box (17); a first water pump (19) is mounted on the inner bottom wall of the waterproof shell (18); a telescopic tube (27) is mounted on the output end of the first water pump (19); a first electric telescopic rod (20) is mounted on the inner top wall of the main body (1); a bearing (26) is mounted on the bottom of the telescopic tube (27); a cleaning disc (21) is mounted on the bottom of the bearing (26); and the top of the cleaning disc (21) is provided with a plurality of electric telescopic rods (20). A circular ring (22) is installed, a limiting groove (23) is provided at the top of the circular ring (22), a limiting rod (24) is installed through the inner wall of the limiting groove (23), and the top of the limiting rod (24) is connected to the bottom of the first electric telescopic rod (20), a gear groove (25) is provided at the top of the cleaning disc (21), a motor (28) is fixedly installed on the outer wall of the telescopic tube (27), a driving gear (29) is installed at the output end of the motor (28), and the driving gear (29) is meshed with the gear groove (25), and a plurality of cleaning nozzles (30) are installed at the bottom of the cleaning disc (21); An alarm device (56) is installed on the outer wall of the main body (1).

2. The device for improving the etching resistance of photoresist according to claim 1, characterized in that: The main body (1) is provided with a cover plate (2) on the top, a handle (3) on the top of the cover plate (2), a display screen (4) on the outer wall of the main body (1), a plurality of control buttons (5) on the outer wall of the main body (1), a motor (6) on the outer wall of the main body (1), a plurality of transmission rods (7) on the inner wall of the main body (1), a conveyor belt (8) on the outer wall of the transmission rod (7), and one end of the transmission rod (7) is connected to the output end of the motor (6), a storage chamber (10) on the inner wall of the holder (9), a heating chamber (31) on the inner wall of the holder (9), a No. 1 detector (50) on the inner bottom wall of the main body (1), a No. 2 detector (43) on the inner top wall of the cleaning box (17), and a partition plate (59) on the inner bottom wall of the main body (1).

3. The device for improving the etching resistance of photoresist according to claim 2, characterized in that: A fixing shell (11) is installed on the inner bottom wall of the storage chamber (10), a second water pump (12) is installed on the inner bottom wall of the fixing shell (11), a retractable connecting pipe (13) is installed on the output end of the second water pump (12), a fixing plate (15) is installed on the bottom of the connecting pipe (13), a plurality of etching nozzles (16) are installed on the bottom of the fixing plate (15), a second electric telescopic rod (14) is installed on the inner top wall of the main body (1), and the bottom of the second electric telescopic rod (14) is connected to the top of the fixing plate (15).

4. The device for improving the etching resistance of photoresist according to claim 3, characterized in that: A plurality of metal rods (33) are mounted on the inner wall of the heating chamber (31), electric heating wires (34) are mounted around the outer walls of the metal rods (33), a fan (32) is mounted on the outer wall of the holder (9), a heating tube (35) is mounted through the bottom of the heating chamber (31), a control valve (36) is mounted on the outer wall of the heating tube (35), a drying plate (37) is mounted on the bottom of the heating tube (35), a support plate (38) is mounted on the outer wall of the drying plate (37), a sealing groove (39) is mounted on the inner wall of the control valve (36), a fixing frame (40) is mounted on the outer wall of the control valve (36), a third electric telescopic rod (41) is mounted on the inner wall of the fixing frame (40), and a sealing plate (42) is mounted on one end of the third electric telescopic rod (41).

5. The device for improving the etching resistance of photoresist according to claim 4, characterized in that: The input end of the first water pump (19) extends out of the outer wall of the waterproof housing (18), the control button (5) is located on one side of the display screen (4), the input end of the second water pump (12) extends out of the outer wall of the fixed housing (11), and one end of the sealing plate (42) extends into the interior of the control valve (36).

6. The device for improving the etching resistance of photoresist according to claim 5, characterized in that: A battery (44) is installed on the inner top wall of the second detector (43); a signal transmitter (45) is installed through the bottom of the second detector (43); a signal receiver (46) is installed through the bottom of the second detector (43); a slide bar (47) is installed on the bottom of the second detector (43); a floating block (48) is installed on the outer wall of the sliding bar (47); and a reflecting plate (49) is installed on the top of the floating block (48).

7. The device for improving the etching resistance of photoresist according to claim 6, characterized in that: A lifting rod (51) is installed through the top of the No. 1 detector (50), a floating plate (52) is installed on the top of the lifting rod (51), a first spring (53) is installed around the outer wall of the lifting rod (51), a conductive block (54) is installed on the outer wall of the lifting rod (51), an L-shaped conductive rod (55) is installed on the inner top wall of the No. 1 detector (50), a partition plate (59) is installed on the inner bottom wall of the main body (1), a protective shell (60) is installed on the outer wall of the partition plate (59), a third water pump (61) is installed on the inner bottom wall of the protective shell (60), and a control switch is installed on the outer wall of the third water pump (61).

8. The device for improving the etching resistance of photoresist according to claim 7, characterized in that: A warning light (57) is installed on the inner wall of the warning device (56), and a buzzer (58) is installed on the inner wall of the warning device (56).

9. The method for using the device for improving the etching resistance of photoresist according to claim 8, characterized in that: The working steps of the photoresist etch resistance equipment are as follows: S1. The component to be etched is placed on the conveyor belt (8), the motor (6) drives the transmission rod (7) to rotate, and the transmission rod (7) drives the conveyor belt (8) to rotate, so that the component moves forward, and then after chemical etching, it continues to move forward, the first electric telescopic rod (20) drives the limit rod (24) to move downward, so that the limit rod (24) drives the ring (22) and the cleaning disk (21) to move downward, and then the cleaning disk (21) drives the telescopic tube (27) to extend, so that the cleaning disk (21) covers the component, and the first water pump (19) pumps water out of the cleaning tank (17), and cleans the component through the cleaning nozzle (30), thereby realizing the cleaning function; S2. After the cleaning is completed, the fan (32) starts to work, pumping the external air into the heating chamber (31), and the electric heating wire (34) and the metal rod (33) heat the air. Then, the control valve (36) is opened, so that the hot air is sprayed toward the component through the heating tube (35) and the drying plate (37), thereby drying the component and realizing the drying function; S3, when detecting the amount of water inside the cleaning box (17), the signal transmitter (45) transmits a signal, the signal receiver (46) receives the signal, the float (48) rises and falls with the liquid level, driving the reflector (49) to rise and fall, the reflector (49) reflects the signal, and the amount of water can be determined according to the length of the signal reflection time, thereby realizing the detection function; S4: When the warning is given, the warning light (57) and the buzzer (58) are turned on to warn the surrounding staff.

10. The method for using the device for improving the etching resistance of photoresist according to claim 9, characterized in that: The S1 also includes the following steps: S11, when etching is performed, the second electric telescopic rod (14) drives the fixed plate (15) to move downward, the etching nozzle (16) is located above the component, and the second water pump (12) draws the etching solution from the storage chamber (10) and sprays it onto the surface of the component to achieve the etching function; The S2 also includes the following steps: S21, the third electric telescopic rod (41) is shortened to drive the sealing plate (42) to move, and the sealing plate (42) is separated from the sealing groove (39), thereby opening the control valve (36) to facilitate air circulation; The S3 also includes the following steps: S31. When detecting the waste liquid content, the floating plate (52) floats along with the liquid surface. When the waste liquid is large, the floating plate (52) drives the lifting rod (51) to rise, and the first spring (53) contracts, so that the conductive block (54) contacts the conductive rod (55), and the third water pump (61) is controlled to start working, so as to pump out the waste liquid and realize the detection function.

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